JP2003212586A - Production method of optical fiber, laser guide for high power laser transmission and high power laser light source - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser guide which hardly exhibits nonlinear optical phenomena even when a high power laser is transmitted, and to provide a high power laser light source using the same. <P>SOLUTION: This laser guide for high power laser transmission has an optical fiber which is constituted in such a manner that the amount of Brillouin wavelength shift is changed in a longitudinal direction by changing the density and residual stress, etc., of glass in the longitudinal direction and, preferably, has a temperature controlling means which generates a temperature distribution in the longitudinal direction of the optical fiber. Further, this high power laser light source device has the laser guide and the laser light source. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser guide for high power laser transmission (hereinafter, also simply referred to as "laser guide"), a high power laser light source device, and an optical fiber that can be used for the laser guide and the high power laser light source device. Manufacturing method.

[0002]

2. Description of the Related Art With the increase in the density of integrated circuits, laser beams of various wavelengths are used in steppers for forming circuit patterns, depending on the purpose of pattern formation.
As a laser light source, a KrF excimer laser device (wavelength 248 nm), an ArF excimer laser device (wavelength 1
93 nm), YAG laser device (wavelength 1.06 μm)
Are used.

Laser light emitted from these light source devices may be irradiated onto an object to be processed through an optical fiber. Also, when analyzing the ultraviolet rays that are generated when the object to be processed is excited by the irradiation light and monitoring the layer to which etching has reached, the optical fiber is used as the transmission path from the object to the photodetector. May be used. A laser for such processing has a high power (10 to 10 ¹⁰
W / cm ² , preferably 10 ⁴ to 10 ⁹ W / cm ² , and more preferably 10 ⁷ to 10 ⁸ W / cm ² ).

However, in transmission of a high power laser, non-linear optical phenomena such as Brillouin scattering and Raman scattering pose a problem. The non-linear optical phenomenon was established when the power of the incident laser was low, and the linear relationship between the power of the laser incident on the optical fiber and the power of the transmitted laser (the laser after transmission) was the incident laser. If the power of is high, it will not hold. Brillouin scattering is a phenomenon that appears even at a relatively low power (for example, about 10 W / cm ² ), and is a phenomenon that causes scattering at 180 ° with respect to the transmission direction (that is, a direction opposite to the transmission direction). . Raman scattering has higher power (for example, about 10 ⁴ W / cm ² )
Is a phenomenon that is manifested in the transmission of, and is a phenomenon in which scattering occurs in an arbitrary direction (in the case of an optical fiber, forward and backward). When a laser of higher power is incident, the optical fiber may generate heat and be damaged.

When such scattering occurs, the linear relationship between the incident laser beam and the transmitted laser beam is broken, which causes a problem of poor controllability of processing. In particular, when Raman scattering becomes apparent, scattered light having a wavelength different from the intended wavelength is irradiated on the object to be processed, which is a significant impediment to improvement in accuracy in processing. Therefore, as a processing laser, it is the current situation that only a laser having a low power which hardly causes the above-mentioned nonlinear optical phenomenon can be used.

[0006]

However, for processing such as trimming, fine cutting and marking, it is preferable to use a laser of higher power. On the other hand, no processing laser guide (optical fiber assembly) intended to suppress a non-linear optical phenomenon during transmission of a high power laser is provided. In view of such a situation, the present invention provides a laser guide that does not easily cause the above problems even when a high power laser is transmitted, a high power laser light source device using the laser guide, and a method for manufacturing an optical fiber that can be used for them. It is intended to be provided.

[0007]

DISCLOSURE OF THE INVENTION The inventors of the present invention have studied the manufacturing method of an optical fiber in which a nonlinear optical phenomenon is unlikely to occur, and consider the structure of a laser guide and the structure of a laser light source. The present invention has been completed having the following features that can solve the problems. (1) A method of manufacturing an optical fiber, which comprises a step of heating at least a silica-based optical fiber preform and drawing it, wherein a heating temperature in the heating is changed with time. (2) A method of manufacturing an optical fiber, which comprises a step of heating at least a silica-based optical fiber preform and drawing it, wherein the tension in the drawing is changed with time. (3) A method of manufacturing an optical fiber, which comprises a step of heating at least a silica-based optical fiber preform and drawing the optical fiber, wherein a cooling condition in the drawing is changed in a longitudinal direction. (4) A laser guide for high power laser transmission, which has an optical fiber configured such that the Brillouin wavelength shift amount changes in the longitudinal direction. (5) The laser guide for high power laser transmission according to (4), wherein the optical fiber is an optical fiber in which the glass density is changed in the longitudinal direction so that the Brillouin wavelength shift amount changes in the longitudinal direction. . (6) The optical fiber is obtained through a process of heating and drawing a silica-based optical fiber preform, and by changing the heating temperature in the heating with time, the glass density in the longitudinal direction is increased. The laser guide for high power laser transmission according to (5), wherein the laser guide is changed. (7) The optical fiber is obtained through a process of heating and drawing a quartz optical fiber preform, and by changing the tension in the drawing with time, the density of glass in the longitudinal direction is changed. The laser guide for high power laser transmission according to (5), which has been changed. (8) The optical fiber is obtained through a step of heating and drawing a silica-based optical fiber preform, and by changing the cooling condition in the drawing in the longitudinal direction,
The density of the glass is changed in the longitudinal direction,
The laser guide for high power laser transmission according to (5). (9) The laser guide for high power laser transmission according to (4), wherein the optical fiber is an optical fiber in which the residual stress is changed in the longitudinal direction so that the Brillouin wavelength shift amount changes in the longitudinal direction. (10) The laser for high power laser transmission according to (9), wherein residual stress is changed in the longitudinal direction of the optical fiber by applying lateral pressures having different magnitudes in the longitudinal direction to the optical fiber. guide. (11) The residual stress is changed in the longitudinal direction of the optical fiber by twisting a plurality of optical fibers,
The laser guide for high power laser transmission according to (9). (12) (4) to (11), further comprising temperature control means for producing a temperature distribution in the longitudinal direction of the optical fiber.
A laser guide for high power laser transmission according to any one of 1. (13) A high power laser light source device having at least the laser guide for high power laser transmission according to any one of (4) to (12) and a laser light source. (14) The high-power laser light source device according to (13), further including wavelength control means capable of varying the peak wavelength of the laser by 0.025% or more per 0.1 microsecond.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION A laser guide according to the present invention is
The optical fiber is configured so that the Brillouin wavelength shift amount changes in the longitudinal direction. The Brillouin wavelength shift amount is the difference between the wavelength of the transmitted laser and the wavelength of the Brillouin scattered light at each point of the optical fiber. If the Brillouin wavelength shift amount at each point of the optical fiber changes in the longitudinal direction, it is expected that the Brillouin scattering is suppressed from being amplified in the longitudinal direction, and as a result, the nonlinear optical phenomenon is suppressed. .

When the Brillouin wavelength shift amount changes in the longitudinal direction, the maximum value of the shift amount in an arbitrary 100 mm portion of the optical fiber is 100.025% of the minimum value.
The above is described (at this time, the change rate is described as 0.025% or more), but it is preferable that the change rate is large. For example, in the case of an optical fiber of a laser guide that transmits a laser having a wavelength of 1 μm, the change rate is
It is preferably 0.030% or more. The Brillouin gain band (full width at half maximum) that determines the preferable rate of change is
It is inversely proportional to the square of the wavelength λ of the transmitted laser. Also,
In order to suppress the amplification of Brillouin scattering in the longitudinal direction more efficiently, it is preferable that the Brillouin wavelength shift amount is changed randomly rather than being regularly (periodically) changed in the longitudinal direction.

The Brillouin wavelength shift amount at any point of the optical fiber can be easily measured by a known method. That is, a portion (100 mm in length) of the optical fiber whose Brillouin wavelength shift amount is to be measured is cut out, and a pulsed laser of frequency ν + Δν is incident from one end and continuous light (laser) of frequency ν is incident from the other end. , The continuous light amplified by Brillouin scattering is detected by the photodetector on the side where the pulsed laser light is incident (N
TT R & D Vol. 41, No. 12, 1445-14
(See page 54). The measurement by the method can be performed by a BOTDR device (manufactured by Ando Electric Co., Ltd.).

The means for changing the Brillouin wavelength shift amount of the optical fiber in the longitudinal direction is not particularly limited, but preferable means are means for changing the glass density in the longitudinal direction of the optical fiber and residual stress in the longitudinal direction of the optical fiber. And a means for changing. These two means can be carried out by making some improvements in a conventionally known optical fiber manufacturing method, that is, a manufacturing method (described later) that involves a step of heating and drawing a quartz optical fiber preform. Are better.

Changing the glass density in the longitudinal direction of the optical fiber means that the maximum value of the density in an arbitrary 100 mm portion of the optical fiber is 100.025% or more of the minimum value (at this time, the change of the density). The change rate is 0.025% or more), but from the viewpoint of sufficiently varying the Brillouin wavelength shift amount, the change rate is 0.03%.
It is preferably 0% or more, and the rate of change is preferably 0.2% or less from the viewpoint of achieving long-term reliability of mechanical properties when stress is applied to the optical fiber.
It is more preferably 0.1% or less. Further, the change may be a regular (periodic) change over the longitudinal direction of the optical fiber, but it is preferably a random change without regularity.

Changing the residual stress in the longitudinal direction of the optical fiber means that the rate of change of the residual stress (similar to the above definition) when focusing on an arbitrary 100 mm portion of the optical fiber.
Is 0.025% or more, but from the viewpoint of sufficiently varying the Brillouin wavelength shift amount, the rate of change is preferably 0.030% or more, and when stress is applied to the optical fiber. From the viewpoint of achieving long-term reliability of mechanical properties, the rate of change is preferably 0.2% or less, and more preferably 0.1% or less. further,
The change may be a regular (periodic) change over the longitudinal direction of the optical fiber, but is preferably a random change having no regularity.

Here, the method of measuring the residual stress at an arbitrary position of the optical fiber is as follows. That is, it is a method of measuring the residual stress of the optical fiber by accurately measuring the optical length of the optical fiber having a constant physical length, specifically, by guiding light to the core of the optical fiber Utilizes interference phenomenon with (measurement by optical path length difference meter)
Is the way.

Specific means for changing the density and residual stress of the optical fiber as described above will be described below with reference to an example of a method for manufacturing the optical fiber used in the laser guide according to the present invention. In the description, drawings are used as appropriate, but the present invention is not limited to the embodiments shown in the drawings.

FIG. 1 is a diagram schematically showing a process of processing an optical fiber used in the laser guide of the present invention. The manufacturing method is a method including a step of heating a silica-based optical fiber preform (hereinafter, also referred to as “optical fiber preform”) 1 and drawing the optical fiber 2 (hereinafter, also simply referred to as “drawing process”). is there.

As the silica-based optical fiber base material (preform) 1 used as a material for drawing in the present invention, any material having a known core base material made of silica-based glass can be used. Quartz optical fiber base material 1
May be only a core portion (quartz glass, not shown) or may have a core portion and a clad portion (for example, glass doped with fluorine or the like, not shown). In the case of only the core portion, the clad portion is covered during drawing. As the material of the clad portion, it is preferable to use silica glass having a lower refractive index than that of the core portion.

The above silica-based optical fiber preform 1 is generally used as
The wire drawing is performed by heating to about 00 ° C to 2400 ° C. As a first embodiment of the present invention, at this time, it is possible to change the heating temperature with time to change the glass density in the longitudinal direction of the optical fiber after drawing. In order to change the heating temperature with time, for example, the current sent to the heater S1 may be changed with time.

To change the heating temperature with time means that the maximum value of the heating temperature in any 10 seconds during the heating is 100.5% or more of the minimum value (at this time, the temperature change rate is 0%). 0.5% or more), the change rate is preferably 1% or more from the viewpoint of sufficiently changing the glass density in the longitudinal direction of the optical fiber. From the viewpoint of stabilizing the shape,
The rate of change is preferably 2% or less, 1.5%
The following is more preferable. Further, the change may be a regular (periodic) change, but is preferably a random change without regularity.

In the drawing following the heating, the heated silica-based optical fiber preform 1 is subjected to a predetermined tension (usually 0.2 to
0.6 N) is drawn to obtain the optical fiber 2. As a second embodiment of the present invention, it is possible to change the density of glass in the longitudinal direction of the optical fiber 2 by changing the tension in this drawing step with time. In order to change the tension with time, for example, the drawing speed may be changed with time.

To change the tension in the drawing step with time means that the tension in the drawing step is arbitrary for 1 second.
The rate of change of the tension (similar to the above definition) is 0.1% or more, but from the viewpoint of sufficiently changing the density of glass in the longitudinal direction of the optical fiber 2, the rate of change is 0.
It is preferably 5% or more, and the rate of change is preferably 1.0% or less, from the viewpoint of ensuring the stability of the optical fiber structural dimension when the tension in the drawing step is changed, and is 0.8% or less. % Or less is more preferable. Further, the change may be a regular (periodic) change, but is preferably a random change without regularity.

After the drawing step, the drawn optical fiber 2 is cooled under predetermined conditions. As a third embodiment of the present invention, changing the cooling condition in the longitudinal direction can change the glass density in the longitudinal direction of the optical fiber 2. In order to change the cooling condition, for example, a means of slowing the cooling rate by using an auxiliary heater S2 at the time of cooling, or conversely increasing the cooling rate by using a cooling medium during the drawing process can be mentioned. .

In the present specification, changing the cooling condition in the longitudinal direction means changing the time required from the start of drawing to the room temperature in the longitudinal direction. Here, the room temperature is 5 to 35 ° C. as specified in JIS K 0050. Changing the cooling condition means that the maximum value of the time required for cooling in an arbitrary 100 mm portion of the optical fiber 2 is 101.0% or more of the minimum value (the rate of change of the time required for cooling at this time is 1.
0% or more), but from the viewpoint of sufficiently changing the density of the glass in the longitudinal direction, the rate of change is preferably 3% or more, and when changing the cooling conditions, From the viewpoint of stabilizing the dimension of the optical fiber structure due to vibration or the like, the rate of change is preferably 6% or less, and more preferably 5% or less. Further, the change may be a regular (periodic) change, but is preferably a random change without regularity.

The outer circumference of the optical fiber 2 may be coated with a metal such as aluminum or copper or carbon during or after the drawing step. As a process of coating,
Although there is a step in which the optical fiber 2 being drawn passes through a bath (not shown) containing molten aluminum, the above cooling conditions can be changed by adopting such a step.

Further, during or after the drawing step, it is possible to apply a lateral pressure of about 0.2 to 0.3% surface strain to the optical fiber 2 to give a residual stress to the optical fiber 2. As a fourth embodiment of the present invention, it is possible to change the residual stress in the longitudinal direction of the optical fiber 2 by applying lateral pressures of different magnitudes in the longitudinal direction. The lateral pressure can be easily applied by providing a pressing machine S3 or the like in the production line of the optical fiber 2,
With the pressing machine S3 or the like, it is possible to apply different lateral pressures in the longitudinal direction of the optical fiber 2.

Applying lateral pressures of different magnitudes in the longitudinal direction of the optical fiber 2 means that the optical fiber 2 is at an arbitrary 100 mm.
The maximum value of the lateral pressure in the part of is the minimum value of 100.02
5% or more (at this time, the change rate of the lateral pressure is 0.02
5% or more), but the optical fiber 2
From the viewpoint of sufficiently changing the residual stress in the longitudinal direction, the rate of change is preferably 0.030% or more, and from the viewpoint of long-term reliability of mechanical properties when stress is applied to the optical fiber. Therefore, the rate of change is preferably 0.2% or less, and more preferably 0.1% or less. Further, the change may be a regular (periodic) change, but is preferably a random change without regularity.

A laser guide (optical fiber assembly) can be manufactured by using one or more optical fibers 2 obtained as described above. Usually, the optical fiber 2 is housed in a flexible tube (not shown). This is to prevent the optical fiber 2 from being damaged during transportation and use of the laser guide. The flexible tube is usually made of stainless steel (SUS) from the viewpoint of heat resistance and robustness, but may be made of other materials. Further, usually, at least one end of the optical fiber 2 is fixed to a sleeve (not shown) using an adhesive or the like. The sleeve is intended to protect the end of the optical fiber 2 to prevent damage and to facilitate and ensure the connection when connecting the laser guide to another device or the like. When the sleeve is used, known materials can be arbitrarily used as the material, shape, and the like.

As described above, when manufacturing a laser guide using the optical fiber 2, as a fifth embodiment of the present invention, by twisting a plurality of optical fibers 2, the residual stress in the longitudinal direction of the optical fiber 2 is increased. Can be changed.

In order to change the residual stress in the longitudinal direction of the optical fiber 2, the pitch of the twist must be 250 mm or less, but from the viewpoint of sufficiently changing the residual stress in the longitudinal direction of the optical fiber 2, The pitch is preferably 100 mm or less, more preferably 75 mm or less, and from the viewpoint of long-term reliability of mechanical properties when stress is applied to the optical fiber, the pitch is 30 mm or less.
It is preferably at least mm, and more preferably at least 50 mm. Furthermore, the twist of the optical fiber 2 may be a regular (periodic) pitch, but it is preferable that the twist is a random pitch with no regularity.

By the means exemplified above, it is possible to obtain the laser guide having the optical fiber 2 configured such that the Brillouin wavelength shift amount changes in the longitudinal direction.

Further, as a preferred embodiment of the present invention, a laser guide having the above-mentioned optical fiber 2 further including temperature control means for producing a temperature distribution in the longitudinal direction of the optical fiber can be mentioned. . This is intended to suppress amplification of Raman scattering, which is manifested when a laser having a higher power (for example, 10 ⁴ W / cm ² or more) is transmitted than when Brillouin scattering is manifested. is there.

As the temperature control means, known means may be used. For example, a plurality of heating wires may be arranged in the longitudinal direction of the flexible tube so that the current value can be controlled independently, or a plurality of cooling media can be used. Can be mentioned.

To produce a temperature distribution in the longitudinal direction of the optical fiber 2 means that the maximum value of the temperature in an arbitrary 100 mm portion of the optical fiber 2 is 101.0% or more of the minimum value (at this time, The change rate is 1.0% or more). However, in order to more efficiently suppress amplification of Raman scattering, the change rate is preferably 2.0% or more. From the viewpoint of achieving stability of optical fiber temperature control, the rate of change is preferably 5.0% or less, more preferably 3.0% or less. Further, the temperature distribution may be a regular (periodic) distribution, but it is preferably a random distribution having no regularity.

By thus producing the temperature distribution in the longitudinal direction of the optical fiber 2, the Raman scattering intensity at each point of the optical fiber 2 changes in the longitudinal direction, and the Raman scattering is amplified in the longitudinal direction. Is suppressed,
As a result, it is expected that the nonlinear optical phenomenon will be suppressed.

In this way, it is possible to obtain a laser guide with suppressed nonlinear optical phenomenon. Further, a high power laser light source device (hereinafter, also simply referred to as “light source device”) having the above laser guide and a laser light source is also an embodiment of the present invention. The light source device is a device that can transmit a high-power laser generated from a light source to a desired position while suppressing a nonlinear optical phenomenon.

As the light source of the laser used in the light source device according to the present invention, a known light source may be used depending on the application.
F light source (wavelength 248 nm), ArF light source (wavelength 193n
m), a YAG light source (wavelength 1.06 μm) and the like.

The light source device according to the present invention may be provided with other means in addition to the above laser guide and laser light source. Examples of such means include wavelength control means, time waveform control means, energy control means, and the like.

In the light source device according to the present invention, the peak wavelength of the laser to be transmitted is 0.1 microsecond per
Preferably 0.025% or more, more preferably 0.03
It is desirable to further have a wavelength control means capable of changing by 0% or more. The peak wavelength of the laser to be transmitted means the wavelength at which f ₀ in FIG. 2A, that is, the maximum intensity in the intensity distribution of the wavelength of the laser to be transmitted.
The wavelength (f ₀ ) is 0.025 per 0.1 microsecond.
2B, it means that the fluctuation of any 0.
The maximum value (f _max ) of f ₀ in 1 microsecond is
A value that is 100.025% or more of the minimum value (f _min ) (at this time, the rate of change in wavelength is 0.025% or more,
In order to suppress the amplification of Brillouin scattering more efficiently, the change rate is 0.030%.
It is preferable that the rate of change is 0.2% or less, and more preferably 0.1% or less, from the viewpoint of stabilizing the laser operation. Further, the temperature distribution may be a regular (periodic) distribution, but it is preferably a random distribution having no regularity.

As means for controlling the wavelength in this way,
The internal modulation method and the external modulation method (EO modulator, AO modulator, etc.) are exemplified, but the external modulation method is preferable from the viewpoint of its response speed and wavelength stability.

Since the wavelength fluctuation as described above is equal to or more than the wavelength shift due to Brillouin scattering, the amplification of the wavelength shift due to Brillouin scattering can be suppressed, and the optical fiber 2 can be less likely to be damaged.

[0041]

The optical fiber manufactured by the method of the present invention is constructed so that the Brillouin wavelength shift amount changes in the longitudinal direction by changing the density or residual stress of glass in the longitudinal direction. is there. Since such an optical fiber can suppress the amplification of Brillouin scattering, the nonlinear optical phenomenon is less likely to be manifested even when transmitting a laser with higher power than before. Therefore, in the laser guide having such an optical fiber, since the linearity between the incident laser beam and the transmitted laser beam is good, it is possible to perform more accurate processing.

In a preferred embodiment of the present invention,
The optical fiber further has temperature control means for producing a temperature distribution in the longitudinal direction, and the Raman scattering intensity at each point of the optical fiber changes in the longitudinal direction, and the Raman scattering is amplified in the longitudinal direction. Is suppressed. Since Raman scattering becomes apparent when transmitting a laser having a relatively high power, according to this embodiment, it is expected that the nonlinear optical phenomenon is suppressed even when transmitting a laser having a higher power.

Since the high power laser light source device according to the present invention has the high power laser guide and the laser light source, it is a laser light source device in which a nonlinear optical phenomenon hardly occurs. As a further preferred embodiment, the high-power laser light source device further having wavelength control means for varying the peak wavelength of the laser to be transmitted can more efficiently suppress amplification of Brillouin wavelength shift.

[Brief description of drawings]

FIG. 1 is a diagram schematically showing an example of a processing step of an optical fiber used for a laser guide for high power laser transmission according to the present invention.

FIG. 2 is an explanatory diagram for a wavelength variation of a laser to be transmitted in the high power laser light source device according to the present invention. (A) shows the relationship between the wavelength and intensity of the laser at a certain time, and (B) shows the time variation of the peak wavelength.

[Explanation of symbols]

1 Quartz optical fiber base material 2 Optical fiber S1 Heater S2 Heater S3 Press machine f ₀ Wavelength of peak of laser to be transmitted f _max Maximum value of f ₀ in arbitrary 0.1 microseconds f _min Optional 0.1 microseconds Minimum value of f ₀ at

Claims (14)

[Claims] 1. A method of manufacturing an optical fiber, comprising a step of heating and drawing a quartz optical fiber preform, wherein the heating temperature in the heating is changed with time. Method. 2. A method of manufacturing an optical fiber, which comprises a step of heating at least a silica-based optical fiber preform and drawing it, wherein the tension in the drawing is changed with time. . 3. A method of manufacturing an optical fiber, comprising a step of heating at least a silica-based optical fiber preform and drawing the optical fiber, wherein a cooling condition in the drawing is changed in a longitudinal direction. Method. 4. A laser guide for high-power laser transmission, comprising an optical fiber configured so that the Brillouin wavelength shift amount changes in the longitudinal direction. 5. The high power laser transmission according to claim 4, wherein the optical fiber is an optical fiber in which the glass density is changed in the longitudinal direction so that the Brillouin wavelength shift amount changes in the longitudinal direction. Laser guide. 6. The optical fiber is obtained through a step of heating and drawing a quartz optical fiber preform, and by changing the heating temperature in the heating with time, the glass is elongated in the longitudinal direction. The density of is changed,
The laser guide for high power laser transmission according to claim 5. 7. The optical fiber is obtained through a step of heating and drawing a silica-based optical fiber preform, and by changing the tension in the drawing with time, the glass fiber in the longitudinal direction is formed. It is a change in density,
The laser guide for high power laser transmission according to claim 5. 8. The optical fiber is obtained through a process of heating and drawing a silica-based optical fiber preform, and the cooling condition in the drawing is changed in the longitudinal direction to obtain glass in the longitudinal direction. 6. The laser guide for high power laser transmission according to claim 5, wherein the density is changed. 9. The laser for high power laser transmission according to claim 4, wherein the optical fiber is an optical fiber in which the residual stress is changed in the longitudinal direction so that the Brillouin wavelength shift amount changes in the longitudinal direction. guide. 10. The high power laser transmission according to claim 9, wherein residual stress is changed in the longitudinal direction of the optical fiber by applying lateral pressures having different magnitudes in the longitudinal direction to the optical fiber. Laser guide for. 11. By twisting a plurality of optical fibers,
The laser guide for high power laser transmission according to claim 9, wherein the residual stress is changed in the longitudinal direction of the optical fiber. 12. The temperature control means for producing a temperature distribution in the longitudinal direction of the optical fiber, further comprising:
The laser guide for high power laser transmission according to any one of 1 to 11. 13. A laser guide for high power laser transmission according to any one of claims 4 to 12,
A high power laser light source device having a laser light source. 14. The laser has a peak wavelength of 0.1.
The high-power laser light source device according to claim 13, further comprising a wavelength control unit capable of varying 0.025% or more per microsecond.