JP2003206109A - Ozone generator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a structure of a laminated ozone generator which is inexpensive and has satisfactory quality and wherein raw material gas between discharge units can be easily and reliably shielded, positioning and supporting of a plurality, of electrode groups (a plurality of the discharge units) such that the groups can be reliably and plurally laminated can be easily performed by suppressing fluctuation of a gap length (d) of a discharge space. <P>SOLUTION: A discharge cell 33 wherein two discharge units are laminated is constituted by disposing two dielectric electrodes 23a, each of which is integrally formed with a dielectric 24, back to back with each other and disposing two ground electrodes 22 oppositely to each other on the both sides thereof via discharge spaces 25 each having the prescribed gap length. Three electrode connecting bars 31 each having a prescribed length are disposed at even intervals in a peripheral direction between the two ground electrodes 22 at the peripheral parts thereof to connect the ground electrodes by maintaining a prescribed dimension between them. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone generator, and more particularly to the structure of an ozone generator capable of generating a large amount of ozone with high efficiency and high concentration of ozone.

[0002]

2. Description of the Related Art FIG. 13 shows an Otto-Plate (Otto-Plate) shown on page 249 of the "Ozonizer Handbook" (edited by the Institute of Electrical Engineers of Japan, Ozonizer Special Committee, published by Corona Publishing Co., 1960).
It is sectional drawing which shows the conventional ozone generator called a plate type. In the figure, 1 is a power supply, 2 is a ground electrode made of a grounded metal, 3 is a high-voltage electrode that is provided facing the ground electrode 2, and is connected to the high voltage side of the power supply 1, and 4 is a ground electrode 2 and a high-voltage electrode. A dielectric (glass plate) is arranged on the surface of the electrode 3. The electrode surface side of the dielectric 4 is vapor-deposited with metal for electric power feeding.
Electricity is supplied by contact with. 5 is the discharge space,
Reference numeral 6 is a spacer for forming the discharge space 5. Reference numeral 7 is an ozonized gas discharge pipe. Next, the operation will be described. By applying an alternating high voltage between the ground electrode 2 and the high voltage electrode 3, a dielectric barrier discharge is generated in the discharge space 5 between the electrodes via the dielectric 4. The raw material gas containing oxygen gas is introduced from the entire periphery of the ozone generator and, when passing through the discharge space 5, the discharge causes the oxygen gas to dissociate into oxygen atoms, and at the same time, the oxygen atoms and other oxygen atoms are dissociated. Ozone gas is generated by causing a three-body collision of molecules and walls. By continuously supplying the oxygen gas to the discharge space 5, the ozone gas generated by the discharge can be continuously taken out as the ozonized gas from the discharge pipe 7.

FIG. 14 shows, for example, Japanese Unexamined Patent Publication No. 8-1230.
FIG. 14 shows another example of the conventional ozone generator described in Japanese Patent Publication No. 4 (1994), FIG. 14 (a) is a plan view showing the structure of the ozone generator, and FIG. 14 (b) is X- of FIG. 14 (a). It is sectional drawing by X-ray. In the figure, reference numeral 12 denotes a circular ground electrode which also serves as a container of an ozone generator. A space 18 for cooling is provided on an end surface of the ground electrode 12, and water is made to flow in a direction of an arrow 18a for cooling. Reference numeral 13 is a conductive film that serves as a high voltage electrode, and is formed on the surface of a disk-shaped ceramic dielectric 14. 16 is a radial spacer for forming a radial discharge space between the dielectric 14 and the ground electrode 12, 17a is a gas supply port, 17b is a gas discharge port, 19 is a power supply terminal for supplying a high voltage, The power supply plate 20 is connected to the tip.
The power supply plate 20 presses the spring member 21 and presses the dielectric material 14 through the conductive film 13 to keep the gap length of the discharge space proper. The raw material gas that generates ozone is introduced from the gas supply port 17a, and ozone gas is generated as described above in the discharge space where a high voltage electric field is applied between the conductive film 13 and the ground electrode 12, and the gas discharge port is generated. It is discharged from 17b.

It is said that the maximum generation efficiency of ozone gas that can be extracted by such discharge is about 20%, and 80% of the discharge power is lost by heating the electrode. The generation efficiency of ozone gas depends on the electrode temperature (strictly speaking, the discharge gas temperature), and the lower the electrode temperature, the higher the generation efficiency. Therefore, the electrodes are directly cooled with water or the like, and the discharge spaces 5, 1,
By shortening the void length of 5, the gas temperature in the discharge space is suppressed, and the electron temperature is increased to increase ozone generation efficiency and suppress the ozone decomposition rate, and as a result, highly concentrated ozone gas can be extracted efficiently. I am trying.

[0005]

As described above, in the ozone generator, the gas temperature can be suppressed to a low level by setting the gap length d of the discharge space to be short even if the same electric power is supplied, and the high concentration can be obtained. However, if the variation in the gap length d becomes large, the flow rate of the gas flowing in the discharge space also varies, and the density of the discharge power supplied to the discharge space also varies, resulting in a decrease in ozone generation efficiency. The conventional ozone generator shown in FIG. 13 has an electrode laminated structure, and a plurality of discharge spaces are laminated, but within a precision range of d ± 20% when the void length d of the discharge space 5 is approximately 0.6 mm or less. It was difficult to configure. Therefore, there is a problem that the ozone generation efficiency is deteriorated and a high concentration of ozonized gas cannot be obtained. Also, the device could not be disassembled and could not be overhauled, resulting in a device with a short life. Further, in the conventional ozone generator using the flat plate electrode shown in FIG. 14, the accuracy of the void length d is secured, but since the discharge space is one layer, there is a limit to increase the ozone generation amount. It was Therefore, if a discharge unit including the ground electrode 12, the high-voltage electrode 13 and the discharge space between them is stacked as a means for increasing the ozone generation amount, the accuracy of the void length d for each discharge unit deteriorates, Ozone generation efficiency decreases, and a high concentration of ozonized gas cannot be obtained. Further, in order to stack the discharge units, it is difficult to reliably realize the shielding of the raw material gas between the electrodes and the generated ozone gas, the support of each electrode, and the alignment (centering).

The present invention has been made in order to solve the above problems, and can easily and surely shield the source gas between the discharge units, and also has a plurality of electrode groups. The plurality of discharge units can be easily aligned and supported by suppressing the variation in the gap length d of the discharge space, and a plurality of discharge units can be stacked in a reliable manner. The object is to provide a good laminated ozone generator structure.

[0007]

[Means for Solving the Problems] Claim 1 according to the present invention
The ozone generator described includes two first electrodes having one polarity and two dielectric electrodes integrally formed with a dielectric plate having the other polarity and disposed on the surface. , The two dielectric electrodes are arranged back to back, and the two first electrodes are arranged to face each other with a discharge space having a predetermined gap length on both sides thereof to form a discharge cell. Between the two dielectric electrodes described above, a sealing ring is attached around a hole provided in the central portion of the dielectric electrode to connect the two discharge spaces in the discharge cell to each other, and the bipolar electrodes. A device configuration for supplying a gas containing oxygen between and applying an alternating high voltage to generate ozone in the discharge space to generate ozone,
At least three electrode connecting rods having a predetermined length are arranged at equal intervals in the outer peripheral portion between the two first electrodes, and the electrode connecting between the two first electrodes is performed. It is held and connected by the length of the rod.

According to a second aspect of the present invention, in the first aspect, the accuracy of the length of the electrode connecting rod is within the range of ⅛ or less of the discharge gap length.

According to a third aspect of the present invention, in the ozone generating apparatus according to the first or second aspect, the two dielectric electrodes in the discharge cell are supported at predetermined positions from the side surface by the electrode connecting rod. is there.

According to a fourth aspect of the present invention, in the ozone generating apparatus according to any one of the first to third aspects, the electrode connecting rod is made of an electrically insulating member.

According to a fifth aspect of the present invention, in the ozone generating apparatus according to any one of the first to fourth aspects, the electrode connecting rod for connecting the two first electrodes and the first electrode are connected to each other. It is fixed by a fixing means via an elastic member.

According to a sixth aspect of the present invention, in the ozone generating apparatus according to any one of the first to fifth aspects, an O-ring or a gasket is provided on one or both of the upper and lower end faces of the sealing ring, and the ozone generating device has two sheets. The space between the dielectric electrodes is pressed from both sides.

According to a seventh aspect of the present invention, there is provided an ozone generator, comprising: two first electrodes having one polarity;
It has a dielectric plate having the other polarity and arranged on the surface, and two dielectric electrodes integrally formed, and the two dielectric electrodes are arranged back to back, and a predetermined space is provided on both sides thereof. The two first electrodes are arranged to face each other through a long discharge space to form a discharge cell, and the discharge cell is provided between the two dielectric electrodes, which are back-to-back, in the central portion of the dielectric electrode. A sealing ring is attached around the hole to connect the two discharge spaces in the discharge cell to each other, and a gas containing oxygen is supplied between the bipolar electrodes to apply an AC high voltage to the discharge space. An apparatus configuration for generating discharge and ozone, in which an O-ring or a gasket is arranged on one or both of the upper and lower end surfaces of the sealing ring to press the two dielectric electrodes from both sides. .

According to an eighth aspect of the present invention, in the ozone generator according to any one of the first to seventh aspects, a high voltage is supplied to the two dielectric electrodes between the two dielectric electrodes. The power supply plate is mounted in a shape having a hole in the center, and a sealing ring is fitted in the hole.

According to a ninth aspect of the present invention, in the ozone generating apparatus according to the eighth aspect, a plurality of pressing springs are mounted around the sealing ring above and below the power supply plate at equal intervals in the circumferential direction. The dielectric electrode is pressed outward.

According to a tenth aspect of the present invention, in the ozone generating apparatus according to any one of the first to ninth aspects, the sealing ring is made of ozone-resistant stainless steel or tetrafluoroethylene polymer. .

According to an eleventh aspect of the present invention, in the ozone generating apparatus according to any one of the first to tenth aspects, the sealing ring is made of an elastic material or is formed in a bellows shape to have an elastic function. It is a thing.

An ozone generator according to a twelfth aspect of the present invention is the ozone generator according to any one of the first to sixth aspects, wherein a plurality of discharge cells are laminated to form a laminated body, and the first of each discharge cell is formed.
The electrode connecting rods arranged between the electrodes are displaced from each other in the adjacent discharge cells at a predetermined angle in the circumferential direction.

According to a thirteenth aspect of the present invention, in the ozone generating apparatus according to any one of the first to twelfth aspects, a laminate in which a plurality of discharge cells are laminated is pressed from both sides in the stacking direction with pressing plates, A plurality of fixing rods having a predetermined length are arranged at equal intervals in the outer peripheral portion between the holding plates on both sides in the circumferential direction, and the holding plates are held at the length dimension of the fixing rods to form the stack. The whole body is pressed from both sides.

An ozone generator according to a fourteenth aspect of the present invention is integrally configured with two first electrodes having one polarity and a dielectric plate having the other polarity and disposed on the surface. Two dielectric electrodes are arranged, the two dielectric electrodes are arranged back to back, and the two first electrodes are oppositely arranged on both sides of the dielectric electrode with a discharge space having a predetermined gap length. To form a discharge cell, and a sealing ring is attached around the hole provided in the central portion of the dielectric electrode between the two back-to-back dielectric electrodes and the two above-mentioned discharge cells in the discharge cell are attached. The discharge space is communicated, a gas containing oxygen is supplied between the electrodes of both polarities, an AC high voltage is applied, and a device configuration for generating discharge in the discharge space to generate ozone is provided. Pressing a stack of multiple layers with pressure plates from both sides in the stacking direction A plurality of fixing rods having a predetermined length are arranged at equal intervals on the outer peripheral portion between the pressing plates on both sides, and the pressing plates are held at the length of the fixing rods so that the entire laminated body is formed. A hole for inserting a power supply plate for pressing a high voltage to the two dielectric electrodes between the two dielectric electrodes in each of the stacked discharge cells and pressing the sealing ring in the center part. And the dielectric electrodes on both sides thereof are tightly joined and integrally formed.

[0021]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiment 1. Embodiment 1 of the present invention will be described below with reference to the drawings. 1 (a) and 1 (b) are a sectional view and a plan view showing the structure of an ozone generator according to a first embodiment of the present invention. Note that FIG.
FIG. 1A is a sectional view taken along the line AA of FIG. Further, the AC power supply for supplying to the device, the high-voltage bushing for supplying the AC power supply, the gas supply port, the structure for forming the gap length d of the discharge space, the electrode cooling structure, and the like are omitted for convenience sake. In the figure, 22 is a ground electrode as a first electrode, 23 is a high voltage electrode, 24 is a dielectric plate, and a dielectric plate 24
The high-voltage electrode 23 is attached to one surface of the above and integrated to form a dielectric electrode 23a. Reference numeral 25 denotes a discharge space formed between the ground electrode 22 and the dielectric electrode 23a, which is held at a gap length d by a spacer 26 (not shown). Numeral 27 is an ozonized gas outlet, and numeral 28 is a sealing ring mounted between two dielectric electrodes 23a around a hole provided in the central portion of the dielectric electrode 23a so that two discharge spaces 25 are communicated with each other. An enclosed space is formed to allow the gas to flow. Reference numeral 29 denotes a disk-shaped high-voltage power supply plate for supplying a high voltage to the dielectric electrode 23a, and 30 denotes eight holding springs which are attached above and below the high-voltage power supply plate 29 around the sealing ring 28 at equal intervals in the circumferential direction. The dielectric electrode 23a is evenly pressed against the ground electrode 2 via the spacer 26. 31 is two ground electrodes 22
The outer peripheral portion of the ground electrode 22 is connected at three angles with three electrode connecting rods connecting the two. 32 is an electrode connecting rod 3
A fastener such as a bolt as a fixing means for fixing 1 to the ground electrode 22, 33 is the ground electrode 22, the dielectric electrode 23a
And a discharge space 25 between them, the discharge cell is formed by stacking two discharge units.
Are arranged back to back, and two dielectric electrodes 23a are oppositely arranged on both sides of the discharge space 25. Three
Reference numeral 4 is an upper end plate of the entire apparatus, 34a is an O-ring arranged between the upper end plate 34 and the ground electrode 22, and 35 is a chamber for covering the apparatus attached to the upper end plate 34 and supplying gas. The source gas is supplied into the chamber 35, and the ozonized gas is taken out from the outlet 27.

Assembling of the ozone generator having the above structure will be described below. First, one ground electrode 22 is attached to the lower surface of the upper end plate 34 through the O-ring 34a, and the discharge space 25 having a void length d is attached to the lower surface of the ground electrode 22.
A spacer 26 (not shown) for forming the is arranged, and the dielectric electrode 23a is arranged so as to face the center of the ground electrode 22. A sealing ring 28 is arranged on the lower surface of the high-voltage electrode 23 of the dielectric electrode 23a, and a high-voltage power supply plate 29 having eight holding springs 30 mounted in the circumferential direction is arranged around the sealing ring 28. Further, another dielectric electrode 23a and the spacer 26 are arranged via the pressing spring 30 of the high voltage power supply plate 29 and the sealing ring 28. Then, the electrode connecting rod 31 is attached with a screw or the like at a position of an angle of 120 degrees that divides the outer peripheral portion of the ground electrode 22 mounted on the upper end plate 34 into three equal parts. Another ground electrode 22 is aligned with the screw position of the three electrode connecting rods 31, and the ground electrode 2
The end surface of the electrode connecting rod 31 is fixed to the electrode 2 with bolts 32. As shown in FIG. 1, two ground electrodes 22 that are arranged to face each other.
Is pressed by the three electrode connecting rods 31 and the bolts 32, it becomes a stopper at the length L1 of the electrode connecting rod 31, and the electrode interval of the ground electrode 22 is kept at L1 at three places. Thereafter, the present apparatus attached to the upper end plate 34 is covered to form a chamber 35 for supplying gas, and the assembly of the ozone generator is completed. The ground electrode 22 has a cooling structure such as water cooling, and cooling pipes are connected to all the ground electrodes 22.

Next, the operation will be described. A source gas containing oxygen gas is supplied into the chamber 35, and a high voltage of alternating current is supplied to the high voltage power supply plate 29 to apply a high voltage to the high voltage electrode 23 of the dielectric electrode 23a, and the ground electrode 22.
To the low potential voltage. The high voltage power supply plate 29 and the ground electrode 22 of the discharge cell 33 in which the discharge units are stacked in this way
When a high AC voltage is applied to the discharge space 25, a discharge is generated in the gap of the discharge space 25 through the dielectric 24, and the source oxygen gas becomes ozone gas by the discharge. This ozone gas is pushed out to the raw material gas, and the ozonized gas can be taken out from the outlet 27.

In this embodiment, two ground electrodes 22 are provided.
The three electrode connecting rods 31 each having a constant length L1 in the outer peripheral portion are arranged at equal intervals in the circumferential direction and are connected to each other. It can be held and connected at an interval of L1. As a result, the discharge space 2 of the two stacked discharge units in the discharge cell 33 is formed.
The variation of the void length d of No. 5 is suppressed, the decrease in ozone generation efficiency is suppressed, and the discharge units can be laminated at low cost.

The number of the electrode connecting rods 31 arranged on the outer peripheral portion between the two ground electrodes 22 is not limited to three, but four or more may be arranged at equal intervals in the circumferential direction.

Embodiment 2. Next, an ozone generator according to Embodiment 2 of the present invention will be described. In the second embodiment, the ground electrode 2 is the same as the first embodiment.
Length dimension L1 of the plurality of electrode connecting rods 31 arranged between the two
The machining accuracy of is set to be within 12.5% of the void length d of the discharge space 25. By the way, in the first embodiment, the relationship between the gap length d of the discharge space 25 and the interval L1 between the ground electrodes 22 is as shown in FIG. 2, and the accuracy of the length dimension L1 of the electrode connecting rod 31 is accurate. And the dimensional accuracy of the void length d are closely related. The two dielectric electrodes 23a are fixed by the height dimension of the sealing ring 28 arranged in the central portion. FIG. 3 shows the relationship between the discharge power of this ozone generator and the ozone generation amount. In the figure, s, t, u, v are
6 is a characteristic curve in which the dimensional accuracy of the void length d of the discharge space 25 is displayed as a parameter. As shown in the figure, when the accuracy of the void length d is deteriorated, the ozone generation amount is reduced, the efficiency is deteriorated, and the predetermined generation amount of the device cannot be obtained. It can be seen that in order to secure the rated generation amount of the device within ± 10%, it is necessary to suppress the dimensional accuracy of the void length d within 12.5%. In the second embodiment, the processing accuracy of the length dimension L1 of the plurality of electrode connecting rods 31 arranged between the ground electrodes 22 is set to be within 12.5% of the void length d of the discharge space 25. The dimensional accuracy of the void length d can be suppressed within 12.5%, and an ozone generator capable of stably ensuring a predetermined ozone generation amount can be obtained.

Embodiment 3. Next, an ozone generator according to Embodiment 3 of the present invention will be described. Figure 4
4A and 4B are a sectional view and a plan view showing the structure of the ozone generator according to the third embodiment of the present invention.
4A is a sectional view taken along the line AA of FIG. 4B. As shown in the figure, the three electrode connecting rods 31 in the ozone generator according to the first embodiment are provided with the dielectric 24 having the dielectric electrodes 23a on the side surfaces and the high voltage power supply plate 2.
It is arranged so as to be in contact with the outer peripheral surface of 9. FIG. 5 is a diagram showing a state in which the electrode connecting rod 31 is in contact with the dielectric 24 and the high-voltage power supply plate 29, and FIG. 5B is BB of FIG. 5A.
It is sectional drawing by a line. As a result, the electrode connecting rod 31 can support the dielectric electrode 23a and the high-voltage power supply plate 29 from the side surface (outer peripheral surface), and the dielectric electrode 23a, the high-voltage power supply plate 29, and the ground electrode 22 can be coaxially arranged. It can be easily positioned and placed. As shown in FIG. 5, the electrode connecting rod 31 has a flat side surface on the side facing the dielectric 24 and the high-voltage power supply plate 29, or the dielectric 24.
By processing so as to follow the outer peripheral surface of the high-voltage power supply plate 29, the dielectric 24 and the high-voltage power supply plate 29 can be stably and easily supported from the side surface. Also, at the time of assembly, by mounting the three electrode connecting rods 31 between the ground electrodes 22, each member of the dielectric electrode 23a, the high-voltage power supply plate 29, and the ground electrode 22 can be easily fixed. Thus, an ozone generator that is easy to disassemble, has good positional accuracy, and is highly reliable can be obtained at low cost.

When the electrode connecting rod 31 is made of an insulating material such as Teflon (registered trademark) material such as PTFE or PFA, the electrode connecting rod 31 is in contact with the dielectric electrode 23a and the high voltage power supply plate 29. It is possible to provide a highly reliable ozone generator which can prevent damage due to unauthorized discharge in the outer peripheral portion of the dielectric electrode 23a without causing insulation failure (insulation proof strength failure).

Fourth Embodiment Next, an ozone generator according to Embodiment 4 of the present invention will be described. Figure 6
6A and 6B are a sectional view and a plan view showing a structure of an ozone generator according to a fourth embodiment of the present invention.
Note that FIG. 6A is a sectional view taken along the line AA of FIG. As shown in the figure, in the ozone generator according to the first embodiment, each bolt 32 mounting the electrode connecting rod 31 and the ground electrode 22 has a spring member 32 as an elastic member.
Insert a respectively. In this way, the spring material 32a inserted into the bolt 32 is provided with play (margin), and the ground electrode 2
The two are connected by an electrode connecting rod 31. Further, the lower end plate 36 is prepared, and the discharge cell 33 in which two discharge units are laminated is arranged between the upper end plate 34 and the lower end plate 36, and four fixing rods 37 are arranged in the outer peripheral portion to dispose the four fixing rods 37. Tighten the fixing rod 37 with a nut. As a result, the upper end plate 34 and the lower end plate 36 are used as pressing plates, and the discharge cells 33 are pressed down on the entire surface,
The tightening and assembling is completed until the contact surface of each electrode connecting rod 31 is pressed.

As described above, since the spring member 32a inserted in the bolt 32 has a play so that the ground electrodes 22 are connected by the electrode connecting rod 31, the electrode connecting rod 31 is connected by the bolt 32 to the ground electrode 22. Bending of the ground electrode 22 caused by fixing to the ground electrode can be reduced. As a result, the gap length d of the discharge space 25 formed by the surface of the ground electrode 22 and the surface of the dielectric electrode 23a facing the ground electrode 22 can be prevented from becoming non-uniform due to the bending of the ground electrode 22, and the uniformity of the gap length d can be reduced. improves. As a result, a highly reliable ozone generator with high ozone generation efficiency can be obtained. Further, since the fixing rod 34 having a predetermined length L2 is provided so that the discharge cell 33 is pressed by the entire upper end plate 34 and the lower end plate 36, the dimensional accuracy is further improved and the uniformity of the gap length d is further improved. , The ozone generation efficiency is increased.

Embodiment 5. Next, an ozone generator according to Embodiment 5 of the present invention will be described. Figure 7
7A and 7B are a sectional view and a plan view showing the structure of an ozone generator according to a fifth embodiment of the present invention.
Note that FIG. 7A is a cross-sectional view taken along the line AA of FIG. 7B. As shown in the drawing, there are grooves on the upper and lower end surfaces of the sealing ring 28, and an O-ring 38 (or gasket) is attached to the groove, and the two dielectric electrodes 23a are connected to the ground electrode 2
Pressed from both sides via 2. Also, the sealing ring 28
Is fitted into a hole at the center of the high-voltage power supply plate 29, and the sealing ring 28 is fixed by the high-voltage power supply plate 29. The sealing ring 28 is made of stainless steel or Teflon (registered trademark) -based PTFE or PFA material. Furthermore, in this embodiment, a case is shown in which two sets of discharge cells 33 configured in this way are stacked. In this case, since the state of stacking is illustrated, the illustration of the lower portion of the lower discharge cell is omitted for convenience.
As shown in the figure, each discharge cell 33 includes three electrode connecting rods 3.
1 (31a, 31b) is arranged so that the ground electrodes 22 are connected to each other, and the lower ground electrode 22 of the upper discharge cell 33 also serves as the upper ground electrode 22 of the lower discharge cell 33. Further, the three electrode connecting rods 31 connect the ground electrodes 22 at an angle of 120 degrees, which divides the outer peripheral portion of the ground electrode 22 of each discharge cell 33 into three equal parts, but the electrode connecting rods in the upper discharge cells 33 are connected. The mounting positions of the electrode connecting rods 31b in the discharge cells 33 in the lower stage with respect to the mounting positions of 31a are respectively shifted by 60 °, and the ground electrodes 22 are connected at an angle of 120 ° which is similarly divided into three equal parts. Since the electrode connecting rod 31a and the electrode connecting rod 31b are not on the same plane,
In (b), the illustration of the bolt 32 in the portion of the electrode connecting rod 31b is omitted for the sake of distinction.

In this embodiment, the O-ring 38 (or the gasket 38) is formed in the grooves on the upper and lower end surfaces of the sealing ring 28.
a) is attached and the two dielectric electrodes 23a are connected to the ground electrode 2
I was able to press from both sides via 2. Chamber 35
A source gas containing oxygen gas is supplied into the dielectric electrode 23
FIG. 8 shows a gas flow when an AC high voltage is applied between the electrode a and the ground electrode 22 to generate ozone gas. When an AC high voltage is applied, a discharge is generated in the gap of the discharge space 25 via the dielectric 24, and the raw material oxygen gas introduced into the discharge space 25 from the outer periphery becomes ozone gas by the discharge. The discharge space 25 of the two discharge units is the sealing ring 2.
The ozone gas generated in the two discharge spaces 25 is extruded by the raw material gas introduced into the discharge space 25 from the outer circumference, and is joined through the inside of the seal ring 28. And outlet 2
7 is discharged and taken out. At this time, the sealing ring 2
The O-ring 38 (or gasket 38
Since a) is attached and the two dielectric electrodes 23a are pressed from both sides, gas leakage at the end face of the sealing ring 28 can be prevented, and the gas seal between the source gas and the ozone gas is ensured and the generated ozone gas It is possible to prevent the concentration from decreasing due to the leakage of the source gas. Further, since gas sealing can be sufficiently performed by pressing the upper and lower end surfaces of the sealing ring 28 with a small pressure, damage to the dielectric electrode 23a can be prevented, and a highly reliable ozone generator can be obtained.

Further, the sealing ring 28 is fixed by fitting it into the central hole of the disk-shaped high-voltage power supply plate 28, and the outer periphery of the high-voltage power supply plate 29 is divided into three equal parts at an angle of 120 degrees. Since the structure is supported on the side surface of the electrode connecting rod 31, the number of fixed parts of the device is reduced, the device is easy to assemble and disassemble, and the highly reliable ozone generator with improved maintainability can be obtained at low cost. . Further, since the sealing ring 28 is made of an ozone-resistant member such as stainless steel or Teflon (registered trademark) -based PTFE or PFA material, deterioration of the sealing ring 28 due to ozone gas and oxygen radicals can be prevented. The number of maintenances such as replacement of 28 is significantly reduced, and a highly reliable device having a long life can be obtained.

Furthermore, in this embodiment, the amount of ozone generated can be significantly increased by stacking two sets of discharge cells 33 each composed of two discharge units.
At that time, three electrode connecting rods 31 are arranged in each discharge cell 33 to connect the ground electrodes 22 to each other, and the adjacent discharge cells 33 are connected.
Since the mounting position of the electrode connecting rod 31 is shifted by, the load on the ground electrode 22 can be reduced, and the device can be assembled and disassembled for each discharge cell 33.
The stacking of the discharge cells 33 can be easily realized without deteriorating the uniformity of the gap length d of the discharge spaces 25 of the two discharge units in the third discharge unit 3, and the ozone generating device with high ozone generating efficiency and high reliability can be obtained. To be Further, since the discharge cells 33 are stacked in a state in which the spring members 32a inserted in the bolts 32 have play and the ground electrodes 22 are connected by the electrode connecting rods 31, the discharge spaces 25 in the discharge cells 33 are stacked. It is possible to stack the discharge cells 33 while keeping the void length d of 1 to be more uniform, and to prevent a decrease in ozone generation performance due to stacking.
It is also possible to stack three or more sets of a plurality of discharge cells 33 by the same method.

Sixth Embodiment Next, an ozone generator according to Embodiment 6 of the present invention will be described. Figure 9
9A and 9B are a sectional view and a plan view showing the structure of an ozone generator according to a sixth embodiment of the present invention.
9A is a sectional view taken along the line AA of FIG. 9B. As shown in the figure, as in the fifth embodiment,
Two sets of the discharge cells 33 are stacked, and the stacked discharge cells 33 are pressed from both sides of the entire surface by using the upper end plate 34 and the lower end plate 36 as pressing plates.
A structure in which four fixing rods 37 are arranged at fixed intervals in the outer circumferential portion between 4 and 36 at equal intervals in the circumferential direction, and the entire two sets of discharge cells are held by the fixing rod 37 and the holding plates 34 and 36. And

Next, the method of assembling the ozone generator according to the sixth embodiment and the function and operation of each component will be described. First, one ground electrode 22 is attached to the lower surface of the upper end plate 34 via the O-ring 34a, and a spacer 26 for forming a discharge space 25 having a void length d on the lower surface of the ground electrode 22.
(Not shown) is arranged, and the dielectric electrode 23a is arranged opposite to the center of the ground electrode 22. This dielectric electrode 2
On the lower surface of the high-voltage electrode 23 of 3a, an ozone-resistant sealing ring 28 equipped with an O-ring 38 is arranged, and a high-voltage power supply plate 29 having eight holding springs 30 circumferentially attached is arranged around the sealing ring 28. To do. Furthermore, this high voltage power supply plate 2
Another dielectric electrode 23a and the discharge space spacer 26 are arranged via the holding spring 30 and the sealing ring 28 of FIG. Then, the electrode connecting rod 31a is attached with a screw or the like at a position of an angle of 120 degrees that divides the outer peripheral portion of the ground electrode 22 mounted on the upper end plate 34 into three equal parts. These three electrode connecting rods 3
2a of the dielectric electrodes 23a already arranged by 1a
And the high-voltage power supply plate 29 are supported at predetermined positions from the side surface.
The position of the sealing ring 28 is also fixed by the high-voltage power supply plate 29. Another ground electrode 22 is arranged in a state where the above-mentioned components are positioned by the three electrode connecting rods 31a, and the end surface of the electrode connecting rod 31a is fixed to the bolt 3 by the spring member 32a.
Fix at 2.

The next discharge cell 33 is the discharge cell 3 of the first stage.
The back surface of the ground electrode 22 of No. 3 serves as a ground electrode surface, and the spacer 26, the dielectric electrode 23a, the sealing ring 28, the high-voltage power supply plate are mounted on the back surface of the ground electrode 22 as if the discharge cells 33 of the first stage were mounted. 29, the dielectric electrode 23a, and the spacer 26 are sequentially arranged. Then, the electrode connecting rod 31b of the second-stage discharge cell 33 is attached to the ground electrode 22 at a position rotated by 60 degrees in the circumferential direction from the attachment position of the electrode connecting rod 31a of the first-stage discharge cell 33. With these three electrode connecting rods 31b, like the first-stage discharge cell 33,
The other ground electrode 22 is arranged in a state where the respective components of the two dielectric electrodes 23a, the high-voltage power supply plate 29, and the sealing ring 28 are positioned, and the end surface of the electrode connecting rod 31b is provided with the spring member 32.
It is fixed with the bolt 32 attached with a. As described above, after stacking the discharge cells 33, four fixing rods 37 having a predetermined length dimension L2 are erected on the upper end plate 34, and the other end face of the fixing rod 37 holds the entire stacked discharge cells at the lower end. By disposing the plate 36 and tightening the four fixing rods 37 with nuts, the entire discharge cells 33 stacked on the entire surfaces of the pressing plates 34 and 36 are pressed down until the contact surface L1 of each electrode connecting rod 31 is reached. The tightening assembly is completed.

Although an apparatus in which two sets of discharge cells 33 are stacked has been described here, three or more sets of discharge cells 3 are provided.
In the case of stacking 3, the above-described method is repeated before disposing the fixing rod 37 and the lower end plate 36, and the plurality of discharge cells 33 are stacked.
It is possible to stack the multi-stage discharge cells 33 by assembling the above in sequence. Further, the disassembly of the device may be performed in the reverse procedure.

As described above, in each discharge cell 33, 2
A fixed length L1 is provided between the ground electrodes 22 at the outer peripheral portion thereof.
Since the three electrode connecting rods having the above are arranged to be connected at equal intervals in the circumferential direction, the two ground electrodes can be held at a constant length L1. Also, the pressing plate 3
4, 36 and a plurality of fixing rods 3 having a predetermined length L2
Since all of the plurality of discharge cells can be collectively stacked and supported by means of 7, the discharge cells 33 can be evenly pressed over the entire electrode surface, the flatness of the electrode of each discharge cell is improved, and the discharge space is improved. The uniformity of the void length d of 25 is improved. As a result, it is possible to obtain a stable device having a good ozone generation performance such as the ozone generation amount, generation concentration, and generation efficiency.

Embodiment 7. The sealing ring 28 used in the first to sixth embodiments may be a bellows-shaped sealing ring 28a as shown in FIG. In this way, the O-ring 38 (or the gasket 38a) is attached to the grooves on the upper and lower end surfaces of the bellows-shaped sealing ring 28a, and the two dielectric electrodes 2 are attached.
Since 3a is pressed from both sides via the ground electrode 22, the electrode surface can be pressed uniformly, and uneven pressing is eliminated, and the dielectric electrode 2 is assembled when the discharge cell 33 is assembled.
It is possible to prevent damage to 3a, and to provide a highly reliable device.

In this embodiment, the sealing ring has a bellows shape and has an elastic function, but it may be made of an elastic material. In addition, as shown in FIG. 11, the bellows-shaped sealing ring 28a according to the sixth embodiment has the same structure as the sixth embodiment.
It can also be applied to a structure in which a plurality of discharge cells 33 are stacked, as shown in, and the reliability of the ozone generator in which the discharge cells 33 are stacked is further improved.

Embodiment 8. Next, an ozone generator according to Embodiment 8 of the present invention will be described. 12
12A and 12B are a sectional view and a plan view showing the structure of the ozone generator according to the eighth embodiment of the present invention. Note that FIG. 12A is a sectional view taken along the line AA of FIG. As shown, one discharge cell 33
The two dielectric electrodes 23a therein sandwich the high-voltage power supply plate 29 in a sandwich shape, and are metalized on the conductive film (high-voltage electrode 23) surface of the dielectric electrode 23a to form an integral structure.
In addition, a sealing ring 28 made of an ozone-resistant substance such as Teflon (registered trademark) material, which is mounted around a hole provided in the center of the integrated dielectric electrode 23b having an integrated structure,
The two discharge spaces 25 are communicated with each other to form a closed space in which the ozonized gas flows, and protect the metallized surface.

In this embodiment, two dielectric electrodes 2 are used.
3a, the high-voltage power supply plate 29, and the sealing ring 28 are previously formed as an integral part, and the number of parts of the device is small and the assembly is easy. In this way, the discharge cell 33
The number of parts can be reduced and assembly and disassembly is easy,
An inexpensive and compact ozone generator can be realized.

[0044]

As described above, the first aspect of the present invention is as follows.
The ozone generator described includes two first electrodes having one polarity and two dielectric electrodes integrally formed with a dielectric plate having the other polarity and disposed on the surface. , The two dielectric electrodes are arranged back to back, and the two first electrodes are arranged to face each other with a discharge space having a predetermined gap length on both sides thereof to form a discharge cell. Between the two dielectric electrodes described above, a sealing ring is attached around a hole provided in the central portion of the dielectric electrode to connect the two discharge spaces in the discharge cell to each other, and the bipolar electrodes. A device configuration for supplying a gas containing oxygen between and applying an alternating high voltage to generate ozone in the discharge space to generate ozone,
At least three electrode connecting rods having a predetermined length are arranged at equal intervals in the outer peripheral portion between the two first electrodes, and the electrode connecting between the two first electrodes is performed. Since the lengths of the rods are held and connected, the distance between the first electrodes can be easily kept constant and connected, and the uniformity of the gap length of the discharge space is reduced and the ozone generation efficiency is not reduced. ,
A stack of discharge units forming the discharge space can be easily realized, and a large-capacity ozone generator can be obtained at low cost.

According to a second aspect of the present invention, in the ozone generator according to the first aspect, since the length dimension accuracy of the electrode connecting rod is set within the range of 1/8 or less of the discharge gap length, the dimension of the gap length. The accuracy can be suppressed within 12.5%, and an ozone generator that can stably secure a predetermined ozone generation amount can be obtained.

According to a third aspect of the present invention, in the ozone generating apparatus according to the first or second aspect, the two dielectric electrodes in the discharge cell are supported at predetermined positions from the side surface by the electrode connecting rod. With a reduced number of parts, an ozone generator that is easy to assemble and disassemble, has high maintainability, has high positional accuracy, and is highly reliable can be obtained at low cost.

According to the fourth aspect of the present invention, in the ozone generating apparatus according to any one of the first to third aspects, the electrode connecting rod is made of a member having an electric insulation property. It is possible to provide a highly reliable ozone generator that can prevent damage due to illegal discharge.

According to a fifth aspect of the present invention, in the ozone generating apparatus according to any one of the first to fourth aspects, an electrode connecting rod for connecting the two first electrodes and the first electrode are provided. Since it is fixed by the fixing means via the elastic member, the first
The deflection of the electrode can be reduced, the uniformity of the void length of the discharge space is improved, and a highly reliable ozone generator with high ozone generation efficiency can be obtained.

According to a sixth aspect of the present invention, in the ozone generating apparatus according to any one of the first to fifth aspects, an O-ring or a gasket is provided on one or both of the upper and lower end surfaces of the sealing ring, and two sheets of the ozone generator are provided. Since the space between the dielectric electrodes is pressed from both sides, gas leakage at the end faces of the sealing ring can be prevented, the source gas and ozone gas can be reliably blocked, and the upper and lower end faces of the sealing ring can be pressed with a small pressure. Therefore, a highly reliable ozone generator with good ozone generation efficiency can be obtained.

According to a seventh aspect of the present invention, there is provided an ozone generator, comprising: two first electrodes having one polarity;
It has a dielectric plate having the other polarity and arranged on the surface, and two dielectric electrodes integrally formed, and the two dielectric electrodes are arranged back to back, and a predetermined space is provided on both sides thereof. The two first electrodes are arranged to face each other through a long discharge space to form a discharge cell, and the discharge cell is provided between the two dielectric electrodes, which are back-to-back, in the central portion of the dielectric electrode. A sealing ring is attached around the hole to connect the two discharge spaces in the discharge cell to each other, and a gas containing oxygen is supplied between the bipolar electrodes to apply an AC high voltage to the discharge space. A device configuration for generating discharge and ozone, wherein an O-ring or a gasket is provided on one or both of the upper and lower end surfaces of the sealing ring to press between the two dielectric electrodes from both sides. Gas leakage at the ring end surface can be prevented, and It is possible to reliably shut off the zonal gas, and it is possible to press the upper and lower end surfaces of the sealing ring with a small pressure, and it is possible to easily stack the discharge units that make up the discharge space, and to achieve reliable ozone generation efficiency. A high-capacity ozone generator with a large capacity can be obtained at low cost.

According to an eighth aspect of the present invention, in the ozone generating apparatus according to any one of the first to seventh aspects, a high voltage is supplied to the two dielectric electrodes between the two dielectric electrodes. Since the power supply plate was mounted in a shape having a hole in the center and the sealing ring was fitted in the hole, the sealing ring can be easily positioned and fixed without shifting from the center of the dielectric electrode. The number of points is reduced, the device is assembled,
A highly reliable ozone generator that is easy to disassemble and has improved maintainability can be obtained at low cost.

According to a ninth aspect of the present invention, in the ozone generating apparatus according to the eighth aspect, a plurality of pressing springs are mounted around the sealing ring above and below the power feeding plate at equal intervals in the circumferential direction. Since the dielectric electrode is pressed outward, the entire surface of the dielectric electrode can be pressed uniformly, the flatness of the dielectric electrode is improved, the uniformity of the gap length of the discharge space is improved, and ozone generation efficiency is good and reliable. A highly reliable ozone generator can be obtained.

According to a tenth aspect of the present invention, in the ozone generator according to any one of the first to ninth aspects, since the sealing ring is made of ozone-resistant stainless steel or tetrafluoroethylene polymer, the sealing ring is formed. Can be prevented, and a highly reliable ozone generator with a long life can be obtained.

According to the eleventh aspect of the present invention, in the ozone generating apparatus according to any one of the first to tenth aspects, the sealing ring is made of an elastic material or is formed in a bellows shape to have an elastic function. It is possible to evenly press the surface of the dielectric electrode, prevent damage to the dielectric electrode, and provide a highly reliable ozone generator.

According to a twelfth aspect of the present invention, in the ozone generating apparatus according to any one of the first to sixth aspects, a plurality of discharge cells are laminated to form a laminated body.
Since the mounting positions of the electrode connecting rods arranged between the electrodes of the adjacent discharge cells are displaced from each other at a predetermined angle in the circumferential direction, the device can be easily assembled and disassembled for each discharge cell, and the discharge space It is possible to easily realize stacking of the discharge cells without deteriorating the uniformity of the void length d, and to obtain a highly reliable and large-capacity ozone generator with good ozone generation efficiency.

According to a thirteenth aspect of the present invention, in the ozone generating apparatus according to any one of the first to twelfth aspects, a laminate in which a plurality of discharge cells are laminated is pressed from both sides in the stacking direction with pressing plates, A plurality of fixing rods having a predetermined length are arranged at equal intervals in the outer peripheral portion between the holding plates on both sides in the circumferential direction, and the holding plates are held at the length dimension of the fixing rods to form the stack. Since the whole body is pressed from both sides, the flatness of the electrodes of each discharge cell is further improved, and the uniformity of the void length of the discharge space is improved. As a result, stacking of discharge cells can be easily and reliably realized, and a stable, large-capacity ozone generator having good ozone generation performance such as ozone generation amount, generation concentration, and generation efficiency can be obtained.

An ozone generator according to a fourteenth aspect of the present invention is integrally formed with two first electrodes having one polarity and a dielectric plate having the other polarity and disposed on the surface. Two dielectric electrodes are arranged, the two dielectric electrodes are arranged back to back, and the two first electrodes are oppositely arranged on both sides of the dielectric electrode with a discharge space having a predetermined gap length. To form a discharge cell, and a sealing ring is attached around the hole provided in the central portion of the dielectric electrode between the two back-to-back dielectric electrodes and the two above-mentioned discharge cells in the discharge cell are attached. The discharge space is communicated, a gas containing oxygen is supplied between the electrodes of both polarities, an AC high voltage is applied, and a device configuration for generating discharge in the discharge space to generate ozone is provided. Pressing a stack of multiple layers with pressure plates from both sides in the stacking direction A plurality of fixing rods having a predetermined length are arranged at equal intervals on the outer peripheral portion between the pressing plates on both sides, and the pressing plates are held at the length of the fixing rods so that the entire laminated body is formed. A hole for inserting a power supply plate for pressing a high voltage to the two dielectric electrodes between the two dielectric electrodes in each of the stacked discharge cells and pressing the sealing ring in the center part. Since the power supply plate and the dielectric electrodes on both sides of the power supply plate are integrally formed by closely bonding, the discharge cells can be stacked easily and reliably, and the number of parts of the discharge cell can be increased. Can be reduced, assembled,
It is easy to disassemble, and an inexpensive and compact ozone generator can be realized.

[Brief description of drawings]

FIG. 1 is a sectional view and a plan view showing a structure of an ozone generator according to a first embodiment of the present invention.

FIG. 2 is a partial cross-sectional view illustrating the structure of an ozone generator according to a second embodiment of the present invention.

FIG. 3 is a diagram illustrating characteristics of an ozone generator according to a second embodiment of the present invention.

FIG. 4 is a sectional view and a plan view showing the structure of an ozone generator according to a third embodiment of the present invention.

FIG. 5 is a partially enlarged view showing the structure of an ozone generator according to a third embodiment of the present invention.

6A and 6B are a sectional view and a plan view showing the structure of an ozone generator according to a fourth embodiment of the present invention.

FIG. 7 is a cross-sectional view and a plan view showing the structure of an ozone generator according to a fifth embodiment of the present invention.

FIG. 8 is a sectional view for explaining the operation of the ozone generator according to the fifth embodiment of the present invention.

9 is a sectional view and a plan view showing the structure of an ozone generator according to a sixth embodiment of the present invention. FIG.

FIG. 10 is a partial cross-sectional view showing the structure of an ozone generator according to a seventh embodiment of the present invention.

FIG. 11 is a cross-sectional view showing the structure of another example of an ozone generator according to Embodiment 7 of the present invention.

FIG. 12 is a sectional view and a plan view showing the structure of an ozone generator according to an eighth embodiment of the present invention.

FIG. 13 is a cross-sectional view showing the structure of a conventional ozone generator.

FIG. 14 is a sectional view showing the structure of an ozone generator according to another conventional example.

[Explanation of symbols]

22 ground electrode as first electrode, 23a dielectric electrode, 23b integrated dielectric electrode, 24 dielectric, 25
Discharge space, 28 sealing ring, 28a bellows-shaped sealing ring, 29 power supply plate, 30 holding spring, 31, 31
a, 31b, 31c electrode connecting rods, 32 bolts as fixing means, 32a springs as elastic members, 33 discharge cells, 34 upper end plate as pressing plate, 36 lower end plate as pressing plate, 37 fixing bar, 38 O-ring Three
8a gasket.

Continued front page    (72) Inventor Akira Usui             2-3 2-3 Marunouchi, Chiyoda-ku, Tokyo             Inside Ryo Electric Co., Ltd. F-term (reference) 4G042 CA01 CC02 CC04 CC10 CC16                       CC19

Claims (14)

[Claims] 1. A method comprising: two first electrodes having one polarity and two dielectric electrodes integrally formed with a dielectric plate having the other polarity and disposed on the surface, The two dielectric electrodes are arranged back to back, and the two first electrodes are arranged to face each other through a discharge space having a predetermined gap length on both sides thereof to form a discharge cell. Between the two dielectric electrodes, a sealing ring is attached around the hole provided at the center of the dielectric electrode to connect the two discharge spaces in the discharge cell, and between the electrodes of both polarities. In an ozone generator for supplying a gas containing oxygen and applying an alternating high voltage to generate discharge in the discharge space to generate ozone, at least three electrodes are provided between the two first electrodes and in an outer peripheral portion thereof. The electrode connecting rods having a predetermined length are arranged at equal intervals in the circumferential direction, and the two first An ozone generator in which electrodes are held and connected by the length dimension of the electrode connecting rod. 2. The length dimension accuracy of the electrode connecting rod is set within a range of ⅛ or less of the discharge gap length.
The described ozone generator. 3. The ozone generator according to claim 1, wherein the two dielectric electrodes in the discharge cell are supported at predetermined positions from the side surface by an electrode connecting rod. 4. The ozone generator according to claim 1, wherein the electrode connecting rod is made of an electrically insulating member. 5. The electrode connecting rod for connecting between two first electrodes and the first electrode are fixed by a fixing means via an elastic member. The ozone generator described in 1. 6. An O-ring or a gasket is provided on one or both of the upper and lower end surfaces of the sealing ring to press between the two dielectric electrodes from both sides.
The ozone generator according to any one of 1 to 5. 7. A method comprising: two first electrodes having one polarity and two dielectric electrodes integrally formed with a dielectric plate having the other polarity and disposed on the surface, The two dielectric electrodes are arranged back to back, and the two first electrodes are arranged to face each other through a discharge space having a predetermined gap length on both sides thereof to form a discharge cell. Between the two dielectric electrodes, a sealing ring is attached around the hole provided at the center of the dielectric electrode to connect the two discharge spaces in the discharge cell, and between the electrodes of both polarities. In an ozone generator that supplies a gas containing oxygen and applies an alternating high voltage to generate discharge in the discharge space to generate ozone, an O-ring or a gasket is provided on one or both of the upper and lower end surfaces of the sealing ring. And press between the two dielectric electrodes from both sides. An ozone generator characterized by: 8. A power feeding plate for feeding a high voltage to the two dielectric electrodes is attached between the two dielectric electrodes in a shape having a hole in the center, and a sealing ring is provided in the hole. The ozone generator according to any one of claims 1 to 7, which is fitted. 9. The method according to claim 8, wherein a plurality of pressing springs are mounted on the upper and lower sides of the power feeding plate around the sealing ring at equal intervals in the circumferential direction, and the two dielectric electrodes are pressed outward. Ozone generator. 10. The ozone generator according to claim 1, wherein the sealing ring is made of ozone-resistant stainless steel or a tetrafluoroethylene polymer. 11. The ozone generator according to claim 1, wherein the sealing ring is made of an elastic material or has a bellows shape and has an elastic function. 12. A stacked body is formed by stacking a plurality of discharge cells, and the electrode connecting rods arranged between the first electrodes of the discharge cells are attached at positions in the circumferential direction of the adjacent discharge cells. 7. The electrodes are offset from each other at a predetermined angle.
The ozone generator according to any one of 1. 13. A laminated body in which a plurality of discharge cells are laminated is pressed from both sides in the laminating direction with pressing plates, and between the pressing plates on both sides, a plurality of fixing rods having a predetermined length in the outer peripheral portion thereof. Are arranged at equal intervals in the circumferential direction, the space between the pressing plates is held by the length of the fixing rod, and the entire laminated body is pressed from both sides. Ozone generator. 14. A method comprising: two first electrodes having one polarity and two dielectric electrodes integrally formed with a dielectric plate having the other polarity and disposed on the surface, The two dielectric electrodes are arranged back to back, and the two first electrodes are arranged to face each other through a discharge space having a predetermined gap length on both sides thereof to form a discharge cell. Between the two dielectric electrodes, a sealing ring is attached around the hole provided at the center of the dielectric electrode to connect the two discharge spaces in the discharge cell, and between the electrodes of both polarities. In an ozone generator that supplies a gas containing oxygen and applies an alternating high voltage to generate discharge in the discharge space to generate ozone, a stack of a plurality of the discharge cells is pressed from both sides in the stacking direction. And press it between the pressing plates on both sides, and A plurality of fixed rods having a constant length are arranged at equal intervals, the pressing plates are held at the length dimension of the fixed rods, and the entire laminated body is pressed from both sides. A power feeding plate for feeding a high voltage to the two dielectric electrodes is inserted between the two dielectric electrodes in a shape having a hole for fitting the sealing ring in the central portion,
An ozone generator in which the power feeding plate and the dielectric electrodes on both sides of the power feeding plate are tightly bonded and integrally formed.