JP2003205265A5 - - Google Patents
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- Publication number
- JP2003205265A5 JP2003205265A5 JP2002004969A JP2002004969A JP2003205265A5 JP 2003205265 A5 JP2003205265 A5 JP 2003205265A5 JP 2002004969 A JP2002004969 A JP 2002004969A JP 2002004969 A JP2002004969 A JP 2002004969A JP 2003205265 A5 JP2003205265 A5 JP 2003205265A5
- Authority
- JP
- Japan
- Prior art keywords
- title
- coating film
- film forming
- forming equipment
- equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Description
【発明の名称】塗布膜形成装置及びその方法[Title of Invention] coating film forming equipment and method
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002004969A JP2003205265A (en) | 2002-01-11 | 2002-01-11 | Film coating apparatus and method therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002004969A JP2003205265A (en) | 2002-01-11 | 2002-01-11 | Film coating apparatus and method therefor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003205265A JP2003205265A (en) | 2003-07-22 |
| JP2003205265A5 true JP2003205265A5 (en) | 2004-11-25 |
Family
ID=27644147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002004969A Pending JP2003205265A (en) | 2002-01-11 | 2002-01-11 | Film coating apparatus and method therefor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003205265A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5008280B2 (en) | 2004-11-10 | 2012-08-22 | 株式会社Ｓｏｋｕｄｏ | Substrate processing apparatus and substrate processing method |
| JP4794232B2 (en) * | 2004-12-06 | 2011-10-19 | 株式会社Ｓｏｋｕｄｏ | Substrate processing equipment |
| JP5154007B2 (en) | 2004-12-06 | 2013-02-27 | 株式会社Ｓｏｋｕｄｏ | Substrate processing equipment |
| JP4926433B2 (en) | 2004-12-06 | 2012-05-09 | 株式会社Ｓｏｋｕｄｏ | Substrate processing apparatus and substrate processing method |
| JP4761907B2 (en) | 2005-09-28 | 2011-08-31 | 株式会社Ｓｏｋｕｄｏ | Substrate processing equipment |
-
2002
- 2002-01-11 JP JP2002004969A patent/JP2003205265A/en active Pending
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