JP2003215595A - Device and method for producing liquid crystal device and liquid crystal device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain various kinds of characteristics required for a rubbing roll through the use of a plurality of kinds of filaments. <P>SOLUTION: The rubbing roll 81 is constituted by alternately arranging thin and long filaments 83 with low elasticity and thick and short filaments 84 with high elasticity. The rubbing roll 81 is rotated to rub the front surface of a board 101 by the filaments 83 and 84. In this case, the whole surface of the board 101 is rubbed mainly by the filaments 83 and foreign matters obtained by the rubbing are swept out mainly by the filaments 84 and removed. Thus, fine pixels are uniformly rubbed simultaneously with a foreign matter-sweeping effect. Besides, rigidity is also kept since the thin filaments 83 are supported by the thick filaments 84. Thus, the characteristics required for the rubbing roll is shared by the plurality of kinds of filaments and, then, a desired synergy effect by the filaments can be anticipated. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal device manufacturing apparatus, a manufacturing method, and a liquid crystal device suitable for rubbing an alignment film on a liquid crystal substrate.

[0002]

2. Description of the Related Art A liquid crystal device such as a liquid crystal light valve is constructed by enclosing a liquid crystal between two substrates such as a glass substrate and a quartz substrate. In a liquid crystal light valve, for example, a thin film transistor (hereinafter, referred to as T
(Referred to as FT) are arranged in a matrix, the counter electrode is arranged on the other substrate, and the optical characteristics of the liquid crystal layer sealed between both substrates are changed according to the image signal, thereby enabling image display. To do.

The TFT substrate on which the TFTs are arranged and the counter substrate opposed to the TFT substrate are manufactured separately.
After both substrates are bonded with high precision in the panel assembly process, liquid crystal is sealed.

In the panel assembling process, first, an alignment film is formed on the facing surfaces of the TFT substrate and the counter substrate manufactured in each substrate process, that is, on the surfaces of the counter substrate and the liquid crystal layer of the TFT substrate in contact with each other. Then, a rubbing process is performed. Next, a seal portion serving as an adhesive is formed on the edge of one of the substrates. The TFT substrate and the counter substrate are attached to each other using the seal portion, and pressure-bonded and cured while performing alignment. A notch is provided in a part of the seal portion, and the liquid crystal is sealed through this notch.

By forming an alignment film and performing rubbing treatment, the alignment of liquid crystal molecules when no voltage is applied is determined. The alignment film is formed by applying, for example, polyimide (PI) with a thickness of about several tens of nanometers. By forming the alignment films on the surfaces of both substrates facing the liquid crystal layer, the liquid crystal molecules can be aligned along the surfaces of the substrates. The rubbing treatment is to form fine grooves on the surface of the alignment film to form an anisotropic film, and the alignment film can be rubbed in a certain direction to define the alignment of liquid crystal molecules.

FIG. 8 is a schematic view showing a rubbing device.

A liquid crystal substrate 101 is placed on the stage 100. The stage 100 moves in the horizontal direction and carries the substrate 101. A rubbing roll 102 is arranged above the transport path of the stage 100. The rubbing roll 102 has a velvet-like cloth, for example, a rayon rubbing cloth 103, attached to its peripheral surface. The stage 100 is conveyed while rotating the rubbing roll 102 to rotate the rubbing roll 102 and the stage 10.
By carrying 0, rubbing is performed by rubbing the entire surface of the substrate with the rubbing cloth 103.

The rubbing cloth 103 is made by weaving a rayon filament 104 on the cloth surface. The filament 104 extends upward from the cloth surface, and the tips of the filaments 104 are provided evenly over the cloth surface. The tips of the filaments 104 are cut into a predetermined length during manufacturing.

[0009]

By the way, the surface of one filament 104 in contact with the surface of the substrate 101 is equal to the wire diameter of the filament 104, and in order to make the liquid crystal panel high definition, the wire diameter of the filament 104 is large. Need to be thin enough.

However, since the filament having a small wire diameter has a low elastic force, the rubbing roll using the filament having a small wire diameter has a problem that a sufficient contact pressure with respect to the substrate 101 cannot be obtained. .

The present invention has been made in view of the above problems, and by forming a rubbing roll using a plurality of types of filaments, a liquid crystal device capable of imparting desired characteristics to the rubbing roll is manufactured. An object of the present invention is to provide a device, a manufacturing method, and a liquid crystal device.

[0012]

A liquid crystal device manufacturing apparatus according to the present invention is adapted to rub an alignment film formed on a liquid crystal substrate to perform a rubbing process by rotating, and is provided on a peripheral surface. A rubbing roll using two or more types of filaments having different wire lengths and wire diameters at least as wire diameters as the filaments to be woven into the rubbing cloth.

The method for manufacturing a liquid crystal device according to the present invention is a step of rubbing an alignment film formed on a liquid crystal substrate by rotating to perform a rubbing process, and knitting on a rubbing cloth provided on a peripheral surface. The method is characterized by comprising a step of performing a rubbing treatment with a rubbing roll using at least two types of filaments having different wire diameters and wire diameters as filaments.

According to these configurations, fine filaments can be used for fine pixels and filaments having a large diameter can sweep out foreign matter.

Further, the apparatus for manufacturing a liquid crystal device according to the present invention is for rubbing the alignment film formed on the liquid crystal substrate by rotating and rubbing it, and knitting it on a rubbing cloth provided on the peripheral surface. A rubbing roll using two or more kinds of filaments having different elasticity at least among line length and elasticity is provided as a filament.

The method of manufacturing a liquid crystal device according to the present invention is a step of rubbing an alignment film formed on a liquid crystal substrate by rotating to perform a rubbing treatment, and knitting on a rubbing cloth provided on a peripheral surface. The present invention is characterized by including a step of performing a rubbing treatment with a rubbing roll that uses two or more types of filaments having different elasticity at least among the filament length and the elasticity.

According to these configurations, the filament having low elasticity can improve the followability to the step of the substrate, and the filament having high elasticity can improve the rigidity.

The liquid crystal device manufacturing apparatus according to the present invention rubs the alignment film formed on the liquid crystal substrate by rotating to perform a rubbing process, and knits it on a rubbing cloth provided on the peripheral surface. A rubbing roll using two or more types of filaments having different wire diameters and / or elasticity as filaments is provided.

Further, the method for manufacturing a liquid crystal device according to the present invention is a step of rubbing an alignment film formed on a liquid crystal substrate by rotating to perform a rubbing treatment, and knitting on a rubbing cloth provided on a peripheral surface. It is characterized by comprising a step of performing a rubbing treatment with a rubbing roll using two or more kinds of filaments having different wire diameters and / or elasticity as filaments.

According to these structures, it is possible to deal with fine pixels, obtain a high effect of sweeping out foreign matters, obtain a high followability to the step of the substrate, and obtain a high rigidity. .

Further, the apparatus for manufacturing a liquid crystal device according to the present invention rubs the alignment film formed on the liquid crystal substrate by rotating to perform a rubbing process, and knits it on a rubbing cloth provided on the peripheral surface. Wire length as filament,
A rubbing roll using two or more kinds of filaments having different wire diameters and elasticity is provided.

The method of manufacturing a liquid crystal device according to the present invention is a step of rubbing an alignment film formed on a liquid crystal substrate by rotating to perform a rubbing process, and knitting on a rubbing cloth provided on a peripheral surface. Wire length as filament,
The method is characterized by comprising a step of performing a rubbing treatment with a rubbing roll using two or more kinds of filaments having different wire diameters and elasticity.

According to these structures, rubbing with a thin and long filament corresponds to a fine pixel, a foreign substance is swept out with a thick and short filament, and a thin and low elastic filament is supported by a thick and high elastic filament. Thereby, the rigidity can be improved.

A rubbing treatment is performed by the above-mentioned liquid crystal device manufacturing apparatus or the above liquid crystal device manufacturing method.

According to this structure, a desired rubbing characteristic can be obtained, so that the electro-optical characteristic is excellent.

[0026]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 shows the first of the present invention.
FIG. 3 is an explanatory diagram schematically showing a rubbing device and a rubbing roll adopted in the liquid crystal device manufacturing apparatus according to the embodiment of the present invention. FIG. 2 is an equivalent circuit diagram of various elements, wirings, and the like in a plurality of pixels forming a pixel region of a liquid crystal device. FIG. 3 is a plan view of an element substrate such as a TFT substrate as viewed from the counter substrate side together with the constituent elements formed thereon, and FIG. 4 is an assembly process for bonding the element substrate and the counter substrate to enclose liquid crystal. It is sectional drawing which cuts and shows the liquid crystal device after completion | finish in the position of the HH 'line of FIG. FIG. 5 is a sectional view showing the liquid crystal device in detail. FIG. 6 is a flowchart showing the panel assembly process. FIG. 7 is a table for explaining the types of filaments and their advantages and disadvantages.

In the present embodiment, a plurality of types of filaments are used, and the role of imparting desired characteristics to the rubbing roll is shared by each filament, and a synergistic effect which cannot be obtained by only one type of filament is obtained. It was done like this.

First, the structure of the liquid crystal panel that has been rubbed will be described with reference to FIGS.

As shown in FIGS. 3 and 4, the liquid crystal panel is constructed by enclosing a liquid crystal 50 between an element substrate 10 such as a TFT substrate and a counter substrate 20. Pixel electrodes that form pixels are arranged in a matrix on the element substrate 10. FIG. 2 shows an equivalent circuit of the elements on the element substrate 10 which form the pixels.

As shown in FIG. 2, in the pixel area,
The plurality of scanning lines 3a and the plurality of data lines 6a are arranged so as to intersect with each other, and the pixel electrodes 9a are arranged in a matrix in a region partitioned by the scanning lines 3a and the data lines 6a. A TFT 30 is provided corresponding to each intersection of the scanning line 3a and the data line 6a, and the pixel electrode 9a is connected to this TFT 30.

The TFT 30 is turned on by the ON signal of the scanning line 3a, whereby the image signal supplied to the data line 6a is supplied to the pixel electrode 9a. This pixel electrode 9
A voltage between a and the counter electrode 21 provided on the counter substrate 20 is applied to the liquid crystal 50. Further, a storage capacitor 70 is provided in parallel with the pixel electrode 9a, and the storage capacitor 70 enables the voltage of the pixel electrode 9a to be retained for a time that is, for example, three digits longer than the time when the source voltage is applied. The storage capacitor 70 improves the voltage holding characteristic and enables image display with a high contrast ratio.

FIG. 5 is a schematic sectional view of a liquid crystal panel focusing on one pixel.

The groove 1 is formed in the element substrate 10 such as glass or quartz.
1 is formed. A TFT 30 having an LDD structure is formed on the groove 11 via a light shielding film 12 and a first interlayer insulating film 13.
Are formed. The groove 11 flattens the boundary surface of the TFT substrate with the liquid crystal 50.

The TFT 30 comprises a scanning line 3a forming a gate electrode via an insulating film 2 in a semiconductor layer in which a channel region 1a, a source region 1d and a drain region 1e are formed. The light shielding film 12 is formed in a region corresponding to the formation region of the TFT 30, a formation region of the data lines 6a and the scanning lines 3a described later, that is, a region corresponding to the non-display region of each pixel. The light-shielding film 12 causes the incident light to reach T
Incident on the channel region 1a, the source region 1d, and the drain region 1e of the FT 30 is prevented.

A second interlayer insulating film 14 is laminated on the TFT 30, and an intermediate conductive layer 15 is formed on the second interlayer insulating film 14. Capacitor lines 18 are arranged on the intermediate conductive layer 15 with a dielectric film 17 interposed therebetween. The capacitance line 18 is
It is composed of a capacitance layer and a light-shielding layer, constitutes a storage capacitor with the intermediate conductive layer 15, and has a light-shielding function of preventing internal reflection of light. Since the intermediate conductive layer 15 is formed at a position relatively close to the semiconductor layer, diffused reflection of light can be efficiently prevented.

A third interlayer insulating film 19 is arranged on the capacitance line 18, and a data line 6a is laminated on the third interlayer insulating film 19. The data line 6a is connected to the third and second interlayer insulating films 1
It is electrically connected to the source region 1d through the contact holes 24a and 24b penetrating through 8 and 14. A pixel electrode 9a is stacked on the data line 6a with a fourth interlayer insulating film 25 interposed therebetween. The pixel electrode 9a has a contact hole 26 penetrating the fourth to second interlayer insulating films 25, 19, and 14.
a, 26b through the capacitance line 18 to the drain region 1e
Electrically connected to. An alignment film 16 made of a polyimide-based polymer resin is laminated on the pixel electrode 9a, and is rubbed in a predetermined direction by using the rubbing roll shown in FIG.

When the ON signal is supplied to the scanning line 3a (gate electrode), the channel region 1a becomes conductive,
The source region 1d and the drain region 1e are connected to each other, and the image signal supplied to the data line 6a is applied to the pixel electrode 9a.

On the other hand, on the counter substrate 20, a counter electrode (common electrode) 21 is formed over the entire surface of the substrate 20. An alignment film 22 made of a polyimide-based polymer resin is laminated on the counter electrode 21, and is rubbed in a predetermined direction using the rubbing roll shown in FIG.

Liquid crystal 50 is sealed between the element substrate 10 and the counter substrate 20. As a result, the TFT3
0 writes the image signal supplied from the data line 6a to the pixel electrode 9a at a predetermined timing. Depending on the written potential difference between the pixel electrode 9a and the counter electrode 21, the orientation or order of the molecular assembly of the liquid crystal 50 is changed to modulate light and enable gradation display.

As shown in FIGS. 3 and 4, the counter substrate 20
Is provided with a light shielding film 42 as a frame that divides the display area. The light shielding film 42 is made of, for example, the same or different light shielding material as the light shielding film 23.

A sealing material 41 for enclosing the liquid crystal in a region outside the light shielding film 42 is formed between the element substrate 10 and the counter substrate 20. The sealing material 41 is arranged so as to substantially match the contour shape of the counter substrate 20, and the element substrate 10 and the counter substrate 2 are arranged.
Stick 0 to each other. The sealing material 41 is missing in a part of one side of the element substrate 10, and a liquid crystal injection port 78 for injecting the liquid crystal 50 is formed in a gap between the element substrate 10 and the counter substrate 20 which are bonded to each other. It After the liquid crystal is injected from the liquid crystal injection port 78, the liquid crystal injection port 78 is sealed with a sealing material 79.

A data line driving circuit 61 and mounting terminals 62 are provided along one side of the element substrate 10 in a region outside the sealing material 41 of the element substrate 10, and along two sides adjacent to the one side. , A scanning line drive circuit 63 is provided. A plurality of wirings 64 for connecting the scanning line drive circuits 63 provided on both sides of the screen display area are provided on the remaining side of the element substrate 10. The element substrate 1 is provided at least at one corner of the counter substrate 20.
A conductive material 65 is provided to electrically connect 0 and the counter substrate 20.

Next, the panel assembling process will be described with reference to FIG. The element substrate 10 (TFT substrate) and the counter substrate 20 are manufactured separately. Polyimide (PI) to be the alignment films 16 and 22 is applied to the TFT substrate and the counter substrate 20 prepared in steps S1 and S6, respectively, in the next steps S2 and S7. Next, steps S3 and S
In 8, the rubbing process is performed on the alignment film 16 on the surface of the element substrate 10 and the alignment film 22 on the surface of the counter substrate 20. This rubbing process is performed using the rubbing roll shown in FIG.

Next, in steps S4 and S9, a cleaning process is performed. This cleaning step is for removing dust generated by the rubbing process. When the cleaning process is completed, the sealing material 41 (see FIG. 2) is formed in step S5. Next, in step S10, the element substrate 10
And the counter substrate 20 are attached to each other, and pressure is applied while performing alignment in step S11 to cure the sealing material 41. Finally, in step S12, the liquid crystal is sealed from the notch provided in a part of the sealing material 41, and the notch is closed to seal the liquid crystal.

In the present embodiment, the rubbing process shown in FIG. 1A carries out the rubbing process in steps S3 and S8.

The rubbing apparatus shown in FIG. 1A differs from the rubbing apparatus shown in FIG. 8 in that the rubbing roller 81 shown in FIG. 1B is used instead of the rubbing roller 102 shown in FIG.
Note that FIG. 1 schematically shows the shape.
There is no correlation in roll diameter etc. between (a) and (b). FIG. 1A is viewed from a direction orthogonal to the stage moving direction, and FIG. 1B is viewed from the stage moving direction.

In FIGS. 1A and 1B, the rubbing roll 81 is formed in a cylindrical shape and is rotatable in the circumferential direction with the center of the circle as the axis 85. On the peripheral surface of the rubbing roll 81, a velvet cloth, for example, a rubbing cloth 82 formed of rayon is wound.

In the present embodiment, the rubbing cloth 82
Is formed by weaving two kinds of filaments 83 and 84 into a cloth, and the filaments 83 and 84 extend from the surface of the rubbing cloth 82 by a predetermined length.

FIG. 7 classifies filaments in consideration of wire diameter, wire length and elasticity, and shows characteristics, advantages and disadvantages, respectively. As shown in FIG. 7, a filament having a large wire diameter has a characteristic that it is easy to obtain high elasticity. On the other hand, a filament having a small wire diameter has a feature that it can be applied to fine pixels.

In the present embodiment, it is necessary to use a filament having a small wire diameter in order to be able to deal with fine pixels. However, a filament having a small wire diameter has a drawback that it is difficult to obtain a sufficient contact pressure. Therefore, in order to offset this defect, a filament having high elasticity and easily obtaining a sufficient contact pressure, that is, a wire diameter is Adopt a thick filament. Rubbing roll 8 shown in FIGS. 1 (a) and 1 (b)
The filament 83 of No. 1 is a filament having a small wire diameter, and the filament 84 is a filament having a large wire diameter.

Further, in order to deal with fine pixels, it is preferable to use a filament having a small wire diameter as a filament mainly rubbing the surface of the liquid crystal substrate 101. Therefore, a filament having a long wire length is used as the filament 83 having a small wire diameter. On the contrary, as the filament 84 having a large wire diameter, a filament having a short wire length is used to utilize the feature of the foreign matter sweeping effect.

Further, a high elasticity filament is used as the filament 84 having a large wire diameter, and a low elasticity filament is used as the filament 83 having a small wire diameter. And these filaments 8
3, 84 are staggered horizontally and vertically. As a result, the bending tendency of the filament 83 having a small wire diameter is easily supported by the filament 84 having a large wire diameter, and the rigidity as a whole is maintained.

The substrate 101 is mounted on the upper surface of the stage 100. The substrate 101 mounted on the stage 100 is the above-described element substrate 1 before the rubbing process.
0 or the counter substrate 20. The rubbing roll 81 and the stage 100 are the filament 8 of the rubbing cloth 82.
The vertical positioning is performed so that the rubbing pressure applied to the substrate 101 by 3, 84 has a predetermined value. The stage 100 is movable in a predetermined direction parallel to the surface of the substrate 101, and the moving path of the stage 100, that is, the substrate 10
A rubbing roll 81 is arranged above the first transport path.

During rubbing, the rubbing roll 81
At the portion where the rubbing cloth 82 is in contact with the substrate 101, the rubbing cloth 82 rotates in the direction opposite to the traveling direction of the stage 100. The stage 1 is rotated while rotating the rubbing roll 81 so that the substrate 101 is in contact with the filaments 83 and 84 of the rubbing cloth 82 at a predetermined pressure and the entire surface thereof is rubbed.
00 is conveyed.

Next, the operation of the embodiment thus constructed will be described.

First, the substrate 101 corresponding to the element substrate 10 or the counter substrate 20 in a state where the polyimide serving as the alignment film is applied is placed on the stage 100. In this state, the stage 100 is conveyed to the rubbing roll 81 side. Further, the rubbing roll 81 is rotated. Stage 100
When reaches the vicinity of the bottom of the rubbing roll 81, the filaments 83 and 84 of the rubbing cloth 82 come into contact with the substrate 101. Further, the rotation of the rubbing roll 81 and the stage 1
00, the filaments 83, 8
Step 4 proceeds while rubbing the surface of the substrate 101. Thus, the entire surface of the substrate 101 is rubbed.

In this case, the filament 8 having a long wire length
3 mainly rubs the surface of the liquid crystal substrate 101 to perform rubbing treatment, and the filament 84 having a short line length is the filament 8
The foreign matter generated by rubbing the surface of the substrate 101 by the reference numeral 3 is swept and removed. The filament 83 having a small wire diameter corresponds to a fine pixel, and moreover, the bristles reach the details in the pixel in response to a change in shape such as a step on the surface of the substrate 101, so that uniform rubbing of the fine pixel is possible. . Further, since the filament 84 having a large wire diameter and high elasticity supports the thin filament 83 having a low elasticity, the rigidity as a whole can be maintained.

As described above, in the present embodiment, since the rubbing roll 81 is constituted by combining the thin and soft long filament 83 and the thick and high elastic short filament 84, the thin filament 83 uniformly rubs fine pixels. It is possible to obtain the synergetic effect that the thick filament 84 simultaneously supports the foreign matter sweeping-out effect and the thick filament 84 supports the thin filament 83 to maintain rigidity.

An example in which the two types of filaments 83 and 84 are alternately arranged in the horizontal and vertical directions has been described, but the arrangement is not limited to this. For example, 2
It is also possible to simply arrange the types of filaments uniformly in the rotation direction of the rubbing roll 81. Further, the mixing ratio and the area ratio may be appropriately set depending on the use of the liquid crystal substrate to be rubbed.

Further, in the above-mentioned embodiment, the example in which the single liquid crystal substrate is placed on the stage and the rubbing treatment is applied is explained, but the counter substrate is arranged on a plurality of pallets and the rubbing treatment is carried out. Obviously, it can be applied to a device for performing. Although the stage 100 is moved in the horizontal direction for the rubbing process, it may be moved on the rubbing roll 81 side.

Next, a second embodiment of the present invention will be described. This embodiment is different from the first embodiment only in that a rubbing cloth having different kinds of filaments to be combined is used, and the other configurations are the same as those in FIG.

In this embodiment, two types of filaments a and b shown in Table 1 below are adopted.

[0063] In the embodiment configured as described above, the foreign matter sweeping-out effect at the time of rubbing can be obtained by the filament a. Further, the filament b can sufficiently rub the fine pixels. Moreover, since the tips of the filaments b flow in the rubbing direction, the apparent contact area with the rubbing substrate increases. Furthermore, since the filament b supports the filament a, a sufficient contact pressure can be obtained.

As described above, also in this embodiment, the rubbing roll can be provided with various characteristics which cannot be obtained by using only one kind of filament.

Next, a third embodiment of the present invention will be described. The present embodiment is different from the first embodiment only in that a rubbing cloth having a different type of filament to be combined is used, and other configurations are the same as those in FIG.

In this embodiment, two types of filaments c and d shown in Table 2 below are adopted.

[0067] In the embodiment configured as described above, the rigidity of the filament c is high, and thus the life is extended. The step portion that cannot be followed by the filament c can be rubbed by the filament d. In addition, since the filament c has high rigidity, it is possible to prevent aggregation due to external force such as static electricity.

As described above, also in this embodiment, the rubbing roll can be provided with various characteristics which cannot be obtained by using only one kind of filament.

Next, a fourth embodiment of the present invention will be described. The present embodiment is different from the first embodiment only in that a rubbing cloth having a different type of filament to be combined is used, and other configurations are the same as those in FIG.

In this embodiment, two types of filaments e and f shown in Table 3 below are adopted.

[0071] In the embodiment configured in this manner, the tips of the filaments e flow in the rubbing direction, so that the apparent contact area can be increased. The step portion that cannot be followed by the filament e can be rubbed by the filament f. Since the filament e has a low rigidity, damage to the alignment film can be reduced.

As described above, also in this embodiment, the rubbing roll can be provided with various characteristics which cannot be obtained by using only one kind of filament.

Next, a fifth embodiment of the present invention will be described. The present embodiment is different from the first embodiment only in that a rubbing cloth having a different type of filament to be combined is used, and other configurations are the same as those in FIG.

In this embodiment, two types of filaments g and h shown in Table 4 below are adopted.

[0075] In the embodiment configured as described above, the contact pressure can be controlled by changing the distance between the substrate and the roll. The contact pressure can be increased as the distance is reduced.

As described above, also in this embodiment, the rubbing roll can be provided with various characteristics which cannot be obtained by using only one kind of filament.

[0077]

As described above, according to the present invention, by forming a rubbing roll using a plurality of types of filaments, it is possible to impart desired characteristics to the rubbing roll.

[Brief description of drawings]

FIG. 1 is an explanatory view schematically showing a rubbing device and a rubbing roll adopted in a liquid crystal device manufacturing apparatus according to a first embodiment of the present invention.

FIG. 2 is an equivalent circuit diagram of various elements, wirings, and the like in a plurality of pixels forming a pixel region of a liquid crystal device.

FIG. 3 is a plan view of an element substrate such as a TFT substrate as viewed from the counter substrate side together with the constituent elements formed thereon.

FIG. 4 is a cross-sectional view showing the liquid crystal device after the assembly process in which the element substrate and the counter substrate are attached to each other and the liquid crystal is sealed, taken along line HH ′ in FIG. 4;

FIG. 5 is a cross-sectional view showing a liquid crystal device in detail.

FIG. 6 is a flowchart showing a panel assembly process.

FIG. 7 is a chart for explaining the types of filaments and their advantages and disadvantages.

FIG. 8 is a schematic view showing a rubbing device.

[Explanation of symbols]

81 ... Rubbing roll 82 ... rubbing cloth 83, 84 ... Filament 100 ... stage 101 ... Substrate

Claims (9)

[Claims] 1. A rubbing treatment is performed by rubbing an alignment film formed on a liquid crystal substrate by rotating.
An apparatus for manufacturing a liquid crystal device, comprising a rubbing roll using two or more kinds of filaments having different wire lengths and diameters as filaments to be woven into a rubbing cloth provided on a peripheral surface. 2. A rubbing process is performed by rubbing an alignment film formed on a liquid crystal substrate by rotating.
An apparatus for manufacturing a liquid crystal device, comprising: a rubbing roll using two or more kinds of filaments having at least different elasticity in line length and elasticity as filaments to be woven into a rubbing cloth provided on a peripheral surface. 3. A rubbing process is performed by rubbing an alignment film formed on a liquid crystal substrate by rotating.
An apparatus for manufacturing a liquid crystal device, comprising a rubbing roll using two or more kinds of filaments having different wire diameters and elasticity as filaments to be woven into a rubbing cloth provided on a peripheral surface. 4. A rubbing process is performed by rubbing an alignment film formed on a liquid crystal substrate by rotating.
An apparatus for manufacturing a liquid crystal device, comprising a rubbing roll using two or more kinds of filaments having different wire lengths, wire diameters and elasticity as filaments to be woven into a rubbing cloth provided on a peripheral surface. 5. A step of rubbing by rubbing an alignment film formed on a liquid crystal substrate by rotating,
A liquid crystal device comprising a rubbing process using a rubbing roll that uses two or more types of filaments having different wire diameters and diameters as filaments to be woven into a rubbing cloth provided on the peripheral surface. Manufacturing method. 6. A step of rubbing by rubbing an alignment film formed on a liquid crystal substrate by rotating,
A method for manufacturing a liquid crystal device, comprising a step of performing a rubbing process using a rubbing roll that uses two or more types of filaments having at least different elasticity among wire length and elasticity as filaments to be woven into a rubbing cloth provided on a peripheral surface. Method. 7. A step of rubbing by rubbing an alignment film formed on a liquid crystal substrate by rotating.
A method for manufacturing a liquid crystal device, comprising a step of performing a rubbing treatment with a rubbing roll using two or more kinds of filaments having different wire diameters and / or elasticity as filaments to be woven into a rubbing cloth provided on a peripheral surface. . 8. A step of rubbing by rubbing an alignment film formed on a liquid crystal substrate by rotating,
A method of manufacturing a liquid crystal device, comprising a step of performing a rubbing treatment with a rubbing roll using two or more kinds of filaments having different wire lengths, diameters and elasticity as filaments to be woven into a rubbing cloth provided on a peripheral surface. . 9. The method according to any one of claims 1 to 4.
9. A liquid crystal device that has been subjected to a rubbing treatment by the device for manufacturing a liquid crystal device according to claim 5 or the method for manufacturing a liquid crystal device according to any one of claims 5 to 8.