JP2003197685A - Bonding apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a parallelism adjusting mechanism free from the positional movement of a pressurizing surface by adjustment by easily and surely adjusting parallelism of the main surface of a stage and the pressurizing surface of a bonding tool in a bonding apparatus. <P>SOLUTION: The parallelism adjusting mechanism comprises three blocks arranged in series, and two contacting surfaces of these are respectively made to be an arc in right and left directions and that in front and rear directions. Each support point of both of the arcs is set to be the center of the pressurizing surface of the bonding tool, and the parallelism adjustment of the pressurizing surface by both of the arc and holding (fixing) as the result of it can individually be performed. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention sandwiches a plurality of parts to be joined, for example, an electronic part and a circuit board, and applies pressing force and heat or ultrasonic waves to the joined parts so that the joined parts are joined together. The present invention relates to a bonding apparatus used for a method of diffusion bonding, a method of interposing ACF (anisotropic conductive film) or solder between bonding portions, and the like.

[0002]

2. Description of the Related Art Heretofore, it has been earnestly desired for mobile information communication-related products and the like to have a circuit mounting board that is smaller, lighter, and has higher performance due to higher frequencies and lower costs. Therefore, various connection methods such as the ACF method and the C4 (solder bump) method have been put into practical use for joining electrodes. Of these, flip chip mounting, which enables direct mounting, has recently become particularly effective, and thermocompression bonding and diffusion bonding with ultrasonic vibration added to it have characteristics such as low connection resistance, high bonding strength, and short-time bonding. It is getting more and more attention.

Here, of the joining devices used in the above-mentioned various joining processes, a main part of a thermocompression bonding device will be described as a representative with reference to FIG. In FIG. 4, 51 is a pressing means, 5
2 is a main shaft which slides in the vertical direction by a pressurizing means 51, 53 is an upper plate 54, a lower plate 55 and a steel ball 5.
A parallelism adjusting mechanism 58A, which includes 6 and adjusting screws 57A, 57B, 57C, 57D (57C is behind 57A and 57D is behind 57B in FIG. 4),
58B is a pair of power feeding blocks, 59 is a heater tool which is a joining tool, and 60 is a stage.

First, in the joining work, one of the parts to be joined, for example, a circuit board is placed on the stage 60. Next, the other one of the components to be joined, for example, an electronic component, is placed on the circuit board in such a manner that the joining portions are aligned with each other. Next, a command is sent to the pressurizing means 51 to lower the main shaft 52. Along with this, the heater tool 59 also descends, and eventually the pressing surface 59S of the heater tool 59 contacts and presses the electronic component.

At this time, the electric energy applied to the power feeding blocks 58A and 58B via a cable (not shown) flows through the heater tool 59 and acts on its electric resistance to generate Joule heat. The heating of the heater tool 59 is controlled to reach a predetermined temperature for a predetermined time. Thus, a predetermined load and a predetermined temperature are applied to the joint portion, and the joint between the electrodes is established.

Here, it is important that the loads applied to the parts to be joined that are superposed on each other are even on the entire pressing surface. If there is a deviation in this, the joining quality becomes uneven, in other words, the joining reliability decreases. Connect directly to. Therefore, in the joining operation, it is important to adjust the parallelism between the pressing surface 59S of the heater tool 59 and the main surface 60S of the stage 60 in advance.

[0007]

In the prior art, the parallelism adjustment mechanism 53 shown in FIG. 4 adjusts the parallelism. The parallelism adjusting mechanism 53 includes a substantially square upper plate 5 having a conical or pyramidal concave portion at a substantially central portion of the lower surface.
4 and a substantially square lower plate 55 having a conical or pyramid-shaped recess at the substantially central portion of the upper surface, the main portion is constituted,
A steel ball 56 is sandwiched between the opposed concave portions, and the upper plate 54 and the lower plate 55 are separated by a predetermined distance by the steel ball 56.

Further, the upper plate 54 and the lower plate 55
4 adjustment screws 57A, 57 near the four corners of
B, 57C and 57D are fixed, and the parallelism adjusting mechanism 53 maintains a stable state by the balance of the tensions of these four adjusting screws. With the parallelism adjusting mechanism 53 having such a configuration, the pressing surface 59S of the heater tool 59 and the main surface 6 of the stage 60 are
To adjust the parallelism of 0S, 4 adjustment screws 57A,
The tightening force of 57B, 57C, and 57D is adjusted, and the angle of the lower pressurizing shaft center line 61B is changed.

Along with this, the angle of the pressing surface 59S of the heater tool 59 with respect to the main surface 60S of the stage 60 also changes, and parallelism adjustment is performed. However, such adjustment is based on the relative balance of the tightening forces of the four adjusting screws 57A, 57B, 57C, and 57D.
The adjustment itself was very difficult because if one of the adjustment screws was adjusted to adjust the horizontal direction, it would affect the adjustment in the front-rear direction and vice versa.

A welding tool represented by the heater tool 59 is generally a consumable item. Therefore, at least when exchanging the welding tool, the above-mentioned parallelism adjusting work is required. That is, the worker or the adjuster is forced to perform the adjustment work having a high degree of difficulty at least each time.

By performing the above-mentioned parallelism adjustment, the position of the heater tool 59S moves to the front, rear, left and right,
The center position is deviated from the extension line of the upper pressing axis center line 61A. Along with this, it becomes necessary to move the stage 60 back and forth and to the left and right to align the positions, and even if it is intended to adjust the parallelism with care, no pressure is applied on the center line of the pressurizing shaft, so that an excessive load is applied in the actual joining operation. There is a possibility that the uniformity of the pressure in the pressing surface will be impaired at the moment when is applied.

The present invention has been made to solve the above problems, and enables easy adjustment in adjusting the parallelism between the pressing surface of the welding tool and the main surface of the stage, and the position of the pressing surface by the adjustment. An object of the present invention is to provide a joining device having a parallelism adjusting mechanism that does not cause misalignment.

[0013]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention sandwiches a plurality of parts to be joined and sandwiches them, and presses the sandwiched parts and heats the joint part or applies ultrasonic vibration thereto. By jointly using, in a joining device for electrically and mechanically joining the joint parts of the parts to be joined which are aligned with each other,

As a first aspect, a stage for placing parts to be joined and a pressing means move toward the main surface of the stage to apply a pressure to the joining part in a direction substantially perpendicular to the joining surface. A welding tool and a parallelism adjusting mechanism that is interposed between the pressing means and the welding tool and that changes the angle of the pressing surface of the welding tool, and has a main surface of the stage and the pressing surface of the welding tool. Provided is a joining device characterized in that the position of the pressing surface does not move even if parallelism is adjusted.

As a second aspect, there is provided the welding apparatus as described in the first aspect, wherein the welding tool is a heater tool.

In a third aspect, the welding tool is provided on an ultrasonic horn.
The joining device described in the above embodiment is provided.

As a fourth aspect, when the pressing direction of the welding tool is the vertical direction, the parallelism of the pressing surface can be adjusted individually in the front-rear direction and the left-right direction. There is provided a joining device as described in any one of 1.

As a fifth aspect, the mechanism for realizing the parallelism adjustment has both an arc-shaped contact surface in the left-right direction and an arc-shaped contact surface in the front-rear direction with the center of the pressing surface of the welding tool as a fulcrum. Fourth, which is a mechanism having
The joining device described in the above embodiment is provided.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a front view and a right side view showing a main part of a joining apparatus showing one embodiment of the present invention, and FIG.
3 is a front view and a right side view of the main part of the joining apparatus showing another embodiment of the present invention. In FIG. 1, 1 is a pressing means, 2 is a main shaft which slides in the vertical direction by the pressing means, 3 is a parallelism adjusting mechanism, 4 is an insulating block, 5A and 5B are a pair of power feeding blocks, and 6 is a heater tool. , 7 are stages.

The basic proper joining operation is equivalent to that described in the description of the prior art. First, a command is issued to the pressurizing means 1 and the main shaft 2 is lowered. Along with this, the pressurizing surface 6S of the heater tool 6 also descends, and presses a not-shown bonded component placed on the main surface 7S of the stage 7. At the same time, the power supply blocks 5A and 5A are connected via cables (not shown).
When the electric energy supplied to B flows through the heater chip 6, the electric energy acts on the electric resistance of the heater chip 6 to heat it by the Joule heat.

At this time, in order to realize highly reliable joining, the parallelism between the pressure surface 6S and the main surface 7S must be adjusted in advance. In the method of adjusting the parallelism, if the parallelism in the left-right direction is first adjusted, the X-direction fixing screws 8A (two front and rear screws) on the X-direction fixing plate 8 shown on the side surface of the parallelism adjusting mechanism 3 in FIG. 4 pieces each).

The X-direction fixing screw 8A is screwed into the female screw hole of the second movable block 11, and the through-hole for the X-direction fixing screw 8A in the X-direction fixing plate 8 is formed with a large diameter by a predetermined amount. ing. Therefore, by loosening the X-direction fixing screw 8A, the second movable block 11 can be moved by the margin of the through hole described above.

On the other hand, the upper surface of the second movable block 11 is formed in a curved surface shape along the arc 12 in the left-right direction with the center of the pressing surface 6S as a fulcrum, and has a concave curved surface matching this curved surface as the lower surface. The first movable block 10 is constrained by a method described later so that it can only move in the left-right direction along the curved surface of the arc shape.

Therefore, the integrally fixed structure from the second movable block 11 to the heater tool 6 can be swung while being restrained in the left and right rotation directions with the center of the pressing surface 6S as the fulcrum, and the pressing surface 6S is rotated. It is possible to change the surface angle in the left-right direction of. This surface angle can be finely adjusted by rotating the X-direction adjusting screw 13 by a mechanical action described later. After adjusting the parallelism between the main surface 7S and the pressing surface 6S in the left-right direction in this way, the adjustment result can be held by tightening the X-direction fixing screw 8A.

Next, when adjusting the parallelism in the front-back direction,
The Y-direction fixing plate 1 shown on the side surface of the parallelism adjusting mechanism 3 in FIG.
4A Y direction fixing screw 14A (2 left and right 4 in total)
Loosen. These have the same functions as the X-direction fixing plate 8 and the X-direction fixing screw 8A. Further, the upper surface of the first movable block 11 is formed in a curved surface shape along a circular arc 15 in the front-rear direction with the center of the pressing surface 6S as a fulcrum, and the fixed block 9 having a concave curved surface corresponding to this curved surface as a lower surface. In addition, it is constrained by a method described later so that it can only move in the front-rear direction along the curved surface of the arc shape.

Therefore, the structure integrally fixed from the first movable block 10 to the heater tool 6 can be swung while being restrained in the forward and backward rotational directions with the center of the pressing surface 6S as a fulcrum, and the pressing surface 6S. The surface angle in the front-back direction can be changed. This surface angle can be finely adjusted by rotating the Y-direction adjusting screw 16 by a mechanical action described later. After adjusting the parallelism between the main surface 7S and the pressing surface 6S in the front-rear direction in this way, and tightening the Y-direction fixing screw 14A, the adjustment result can be held.

Next, the details of the parallelism adjusting mechanism 3 will be described with reference to FIG. In FIG. 2, the center shaft 17 is fixed to the second movable block 11 with screws 18. Further, the second movable block 11 is held so as to always come into contact with the first movable block 10 by the action of the combination of the pair of screws 19 and the compression coil spring 20 shown in section Y.

The pair of holes 21 in the second movable block 11 are formed larger by a predetermined amount than the screw diameter of the screw 19. Further, as described above, the first movable block 10
Both the second movable block 11 and the second movable block 11 have an arc 12 in the left-right direction.
It touches on the surface along. Therefore, by loosening the X-direction fixing screw 8A and turning the X-direction adjusting screw 13, the center shaft 17 swings in the left-right direction.

The swing of the center shaft 17 swings along the arc 12 which is interlocked with the second movable block 11, that is, the swing in the left-right direction with the center of the pressing surface 6S of the heater tool 6 shown in FIG. 1 as a fulcrum. It is dynamic. The compression coil spring 23, which faces the X-direction adjusting screw 13 with the center shaft 17 interposed therebetween, constantly presses the side surface of the center shaft 17 when the other end is pressed by the set screw 22, so that the center shaft 17 always moves in the X direction. It follows the tip of the direction adjusting screw 13.

Thus, the second movable block 11 has a hole 21
Of the diameter of the center shaft 17 and the space provided around the center shaft 17,
In addition, the rib can rotate in the left-right direction along the arc 12 by the amount of the play of the X-direction fixing screw 8A described above, and as a result, the parallelism in the left-right direction of the pressing surface 6S can be adjusted, and further fixed in the X-direction. It is possible to hold the adjustment result by tightening the screw 8A.

Next, the first movable block is held so as to always come into contact with the fixed block 9 by the action of the combination of the pair of screws 24 and the compression coil spring 25, which are shown by cross-sections AA. Further, the pair of holes 26 in the first movable block 10 are formed larger than the screw diameter of the screw 24 by a predetermined amount. Further, as described above, both the fixed block 9 and the first movable block 10 are in contact with each other on the surface along the arc 15 in the front-rear direction. Therefore, the Y-direction fixing screw 1
By loosening 4A and turning the Y-direction adjusting screw 16, the center shaft 17 swings in the front-back direction.

The swing of the center shaft 17 is the swing along the arc 15 interlocking with the second movable block 11 and the first movable block 10 fixed thereto, that is, FIG.
Is a swing in the front-back direction with the center of the pressure surface 6S as the fulcrum. The compression coil spring 28 opposed to the Y-direction adjusting screw 16 with the center shaft 17 interposed therebetween always presses the side surface of the center shaft 17 when the other end is pressed by the set screw 27, so that the center shaft 17 is always Y-shaped. It follows the tip of the direction adjusting screw 16.

Thus, the first movable block 10 has the hole 26.
And the screw diameter of the screw 24, or the diameter of the center shaft 17 and the space provided around it,
Alternatively, the Y direction fixing screw 14A can be swung in the front-rear direction along the circular arc 15 as a result, and as a result,
The parallelism in the front-back direction of the pressure surface 6S can be adjusted, and the adjustment result can be held by tightening the Y-direction fixing screw 14A. As described above, in the present embodiment, it is possible to individually adjust the parallelism in the left-right direction and the front-rear direction by the parallelism adjusting mechanism 3, and further, to adjust the parallelism between the main surface 7S of the stage 7 and the pressing surface 6S of the heater tool 6. Has been realized.

FIGS. 1 and 2 show a parallelism adjusting mechanism when a heater tool is used as a welding tool. Next, based on FIG. 3, the welding tool equipped with an ultrasonic horn will be used. A parallelism adjusting mechanism in the sonic bonding device will be described. In FIG. 3, 31 is a pressing means, 32 is a main shaft, 33 is a parallelism adjusting mechanism, 34 is a vibrator, and 35 is a vibrator.
Is an ultrasonic horn, and 35A is a joining tool.

First, a command is issued to the pressurizing means 31 and the main shaft 32 descends. Along with this, ultrasonic horn 3
The welding tool 35A provided on the stage 5 also descends, and the stage 3
An unillustrated bonded component placed on the main surface 36S of 6 is pressed. On the other hand, ultrasonic power generated by an oscillator (not shown) is input to the vibrator 34 via a cable (not shown). The vibrator 34 converts the electric energy of the ultrasonic power into mechanical ultrasonic vibration and transmits it to the ultrasonic horn 35.

The ultrasonic horn 35 transmits this vibration to the welding tool 35A as a longitudinal wave in the direction of arrow c. The pressurizing surface 35S of the welding tool 35A realizes ultrasonic welding by pressing an object to be welded (not shown) with a load generated by the pressurizing means 1 and simultaneously applying ultrasonic vibration in a direction parallel to the welding surface.

At this time, in order to realize reliable joining, the parallelism between the pressing surface 35S of the joining tool 35A and the main surface 36S of the stage 36 must be adjusted in advance. To perform this parallelism adjustment, it is possible to use the parallelism adjustment mechanism 33 having the same configuration and function as the case of joining by the heater tool described with reference to FIGS. 1 and 2.

Therefore, the parallelism adjusting mechanism 33 here is used.
Also has the same effect as the parallelism adjusting mechanism 3 shown in FIGS. 1 and 2 described above, and in the left-right direction, the second movable block 38 along the left-right arc 37 with the center of the pressing surface 35S as the fulcrum. By the behavior of, the parallelism of the pressure surface 35S is adjusted. Similarly, in the front-back direction, the parallelism of the pressure surface 35S is adjusted by the behavior of the first movable block 40 along the arc 39 in the front-back direction with the center of the pressure surface 35S as the fulcrum.

[0039]

According to the present invention, even if the parallelism between the main surface of the stage and the pressing surface of the welding tool is adjusted, the position of the center of the pressing surface does not move. Thus, a load can be applied to the parts to be joined, and a stable pressure distribution can be obtained on the pressing surface even in an environment where the pressure changes rapidly during joining.

Further, according to the present invention, the parallelism adjustment in the left-right direction and the front-rear direction can be individually performed, and the adjustments in the both directions do not affect each other, so that the adjustment work is easy and reliable.

In the prior art, the parallelism is adjusted by balancing the tightening forces of a plurality of screws, and the pressing mechanism is fixed by the total tightening force of the plurality of screws. Therefore, there is a possibility that the tightening force balance will be prioritized and the lower limit of the tightening force of the screw alone will be exceeded, and this judgment depends only on the skill of the operator or the adjuster.

In contrast, according to the present invention, since the adjusting screw for parallelism and the fixing screw for holding the result are separate, the above-mentioned judgment is not necessary and the connection reliability due to the adjustment error is not necessary. It is possible to avoid an accident due to a decrease in power consumption or poor adjustment.

[Brief description of drawings]

FIG. 1 is a front view and a right side view showing a main part of a joining device showing an embodiment of the present invention.

FIG. 2 is a sectional view of FIG.

FIG. 3 is a front view and a right side view of a main part of a joining device showing another embodiment of the present invention.

FIG. 4 is a front view of a main part of a conventional joining device.

[Explanation of symbols]

1 Pressurizing means 2 main shaft 3 Parallelism adjustment mechanism 4 insulating blocks 5A, 5B power supply block 6 heater tools 6S Pressing surface 7 stages 7S main surface 8 X direction fixing plate 8A X direction fixing screw 9 fixed block 10 First movable block 11 Second movable block 12 Left and right circular arc 13 X direction adjustment screw 14 Y direction fixing plate 14A Y direction fixing screw 15 Front-back arc 16 Y direction adjustment screw

Front page continuation (51) Int.Cl. ⁷ Identification code FI theme code (reference) H05K 3/32 H05K 3/32 C // B23K 101: 42 B23K 101: 42

Claims (5)

[Claims] 1. A joining device for sandwiching a plurality of parts to be joined together by sandwiching them and electrically and mechanically joining the joint parts of the parts to be joined which are aligned with each other, wherein the parts to be joined are mounted. A stage for placing, and moving toward the main surface of the stage by a pressing means,
A welding tool that applies a pressure in a direction substantially perpendicular to the welding surface to the welding portion, and a parallelism adjusting mechanism that is interposed between the pressing unit and the welding tool and that changes the angle of the pressing surface of the welding tool, A welding apparatus, wherein the position of the pressing surface does not move even when the parallelism between the main surface of the stage and the pressing surface of the welding tool is adjusted. 2. The welding device according to claim 1, wherein the welding tool is a heater tool. 3. The welding device according to claim 1, wherein the welding tool is provided on an ultrasonic horn. 4. When the pressing direction of the welding tool is the vertical direction, the parallelism of the pressing surface can be adjusted individually in the front-back direction and the left-right direction.
The joining apparatus according to any one of 1. 5. The mechanism for realizing the parallelism adjustment has both an arc-shaped contact surface in the left-right direction and an arc-shaped contact surface in the front-rear direction with different radii around the pressing surface of the welding tool. It is a mechanism, The joining apparatus of Claim 4 characterized by the above-mentioned.