JP2003176119A - Method and apparatus for producing silicon carbide - Google Patents

Method and apparatus for producing silicon carbide

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Publication number
JP2003176119A
JP2003176119A JP2001402525A JP2001402525A JP2003176119A JP 2003176119 A JP2003176119 A JP 2003176119A JP 2001402525 A JP2001402525 A JP 2001402525A JP 2001402525 A JP2001402525 A JP 2001402525A JP 2003176119 A JP2003176119 A JP 2003176119A
Authority
JP
Japan
Prior art keywords
silicon carbide
raw material
carbide
silica
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001402525A
Other languages
Japanese (ja)
Inventor
Hiromi Sarai
博美 皿井
Kazuhiko Kudo
和彦 工藤
Kunitoshi Kosoba
邦敏 小蕎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DEIISU KK
Original Assignee
DEIISU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DEIISU KK filed Critical DEIISU KK
Priority to JP2001402525A priority Critical patent/JP2003176119A/en
Publication of JP2003176119A publication Critical patent/JP2003176119A/en
Pending legal-status Critical Current

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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for producing silicon carbide, by which an inexpensive raw material such as a carbide of chaff can be used as a raw material in addition to conventional raw materials and high purity green silicon carbide is produced at a low energy and an apparatus therefor. <P>SOLUTION: Powdery green silicon carbide is produced at a low energy cost by using a mixture of a carbide of a silicon-accumulating biomass as a raw material such as the carbide of chaff or a carbon powder and a silica powder, and irradiating the raw material with high frequency electromagnetic waves of ≥2 GHz. <P>COPYRIGHT: (C)2003,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、珪素集積バイオマ
ス炭化物、もしくは炭素粉体とシリカ粉体との配合物を
原料とし、高周波電磁波を照射することによって炭化珪
素を製造する製造法ならびに製造装置に関するものであ
る。なお、珪素集積バイオマスとしては、籾殻、藁、笹
の葉、トウモロコシなどがあげられる。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing method and a manufacturing apparatus for manufacturing silicon carbide by irradiating a high-frequency electromagnetic wave with silicon-accumulated biomass carbide or a mixture of carbon powder and silica powder as a raw material. It is a thing. Examples of the silicon-accumulated biomass include rice husks, straw, bamboo leaves, and corn.

【0002】[0002]

【従来の技術】一般的に用いられている炭化珪素製造法
には、アチソン炉法(抵抗炉法)による固相反応を用い
た製造法と、シリコン炭素直接反応法等がある。
2. Description of the Related Art Generally used silicon carbide manufacturing methods include a manufacturing method using a solid phase reaction by an Acheson furnace method (resistance furnace method) and a silicon-carbon direct reaction method.

【0003】工業的規模で広く用いられているアチソン
炉法は、石油コークス等の炭素と珪石を主原料として、
電極間にシリカと炭材の配合試料を敷き、電極間を黒鉛
粉コアで繋ぎ、さらに原料で覆ったのちに通電し、還元
雰囲気中においてジュール熱によって1400〜160
0℃の温度域を形成し、焼成してインゴット(塊)を作
り、粉砕、精錬して製造されている。
The Acheson furnace method, which is widely used on an industrial scale, uses carbon such as petroleum coke and silica as main raw materials,
A mixture sample of silica and carbonaceous material is laid between the electrodes, the electrodes are connected with a graphite powder core, and after covering with the raw material, electricity is applied, and then 1400 to 160 by Joule heat in a reducing atmosphere.
It is manufactured by forming a temperature range of 0 ° C., firing it to form an ingot (lump), crushing and refining.

【0004】[0004]

【発明が解決しようとする課題】従来法では、間接加熱
であることや、高温域での固相反応のために2〜3時間
の保持時間を要することなどによって多量の電力を必要
とする。また、原料面では、石油コークス等の炭素を用
いており、原料価格を高価にしている。
In the conventional method, a large amount of electric power is required due to the indirect heating and the holding time of 2 to 3 hours required for the solid phase reaction in the high temperature range. In terms of raw materials, carbon such as petroleum coke is used, which makes the raw materials expensive.

【0005】炭化珪素には緑色炭化珪素と黒色炭化珪素
があり、黒色炭化珪素は緑色炭化珪素に比べ鉄やアルミ
ニウム等の不純物が数倍多く含まれている。高純度であ
る緑色炭化珪素を製造するには、1600℃以上の高温
域での反応が必要とされている。
There are green silicon carbide and black silicon carbide in silicon carbide, and black silicon carbide contains impurities such as iron and aluminum several times more than green silicon carbide. To produce high-purity green silicon carbide, a reaction in a high temperature range of 1600 ° C. or higher is required.

【0006】本発明者らは、製造時の低エネルギー消
費、ならびに安価な原料を利用できることを解決すべき
課題とし、低エネルギーで高純度の緑色炭化珪素を製造
する方法を検討した。
The inventors of the present invention have made it a challenge to solve the problems of low energy consumption during production and availability of inexpensive raw materials, and have studied a method of producing high-purity green silicon carbide with low energy.

【0007】[0007]

【課題を解決するための手段】本発明は、低エネルギー
コスト化の課題を解決するために、炭素や炭化物の高周
波電磁波吸収特性を利用し、2GHz以上の高周波電磁
波照射装置を用いて、原料そのものを発熱体として極め
て短時間に合成反応を行わせるものである。
In order to solve the problem of low energy cost, the present invention utilizes the high frequency electromagnetic wave absorption characteristics of carbon and carbide and uses a high frequency electromagnetic wave irradiation device of 2 GHz or more to produce the raw material itself. Is used as a heating element to carry out the synthesis reaction in an extremely short time.

【0008】本発明による炭化珪素の製造装置は、原料
を高耐火高断熱材で包囲することによって、炭化珪素の
合成反応に必要な熱エネルギーが周囲へ拡散することを
最小限にとどめるとともに、周波数2GHz以上の高周
波電磁波を照射することによって、合成反応が終了する
まで原料内部から熱エネルギーが供給されることから、
極めて短時間で1400℃以上に達し、結晶質粉体状の
緑色炭化珪素を製造することができる。
In the apparatus for producing silicon carbide according to the present invention, by enclosing the raw material with a high refractory and high heat insulating material, it is possible to minimize the diffusion of thermal energy necessary for the synthesis reaction of silicon carbide to the surroundings and to reduce the frequency. By irradiating a high frequency electromagnetic wave of 2 GHz or more, heat energy is supplied from the inside of the raw material until the synthesis reaction is completed,
It can reach 1400 ° C. or higher in an extremely short time and can produce crystalline powdery green silicon carbide.

【0009】本発明は、低原料コスト化の課題を解決す
るために、前述のような珪素集積バイオマス炭化物を主
原料とすることができるが、その中でも籾殻は農業廃材
として利用価値が低いために安価である。さらに、近年
は集積型精米方式(ライスセンター)の導入によって籾
殻が集積されており、工業的利用が容易な状況にあるこ
とからも有望な原料である。籾殻炭化物の主たる組成的
特徴は、18%程のシリカと80%程の炭素が、非常に
均一に分散していること。また、珪素集積バイオマス中
のシリカ成分は珪酸ゲルの形で存在し、非結晶質である
ことから鉱物中のシリカ成分より反応性が高く、エネル
ギーコストの低減にもつながる。
In the present invention, in order to solve the problem of cost reduction of raw materials, the above-mentioned silicon-enriched biomass carbide can be used as a main raw material. Among them, rice husk has a low utility value as agricultural waste material. It is cheap. Furthermore, since rice husks have been accumulated by the introduction of an integrated rice-polishing method (rice center) in recent years, it is a promising raw material because it is easily industrially used. The main compositional characteristic of rice husk carbide is that about 18% of silica and about 80% of carbon are dispersed very uniformly. Moreover, since the silica component in the silicon-accumulated biomass exists in the form of silica gel and is amorphous, it has higher reactivity than the silica component in the mineral, leading to a reduction in energy cost.

【0010】本発明による反応過程は次のようになる。
原料の主成分はシリカ(SiO)と炭素(C)であ
る。この原料に、2GHz以上の高周波電磁波を照射す
ることにより、電磁波エネルギーは原料に吸収されて熱
エネルギーとなる。この熱によって原料中の炭素の一部
が燃焼し、温度が上昇するとともに、空気中の酸素が炭
素の燃焼で消費されることによって還元雰囲気となる。
還元雰囲気中で高温になることによって、原料中の炭素
の一部は原料中のシリカの酸素を奪って燃焼し、酸素を
奪われた珪素は炭素と結合して炭化珪素となる(SiO
+3C→SiC+2CO)。このように原料中の炭素
は炭化珪素の原料になる部分と燃料になる部分があり、
極めて効率よく反応を促進させることができる。
The reaction process according to the present invention is as follows.
The main components of the raw materials are silica (SiO 2 ) and carbon (C). By irradiating this raw material with a high frequency electromagnetic wave of 2 GHz or more, the electromagnetic wave energy is absorbed by the raw material and becomes thermal energy. Due to this heat, a part of carbon in the raw material is burned, the temperature rises, and oxygen in the air is consumed by the burning of carbon to form a reducing atmosphere.
When the temperature becomes high in the reducing atmosphere, a part of carbon in the raw material deprives the oxygen of silica in the raw material and burns, and the oxygen-deprived silicon is combined with carbon to form silicon carbide (SiO 2).
2 + 3C → SiC + 2CO). In this way, the carbon in the raw material has a portion that becomes the raw material of silicon carbide and a portion that becomes the fuel,
The reaction can be promoted extremely efficiently.

【0011】原料として最適なシリカと炭素の量につい
ては、原料の反応(SiO+3C→SiC+2CO)
に寄与する部分の化学量論比がシリカ1モル:炭素3モ
ルであり、これに空気中の酸素と反応させるための炭素
を加えれば良く、計算と実験で容易に最適配合比を求め
ることが出来る。
For optimum amounts of silica and carbon as raw materials, the reaction of the raw materials (SiO 2 + 3C → SiC + 2CO)
The stoichiometric ratio of the portion that contributes to is 1 mol of silica: 3 mol of carbon, and carbon for reacting with oxygen in the air may be added to this, and the optimum blending ratio can be easily obtained by calculation and experiment. I can.

【0012】[0012]

【実施例】 以下に本発明による炭化珪素製造の実施例
について記載する。なお、以下の実施例は本発明の形態
や効果についての理解を深めるためのものであり、本発
明を制限するものではない。
EXAMPLES Examples of producing silicon carbide according to the present invention will be described below. The following examples are for the purpose of deepening the understanding of the modes and effects of the present invention, and do not limit the present invention.

【0013】[0013]

【実施例1】市販の籾殻炭化物(籾殻薫炭)を40〜6
0μmに粉砕したものを原料とする。この原料約10g
を高耐火高断熱材で包囲し、2.5GHz、出力500
Wの高周波電磁波照射装置に設置して約20分間照射す
る。この過程で炭化珪素が合成され、反応が終了すると
ともに電磁波吸収特性が低下し、温度が低下する。合成
後に回収した粉体状緑色炭化珪素の質量は約1gであ
り、X線回折を行った結果、純度の高い炭化珪素である
ことが判明した。このX線回折パターンを図1に示す。
Example 1 A commercially available rice husk carbide (rice husk charcoal) was used in an amount of 40 to 6
The material pulverized to 0 μm is used as a raw material. About 10g of this raw material
Enclosed with high fire resistance and high insulation, 2.5 GHz, output 500
It is installed in a high frequency electromagnetic wave irradiation device of W and irradiated for about 20 minutes. In this process, silicon carbide is synthesized, the reaction is completed, the electromagnetic wave absorption property is deteriorated, and the temperature is decreased. The mass of the powdery green silicon carbide recovered after the synthesis was about 1 g, and as a result of X-ray diffraction, it was found to be highly pure silicon carbide. This X-ray diffraction pattern is shown in FIG.

【0014】[0014]

【実施例2】市販の籾殻炭化物(籾殻薫炭)を40〜6
0μmに粉砕したものと市販の珪石粉体を質量比約2:
1の割合で混合した物を原料とする。この原料約10g
を高耐火高断熱材で包囲し、2.5GHz、出力500
Wの高周波電磁波照射装置に設置して約20分間照射す
る。この過程で炭化珪素が合成され、反応が終了すると
ともに電磁波吸収特性が低下し、温度が低下する。合成
後に回収した粉体状緑色炭化珪素の質量は約2gであ
り、X線回折を行った結果、純度の高い炭化珪素である
ことが判明した。このX線回折パターンを図2に示す。
Example 2 A commercially available rice husk carbide (rice husk charcoal) was used in an amount of 40 to 6
Mass ratio of crushed to 0 μm and commercially available silica powder is about 2:
The material mixed at a ratio of 1 is used as a raw material. About 10g of this raw material
Enclosed with high fire resistance and high insulation, 2.5 GHz, output 500
It is installed in a high frequency electromagnetic wave irradiation device of W and irradiated for about 20 minutes. In this process, silicon carbide is synthesized, the reaction is completed, the electromagnetic wave absorption property is deteriorated, and the temperature is decreased. The mass of the powdery green silicon carbide recovered after the synthesis was about 2 g, and as a result of X-ray diffraction, it was found to be high-purity silicon carbide. This X-ray diffraction pattern is shown in FIG.

【0015】[0015]

【実施例3】市販の炭素粉体と市販の珪石粉体を質量比
約3:2の割合で混合したものを原料とする。この原料
約10gを高耐火高断熱材で包囲し、2.5GHz、出
力500Wの高周波電磁波照射装置に設置して約20分
間照射する。この過程で炭化珪素が合成され、反応が終
了するとともに電磁波吸収特性が低下し、温度が低下す
る。合成後に回収した粉体状緑色炭化珪素の質量は約2
gであり、X線回折を行った結果、純度の高い炭化珪素
であることが判明した。このX線回折パターンを図3に
示す。
Example 3 A raw material is a mixture of a commercially available carbon powder and a commercially available silica stone powder in a mass ratio of about 3: 2. About 10 g of this raw material is surrounded by a high refractory and high heat insulating material, placed in a high frequency electromagnetic wave irradiation device of 2.5 GHz and output of 500 W, and irradiated for about 20 minutes. In this process, silicon carbide is synthesized, the reaction is completed, the electromagnetic wave absorption property is deteriorated, and the temperature is decreased. The mass of the powdery green silicon carbide recovered after the synthesis is about 2
As a result of X-ray diffraction, it was found to be silicon carbide with high purity. This X-ray diffraction pattern is shown in FIG.

【0016】[0016]

【発明の効果】従来技術による炭化珪素の製造には、多
くのエネルギー、時間、工程が必要であるが、本発明に
よれば、籾殼炭化物10gもしくは珪石粉体と炭素粉体
の混合物10gを出力500Wの高周波電磁波照射装置
で約20分間照射することにより、粉体状の緑色炭化珪
素約1〜2gを容易に製造することができる。また、籾
殼のように農業廃材として利用価値の低い材料を原料と
することができるなど、工業生産規模への応用によって
高い経済効果が期待できる。本発明により精製された緑
色炭化珪素は高純度で、耐熱性、耐酸性、耐熱衝撃性、
硬度などに優れていることから、高温燃焼触媒構造支持
体、ディーゼルエンジン排ガスフィルター、半導体、研
磨剤などの材料に利用することができる。
The production of silicon carbide according to the prior art requires a lot of energy, time and process, but according to the present invention, 10 g of hulled carbide or 10 g of a mixture of silica stone powder and carbon powder is used. By irradiating with a high-frequency electromagnetic wave irradiation device with an output of 500 W for about 20 minutes, about 1 to 2 g of powdery green silicon carbide can be easily manufactured. In addition, it is possible to expect high economic effects by applying it to industrial production scales, such as materials with low utility value as agricultural waste materials such as rice hulls. The green silicon carbide refined by the present invention has high purity, heat resistance, acid resistance, thermal shock resistance,
Since it has excellent hardness, it can be used as a material for a high temperature combustion catalyst structure support, a diesel engine exhaust gas filter, a semiconductor, an abrasive, and the like.

【図面の簡単な説明】[Brief description of drawings]

【図1】実施例1で作製した炭化珪素のX線回折パター
ンである。
1 is an X-ray diffraction pattern of silicon carbide manufactured in Example 1. FIG.

【図2】実施例2で作製した炭化珪素のX線回折パター
ンである。
FIG. 2 is an X-ray diffraction pattern of silicon carbide manufactured in Example 2.

【図3】実施例3で作製した炭化珪素のX線回折パター
ンである。
FIG. 3 is an X-ray diffraction pattern of silicon carbide manufactured in Example 3.

【図4】実施例1と2と3に用いた炭化珪素製造装置の
断面略図である。
FIG. 4 is a schematic sectional view of the silicon carbide manufacturing apparatus used in Examples 1, 2 and 3.

フロントページの続き (72)発明者 皿井 博美 北海道札幌市北区北19条西11丁目1番地 北海道立工業試験場内 (72)発明者 工藤 和彦 北海道札幌市北区北19条西11丁目1番地 北海道立工業試験場内 (72)発明者 小蕎 邦敏 北海道江別市野幌松並町32番地1 有限会 社ディース内 Fターム(参考) 4G046 MA14 MC02 MC06 Continued front page    (72) Inventor Hiromi Sarai             11-chome, Kita-ku, Kita-ku, Sapporo, Hokkaido             Inside the Hokkaido Industrial Test Station (72) Inventor Kazuhiko Kudo             11-chome, Kita-ku, Kita-ku, Sapporo, Hokkaido             Inside the Hokkaido Industrial Test Station (72) Inventor Kunitoshi Soba             32, Nopuro Matsunami-machi, Ebetsu City, Hokkaido             Inside the company dish F-term (reference) 4G046 MA14 MC02 MC06

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 珪素集積バイオマス(シリカ(Si
)成分を有する植物)の炭化物粉体に、周波数2G
Hz以上の高周波電磁波を照射することによって、炭化
珪素を合成することを特徴とする炭化珪素の製造法。
1. A silicon-accumulated biomass (silica (Si
O 2 ) component of plant) carbide powder, frequency 2G
A method for producing silicon carbide, which comprises synthesizing silicon carbide by irradiating a high frequency electromagnetic wave of Hz or higher.
【請求項2】 珪素集積バイオマスの炭化物粉体と石英
などのシリカ粉体もしくはシリカを主成分とする珪石な
どの粉体との配合原料に、周波数2GHz以上の高周波
電磁波を照射することによって、炭化珪素を合成するこ
とを特徴とする炭化珪素の製造法。
2. A carbonized material is irradiated with a high frequency electromagnetic wave having a frequency of 2 GHz or more by irradiating a mixed raw material of a carbide powder of silicon-enriched biomass and a silica powder such as quartz or a powder such as silica stone containing silica as a main component. A method for producing silicon carbide, which comprises synthesizing silicon.
【請求項3】 グラファイトや不定形炭素などの炭素粉
体と石英などのシリカ粉体もしくはシリカを主成分とす
る珪石などの粉体との配合原料に、周波数2GHz以上
の高周波電磁波を照射することによって、炭化珪素を合
成することを特徴とする炭化珪素の製造法。
3. Irradiating a mixed raw material of carbon powder such as graphite or amorphous carbon and silica powder such as quartz or powder such as silica stone containing silica as a main component with a high frequency electromagnetic wave having a frequency of 2 GHz or more. A method for producing silicon carbide, which comprises synthesizing silicon carbide by means of:
【請求項4】 原料を高耐火高断熱材で包囲した状態
で、周波数2GHz以上の高周波電磁波を照射すること
を特徴とする炭化珪素の製造装置。
4. An apparatus for producing silicon carbide, characterized in that a raw material is surrounded by a high refractory and high heat insulating material and is irradiated with a high frequency electromagnetic wave having a frequency of 2 GHz or higher.
JP2001402525A 2001-12-06 2001-12-06 Method and apparatus for producing silicon carbide Pending JP2003176119A (en)

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JP2020100522A (en) * 2018-12-20 2020-07-02 一般財団法人岡山セラミックス技術振興財団 METHOD FOR PRODUCING Al4SiC4
KR20210066313A (en) * 2019-11-28 2021-06-07 경상국립대학교산학협력단 Manufacturing method of ultrasonically treated rice husk carbon and rubber composition containing the same

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JP2010089974A (en) * 2008-10-06 2010-04-22 Mitsubishi Electric Corp Carbon aggregate molded article and method of manufacturing carbon aggregate molded article
JP2010202432A (en) * 2009-03-02 2010-09-16 Mitsubishi Electric Corp Carbon aggregate molding material and method for producing carbon aggregate molded product
JP2020100522A (en) * 2018-12-20 2020-07-02 一般財団法人岡山セラミックス技術振興財団 METHOD FOR PRODUCING Al4SiC4
JP7165576B2 (en) 2018-12-20 2022-11-04 一般財団法人岡山セラミックス技術振興財団 Method for producing Al4SiC4
KR20210066313A (en) * 2019-11-28 2021-06-07 경상국립대학교산학협력단 Manufacturing method of ultrasonically treated rice husk carbon and rubber composition containing the same
KR102370226B1 (en) 2019-11-28 2022-03-04 경상국립대학교산학협력단 Manufacturing method of ultrasonically treated rice husk carbon and rubber composition containing the same

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