JP2003182110A - Method and unit for stocking function liquid drop ejection head, method for manufacturing liquid crystal display, method for manufacturing organic el device, method for manufacturing electron emitter, method for manufacturing pdp device, method for manufacturing electrophoretic display, method for manufacturing color filter, method for producing organic el, method for forming spacer, method for forming metal wiring, method for forming lens, method for forming resist, and method for forming light diffuser - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To stock a function liquid drop ejection head while preventing oxidation in the head or intrusion of foreign matters into the head surely, and to eject function liquid accurately from an ejection nozzle when the function liquid drop ejection head is used subsequently. <P>SOLUTION: A stock liquid tank 201 is connected through an inflow pipe 206 with an inlet connection attachment 5 being connected with the function liquid inlet of a function liquid drop ejection head mounted on a head unit 1, and a suction pump 210 is connected through an outflow pipe 211 with a nozzle connection attachment 7 being connected with the ejection nozzle of the function liquid drop ejection head. Stock liquid is supplied to the function liquid drop ejection head by driving the suction pump 210 and then liquid supply is interrupted thus stocking the function liquid drop ejection head while filling the channels in the head with the stock liquid. Furthermore, the stock liquid is returned from the suction pump 210 back to the stock liquid tank 201 through a regeneration filter 213 before being recirculated. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for storing a functional liquid droplet ejection head represented by an ink jet, and a liquid crystal display device which is performed by using the functional liquid droplet ejection head stored by this method and apparatus. Manufacturing method of
Organic EL device manufacturing method, electron-emitting device manufacturing method, P
A method for manufacturing a DP device, a method for manufacturing an electrophoretic display device, a method for manufacturing a color filter, a method for manufacturing an organic EL, a method for forming a spacer, a method for forming a metal wiring, a method for forming a lens, a method for forming a resist and a method for forming a light diffuser. Is.

[0002]

2. Description of the Related Art An ink jet head (functional liquid droplet ejection head) of an ink jet printer can eject minute ink droplets (droplets) in a dot shape with high precision. It is expected to be applied to the manufacturing field of various products by using the functional liquid such as resin.

For example, as shown in FIGS. 1 to 3, a head unit 1 having a plurality of functional liquid droplet ejection heads 3 mounted on a single carriage 2 is used.
It is considered to manufacture the color filter for a liquid crystal display device, an organic EL display device, etc. by introducing the above into the drawing device A shown in FIG. The drawing apparatus A faces a head moving unit 101 which mounts the head unit 1 and moves the head unit 1 in the Y-axis direction and the θ-axis direction, and a work W such as a color filter substrate facing the head moving unit 101 in the X-axis direction. The work moving unit 102 to be moved and a maintenance unit 103 for maintaining the functional liquid droplet ejection head 3 of the head unit 1 are provided. The head moving unit 101 moves the head unit 1 mounted on the head moving unit 101 between the unit loading unit 104 and the maintenance unit 103 with the work moving unit 102 interposed therebetween. When the head unit 1 is loaded and set, the head moving unit 101 moves to the unit loading unit 104 side, and the temporary placing table 105 faces the unit loading unit 104. The head unit 1 is temporarily placed on the temporary placing table 105, and after connecting the piping and wiring, the head moving unit 1
It is set as if it is sent to 01. Then, in the preparatory step of initial positioning of the head unit 1, a slight movement (angle correction) of the head unit 1 in the θ-axis direction is performed, but in the drawing step of ejecting the filter material (functional liquid), the work W is In the X-axis direction and the head unit 1 is Y
By moving in the axial direction, main scanning and sub scanning of the functional liquid droplet ejection head 3 are performed. A suction cap 106 is arranged in the maintenance unit 103, and cleaning is performed to suck and remove the liquid remaining on the functional liquid droplet ejection head 3 by the suction cap 106 before the drawing process is started.

The head unit 1 has a total of twelve functional liquid droplet ejection heads 3 divided into two in the X-axis direction, and each functional liquid droplet ejection head 3 has a head holding member 4 interposed therebetween. It is fixed to the carriage 2. The carriage 2 is
A pair of support members 2 attached to the long side portions on both sides in the X-axis direction
a, 2a and a pair of handles 2b, 2b provided upright on the end portions of both support members 2a, 2a.
The head unit 1 can be inserted into the drawing apparatus A or the like with b and 2b being hand-held parts. Further, on the carriage 2, a pair of introduction port connection attachments 5 and 5 and a pair of wiring connection attachments 6 which are located above the divided functional liquid droplet ejection head group and are connected to these functional liquid droplet ejection heads 3 are provided. , 6 are installed. Each inlet connection attachment 5 is pipe-connected to the filter material supply system of the drawing apparatus A, and similarly each wiring connection assembly 6 is connected.
Are wired to the control system of the drawing apparatus A. Each inlet connection attachment 5 is a carriage 2
It is composed of a plate 5b which is installed above via a spacer 5a, and six sets of pipe adapters 5c mounted on the plate 5b. Each pipe adapter 5c includes a pipe connecting portion 5d at the upper end and a head connecting portion 5e at the lower end, and is fixed to the plate 5b with the head connecting portion 5e protruding below the plate 5b. Further, each wiring connection assembly 6 includes a connector base 6b that is installed above the long side portion of the carriage 2 via a bending support member 6a,
It is composed of a head relay board 6d with a wiring connector 6c mounted on a connector base 6b. And
The wiring connection assembly 6 is covered from above with a cover 6e (shown only in FIG. 2). Note that FIG. 1 is illustrated with one of the inlet connection attachments 5 omitted.

The above-mentioned functional liquid droplet ejection head 3 is of a so-called two-row type, and as shown in FIGS. 5 to 7, a liquid introducing section 3b having two needle-shaped functional liquid introducing ports 3a and a liquid introducing section. It is provided with two head substrates 3c connected to the side of 3b, two pump parts 3d connected below the liquid introduction part 3b, and a nozzle forming plate 3e connected to the pump part 3d. When the plate 5b of the introduction port connection attachment 5 is fixed to the spacer 5a with the screw 5f, the head connection portions 5e of the two pipe adapters 5c of the introduction port connection attachment 5 are fitted and connected to the functional liquid introduction port 3a. Further, a flexible flat cable (not shown) derived from the head relay substrate 6d of the wiring connection attachment 6 is connected to the head substrate 3c. On the other hand, the pump portion 3d and the nozzle forming plate 3e constitute a rectangular head body that projects to the back side through the head mounting opening 2c formed in the carriage 2. Also,
A large number of ejection nozzles 3f are formed in two rows on the nozzle forming plate 3e. The pump portion 3d includes the pressure chambers 3 corresponding to the number of nozzles formed in the elastic body 3g such as silicon rubber.
3 and the piezoelectric element 3i, each pressure chamber 33 communicates with the corresponding discharge nozzle 3f. Then, the liquid is ejected from the ejection nozzle 3f by the expansion and contraction of the pressure chamber 33 through the piezoelectric element 3i due to the energization of the piezoelectric element 3i. Further, the base portion side of the pump portion 3d is formed in a rectangular flange shape so as to receive the liquid introduction portion 3b, and the flange portion 3j has a pair of small screws for fixing the functional liquid droplet ejection head 3 to the head holding member 4. Screw holes 3k are formed. Then, with the functional liquid droplet ejection head 3 fixed to the head holding member 4, the head holding member 4 is fixed to the lower surface of the carriage 2, and the functional liquid droplet ejection head 3 is mounted on the carriage 2.

[0006]

When manufacturing a product such as a color filter as described above, it is also assumed that the viscosity of the functional liquid to be ejected becomes high and the durability of the functional liquid droplet ejection head 3 is greatly affected. Therefore, new head unit 1
Need to be supplied at any time. Also, when a plurality of types of products are manufactured by the drawing apparatus A, it is necessary to replace the head unit 1 according to the products.

By the way, the functional liquid droplet ejection head 3 has a very precise structure, and if the head unit 1 is simply stored in preparation for supply and replacement of the head unit 1, the inside of the head will be The functional liquid cannot be discharged accurately due to oxidation or intrusion of foreign matter in the atmosphere.

In view of the above points, the present invention is a storage method and a storage device for storing a functional liquid droplet discharge head in good condition by using a storage liquid so as to prevent defective discharge of the functional liquid, and this storage. Method and manufacturing method of liquid crystal display device using functional liquid droplet ejection head stored in storage device, organic EL device manufacturing method, electron emission device manufacturing method, PDP device manufacturing method, electrophoretic display device manufacturing method, An object of the present invention is to provide a color filter manufacturing method, an organic EL manufacturing method, a spacer forming method, a metal wiring forming method, a lens forming method, a resist forming method, and a light diffuser forming method.

[0009]

According to the storage method of the present invention, the storage liquid is passed through a flow path in the head from the functional liquid discharge head side of the functional liquid droplet discharge head to the discharge nozzle, and the discharge is stopped. It is characterized in that the functional liquid droplet ejection head is stored with the storage liquid being filled in the flow path in the head. Further, the storage device of the present invention is a storage device for a functional liquid droplet ejection head, which stores the liquid in the head from the functional liquid introduction port side of the functional liquid droplet ejection head to the ejection nozzle by filling it with a storage liquid, An introduction port connection attachment connected to the functional liquid introduction port, a nozzle connection attachment connected to the discharge nozzle, and a liquid passage means for passing the storage liquid to the flow path in the head through the introduction port connection attachment and the nozzle connection attachment It is characterized by having and.

According to the above construction, during storage, the flow path in the head is filled with the storage liquid and is not exposed to the atmosphere, so that the oxidation inside the head and the entry of foreign matter into the head are reliably prevented. Therefore, when the functional liquid droplet ejection head is subsequently used, the functional liquid can be ejected with high accuracy. In particular, in the above storage device, the functional liquid droplet ejection head can be stored as it is by inserting the functional liquid droplet ejection head into the storage device and operating the liquid passing means to fill the storage liquid in the flow path inside the head. , Easy to handle.

The liquid passage means is provided with an inflow pipe,
It may be configured to have a storage liquid tank connected to the inlet connection attachment and a suction pump connected to the nozzle connection attachment via the outflow pipe. According to this, the storage liquid in the storage liquid tank is sucked by the suction pump via the inflow pipe, the inlet connection attachment, the functional liquid droplet ejection head, the nozzle connection attachment, and the outflow pipe, and stored in the flow path in the head. Can pass liquid. In this case, if a recovery pipe communicating with the storage liquid tank is connected to the discharge side of the suction pump, the storage liquid sucked by the suction pump is returned to the storage liquid tank when the storage liquid passes. Can be reused and the running cost can be reduced. Furthermore, if an air release valve that opens the inflow pipe to the atmosphere is provided near the storage liquid tank, when the functional liquid droplet ejection head is taken out of the storage device, the suction pump can be operated with the air release valve open. By driving, the storage liquid in all paths from the inflow pipe to the outflow pipe via the in-head flow path can be collected in the storage liquid tank, and the running cost can be further reduced.

By the way, in a storage device applied to a head unit in which a plurality of functional liquid droplet ejection heads are mounted on a carriage, the introduction port connection attachment and the nozzle connection attachment are used in a plurality of functional liquid droplet ejection heads of the head unit. It is configured to have a plurality of corresponding connection portions so that the connection work of the introduction port attachment and the nozzle connection attachment to the plurality of functional liquid droplet ejection heads can be collectively and simply performed. In this case, the inlet connection attachment is connected to a plurality of individual inflow pipes that individually communicate with the plurality of connection portions of the inlet connection attachment, and the nozzle connection attachment is connected to the plurality of the nozzle connection attachments. A plurality of individual outflow pipes that individually communicate with the connecting portion are connected. To clean the piping structure, the inflow pipes are connected to the plurality of individual inflow pipes via an inflow side manifold, and the plurality of individual outflow pipes are connected. It is desirable to connect the outflow pipe to the individual outflow pipe of the book through an outflow side manifold.

If an opening / closing valve is provided in each individual inflow pipe and / or each individual outflow pipe, the head unit can be stored in any one of the plurality of functional liquid droplet ejection heads. When a liquid filling error occurs, the on-off valve corresponding to the other functional liquid droplet ejection head can be closed, and the storage liquid can be refilled only in the functional liquid droplet ejection head with the filling error, which improves usability. . Furthermore, if each individual inflow pipe and / or each individual outflow pipe is made of a resin tube that allows the liquid flow to be visually recognized from the outside,
This is advantageous because it is possible to visually check the flow-through filling condition of the storage liquid for each functional liquid droplet ejection head. In addition, each individual inflow pipe, an upstream side portion connected to the inflow side manifold,
If a one-touch joint that separates the downstream portion connected to the inlet connection attachment and connects the upstream portion of each individual inflow pipe to the downstream portion of each individual inflow pipe is mounted on the carriage, the inflow side Piping work between the manifold and the inlet connection attachment becomes easy, and when the head unit is inserted into the drawing device, the functional liquid pipe member of the drawing device is connected to the inlet connection attachment via this one-touch joint. Therefore, it is not necessary to provide a one-touch joint in the drawing device, which is advantageous in achieving cost reduction.

Further, in the storage device, an attachment supporting member for supporting the nozzle connecting attachment and a carriage having the functional liquid droplet ejection head mounted thereon are supported so as to overlap the nozzle connecting attachment supported by the attachment supporting member. If a supporting member is provided and the carriage is supported by the carriage supporting member so that the ejection nozzles of the functional liquid droplet ejection head are connected to the nozzle connection attachment, the work of connecting the nozzle connection attachment to the functional liquid droplet ejection head is performed. It is not necessary to separately perform, and work efficiency is improved.

According to the above-described storage method and storage device of the present invention, the functional liquid droplet ejection head can be favorably stored, and the functional liquid can be reliably and accurately ejected from the ejection nozzle. for that reason,
By using the functional liquid droplet ejection head stored by the storage method and the storage device of the present invention, a liquid crystal display device and an organic EL device can be obtained.
Various products such as a device, an electron emission device, a PDP device, and an electrophoretic display device can be manufactured with high precision, and further, a spacer forming method, a metal wiring forming method, a lens forming method, a resist forming method, and a light diffuser forming method are also applicable. A functional liquid droplet ejection head stored by the storage device of the invention can be used.

The method of manufacturing a liquid crystal display device of the present invention uses a plurality of functional liquid droplet ejection heads stored by the above-described storage method and storage device of the present invention to form a large number of filter elements on a substrate of a color filter. A method of manufacturing a liquid crystal display device, wherein filter materials of respective colors are introduced into a plurality of functional liquid droplet ejection heads, and the plurality of functional liquid droplet ejection heads are scanned relative to a substrate to selectively eject the filter material. To form a large number of filter elements.

The method for manufacturing an organic EL device of the present invention uses a plurality of functional liquid droplet ejection heads stored by the above-described storage method and storage device of the present invention, and an EL light-emitting layer is provided on each of a large number of pixel pixels on a substrate. A method of manufacturing an organic EL device, wherein a luminescent material of each color is introduced into a plurality of functional liquid droplet ejection heads, and the plurality of functional liquid droplet ejection heads are scanned relative to a substrate to selectively select the luminescent material. To a large number of E
An L light emitting layer is formed.

The method of manufacturing an electron-emitting device of the present invention uses a plurality of functional liquid droplet ejection heads stored by the above-described storage method and storage device of the present invention to form a large number of phosphors on electrodes. In the method of manufacturing, a fluorescent material of each color is introduced into a plurality of functional liquid droplet ejection heads, the plurality of functional liquid droplet ejection heads are relatively scanned with respect to an electrode, and the fluorescent material is selectively ejected to a large number. And forming a phosphor.

In the method for manufacturing a PDP device of the present invention, a plurality of functional liquid droplet ejection heads stored by the above-described storage method and storage device of the present invention are used to form phosphors in a large number of recesses on a rear substrate. A method of manufacturing a PDP device, comprising introducing fluorescent materials of respective colors into a plurality of functional liquid droplet ejection heads, scanning the plurality of functional liquid droplet ejection heads relative to a rear substrate, and selectively ejecting the fluorescent material. And forming a large number of phosphors.

The method of manufacturing the electrophoretic display device of the present invention comprises:
A method for manufacturing an electrophoretic display device in which a plurality of functional liquid droplet ejection heads stored by the storage method and storage device of the present invention described above are used to form electrophoretic bodies in a large number of recesses on an electrode, wherein a plurality of functional liquids are used. Introducing electrophoretic material of each color into the droplet ejection head, scanning a plurality of droplet ejection heads relative to the electrodes, and selectively ejecting the electrophoretic material to form a large number of electrophoretic materials. To do.

The method for manufacturing a color filter of the present invention uses a plurality of functional liquid droplet ejection heads stored by the above-described storage method and storage device of the present invention, and a color filter formed by arranging a large number of filter elements on a substrate. A method of manufacturing a color filter, wherein a filter material of each color is introduced into a plurality of functional liquid droplet ejection heads, and a plurality of functional liquid droplet ejection heads are scanned relative to a substrate to selectively filter the filter material. And a large number of filter elements are formed.

In this case, an overcoat film that covers a large number of filter elements is formed, and after forming the filter elements, a translucent coating material is introduced into a plurality of droplet discharge heads to form a plurality of functional liquids. The overcoat film can be formed by scanning the droplet discharge head relative to the substrate and selectively discharging the coating material.
preferable.

The method for manufacturing an organic EL device of the present invention uses a plurality of functional liquid droplet ejection heads stored by the above-described storage method and storage device of the present invention, and uses a plurality of pixel pixels including an EL light emitting layer as a substrate. A method of manufacturing an organic EL having the above arrangement, wherein a luminescent material of each color is introduced into a plurality of functional liquid droplet ejection heads, and the plurality of functional liquid droplet ejection heads are relatively scanned with respect to a substrate. A large number of ELs
A light emitting layer is formed.

In this case, a large number of pixel electrodes corresponding to the EL light emitting layer are formed between the large number of EL light emitting layers and the substrate, and a plurality of functional droplets are formed before the EL light emitting layer is formed. It is preferable to introduce a liquid electrode material into the discharge head, scan a plurality of functional liquid droplet discharge heads relative to the substrate, and selectively discharge the liquid electrode material to form a large number of pixel electrodes.

Further, in this case, the counter electrode is formed so as to cover a large number of EL light emitting layers, and after the EL light emitting layers are formed, a liquid electrode material is introduced into a plurality of functional liquid droplet ejection heads to obtain a plurality of functions. It is preferable to scan the droplet discharge head relative to the substrate and selectively discharge the liquid electrode material to form the counter electrode.

The spacer forming method of the present invention uses a plurality of functional liquid droplet ejection heads stored by the above-described storage method and storage device of the present invention to form a large number of small cell gaps between two substrates. A method of forming a spacer in the form of particles, which comprises introducing a particle material forming a spacer into a plurality of functional liquid droplet ejection heads and scanning the plurality of functional liquid droplet ejection heads relative to at least one substrate. Then, the particulate material is selectively discharged to form the spacer on the substrate.

The metal wiring forming method of the present invention is a method for forming metal wiring on a substrate using a plurality of functional liquid droplet ejection heads stored by the above-described storage method and storage device of the present invention. Introducing a liquid metal material into a plurality of functional liquid droplet ejection heads, scanning the plurality of functional liquid droplet ejection heads relative to a substrate, and selectively ejecting the liquid metal material to form metal wiring. Characterize.

The lens forming method of the present invention is a lens forming method of forming a large number of microlenses on a substrate by using a plurality of functional liquid droplet ejection heads stored by the above-described storage method and storage device of the present invention. Introducing a lens material into a plurality of functional liquid droplet ejection heads, scanning the plurality of functional liquid droplet ejection heads relative to a substrate, and selectively ejecting the lens material to form a large number of microlenses. Characterize.

The resist forming method of the present invention is a resist forming method of forming a resist having an arbitrary shape on a substrate by using a plurality of functional liquid droplet ejection heads stored by the above-described storage method and storage device of the present invention. Characterized in that a resist material is introduced into a plurality of functional liquid droplet ejection heads, the plurality of functional liquid droplet ejection heads are relatively scanned with respect to the substrate, and the resist material is selectively ejected to form a resist. .

The light diffuser forming method of the present invention uses a plurality of functional liquid droplet ejection heads stored by the above-described storage method and storage device of the present invention to form a large number of light diffusers on a substrate. A method of forming a light diffusing material is introduced into a plurality of functional liquid droplet ejection heads, the plurality of functional liquid droplet ejection heads are scanned relative to a substrate, and the light diffusing material is selectively ejected to produce a large number of It is characterized by forming a light diffuser.

[0031]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment in which the present invention is applied to the storage of a plurality of functional liquid droplet ejection heads 3 mounted on a carriage 2 of a head unit 1 shown in FIGS. 1 to 3 will be described below.

8 to 11 show the entire structure of the storage device B of the functional liquid droplet ejection head 3. The storage device B includes a gantry 200, and a storage liquid tank 201 for storing a storage liquid is provided in the gantry 200.
Then, the functional liquid droplet ejection head 3 shown in FIGS.
The storage liquid from the storage liquid tank 201 is filled in the flow path in the head from the functional liquid inlet 3a to the discharge nozzle 3f.
Therefore, in the storage device B, the head internal flow is passed through the introduction port connection attachment 5 and the nozzle connection attachment 7 (described later) connected to the discharge nozzle 3f which are connected to the functional liquid introduction port 3a and described above. The passage is provided with a liquid passing means for passing the storage liquid. Then, as shown in FIG. 12, two storage devices B, B having the same structure are vertically stacked to form a unit, and the unit is housed in a case Ba and arranged near the drawing device A shown in FIG. is doing.

As shown in FIG. 13, the nozzle connection attachment 7 comprises a support plate 70 and a cap 71 which serves as a connecting portion for the functional liquid droplet ejection head 3, and the functional liquid droplet ejection head 3 is a head unit. The caps 71 are attached to the support plate 7 in accordance with the arrangement of 6 in 1 to 2 rows.
0 to 6 are arranged in 2 rows. As shown in FIG. 14, each cap 71 has a mounting base 72 for the support plate 70.
And a packing 75 mounted on the periphery of the opening of the recess 74a on the upper surface of the cap body 74, and a cap 75 that is supported by the mounting base 72 by urging the spring 73 upward. The packing 75 is in close contact with the peripheral portion of the nozzle forming plate 3e of the head 3. An elbow pipe 76 communicating with the recess 74 a is connected to the cap body 74, and a large number of discharge nozzles 3 f formed on the nozzle forming plate 3 e are connected to the elbow pipe 76 via the cap body 74.
Connected to. In this embodiment, the cap 71 is
Since the suction cap 106 provided in the drawing apparatus A is configured as a diversion item, a porous liquid absorbing plate 77 is attached to the depression 74a, and an atmosphere release valve 78 communicating with the depression 74a is provided. These are not essential.

A top plate 20 mounted on the upper surface of the mount 200.
2 has a relatively short columnar attachment support member 20.
3 are spaced apart in the front-rear direction (Y-axis direction) and are erected in pairs in the left-right direction (X-axis direction). . Then, the support plate 70 of the nozzle connection attachment 7
The nozzle connection attachment 7 is positioned and supported by the attachment supporting member 203 by fitting the pair of left and right positioning holes 70a formed on the front and back of the attachment supporting member 203, and the carriage of the head unit 1 is also supported. Front and rear 3 on each of the left and right support members 2a
The individually formed positioning hole 2d is provided in the carriage supporting member 204.
The carriage 2, that is, the head unit 1 can be positioned and supported by the carriage support member 204 by fitting the carriage 2 to the upper end of the carriage. In this state, the head unit 1 overlaps the nozzle connection attachment 7, the cap main body 74 is pushed down against the biasing force of the spring 73, and the cap is formed around the nozzle forming plate 3e of the functional liquid droplet ejection head 3. The main body 74 comes into close contact with the packing 75. In order to secure the connection between the functional liquid droplet ejection head 3 and the cap 71, a screw 204 a for screwing the carriage 2 onto the upper end of the carriage supporting member 204.
I try to press from above. Further, the angle members 204 are attached to the carriage support members 204 on the left and right sides from the outside.
plate 2 on this angle member 204b
04c includes side guides 204d that come into contact with the outer edges of the left and right support members 2a of the carriage 2 of the head unit 1.
And the end guide 2 that abuts the rear edge of each support member 2a.
04e is fixed. And these guides 204
By using d and 204e, the head unit 1 can be easily aligned with the carriage supporting member 204.

The circuit configuration of the liquid passage means is as shown in FIG. 15, and the inflow pipe 205 communicating with the storage liquid tank 201 is provided.
The storage solution is supplied to the introduction port connection attachment 5 via the. The inflow pipe 205 is located near the storage liquid tank 201, and is opened to the atmosphere release valve 206.
Is installed. The atmosphere opening valve 206 is a multi-way switching valve that can be switched between a state in which the inflow pipe 205 is opened, a state in which the inflow pipe 205 is blocked, and a state in which the inflow pipe 205 is opened to the atmosphere.

The inlet connection attachment 5 is connected with a plurality of individual inflow pipes 207 that individually communicate with the plurality of pipe adapters 5c, and the plurality of individual inflow pipes 207 are connected to the inlet side manifold 208 via the inflow side manifold 208. The inflow pipe 205 is connected. Since the inlet connection attachments 5 are provided in a pair on the left and right,
The inflow side manifolds 208 are also provided in a pair of left and right, and the inflow pipe 205 is branched into two pipes 205a and 205b by the downstream relay manifold 209, and one pipe 205a is connected to one inflow side manifold 208 and the other pipe 205b. It is connected to the other inflow side manifold 208. In addition, each one functional liquid droplet ejection head 3 has two
Since the individual pipe adapters 5c, 5c are connected, each one individual inflow pipe 207 is connected to each of the two pipe adapters 5c, 5c via a Y-shaped joint (not shown).

The storage device B further includes a suction pump 210.
The suction pump 210 is connected to the nozzle connection attachment 7 via the outflow pipe 211. The suction pump 210 is single, and a recovery pipe 212 communicating with the storage liquid tank 201 is connected to the discharge side thereof. The recovery pipe 212 is provided with a regeneration filter 213.

A plurality of individual outflow pipes 214 that individually communicate with the plurality of caps 71 are connected to the nozzle connection attachment 7. Then, the plurality of individual outflow pipes 214 are connected to the outflow side manifold 215.
The outflow pipe 211 is connected via. Further, an open / close valve 216 is provided in each individual outflow pipe 214. Since the plurality of caps 71 of the nozzle connection attachment 7 are divided into left and right columns, the outflow-side manifolds 215 are also provided in a left-right pair, and the pipes 215a from the left and right outflow-side manifolds 215 and 215 are provided.
215a is joined and connected to the outflow pipe 211 via the relay manifold 217.

The suction pump 210 is composed of a diaphragm type pump driven by air pressure. And
Air supplied from the air source 218 to each storage device B via the three-port valve 219 for residual pressure release is supplied to the suction pump 210 as pilot air via the pressure reducing valve 220 and the open / close type pump drive valve 221. By supplying the suction pump 210, the suction pump 210 is driven. The pilot air from the suction pump 210 is exhausted by the exhaust cleaner 222.
Is discharged through.

8 to 11, the suction pump 210, the relay manifolds 209 and 217, and the regeneration filter 213 are arranged on the inner side of the storage liquid tank 201 in the gantry 200 and are located on the inflow side and the outflow side. The pair of manifolds 208, 215 are arranged on both left and right sides of the storage liquid tank 201 in the gantry 200, and the pressure reducing valve 220 and the exhaust cleaner 222 are arranged on the back surface of the gantry 200.
Further, a gate-shaped operation plate 223 is attached to the front surface of the gantry 200, and the atmosphere release valve 20 is provided at the center of the upper side of the operation plate 223.
6, 6 on-off valves 2 on each of the left and right sides of the operation plate 223
16. The pump drive valve 221 is arranged outside the arrangement portion of the opening / closing valve 216 on the right side of the operation plate 223, and these valves are manually opened / closed.

A pair of left and right piping openings 224 and 224 are formed on the top plate 202 of the gantry 200.
00 from the left and right outflow side manifolds 215 via the open / close valves 216 on the left and right sides of the operation plate 223 to the individual outflow pipes 214 through the left and right openings 224, and in the left and right rows of the nozzle connection attachment 7. Cap 71
In addition, the individual inflow pipes 207 extending from the left and right inflow side manifolds 208 in the gantry 200 are connected to the pipe adapters 5c of the left and right introduction port connection attachments 5 through the left and right openings 224.

On the top plate 202, the pedestal 2 for the inlet connection attachment 5 is arranged so as to straddle the opening 224.
25 are provided in a pair on the left and right, and the work for connecting the individual inflow pipe 207 to the pipe adapter 5c can be performed with the introduction port connection attachment 5 placed on the stand 225. The stand 225 is supported by the top plate 202 via a pair of left and right columns 225a at the front and rear ends, and a pair of front and rear supports for receiving the plate 5b of the inlet connection attachment 5 on the upper surface of the stand 225. A piece 225b is provided. Further, a plurality of band mounting holes 225c are formed on the outer edge of the stand 225, and each individual inflow pipe 207 can be loosely inserted and supported by each band (not shown) mounted in each band mounting hole 225c. I am trying.

Here, at least one of the individual inflow pipe 207 and the individual outflow pipe 214 is made of a resin tube that allows the liquid flow to be visually recognized from the outside, so that the storage liquid passing condition can be visually confirmed.

When the head unit 1 is stored by the storage device B, the individual inlet pipes 207 are first attached to the pipe adapters 5c of the inlet connection attachment 5 with the inlet connection attachment 5 mounted on the stand 225.
Connect. Next, the head unit 1 assembled by mounting the plurality of functional liquid droplet ejection heads 3 on the carriage 2 is set in the storage device B so that the carriage 2 is supported by the carriage support member 204, and the carriage 2 is screwed 204
It is fixed on the carriage supporting member 204 by a. According to this, the ejection nozzle 3f of each functional liquid droplet ejection head 3 is connected to each cap 71 of the nozzle connection attachment 7 supported by the attachment support member 203. After that, the introduction port connection attachment 5 is attached to the carriage 2, and each piping adapter 5c is connected to the functional liquid introduction port 3a of each functional droplet discharge head 3.

Next, the atmosphere release valve 206 is connected to the inflow pipe 20.
5 to the open position and all the on-off valves 216
Is opened, and in this state, the pump drive valve 221 is opened to drive the suction pump 210. According to this, the storage liquid in the storage liquid tank 201 is sucked by the suction pump 210 via the path from the inflow pipe 205 to each of the functional liquid droplet ejection heads 3 to the outflow pipe 211.
Storage liquid tank 201 from 0 through regeneration filter 213
Returned to. In this way, while the storage liquid is being circulated, the storage liquid is passed through the nozzle internal flow path from the functional liquid introduction port 3a of each functional liquid droplet ejection head 3 to the ejection nozzle 3f.

After passing the liquid for a predetermined time, the pump drive valve 221 is closed and the suction pump 210 is stopped. According to this, the passage of the storage liquid is stopped, and the storage liquid is filled in the nozzle flow path of each functional liquid droplet ejection head 3. Here, if the storage liquid is well filled in the flow path in the nozzle, the individual inflow pipe 207 and the individual outflow pipe 2
14 is also filled with storage liquid. Therefore, after stopping the flow of liquid,
By checking the individual inflow pipe 207 or the individual outflow pipe 214 composed of the resin tube, the filling condition of the storage liquid of each functional liquid droplet ejection head 3 is confirmed, and there is a functional liquid droplet ejection head 3 in which a filling error has occurred. In this case, the opening / closing valve 216 corresponding to the other functional liquid droplet ejection head 3 is closed and the suction pump 210 is driven again. According to this, the storage liquid can be passed only to the functional liquid droplet ejection head 3 in which the filling error has occurred, and the functional liquid droplet ejection head 3 can be retried and filled.

When all the functional liquid droplet ejection heads 3 are filled with the storage liquid, all the on-off valves 216 are closed and the atmosphere opening valve 206 is switched to the shut-off position of the inflow pipe 207, and the heads are kept in this state. Store Unit 1.
Even during storage, the individual inflow pipe 207 or the individual outflow pipe 214, which is made of the resin tube, is regularly checked to check the filling condition of the storage liquid in each functional liquid droplet ejection head 3 and to leak the storage liquid. When there is a functional liquid droplet ejection head 3 that has a filling failure such as the above, the opening / closing valve 216 corresponding to this functional liquid droplet ejection head 3 is opened, and the atmosphere opening valve 206 is switched to the open position of the inflow pipe 207. Suction pump 2
10 is driven to refill the storage liquid in the functional liquid droplet ejection head 3 having the defective filling.

When the head unit 1 is taken out from the storage device B for use in the drawing device A, all the opening / closing valves 21
6 is opened and the air release valve 206 is connected to the inflow pipe 2
Then, the suction pump 210 is driven in this state. According to this, the storage liquid in all paths from the inflow pipe 207 to the outflow pipe 211 via each functional liquid droplet ejection head 3 is collected in the storage liquid tank 201 by the inflow of air from the inflow pipe 207, and the storage liquid is stored. Can be efficiently recycled.

By the way, in the above embodiment, the atmosphere opening valve 206, the on-off valve 216 and the pump drive valve 221 are of the manually operated type. It is also possible to provide a sensor for detecting the passage of the liquid to liquid 3 and automate the filling of the storage liquid to the functional liquid droplet ejection heads 3. Further, in the above embodiment, the on-off valve 216 is provided on the individual outflow pipe 214, but the on-off valve 216 may be provided on the individual inflow pipe 207.

Further, in the above embodiment, the individual inflow pipe 207 extending from the inflow side manifold 208 is directly connected to the pipe adapter 5c of the inlet connection attachment 5, but the individual inflow pipe 207 is connected to the inflow side manifold 208.
Is separated into an upstream side portion connected to the pipe adapter 5c and a downstream side portion connected to the pipe adapter 5c, and the one-touch joint 8 is mounted on the carriage 2 of the head unit 1 as shown in FIGS. 16 (a), (b) and (c). Then, the upstream side portion and the downstream side portion of the individual inflow pipe 207 may be connected via the one-touch joint 8. This one-touch joint 8 is one end of the carriage 2 in the Y-axis direction (the handle 2
It is attached to the end portion on the b side) via a bracket 80. As clearly shown in FIGS. 17A and 17B, the one-touch joint 8 includes a plate 81 which is screwed to a bracket 80 and which is long in the X-axis direction. A total of twelve sockets 82 are fitted and fixed, and the downstream portion of each individual inflow pipe 207 connected to each pipe adapter 5c of the inlet connection attachment 5 is connected to each socket 82 via the pipe joint 83. Is configured. Since two pipe adapters 5c are provided for each one functional liquid droplet ejection head 3, each individual inflow pipe 207 is connected to a Y-shaped joint (not shown).
To the two pipe adapters 5c via. A plug 84 is detachably fitted to each socket 82, and an upstream side portion of each individual inflow pipe 216 connected to the inflow side manifold 208 is connected to each plug 84 via an elbow pipe 85. deep. Thus, by simply attaching / detaching each plug 84 to / from each socket 82, the upstream side portion can be connected to and separated from the downstream side portion of each individual inflow pipe 207. Then, a plug similar to the above is attached to the functional liquid piping member of the drawing apparatus A, so that the functional liquid piping member is connected to the piping adapter 5 via the one-touch joint 8.
can be connected to c. Therefore, it is not necessary to separately provide the drawing device A with a one-touch joint, and the cost can be reduced. The plug 84 has a holding bar 8 which is detachably attached to the plate 81 with screws 86 at both ends.
It is locked by 7 In addition, in the structure shown in FIGS. 1 to 3, a plurality of pipe adapters 5c are attached to the plate 5b.
And fix the plate 5b to the spacer 5 on the carriage 2.
Although the pipe adapters 5c are connected to the respective functional liquid droplet ejection heads 3 by fixing the screws 5f to a, FIG.
In the structure shown in FIG. 3, the plate 5b is omitted, and the pipe adapters 5c are individually connected to the functional liquid droplet ejection heads 3.

By the way, according to the storage device B, the functional liquid droplet ejection head 3 can be stored while being filled with the storage liquid, and the ejection nozzle does not cause ejection failure due to oxidation in the head or intrusion of foreign matter. It is possible to reliably and accurately discharge the functional liquid from 3f. Therefore, by using the functional liquid droplet ejection head 3 stored as described above, a liquid crystal display device,
Various products such as an organic EL device, an electron emission device, a PDP device, and an electrophoretic display device can be accurately manufactured. Hereinafter, a manufacturing method using the functional liquid droplet ejection head 3 (head unit 1) stored as described above will be described by taking a manufacturing method of a liquid crystal display device and a manufacturing method of an organic EL device as examples.

FIG. 18 is a partially enlarged view of the color filter of the liquid crystal display device. 18A is a plan view, and FIG. 18B is a sectional view taken along line BB ′ of FIG.
The hatching of each part of the cross-sectional view is partially omitted.

As shown in FIG. 18A, the color filter 400 comprises pixels (filter elements) 412 arranged in a matrix, and the boundaries between pixels are separated by partitions 413. One of the pixels 412
For example, any one of red (R), green (G), and blue (B) ink (filter material) is introduced. In this example, the arrangement of red, green and blue is so-called mosaic arrangement, but other arrangement such as stripe arrangement and delta arrangement may be used.

As shown in FIG. 18B, the color filter 400 includes a light-transmitting substrate 411 and a light-shielding partition 413. The portion where the partition 413 is not formed (removed) constitutes the pixel 412. The ink of each color introduced into the pixel 412 constitutes the coloring layer 421. An overcoat layer 422 and an electrode layer 423 are formed on the upper surfaces of the partition 413 and the coloring layer 421.

FIG. 19 is a sectional view of a manufacturing process for explaining the manufacturing method of the color filter according to the embodiment of the present invention.
The hatching of each part of the cross-sectional view is partially omitted.

Thickness 0.7 mm, height 38 cm, width 30 c
The surface of the transparent substrate 411 made of non-alkali glass of m is stored in a storage solution prepared by adding 1% by weight of hydrogen peroxide to hot concentrated sulfuric acid, rinsed with pure water, and then air-dried to obtain a clean surface. . On this surface, a chromium film is formed with an average film thickness of 0.2 μm by a sputtering method to obtain a metal layer 414 ′ (FIG. 19: S1).

After drying this substrate on a hot plate at 80 ° C. for 5 minutes, a photoresist layer (not shown) is formed on the surface of the metal layer 414 'by spin coating. A mask film on which a desired matrix pattern shape is drawn is brought into close contact with the surface of the substrate and exposed with ultraviolet rays. Next, this is immersed in an alkali developing solution containing potassium hydroxide in a proportion of 8% by weight to remove the photoresist in the unexposed portion and pattern the resist layer. Subsequently, the exposed metal layer is removed by etching with an etching solution containing hydrochloric acid as a main component. In this way, the light shielding layer (black matrix) 414 having a predetermined matrix pattern can be obtained (FIG. 19: S2). The thickness of the light shielding layer 414 is approximately 0.2 μm. Also,
The width of the light shielding layer 414 is approximately 22 μm.

A negative type transparent acrylic photosensitive resin composition 415 'is further applied onto this substrate by the spin coating method (FIG. 19: S3). 20 at 100 ℃
After pre-baking for a minute, UV exposure is performed using a mask film on which a predetermined matrix pattern shape is drawn. The resin in the unexposed portion is also developed with an alkaline developer, rinsed with pure water, and then spin-dried. After-baking as final drying is performed at 200 ° C. for 30 minutes to sufficiently cure the resin portion, whereby the bank layer 415 is formed and the partition 413 including the light shielding layer 414 and the bank layer 415 is formed (FIG. 19: S4). ). The bank layer 415 has an average film thickness of 2.7 μm. The width of the bank layer 415 is about 14 μm.

The obtained light-shielding layer 414 and bank layer 41
The colored layer formation region divided by 5 (especially the glass substrate 411
In order to improve the ink wettability of the exposed surface), dry etching, that is, plasma treatment is performed. In particular,
A high voltage is applied to a mixed gas of helium and 20% oxygen to form an etching spot in a plasma atmosphere, and the substrate is etched by passing under the etching spot.

Next, using the stored head unit 1 loaded in the drawing apparatus A, the R (red), G (green), and B described above are placed in the pixels 412 formed by being partitioned by the partition 413.
Each ink of (blue) is introduced by an inkjet method (FIG. 19: S5). At this time, 10 small ink droplets are selectively ejected from the functional liquid droplet ejection head 3 for each colored layer formation region. The driving frequency is set to 14.4 k3z, that is, the ejection interval of each ink droplet is set to 69.5 μsec. The distance between the head and the target is set to 0.3 mm. In order to prevent the flying velocity from the head to the target colored layer formation area, flight bending, and the generation of split stray droplets called satellites, the waveform that drives the piezoelectric element of the head as well as the physical properties of the ink is included. )is important. Therefore, a preconfigured waveform is programmed to apply the ink droplets in the three colors of red, green, and blue at the same time to apply the ink in a predetermined color arrangement pattern.

As the ink (filter material), for example, an inorganic pigment is dispersed in a polyurethane resin oligomer, cyclohexanone and butyl acetate are added as a low boiling point solvent, butyl carbitol acetate is added as a high boiling point solvent, and a nonionic interface is added. 0.01% by weight of an activator is added as a dispersant to give a viscosity of 6 to 8 centipoise.

Next, the applied ink is dried. First, the ink layer 416 is set by leaving it in a natural atmosphere for 3 hours, and then the ink layer 416 is set on a hot plate at 80 ° C.
The ink layer 416 is heated for 0 minutes, and finally in an oven at 200 ° C. for 30 minutes to cure the ink layer 416.
21 is obtained (FIG. 19: S6).

A transparent acrylic resin paint is spin-coated on the substrate to form an overcoat layer 422 having a smooth surface. In addition, ITO (Indium Tin Oxi
de) to form an electrode layer 423 of a required pattern,
The color filter 400 is used (FIG. 19: S7). In addition,
The overcoat layer 422 may be formed by an inkjet method using a functional liquid droplet ejection head (inkjet head).

FIG. 20 is a sectional view of a color liquid crystal display device which is an example of an electro-optical device (flat display) using the color filter 400 manufactured as described above. The hatching of each part of the cross-sectional view is partially omitted.

The color liquid crystal display device 450 is manufactured by combining the color filter 400 and the counter substrate 466 and enclosing the liquid crystal composition 465 between them. TFT (thin film transistor) elements (not shown) and pixel electrodes 463 are formed in a matrix on the inner surface of one substrate 466 of the liquid crystal display device 450. In addition, as the other substrate, the color filter 400 is installed such that the red, green, and blue colored layers 421 are arranged at positions facing the pixel electrodes 463.

Alignment films 461 and 464 are formed on the respective surfaces of the substrate 466 and the color filter 400 which face each other. The alignment films 461 and 464 are subjected to rubbing treatment, and liquid crystal molecules can be aligned in a fixed direction. In addition, the substrate 466 and the color filter 400
Polarizing plates 462 and 467 are adhered to the outer surface of each. As a backlight, a combination of a fluorescent lamp (not shown) and a scattering plate is generally used.
Display is performed by causing the liquid crystal composition 465 to function as an optical shutter that changes the transmittance of backlight light.

In the present invention, the electro-optical device is not limited to the color liquid crystal display device described above, and for example, a small television using a thin cathode ray tube or a liquid crystal shutter,
Various electro-optical means such as an EL display device, a plasma display, a CRT display, and an FED (Field Emission Display) panel can be used.

21 to 33, the organic EL (display device) of the organic EL device and the manufacturing method (manufacturing process) thereof will be described. This manufacturing process includes a bank portion forming step, a plasma processing step, a light emitting element forming step including a hole injecting / transporting layer forming step and a light emitting layer forming step, a counter electrode forming step, and a sealing step. Is configured.

In the bank portion forming step, the inorganic bank layer 512a is formed on the circuit element portion 502 previously formed on the substrate 501 and on the electrode 511 (also referred to as a pixel electrode) at predetermined positions.
By stacking the organic material bank layer 512b with the organic material bank layer 512b, a bank portion 512 having an opening 512g is formed. As described above, the bank portion forming step includes a step of forming the inorganic bank layer 512a on a part of the electrode 511 and a step of forming the organic bank layer 512b on the inorganic bank layer.

First, in the step of forming the inorganic bank layer 512a, as shown in FIG.
An inorganic bank layer 512a is formed on the interlayer insulating film 544b and the pixel electrode 511. Inorganic bank layer 512a
An inorganic film such as SiO ₂ or TiO ₂ is formed on the entire surfaces of the interlayer insulating layer 514 and the pixel electrode 511 by, for example, the CVD method, the coating method, the sputtering method, the vapor deposition method, or the like.

Next, this inorganic film is patterned by etching or the like to form a lower opening portion 512c corresponding to the formation position of the electrode surface 511a of the electrode 511. At this time,
It is necessary to form the inorganic bank layer 512a so as to overlap the peripheral portion of the electrode 511. Thus, the electrode 51
The light emitting region of the light emitting layer 510 can be controlled by forming the inorganic bank layer 512a so that the peripheral portion (a part) of No. 1 and the inorganic bank layer 512a overlap.

Next, in the step of forming the organic bank layer 512b, as shown in FIG. 22, the inorganic bank layer 512a is formed.
An organic bank layer 512b is formed on top. The organic bank layer 512b is etched by a photolithography technique or the like to form an upper opening 512d of the organic bank layer 512b.
To form. The upper opening 512d is provided at a position corresponding to the electrode surface 511a and the lower opening 512c.

As shown in FIG. 22, the upper opening 512d is preferably formed wider than the lower opening 512c and narrower than the electrode surface 511a. Accordingly, the first stacked unit 5 surrounding the lower opening 512c of the inorganic bank layer 512a.
12e is extended to the center side of the electrode 511 with respect to the organic bank layer 512b. By connecting the upper opening 512d and the lower opening 512c in this manner, the inorganic bank layer 512a and the organic bank layer 51 are formed.
An opening 512g penetrating 2b is formed.

Next, in the plasma processing step, the bank portion 51
A region showing ink affinity and a region showing ink repellency are formed on the second surface and the surface 511a of the pixel electrode. This plasma treatment step includes a preliminary heating step, an ink-philic step of processing the upper surface (512f) of the bank portion 512 and the wall surface of the opening 512g, and the electrode surface 511a of the pixel electrode 511 to have an ink-philic property, and an organic substance. The upper surface 512f of the bank layer 512b and the wall surface of the upper opening 512d are roughly classified into an ink repellent step of processing to have ink repellency and a cooling step.

First, in the preheating step, the bank portion 512
Substrate 501 containing is heated to a predetermined temperature. Heating
For example, a heater is attached to a stage on which the substrate 501 is placed, and the heater is used to heat the substrate 501 together with the stage. Specifically, it is preferable to set the preheating temperature of the substrate 501 in the range of 70 to 80 ° C., for example.

Next, in the ink-philic step, plasma treatment (O ₂ plasma treatment) using oxygen as a treatment gas is performed in the atmosphere. With this O ₂ plasma treatment, as shown in FIG. 23, the electrode surface 511a of the pixel electrode 511, the first stacked portion 512e of the inorganic bank layer 512a, and the wall surface of the upper opening 512d of the organic bank layer 512b and the upper surface 512f are ink-philic. It is processed. By this lyophilic treatment, hydroxyl groups are introduced into each of these surfaces to impart lyophilicity. In FIG. 23, the portion that has been subjected to the ink-affinity treatment is indicated by a dashed line.

Next, in the ink repellent process, a plasma treatment (C-treatment using methane tetrafluoride as a treatment gas in the atmosphere is carried out).
F ₄ plasma treatment). CF ₄ plasma treatment
As shown in FIG. 24, the wall surface of the upper opening 512d and the upper surface 512f of the organic bank layer are subjected to ink repellent treatment. By this ink repellent treatment, a fluorine group is introduced into each of these surfaces to impart ink repellency. In FIG. 24, the area showing the ink repellency is indicated by a chain double-dashed line.

Next, in the cooling step, the substrate 501 heated for the plasma treatment is cooled to room temperature or the control temperature of the ink jet step (droplet discharging step). By cooling the substrate 501 after the plasma treatment to room temperature or a predetermined temperature (for example, a control temperature at which the inkjet process is performed), the next hole injection / transport layer forming process can be performed at a constant temperature.

Next, in the light emitting element forming step, the pixel electrode 51 is formed.
A light emitting element is formed by forming a hole injecting / transporting layer and a light emitting layer on 1. The light emitting element forming step includes four steps. That is, a first droplet discharging step of discharging a first composition for forming a hole injecting / transporting layer onto each of the pixel electrodes, and drying the discharged first composition onto the pixel electrodes. Hole injection / hole injection to form a transport layer /
A transport layer forming step, a second droplet discharging step of discharging a second composition for forming a light emitting layer onto the hole injecting / transporting layer, and drying the discharged second composition. And a light emitting layer forming step of forming a light emitting layer on the hole injecting / transporting layer.

First, in the first droplet discharge step, the first composition containing the hole injection / transport layer forming material is discharged onto the electrode surface 511a by the ink jet method (droplet discharge method). It should be noted that, after the first droplet discharge step, it is preferable to carry out in an inert gas atmosphere such as water, a nitrogen atmosphere without oxygen, or an argon atmosphere. (Note that when the hole injection / transport layer is formed only on the pixel electrode, the hole injection / transport layer formed adjacent to the organic bank layer is not formed.)

As shown in FIG. 25, the ink jet head (functional liquid droplet ejection head) 3 was filled with the first composition containing the hole injection / transport layer forming material, and the ink jet head 3 was obtained.
Of the discharge head of the inkjet head 3 and the substrate 5 to face the electrode surface 511a located in the lower opening 512c.
01 is relatively moved, the first composition droplet 510c whose liquid amount per droplet is controlled is discharged from the discharge nozzle to the electrode surface 5
It discharges on 11a.

As the first composition used here, for example, a composition prepared by dissolving a mixture of a polythiophene derivative such as polyethylenedioxythiophene (PEDOT) and polystyrene sulfonic acid (PSS) in a polar solvent is used. it can. Examples of polar solvents include isopropyl alcohol (IPA), normal butanol, sodium butyrolactone, N-methylpyrrolidone (NMP), and 1,3-dimethyl-
Examples thereof include 2-imidazolidinone (DMI) and its derivatives, glycol ethers such as carbitol acetate and butyl carbitol acetate. The material for forming the hole injecting / transporting layer is the light emitting layer 51 of each of R, G, and B.
The same material may be used for 0b and may be changed for each light emitting layer.

As shown in FIG. 25, the discharged first composition droplet 510c spreads on the ink-philic treated electrode surface 511a and the first laminated portion 512e, and the lower and upper openings 5 are formed.
12c and 512d are filled. The amount of the first composition discharged onto the electrode surface 511a is as follows.
It is determined by the size of 512d, the thickness of the hole injection / transport layer to be formed, the concentration of the hole injection / transport layer forming material in the first composition, and the like. Further, the first composition droplets 510c may be discharged not only once but also several times onto the same electrode surface 511a.

Next, in the hole injecting / transporting layer forming step, as shown in FIG.
As shown in FIG. 6, the hole injecting / transporting layer 510 is formed on the electrode surface 511a by drying and heat treating the discharged first composition to evaporate the polar solvent contained in the first composition.
a is formed. The first composition drops 510 when dried.
The evaporation of the polar solvent contained in c is mainly caused by the inorganic bank layer 5
It occurs near 12a and the organic bank layer 512b, and the hole injection / transport layer forming material is concentrated and deposited along with the evaporation of the polar solvent.

As a result, as shown in FIG. 26, the polar solvent evaporates even on the electrode surface 511a due to the drying treatment.
As a result, the flat portion 510a made of the hole injection / transport layer forming material is formed on the electrode surface 511a. Electrode surface 511
Since the evaporation rate of the polar solvent is substantially uniform on a, the material for forming the hole injecting / transporting layer is uniformly concentrated on the electrode surface 511a, thereby forming the flat portion 510a having a uniform thickness.

Next, in the second droplet discharging step, the second layer containing the light emitting layer forming material is formed by the ink jet method (droplet discharging method).
The composition is discharged onto the hole injection / transport layer 510a. In the second droplet discharging step, in order to prevent the redissolving of the hole injecting / transporting layer 510a, the hole injecting / transporting layer 510a is used as a solvent of the second composition used in forming the light emitting layer. An insoluble non-polar solvent is used.

On the other hand, however, the hole injection / transport layer 510
Since a has a low affinity for the nonpolar solvent, even if the second composition containing the nonpolar solvent is ejected onto the hole injecting / transporting layer 510a, the hole injecting / transporting layer 510a and the light emitting layer 510b.
May not be able to be adhered to each other, or the light emitting layer 510b may not be uniformly applied. Therefore,
Hole injection into non-polar solvent and light emitting layer forming material /
In order to increase the affinity of the surface of the transport layer 510a, it is preferable to perform a surface modification step before forming the light emitting layer.

Therefore, first, the surface modification step will be described. In the surface modification step, a surface modification solvent, which is the same solvent as the nonpolar solvent of the first composition used for forming the light emitting layer or a solvent similar thereto, is subjected to an inkjet method (droplet discharging method) or a spin coating method. Alternatively, it is applied by coating on the hole injecting / transporting layer 510a by a dipping method and then drying.

For example, the ink jet method is used for coating.
As shown in FIG. 27, the inkjet head 3 is filled with a surface-modifying solvent, the ejection nozzle of the inkjet head 3 is opposed to the substrate (that is, the substrate on which the hole injection / transport layer 510a is formed), and the inkjet is performed. This is performed by ejecting the surface modification solvent 510d from the ejection nozzle 3 onto the hole injecting / transporting layer 510a while moving the head 3 and the substrate 501 relatively. Then, as shown in FIG. 28, the surface modification solvent 510d is dried.

Next, in the second droplet discharge step, the second layer containing the light emitting layer forming material is formed by the ink jet method (droplet discharge method).
The composition is discharged onto the hole injection / transport layer 510a. Figure 2
9, the inkjet head 3 is filled with a second composition containing a blue (B) light emitting layer forming material,
The hole injection / transport layer 5 in which the discharge nozzles of the inkjet head 3 are located in the lower and upper openings 512c and 512d.
10a, facing the inkjet head 3 and the substrate 50.
1 is ejected from the ejection nozzle as a second composition drop 510e in which the amount of liquid per droplet is controlled, and this second composition drop 510e is ejected from the ejection nozzle.
Discharge above 0a.

As the material for forming the light emitting layer, a polyfluorene polymer derivative, a (poly) paraphenylene vinylene derivative, a polyphenylene derivative, polyvinyl carbazole, a polythiophene derivative, a perylene dye, a coumarin dye, a rhodamine dye, or the above It is possible to use by doping the molecule with an organic EL material. For example, rubrene, perylene, 9,10-diphenylanthracene,
It can be used by doping with tetraphenyl butadiene, Nile red, coumarin 6, quinacridone and the like.

As the non-polar solvent, the hole injection / transport layer 5 is used.
Those which are insoluble in 10a are preferable, and for example, cyclohexylbenzene, dihydrobenzofuran, trimethylbenzene, tetramethylbenzene and the like can be used. By using such a non-polar solvent for the second composition of the light emitting layer 510b, the second composition can be applied without redissolving the hole injection / transport layer 510a.

As shown in FIG. 29, the discharged second composition 510e spreads over the hole injecting / transporting layer 510a and fills the lower and upper openings 512c, 512d.
The second composition 510e may be discharged onto the same hole injecting / transporting layer 510a not only once but also several times. In this case, the amount of the second composition in each time may be the same,
The amount of the second composition may be changed each time.

Next, in the light emitting layer forming step, after the second composition is discharged, a drying process and a heat treatment are performed to form a light emitting layer 510b on the hole injecting / transporting layer 510a. The drying treatment is performed by subjecting the second composition after being discharged to the second treatment.
The non-polar solvent contained in the composition is evaporated to form a blue (B) light emitting layer 510b as shown in FIG.

Subsequently, as shown in FIG. 31, blue (B)
Similar to the case of the light emitting layer 510b, the red (R) light emitting layer 510b is formed, and finally the green (G) light emitting layer 510b is formed. The order of forming the light emitting layer 510b is not limited to the order described above, and may be formed in any order. For example, it is possible to determine the order of formation according to the light emitting layer forming material.

Next, in the counter electrode forming step, as shown in FIG. 32, a cathode 503 (counter electrode) is formed on the entire surface of the light emitting layer 510b and the organic bank layer 512b. Note that the cathode 503 may be formed by stacking a plurality of materials. For example, it is preferable to form a material having a small work function on the side close to the light emitting layer, and for example, Ca, Ba or the like can be used, and depending on the material, it is better to form LiF or the like thinly in the lower layer. There is also. Also, the upper side (sealing side)
Is preferable to have a higher work function than the lower side. The cathode (cathode layer) 503 is preferably formed by, for example, a vapor deposition method, a sputtering method, a CVD method, or the like, and particularly preferably formed by a vapor deposition method in terms of preventing damage to the light emitting layer 510b due to heat.

Further, lithium fluoride is used as the light emitting layer 510b.
The blue (B) light emitting layer 510 may be formed only on the top.
It may be formed only on b. In this case, the other red (R)
The light emitting layers and the green (G) light emitting layers 510b and 510b include
The upper cathode layer 503b made of LiF is in contact with it. In addition, a vapor deposition method, a sputtering method, a C
It is preferable to use an Al film, an Ag film, or the like formed by the VD method or the like. Further, a protective layer such as SiO ₂ or SiN may be provided on the cathode 503 to prevent oxidation.

Finally, in the sealing step shown in FIG. 33, a sealing substrate 505 is laminated on the organic EL element 504 in an atmosphere of an inert gas such as nitrogen, argon or helium. The sealing step is preferably performed in an inert gas atmosphere such as nitrogen, argon or helium. When performed in air, the cathode 50
When a defect such as a pinhole is generated in No. 3, water, oxygen or the like may enter the cathode 503 from this defective portion and the cathode 503 may be oxidized, which is not preferable. Finally, by connecting the cathode 503 to the wiring of the flexible substrate and connecting the wiring of the circuit element section 502 to the drive IC, the organic EL device 500 of this embodiment is obtained. The ink repellent film, the cathode 503, and the pixel electrode 5 described above are used.
Also in 11 and the like, each may be formed by an inkjet method using a liquid material.

In forming the pixel electrode 511 and the cathode (counter electrode) 503, an ink jet system using an ink jet head H may be adopted. That is,
Liquid electrode materials are introduced into the inkjet heads H, and the inkjet heads H are ejected to form the pixel electrodes 511 and the cathodes 503 (including a drying step).

Similarly, the head unit of this embodiment is
It can be applied to a method of manufacturing an electron-emitting device, a method of manufacturing a PDP device, a method of manufacturing an electrophoretic display device, and the like.

In the method of manufacturing the electron-emitting device, the fluorescent material of each color of R, G, and B is introduced into the plurality of functional liquid droplet ejection heads 3, and the plurality of functional liquid droplet ejection heads 3 are connected via the head unit 1. The main scanning and the sub-scanning are performed, and the fluorescent material is selectively ejected to form a large number of fluorescent substances on the electrodes. The electron emission device is a higher-level concept including an FED (field emission display).

In the method of manufacturing a PDP device, fluorescent materials of R, G, and B colors are introduced into the plurality of functional liquid droplet ejection heads 3, and the plurality of functional liquid droplet ejection heads 3 are mainly connected via the head unit 1. Scanning and sub-scanning are performed, and the fluorescent material is selectively ejected to form a fluorescent material in each of the large number of recesses on the rear substrate.

In the method of manufacturing the electrophoretic display device, the electrophoretic material of each color is introduced into the plurality of functional liquid droplet ejection heads 3, and the plurality of functional liquid droplet ejection heads 3 are subjected to main scanning and sub-scanning via the head unit 1. Then, the ink material is selectively ejected to form electrophoretic bodies in a large number of concave portions on the electrodes.
In addition, it is preferable that the electrophoretic body composed of the charged particles and the dye is enclosed in a microcapsule.

The head unit 1 that has been stored has a spacer forming method, a metal wiring forming method, a lens forming method,
It is also applicable to a resist forming method, a light diffuser forming method, and the like.

The spacer forming method is to form a large number of particle-like spacers so as to form a minute cell gap between two substrates. Introduce the head unit 1
The plurality of functional liquid droplet ejection heads 3 are main-scanned and sub-scanned via the nozzles to selectively eject the particulate material to form spacers on at least one substrate. For example, it is useful when forming a cell gap between two substrates in the above-mentioned liquid crystal display device or electrophoretic display device, and it can be applied to a semiconductor manufacturing technique that requires such a small gap. Nor.

In the metal wiring forming method, the liquid metal material is introduced into the plurality of functional liquid droplet ejection heads 3 to form the head unit 1.
A plurality of functional liquid droplet ejection heads 3 are main-scanned and sub-scanned through the liquid droplets to selectively eject the liquid metal material to form metal wiring on the substrate. For example, it can be applied to a metal wiring connecting the driver and each electrode in the above liquid crystal display device, or a metal wiring connecting the TFT and the like to each electrode in the above organic EL device. Needless to say, the present invention can be applied to general semiconductor manufacturing technology in addition to this type of flat display.

In the lens forming method, the lens material is introduced into the plurality of functional liquid droplet ejection heads 3 and the plurality of functional liquid droplet ejection heads 3 are main-scanned and sub-scanned through the head unit 1 to selectively select the lens material. Then, a large number of microlenses are formed on the transparent substrate. For example, it can be applied as a beam converging device in the above FED apparatus. Needless to say, it can be applied to various optical devices.

In the resist forming method, a resist material is introduced into a plurality of functional liquid droplet ejection heads 3 and the head unit 1
A plurality of functional liquid droplet ejection heads 3 are main-scanned and sub-scanned via the, and the resist material is selectively ejected to form a photoresist of arbitrary shape on the substrate. For example, the formation of banks in the above-described various display devices is widely applicable to the application of photoresist in the photolithography method, which is the main component of semiconductor manufacturing technology.

In the light diffuser forming method, a light diffusing material is introduced into the plurality of functional liquid droplet ejection heads 3, and the plurality of functional liquid droplet ejection heads 3 are subjected to main scanning and sub-scanning through the head unit 1 to perform light diffusion. The material is selectively discharged to form a large number of light diffusers. Needless to say, this case is also applicable to various optical devices.

[0110]

As is apparent from the above description, according to the storage method and the storage device of the present invention, the functional liquid droplet ejection head can be stored in a state in which the storage liquid is filled in the flow path inside the head. It is possible to reliably prevent the oxidation of foreign matter and the intrusion of foreign matter into the head, and when the functional liquid droplet ejection head is subsequently used, it is possible to reliably and accurately eject the functional liquid from the ejection nozzle. Therefore, various products such as a liquid crystal display device, an organic EL device, an electron emission device, a PDP device, and an electrophoretic display device are accurately manufactured by using the functional liquid droplet ejection head stored by the storage method and the storage device of the present invention. You can
Further, the spacer, the metal wiring, the lens, the resist and the light diffuser can be formed with high precision.

[Brief description of drawings]

FIG. 1 is a plan view of an example of a head unit that is a storage object of the present invention.

FIG. 2 is a front view of the head unit shown in FIG.

3 is a side view of the head unit of FIG. 1. FIG.

FIG. 4 is a schematic diagram of a drawing device that manufactures products such as color filters using a head unit.

FIG. 5 is a cross-sectional view around a functional liquid droplet ejection head mounted on a head unit.

FIG. 6 is a perspective view schematically showing a functional liquid droplet ejection head.

FIG. 7 is an enlarged cross-sectional view of a functional liquid droplet ejection head.

FIG. 8 is an overall perspective view showing an example of a storage device according to the present invention.

FIG. 9 is a plan view of the storage device.

FIG. 10 is a front view of the storage device.

FIG. 11 is a side view of the storage device.

FIG. 12 is a perspective view showing a unit in which storage devices are stacked.

FIG. 13 is a perspective view showing a nozzle connection attachment.

FIG. 14 is a cross-sectional view of a cap attached to the nozzle connection attachment.

FIG. 15 is a circuit diagram showing a configuration of a liquid passing unit.

16A is a plan view showing another example of the head unit, FIG. 16B is a front view thereof, and FIG. 16C is a side view thereof.

17 (a) is a perspective view showing a one-touch joint mounted on the head unit of FIG. 16, and (b) is a sectional view thereof.

FIG. 18A is a partially enlarged view of a color filter manufactured by the method for manufacturing a color filter, and FIG. 18B is a sectional view thereof.

FIG. 19 is a manufacturing step sectional view schematically showing the manufacturing method of the (S1) to (S7) color filters.

FIG. 20 is a cross-sectional view of a liquid crystal display device manufactured by a color filter manufacturing method.

FIG. 21 is a cross-sectional view showing a step of forming an inorganic bank layer in the bank forming step of the organic EL manufacturing process.

FIG. 22 is a cross-sectional view showing a step of forming an organic bank layer in the bank forming step of the organic EL manufacturing process.

FIG. 23 is a cross-sectional view showing an ink-philic step in the plasma treatment step of the organic EL manufacturing process.

FIG. 24 is a cross-sectional view showing an ink repellent process in the plasma treatment process of the organic EL manufacturing process.

FIG. 25 is a cross-sectional view showing a first droplet discharging step in the light emitting element forming step of the organic EL manufacturing process.

FIG. 26 is a cross-sectional view showing a hole injecting / transporting layer forming step in the light emitting element forming step of the organic EL manufacturing process.

FIG. 27 is a cross-sectional view showing a discharged state of the surface-modifying solvent in the surface-modifying step in the light-emitting element forming step in the organic EL manufacturing process.

FIG. 28 is a cross-sectional view showing a dried state of the surface modifying solvent in the surface modifying step in the light emitting element forming step of the organic EL manufacturing process.

FIG. 29 is a cross-sectional view showing a second droplet discharging step in the light emitting element forming step of the organic EL manufacturing process.

FIG. 30 is a cross-sectional view showing a light emitting layer forming step in the light emitting element forming step of the organic EL manufacturing process.

FIG. 31 is a cross-sectional view showing a completed state of the light emitting layer forming step in the light emitting element forming step of the organic EL manufacturing process.

FIG. 32 is a cross-sectional view showing a counter electrode forming step of the organic EL manufacturing process.

FIG. 33 is a cross-sectional view showing a sealing step of the organic EL manufacturing process.

[Explanation of symbols]

A Drawing device B Cleaning device 1 Head unit 2 Carriage 3 Functional droplet discharge head 3a Functional liquid inlet 3f Discharge nozzle 5 Inlet connection attachment 5c Piping adapter (connection part) 7 Nozzle connection attachment 71 Cap (connection part) 8 One-touch joint 201 Storage liquid tank 203 Attachment support member 204 Carriage support member 205 Inflow pipe 206 Air release valve 207 Individual inflow pipe 208 Inflow side manifold 210 Suction pump 211 Outflow pipe 212 Recovery pipe 214 Individual outflow pipe 215 Outflow side manifold 216 Open / close valve

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) G02B 5/20 101 G02F 1/1339 500 3K007 G02F 1/1335 505 H05B 33/10 1/1339 500 33/14 A H05B 33/10 B41J 3/04 102Z 33/14 101Z F term (reference) 2C056 EA20 FA15 FB01 FB05 JC06 JC13 KB04 KB14 KB16 KB19 2H042 BA01 BA15 BA16 2H048 BA64 BB02 BB44 2H089 NA09 NA12 QA12 GA121612 FA04 GA122912 3K007 AB18 DB03 (54) [Title of Invention] Storage method and storage device for functional liquid droplet ejection head, manufacturing method for liquid crystal display device, manufacturing method for organic EL device, manufacturing method for electron emission device, and manufacturing method for PDP device A method for manufacturing an electrophoretic display device, a method for manufacturing a color filter, Organic EL manufacturing method, spacer forming method, metal wiring forming method, lens forming method, resist forming method, and light diffuser forming method

Claims (26)

[Claims] 1. A storage liquid is passed through a flow path in the head extending from a functional liquid introduction port side of a functional liquid droplet discharge head to a discharge nozzle, and the flow of the storage solution is stopped to store the storage liquid in the flow path in the head. A method of storing a functional liquid droplet ejection head, characterized in that the functional liquid droplet ejection head is stored as filled. 2. The method for storing a functional liquid droplet ejection head according to claim 1, wherein the storage liquid is circulated and used. 3. A storage device for a functional liquid droplet ejection head, which stores a liquid for storage in a head flow path from a functional liquid introduction port side of the functional liquid droplet ejection head to an ejection nozzle by storing the liquid storage. An inlet connection attachment connected to the mouth, a nozzle connection attachment connected to the discharge nozzle, and a liquid passage for passing the storage liquid to the flow path in the head via the inlet connection attachment and the nozzle connection attachment And a means for storing a functional liquid droplet ejection head. 4. The liquid passage means has a storage liquid tank connected to the inlet connection attachment via an inflow pipe, and a suction pump connected to the nozzle connection attachment via an outflow pipe. The storage device for the functional liquid droplet ejection head according to claim 3, wherein 5. The storage device for a functional liquid droplet ejection head according to claim 4, wherein a recovery pipe communicating with the storage liquid tank is connected to the ejection side of the suction pump. 6. The functional liquid droplet ejection head storage device according to claim 5, further comprising an atmosphere opening valve that opens the inflow pipe to the atmosphere near the storage liquid tank. 7. The head unit according to claim 4, wherein the carriage is equipped with a plurality of the functional liquid droplet ejection heads.
Or the storage device of the functional liquid droplet ejection head according to 6, wherein the introduction port connection attachment and the nozzle connection attachment are provided with a plurality of connection portions corresponding to the plurality of functional liquid droplet ejection heads. A plurality of individual inflow pipes that individually communicate with the plurality of connection portions of the introduction port connection attachment are connected to the introduction port connection attachment, and the plurality of individual inflow pipes are connected to the plurality of individual inflow pipes via an inflow side manifold. An inflow pipe is connected, a plurality of individual outflow pipes that individually communicate with the plurality of connection portions of the nozzle connection attachment are connected to the nozzle connection attachment, and the outflow side is connected to the plurality of individual outflow pipes. A storage device for a functional liquid droplet ejection head, wherein the outflow pipe is connected via a manifold. 8. The storage device of the functional liquid droplet ejection head according to claim 7, wherein an opening / closing valve is provided in each of the individual inflow pipes and / or each of the individual outflow pipes. 9. The functional liquid according to claim 7, wherein each of the individual inflow pipes and / or each of the individual outflow pipes is made of a resin tube whose liquid flow is visible from the outside. Storage device for drop discharge head. 10. The individual inflow pipes are separated into an upstream portion connected to the inflow side manifold and a downstream portion connected to the inlet connection attachment,
10. The functional liquid droplet ejection according to claim 7, wherein the carriage is equipped with a one-touch joint that connects an upstream side portion of each individual inflow pipe to a downstream side portion of each individual inflow pipe. Head storage device. 11. A carriage that supports an attachment support member that supports the nozzle connection attachment and a carriage on which the functional liquid droplet ejection head is mounted so as to overlap the nozzle connection attachment supported by the attachment support member. 11. A supporting member, wherein the carriage is supported by the carriage supporting member so that the ejection nozzles of the functional liquid droplet ejection head are connected to the nozzle connection attachment. The storage device for the functional liquid droplet ejection head according to any one of 1. 12. A method of storing a functional liquid droplet ejection head according to claim 1 or 2, or a plurality of functional liquid droplet ejections stored by the device for storing a functional liquid droplet ejection head according to any one of claims 3 to 11. A method of manufacturing a liquid crystal display device, wherein a plurality of filter elements are formed on a substrate of a color filter by using a head, wherein each color filter material is introduced into the plurality of functional liquid droplet ejection heads, A method of manufacturing a liquid crystal display device, comprising: scanning a discharge head relative to the substrate to selectively discharge the filter material to form a large number of the filter elements. 13. A method for storing a functional liquid droplet ejection head according to claim 1 or a plurality of functional liquid droplet ejections stored by the functional liquid droplet ejection head storage device according to any one of claims 3 to 11. A method of manufacturing an organic EL device in which an EL light emitting layer is formed on each of a plurality of pixel pixels on a substrate by using a head, wherein each color light emitting material is introduced into the plurality of functional liquid droplet ejection heads, A method for manufacturing an organic EL device, comprising: scanning a functional liquid droplet ejection head relative to the substrate to selectively eject the light emitting material to form a large number of EL light emitting layers. 14. A method for storing a functional liquid droplet ejection head according to claim 1 or 2, or a plurality of functional liquid droplet ejections stored by the device for storing a functional liquid droplet ejection head according to any one of claims 3 to 11. A method of manufacturing an electron-emitting device in which a plurality of phosphors are formed on electrodes using a head, wherein fluorescent materials of respective colors are introduced into the plurality of functional liquid droplet ejection heads, and the plurality of functional liquid droplet ejection heads are formed. A method of manufacturing an electron-emitting device, characterized in that a large number of the phosphors are formed by scanning relative to the electrodes and selectively ejecting the phosphor material. 15. A method for storing a functional liquid droplet ejection head according to claim 1 or 2, or a plurality of functional liquid droplet ejections stored in the device for storing a functional liquid droplet ejection head according to any one of claims 3 to 11. A method of manufacturing a PDP device, wherein a fluorescent material is formed in each of a plurality of recesses on a rear substrate using a head, wherein fluorescent materials of respective colors are introduced into the plurality of functional liquid droplet ejection heads, A method of manufacturing a PDP device, comprising: scanning a discharge head relative to the back substrate to selectively discharge the fluorescent material to form a large number of the fluorescent materials. 16. A method for storing a functional liquid droplet ejection head according to claim 1 or 2, or a plurality of functional liquid droplet ejections stored by the storage device for a functional liquid droplet ejection head according to any one of claims 3 to 11. A method of manufacturing an electrophoretic display device in which electrophoretic bodies are formed in a large number of recesses on an electrode using a head, wherein electrophoretic material of each color is introduced into the functional liquid droplet ejection heads, A method of manufacturing an electrophoretic display device, characterized in that a droplet discharge head is relatively scanned with respect to the electrodes to selectively discharge the electrophoretic material to form a large number of electrophoretic materials. 17. A method for storing a functional liquid droplet ejection head according to claim 1 or 2, or a plurality of functional liquid droplet ejections stored by the device for storing a functional liquid droplet ejection head according to any one of claims 3 to 11. A method of manufacturing a color filter, in which a head is used to manufacture a color filter in which a large number of filter elements are arranged on a substrate, wherein a filter material of each color is introduced into the plurality of functional liquid droplet ejection heads, A method of manufacturing a color filter, comprising: scanning a functional liquid droplet ejection head relative to the substrate to selectively eject the filter material to form a large number of the filter elements. 18. An overcoat film is formed to cover the plurality of filter elements, and after forming the filter elements, a translucent coating material is introduced into the plurality of functional liquid droplet ejection heads, 18. The color filter manufacturing method according to claim 17, wherein a plurality of functional liquid droplet ejection heads are scanned relative to the substrate to selectively eject the coating material to form the overcoat film. Method. 19. A method for storing a functional liquid droplet ejection head according to claim 1 or 2, or a plurality of functional liquid droplet ejections stored by the device for storing a functional liquid droplet ejection head according to any one of claims 3 to 11. An organic EL device in which a plurality of pixel pixels including an EL light emitting layer are arranged on a substrate by using a head
In the manufacturing method of, the luminescent material of each color is introduced into the plurality of functional liquid droplet ejection heads, and the plurality of functional liquid droplet ejection heads are relatively scanned with respect to the substrate to selectively select the luminescent material. A method for manufacturing an organic EL device, characterized in that a large number of EL light emitting layers are formed by discharging. 20. A plurality of pixel electrodes corresponding to the EL light emitting layers are formed between the plurality of EL light emitting layers and the substrate, and the plurality of pixel electrodes are formed before the EL light emitting layers are formed. Liquid electrode material is introduced into the functional liquid droplet ejection head, the plurality of functional liquid droplet ejection heads are scanned relative to the substrate, and the liquid electrode material is selectively ejected to form a large number of pixel electrodes. 20. The method for manufacturing an organic EL according to claim 19, wherein the organic EL device is formed. 21. A counter electrode is formed so as to cover the plurality of EL light emitting layers, and after forming the EL light emitting layers, a liquid electrode material is introduced into the plurality of functional liquid droplet ejection heads. 21. The method of manufacturing an organic EL device according to claim 20, wherein the functional liquid droplet ejection head is scanned relative to the substrate to selectively eject the liquid electrode material to form the counter electrode. . 22. A method of storing a functional liquid droplet ejection head according to claim 1 or 2, or a plurality of functional liquid droplet ejections stored by the device for storing a functional liquid droplet ejection head according to any one of claims 3 to 11. A spacer forming method of using a head to form a large number of particulate spacers so as to form a minute cell gap between two substrates, the method comprising: A spacer characterized in that the spacers are introduced and the plurality of functional liquid droplet ejection heads are relatively scanned with respect to at least one of the substrates to selectively eject the particulate material to form the spacers on the substrate. Forming method. 23. A method for storing a functional liquid droplet ejection head according to claim 1 or 2, or a plurality of functional liquid droplet ejections stored by the device for storing a functional liquid droplet ejection head according to any one of claims 3 to 11. A method of forming a metal wiring on a substrate using a head, comprising introducing a liquid metal material into the plurality of functional liquid droplet ejection heads, wherein the plurality of functional liquid droplet ejection heads are arranged relative to the substrate. The method of forming a metal wiring, wherein the liquid metal material is selectively discharged to selectively form the metal wiring. 24. A method of storing a functional liquid droplet ejection head according to claim 1 or a plurality of functional liquid droplet ejections stored by the device for storing a functional liquid droplet ejection head according to any one of claims 3 to 11. A method of forming a large number of microlenses on a substrate by using a head, wherein lens material is introduced into the plurality of functional liquid droplet ejection heads, and the plurality of functional liquid droplet ejection heads are arranged relative to the substrate. The method for forming a lens is characterized in that a large number of the microlenses are formed by selectively scanning and selectively ejecting the lens material. 25. A method of storing a functional liquid droplet ejection head according to claim 1 or 2, or a plurality of functional liquid droplet ejections stored by the device for storing a functional liquid droplet ejection head according to any one of claims 3 to 11. A resist forming method of forming a resist of an arbitrary shape on a substrate using a head, wherein a resist material is introduced into the plurality of functional liquid droplet ejection heads, and the plurality of functional liquid droplet ejection heads are arranged relative to the substrate. Forming method, characterized in that the resist material is selectively discharged to selectively form the resist. 26. A plurality of functional liquid droplet ejections stored by the method for storing a functional liquid droplet ejection head according to claim 1 or 2 or the storage device for a functional liquid droplet ejection head according to any one of claims 3 to 11. A light diffuser forming method for forming a large number of light diffusers on a substrate by using a head, wherein a light diffusing material is introduced into the plurality of functional liquid droplet ejection heads, A method for forming a light diffuser, characterized in that a large number of the light diffusers are formed by scanning relative to a substrate and selectively discharging the light diffuser material.