JP2003215014A5 - - Google Patents

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Publication number
JP2003215014A5
JP2003215014A5 JP2002013406A JP2002013406A JP2003215014A5 JP 2003215014 A5 JP2003215014 A5 JP 2003215014A5 JP 2002013406 A JP2002013406 A JP 2002013406A JP 2002013406 A JP2002013406 A JP 2002013406A JP 2003215014 A5 JP2003215014 A5 JP 2003215014A5
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JP
Japan
Prior art keywords
amplifier
movement
base
drive device
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002013406A
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English (en)
Japanese (ja)
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JP2003215014A (ja
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Publication date
Application filed filed Critical
Priority to JP2002013406A priority Critical patent/JP2003215014A/ja
Priority claimed from JP2002013406A external-priority patent/JP2003215014A/ja
Publication of JP2003215014A publication Critical patent/JP2003215014A/ja
Publication of JP2003215014A5 publication Critical patent/JP2003215014A5/ja
Pending legal-status Critical Current

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JP2002013406A 2002-01-22 2002-01-22 駆動装置及びこれを用いた走査型プローブ顕微鏡装置 Pending JP2003215014A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002013406A JP2003215014A (ja) 2002-01-22 2002-01-22 駆動装置及びこれを用いた走査型プローブ顕微鏡装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002013406A JP2003215014A (ja) 2002-01-22 2002-01-22 駆動装置及びこれを用いた走査型プローブ顕微鏡装置

Publications (2)

Publication Number Publication Date
JP2003215014A JP2003215014A (ja) 2003-07-30
JP2003215014A5 true JP2003215014A5 (da) 2005-08-11

Family

ID=27650375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002013406A Pending JP2003215014A (ja) 2002-01-22 2002-01-22 駆動装置及びこれを用いた走査型プローブ顕微鏡装置

Country Status (1)

Country Link
JP (1) JP2003215014A (da)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100628321B1 (ko) 2004-12-16 2006-09-27 한국전자통신연구원 마이크로 칼럼 전자빔 장치

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