JP2003222363A - Air cleaning method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an air processing method having a high removal efficiency for gaseous chemical contaminants in the air, using a compact processing device, with small pressure loss, and low cost. <P>SOLUTION: This air cleaning method comprises a humidifying step for humidifying, by a humidifying means 13, the air containing the chemical contaminants and taking a part of the gaseous contaminants in the air into excess moisture for removal from the air; and a dehumidifying step for dehumidifying the humidified air by a condensing means 23 and taking the gaseous chemical contaminants remaining without being removed in the humidifying step into condensate for removal. Air is led from the front opening part of a honeycomb 1 by using the metal oblique honeycomb 1 having opened both front and rear faces and upper and lower faces disposed on one or both of the humidifying means 13 and the condensing means 23, and water is supplied from the front opening part. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to an air cleaning method for cleaning chemical pollutants in the air with water. More specifically, the present invention relates to an air cleaning method for air supplied to a clean room such as a semiconductor or liquid crystal device manufacturing factory, a pharmaceutical factory or a life science-related facility.

[0002]

2. Description of the Related Art In semiconductor and liquid crystal device manufacturing factories, pharmaceutical factories, life science related facilities, etc., in order to improve product yield or ensure quality, in addition to conventional particulate contaminants, gaseous chemical contamination It is also desired to remove the substance. Examples of such chemical pollutants include inorganic metal elements such as sodium, potassium, calcium, and boron, anions such as fluorine ion, chloride ion, nitrate ion, nitrite ion, sulfate ion, and sulfite ion, and ammonium. Examples thereof include cations such as ions. Conventional particulate contaminants can be removed with a dust collecting filter such as a ULPA filter, but these chemical contaminants cannot be removed with a ULPA filter or the like.

For this reason, chemical pollutants in the air are conventionally removed by a so-called water shower method using a shower of water droplets or a chemical filter capable of adsorbing and removing chemical components. Here, the former method of using a water shower is a method of removing air containing chemical contaminants by spraying water droplets.

[0004]

However, the former method using a water shower has a low efficiency of removing chemical pollutants because the contact efficiency between the air to be treated and water is poor. For this reason, the depth of the humidifying means composed of the water shower device is required to be several meters, which requires a vast installation space.
There was a problem that the pressure loss also increased. In addition, as the treated water for the water shower, usually expensive deionized water (DI
Although W) is used, there is a problem that the cost increases because a large amount of treated water is required. Furthermore, in order to reduce the cost, DIW is usually used in circulation,
There is a problem that the chemical pollutants once absorbed are likely to re-evaporate. On the other hand, the latter method using a chemical filter has a problem in that the cost is high because the chemical filter itself is expensive and the adsorption capacity has a life.

Therefore, it is an object of the present invention to provide an air cleaning method which has a high efficiency of removing chemical pollutants in the air, a compact processing apparatus, a small pressure loss, and a low cost.

[0006]

Under such circumstances, as a result of intensive investigations by the present inventors, a metal oblique honeycomb was used for one or both of the humidifying means and the condensing means, and the metal oblique honeycomb was used. If the air is introduced from the front opening of the and the water is supplied from the upper opening, the air introduced into the metal oblique honeycomb and the supplied water efficiently contact each other, and the humidifying means efficiently. The humidity in the air can be increased. Further, in the condensing means, it was found that the gaseous chemical pollutants were efficiently taken in and removed from the condensed water, and the present invention was completed.

That is, according to the first aspect of the present invention, air containing chemical pollutants is introduced from the front opening of a metal oblique honeycomb having front and rear surfaces and upper and lower surfaces opened. It is characterized in that the air is humidified by supplying water from the upper surface opening, and at least a part of the chemical pollutants is taken into the excess water obtained, thereby removing the chemical pollutants from the air.

According to a second aspect of the present invention, air containing chemical pollutants is introduced from the front opening of a metal oblique honeycomb in which both front and rear surfaces and upper and lower surfaces are opened, and at the same time, an upper surface opening is provided. It is characterized in that the air is dehumidified by supplying water from the section, and at least a part of the chemical pollutants is taken into the obtained condensed water to remove the chemical pollutants from the air.

According to a third aspect of the present invention, the air containing chemical pollutants is introduced, and the air and water are contacted to humidify the air. By incorporating at least a part of the substance, a humidification step of removing chemical pollutants from the air, and introducing air containing chemical pollutants, by contacting the air and water, dehumidifying the air, An air cleaning method having a dehumidifying step of removing chemical pollutants from the air by incorporating at least a part of the chemical pollutants in the obtained condensed water, the humidifying means used in the humidifying step, and the dehumidifying means. As the condensing means to be used, a diagonal metal honeycomb having front and rear surfaces and upper and lower surfaces opened is used for one or both of the both means.

According to a fourth aspect of the present invention, air containing chemical pollutants is introduced from the front opening of a metal oblique honeycomb having front and rear surfaces and upper and lower surfaces opened, and an upper surface opening. From the air, the air is humidified in the front part of the oblique metal honeycomb, and at least a part of the chemical pollutants is taken into the excess water obtained, thereby removing the chemical pollutants from the air. Then, the air is dehumidified, and at least a part of the chemical pollutants is taken into the resulting condensed water to remove the chemical pollutants from the air.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION In the present invention, the humidifying means means
By providing a means for supplying moisture to the air to be treated and a means for collecting the moisture and a temperature adjusting means as appropriate, the means for humidifying the air to be treated to a predetermined humidity and obtaining excess moisture. The humidifying means humidifies the air to be treated and removes at least a part of the gaseous chemical contaminants contained in the air to be treated into the excess water.

The condensing means is provided with a low temperature part which can come into contact with the air to be treated and a means for collecting water, so as to dehumidify the air to be treated to a predetermined humidity and obtain condensed water generated during dehumidification. Is. The condensing means removes the chemical pollutants in the air to be treated or the chemical pollutants not removed by the humidifying means by incorporating them into condensed water generated during dehumidification as much as possible.

In the present invention, the chemical pollutants include
It means a fine chemical substance that passes through the stitches of a high performance (ULPA) filter. For example, inorganic metal elements such as sodium, potassium, calcium, and boron, fluoride ions, chloride ions, nitrate ions, nitrite ions. ,
Examples thereof include anions such as sulfate ion and sulfite ion and cations such as ammonium ion.

In the present invention, one or both of the humidifying means and the condensing means use a metal oblique honeycomb in which both front and rear surfaces and upper and lower surfaces are open. The metal oblique honeycomb will be described with reference to FIG. Here, the metal oblique honeycomb 1 is a honeycomb shape in which a plurality of metal corrugated sheets 2 and 3 (hereinafter, also referred to as “metal corrugated sheet”) having a corrugated shape that propagates in one direction are stacked. The metal corrugated sheets 2 and 3 to be laminated are laminated so that the wave propagation directions of every other sheet diagonally intersect, and the wave propagation direction of every two layers. Are honeycomb-shaped bodies arranged so as to be substantially in the same direction.

The metal oblique honeycomb 1 has four surfaces 10 which are perpendicular to the surfaces parallel to the metal corrugated sheets 2 and 3.
1 to 104 is cut to form a rectangular parallelepiped, and the cut surface is not parallel to the wave propagation direction of the metal corrugated sheets 2 and 3 and is not perpendicular to the rectangular parallelepiped. When one is placed on the lower side and the outermost layers 105 and 106 of the metal corrugated sheets 2 and 3 are placed on the left and right sides, respectively, the four front and back sides 102 and 103 and the four upper and lower sides 101 and 104, which are cut surfaces, The honeycomb cells are all opened, and the left and right surfaces 105 and 106 are closed by the metal corrugated sheets 2 and 3. Further, for example, the front and rear surfaces 102 and 103 of the cut surface are
The cells extending diagonally upward and the cells extending diagonally downward are formed alternately. The oblique angle (reference numeral X in the figure) with respect to the inflow / outflow direction (horizontal direction) of air when viewed from the front and rear surfaces of the cell extending obliquely upward is usually 15 to 45 degrees, preferably 25 to 35. Within the range of degrees. It is preferable that the above-mentioned oblique angle is within this range, because the flow-down velocity is in the appropriate range and the contact efficiency is improved.

In the above-described metal diagonal honeycomb 1, the angle at which the wave propagating directions of the stacked metal corrugated sheets 2 and 3 alternate with each other (symbol Y in the figure) is
It is usually 30 to 90 degrees, preferably 25 to 35 degrees. When such metal corrugated sheets 2 and 3 are laminated so as to intersect with each other within the above angle range, the air to be treated and the air to be treated when the oblique angle (X) is set to 15 to 45 degrees as described above. Since the area where water substantially contacts the honeycomb cells becomes large, the contact between the air to be treated and the water, that is, the humidification efficiency of the air to be treated in the humidifying means, and the air to be treated in the condensing means This is preferable because the efficiency of dehumidification due to the condensation of the water content is increased. That is, as will be described later, in the present invention, the air to be treated is introduced from the front opening 103 of the metal oblique honeycomb 1, and the water is supplied from the top opening 101, for example, by the water supply duct 4, to the metal oblique honeycomb. 1 metal corrugated sheet 2,
3, the surface flows downward, so that the air flow direction of the air to be treated and the water flow direction of the permeation wall surface maintain an appropriate angle, and the contact efficiency becomes high.

Metal oblique honeycomb 1 used in the present invention
The height of the cell, that is, the height of the peak of the cell indicating the size of the crests and troughs of the wave is usually 1.5 to 8 mm, preferably 2.
It is 0 to 5 mm. If the cell size is less than 1.5 mm, manufacturing is difficult and pressure loss increases, which is not preferable. Further, if the cell size exceeds 8 mm, the efficiency of removing gaseous chemical pollutants decreases, which is not preferable.

The width of the cells in the state of the metal corrugated sheets 2 and 3 of the oblique metal honeycomb 1, that is, the cell pitch is usually 2.5 to 12.0 mm, preferably 3.
It is 0 to 10.0 mm. Also, the metal diagonal honeycomb 1
The dimension between the front opening and the rear opening, that is, the thickness (t) of the metal oblique honeycomb 1 is not particularly limited, but is usually 100 to 1000 mm, preferably 200 to 8.
It is 00 mm. Further, in the case of removing chemical contaminants and dehumidifying with one honeycomb at a time of high humidity such as rainy season, it is preferable to use a thick one of about 800 mm in order to sufficiently dehumidify. . If the thickness is less than 100 mm, the removal efficiency of NO ₂ ^{− and the} like is lowered, which is not preferable, and if the thickness exceeds 1000 mm, the removal efficiency of chemical pollutants is not further improved and the pressure loss increases. Therefore, it is not preferable. In the present invention, the thickness of the metallic skewed honeycomb 1 may be within the above range when a plurality of the metallic skewed honeycombs 1 are used. For example, when a metal skewed honeycomb having a thickness of 300 mm is used, three metal skewed honeycombs having a thickness of 100 mm are stacked in the thickness direction to give a total thickness of 300.
It may be mm. The water shower that has been conventionally used as a humidifying means requires a depth of about several meters in the apparatus. However, when the metal oblique honeycomb according to the present invention is used as the humidifying means, the thickness of the metal oblique honeycomb itself is increased. Since the size is at most about 400 mm, the installation space of the device can be significantly reduced. Such drastic space saving satisfies the demand for rationalization in semiconductor manufacturing factories and the like. Furthermore, the power of the pump that circulates the water is much less than that of the conventional water shower, and it is possible to achieve significant energy savings.

The material of the oblique metal honeycomb used in the present invention is not particularly limited as long as its strength, chemical stability and the like satisfy the requirements of the metal honeycomb carrier, and examples thereof include stainless steel and aluminum. , Copper and the like. The thickness is 10 to 200 μm. When it is thinner than 10 μm, strength and workability are poor, and when it exceeds 200 μm, it is heavy and pressure loss is large. The preferred thickness is 30-100 μm.

The metal corrugated sheets 2 and 3 used in the present invention are formed by corrugating a flat metal foil, and have irregularities formed so that waves propagate in one direction in the plane of the metal foil. It was done. Here, corrugation processing means processing a plate-shaped material into a corrugated material.

As a method of forming the metal corrugated sheets 2 and 3, a known corrugator is used in which a flat sheet is passed between a plurality of gears having undulating undulations having a radial amplitude. Is mentioned. As a method of molding the above-mentioned metal skewed honeycomb 1 from the obtained metal corrugated sheets 2 and 3, for example, first, above-mentioned metal corrugated sheets 2 and 3 are 100 mm in length (thickness dimension after molding) × A rectangular corrugated sheet is prepared by arranging a rectangular cutting die having a width of about 300 mm so that the wave propagation direction is 15 to 45 degrees with respect to one side of the rectangular die, and cutting the corrugated sheet. Arranged rectangular corrugated sheets so that the wave propagation directions of every other sheet intersect.
The method of laminating these is mentioned. When manufactured in this manner, the vertical length of the cutting die is the thickness of one metal oblique honeycomb. For this reason, for example, when the thickness of the metal oblique honeycomb required for the humidifying means and the condensing means, that is, when the dimension between the front opening and the rear opening of the metal oblique honeycomb is 300 mm, Length 100mm
It is advisable to use three 100-mm-thick metal oblique honeycombs manufactured by the cutting type in a stack in the thickness direction.

In the present invention, when the metal oblique honeycomb is used for one or both of the humidifying means and the condensing means, the metal oblique honeycomb is arranged so that both front and rear surfaces and upper and lower surfaces are open. . By arranging the metal diagonal honeycomb in this way, it becomes possible to introduce the air to be treated from the front opening of the metal diagonal honeycomb and to supply water from the upper opening, and The contact with water makes the aeration direction of the air to be treated and the flowing direction of the water orthogonal to each other. Therefore, when a metal oblique honeycomb is used as the humidifying means or the condensing means, the contact efficiency between the air to be treated and water is higher than that of the conventional humidifying means using a water shower or the condensing means using a cooler. Therefore, the chemical contaminants contained in the air to be treated can be efficiently removed, and the depth of the apparatus can be greatly reduced.

When the diagonal metal honeycomb is used for the humidifying means or the condensing means, the specific humidifying means or condensing means using the metallic diagonal honeycomb is, for example, both front and rear surfaces and upper and lower surfaces are open. Diagonally arranged metal honeycomb, a water supply unit for supplying water from the upper surface opening of the metal oblique honeycomb, a water recovery unit for recovering water flowing down the metal oblique honeycomb, and a water supply unit And a heat exchanger or the like for adjusting the temperature of the water supplied to. When the water that has flowed down is not collected, a water discharge unit may be provided instead of the water collection unit. When the metal oblique honeycomb is used for both the humidifying means and the condensing means,
The humidifying means and the condensing means have the same aspect, but the water temperature of the water supplied to the dehumidifying means may be lower than the water temperature of the water supplied to the humidifying means. The water temperature of the water supplied to the humidifying means and the condensing means may be appropriately determined.

In the present invention, as a usage pattern of the metal oblique honeycomb, specifically, the first embodiment in which the metal oblique honeycomb is used as both the humidifying means and the condensing means, the metal oblique honeycomb is used. Is used only for the humidifying means, the third embodiment is used only for the condensing means using the metal oblique honeycomb, and the humidifying means and the condensing means are sequentially performed in one metal oblique honeycomb. A fourth embodiment can be mentioned.

In the first embodiment, since the metal oblique honeycomb is used for both the humidifying means and the condensing means due to the contact efficiency between water and the air to be treated, the removal efficiency of the chemical pollutants is the highest and the apparatus The installation area and the amount of water used are small,
It is preferable because the pressure loss is small. As the water to be supplied to both the humidifying means and the condensing means, it is preferable to use deionized water as the water to be supplied to both the humidifying means and the condensing means, or at least to the condensing means because the air to be treated is less contaminated. However, when the humidifying means and the condensing means are independent of each other, the water supplied to the humidifying means and the condensing means should be an independent system so that the water supplied to the condensing means is not polluted as much as possible. It is preferable not to mix with each other. The water supplied to the humidifying means is
Use of city water or industrial water is preferable because the cost can be reduced. The deionized water is not particularly limited, and for example, city water or industrial water that has been pretreated and then treated with an ion exchange resin can be used.

Next, the operation of the first embodiment will be described. First, the air to be treated is supplied to a humidification step by a blower or the like through a duct. In the humidification step, the air to be treated is warmed to a predetermined temperature, and water is supplied from the upper part of the metal oblique honeycomb, and the metal oblique honeycomb is slowly flowed down so that the entire cell has a water film. It comes into contact with the surface of the cells of the diagonal metal honeycomb having a wall structure. At this time, the air to be treated is humidified by the water vaporized from the film surface, while at the same time, a part of the chemical pollutants in the air to be treated is absorbed in the water. As a result, some of the chemical contaminants are removed from the air to be treated.

After completion of the humidifying step, the humidified air to be treated is supplied to the condensing step. In the condensation process, the air to be treated is
The moisture in the air is condensed by being cooled on the surface of the cells of the metal oblique honeycomb that has been cooled to a temperature lower than that in the humidification step, and at this time, the chemical pollutants remaining in the air without being removed in the humidification step are It is almost taken into condensed water and collected along with the running water,
Chemical pollutants are removed from the air to be treated. The temperature of the water in the humidifying step and the temperature of the water in the condensing step, as long as the former is higher than the latter, may be appropriately adjusted so that air having a desired humidity or temperature can be obtained. After completion of the condensation step, the air is used as it is or as the clean air used in a clean room or the like by appropriately adjusting the humidity and the temperature.

In the clean room, the temperature is usually adjusted to around 23 ° C. and the relative humidity is adjusted to about 40 to 50%. Therefore, when preparing purified air for the clean room, the conditions of the humidification step and the condensation step are as follows. Purified air obtained after the condensing step is set to have a relative humidity within the above range when appropriately heated to around 23 ° C. The heating means or humidifying means used at this time is not particularly limited,
Known devices such as an electric heater and a warm water heater can be used. Around 23 ° C. thus obtained, and
Used as purified air clean room air with relative humidity of about 40 to 50%.

According to the first embodiment of the present invention, in order to humidify or condense the water flowing down the surface of the corrugated metal plate forming the oblique metal honeycomb with water, chemical pollutants are contained by recycling or the like. Even when using such circulating water, chemical pollutants rarely re-evaporate from the circulating water. That is, in the conventional method, since water containing pollutants is sprayed in the form of a shower, the mist is taken into the air and causes re-scattering of the chemical pollutants. On the other hand, in the method of the present invention, only the water on the surface of the honeycomb having a large surface area is evaporated, and the chemical pollutants once taken into the water remain on the water side, so that re-scattering of the pollutants is unlikely to occur To be Therefore, when the oblique metal honeycomb is used as the humidifying means, not only deionized water but also city water or industrial water can be used as described above. Further, since the removal efficiency of chemical contaminants is high, the liquid-gas ratio, which was required to be about 1 to 2 in the known water shower or the like, can be set to about 0.1. Also, when the water used in the humidification process and the condensation process is circulated, the amount of water used is small,
As a result, the pump capacity and the like can be small.

In the second embodiment of the present invention, a diagonal metal honeycomb is used only for the humidifying means because of the contact efficiency between water and the air to be treated. In comparison, in the first embodiment, it is possible to obtain the same effect as that of using the metal oblique honeycomb as the humidifying means. This example is suitable when dry air in winter is used as the air to be treated. Further, in this example, the chemical contaminants in the air to be treated can be removed only by the humidifying means, but a well-known cooler may be used as the condensing means to dehumidify the air after humidification.

The third embodiment of the present invention uses a diagonal metal honeycomb having a good contact efficiency between water and the air to be treated only as a condensing means, and a condensing means using a conventionally known cooler or the like is used. Compared with the above, in the first embodiment, it is possible to obtain the same effect as that of using the metal oblique honeycomb as the condensing means. Further, in this embodiment, the condensing means uses a metal diagonal honeycomb, the contact efficiency between the air to be treated and water is high, and the removal efficiency of chemical pollutants is high. The chemical contaminants can be removed, and the cost of equipment can be reduced without providing a humidifying means. In particular, the present embodiment is particularly effective because the air is hot and humid from the rainy season to the summer and can be directly supplied as the air to be treated. In this example, the chemical contaminants in the air to be treated can be removed only by the condensing means, but a known humidifier may be used as the humidifying means, and then dehumidification may be performed by the above-described metal oblique honeycomb.

In the fourth embodiment of the present invention, a humidifying process and a condensing process are sequentially performed in one metal oblique honeycomb. That is, the air to be treated is supplied to the opening on the front surface of the oblique metal honeycomb through a duct or the like. The pre-stage side of the metal skewed honeycomb is a humidification section, the air to be treated is humidified to a predetermined humidity, and when it is humidified to a saturated state in the metal skewed honeycomb, then,
In the subsequent stage of the oblique metal-made honeycomb that passes through, it is dehumidified to a predetermined humidity. Therefore, a part of the chemical pollutants in the air is taken into the excess water in the humidification section, and the chemical pollutants remaining without being removed in the humidification section are taken into the condensed water by the dehumidification section. Be removed.

The above-described air cleaning method according to the present invention can be used as an air cleaning method for air supplied to clean rooms such as semiconductor and liquid crystal device manufacturing factories, pharmaceutical factories, and life science related facilities. Further, in particular, in a semiconductor or liquid crystal device manufacturing factory, the size of the metal oblique honeycomb used in the method is, for example, 1000 to 5000 mm in length and 1000 to 5000 in width.
mm, thickness 100-1000 mm can be used.

[0034]

EXAMPLES Next, the present invention will be described more specifically by way of examples, but the present invention is not limited thereto.

(Examples 1 to 10, Comparative Examples 1 to 3) Tables 1 to 1
As a result of producing an air cleaning device having a humidifying means and a condensing means having specifications shown in Table 3 and treating these under the conditions shown in Tables 4 to 6, the results shown in Tables 7 to 9 were obtained. The purified air obtained was heated under the conditions shown in Tables 10 to 12 to obtain purified air for a clean room. The results are shown in Tables 10-12. In addition, in Examples 5 to 9, the air to be treated is directly supplied to the condensation zone without providing the humidification zone. Further, the oblique metal honeycombs are shown in Tables 1 to 3.
The corrugated sheet made of SUS described in 1. intersects with every other layer, and the diagonal angle of the cell is 3 with respect to the inflow direction of air.
The one with 0 degree was used. Further, the water used in the humidifying means and the water used in the condensing means are independent systems, and in Example 4 and Comparative Example 2, each water is circulated and used in Examples 1 to 3 and 5 to 11. Also, for Comparative Examples 1 and 3, 1 pass was set. Make-up water was supplied so that pollutants in the circulating water were below a predetermined concentration. For example, the ammonia ion concentration in the circulating water is 100 pp in the third embodiment.
b, in Example 4, it is 500 ppb. When the concentration of ammonia ions in water exceeds 500 ppb, ammonia is vaporized in the conventional water shower, and the absorption removal rate thereof is significantly reduced (Comparative Example 2). In the table, "air washer" means a water shower.

[0036]

[Table 1]

[0037]

[Table 2]

[0038]

[Table 3]

[0039]

[Table 4]

[0040]

[Table 5]

[0041]

[Table 6]

[0042]

[Table 7]

[0043]

[Table 8]

[0044]

[Table 9]

[0045]

[Table 10]

[0046]

[Table 11]

[0047]

[Table 12]

[0048]

The air cleaning method according to the present invention has the following effects. (1) Efficient removal of gaseous chemical pollutants. (2) By using an inexpensive metal diagonal honeycomb, the entire air cleaning device becomes compact, which saves resources and greatly reduces the processing cost. (3) Since the amount of deionized water used is small, it is possible to reduce the production cost of deionized water and the pumping capacity. (4) Since the pressure loss when the air to be processed passes through the air cleaning device is small, the blowing power can be reduced. (5) Since the water flowing down on the corrugated metal plate forming the oblique metal honeycomb is brought into contact with the treated air, only the water on the honeycomb surface having a large surface area is evaporated and once taken into the water. Since the chemical pollutants remain on the water side, re-scattering of the chemical pollutants is unlikely to occur. Therefore, there is little risk of recontamination of the air to be treated. (6) Since the oblique honeycomb is made of metal, the strength of the wall can be increased, so that the wall of the oblique metal honeycomb can be made thin. (7) Since the honeycomb wall can be made thin, pressure loss can be reduced. (8) Excellent durability including water resistance and abrasion resistance due to running water. (9) Since air and water are brought into contact with each other through a metal oblique honeycomb, particles from a metal plate to be used are not mixed in the air, which is suitable for cleaning air sent to a clean room. (10) Since air and water are brought into contact with each other through the metal oblique honeycomb, outgas from the metal plate used is not mixed with air, which is suitable for cleaning air to be sent to a clean room. (11) Since air and water are brought into contact with each other through the metal oblique honeycomb, mold and algae are not generated.

[Brief description of drawings]

FIG. 1 is a diagram illustrating a metal oblique honeycomb used in the air cleaning method of the present invention.

[Explanation of symbols]

1 Metal skewed honeycomb 13 Humidification means 23 Condensing means 101, 104 both upper and lower sides 102, 103 both front and back

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Claims (4)

[Claims] 1. Introducing air containing chemical contaminants from a front opening of a metal oblique honeycomb in which front and rear surfaces and upper and lower surfaces are opened, and supplying water from an upper opening, A method for cleaning air, characterized in that the air is humidified and at least a part of the chemical pollutants is taken into the obtained excess water to remove the chemical pollutants from the air. 2. Introducing air containing a chemical pollutant from a front opening of a metal oblique honeycomb in which front and rear surfaces and upper and lower surfaces are opened, and supplying water from an upper opening, An air cleaning method, wherein the air is dehumidified, and at least a part of the chemical pollutants is taken into the resulting condensed water to remove the chemical pollutants from the air. 3. By introducing air containing a chemical pollutant and contacting the air with water, the air is humidified, and at least a part of the chemical pollutant is taken into excess water obtained. A humidifying step of removing chemical pollutants from the air, and introducing air containing chemical pollutants, and contacting the air with water to dehumidify the air, and to obtain the condensed water containing chemical pollutants. An air cleaning method having a dehumidifying step of removing chemical pollutants from the air by incorporating at least a part thereof, wherein the front and rear surfaces are used as a humidifying means used in the humidifying step and a condensing means used in the dehumidifying means. A method for air cleaning, characterized in that a skewed metal honeycomb in which both upper and lower surfaces are opened is used for one or both of the both means. 4. The air containing chemical contaminants is introduced from the front opening of a metal diagonal honeycomb having front and rear surfaces and upper and lower surfaces opened, and water is supplied from the upper opening, The air is humidified at the front stage of the oblique manufacturing honeycomb, and at least a part of the chemical pollutants is taken into the excess water obtained, thereby removing the chemical pollutants from the air, and then dehumidifying the air to obtain A method for cleaning air, characterized in that chemical pollutants are removed from the air by incorporating at least part of the chemical pollutants into the condensed water that is generated.