JP2003229610A5 - - Google Patents

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Publication number
JP2003229610A5
JP2003229610A5 JP2002025398A JP2002025398A JP2003229610A5 JP 2003229610 A5 JP2003229610 A5 JP 2003229610A5 JP 2002025398 A JP2002025398 A JP 2002025398A JP 2002025398 A JP2002025398 A JP 2002025398A JP 2003229610 A5 JP2003229610 A5 JP 2003229610A5
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JP
Japan
Prior art keywords
oxide superconducting
film
interlayer insulating
insulating film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002025398A
Other languages
English (en)
Japanese (ja)
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JP2003229610A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002025398A priority Critical patent/JP2003229610A/ja
Priority claimed from JP2002025398A external-priority patent/JP2003229610A/ja
Publication of JP2003229610A publication Critical patent/JP2003229610A/ja
Publication of JP2003229610A5 publication Critical patent/JP2003229610A5/ja
Pending legal-status Critical Current

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JP2002025398A 2002-02-01 2002-02-01 酸化物超電導接合基板の製造方法 Pending JP2003229610A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002025398A JP2003229610A (ja) 2002-02-01 2002-02-01 酸化物超電導接合基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002025398A JP2003229610A (ja) 2002-02-01 2002-02-01 酸化物超電導接合基板の製造方法

Publications (2)

Publication Number Publication Date
JP2003229610A JP2003229610A (ja) 2003-08-15
JP2003229610A5 true JP2003229610A5 (cg-RX-API-DMAC7.html) 2005-07-21

Family

ID=27747562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002025398A Pending JP2003229610A (ja) 2002-02-01 2002-02-01 酸化物超電導接合基板の製造方法

Country Status (1)

Country Link
JP (1) JP2003229610A (cg-RX-API-DMAC7.html)

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