JP2003211150A5 - - Google Patents
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- JP2003211150A5 JP2003211150A5 JP2002013702A JP2002013702A JP2003211150A5 JP 2003211150 A5 JP2003211150 A5 JP 2003211150A5 JP 2002013702 A JP2002013702 A JP 2002013702A JP 2002013702 A JP2002013702 A JP 2002013702A JP 2003211150 A5 JP2003211150 A5 JP 2003211150A5
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002013702A JP3734081B2 (en) | 2002-01-23 | 2002-01-23 | CMP process wastewater treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002013702A JP3734081B2 (en) | 2002-01-23 | 2002-01-23 | CMP process wastewater treatment equipment |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003211150A JP2003211150A (en) | 2003-07-29 |
| JP2003211150A5 true JP2003211150A5 (en) | 2005-06-02 |
| JP3734081B2 JP3734081B2 (en) | 2006-01-11 |
Family
ID=27650595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002013702A Expired - Lifetime JP3734081B2 (en) | 2002-01-23 | 2002-01-23 | CMP process wastewater treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3734081B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5233138B2 (en) * | 2007-03-20 | 2013-07-10 | 栗田工業株式会社 | A method for treating concentrated wastewater from a pure water production apparatus and a treatment apparatus for the concentrated wastewater. |
| JP6156678B2 (en) * | 2012-10-11 | 2017-07-05 | パナソニックＩｐマネジメント株式会社 | Method and apparatus for regenerating resist stripping solution |
| CN103241885A (en) * | 2013-05-15 | 2013-08-14 | 绍兴奇彩化工有限公司 | Method for treating acid waste water of disperse dye |
| CN113788507B (en) * | 2021-08-31 | 2023-03-07 | 深圳市金华泰实验室科技发展有限公司 | Laboratory waste liquid enrichment facility |
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2002
- 2002-01-23 JP JP2002013702A patent/JP3734081B2/en not_active Expired - Lifetime