JP2003167161A - Manufacturing method for capillary - Google Patents
Manufacturing method for capillaryInfo
- Publication number
- JP2003167161A JP2003167161A JP2001369489A JP2001369489A JP2003167161A JP 2003167161 A JP2003167161 A JP 2003167161A JP 2001369489 A JP2001369489 A JP 2001369489A JP 2001369489 A JP2001369489 A JP 2001369489A JP 2003167161 A JP2003167161 A JP 2003167161A
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- Prior art keywords
- flare
- glass tube
- capillary
- diameter
- liquid
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、光ファイバの接続
に用いられるキャピラリの製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a capillary used for connecting optical fibers.
【０００２】[0002]
【従来の技術】周知の通り、光ファイバの互いの端面を
当接させ、接続する際に用いられるキャピラリには、毛
細管が使用されており、その端部は、光ファイバをキャ
ピラリの内孔に挿入し易くするために、外方に向って拡
開するフレア形状となっている。2. Description of the Related Art As is well known, capillaries are used for capillaries that are used to bring end faces of optical fibers into contact with each other, and to connect the end faces of the optical fibers to the inner holes of the capillaries. It has a flared shape that expands outward to facilitate insertion.
【０００３】そして、キャピラリの端部にフレア形状の
挿入部を形成する方法としては、例えば実公平７−４０
９６５号公報には、電着ダイヤ製のフレア形状に形成さ
れたドリルによりキャピラリ形成材の端部を研削するこ
とによって作製し、またフレア形状を、光ファイバを破
損なくスムースに挿入でき、電着ダイヤ製ドリルが破損
し難いように、フレアを２段階に設けるようにすること
が示されている。しかし、こうしたドリルによる作製で
は、キャピラリ形成材一本一本を処理しなければなら
ず、作製の効率が低く、量産する場合には適さない。As a method of forming a flare-shaped insertion portion at the end portion of the capillary, for example, Japanese Utility Model Publication No. 7-40.
No. 965 gazette discloses that an end of a capillary forming material is ground by a drill formed in a flare shape made of electrodeposited diamond, and the flare shape can be smoothly inserted into an optical fiber without damaging the electrodeposition. It is shown that flares are provided in two stages so that the diamond drill is not easily damaged. However, in the production by such a drill, each capillary forming material has to be processed one by one, the production efficiency is low, and it is not suitable for mass production.
【０００４】このため、量産に適する方法として、キャ
ピラリ形成材の端部を、例えばキャピラリ形成材がガラ
ス管である場合には、その端部を沸化水素（ＨＦ）によ
ってエッチング処理してフレアを得る化学的な処理方法
が考えられる。しかし、こうしたＨＦによる方法では、
ドリル研削と違い寸法精度が悪く、また再現性も悪くて
所望する形状を得ることが難しいものとなっていた。Therefore, as a method suitable for mass production, the end of the capillary-forming material, for example, when the capillary-forming material is a glass tube, is etched with hydrogen fluoride (HF) to remove flare. The chemical treatment method to be obtained is conceivable. However, in such an HF method,
Unlike drill grinding, dimensional accuracy was poor and reproducibility was poor, making it difficult to obtain a desired shape.
【０００５】そして、このような化学的な処理を用いた
方法の１つに、例えば特公昭６３−４４７０１号公報に
示されたキャピラリ形成材のガラス管の端面を除く外表
面を耐侵蝕性被膜で覆い、端面部をガラス侵蝕性溶液の
弗酸等で処理してフレアを得る方法がある。この方法で
は、ガラス管の内孔に予め水若しくは樹脂材例えばコー
ルタールピッチ、松脂等を充填しておくか、他方の端部
に栓をしておくか等して、侵蝕性溶液に端部を５〜１３
０分間浸漬させ、侵蝕処理後、水洗いして侵蝕液を洗い
去るとしている。One of the methods using such a chemical treatment is, for example, the erosion resistant coating on the outer surface of the capillary-forming material excluding the end surface of the glass tube disclosed in Japanese Patent Publication No. 63-47401. There is a method in which the flare is obtained by covering the end surface with hydrofluoric acid or the like which is a glass corrosive solution. In this method, the inner hole of the glass tube is filled with water or a resin material such as coal tar pitch, pine resin, etc. in advance, or the other end is plugged, etc. 5 to 13
It is said that it is immersed for 0 minutes, and after the erosion treatment, it is washed with water to remove the erosion liquid.
【０００６】しかし、このような方法でガラス管の端部
にフレアを形成した場合、比較的大きい所望のフレア径
（端面でのフレアの開口径）を得ようとした場合、フレ
ア長（端面からのフレアの長さ）が長くなってしまい、
キャピラリを使って光ファイバを接着する際に光ファイ
バを正確に固定することができなくなってしまう。この
ため、フレア長が長くなってしまうことなく、比較的大
きいフレア径を有するキャピラリを形成する方法が望ま
れている。However, when flare is formed at the end of the glass tube by such a method, when a relatively large desired flare diameter (flare opening diameter at the end face) is to be obtained, the flare length (from the end face) (Flare length of) becomes longer,
When bonding an optical fiber using a capillary, it becomes impossible to fix the optical fiber accurately. Therefore, there is a demand for a method of forming a capillary having a relatively large flare diameter without increasing the flare length.
【０００７】[0007]
【発明が解決しようとする課題】上記のような状況に鑑
みて本発明はなされたもので、その目的とするところ
は、接着する光ファイバを正確に固定することができる
よう適正なフレア長を有すると共に所望する比較的大き
いフレア径を有するキャピラリの作製が、効率よく行
え、また再現性よく行える量産に適したキャピラリの製
造方法を提供することにある。SUMMARY OF THE INVENTION The present invention has been made in view of the above situation, and an object thereof is to provide an appropriate flare length so that an optical fiber to be bonded can be accurately fixed. An object of the present invention is to provide a method for manufacturing capillaries suitable for mass production, which enables efficient and reproducible manufacture of capillaries having a desired relatively large flare diameter.
【０００８】[0008]
【課題を解決するための手段】本発明のキャピラリの製
造方法は、ガラス管の微小径の内孔に、ガラス管材料を
浸蝕せずかつ該ガラス管材料の浸蝕性液体と反応しない
液体を充満させた後、前記ガラス管の一端面のみを前記
浸蝕性液体に一定時間浸す工程と、前記浸蝕性液体に浸
した後に前記ガラス管の内孔を洗浄する工程とをそれぞ
れ交互に複数回繰り返し、前記ガラス管の内孔の一端側
部分にフレア形状を形成するようにしたことを特徴とす
る方法であり、さらに、前記浸蝕性液体が濃沸酸であっ
て、ガラス管材料を浸蝕せずかつ該ガラス管材料の浸蝕
性液体と反応しない液体として水を用いたことを特徴と
する方法であり、さらに、１回目の浸蝕性液体に一定時
間浸す工程における浸漬時間が、１５分以内であること
を特徴とする方法である。According to the method of manufacturing a capillary of the present invention, a small diameter inner hole of a glass tube is filled with a liquid that does not corrode the glass tube material and does not react with the corrosive liquid of the glass tube material. After that, a step of immersing only one end surface of the glass tube in the erosive liquid for a predetermined time, and a step of cleaning the inner hole of the glass tube after immersing in the erosive liquid are alternately repeated a plurality of times, The method is characterized by forming a flare shape on one end side portion of the inner hole of the glass tube, further, the erodible liquid is concentrated boiling acid, and does not erode the glass tube material and The method is characterized in that water is used as a liquid that does not react with the erosive liquid of the glass tube material, and the immersion time in the first step of immersing in the erosive liquid for a certain time is within 15 minutes. A method characterized by A.
【０００９】[0009]
【発明の実施の形態】以下本発明の実施の形態を、図面
を参照して以下に説明する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.
【００１０】実施の形態を説明するに先立ち、本願発明
者が行った先行試験の結果について、図１及び図２を用
いて説明する。図１はキャピラリの断面図であり、図２
は浸漬時間に対するフレア径、フレア長の変化を示す図
である。また、図１において、本発明において形成する
キャピラリ１の構成は、微小径の内孔２が形成されてい
て、外径がＤｏ、内径（内孔２の孔径）がＤｉ、全長が
Ｌであり、一方の端部３に、端面に向って拡開するフレ
ア４が形成されており、フレア４はフレア径（端面での
フレア４の開口径）がＤｆ、フレア長（端面からのフレ
ア４の長さ）がＬｆとなっている。Prior to describing the embodiments, the results of the preceding test conducted by the inventor of the present application will be described with reference to FIGS. 1 and 2. FIG. 1 is a sectional view of the capillary, and FIG.
FIG. 4 is a diagram showing changes in flare diameter and flare length with respect to immersion time. Further, in FIG. 1, the structure of the capillary 1 formed in the present invention is such that an inner hole 2 having a minute diameter is formed, the outer diameter is Do, the inner diameter (hole diameter of the inner hole 2) is Di, and the total length is L. A flare 4 that expands toward the end face is formed at one end portion 3. The flare 4 has a flare diameter (opening diameter of the flare 4 at the end face) Df and a flare length (flare 4 from the end face. The length) is Lf.
【００１１】そして、キャピラリ１を形成するに際し、
先行試験を次のように行った。先ず、キャピラリ形成材
として外径Ｄｏが３ｍｍ、内径Ｄｉが０．２５ｍｍの硼
珪酸ガラスで形成された全長Ｌが約７ｍｍの毛細管のガ
ラス管を準備し、直径０．２５ｍｍの内孔２内を水で満
たす。続いて内孔２内が水で満たされたキャピラリ形成
材のフレア４を形成する一方の端部３の端面のみを、３
０℃の４６％の濃弗酸に浸漬し、端部３でのフレア４の
形成状況を見た。フレア４の形成は、濃弗酸が内孔２内
に拡散し、端部３に弗酸の濃度差が生じて浸蝕がフレア
状に進行することによってなされた。When forming the capillary 1,
The preceding test was conducted as follows. First, as a capillary forming material, a capillary glass tube having an outer diameter Do of 3 mm and an inner diameter Di of 0.25 mm and made of borosilicate glass and having a total length L of about 7 mm is prepared, and the inside of the inner hole 2 having a diameter of 0.25 mm is prepared. Fill with water. Then, only the end face of one end portion 3 forming the flare 4 of the capillary forming material in which the inner hole 2 is filled with water is
It was dipped in 46% concentrated hydrofluoric acid at 0 ° C., and the formation of flare 4 at the end 3 was observed. The flare 4 was formed by diffusing concentrated hydrofluoric acid into the inner hole 2 and causing a difference in the concentration of hydrofluoric acid at the end 3 to cause erosion to proceed flare.
【００１２】また、浸蝕によるフレア４の形成状況につ
いては図２に示すように、浸漬時間Ｔに対するフレア径
Ｄｆ、フレア長Ｌｆの各値は、フレア長Ｌｆが時間経過
にしたがって略直線的に、１０分で約２．５ｍｍ、２０
分で約５ｍｍ、３０分で約７．５ｍｍと増加するのに対
し、フレア径Ｄｆは曲線的に、１０分で０．２５ｍｍか
ら約０．３ｍｍに、さらに２０分で約０．４ｍｍと増加
するものであった。As for the formation of the flare 4 by erosion, as shown in FIG. 2, the flare diameter Df and the flare length Lf with respect to the immersion time T are substantially linear with the flare length Lf as time passes. 2.5mm in 20 minutes, 20
The flare diameter Df increases from about 0.25 mm to about 0.3 mm in 10 minutes and about 0.4 mm in 20 minutes, while it increases to about 5 mm in 10 minutes and 7.5 mm in 30 minutes. It was something to do.
【００１３】このため、例えば全長Ｌが約７ｍｍのキャ
ピラリ１を形成しようとした場合に、端部３の端面のみ
を濃弗酸に浸漬し、そのまま浸蝕を行わせ、浸漬時間Ｔ
が２５分以上になると、弗酸が毛管現象により内孔２へ
深く侵入し、約７ｍｍの全長Ｌにわたり内孔２内が浸蝕
されてしまうことになる。For this reason, for example, when it is attempted to form a capillary 1 having a total length L of about 7 mm, only the end face of the end portion 3 is immersed in concentrated hydrofluoric acid and eroded as it is, and the immersion time T
For more than 25 minutes, hydrofluoric acid penetrates deeply into the inner hole 2 due to a capillary phenomenon, and the inside of the inner hole 2 is eroded over the entire length L of about 7 mm.
【００１４】一方、約７ｍｍのキャピラリ１で光ファイ
バを接着、固定しようとした場合には、フレア長Ｌｆは
全長Ｌの半分以下、すなわち３．５ｍｍ以下であること
が好ましい。そして、フレア長Ｌｆを３．５ｍｍ以下に
しようとすると、浸漬時間Ｔは１５分以下でなければな
らず、この浸漬時間Ｔが１５分以下では試験結果からみ
て、フレア径Ｄｆは０．３５ｍｍ程度となってしまい、
０．４ｍｍ以上を確保し、光ファイバを挿入し易くしよ
うとすることは難しいものとなってしまうことが、判明
した。On the other hand, when the optical fiber is to be bonded and fixed by the capillary 1 having a length of about 7 mm, the flare length Lf is preferably half the total length L or less, that is, 3.5 mm or less. When the flare length Lf is set to 3.5 mm or less, the immersion time T must be 15 minutes or less. When the immersion time T is 15 minutes or less, the flare diameter Df is about 0.35 mm when viewed from the test results. Became,
It has been found that it is difficult to secure 0.4 mm or more and to easily insert the optical fiber.
【００１５】このような先行試験の結果を踏まえ、以下
の各実施形態に示すようなキャピラリの製造方法を完成
させた。Based on the results of the preceding tests, a method for manufacturing a capillary as shown in each of the following embodiments was completed.
【００１６】先ず、第１の実施形態を、図３を用いて説
明する。図３は第１の工程と第２の工程を繰り返し行っ
た時のフレア径、フレア長の変化を示す図で、図３
（ａ）は累積浸漬時間に対するフレア径、フレア長の変
化を線グラフにして示す図、図３（ｂ）は処理回数に対
するフレア径、フレア長の変化を数値によって示す図で
ある。なお、本実施形態におけるキャピラリの各部位の
符号は、図１の各部位に対応する部位には同符号を付し
て説明する。First, the first embodiment will be described with reference to FIG. FIG. 3 is a diagram showing changes in flare diameter and flare length when the first step and the second step are repeated.
FIG. 3A is a graph showing changes in flare diameter and flare length with respect to cumulative immersion time, and FIG. 3B is a graph showing changes in flare diameter and flare length with respect to the number of treatments. The reference numerals of the respective parts of the capillary in the present embodiment will be described by attaching the same reference numerals to the parts corresponding to the respective parts of FIG.
【００１７】そして、本実施形態においては、キャピラ
リ形成材として外径Ｄｏが３ｍｍで、内径Ｄｉが０．２
５ｍｍの微小径の内孔２が形成された全長Ｌが約７ｍｍ
の硼珪酸ガラス、例えばパイレックス（コーニング社の
商品名）で形成された毛細管のガラス管を用いた。ま
た、キャピラリ１のフレア４の形成工程は第１の工程
と、第２の工程で構成されており、両工程を繰り返すこ
とによってガラス管の端部を処理し、処理回数を重ねる
ことで所望形状のフレア４を形成する。In this embodiment, the capillary forming material has an outer diameter Do of 3 mm and an inner diameter Di of 0.2.
The total length L in which the inner hole 2 with a small diameter of 5 mm is formed is about 7 mm
Borosilicate glass, for example, a capillary glass tube formed of Pyrex (trade name of Corning Incorporated) was used. In addition, the process of forming the flare 4 of the capillary 1 is composed of a first process and a second process. By repeating both processes, the end of the glass tube is processed, and the desired number of times is repeated to obtain a desired shape. Forming flare 4 of.
【００１８】第１の工程では、ガラス管の直径０．２５
ｍｍの内孔２内を、水を圧力注入して満たす。続いて内
孔２内が水で満たされたキャピラリ形成材のフレア４を
形成する一方の端部３の端面のみを、３０℃の浸蝕性液
体である４６％の濃弗酸に１５分間浸漬し、端面及び内
孔２内をエッチングする。なお、端部３の端面のみを濃
弗酸に浸漬してエッチングする方法としては、例えば濃
弗酸の表面張力を利用して端面のみを濃弗酸に浸してエ
ッチングする方法、あるいは端面以外のガラス管の外表
面を耐浸蝕性被覆で覆って端部３を濃弗酸に浸漬し、被
覆のない端面のみを濃弗酸に浸すようにしてエッチング
する方法など、いずれの方法であってもよい。In the first step, the glass tube has a diameter of 0.25.
The inside of the mm inner hole 2 is filled with water by pressure injection. Subsequently, only one end face of one end part 3 forming the flare 4 of the capillary forming material in which the inner hole 2 is filled with water is immersed in 46% concentrated hydrofluoric acid which is an erosive liquid at 30 ° C. for 15 minutes. , The end face and the inside of the inner hole 2 are etched. As a method of immersing only the end surface of the end portion 3 in concentrated hydrofluoric acid to etch, for example, a method of immersing only the end surface in concentrated hydrofluoric acid by utilizing the surface tension of concentrated hydrofluoric acid, or a method other than the end surface is used. Any method, such as a method in which the outer surface of the glass tube is covered with an erosion resistant coating, the end portion 3 is immersed in concentrated hydrofluoric acid, and only the end surface without the coating is immersed in concentrated hydrofluoric acid, is used. Good.
【００１９】次に第２の工程では、第１の工程直後に内
孔２内の水を抜くと共に、濃弗酸に浸漬させエッチング
した端面及び内孔２内を、水でよく洗浄する。Next, in the second step, immediately after the first step, the water in the inner hole 2 is drained, and the end face and the inner hole 2 etched by immersing the inner hole 2 in concentrated hydrofluoric acid are thoroughly washed with water.
【００２０】このような第１、第２の工程を行うこと
で、１回目の１５分間の累積浸漬時間Ｔが終了した時に
は、ガラス管の一方の端部３にフレア径Ｄｆが０．３４
８ｍｍ、フレア長Ｌｆが２．９ｍｍのフレア４が形成さ
れる。さらに続いて、上記第１の工程と第２の工程を繰
り返し、２回目の３０分間の累積浸漬時間Ｔが終了した
時点では、ガラス管の一方の端部３のフレア４は、フレ
ア径Ｄｆが０．４７６ｍｍ、フレア長Ｌｆが３．０ｍｍ
となる。またさらに第１の工程と第２の工程を複数回、
例えば合計６回繰り返し、９０分間の累積浸漬時間Ｔが
経過した時点では、ガラス管の一方の端部３のフレア４
は、フレア径Ｄｆが０．８１８ｍｍ、フレア長Ｌｆが
３．０ｍｍとなり、フレア長Ｌｆが全長Ｌの１／２以下
と、長いものとなってしまうことなく、フレア径Ｄｆの
みを十分大きくしたフレア４が形成されたキャピラリ１
を得ることができる。By performing the first and second steps as described above, when the first cumulative immersion time T of 15 minutes is completed, the flare diameter Df is 0.34 at one end 3 of the glass tube.
A flare 4 having a flare length Lf of 8 mm and a flare length Lf of 2.9 mm is formed. Further subsequently, the first step and the second step are repeated, and when the second 30-minute cumulative immersion time T ends, the flare 4 at one end 3 of the glass tube has a flare diameter Df. 0.476mm, flare length Lf is 3.0mm
Becomes Furthermore, the first step and the second step are repeated a plurality of times.
For example, when the cumulative immersion time T of 90 minutes has elapsed after repeating a total of 6 times, the flare 4 at one end 3 of the glass tube is
The flare diameter Df is 0.818 mm, the flare length Lf is 3.0 mm, and the flare length Lf is not longer than 1/2 of the total length L, and the flare diameter Df alone is sufficiently large. Capillary 1 with 4 formed
Can be obtained.
【００２１】そして、この結果を線グラフにして示す
と、第１の工程と第２の工程を繰り返すことでフレア径
Ｄｆは、図３（ａ）に折れ線Ａ１で示すように順次増加
する変化を示すのに対し、フレア長Ｌｆは、折れ線Ｂ１
で示すように１回目の処理で約３ｍｍの長さとなってか
らは、ほとんど変化しないものとなっている。なお、先
行試験で行ったように、濃弗酸に内孔２内の水を抜くこ
となく連続して浸漬した場合には、フレア径Ｄｆは、図
３（ａ）に折れ線Ａ０で示すように順次増加する変化を
示すのに対し、フレア長Ｌｆは、折れ線Ｂ０で示すよう
に浸漬時間Ｔが経過するにしたがって増加し、３０分を
経過した時点で既に、全長Ｌにわたって形成されてしま
う。The results are shown as a line graph. By repeating the first step and the second step, the flare diameter Df changes gradually as shown by the polygonal line A 1 in FIG. 3 (a). While the flare length Lf is the polygonal line B 1
As shown in, after the length of the first treatment is about 3 mm, it hardly changes. In addition, as in the preceding test, when the inner diameter of the inner hole 2 is continuously immersed in concentrated hydrofluoric acid without draining, the flare diameter Df is as shown by the polygonal line A 0 in FIG. While the flare length Lf increases as the immersion time T elapses as shown by the polygonal line B 0 , the flare length Lf is already formed over the entire length L after 30 minutes. .
【００２２】次に、第２の実施形態を、同じく図３を用
いて説明する。なお、本実施形態におけるキャピラリの
各部位の符号は、図１の各部位に対応する部位には同符
号を付して説明する。Next, the second embodiment will be described with reference to FIG. The reference numerals of the respective parts of the capillary in the present embodiment will be described by attaching the same reference numerals to the parts corresponding to the respective parts of FIG.
【００２３】そして、本実施形態においては、キャピラ
リ形成材として外径Ｄｏが３ｍｍで、内径Ｄｉが０．１
２５ｍｍの微小径の内孔２が形成された全長Ｌが約７ｍ
ｍの硼珪酸ガラス、例えばパイレックス（コーニング社
の商品名）で形成された毛細管のガラス管を用いた。ま
た、キャピラリ４のフレア４の形成工程は、上記第１の
実施形態と同様に、第１の工程と、第２の工程で構成さ
れており、両工程を繰り返すことによってガラス管の端
部を処理し、処理回数を重ねることで所望形状のフレア
４を形成する。Further, in this embodiment, the capillary forming material has an outer diameter Do of 3 mm and an inner diameter Di of 0.1.
The total length L in which the inner hole 2 with a small diameter of 25 mm is formed is about 7 m
m borosilicate glass, for example, a capillary glass tube formed of Pyrex (trade name of Corning Incorporated) was used. Further, the process of forming the flare 4 of the capillary 4 is composed of the first process and the second process as in the case of the first embodiment. By repeating both processes, the end portion of the glass tube is removed. The flare 4 having a desired shape is formed by repeating the processing and the number of times of processing.
【００２４】第１の工程では、ガラス管の直径０．１２
５ｍｍの内孔２内を水で満たす。続いて内孔２内が水で
満たされたキャピラリ形成材のフレア４を形成する一方
の端部３の端面のみを、３０℃の浸蝕性液体である４６
％の濃弗酸に１５分間浸漬し、端面及び内孔２内をエッ
チングする。なお、端部３の端面のみを濃弗酸に浸漬し
てエッチングする方法としては、第１の実施形態と同様
に、例えば濃弗酸の表面張力を利用して端面のみを濃弗
酸に浸してエッチングする方法、あるいは端面以外のガ
ラス管の外表面を耐浸蝕性被覆で覆って端部３を濃弗酸
に浸漬し、被覆のない端面のみを濃弗酸に浸すようにし
てエッチングする方法など、いずれの方法であってもよ
い。In the first step, the diameter of the glass tube was 0.12.
The inside of the 5 mm inner hole 2 is filled with water. Subsequently, only the end face of the one end part 3 forming the flare 4 of the capillary forming material in which the inner hole 2 is filled with water is the corrosive liquid at 30 ° C. 46
% Of concentrated hydrofluoric acid for 15 minutes to etch the end face and the inside of the inner hole 2. As a method of immersing only the end face of the end portion 3 in concentrated hydrofluoric acid to etch, as in the first embodiment, for example, only the end face is immersed in concentrated hydrofluoric acid by utilizing the surface tension of concentrated hydrofluoric acid. Or a method in which the outer surface of the glass tube other than the end face is covered with an erosion resistant coating, the end 3 is immersed in concentrated hydrofluoric acid, and only the uncoated end face is immersed in concentrated hydrofluoric acid. Any method such as
【００２５】次に第２の工程では、第１の工程直後に内
孔２内の水を抜くと共に、濃弗酸に浸漬させエッチング
した端面及び内孔２内を、水でよく洗浄する。Next, in the second step, immediately after the first step, the water in the inner hole 2 is drained, and the end surface and the inner hole 2 which are etched by being immersed in concentrated hydrofluoric acid are thoroughly washed with water.
【００２６】このような第１、第２の工程を行うこと
で、１回目の１５分間の累積浸漬時間Ｔが終了した時に
は、ガラス管の一方の端部３にフレア径Ｄｆが０．３０
６ｍｍ、フレア長Ｌｆが３．０ｍｍのフレア４が形成さ
れる。さらに続いて、上記第１の工程と第２の工程を繰
り返し、２回目の３０分間の累積浸漬時間Ｔが終了した
時点では、ガラス管の一方の端部３のフレア４は、フレ
ア径Ｄｆが０．４８９ｍｍ、フレア長Ｌｆが３．２ｍｍ
となる。またさらに第１の工程と第２の工程を複数回、
例えば合計６回繰り返し、９０分間の累積浸漬時間Ｔが
経過した時点では、ガラス管の一方の端部３のフレア４
は、フレア径Ｄｆが０．９１１ｍｍ、フレア長Ｌｆが
３．０ｍｍとなり、フレア長Ｌｆが全長Ｌの１／２以下
と、長いものとなってしまうことなく、フレア径Ｄｆの
みを十分大きくしたフレア４が形成されたキャピラリ１
を得ることができる。By performing the first and second steps as described above, when the first cumulative immersion time T of 15 minutes is completed, the flare diameter Df is 0.30 at one end 3 of the glass tube.
The flare 4 having a length of 6 mm and a flare length Lf of 3.0 mm is formed. Further subsequently, the first step and the second step are repeated, and when the second 30-minute cumulative immersion time T ends, the flare 4 at one end 3 of the glass tube has a flare diameter Df. 0.489 mm, flare length Lf is 3.2 mm
Becomes Furthermore, the first step and the second step are repeated a plurality of times.
For example, when the cumulative immersion time T of 90 minutes has elapsed after repeating a total of 6 times, the flare 4 at one end 3 of the glass tube is
The flare diameter Df is 0.911 mm, the flare length Lf is 3.0 mm, and the flare length Lf is not longer than 1/2 of the total length L, and the flare diameter Df alone is sufficiently large. Capillary 1 with 4 formed
Can be obtained.
【００２７】そして、この結果を線グラフにして示す
と、第１の工程と第２の工程を繰り返すことでフレア径
Ｄｆは、図３（ａ）に折れ線Ａ２で示すように順次増加
する変化を示すのに対し、フレア長Ｌｆは、折れ線Ｂ２
で示すように１回目の処理で約３ｍｍの長さとなってか
らは、ほとんど変化しないものとなっている。When the results are shown as a line graph, the flare diameter Df changes gradually as shown by the polygonal line A 2 in FIG. 3A by repeating the first step and the second step. While the flare length Lf is the polygonal line B 2
As shown in, after the length of the first treatment is about 3 mm, it hardly changes.
【００２８】なお、上記実施形態の第１の工程で４６％
の濃弗酸を用いたのは、後述する他の浸蝕性液体に比べ
てエッチング速度が早く、この濃度の濃弗酸はこう魚雨
滴に入手・管理しやすいためである。さらに、浸蝕性液
体として濃弗酸を用いたが、ガラス管の材料によって
は、ＨＦ−Ｈ２ＳＯ４（またはＨＣｌ、ＨＮＯ３、ＣＨ
３ＣＯＯＨ）−Ｈ２Ｏ系、ＮＨ４Ｆ−Ｈ２Ｏ系の浸蝕性
液体でもよい。これらの浸蝕性液体を使用した場合、弗
化水素以外の成分が入ることでエッチング面の性状が変
わり、つや消し状態とすることができる。またキャピラ
リ形成材として硼珪酸ガラスのガラス管を用いたが、ア
ルカリ珪酸塩ガラス、鉛ガラス、石英ガラス、非酸化物
ガラス等を用いてもよい。この場合、ガラス材質による
浸蝕されやすさ、浸蝕性液体の浸蝕性などによって、浸
蝕性液体の濃度・温度、浸漬時間等を調整して所望のフ
レア形状を得ることができる。In the first step of the above embodiment, 46%
Concentrated hydrofluoric acid was used compared to other corrosive liquids described later.
The etching rate is fast, and the concentrated hydrofluoric acid at this concentration is rainwater.
This is because it is easy to obtain and manage in drops. Furthermore, erosive liquid
Concentrated hydrofluoric acid was used as the body, but depending on the material of the glass tube
Is HF-HTwoSOFour(Or HCl, HNOThree, CH
ThreeCOOH) -HTwoO system, NHFourF-HTwoO-based erosion
It may be liquid. When using these corrosive liquids,
The properties of the etching surface change due to the inclusion of components other than hydrogen fluoride.
Instead, it can be frosted. Also capilla
Although a borosilicate glass tube was used as the reforming material,
Lucarisilicate glass, lead glass, quartz glass, non-oxide
You may use glass etc. In this case, depending on the glass material
Depending on the easiness of erosion and the erosiveness of erosive liquid,
Adjust the concentration, temperature, immersion time, etc. of the corrosive liquid to the desired flux.
A rare shape can be obtained.
【００２９】なおまた、上記実施形態の第１の工程での
濃弗酸への浸漬時間Ｔを１５分間としたが、１５分以
内、好ましい範囲としては１０分間〜１５分間でよく、
また第１回目の第１工程での浸漬時間Ｔを１０分間〜１
５分間とし、第２回目以降繰り返す第１の工程での浸漬
時間Ｔを適宜に設定してフレア形状を変えるようにして
もよい。またさらに、両端部にフレアを有するキャピラ
リを形成する場合には、２倍の長さのキャピラリ形成材
であるガラス管を用い、片端部に上記工程を繰り返すこ
とでフレアを形成した後、片端部外表面等を耐浸蝕性被
膜で覆ってから、他端部に上記工程を繰り返すことでフ
レアを形成する。Although the immersion time T in concentrated hydrofluoric acid in the first step of the above-mentioned embodiment is set to 15 minutes, it may be 15 minutes or less, preferably 10 to 15 minutes.
Further, the immersion time T in the first step of the first time is 10 minutes to 1
The flare shape may be changed by appropriately setting the immersion time T in the first step repeated for the second time and thereafter for 5 minutes. Furthermore, in the case of forming capillaries having flares on both ends, a glass tube, which is a material for forming a capillary having a double length, is used, and after flare is formed by repeating the above steps on one end, the one end is formed. After covering the outer surface and the like with an erosion resistant coating, flare is formed on the other end by repeating the above steps.
【００３０】[0030]
【発明の効果】以上の説明から明らかなように、本発明
によれば、光ファイバが挿入し易い比較的大きいフレア
径を有し、接着する光ファイバを正確に固定することが
できるよう適正なフレア長を有するキャピラリの作製が
効率よく、また再現性よく行え、量産に適する等の効果
を奏する。As is apparent from the above description, according to the present invention, the optical fiber has a relatively large flare diameter in which the optical fiber can be easily inserted, and the optical fiber to be bonded is properly fixed. Capillaries having a flare length can be produced efficiently and with good reproducibility, which is advantageous in mass production.
【図１】本発明に係るキャピラリの断面図である。FIG. 1 is a cross-sectional view of a capillary according to the present invention.
【図２】本発明に係る先行試験における浸漬時間に対す
るフレア径、フレア長の変化を示す図である。FIG. 2 is a diagram showing changes in flare diameter and flare length with respect to immersion time in a preceding test according to the present invention.
【図３】本発明における第１の工程と第２の工程を繰り
返し行った時のフレア径、フレア長の変化を示す図で、
図３（ａ）は累積浸漬時間に対するフレア径、フレア長
の変化を線グラフにして示す図、図３（ｂ）は処理回数
に対するフレア径、フレア長の変化を数値によって示す
図である。FIG. 3 is a diagram showing changes in flare diameter and flare length when the first step and the second step in the present invention are repeated.
FIG. 3A is a line graph showing changes in flare diameter and flare length with respect to cumulative immersion time, and FIG. 3B is a graph showing numerical changes in flare diameter and flare length with respect to the number of treatments.
１…キャピラリ ２…内孔 ３…端部 ４…フレア Ｄｆ…フレア径 Ｄｉ…内径 Ｄｏ…外径 Ｌ…全長 Ｌｆ…フレア長 1 ... Capillary 2 ... Inner hole 3 ... edge 4 ... flare Df ... flare diameter Di ... Inner diameter Do ... Outer diameter L ... Full length Lf ... flare length
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成１３年１２月１４日（２００１．１２．
１４）[Submission date] December 14, 2001 (2001.12.
14)
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】特許請求の範囲[Name of item to be amended] Claims
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【特許請求の範囲】[Claims]
【手続補正２】[Procedure Amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００４[Correction target item name] 0004
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００４】このため、量産に適する方法として、キャ
ピラリ形成材の端部を、例えばキャピラリ形成材がガラ
ス管である場合には、その端部を弗化水素（ＨＦ）によ
ってエッチング処理してフレアを得る化学的な処理方法
が考えられる。しかし、こうしたＨＦによる方法では、
ドリル研削と違い寸法精度が悪く、また再現性も悪くて
所望する形状を得ることが難しいものとなっていた。Therefore, as a method suitable for mass production, the end portion of the capillary forming material, for example, when the capillary forming material is a glass tube, is etched with hydrogen fluoride (HF) to remove flare. The chemical treatment method to be obtained is considered. However, in such an HF method,
Unlike drill grinding, dimensional accuracy was poor and reproducibility was poor, making it difficult to obtain a desired shape.
【手続補正３】[Procedure 3]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００８[Correction target item name] 0008
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００８】[0008]
【課題を解決するための手段】本発明のキャピラリの製
造方法は、ガラス管の微小径の内孔に、ガラス管材料を
浸蝕せずかつ該ガラス管材料の浸蝕性液体と反応しない
液体を充満させた後、前記ガラス管の一端面のみを前記
浸蝕性液体に一定時間浸す工程と、前記浸蝕性液体に浸
した後に前記ガラス管の内孔を洗浄する工程とをそれぞ
れ交互に複数回繰り返し、前記ガラス管の内孔の一端側
部分にフレア形状を形成するようにしたことを特徴とす
る方法であり、さらに、前記浸蝕性液体が弗酸であっ
て、ガラス管材料を浸蝕せずかつ該ガラス管材料の浸蝕
性液体と反応しない液体として水を用いたことを特徴と
する方法であり、さらに、１回目の浸蝕性液体に一定時
間浸す工程における浸漬時間が、１５分以内であること
を特徴とする方法である。According to the method of manufacturing a capillary of the present invention, a small diameter inner hole of a glass tube is filled with a liquid that does not corrode the glass tube material and does not react with the corrosive liquid of the glass tube material. After that, the step of immersing only one end surface of the glass tube in the erosive liquid for a certain time, and the step of cleaning the inner hole of the glass tube after immersing in the erosive liquid are alternately repeated a plurality of times, The method is characterized in that a flare shape is formed on one end side portion of the inner hole of the glass tube, and the corrosive liquid is hydrofluoric acid , which does not corrode the glass tube material and The method is characterized in that water is used as a liquid that does not react with the erosive liquid of the glass tube material, and that the immersion time in the first immersion in the erosive liquid for a certain time is within 15 minutes. In a characteristic way That.
【手続補正４】[Procedure amendment 4]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００２８[Correction target item name] 0028
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００２８】なお、上記実施形態の第１の工程で４６％
の濃弗酸を用いたのは、後述する他の浸蝕性液体に比べ
てエッチング速度が早く、この濃度の濃弗酸は工業的に
入手・管理しやすいためである。さらに、浸蝕性液体と
して濃弗酸を用いたが、ガラス管の材料によっては、Ｈ
Ｆ−Ｈ２ＳＯ４（またはＨＣｌ、ＨＮＯ３、ＣＨ３ＣＯ
ＯＨ）−Ｈ２Ｏ系、ＮＨ４Ｆ−Ｈ２Ｏ系の浸蝕性液体で
もよい。これらの浸蝕性液体を使用した場合、弗化水素
以外の成分が入ることでエッチング面の性状が変わり、
つや消し状態とすることができる。またキャピラリ形成
材として硼珪酸ガラスのガラス管を用いたが、アルカリ
珪酸塩ガラス、鉛ガラス、石英ガラス、非酸化物ガラス
等を用いてもよい。この場合、ガラス材質による浸蝕さ
れやすさ、浸蝕性液体の浸蝕性などによって、浸蝕性液
体の濃度・温度、浸漬時間等を調整して所望のフレア形
状を得ることができる。In the first step of the above embodiment, 46%
Concentrated hydrofluoric acid was used because it has a higher etching rate than other corrosive liquids described later, and this concentration of concentrated hydrofluoric acid is industrially easily available and controlled. Furthermore, concentrated hydrofluoric acid was used as the corrosive liquid, but depending on the material of the glass tube, H
F-H 2 SO 4 (or HCl, HNO 3, CH 3 CO
OH) -H 2 O system, it may be erodible liquid NH 4 F-H 2 O system. When these erosive liquids are used, the properties of the etching surface change due to the inclusion of components other than hydrogen fluoride,
It can be frosted. Although a glass tube of borosilicate glass is used as the capillary forming material, alkali silicate glass, lead glass, quartz glass, non-oxide glass, or the like may be used. In this case, the desired flare shape can be obtained by adjusting the concentration and temperature of the erosive liquid, the immersion time, etc., depending on the easiness of erosion due to the glass material, the erosiveness of the erosive liquid, and the like.
Claims (3)
料を浸蝕せずかつ該ガラス管材料の浸蝕性液体と反応し
ない液体を充満させた後、前記ガラス管の一端面のみを
前記浸蝕性液体に一定時間浸す工程と、前記浸蝕性液体
に浸した後に前記ガラス管の内孔を洗浄する工程とをそ
れぞれ交互に複数回繰り返し、前記ガラス管の内孔の一
端側部分にフレア形状を形成するようにしたことを特徴
とするキャピラリの製造方法。1. A small diameter inner hole of a glass tube is filled with a liquid that does not corrode the glass tube material and does not react with the corrosive liquid of the glass tube material, and then only one end surface of the glass tube is treated. The step of immersing in the erosive liquid for a certain period of time and the step of immersing in the erosive liquid and then cleaning the inner hole of the glass tube are alternately repeated a plurality of times, and flare shape is formed on one end side portion of the inner hole of the glass tube The method for producing a capillary is characterized in that
管材料を浸蝕せずかつ該ガラス管材料の浸蝕性液体と反
応しない液体として水を用いたことを特徴とする請求項
１記載のキャピラリの製造方法。2. The erodible liquid is hydrofluoric acid, and water is used as the liquid that does not erode the glass tube material and does not react with the erodible liquid of the glass tube material. Method for manufacturing capillaries.
における浸漬時間が、１５分以内であることを特徴とす
る請求項１記載のキャピラリの製造方法。3. The method for producing a capillary according to claim 1, wherein the immersion time in the first immersion in the erodible liquid for a certain time is within 15 minutes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001369489A JP2003167161A (en) | 2001-12-04 | 2001-12-04 | Manufacturing method for capillary |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001369489A JP2003167161A (en) | 2001-12-04 | 2001-12-04 | Manufacturing method for capillary |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003167161A true JP2003167161A (en) | 2003-06-13 |
Family
ID=19178872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001369489A Pending JP2003167161A (en) | 2001-12-04 | 2001-12-04 | Manufacturing method for capillary |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003167161A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102053302A (en) * | 2010-12-14 | 2011-05-11 | 南京师范大学 | Colloidal crystal-modified optical fiber microstructural device and manufacturing method thereof |
-
2001
- 2001-12-04 JP JP2001369489A patent/JP2003167161A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102053302A (en) * | 2010-12-14 | 2011-05-11 | 南京师范大学 | Colloidal crystal-modified optical fiber microstructural device and manufacturing method thereof |
| CN102053302B (en) * | 2010-12-14 | 2012-07-25 | 南京师范大学 | Colloidal crystal-modified optical fiber microstructural device and manufacturing method thereof |
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