JP2003232574A - Regenerator of stirling engine, and manufacturing apparatus and manufacturing method for the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing apparatus for manufacturing a regenerator of a Stirling engine, capable of reducing a variation of a clearance gap permitting operating gas to pass therethrough to efficiently perform regeneration. <P>SOLUTION: This manufacturing apparatus for the regenerator is provided with a first base body 2 where a plurality of recessed parts 2a are formed, and a second base body 3 where protruded parts 3a fitted to the recessed parts 2a are formed. The protruded parts 3a are disposed at substantially equal spaces, and formed at the substantially same height. A fluorocarbon resin layer 12 is formed on the surfaces of the first base body 2 and the second base body 3. The first base body 2 and the second base body 3 are disposed substantially parallel to each other. A pressure sensor 5 is disposed on the surface of the first base body 2. A base plate temperature measuring thermocouple 6 is provided on the surface of the second base body 3, and a ceramic heater 7 is provided on the back. A film feeder 11 and driving rollers 9, 10 are provided for automatically feeding a generator film 8. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a regenerator for a Stirling engine, an apparatus for producing the same, and a method for producing the same, and more particularly, a regenerator for a Stirling engine for efficiently performing regeneration, an apparatus for producing the same, and such a Stirling engine. And a manufacturing method for manufacturing the regenerator.

[0002]

2. Description of the Related Art A Stirling refrigerator is one type of refrigerator. First, a free piston type Stirling refrigerator will be described as an example of such a Stirling refrigerator. As shown in FIG. 7, the free piston type Stirling refrigerator has a cylinder 20 in which a working gas such as hydrogen or helium is sealed, and an expansion space 29 inside the cylinder 20.
And a compression space 28, a displacer 26 and a piston 27, a linear motor 30 for reciprocating the piston 27, a heat absorber 21 for removing heat from the outside and a linear motor 30 for reciprocating the piston 27, and an outside provided for the compression space 28. A heat radiator 22 that radiates heat is provided.

Further, the displacer 26 and the piston 27 are supported, and the displacer 2 is supported by elastic force.
6 and a leaf spring 3 for reciprocating the piston 27
1, 32 are provided.

Further, a heat radiating heat exchanger 24 is provided around the compression space 28, and a heat absorbing heat exchanger 25 is provided around the expansion space 29. The heat-radiating heat exchanger 24 and the heat-absorbing heat exchanger 25 play a role of promoting heat exchange with the outside of the refrigerator. The regenerator 101 is disposed between the heat dissipation heat exchanger 24 and the heat absorption heat exchanger 25.

Next, the operation of this refrigerator will be described. By driving the linear motor 30, the piston 27
Moves upward in the cylinder 20 and the working gas in the compression space 29 is compressed. Although the temperature of the working gas rises due to compression, it is cooled by heat exchange with the outside air via the heat radiating heat exchanger 24. Therefore, this process is an isothermal compression change.

The working gas compressed by the piston 27 in the compression space 29 flows into the regenerator 101 and the expansion space 2
It is sent to the inside of 9. When the working gas flows into the regenerator 101, the heat of the working gas is stored in the regenerator film forming the regenerator 101.

The high-pressure working gas flowing into the expansion space 29 expands when the displacer 26 reciprocating with a predetermined phase difference with the piston 27 moves downward.
At this time, although the temperature of the working gas is lowered, the working gas is heated by being exchanged with the outside air via the heat absorbing heat exchanger 25.
Therefore, this process becomes an isothermal expansion change.

Then, the displacer 26 starts to rise, and the working gas in the expansion space 29 passes through the regenerator 101 and returns to the compression space 28 again. At that time, the heat accumulated in the regenerator 101 is given to the working gas, and the temperature of the working gas rises. By repeating this series of Stirling cycles, heat is absorbed from the outside air on the heat absorber 21 side, and the temperature gradually decreases.

In this way, the compression space 28 and the expansion space 29 are
In a Stirling refrigerator that reciprocates the working gas through the regenerator 101 to extract cold heat from the heat absorber 21, heat is taken from the high-temperature working gas compressed by the regenerator 101, and expanded low temperature. The cold is recovered by applying heat to the working gas. At this time, as the heat storage amount in the regenerator 101 is larger, the heat is effectively utilized,
This will improve the cooling performance of the Stirling refrigerator.

Regenerator 1 in the Stirling refrigerator
01 is formed by rolling a resin regenerator film around a bobbin. The surface of the regenerator film is pre-punched with a needle to an appropriate depth. As a result, a protrusion is formed on the opposite surface of the regenerator film. When the regenerator film is wound into a roll, the protrusions come into contact with the adjacent regenerator films, so that a gap (gap) through which the working gas passes is formed between the regenerator films.

Heat is accumulated in the regenerator as the working gas passes through the gap. The efficiency of the regenerator is a function of the heat capacity of the regenerator film, the gap, and the thickness of the regenerator film.
In order to improve the efficiency of the regenerator, if the thickness of the regenerator film is the same, it is necessary to precisely control the size of the gap.

[0012]

However, the conventional regenerator has the following problems. The protruding portion of the regenerator film of the regenerator 101 is formed by mechanically making a hole in the regenerator film with a needle having an irregular tip shape.

For this reason, it is difficult to precisely control the height of the protrusion, and the shape and height of the protrusion formed on the regenerator film vary greatly. As a result, the gap of the regenerator film in the regenerator 101 varies, and the efficiency of the regenerator 101 deteriorates.

Further, minute dusts are generated when mechanically making holes in the regenerator film by the needles, and these minute dusts are one of the factors that impair the performance and reliability of the Stirling refrigerator.

The present invention has been made to solve the above-mentioned problems, and one object thereof is to provide a regenerator for a Stirling engine in which variation in a gap through which a working gas passes is reduced to perform highly efficient regeneration. Another object is to provide a manufacturing apparatus for manufacturing such a Stirling engine regenerator, and still another object is to provide a manufacturing method for such a Stirling engine regenerator. is there.

[0016]

In the apparatus for manufacturing a regenerator of the present Stirling engine (hereinafter referred to as "manufacturing apparatus"),
Provided are a first substrate and a second substrate which are preheated to a temperature between the glass transition point and the melting point of the regenerator film and can be fitted to each other, and in which predetermined patterned concave and convex portions are respectively formed. Has been. By sandwiching the regenerator film between the first substrate and the second substrate with a constant pressure, a predetermined protrusion is easily formed on the regenerator film.

According to this manufacturing apparatus, projections having an arbitrary shape and a predetermined height are formed on the regenerator film with good reproducibility. By winding the regenerator film in a roll, variations in the gap of the regenerator film are reduced and a desired working gas passage is secured. as a result,
In the regenerator of the Stirling engine, the efficiency as the regenerator is improved, and it is possible to maintain the performance and improve the reliability of the Stirling engine.

A semiconductor crystal substrate such as a metal plate or silicon may be used as the first base and the second base. In particular, when a semiconductor crystal substrate is applied, it is preferable to reinforce by reinforcing metal plates to secure the mechanical strength of each substrate.

Precision cutting technology is generally used as a method for forming the concave portion and the convex portion that are fitted to each other on the first substrate and the second substrate, but is applied in a process for forming a semiconductor element. The lithography technology used may be applied.

In addition, LIGA (Lithographic galvanofo
It may be formed by directly performing a plating treatment on the surface of the metal plate using the rmung Abformung) technique. further,
Anisotropic etching may be performed on the single crystal semiconductor substrate to form protrusions or depressions of a mesa structure or a pyramid structure. Alternatively, it may be formed by combining the above-mentioned lithography technique and LIGA technique.

The concrete shape of the convex portion may be any shape that can be fitted with the concave portion, such as a cylindrical shape, a conical shape, a truncated cone, a prism, a pyramid shape. On the other hand, the concave portion need not have a shape corresponding to the shape of the convex portion as long as the concave portion has a shape capable of receiving the convex portion and closely adhering the flat portion of the first base body to the flat portion of the second base body. It is preferable that there is a gap of about the thickness of the regenerator film so that the regenerator film can be sandwiched when the first substrate and the second substrate are brought into close contact with each other.

The shape of the concave portion does not have to be similar to the shape of the convex portion. For example, the shape of the convex portion may be conical and the shape of the concave portion may be cylindrical.

After forming the concave portions or the convex portions on the first and second substrates, the surface of each substrate may be coated with Teflon (R) resin. By applying such a coating, the regenerator film can be satisfactorily peeled from each substrate after the regenerator film is sandwiched.

Further, in the manufacturing apparatus, the first base and the second base
A heater is provided on each back surface for heating the substrate. If the regenerator film can be heated to a predetermined temperature, the heater need not be provided on both the first base and the second base, and may be provided on either one.

The heater may have a structure capable of heating by energizing the first base and the second base itself. Alternatively, an indirectly heated heater such as an infrared heater may be provided at a location separated from the first base and the second base to indirectly heat each base.

Further, in the manufacturing apparatus, the pressure sensor is provided on either one of the first base and the second base.
As a result, the first base body and the second base body set to a predetermined temperature are
The regenerator film can be sandwiched between the substrates at a predetermined pressure, and desired protrusions can be transferred to the regenerator film.

The structure of the present invention will be described in detail below. A regenerator for a Stirling engine according to one aspect of the present invention is disposed between a compression space and an expansion space in the Stirling engine, and operates for recovering or releasing a heat amount from a working gas that reciprocates between the compression space and the expansion space. A regenerator of a Stirling engine having a regenerator film, which serves as a gas flow path, and a surface of the regenerator film is provided with a plurality of convex portions each having a predetermined height and having a predetermined distance from each other. Has been formed.

The apparatus for manufacturing a regenerator for a Stirling engine according to another aspect of the present invention is arranged between a compression space and an expansion space in the Stirling engine, and recovers heat from the working gas that reciprocates between the compression space and the expansion space. Or a regenerator manufacturing apparatus of a Stirling engine having a regenerator film for discharging, the first substrate for sandwiching the regenerator film from one side of the regenerator film and the other side of the regenerator film; A second base is provided. On either one of the first base and the second base, convex portions having a predetermined height are formed at predetermined intervals. Also,
On the other side of the first base and the second base, there is formed a concave portion into which the convex portion fits with the regenerator film sandwiched between the first and second substrates.

It is preferable that one of the first substrate and the second substrate is provided with a heater portion for heating the regenerator film.

Further, it is preferable that a temperature detecting portion is provided on the surface of either the first substrate or the second substrate.

Further, it is preferable that a fluorocarbon layer is formed on the surface of at least one of the first substrate and the second substrate.

Further, it is preferable that a pressure detecting portion is provided on the surface of either the first substrate or the second substrate.

In a method of manufacturing a regenerator for a Stirling engine according to still another aspect of the present invention, a heat quantity is generated from a working gas that is disposed between a compression space and an expansion space of the Stirling engine and that reciprocates between the compression space and the expansion space. A method of manufacturing a regenerator for a Stirling engine having a regenerator film for recovery or release, comprising the following steps.
The first base body and the first base body, which are spaced apart from each other by a predetermined distance and formed with a convex portion having a predetermined height, and the second base body formed with a concave portion that engages with the convex portion are opposed to each other, The regenerator film is arranged between the two substrates, and the regenerator film is sandwiched between the first substrate and the second substrate.

In the step of sandwiching the regenerator film,
The regenerator film is preferably heated at a temperature not lower than the glass transition point of the regenerator film and lower than its melting point.

[0035]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiment 1 An apparatus for manufacturing a regenerator for a Stirling refrigerator according to Embodiment 1 of the present invention will be described. As shown in FIG. 1 and FIG. 2, in a regenerator manufacturing apparatus 1, a first base 2 having a plurality of recesses 2a formed therein and a protrusion 3 fitted into the recess 2a.
and a second base body 3 on which a is formed. Convex part 3
The letters a are arranged at substantially equal intervals and are formed at substantially the same height.

A fluorocarbon resin layer 12 is formed on the surfaces of the first substrate 2 and the second substrate 3 in order to easily separate the sandwiched regenerator film 8. The first base 2 and the second base 3 are arranged substantially parallel to each other. The first base body 2 and the second base body 3 in a state where the first base body 2 and the second base body 3 are substantially parallel to each other.
A drive device 4 is provided for bringing the and into close contact with each other.

A pressure sensor 5 is arranged on the surface of the first substrate 2. A substrate temperature measuring thermocouple 6 is provided on the front surface of the second base 3, and a ceramic heater 7 is provided on the back surface. Further, a film feeder 11 for automatically feeding the regenerator film 8 and drive rollers 9, 10 are provided.

Next, the operation of the above-described regenerator manufacturing apparatus will be described. First, a polyethylene resin film having a thickness of about 60 μm is produced by a uniaxial stretching method as a base film in a regenerator for a Stirling engine. Next, in the regenerator film manufacturing apparatus for a Stirling engine, the base material film (regenerator film 8) is set with the ceramics heater 7 heated at about 150 ° C.

By sandwiching the regenerator film 8 between the first substrate 2 and the second substrate 3 under the pressure of 5 Kg / cm ² by the driving device 4, a substantially cylindrical convex portion is formed on the surface of the regenerator film 8. To form. First base 2 and second base 3
Then, the regenerator film 8 is sent apart from each other, and a convex portion is similarly formed on the surface of the regenerator film 8.

By repeating this operation in sequence, the regenerator film 8 having a predetermined length is produced. As shown in FIG. 3, the produced regenerator film 8 is rolled on a cylindrical bobbin of the regenerator. In this way, the regenerator 13 of the Stirling engine is obtained.

According to this regenerator manufacturing apparatus, the convex portion 15 having an arbitrary shape and a predetermined height is formed on the regenerator film 8 with good reproducibility. By winding the regenerator film 8 in a roll, variations in the gap in the regenerator film are reduced and a desired working gas passage can be secured.

Embodiment 2 Next, in the above-described regenerator manufacturing apparatus for a Stirling engine, a method for forming predetermined irregularities on the first substrate and the second substrate for forming the protrusions on the surface of the regenerator film. As an example, a method using photolithography and a regenerator of a Stirling refrigerator formed by the method will be described.

First, L is formed on a Si substrate having a plane orientation (001).
Silicon nitride (S
i ₃ N ₄ ) film is formed. Then, a resist is applied on the Si substrate. The resist is subjected to predetermined exposure and development so that 200 μm square opening patterns are formed at 1 cm intervals. Next, the silicon nitride film exposed on the surface is selectively removed by oxygen plasma.

Several% to several tens% heated to about 60 to 95 ° C
By immersing it in a NaOH solution for about 20 minutes to form a Si substrate in which inverted pyramid-shaped openings having a depth of about 100 μm are arranged at intervals of about 1 cm. After that, the resist is peeled off by performing ultrasonic cleaning using acetone,
A patterned substrate is formed which will be the first base.

On the other hand, a poly (methyl methacrylate) having a thickness of about 80 μm is formed on a Si substrate having a plane orientation (001).
thacrylate). A Si substrate is covered with a mask in which circular holes having a diameter of 100 μm are arranged at 1 cm intervals.
5KV with mask on, dose amount 7.2Amin
X-ray is irradiated at.

Then, the polymethylmethacrylate in the portion irradiated with the X-rays is selectively peeled off by a GG developing solution at a temperature of about 37 ° C. to form a patterned Si substrate. Next, titanium (Ti) is deposited to a thickness of about 100 nm on the Si substrate by the vacuum evaporation method.

Next, plating is performed in a nickel sulfamate solution at a temperature of 37 ° C. under a current density of 0.4 A / dm ² , so that polymethyl methacrylate is selectively removed from the peeled portion. About 80 μm thick nickel (Ni)
To form. After that, polymethylmethacrylate is removed with a methyl ethyl ketone solution to form a patterned second substrate. Next, a thickness of about 1 μm is sprayed on the surfaces of the first and second substrates, which are patterned in this way, by a spray method.
A Teflon (R) resin was coated so as to have a thickness of m.

The respective substrates formed in this way are replaced with the first base 2 and the second base 2 as shown in FIGS.
It is arranged as the base 3. As described in the first embodiment, by sandwiching the regenerator film 8 having a thickness of about 30 μm between the first base 2 and the second base 3 under the temperature of about 110 ° C., as shown in FIG. A plurality of pyramid-shaped protrusions 15 having a uniform height and arranged at equal intervals are formed on the surface of the regenerator film 8.

In the regenerator 13 formed by rolling the regenerator film 8 as described above, the gap variation in the regenerator film 8 is reduced to secure a desired working gas passage. Can
It is possible to maintain the performance and improve the reliability of the Stirling refrigerator.

Embodiment 3 Next, in the above-described regenerator manufacturing apparatus for a Stirling engine, a method of forming predetermined irregularities on the first substrate and the second substrate for forming the protrusions on the surface of the regenerator film. Another example is LIGA (Lithographic galvanoformun
g Abformung) technology and a Stirling refrigerator regenerator formed by the method.

First, a polymethylmethacrylate (Polymethylmethacrylate) having a thickness of about 120 μm is formed on a Si substrate having a plane orientation (001).
apply). A Si substrate is covered with a mask having circular holes with a diameter of 200 μm. With the mask on, X-ray irradiation is performed at 5 KV and a dose amount of 7.2 Amin.

After that, the polymethylmethacrylate in the portion irradiated with the X-rays is selectively peeled off by a GG developer having a temperature of about 37 ° C. to form a patterned Si substrate. Next, titanium (Ti) is deposited to a thickness of about 200 nm on the Si substrate by the vacuum evaporation method.

Next, plating was performed in a nickel sulfamate solution at a temperature of 37 ° C. under a current density of 0.4 A / dm ² , so that polymethyl methacrylate was selectively removed from the peeled portion. About 80 μm thick nickel (Ni)
To form. After that, polymethylmethacrylate is removed with a methyl ethyl ketone solution to form a patterned first substrate.

On the other hand, a polymethylmethacrylate (Polymethylmethacrylate) having a thickness of about 120 μm is formed on a Si substrate having a plane orientation (001).
(methacrylate) is applied to cover the Si substrate with a mask in which only a circular portion having a diameter of 300 μm is not irradiated with X-rays. 5KV with mask on, dose 7.2
Irradiate with X-rays at Amin.

After that, the polymethylmethacrylate in the portion irradiated with the X-rays is selectively peeled off by a GG developer having a temperature of about 37 ° C. to form a patterned Si substrate. Next, titanium (Ti) is deposited to a thickness of about 200 nm on the Si substrate by the vacuum evaporation method.

Next, plating was performed in a nickel sulfamate solution at a temperature of 37 ° C. under a current density of 0.4 A / dm ² , so that polymethyl methacrylate was selectively removed from the peeled portion. Thickness of about 130 μm nickel (N
i) is formed. After that, polymethylmethacrylate is removed with a methyl ethyl ketone solution to form a patterned second substrate. Next, the Teflon (R) resin was coated on the surfaces of the substrate to be the first substrate and the substrate to be the second substrate, which were patterned in this way, by a spray method so that the thickness was about 1 μm.

The respective substrates formed in this manner are replaced with the first base 2 and the second base 2 as shown in FIGS.
It is arranged as the base 3. As described in the first embodiment, by sandwiching the regenerator film 8 between the first base 2 and the second base 3, as shown in FIG. 5, the heights are uniform and are arranged at equal intervals. A plurality of cylindrical convex portions 15
Are formed on the surface of the regenerator film 8.

In the regenerator 13 formed by rolling the regenerator film 8 as described above, variations in the gap in the regenerator film 8 are reduced and a desired working gas passage is secured. Can
It is possible to maintain the performance and improve the reliability of the Stirling refrigerator.

Embodiment 4 Next, a regenerator of a Stirling refrigerator having a regenerator film formed by the above-mentioned regenerator manufacturing apparatus will be described. A regenerator 13 is obtained by rolling a regenerator film 8 on which a predetermined convex portion is formed by a regenerator manufacturing device, around a cylindrical bobbin 16.

As shown in FIGS. 6 and 7, the regenerator 13 having the regenerator film 8 has a heat radiating heat exchanger 24.
And the heat exchanger 25 for heat absorption. A heat absorber 21 is arranged above the cylinder 20, and a radiator 22 is arranged below the cylinder 20. The radiator 22 and the cylinder 20 are housed in a Stirling engine main body container 23.

The regenerator film applied to the regenerator of this Stirling refrigerator is formed by the above-mentioned regenerator manufacturing apparatus. As a result, the projection 15 having an arbitrary shape and a predetermined height is formed on the surface of the regenerator film 8 with good reproducibility.

As a result, in the regenerator 13 of the Stirling engine obtained by winding the regenerator film 8 in a roll, variations in the gap of the regenerator film 8 are reduced and a desired working gas passage is secured. as a result,
The efficiency of the regenerator of the Stirling refrigerator is improved, and the performance of the Stirling refrigerator can be maintained and the reliability can be improved.

The embodiments disclosed this time are to be considered as illustrative in all points and not restrictive. The present invention is shown not by the above description but by the scope of the claims, and is intended to include meanings equivalent to the scope of the claims and all modifications within the scope.

[0064]

According to the regenerator manufacturing apparatus and the regenerator manufacturing method of the present Stirling engine, protrusions having an arbitrary shape and a predetermined height are formed on the regenerator film with good reproducibility. . By winding the regenerator film in a roll, variations in the gap of the regenerator film are reduced and a desired working gas passage is secured.

As a result, in the regenerator of the Stirling engine, the efficiency as the regenerator is improved, and the performance and reliability of the Stirling engine can be maintained.

[Brief description of drawings]

FIG. 1 is a side view of a regenerator manufacturing apparatus according to a first embodiment of the present invention.

FIG. 2 is a partially enlarged cross-sectional view showing a structure of a first base and a second base in the regenerator manufacturing apparatus shown in FIG. 1 in the same embodiment.

FIG. 3 is a perspective view showing a structure of a regenerator in the embodiment.

FIG. 4 is a perspective view showing a regenerator film obtained by a method for manufacturing a regenerator manufacturing apparatus according to a second embodiment of the present invention.

FIG. 5 is a perspective view showing a regenerator film obtained by a method for manufacturing a regenerator manufacturing apparatus according to a third embodiment of the present invention.

FIG. 6 is an exploded perspective view showing a regenerator of a Stirling engine according to a fourth embodiment of the present invention.

FIG. 7 is a cross-sectional view of a conventional Stirling engine.

[Explanation of symbols]

1 regenerator film manufacturing apparatus, 2 first substrate, 3 second
Substrate, 4 drive, 5 pressure sensor, 6 thermocouple,
7 Ceramic heater, 8 Regenerator film, 9, 10
Drive roller, 11 film feeder, 12 fluorocarbon resin layer, 13 regenerator, 15 convex portion, 16
Cylindrical bobbin, 20 body cylinder, 21 heat absorber, 22
Radiator, 23 Main body container, 24 Heat radiating heat exchanger, 25
Heat exchanger for heat absorption, 26 displacer, 27 piston, 28 compression space, 29 expansion space, 30 linear motor, 31 displacer spring, 32 piston spring.

Claims (8)

[Claims] 1. A regenerator, which is disposed between a compression space and an expansion space in a Stirling engine and serves as a flow path for the working gas for recovering or releasing a heat amount from the working gas that reciprocates between the compression space and the expansion space. What is claimed is: 1. A Stirling engine regenerator having a film, wherein the regenerator film has a plurality of convex portions formed on a surface of the regenerator film and having a predetermined height and having a predetermined height. 2. A regenerator of a Stirling engine having a regenerator film for recovering or releasing a heat quantity from a working gas which is arranged between a compression space and an expansion space in the Stirling engine and which reciprocates between the compression space and the expansion space. And a first base body and a second base body for sandwiching the regenerator film from one surface side and the other surface side of the regenerator film, the first base body and the second base body On either of the two substrates,
Projections having a predetermined height are formed at a predetermined distance from each other, and the first base and the second base are provided on the other side of the first base.
An apparatus for manufacturing a regenerator for a Stirling engine, wherein a recess is formed in which the protrusion fits in a state where the regenerator film is sandwiched between a substrate and the second substrate. 3. A regenerator for a Stirling engine according to claim 2, wherein a heater unit for heating the regenerator film is provided on one of the first substrate and the second substrate. apparatus. 4. The apparatus for manufacturing a regenerator for a Stirling engine according to claim 3, wherein a temperature detection unit is provided on the surface of either one of the first base and the second base. 5. The apparatus for manufacturing a regenerator for a Stirling engine according to claim 2, wherein a fluorocarbon layer is formed on the surface of at least one of the first base and the second base. . 6. The apparatus for manufacturing a regenerator for a Stirling engine according to claim 2, wherein a pressure detection unit is provided on a surface of either one of the first base and the second base. . 7. A regenerator of a Stirling engine having a regenerator film disposed between a compression space and an expansion space in a Stirling engine, and having a regenerator film for recovering or releasing a heat amount from a working gas that reciprocates between the compression space and the expansion space. And a second base body in which a convex portion having a predetermined height and having a predetermined height is formed, and a second base body in which a concave portion that fits the convex portion is formed are opposed to each other. Then, the reproduction of a Stirling engine comprising the step of disposing the regenerator film between the first substrate and the second substrate and sandwiching the regenerator film between the first substrate and the second substrate. Manufacturing method. 8. In the step of sandwiching the regenerator film, the regenerator film is heated at a temperature higher than the glass transition point of the regenerator film and lower than its melting point. A method for manufacturing a regenerator for a Stirling engine according to claim 7.