JP2003185438A - Method for driving rotation-vibration gyro and vibrator structure - Google Patents

Method for driving rotation-vibration gyro and vibrator structure

Info

Publication number
JP2003185438A
JP2003185438A JP2001382861A JP2001382861A JP2003185438A JP 2003185438 A JP2003185438 A JP 2003185438A JP 2001382861 A JP2001382861 A JP 2001382861A JP 2001382861 A JP2001382861 A JP 2001382861A JP 2003185438 A JP2003185438 A JP 2003185438A
Authority
JP
Japan
Prior art keywords
shaped
fixed shaft
cross
vibrator
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001382861A
Other languages
Japanese (ja)
Inventor
Tsunehiko Imamura
恒彦 今村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tamagawa Seiki Co Ltd
Original Assignee
Tamagawa Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tamagawa Seiki Co Ltd filed Critical Tamagawa Seiki Co Ltd
Priority to JP2001382861A priority Critical patent/JP2003185438A/en
Publication of JP2003185438A publication Critical patent/JP2003185438A/en
Pending legal-status Critical Current

Links

Abstract

<P>PROBLEM TO BE SOLVED: To vibrate a vibrator while electromagnetically reciprocating and rotating it by supplying the vibrator arranged in magnetic fields different from each other with a current while switching its polarity. <P>SOLUTION: In the method for driving a rotation-vibration gyro and a vibrator structure, the magnetic fields (5) difference from each other are generated on both sides of a casing (1). The vibrator (4) is provided in the magnetic fields (5). By supplying a current for cross-shaped conductors (13) and conducting pieces for connection (20) provided for both surfaces of the vibrator (4) while switching its polarity, the vibrator (4) is reciprocated from side to side, rotated, and vibrated. <P>COPYRIGHT: (C)2003,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、回転振動ジャイロ
の駆動方法及び振動子構造に関し、特に、磁界中の振動
子に供給する電流の向きを所要速度で切換えることによ
り振動子を往復回動させて振動させ、振動子とケーシン
グとの間隙を従来の静電式構造よりも大きくし、製作を
容易化するための新規な改良に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of driving a rotary vibration gyroscope and a vibrator structure, and more particularly, the vibrator is reciprocally rotated by switching the direction of a current supplied to the vibrator in a magnetic field at a required speed. The present invention relates to a new improvement for facilitating the manufacture by vibrating the device by making the gap between the vibrator and the casing larger than that of the conventional electrostatic structure.

【0002】[0002]

【従来の技術】従来、用いられていた振動体に角速度が
印加された時に、振動体に発生するコリオリの力を利用
して角速度を計測する振動ジャイロとしては、音叉型振
動子、片持ち梁型振動子の往復直線振動を用いる構成、
リング型振動子の伸縮振動を用いる構成、円板等の薄板
の回転振動を用いる構成があり、これらの駆動に用いる
力の発生方法としては、静電力を用いる構成、ピエゾ素
子の圧電現象を用いる構成、電磁力を用いる構成が周知
であり、回転振動の励起方法としては静電力によるもの
が一般的である。
2. Description of the Related Art Conventionally, a vibrating gyro that uses a Coriolis force generated in a vibrating body to measure the angular velocity when the angular velocity is applied to the vibrating body has been a tuning fork type vibrator, a cantilever beam. Configuration using reciprocating linear vibration of the die vibrator,
There are configurations that use expansion and contraction vibration of a ring-type vibrator and configurations that use rotational vibration of a thin plate such as a disk. As a method of generating a force used for driving these, a configuration using electrostatic force and a piezoelectric phenomenon of a piezoelectric element are used A configuration and a configuration using an electromagnetic force are well known, and an electrostatic force is generally used as a method for exciting rotational vibration.

【0003】[0003]

【発明が解決しようとする課題】従来の振動ジャイロ
は、以上のように構成されていたため、次のような課題
が存在していた。すなわち、静電力を利用して駆動する
場合には、振動子とそれを挟む電極間の隙間を極めて微
小(数ミクロンオーダー)とする必要があるため、その
製作には極めて高精度が要求され、大量生産には大きい
障害となっていた。
Since the conventional vibrating gyro is configured as described above, the following problems exist. In other words, when driving using electrostatic force, it is necessary to make the gap between the vibrator and the electrodes that sandwich it very small (on the order of a few microns), so extremely high precision is required for its manufacture, It was a big obstacle to mass production.

【0004】本発明は、以上のような課題を解決するた
めになされたもので、特に、磁界中の振動子に供給する
電流の向きを所要速度で切換えることにより振動子を往
復回動させて振動させ、振動子とケーシングとの間隙を
従来の静電式構造よりも大きくし、製作を容易化するよ
うにした回転振動ジャイロの駆動方法及び振動子構造を
提供することを目的とする。
The present invention has been made to solve the above problems, and in particular, the oscillator is reciprocally rotated by switching the direction of the current supplied to the oscillator in a magnetic field at a required speed. An object of the present invention is to provide a method of driving a rotary vibration gyro and a vibrator structure that vibrate to make a gap between the vibrator and the casing larger than that of a conventional electrostatic structure to facilitate manufacturing.

【0005】[0005]

【課題を解決するための手段】本発明による回転振動ジ
ャイロの駆動方法は、ケーシング内に固定して設けられ
た固定軸と、前記固定軸の外周に設けられた輪状円板
と、前記輪状円板に形成され前記固定軸と導通すると共
に前記固定軸を交点とする十字状の十字状導通体と、前
記十字状導通体の互いに対向する一対の端部間に形成さ
れた接続用導通片と、前記ケーシングの外面に前記固定
軸を中心として互いに対向する位置となるように設けら
れ前記輪状円板を通過する磁界の方向が逆となるような
磁界を発生する一対の磁界発生部と、前記固定軸の両端
に接続され前記両端に供給する電流の極性を所要の速度
で切換えることができる電流源とを備え、前記電流源か
らの極性を切換えることにより、前記十字状導通体及び
接続用導通片を流れる電流の向きが前記極性の切換えと
同期して切換わり、前記輪状円板が前記極性の切換えと
同期して回転方向を切換えることにより前記輪状円板が
往復回動して振動する方法であり、また、本発明による
振動子構造は、固定軸の外周に設けられた輪状円板と、
前記輪状円板に形成され前記固定軸と導通すると共に前
記固定軸を交点とする十字状の十字状導通体と、前記十
字状導通体の互いに対向する一対の端部間に形成された
接続用導通片とを備え、前記輪状円板は前記固定軸に対
して前記十字状導通体のみで接続されている構成であ
る。
A method of driving a rotary vibration gyroscope according to the present invention comprises a fixed shaft fixedly provided in a casing, a ring-shaped disc provided on the outer periphery of the fixed shaft, and the ring-shaped circle. A cross-shaped cross-shaped conductive body formed on a plate and conducting with the fixed shaft and having the fixed shaft as an intersection, and a connecting conductive piece formed between a pair of opposite ends of the cross-shaped conductive body. A pair of magnetic field generators that are provided on the outer surface of the casing so as to face each other around the fixed shaft and generate magnetic fields in which the directions of the magnetic fields passing through the annular disc are reversed; A current source connected to both ends of the fixed shaft and capable of switching the polarity of the current supplied to the both ends at a required speed, and by switching the polarity from the current source, the cross conductor and the connecting conduction Flowing pieces A method in which the direction of the electric current is switched in synchronization with the switching of the polarities, and the annular disk is reciprocally rotated and vibrated by switching the rotation direction in synchronization with the switching of the polarity, Further, the vibrator structure according to the present invention, a ring-shaped disc provided on the outer periphery of the fixed shaft,
A cross-shaped cross-shaped conductor that is formed on the ring-shaped disc and that conducts to the fixed shaft and has the fixed shaft as an intersection, and a connection formed between a pair of opposite ends of the cross-shaped conductor. A conducting piece, and the ring-shaped disc is connected to the fixed shaft only by the cross-shaped conducting body.

【0006】[0006]

【発明の実施の形態】以下、図面と共に本発明による回
転振動ジャイロの駆動方法及び振動子構造の好適な実施
の形態について説明する。図1において符号1で示され
るものは全体形状が箱形をなすケーシングであり、この
ケーシング1の外面である上面1aと下面1bには、互
いに離間した状態で第1、第2磁界発生部2、3が設け
られている。
BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of a method for driving a rotary vibration gyro and a vibrator structure according to the present invention will be described below with reference to the drawings. In FIG. 1, reference numeral 1 denotes a casing whose overall shape is a box shape. The casing 1 has an outer surface, an upper surface 1a and a lower surface 1b, on which the first and second magnetic field generating portions 2 are separated from each other. 3 are provided.

【0007】前記各磁界発生2、3は、マグネット(電
磁マグネットも可)よりなり、ケーシング1の上面1a
と下面1bに発生する磁極が互いに異なるように構成さ
れ、このケーシング1内の振動子4を通過する磁界5の
方向が互いに逆となるように構成されている。
Each of the magnetic field generations 2 and 3 is composed of a magnet (or an electromagnetic magnet is also possible), and the upper surface 1a of the casing 1
The magnetic poles generated on the lower surface 1b are different from each other, and the directions of the magnetic fields 5 passing through the vibrator 4 in the casing 1 are opposite to each other.

【0008】前記振動子4は、前記ケーシング1内の中
央に配設された固定軸6(この固定軸6は導体の場合、
表面に導体を付着させた不導体の場合、半導体の場合が
ある)にこの固定軸6を中心として後述のばねである十
字状導通体13を介して弾性的に支持され、この固定軸
6を中心として振動子4がこの十字状導通体13のばね
部13cを介して正逆往復回動するように構成されてい
る。すなわち、この十字状導通体13は、図1及び図2
で示す円形空隙12に対応した部分のばね部13cが輪
状円板11に接合している状態であると共にばね性を有
するように構成されている。前記固定軸6の上下両端に
は、その出力される電流の極性を所要の速度(すなわ
ち、振動子4の構造によって決まる共振周波数で振動を
励起する)で切換えができるように構成された電流源1
0が接続されている。
The vibrator 4 includes a fixed shaft 6 disposed in the center of the casing 1 (in the case where the fixed shaft 6 is a conductor,
In the case of a non-conductor having a conductor attached to the surface, it may be a semiconductor) and is elastically supported about this fixed shaft 6 via a cross-shaped conductor 13 which is a spring described later. The vibrator 4 is configured to reciprocate forward and backward through the spring portion 13c of the cross-shaped conductor 13 as a center. That is, the cross-shaped conductor 13 has a structure similar to that shown in FIGS.
A portion of the spring portion 13c corresponding to the circular space 12 indicated by is joined to the ring-shaped disc 11 and has a spring property. A current source configured to switch the polarity of the output current at the upper and lower ends of the fixed shaft 6 at a required speed (that is, to excite vibration at a resonance frequency determined by the structure of the vibrator 4). 1
0 is connected.

【0009】前記振動子4は、具体的には、図2で示さ
れるように構成されている。すなわち、前記振動子4を
構成する輪状円板11が固定軸6の外周に位置し、この
輪状円板11の中央に位置する円形空隙12の中心に前
記固定軸6が位置している。
The vibrator 4 is specifically constructed as shown in FIG. That is, the ring-shaped disc 11 that constitutes the vibrator 4 is located on the outer periphery of the fixed shaft 6, and the fixed shaft 6 is located at the center of the circular space 12 located in the center of the ring-shaped disc 11.

【0010】前記輪状円板11の両面には、蒸着エッチ
ング等により形成された金属よりなる十字状をなす十字
状導通体13が形成され、この十字状導通体13の交点
14は前記固定軸6に溶接又はわずか半田等によって接
続され、前記円形空隙12部分はこの一対の弾性体から
なる十字状導通体13のばね部13cのみが存在し、前
記輪状円板11は前記固定軸6に対して前記ばね部13
cのみによって往復回転(すなわち回動振動及び傾斜等
の変形が可能となるように構成されている。
On both surfaces of the ring-shaped disc 11, cross-shaped conductors 13 are formed of metal formed by vapor deposition etching or the like, and the cross-shaped conductors 13 are formed. The intersections 14 of the cross-shaped conductors 13 are fixed shafts 6. Are connected to each other by welding or slightly soldering, and the circular gap 12 has only the spring portion 13c of the cross-shaped conducting body 13 formed of a pair of elastic bodies, and the ring-shaped disc 11 is fixed to the fixed shaft 6. The spring portion 13
It is configured such that reciprocal rotation (that is, deformation such as rotational vibration and inclination) is possible only by c.

【0011】前記各十字状導通体13の互いに対向する
一対の端部13a、13b間には、輪状円板11の外周
に沿う円弧状(直線状も可)の接続用導通片20が電気
的に導通して接続され(尚、輪状円板11の両面とも同
様に形成されている)、固定軸6の位置すなわち交点1
4を中心としてほぼ8字形に形成されている。
Between the pair of opposed end portions 13a, 13b of each cross-shaped conductor 13, an arc-shaped (or straight-lined) connecting conductive piece 20 along the outer circumference of the annular disc 11 is electrically connected. And is connected to each other (note that both surfaces of the ring-shaped disc 11 are formed in the same manner), and the position of the fixed shaft 6, that is, the intersection 1
It is formed in a figure of 8 with 4 as the center.

【0012】次に、動作について説明する。まず、本発
明の動作説明をする前に、一般的な回転振動ジャイロの
動作原理について述べる。モデルとして円板形を採用
し、振動子4が固定軸6に対して4本のばね部13cを
有する十字状ばね13Aで支持されているものとする。
前述の状態で、固定軸6まわりのx軸に回転振動を励起
した状態で、y軸まわりに回転速度Ωが加わったとする
と、励起した回転振動の速度ベクトルの向きvと回転角
速度ベクトルΩの外積を使って(1)式のように定義さ
れる周知のコリオリの力Fcが発生し、z軸まわりに振
動が発生する。このz軸まわりの振動を静電式又は光学
的変位検出式を用いて検出することによって角速度を測
定することができる。但し、ここでは、符号の上につけ
る矢印マークは省略している。
Next, the operation will be described. First, before explaining the operation of the present invention, the operation principle of a general rotary vibration gyro will be described. A disk shape is adopted as a model, and it is assumed that the vibrator 4 is supported on the fixed shaft 6 by a cross spring 13A having four spring portions 13c.
In the above-mentioned state, if rotational speed Ω is applied around the y-axis in the state where rotational vibration is excited on the x-axis around the fixed axis 6, the outer product of the direction v of the excited rotational vibration velocity vector and the rotational angular velocity vector Ω. A well-known Coriolis force Fc defined by the equation (1) is generated by using, and vibration is generated around the z axis. The angular velocity can be measured by detecting the vibration around the z-axis using an electrostatic type or an optical displacement detection type. However, the arrow mark above the reference numeral is omitted here.

【0013】[0013]

【数1】 [Equation 1]

【0014】次に、図2の本発明における振動子4を高
速で左右往復回動させて振動させる場合について説明す
る。前記電流源10から正負が高速で切換えられて電流
が固定軸6の両端に供給されると、振動子4の両面の各
十字状導通体13及び接続用導通片20を介して円周方
向へ放射状に電流iが矢印で示される向きA、B、C、
Dのように流れ、電流ループが形成される。
Next, a case where the vibrator 4 according to the present invention shown in FIG. 2 is oscillated by reciprocating left and right at high speed will be described. When the current source 10 is switched between positive and negative at high speed and a current is supplied to both ends of the fixed shaft 6, the electric current is supplied to both ends of the fixed shaft 6 in the circumferential direction via the cross-shaped conductors 13 and the connecting conductor pieces 20 on both sides of the vibrator 4. The directions A, B, C, in which the current i is radially indicated by arrows,
It flows like D and a current loop is formed.

【0015】前述の場合、電流が流れる向きがA、Bと
C、Dの各十字状導通体13上で、図1のように、磁界
5の向きが逆であると共に、電流の極性を変えてその向
きをA→C/B→DとA←C/B←Dとを交互に高速で
切換えることにより、矢印Fで各々示されるように、図
2のCW方向とCCW方向とが電流源10の極性切換え
に同期して切換えられ、振動子4はこの同期に供う周期
で固定軸6を中心として十字状導通体13のばね部13
cを介して左右往復回転振動を発生する。
In the above-mentioned case, the direction of the magnetic field 5 is reversed and the polarity of the current is changed on each of the cross-shaped conductors 13 in which the current flows in the directions A, B and C, D as shown in FIG. 2 by alternately switching the directions A → C / B → D and A ← C / B ← D at a high speed, as shown by arrows F, the CW and CCW directions in FIG. The oscillator 4 is switched in synchronism with the switching of the polarities of 10, and the vibrator 4 rotates the spring portion 13 of the cross-shaped conductor 13 about the fixed shaft 6 in a cycle provided for this synchronization.
Left and right reciprocating rotational vibration is generated via c.

【0016】前述の状態で振動している間に、外部から
角速度入力が発生した場合には、図3に示したコリオリ
の力が発生し、振動子4が傾斜するため、この傾斜状態
を周知の静電方式又は光学的変位検出方式等の検出手段
によって検出することにより角速度入力の大きさを検出
することができる。
When an angular velocity input from the outside occurs while vibrating in the above-mentioned state, the Coriolis force shown in FIG. 3 is generated and the vibrator 4 tilts. Therefore, this tilted state is known. The magnitude of the angular velocity input can be detected by detecting with a detection unit such as the electrostatic method or the optical displacement detection method.

【0017】尚、前述の角速度入力の検出データは、車
輛、船舶、航空機、ロボット等の姿勢制御等に用いられ
るものである。
The detection data of the angular velocity input is used for attitude control of vehicles, ships, aircrafts, robots and the like.

【0018】[0018]

【発明の効果】本発明による回転振動ジャイロの駆動方
法及び振動子構造は、以上のように構成されているた
め、次のような効果を得ることができる。すなわち、異
なる磁界中に電流を流すようにした十字状導通体を有す
る振動子を用い、振動子に供給する電流の向きを高速で
切換えるようにしているため、振動子は電磁力によって
左右往復回動による振動を発生することができ、ケーシ
ングと振動子4との間隙を従来の静電式又は光学的変位
検出方式等の間隙に比べると大幅に大きくすることがで
き、従来よりも製作が容易となり、検出精度も向上させ
ることができる。また、従来の静電構成に比べると、構
造を堅固に作ることができ、取扱いが容易でかつ適用分
野を広げることができる。
Since the method of driving the rotary vibration gyro and the structure of the vibrator according to the present invention are configured as described above, the following effects can be obtained. That is, since a vibrator having a cross-shaped conductor that allows current to flow in different magnetic fields is used and the direction of the current supplied to the vibrator is switched at high speed, the vibrator is rotated left and right by an electromagnetic force. It is possible to generate vibration due to movement, and the gap between the casing and the vibrator 4 can be made significantly larger than the gap of the conventional electrostatic type or optical displacement detection method, etc. Therefore, the detection accuracy can be improved. Further, compared with the conventional electrostatic structure, the structure can be made more solid, the handling is easy, and the application field can be expanded.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による回転振動ジャイロの駆動方法及び
振動子構造を示す構成図である。
FIG. 1 is a configuration diagram showing a method of driving a rotary vibration gyro and a vibrator structure according to the present invention.

【図2】図1の振動子の振動状態を示す説明図である。FIG. 2 is an explanatory diagram showing a vibrating state of the vibrator of FIG.

【図3】一般的な円板状の振動子の入力角速度の検出状
態を示す説明図である。
FIG. 3 is an explanatory diagram showing a detected state of an input angular velocity of a general disc-shaped oscillator.

【符号の説明】[Explanation of symbols]

1 ケーシング 1a、1b 上面、下面(外面) 2、3 磁界発生部 4 振動子 5 磁界 6 固定軸 10 電流源 11 輪状円板 12 円形空隙 13 十字状導通体 13a、13b 両端 13c ばね部 14 交点 20 接続用導通片 i 電流 A、B、C、D 向き 1 casing 1a, 1b Upper surface, lower surface (outer surface) A few magnetic field generators 4 oscillators 5 magnetic field 6 fixed axis 10 current source 11 ring-shaped disc 12 circular void 13 Cross-shaped conductor 13a, 13b both ends 13c Spring part 14 intersection 20 Conductive piece for connection i current A, B, C, D direction

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 ケーシング(1)内に固定して設けられた
固定軸(6)と、前記固定軸(6)の外周に設けられた輪状円
板(11)と、前記輪状円板(11)に形成され前記固定軸(6)
と導通すると共に前記固定軸(6)を交点とする十字状の
十字状導通体(13)と、前記十字状導通体(13)の互いに対
向する一対の端部(13a、13b)間に形成された接続用導通
片(20)と、前記ケーシング(1)の外面に前記固定軸(6)を
中心として互いに対向する位置となるように設けられ前
記輪状円板(11)を通過する磁界(5)の方向が逆となるよ
うな磁界(5)を発生する一対の磁界発生部(2、3)と、前
記固定軸(6)の両端に接続され前記両端に供給する電流
の極性を所要の速度で切換えることができる電流源(10)
とを備え、前記電流源(10)からの極性を切換えることに
より、前記十字状導通体(13)及び接続用導通片(20)を流
れる電流(i)の向き(A、B、C、D)が前記極性の切換えと
同期して切換わり、前記輪状円板(11)が前記極性の切換
えと同期して回転方向を切換えることにより前記輪状円
板(11)が往復回動して振動することを特徴とする回転振
動ジャイロ駆動方法。
1. A fixed shaft (6) fixedly provided in a casing (1), a ring-shaped disc (11) provided on the outer periphery of the fixed shaft (6), and the ring-shaped disc (11). ) Formed on the fixed shaft (6)
Is formed between a cross-shaped cross-shaped conductor (13) having a cross point of the fixed shaft (6) and a pair of end portions (13a, 13b) of the cross-shaped conductor (13) facing each other. The connecting conductive piece (20) and the magnetic field (11) provided on the outer surface of the casing (1) so as to face each other around the fixed shaft (6) and passing through the annular disc (11). A pair of magnetic field generators (2, 3) that generate a magnetic field (5) such that the directions of (5) are reversed, and the polarity of the current supplied to both ends of the fixed shaft (6) are required. Current source that can be switched at any speed (10)
By switching the polarity from the current source (10), the direction of the current (i) flowing through the cross-shaped conductor (13) and the connecting conducting piece (20) (A, B, C, D ) Is switched in synchronism with the switching of the polarity, and the ring-shaped disk (11) reciprocally rotates and vibrates by switching the rotation direction in synchronization with the switching of the polarity. A rotary vibration gyro drive method characterized by the above.
【請求項2】 固定軸(6)の外周に設けられた輪状円板
(11)と、前記輪状円板(11)に形成され前記固定軸(6)と
導通すると共に前記固定軸(6)を交点とする十字状の十
字状導通体(13)と、前記十字状導通体(13)の互いに対向
する一対の端部(13a、13b)間に形成された接続用導通片
(20)とを備え、前記輪状円板(11)は前記固定軸(6)に対
して前記十字状導通体(13)のみで接続されていることを
特徴とする回転振動ジャイロの振動子構造。
2. A ring-shaped disc provided on the outer periphery of the fixed shaft (6).
(11), a cross-shaped cross-shaped conducting body (13) formed in the annular disc (11) and electrically connected to the fixed shaft (6) and having the fixed shaft (6) as an intersection, and the cross-shaped A conductive piece for connection formed between a pair of opposite end portions (13a, 13b) of the conductive body (13).
(20), and the ring-shaped disc (11) is connected to the fixed shaft (6) only by the cross-shaped conductor (13), the vibrator structure of the rotary vibration gyro. .
JP2001382861A 2001-12-17 2001-12-17 Method for driving rotation-vibration gyro and vibrator structure Pending JP2003185438A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001382861A JP2003185438A (en) 2001-12-17 2001-12-17 Method for driving rotation-vibration gyro and vibrator structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001382861A JP2003185438A (en) 2001-12-17 2001-12-17 Method for driving rotation-vibration gyro and vibrator structure

Publications (1)

Publication Number Publication Date
JP2003185438A true JP2003185438A (en) 2003-07-03

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ID=27593075

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Country Link
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005038399A1 (en) * 2003-10-20 2005-04-28 Sony Corporation Angular velocity detector, angular velocity detection method by angular velocity detector and production method of angular velocity detector
JP2007046927A (en) * 2005-08-08 2007-02-22 Wacoh Corp Acceleration/angular velocity sensor, and manufacturing method therefor
JP2010286477A (en) * 2009-05-01 2010-12-24 Board Of Trustees Of The Leland Stanford Jr Univ Gyroscope and rotation detection method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005038399A1 (en) * 2003-10-20 2005-04-28 Sony Corporation Angular velocity detector, angular velocity detection method by angular velocity detector and production method of angular velocity detector
US7469603B2 (en) 2003-10-20 2008-12-30 Sony Corporation Angular velocity detector, method of detection of angular velocities using angular velocity detector, and method of fabricating angular velocity detector
JP2007046927A (en) * 2005-08-08 2007-02-22 Wacoh Corp Acceleration/angular velocity sensor, and manufacturing method therefor
JP2010286477A (en) * 2009-05-01 2010-12-24 Board Of Trustees Of The Leland Stanford Jr Univ Gyroscope and rotation detection method

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