JP2003211150A5 - - Google Patents

Download PDF

Info

Publication number
JP2003211150A5
JP2003211150A5 JP2002013702A JP2002013702A JP2003211150A5 JP 2003211150 A5 JP2003211150 A5 JP 2003211150A5 JP 2002013702 A JP2002013702 A JP 2002013702A JP 2002013702 A JP2002013702 A JP 2002013702A JP 2003211150 A5 JP2003211150 A5 JP 2003211150A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002013702A
Other languages
Japanese (ja)
Other versions
JP3734081B2 (ja
JP2003211150A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002013702A priority Critical patent/JP3734081B2/ja
Priority claimed from JP2002013702A external-priority patent/JP3734081B2/ja
Publication of JP2003211150A publication Critical patent/JP2003211150A/ja
Publication of JP2003211150A5 publication Critical patent/JP2003211150A5/ja
Application granted granted Critical
Publication of JP3734081B2 publication Critical patent/JP3734081B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

JP2002013702A 2002-01-23 2002-01-23 Cmp工程排水処理装置 Expired - Lifetime JP3734081B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002013702A JP3734081B2 (ja) 2002-01-23 2002-01-23 Cmp工程排水処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002013702A JP3734081B2 (ja) 2002-01-23 2002-01-23 Cmp工程排水処理装置

Publications (3)

Publication Number Publication Date
JP2003211150A JP2003211150A (ja) 2003-07-29
JP2003211150A5 true JP2003211150A5 (enrdf_load_stackoverflow) 2005-06-02
JP3734081B2 JP3734081B2 (ja) 2006-01-11

Family

ID=27650595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002013702A Expired - Lifetime JP3734081B2 (ja) 2002-01-23 2002-01-23 Cmp工程排水処理装置

Country Status (1)

Country Link
JP (1) JP3734081B2 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5233138B2 (ja) * 2007-03-20 2013-07-10 栗田工業株式会社 純水製造装置からの濃縮廃水の処理方法および前記濃縮廃水の処理装置。
JP6156678B2 (ja) * 2012-10-11 2017-07-05 パナソニックIpマネジメント株式会社 レジスト剥離液の再生方法および再生装置
CN103241885A (zh) * 2013-05-15 2013-08-14 绍兴奇彩化工有限公司 一种分散染料的酸性废水处理方法
CN113788507B (zh) * 2021-08-31 2023-03-07 深圳市金华泰实验室科技发展有限公司 一种实验室废液浓缩装置
CN119118406B (zh) * 2024-09-05 2025-07-11 上海中发环保工程有限公司 基于电催化、hubf厌氧和hfst好氧处理的聚乙二醇综合化学降解装置

Similar Documents

Publication Publication Date Title
BE2019C547I2 (enrdf_load_stackoverflow)
BE2019C510I2 (enrdf_load_stackoverflow)
BE2018C021I2 (enrdf_load_stackoverflow)
BE2017C049I2 (enrdf_load_stackoverflow)
BE2017C005I2 (enrdf_load_stackoverflow)
BE2016C069I2 (enrdf_load_stackoverflow)
BE2016C040I2 (enrdf_load_stackoverflow)
BE2016C013I2 (enrdf_load_stackoverflow)
BE2015C078I2 (enrdf_load_stackoverflow)
BE2016C002I2 (enrdf_load_stackoverflow)
BE2018C018I2 (enrdf_load_stackoverflow)
BE2015C017I2 (enrdf_load_stackoverflow)
BE2014C053I2 (enrdf_load_stackoverflow)
BE2014C051I2 (enrdf_load_stackoverflow)
BE2014C041I2 (enrdf_load_stackoverflow)
BE2014C030I2 (enrdf_load_stackoverflow)
BE2014C016I2 (enrdf_load_stackoverflow)
BE2014C015I2 (enrdf_load_stackoverflow)
BE2013C063I2 (enrdf_load_stackoverflow)
BE2013C039I2 (enrdf_load_stackoverflow)
BE2011C038I2 (enrdf_load_stackoverflow)
BE2015C068I2 (enrdf_load_stackoverflow)
BE2013C046I2 (enrdf_load_stackoverflow)
JP2003244166A5 (enrdf_load_stackoverflow)
BR0315835A2 (enrdf_load_stackoverflow)