JP2003164768A5 - - Google Patents

Description

[0015]
The invention according to claim 2 is characterized in that the liquid is ultrapure water, pure water, a liquid having a conductivity of 500 μS / cm or less, or an electrolytic solution. It is a method.
Here, ultrapure water is, for example, water having an electric conductivity (1 atom, 25 ° C. conversion value, the same applies hereinafter) is 0.1 μS / cm or less, and pure water is, for example, water having an electric conductivity of 10 μS / cm or less . Thus, by regenerating the ion exchanger using pure water, more preferably ultrapure water, as the liquid, clean regeneration can be performed without leaving impurities in the ion exchanger, thereby It is possible to simplify the washing and waste liquid treatment after the ion exchanger is regenerated.

[0018]
Here, the liquid may be ultrapure water, pure water, a liquid having an electric conductivity of 500 μS / cm or less, or an electrolytic solution.

[0020]
In the invention according to claim 5, when the treated ion exchanger and the regenerating ion exchanger are cation exchangers, the electrode disposed on the treated ion exchanger side is an anode, and the treated ion exchange is performed. when the body and the reproducing ion exchanger is an anion exchanger, electrodes disposed on the treated ion exchange side is a reproducing method according to claim 4 ion exchanger, wherein the a cathode.
For example, when a cation exchanger using a cation exchange group as an ion exchange group is regenerated, the cation exchanger (treated ion exchanger) is positioned on the anode side of the pair of electrodes and the regeneration ion exchanger is positioned on the cathode side. To do. That is, as shown in FIG. 2, the cation exchanger 30a as a treated ion exchanger to be subjected to regeneration and the regeneration ion exchanger 40 are a pair of electrodes consisting of the anode 32 and the cathode 34, and the anode 32 is cation exchanged. A voltage is applied from the regeneration power source 38 while being supplied from the liquid supply unit 36 between the anode 32 and the cathode 34 so as to be positioned on the body (target ion exchanger) 30 a side. Then, the ions M ⁺ of the cation exchanger (treated ion exchanger) 30a move to the regeneration ion exchanger 40 side, and the cation exchanger (treated ion exchanger) 30a is regenerated.

[0023]
The invention according to claim 7 is characterized in that the liquid is ultrapure water, pure water, a liquid having a conductivity of 500 μS / cm or less, or an electrolytic solution. It is an apparatus.

[0025]
Here, the liquid may be ultrapure water, pure water, a liquid having an electric conductivity of 500 μS / cm or less, or an electrolytic solution.
The invention as set forth in claim 9 is that the regeneration ion exchanger has an ion exchange group of the same polarity as that of the treated ion exchanger, the regeneration device of an ion exchanger as set forth in claim 9 or 10 It is.
In the invention according to claim 10, when the treated ion exchanger and the regenerating ion exchanger are cation exchangers, the electrode disposed on the treated ion exchanger side is an anode, and the treated ion exchange is performed. 10. The apparatus for regenerating an ion exchanger according to claim 9, wherein when the body and the regeneration ion exchanger are anion exchangers, the electrode disposed on the side of the treated ion exchanger is a cathode.

Claims (12)

In regenerating ion exchangers used for electrolytic processing,
Placing the treated ion exchanger to be regenerated between the pair of electrodes;
A method for regenerating an ion exchanger characterized in that a voltage is applied to regenerate the treated ion exchanger while supplying a liquid between the electrodes. The method for regenerating an ion exchanger according to claim 1, wherein the liquid is ultrapure water, pure water, a liquid having a conductivity of 500 μS / cm or less, or an electrolytic solution. The method for regenerating an ion exchanger according to claim 1 or 2, further comprising a regeneration ion exchanger between the treated ion exchanger and the electrode. The method for regenerating an ion exchanger according to claim 3, wherein the treated ion exchanger and the regeneration ion exchanger have ion exchange groups of the same polarity. When said object to be processed ion exchangers and the reproducing ion exchanger is a cation exchanger, electrodes disposed on the treated ion exchange side is an anode, the object to be processed ion exchanger and the reproducing ion exchanger shade 5. The method for regenerating an ion exchanger according to claim 4, wherein when the ion exchanger is used, the electrode disposed on the side of the treated ion exchanger is a cathode. An ion exchanger regenerating apparatus for regenerating an ion exchanger used for coating and electrolytically processing an electrode plate, comprising:
A regeneration unit having a regeneration electrode;
A regeneration power source in which a treated ion exchanger to be subjected to regeneration is positioned between the electrode plate and the regeneration electrode and a voltage is applied between the electrode plate and the regeneration electrode;
An apparatus for regenerating an ion exchanger, comprising a liquid supply unit for supplying a liquid between the electrode plate and the regenerating electrode. The apparatus for regenerating an ion exchanger according to claim 6, wherein the liquid is ultrapure water, pure water, a liquid having a conductivity of 500 μS / cm or less, or an electrolytic solution. 8. The apparatus for regenerating an ion exchanger according to claim 6, further comprising a regeneration ion exchanger between the treated ion exchanger and the regeneration electrode. 9. The apparatus for regenerating an ion exchanger according to claim 8, wherein the regeneration ion exchanger has an ion exchange group of the same polarity as the treated ion exchanger. When the treated ion exchanger and the regeneration ion exchanger are cation exchangers, the electrode disposed on the treated ion exchanger side is an anode, and the treated ion exchanger and the regeneration ion exchanger are negative. 10. The apparatus for regenerating an ion exchanger according to claim 9, wherein when the ion exchanger is used, the electrode disposed on the side of the treated ion exchanger is a cathode. 11. The ion exchange according to any one of claims 6 to 10, wherein at least one of the treated ion exchanger or the regeneration ion exchanger is formed by laminating a plurality of ion exchange materials. Body playback device. 12. The apparatus according to any one of claims 6 to 11, further comprising a monitor unit that monitors at least one of an electrolysis current and an electrolysis time or an electric quantity when a voltage is applied between the electrode plate and the regeneration electrode. The regeneration device of the ion exchanger as described.