JP2003146705A - Method for chemically strengthened glass substrate for information recording medium - Google Patents
Method for chemically strengthened glass substrate for information recording mediumInfo
- Publication number
- JP2003146705A JP2003146705A JP2001345182A JP2001345182A JP2003146705A JP 2003146705 A JP2003146705 A JP 2003146705A JP 2001345182 A JP2001345182 A JP 2001345182A JP 2001345182 A JP2001345182 A JP 2001345182A JP 2003146705 A JP2003146705 A JP 2003146705A
- Authority
- JP
- Japan
- Prior art keywords
- chemical strengthening
- glass substrate
- strengthening treatment
- treatment liquid
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Surface Treatment Of Glass (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、磁気ディスク、光
磁気ディスク、光ディスク等の情報記録媒体に用いられ
る情報記録媒体用ガラス基板の化学強化処理方法に関す
るものである。より具体的には、ガラス基板の化学強化
処理を繰返して行っても化学強化処理後のガラス基板の
強度を維持することができるとともに、安定した品質の
ガラス基板が得られる情報記録媒体用ガラス基板の化学
強化処理方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for chemically strengthening a glass substrate for an information recording medium used for an information recording medium such as a magnetic disk, a magneto-optical disk, an optical disk. More specifically, the glass substrate for an information recording medium is capable of maintaining the strength of the glass substrate after the chemical strengthening treatment even if the chemical strengthening treatment of the glass substrate is repeatedly performed and obtaining a glass substrate of stable quality. The present invention relates to a chemical strengthening treatment method of.
【０００２】[0002]
【従来の技術】従来、磁気ディスク、光磁気ディスク、
光ディスク等の情報記録媒体に用いられるガラス基板
は、基板として所望される強度を得るために、化学強化
処理方法によってその表面が化学強化処理されている。
従来の化学強化処理方法では、例えば加熱溶融した硝酸
カリウム（ＫＮＯ3）と硝酸ナトリウム（ＮａＮＯ3）と
から構成される溶融塩の溶液等の化学強化処理液にガラ
ス基板を所定時間浸漬する。そして、ガラス基板中の表
面近傍に存在するリチウムイオン（Ｌｉ+）やナトリウ
ムイオン（Ｎａ+）をこれらよりイオン半径の大きいＮ
ａ+やカリウムイオン（Ｋ+）にイオン交換することによ
り行われる。このため、化学強化処理されたガラス基板
の表面は、圧縮応力が作用することにより化学強化され
ている。2. Description of the Related Art Conventionally, magnetic disks, magneto-optical disks,
The surface of a glass substrate used for an information recording medium such as an optical disk is chemically strengthened by a chemical strengthening treatment method in order to obtain the strength desired as the substrate.
In a conventional chemical strengthening treatment method, a glass substrate is immersed for a predetermined time in a chemical strengthening treatment liquid such as a molten salt solution composed of, for example, heat-melted potassium nitrate (KNO 3 ) and sodium nitrate (NaNO 3 ). Then, lithium ions (Li + ) and sodium ions (Na + ) existing in the vicinity of the surface of the glass substrate are treated with N having a larger ionic radius than these.
It is carried out by ion-exchange with a + or potassium ion (K + ). Therefore, the surface of the chemically strengthened glass substrate is chemically strengthened by the action of compressive stress.
【０００３】[0003]
【発明が解決しようとする課題】ところが、この従来の
化学強化処理方法においては、同じ化学強化処理液を使
用してガラス基板の化学強化処理を繰返して行うと、イ
オン交換されることによって化学強化処理液中のＫ+濃
度は減少する。一方、ガラス基板と化学強化処理液との
間でＮａ+の入替えが行われるために、化学強化処理液
中のＮａ+濃度は相対的に変化する。また、ガラス基板
からＬｉ+が化学強化処理液中に放出されるために、化
学強化処理液中のＬｉ+濃度は増加する。However, in the conventional chemical strengthening treatment method, when the chemical strengthening treatment of the glass substrate is repeatedly performed using the same chemical strengthening treatment liquid, the chemical strengthening is caused by ion exchange. The K + concentration in the processing solution decreases. On the other hand, since Na + is exchanged between the glass substrate and the chemical strengthening treatment liquid, the Na + concentration in the chemical strengthening treatment liquid changes relatively. Further, since Li + is released from the glass substrate into the chemical strengthening treatment liquid, the Li + concentration in the chemical strengthening treatment liquid increases.
【０００４】従って、化学強化処理の頻度の高い化学強
化処理液によって化学強化処理されたガラス基板は、化
学強化処理液中のＫ+が少ないとともに、化学強化処理
液中の多量のＬｉ+によってイオン交換が阻害されて十
分に化学強化処理されないために、基板として所望され
る強度が得られないという問題があった。このため、複
数のガラス基板を繰返して化学強化処理するときには、
化学強化処理の頻度によって化学強化処理されたガラス
基板の強度の程度にばらつきが生じ、安定した品質のガ
ラス基板を得ることができないという問題があった。Therefore, a glass substrate chemically strengthened by a chemical strengthening treatment liquid having a high frequency of chemical strengthening treatment has a small amount of K + in the chemical strengthening treatment liquid, and a large amount of Li + in the chemical strengthening treatment liquid causes ions to be generated. Since the exchange is hindered and the chemical strengthening treatment is not sufficiently performed, there is a problem that the strength desired as the substrate cannot be obtained. Therefore, when repeatedly chemically strengthening a plurality of glass substrates,
There is a problem in that the strength of the chemically strengthened glass substrate varies depending on the frequency of the chemical strengthening treatment, and a glass substrate of stable quality cannot be obtained.
【０００５】本発明は、上記のような従来技術に存在す
る問題点に着目してなされたものである。その目的とす
るところは、ガラス基板の化学強化処理を繰返して行っ
ても化学強化処理後のガラス基板の強度を維持すること
ができるとともに、安定した品質のガラス基板が得られ
る情報記録媒体用ガラス基板の化学強化処理方法を提供
することにある。The present invention has been made by paying attention to the problems existing in the prior art as described above. The purpose of the glass for information recording medium is to maintain the strength of the glass substrate after the chemical strengthening treatment even if the chemical strengthening treatment of the glass substrate is repeated and to obtain a glass substrate of stable quality. It is to provide a method for chemically strengthening a substrate.
【０００６】[0006]
【課題を解決するための手段】上記の目的を達成するた
めに、請求項１に記載の発明の情報記録媒体用ガラス基
板の化学強化処理方法は、加熱溶融した化学強化処理液
にガラス基板を浸漬し、ガラス基板中の表面近傍に存在
するリチウムイオン及びナトリウムイオンと、化学強化
処理液に含有され、リチウムイオン又はナトリウムイオ
ンよりもイオン半径の大きい一価の金属イオンとをイオ
ン交換してガラス基板を化学強化処理した後に、ガラス
基板を化学強化処理液から取出し、新たなガラス基板を
化学強化処理液に浸漬することにより、複数のガラス基
板を繰返して化学強化処理する情報記録媒体用ガラス基
板の化学強化処理方法であって、化学強化処理液中のリ
チウムイオン濃度に基づいて化学強化処理液を新たな化
学強化処理液に交換するものである。In order to achieve the above object, the method for chemically strengthening a glass substrate for an information recording medium according to the first aspect of the invention is a method for chemically strengthening a glass substrate by heating and melting it. Immersion and ion exchange of lithium ions and sodium ions existing near the surface of the glass substrate with monovalent metal ions contained in the chemical strengthening treatment solution and having a larger ionic radius than lithium ions or sodium ions A glass substrate for an information recording medium in which a plurality of glass substrates are repeatedly subjected to chemical strengthening treatment by taking out the glass substrate from the chemical strengthening treatment liquid after chemically strengthening the substrate and immersing a new glass substrate in the chemical strengthening treatment liquid. The chemical strengthening treatment method described above is based on the concentration of lithium ions in the chemical strengthening treatment liquid, and the chemical strengthening treatment liquid is replaced with a new chemical strengthening treatment liquid. It is intended to.
【０００７】請求項２に記載の発明の情報記録媒体用ガ
ラス基板の化学強化処理方法は、請求項１に記載の発明
において、前記化学強化処理液は、その中のリチウムイ
オン濃度が化学強化処理液に対して０．０７〜０．０９
重量％の範囲に到ったときに新たな化学強化処理液に交
換されるものである。According to a second aspect of the present invention, there is provided a method of chemically strengthening a glass substrate for an information recording medium according to the first aspect of the invention, wherein the chemical strengthening treatment liquid has a lithium ion concentration of chemical strengthening treatment. 0.07 to 0.09 for liquid
When it reaches the range of weight%, it is replaced with a new chemical strengthening treatment liquid.
【０００８】請求項３に記載の発明の情報記録媒体用ガ
ラス基板の化学強化処理方法は、請求項１又は請求項２
に記載の発明において、前記化学強化処理液中には複数
のガラス基板が並んだ状態で浸漬され、対向するガラス
基板間の化学強化処理液の量は、ガラス基板の表面積に
対して１．４〜７１ｇ／ｃｍ2の範囲に設定されている
ものである。The method for chemically strengthening a glass substrate for an information recording medium according to the invention of claim 3 is the method of claim 1 or claim 2.
In the invention described in (1), a plurality of glass substrates are immersed in the chemical strengthening treatment liquid in a line, and the amount of the chemical strengthening treatment liquid between the facing glass substrates is 1.4 with respect to the surface area of the glass substrate. It is set in the range of to 71 g / cm 2 .
【０００９】[0009]
【発明の実施の形態】以下、本発明の実施形態を図面に
基づいて詳細に説明する。ガラス基板は、中央に円孔を
有したドーナツ板状をなし、磁気ディスク、光磁気ディ
スク、光ディスク等の情報記録媒体の基板として使用さ
れるものである。ガラス基板を形成するガラス材料とし
ては、二酸化ケイ素（ＳｉＯ2）、酸化ナトリウム（Ｎ
ａ2Ｏ）、酸化カルシウム（ＣａＯ）を主成分としたソ
ーダライムガラス、ＳｉＯ2、酸化アルミニウム（Ａｌ2
Ｏ3）、Ｒ2Ｏ（Ｒ＝カリウム（Ｋ）、ナトリウム（Ｎ
ａ）、リチウム（Ｌｉ））を主成分としたアルミノシリ
ケートガラス、ボロシリケートガラス、酸化リチウム
（Ｌｉ2Ｏ）−ＳｉＯ2系ガラス、Ｌｉ2Ｏ−Ａｌ2Ｏ3−
ＳｉＯ2系ガラス、Ｒ’Ｏ−Ａｌ2Ｏ3−ＳｉＯ2系ガラス
（Ｒ’＝マグネシウム（Ｍｇ）、カルシウム（Ｃａ）、
ストロンチウム（Ｓｒ）、バリウム（Ｂａ））を使用す
ることができ、これらガラス材料に酸化ジルコニウム
（ＺｒＯ2）や酸化チタン（ＴｉＯ2）等を添加した化学
強化用ガラスであれば特に限定されない。そして、ガラ
ス基板は、例えば外径が９５ｍｍ、８４ｍｍ、６５ｍｍ
等に形成されるとともに、その厚みは０．６３ｍｍ等に
形成される。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below in detail with reference to the drawings. The glass substrate has a donut plate shape having a circular hole in the center and is used as a substrate for information recording media such as magnetic disks, magneto-optical disks, and optical disks. The glass material forming the glass substrate includes silicon dioxide (SiO 2 ), sodium oxide (N 2
a 2 O), soda lime glass containing calcium oxide (CaO) as a main component, SiO 2 , aluminum oxide (Al 2 O
O 3 ), R 2 O (R = potassium (K), sodium (N
a), aluminosilicate glass containing lithium (Li) as a main component, borosilicate glass, lithium oxide (Li 2 O) -SiO 2 system glass, Li 2 O-Al 2 O 3-.
SiO 2 based glass, R'O-Al 2 O 3 -SiO 2 based glass (R '= magnesium (Mg), calcium (Ca),
Strontium (Sr), barium (Ba)) can be used, and it is not particularly limited as long as it is a glass for chemical strengthening in which zirconium oxide (ZrO 2 ) or titanium oxide (TiO 2 ) is added to these glass materials. The glass substrate has, for example, an outer diameter of 95 mm, 84 mm, or 65 mm.
Etc., and the thickness thereof is formed to 0.63 mm or the like.
【００１０】次に、このガラス基板の化学強化処理方法
について説明する。ガラス基板を化学強化処理するとき
には、まず、ガラス基板の化学強化処理を行うための図
示しない化学強化槽内に、溶融塩を加熱溶融することに
より得られる化学強化処理液を貯留する。溶融塩の具体
例としては、ＫＮＯ3、ＮａＮＯ3、硝酸銀（ＡｇＮ
Ｏ3）等をそれぞれ単独、あるいは少なくとも２種を混
合したものが挙げられる。この化学強化処理液は、化学
強化槽の周囲に配設されたヒーターによって加熱されて
いる。Next, a method for chemically strengthening the glass substrate will be described. When chemically strengthening a glass substrate, first, a chemical strengthening treatment liquid obtained by heating and melting a molten salt is stored in a chemical strengthening tank (not shown) for chemically strengthening the glass substrate. Specific examples of the molten salt include KNO 3 , NaNO 3 , and silver nitrate (AgN
O 3 ) and the like may be used alone or as a mixture of at least two kinds. The chemical strengthening treatment liquid is heated by a heater arranged around the chemical strengthening tank.
【００１１】このときの化学強化処理液の温度は、ガラ
ス基板を形成するガラス材料の歪点よりも好ましくは５
０〜１５０℃程度低い温度であり、より好ましくは化学
強化処理液自体の温度が３５０〜４００℃程度である。
ガラス材料の歪点よりも１５０℃程度低い温度未満で
は、ガラス基板を十分に化学強化処理することができな
い。一方、ガラス材料の歪点よりも５０℃程度低い温度
を超えると、ガラス基板を化学強化処理するときに、ガ
ラス基板に歪みが発生しやすい。The temperature of the chemical strengthening treatment liquid at this time is preferably 5 or more than the strain point of the glass material forming the glass substrate.
The temperature is about 0 to 150 ° C. lower, and more preferably the temperature of the chemical strengthening treatment liquid itself is about 350 to 400 ° C.
If the temperature is lower than the strain point of the glass material by about 150 ° C., the glass substrate cannot be sufficiently chemically strengthened. On the other hand, when the temperature exceeds the strain point of the glass material by about 50 ° C., the glass substrate is likely to be distorted when the glass substrate is chemically strengthened.
【００１２】一方、図１（ａ）及び図１（ｂ）に示すよ
うに、ガラス基板１１は、複数枚が垂立するとともに並
んだ状態で化学強化用ホルダー１２にそれぞれ保持さ
れ、複数個の化学強化用ホルダー１２が図示しないケー
ジ内に収容される。このとき、各ガラス基板１１は、化
学強化用ホルダー１２に取付けられた支持部材１３によ
って一定間隔毎に支持されている。そして、ケージを化
学強化槽内に投入することにより、ガラス基板１１は化
学強化用ホルダー１２及びケージとともに化学強化処理
液１４に所定時間浸漬される。On the other hand, as shown in FIGS. 1 (a) and 1 (b), a plurality of glass substrates 11 are held upright and aligned in a chemical strengthening holder 12, respectively. The chemical strengthening holder 12 is housed in a cage (not shown). At this time, each glass substrate 11 is supported by the support member 13 attached to the chemical strengthening holder 12 at regular intervals. Then, the cage is put into the chemical strengthening tank, so that the glass substrate 11 is immersed in the chemical strengthening treatment liquid 14 together with the chemical strengthening holder 12 and the cage for a predetermined time.
【００１３】このとき、例えば化学強化処理液１４がＫ
ＮＯ3とＮａＮＯ3とから構成されているときには、各ガ
ラス基板１１中の表面近傍に存在するＬｉ+は化学強化
処理液１４中のＮａ+やＫ+にイオン交換される。また、
Ｎａ+は化学強化処理液１４中のＫ+にイオン交換され
る。このため、図１（ａ）の矢視線で示すように、化学
強化処理液１４中にはイオン交換によってＫ+に交換さ
れたＬｉ+やＮａ+が放出され、特に放出されたＬｉ+に
よってイオン交換は阻害される。At this time, for example, the chemical strengthening treatment liquid 14 is K
When it is composed of NO 3 and NaNO 3 , Li + existing near the surface of each glass substrate 11 is ion-exchanged with Na + or K + in the chemical strengthening treatment liquid 14. Also,
Na + is ion-exchanged with K + in the chemical strengthening treatment liquid 14. Therefore, as shown by the arrow line in FIG. 1 (a), during the chemical strengthening treatment liquid 14 is released Li + or Na + exchanged to K + through ion exchange, ion by Li + that is especially released Exchange is hindered.
【００１４】ガラス基板１１は、このイオン交換により
その表面の圧縮応力が高められることによって、情報記
録媒体として使用されるときに、高速回転による破損を
防止することができる強度にまで化学強化処理される。The glass substrate 11 is chemically strengthened to a strength capable of preventing damage due to high-speed rotation when it is used as an information recording medium because the compressive stress on the surface thereof is increased by the ion exchange. It
【００１５】対向するガラス基板１１間において、ガラ
ス基板１１の表面積に対する化学強化処理液１４の量Ａ
（ｇ／ｃｍ2）は、対向するガラス基板１１間の距離Ｂ
（ｃｍ）と化学強化処理液１４の密度Ｃ（ｇ／ｃｍ3）
とから下記式（１）により求められる。Between the glass substrates 11 facing each other, the amount A of the chemical strengthening treatment liquid 14 with respect to the surface area of the glass substrate 11
(G / cm 2 ) is the distance B between the opposing glass substrates 11.
(Cm) and the density C (g / cm 3 ) of the chemical strengthening treatment liquid 14
It is calculated from the following equation (1).
【００１６】Ａ＝Ｂ×Ｃ …（１）
上記式（１）により求められる値Ａは、化学強化処理さ
れる各ガラス基板１１の化学強化の安定性を示してい
る。この値Ａが小さいとき、例えば対向するガラス基板
１１間の距離Ｂが短いときには、化学強化処理の頻度の
増大に伴ってガラス基板１１表面に接する化学強化処理
液１４中のＫ+が不足するために、イオン交換の頻度が
低下する。さらに、放出されたＬｉ+によってイオン交
換が阻害される。よって、イオン交換の連続性及び持続
性が低下するために、ガラス基板１１の化学強化の安定
性が低下する。A = B × C (1) The value A obtained by the above equation (1) indicates the stability of chemical strengthening of each glass substrate 11 to be chemically strengthened. When this value A is small, for example, when the distance B between the opposing glass substrates 11 is short, K + in the chemical strengthening treatment liquid 14 contacting the surface of the glass substrate 11 becomes insufficient as the frequency of the chemical strengthening treatment increases. Moreover, the frequency of ion exchange is reduced. Furthermore, the released Li + inhibits the ion exchange. Therefore, the continuity and durability of the ion exchange are reduced, and thus the stability of the chemical strengthening of the glass substrate 11 is reduced.
【００１７】このため、値Ａは好ましくは１．４〜７１
ｇ／ｃｍ2、より好ましくは２．０〜５０ｇ／ｃｍ2、さ
らに好ましくは３〜１０ｇ／ｃｍ2である。例えば距離
Ｂが０．７ｃｍに設定されるとともに、密度Ｃが２．２
ｇ／ｃｍ3となるようにＫＮＯ3（密度２．１ｇ／ｃ
ｍ3）及びＮａＮＯ3（密度２．３ｇ／ｃｍ3）が混合さ
れて化学強化処理液１４が構成されるときには、上記式
（１）より値Ａは１．５４ｇ／ｃｍ2となる。For this reason, the value A is preferably 1.4 to 71.
g / cm 2, more preferably 2.0~50g / cm 2, more preferably from 3 to 10 g / cm 2. For example, the distance B is set to 0.7 cm and the density C is 2.2.
g / cm 3 and so as to KNO 3 (density 2.1 g / c
When m 3 ) and NaNO 3 (density 2.3 g / cm 3 ) are mixed to form the chemical strengthening treatment liquid 14, the value A is 1.54 g / cm 2 from the above formula (1).
【００１８】値Ａが１．４ｇ／ｃｍ2未満では、対向す
るガラス基板１１間に存在する化学強化処理液１４の量
Ａが不足するために、ガラス基板１１を化学強化処理す
る化学強化処理頻度（所定の強度が得られる処理バッチ
数）が小さくなりやすい。このため、頻繁に化学強化処
理液１４の交換作業を行う必要が生じて生産効率が低下
しやすい。また、距離Ｂが短くなると、ガラス基板１１
間の化学強化処理液１４の流れが小さくなり、イオン交
換が阻害されやすい。When the value A is less than 1.4 g / cm 2 , the amount A of the chemical strengthening treatment liquid 14 existing between the glass substrates 11 facing each other is insufficient, and therefore the frequency of the chemical strengthening treatment for chemically strengthening the glass substrate 11 is performed. (The number of processing batches that give a predetermined strength) tends to be small. For this reason, it becomes necessary to frequently replace the chemical strengthening treatment liquid 14, and the production efficiency tends to decrease. Further, when the distance B becomes short, the glass substrate 11
The flow of the chemical strengthening treatment liquid 14 during that time becomes small, and the ion exchange is likely to be hindered.
【００１９】一方、７１ｇ／ｃｍ2を超えると、距離Ｂ
が大きくなるために、化学強化用ホルダー１２に保持さ
れるガラス基板１１の枚数が少なくなる。このため、一
度に化学強化処理することができるガラス基板１１の枚
数が減少するとともに、化学強化処理コストが増加しや
すい。On the other hand, if it exceeds 71 g / cm 2 , the distance B
Is larger, the number of glass substrates 11 held in the chemical strengthening holder 12 is smaller. Therefore, the number of glass substrates 11 that can be chemically strengthened at one time is reduced, and the cost of chemical strengthening is likely to increase.
【００２０】さらに、化学強化槽において、ガラス基板
１１の表面積に対する化学強化処理液１４の量Ｄ（ｇ／
ｃｍ2）は、化学強化槽内の化学強化処理液１４の量Ｅ
（ｇ）と、一枚のガラス基板１１の表面積Ｆ（ｃｍ2）
と、一度に化学強化処理されるガラス基板１１の枚数Ｇ
（枚）とから下記式（２）により求められる。Further, in the chemical strengthening tank, the amount D (g / g) of the chemical strengthening treatment liquid 14 with respect to the surface area of the glass substrate 11 is
cm 2 ) is the amount E of the chemical strengthening treatment liquid 14 in the chemical strengthening tank
(G) and the surface area F (cm 2 ) of one glass substrate 11
And the number of glass substrates 11 to be chemically strengthened at one time G
(Sheet) and the following equation (2).
【００２１】Ｄ＝Ｅ／（Ｆ×Ｇ） …（２）
上記式（２）により求められる値Ｄは、化学強化処理液
１４の寿命又は化学強化処理を行うために必要な化学強
化槽の大きさを示している。この値Ｄが小さいとき、例
えば化学強化処理液１４の量Ｅが少ないときには、化学
強化処理液１４中のＫ+の不足及び放出されたＬｉ+によ
るイオン交換の阻害による化学強化の不足が早く起き
る。このため、化学強化処理液１４の寿命が短くなる。
一方、値Ｄが大きいとき、例えば化学強化処理液１４の
量Ｅが多いときには、化学強化処理液１４を貯留する化
学強化槽を大きくする必要があるとともに、化学強化処
理コストが増加する。D = E / (F × G) (2) The value D obtained by the above equation (2) is the life of the chemical strengthening treatment liquid 14 or the size of the chemical strengthening tank necessary for performing the chemical strengthening treatment. Is showing. When this value D is small, for example, when the amount E of the chemical strengthening treatment liquid 14 is small, a shortage of K + in the chemical strengthening treatment liquid 14 and a shortage of chemical strengthening due to inhibition of ion exchange by released Li + occur quickly. . Therefore, the life of the chemical strengthening treatment liquid 14 is shortened.
On the other hand, when the value D is large, for example, when the amount E of the chemical strengthening treatment liquid 14 is large, it is necessary to enlarge the chemical strengthening tank for storing the chemical strengthening treatment liquid 14, and the chemical strengthening treatment cost increases.
【００２２】このため、値Ｄは好ましくは３〜８ｇ／ｃ
ｍ2である。例えば、外径９５ｍｍ、厚み０．６３ｍｍ
に形成されたガラス基板１１（表面積Ｆは１０１．１３
ｃｍ 2）が化学強化処理されるときに、化学強化処理液
１４の量Ｅを８６８ｋｇとする。さらに、枚数Ｇを２０
００枚と設定したときには、上記式（２）より値Ｄは
４．２９ｇ／ｃｍ2となる。For this reason, the value D is preferably 3 to 8 g / c.
m2Is. For example, outer diameter 95 mm, thickness 0.63 mm
The glass substrate 11 (the surface area F is 101.13
cm 2) Is chemically strengthened, the chemical strengthening treatment liquid
The amount E of 14 is 868 kg. Furthermore, the number of sheets G is 20
When set to 00, the value D is calculated from the above equation (2).
4.29 g / cm2Becomes
【００２３】値Ｄが３ｇ／ｃｍ2未満では、化学強化処
理液１４の量Ｅが不足するために、ガラス基板１１を十
分に化学強化することができない。一方、８ｇ／ｃｍ2
を超えてもそれ以上イオン交換に寄与しにくい。さら
に、化学強化処理液１４の量Ｅが多くなるために化学強
化槽を大きくする必要があり、化学強化処理コストが増
加しやすい。When the value D is less than 3 g / cm 2 , the glass substrate 11 cannot be sufficiently chemically strengthened because the amount E of the chemical strengthening treatment liquid 14 is insufficient. On the other hand, 8 g / cm 2
Even if it exceeds, it is difficult to further contribute to ion exchange. Further, since the amount E of the chemical strengthening treatment liquid 14 increases, it is necessary to enlarge the chemical strengthening tank, and the chemical strengthening treatment cost tends to increase.
【００２４】そして、各ガラス基板１１の化学強化処理
後にケージを化学強化槽から取出し、各ガラス基板１１
をそれぞれ所定時間徐冷する。一方、複数枚の新たなガ
ラス基板１１を保持した化学強化用ホルダー１２が収容
されたケージを化学強化槽内に投入し、前述と同様にし
て各ガラス基板１１を化学強化処理することにより、複
数枚のガラス基板１１の化学強化処理が繰返して行われ
るように構成されている。After the chemical strengthening treatment of each glass substrate 11, the cage is taken out from the chemical strengthening tank, and each glass substrate 11 is removed.
Each is gradually cooled for a predetermined time. On the other hand, a cage containing a chemical strengthening holder 12 holding a plurality of new glass substrates 11 is placed in the chemical strengthening tank, and each glass substrate 11 is chemically strengthened in the same manner as described above. The chemical strengthening process of the glass substrates 11 is repeatedly performed.
【００２５】このため、化学強化処理されたガラス基板
１１の枚数が増加するに伴い、化学強化処理液１４中の
Ｋ+濃度は減少するとともにＬｉ+濃度は増加する。ま
た、ガラス基板１１と化学強化処理液１４との間でＮａ
+の入替えが行われるために、化学強化処理液１４中の
Ｎａ+濃度は変動する。Therefore, as the number of chemically strengthened glass substrates 11 increases, the K + concentration in the chemical strengthening treatment liquid 14 decreases and the Li + concentration increases. In addition, Na is added between the glass substrate 11 and the chemical strengthening treatment liquid 14.
Since the + is replaced, the Na + concentration in the chemical strengthening treatment liquid 14 changes.
【００２６】よって、化学強化処理液１４は、そのＬｉ
+濃度が増加して化学強化処理液１４に対して好ましく
は０．０７〜０．０９重量％の範囲に到ったときには、
新たな化学強化処理液１４に交換されるように構成され
ている。０．０７重量％未満では、イオン交換能が十分
にあり、基板として所望される強度をガラス基板１１に
付与できる状態の化学強化処理液１４を破棄することに
より、ガラス基板１１の化学強化処理コストが増大しや
すい。また、化学強化処理液１４の交換頻度が多くなる
ために手間がかかりやすい。Therefore, the chemical strengthening treatment liquid 14 is
When the + concentration increases to reach the range of preferably 0.07 to 0.09% by weight with respect to the chemical strengthening treatment liquid 14,
It is configured to be replaced with a new chemical strengthening treatment liquid 14. If it is less than 0.07% by weight, the chemical strengthening treatment cost of the glass substrate 11 can be reduced by discarding the chemical strengthening treatment liquid 14 which has a sufficient ion exchange capacity and can impart the desired strength to the glass substrate 11. Is easy to increase. Moreover, since the frequency of exchanging the chemical strengthening treatment liquid 14 increases, it is easy to take time and effort.
【００２７】一方、０．０９重量％を超えると、化学強
化処理液１４中のＬｉ+によってイオン交換が阻害され
る場合があるために、イオン交換が不均一になりやす
い。よって、ガラス基板１１の化学強化処理を安定して
行いにくい。On the other hand, if it exceeds 0.09% by weight, Li + in the chemical strengthening treatment liquid 14 may hinder the ion exchange, so that the ion exchange tends to be non-uniform. Therefore, it is difficult to stably perform the chemical strengthening treatment of the glass substrate 11.
【００２８】この化学強化処理液１４の交換によって、
ガラス基板１１が繰返して化学強化処理されても、各ガ
ラス基板１１の強度が基板として所望される強度、例え
ば外径６５ｍｍ、厚み０．６３ｍｍに形成されたガラス
基板１１では９８Ｎを維持することができるようになっ
ている。By exchanging the chemical strengthening treatment liquid 14,
Even if the glass substrate 11 is repeatedly subjected to the chemical strengthening treatment, the strength of each glass substrate 11 desired to be a substrate, for example, 98N can be maintained for the glass substrate 11 formed to have an outer diameter of 65 mm and a thickness of 0.63 mm. You can do it.
【００２９】例えば、外径６５ｍｍ、厚み０．６３ｍｍ
に形成されたガラス基板１１を複数枚繰返して化学強化
処理するときには、図２の実線ａに示すように、ガラス
基板１１の化学強化処理枚数が増加するに伴い、ＩＣＰ
（誘導結合高周波プラズマ分光分析法）や原子吸光法等
によって測定された化学強化処理液１４中のＬｉ+濃度
は増加する。For example, the outer diameter is 65 mm and the thickness is 0.63 mm.
When a plurality of the glass substrates 11 formed in the above are repeatedly subjected to the chemical strengthening treatment, as shown by the solid line a in FIG.
The Li + concentration in the chemical strengthening treatment liquid 14 measured by (inductively coupled high frequency plasma spectroscopy) or atomic absorption method increases.
【００３０】このＬｉ+濃度の増加に伴ってイオン交換
が阻害される頻度が増加するために、ガラス基板１１の
化学強化処理の程度が低下する。よって、図２の実線ｂ
に示すように、ガラス基板１１の処理枚数が増加するに
伴い、化学強化処理されたガラス基板１１の破壊強度が
減少する。Since the frequency with which the ion exchange is inhibited increases as the Li + concentration increases, the degree of chemical strengthening treatment of the glass substrate 11 decreases. Therefore, the solid line b in FIG.
As shown in, the breaking strength of the chemically strengthened glass substrate 11 decreases as the number of processed glass substrates 11 increases.
【００３１】ここで、ガラス基板１１の破壊強度の測定
法について説明する。尚、以下の説明における上下左右
は、図３における上下左右を基準にする。図３に示すよ
うに、ガラス基板１１の破壊強度を測定するための破壊
強度測定装置１５を構成する四角板状の第１荷重板１６
は、その下部に取付けられた第１支柱１７を介して図示
しない台座に水平に取付けられている。一方、第２荷重
板１８は、その上部に取付けられた第２支柱１９を介し
て図示しない荷重装置に吊下げ支持されている。さら
に、第２支柱１９には、ロードセル２０が取付けられて
いる。Here, a method for measuring the breaking strength of the glass substrate 11 will be described. The upper, lower, left and right in the following description are based on the upper, lower, left and right in FIG. As shown in FIG. 3, a square plate-shaped first load plate 16 constituting a breaking strength measuring device 15 for measuring breaking strength of the glass substrate 11.
Is horizontally attached to a pedestal (not shown) via a first support column 17 attached to the lower portion thereof. On the other hand, the second load plate 18 is suspended and supported by a load device (not shown) via a second support column 19 attached to the upper portion thereof. Further, a load cell 20 is attached to the second support column 19.
【００３２】第１荷重板１６の右端部には第３支柱２１
が垂設され、その上部には第３荷重板２２の右端部が取
付けられている。また、第２荷重板１８の左端部には第
４支柱２３が垂下され、その下部には第４荷重板２４の
左端部が取付けられている。このとき、第３荷重板２２
は第２荷重板１８と第４荷重板２４との間に位置すると
ともに、第４荷重板２４は第１荷重板１６と第３荷重板
２２との間に位置している。さらに、各荷重板１６、１
８、２２、２４は、互いに平行になるように構成されて
いる。At the right end of the first load plate 16 is a third support column 21.
And the right end portion of the third load plate 22 is attached to the upper portion thereof. Further, a fourth support column 23 is hung on the left end portion of the second load plate 18, and a left end portion of the fourth load plate 24 is attached to the lower portion thereof. At this time, the third load plate 22
Is located between the second load plate 18 and the fourth load plate 24, and the fourth load plate 24 is located between the first load plate 16 and the third load plate 22. Furthermore, each load plate 16, 1
8, 22, and 24 are configured to be parallel to each other.
【００３３】第３荷重板２２及び第４荷重板２４の先端
には第３支柱２１又は第４支柱２３に対応するようにガ
イド溝２５が凹設され、第２荷重板１８及び第４荷重板
２４が上下方向に移動可能に構成されている。A guide groove 25 is provided at the tips of the third load plate 22 and the fourth load plate 24 so as to correspond to the third support column 21 or the fourth support column 23, and the second load plate 18 and the fourth load plate 24 are formed. 24 is configured to be movable in the vertical direction.
【００３４】第４荷重板２４の上面の中央部には、金属
材料製の円環状をなす支持リング２６が配置されてい
る。この支持リング２６の上部には測定されるガラス基
板１１が配置され、ガラス基板１１の内周部の上部には
その直径がガラス基板１１の内周の直径よりも大きい金
属材料製のボール２７が配置されている。また、第３荷
重板２２の下面の中央部には、金属材料製の円柱状をな
す固定ブロック２８が取付けられている。この固定ブロ
ック２８の下面の中央部には略半球状の保持用凹部２９
が凹設され、ボール２７が係合して保持されるようにな
っている。At the center of the upper surface of the fourth load plate 24, an annular support ring 26 made of a metallic material is arranged. The glass substrate 11 to be measured is arranged on the upper portion of the support ring 26, and a ball 27 made of a metal material, the diameter of which is larger than the inner diameter of the glass substrate 11, is arranged on the upper portion of the inner peripheral portion of the glass substrate 11. It is arranged. Further, a cylindrical fixed block 28 made of a metal material is attached to the central portion of the lower surface of the third load plate 22. A substantially hemispherical holding recess 29 is formed in the center of the lower surface of the fixed block 28.
Is recessed so that the ball 27 is engaged and held.
【００３５】そして、図３の矢視線で示すように、荷重
装置によって第２荷重板１８及び第４荷重板２４が上方
へ移動されることによってガラス基板１１に荷重が加わ
り、ガラス基板１１が破壊されたときの荷重をロードセ
ル２０によって破壊強度として測定するようになってい
る。Then, as shown by the arrow in FIG. 3, the load device moves the second load plate 18 and the fourth load plate 24 upward to apply a load to the glass substrate 11 and destroy the glass substrate 11. The load at that time is measured by the load cell 20 as breaking strength.
【００３６】さて、ガラス基板１１を化学強化処理する
ときには、まず複数枚のガラス基板１１を化学強化用ホ
ルダー１２にそれぞれ保持した後に、複数個の化学強化
用ホルダー１２をケージ内に収容する。一方、化学強化
槽内に、例えばＫＮＯ3とＮａＮＯ3とから構成されてい
る化学強化処理液１４を所定温度に加熱した状態で貯留
する。そして、ケージを化学強化槽内に投入して、ガラ
ス基板１１を化学強化処理液１４に所定時間浸漬する。When the glass substrates 11 are chemically strengthened, the plurality of glass substrates 11 are first held in the chemical strengthening holders 12, and then the plurality of chemical strengthening holders 12 are housed in the cage. On the other hand, the chemical strengthening treatment liquid 14 composed of, for example, KNO 3 and NaNO 3 is stored in the chemical strengthening tank while being heated to a predetermined temperature. Then, the cage is put into the chemical strengthening tank, and the glass substrate 11 is immersed in the chemical strengthening treatment liquid 14 for a predetermined time.
【００３７】このとき、化学強化処理液１４は、対向す
るガラス基板１１間を層流によって上昇するようになっ
ている。また、ケージの周囲では、対流によって化学強
化槽内を循環するようになっている。そして、ガラス基
板１１中の表面近傍に存在するＬｉ+は化学強化処理液
１４中のＮａ+やＫ+にイオン交換される。また、ガラス
基板１１中の表面近傍に存在するＮａ+は化学強化処理
液１４中のＫ+にイオン交換されてガラス基板１１は化
学強化処理される。At this time, the chemical strengthening treatment liquid 14 is designed to rise between the opposing glass substrates 11 by a laminar flow. In addition, around the cage, convection circulates in the chemical strengthening tank. Then, Li + existing near the surface of the glass substrate 11 is ion-exchanged with Na + and K + in the chemical strengthening treatment liquid 14. Further, Na + existing near the surface of the glass substrate 11 is ion-exchanged with K + in the chemical strengthening treatment liquid 14, and the glass substrate 11 is chemically strengthened.
【００３８】続いて、各ガラス基板１１の化学強化処理
後にケージを化学強化槽から取出して所定時間徐冷する
とともに、複数枚の新たなガラス基板１１を保持した化
学強化用ホルダー１２を収容したケージを化学強化槽内
に投入し、新たなガラス基板１１を化学強化処理する。Subsequently, after the chemical strengthening treatment of each glass substrate 11, the cage is taken out from the chemical strengthening tank and gradually cooled for a predetermined time, and a cage containing a chemical strengthening holder 12 holding a plurality of new glass substrates 11 is housed. Is put into the chemical strengthening tank, and a new glass substrate 11 is chemically strengthened.
【００３９】そして、化学強化処理液１４中のＬｉ+濃
度が増加して化学強化処理液１４に対して好ましくは
０．０７〜０．０９重量％の範囲に到ったときには、化
学強化処理液１４を新たな化学強化処理液１４に交換す
る。When the Li + concentration in the chemical strengthening treatment liquid 14 increases to reach the range of preferably 0.07 to 0.09% by weight with respect to the chemical strengthening treatment liquid 14, the chemical strengthening treatment liquid is added. 14 is replaced with a new chemical strengthening treatment liquid 14.
【００４０】以上詳述した本実施形態によれば、次のよ
うな効果が発揮される。
・ 本実施形態の情報記録媒体用ガラス基板の化学強化
処理方法においては、化学強化処理液１４中のＬｉ+濃
度に基づいて化学強化処理液１４を新たな化学強化処理
液１４に交換するように構成されている。ここで、例え
ば化学強化処理液１４がＫＮＯ3とＮａＮＯ3とから構成
されているときには、化学強化処理前の化学強化処理液
１４中にはＬｉ+が含まれていない。そして、化学強化
処理が進むにつれてＬｉ+濃度が直線的に増加すること
から、測定されたＬｉ+濃度から化学強化処理の程度を
容易に判断することができる。一方、Ｋ+は化学強化処
理前の化学強化処理液１４中に多量に含まれており、化
学強化処理が進むにつれてその濃度は減少するが、Ｎａ
+がＬｉ+とＫ+との双方に対してイオン交換されるため
に、Ｋ+濃度の減少は化学強化処理の程度を直接的に示
していない。このため、測定されたＫ+濃度から化学強
化処理の程度の判断を精度良く行うことができない。ま
た、Ｎａ+は化学強化処理の頻度に伴って増減するため
に、測定されたＮａ+濃度から化学強化処理の程度を判
断しにくい。従って、Ｌｉ+濃度に基づいて化学強化処
理液１４を交換するのが最もよい。そして、Ｌｉ+濃度
に基づいて化学強化処理１４を交換することにより、ガ
ラス基板１１の化学強化処理を繰返して行っても化学強
化処理後のガラス基板１１の強度を維持することができ
るとともに、安定した品質のガラス基板１１が得られ
る。According to this embodiment described in detail above, the following effects are exhibited. In the method for chemically strengthening the glass substrate for an information recording medium according to the present embodiment, the chemical strengthening treatment liquid 14 is replaced with a new chemical strengthening treatment liquid 14 based on the Li + concentration in the chemical strengthening treatment liquid 14. It is configured. Here, for example, when the chemical strengthening treatment liquid 14 is composed of KNO 3 and NaNO 3 , the chemical strengthening treatment liquid 14 before the chemical strengthening treatment does not contain Li + . Since the Li + concentration increases linearly with the progress of the chemical strengthening treatment, the degree of the chemical strengthening treatment can be easily determined from the measured Li + concentration. On the other hand, K + is contained in a large amount in the chemical strengthening treatment liquid 14 before the chemical strengthening treatment, and its concentration decreases as the chemical strengthening treatment progresses.
+ Is to be ion-exchanged with respect to both the Li + and K +, decrease in K + concentration does not directly indicate the degree of chemical strengthening treatment. For this reason, it is not possible to accurately determine the degree of chemical strengthening treatment from the measured K + concentration. Moreover, since Na + increases and decreases with the frequency of the chemical strengthening treatment, it is difficult to judge the degree of the chemical strengthening treatment from the measured Na + concentration. Therefore, it is best to replace the chemical strengthening treatment liquid 14 based on the Li + concentration. By exchanging the chemical strengthening treatment 14 based on the Li + concentration, the strength of the glass substrate 11 after the chemical strengthening treatment can be maintained and stable even if the chemical strengthening treatment of the glass substrate 11 is repeated. The glass substrate 11 having the above quality can be obtained.
【００４１】・ 本実施形態の情報記録媒体用ガラス基
板の化学強化処理方法においては、化学強化処理液１４
中のＬｉ+濃度が化学強化処理液１４に対して好ましく
は０．０７〜０．０９重量％の範囲に到ったときには、
化学強化処理液１４が新たな化学強化処理液１４に交換
されるように構成されている。このため、化学強化処理
液１４中のＬｉ+によってイオン交換が阻害され、化学
強化処理されたガラス基板１１の強度が基板として所望
される強度よりも低くなることを防止することができ
る。よって、ガラス基板１１の化学強化処理を繰返して
行っても化学強化処理後のガラス基板１１の強度を維持
することができるとともに、安定した品質のガラス基板
１１が得られる。さらに、ガラス基板１１の化学強化処
理の歩留まりを向上させることができる。In the method for chemically strengthening the glass substrate for an information recording medium of the present embodiment, the chemical strengthening treatment liquid 14
When the Li + concentration therein reaches the range of preferably 0.07 to 0.09% by weight with respect to the chemical strengthening treatment liquid 14,
The chemical strengthening treatment liquid 14 is configured to be replaced with a new chemical strengthening treatment liquid 14. Therefore, it is possible to prevent the ion exchange from being hindered by Li + in the chemical strengthening treatment liquid 14 and the strength of the chemically strengthened glass substrate 11 becoming lower than the strength desired as the substrate. Therefore, the strength of the glass substrate 11 after the chemical strengthening treatment can be maintained even if the chemical strengthening treatment of the glass substrate 11 is repeated, and the glass substrate 11 of stable quality can be obtained. Further, the yield of the chemical strengthening treatment of the glass substrate 11 can be improved.
【００４２】・ 本実施形態の情報記録媒体用ガラス基
板の化学強化処理方法においては、ガラス基板１１が化
学強化処理液１４に浸漬された状態において、前述の式
（１）より求められる値Ａは好ましくは１．４〜７１ｇ
／ｃｍ2である。このため、ガラス基板１１の化学強化
処理を安定して行うことができる。In the chemical strengthening treatment method for a glass substrate for an information recording medium according to the present embodiment, the value A obtained from the above formula (1) in the state where the glass substrate 11 is immersed in the chemical strengthening treatment liquid 14 is Preferably 1.4-71 g
/ Cm 2 . Therefore, the chemical strengthening treatment of the glass substrate 11 can be stably performed.
【００４３】・ 本実施形態の情報記録媒体用ガラス基
板の化学強化処理方法においては、ガラス基板１１が化
学強化処理液１４に浸漬された状態において、前述の式
（２）より求められる値Ｄは好ましくは３〜８ｇ／ｃｍ
2である。このため、ガラス基板１１の化学強化処理を
より安定して行うことができる。In the chemical strengthening treatment method for a glass substrate for an information recording medium according to the present embodiment, the value D obtained from the above-mentioned formula (2) is obtained when the glass substrate 11 is immersed in the chemical strengthening treatment liquid 14. Preferably 3 to 8 g / cm
Is 2 . Therefore, the chemical strengthening treatment of the glass substrate 11 can be performed more stably.
【００４４】・ 本実施形態の情報記録媒体用ガラス基
板の化学強化処理方法においては、化学強化処理液１４
は、対向するガラス基板１１間を層流によって上昇する
ようになっている。このため、対向するガラス基板１１
間の化学強化処理液１４中に気泡が発生するのを抑制す
るとともに、化学強化処理液中におけるＫＮＯ3、Ｎａ
ＮＯ3等の各成分の濃度分布を均一にすることができ
る。さらに、化学強化処理液１４の温度を均一にするこ
とができる。このため、ガラス基板１１に化学強化処理
ムラや歪みが発生するのを抑制することができる。In the method of chemically strengthening the glass substrate for an information recording medium of the present embodiment, the chemical strengthening treatment liquid 14
Rises between the opposing glass substrates 11 by a laminar flow. Therefore, the opposing glass substrate 11
In addition to suppressing the generation of bubbles in the chemical strengthening treatment liquid 14, the KNO 3 and Na in the chemical strengthening treatment liquid are suppressed.
The concentration distribution of each component such as NO 3 can be made uniform. Furthermore, the temperature of the chemical strengthening treatment liquid 14 can be made uniform. Therefore, it is possible to suppress the occurrence of chemical strengthening unevenness and distortion on the glass substrate 11.
【００４５】なお、前記実施形態を次のように変更して
構成することもできる。
・ 前記化学強化処理液１４中のＬｉ+濃度が増加する
に伴い、化学強化処理時間を例えば１時間長くしたり、
化学強化処理液１４の加熱温度を例えば１０℃高くして
もよい。このように構成した場合、化学強化処理の頻度
が高くてＫ+濃度が低い化学強化処理液１４によって化
学強化処理されたガラス基板１１も、化学強化処理の頻
度が低くてＫ+濃度が高い化学強化処理液１４によって
化学強化されたガラス基板１１と同等の強度を得ること
ができる。よって、化学強化処理液１４の寿命を延ばす
ことができる。The above embodiment may be modified as follows. -As the Li + concentration in the chemical strengthening treatment liquid 14 increases, the chemical strengthening treatment time may be lengthened by, for example, 1 hour,
The heating temperature of the chemical strengthening treatment liquid 14 may be increased by 10 ° C., for example. When configured in this manner, the glass substrate 11 chemically strengthened by the chemical strengthening treatment liquid 14 having a high frequency of chemical strengthening treatment and a low K + concentration also has a low chemical strengthening treatment frequency and a high K + concentration. It is possible to obtain the same strength as that of the glass substrate 11 chemically strengthened by the strengthening treatment liquid 14. Therefore, the life of the chemical strengthening treatment liquid 14 can be extended.
【００４６】・ 前記化学強化処理液１４を、ＫＮＯ3
又はＮａＮＯ3のみから構成してもよい。また、６０重
量％のＫＮＯ3及び４０重量％のＮａＮＯ3等の比率でＫ
ＮＯ3とＮａＮＯ3とを混合して化学強化処理液１４を構
成してもよい。The chemical strengthening treatment liquid 14 is KNO 3
Alternatively, it may be composed only of NaNO 3 . In addition, the ratio of KNO 3 of 60% by weight and NaNO 3 of 40% by weight, etc.
The chemical strengthening treatment liquid 14 may be formed by mixing NO 3 and NaNO 3 .
【００４７】・ 前記ガラス基板１１を化学強化処理し
た後に所定時間徐冷するときに、ケージを化学強化処理
液１４から取出して化学強化槽内で徐冷してもよい。次
に、前記実施形態から把握できる技術的思想について以
下に記載する。When the glass substrate 11 is subjected to the chemical strengthening treatment and then gradually cooled for a predetermined time, the cage may be taken out from the chemical strengthening treatment liquid 14 and gradually cooled in the chemical strengthening tank. Next, technical ideas that can be understood from the above-described embodiment will be described below.
【００４８】（１）前記化学強化処理液中には複数のガ
ラス基板が並んだ状態で浸漬され、対向するガラス基板
間の距離Ｂ（ｃｍ）と化学強化処理液の密度Ｃ（ｇ／ｃ
ｍ3）とから下記式（１）により求められるガラス基板
の表面積に対する化学強化処理液の量Ａ（ｇ／ｃｍ2）
は、１．４〜７１ｇ／ｃｍ2の範囲に設定されている請
求項１又は請求項２に記載の情報記録媒体用ガラス基板
の化学強化処理方法。この構成によれば、ガラス基板の
化学強化処理を安定して行うことができる。(1) A plurality of glass substrates are immersed in the chemical strengthening treatment liquid in a line, and the distance B (cm) between the opposing glass substrates and the density C (g / c) of the chemical strengthening treatment liquid.
m 3 ) and the amount A (g / cm 2 ) of the chemical strengthening treatment liquid with respect to the surface area of the glass substrate, which is obtained by the following formula (1).
Is, 1.4~71g / cm chemical strengthening treatment method of a glass substrate for information recording medium according to claim 1 or claim 2 is set to 2 by weight. According to this structure, the chemical strengthening treatment of the glass substrate can be stably performed.
【００４９】Ａ＝Ｂ×Ｃ …（１）
（２）前記化学強化処理液は化学強化槽内に貯留され、
ガラス基板が化学強化処理液中に浸漬された状態におい
て、化学強化槽内の化学強化処理液の量Ｅ（ｇ）と、ガ
ラス基板一枚の表面積Ｆ（ｃｍ2）と、一度に化学強化
処理されるガラス基板の枚数Ｇ（枚）とから下記式
（２）により求められるガラス基板の表面積に対する化
学強化処理液の量Ｄ（ｇ／ｃｍ2）は、３〜８ｇ／ｃｍ2
の範囲に設定されている請求項１から請求項３及び上記
（１）のいずれか一項に記載の情報記録媒体用ガラス基
板の化学強化処理方法。この構成によれば、ガラス基板
の化学強化処理をより安定して行うことができる。A = B × C (1) (2) The chemical strengthening treatment liquid is stored in the chemical strengthening tank,
With the glass substrate immersed in the chemical strengthening treatment liquid, the amount E (g) of the chemical strengthening treatment liquid in the chemical strengthening tank, the surface area F (cm 2 ) of one glass substrate, and the chemical strengthening treatment at once. The amount D (g / cm 2 ) of the chemical strengthening treatment liquid with respect to the surface area of the glass substrate, which is calculated from the number G (sheets) of the glass substrates to be formed by the following formula (2), is 3 to 8 g / cm 2.
The method for chemically strengthening a glass substrate for an information recording medium according to any one of claims 1 to 3 and (1) above, wherein According to this configuration, the chemical strengthening treatment of the glass substrate can be performed more stably.
【００５０】Ｄ＝Ｅ／（Ｆ×Ｇ） …（２）
（３）前記化学強化処理液は、対向するガラス基板間を
層流によって流れるように構成されている請求項１から
請求項３並びに上記（１）及び上記（２）のいずれか一
項に記載の情報記録媒体用ガラス基板の化学強化処理方
法。この構成によれば、ガラス基板に化学強化処理ムラ
や歪みが発生するのを抑制することができる。D = E / (F × G) (2) (3) The chemical strengthening treatment liquid is configured to flow between the opposing glass substrates by a laminar flow. The method for chemically strengthening a glass substrate for an information recording medium according to any one of (1) and (2) above. According to this configuration, it is possible to suppress the occurrence of chemical strengthening treatment unevenness and distortion on the glass substrate.
【００５１】[0051]
【発明の効果】本発明は、以上のように構成されている
ため、次のような効果を奏する。請求項１又は請求項２
に記載の発明の情報記録媒体用ガラス基板の化学強化処
理方法によれば、ガラス基板の化学強化処理を繰返して
行っても化学強化処理後のガラス基板の強度を維持する
ことができるとともに、安定した品質のガラス基板が得
られる。Since the present invention is constructed as described above, it has the following effects. Claim 1 or Claim 2
According to the method for chemically strengthening a glass substrate for an information recording medium of the invention described in (1), it is possible to maintain the strength of the glass substrate after the chemical strengthening treatment even if the chemical strengthening treatment of the glass substrate is repeatedly performed, and it is stable. A glass substrate of the desired quality is obtained.
【００５２】請求項３に記載の発明の情報記録媒体用ガ
ラス基板の化学強化処理方法によれば、請求項１又は請
求項２に記載の発明の効果に加え、ガラス基板の化学強
化処理を安定して行うことができる。According to the method of chemically strengthening a glass substrate for an information recording medium of the invention described in claim 3, in addition to the effect of the invention of claim 1 or 2, the chemical strengthening process of the glass substrate is stabilized. You can do it.
【図１】 （ａ）は実施形態のガラス基板が支持部材に
よって支持された状態を示す要部拡大断面図、（ｂ）は
支持部材がガラス基板を支持した状態を示す断面図。FIG. 1A is an enlarged sectional view of an essential part showing a state where a glass substrate of an embodiment is supported by a supporting member, and FIG. 1B is a sectional view showing a state where a supporting member supports a glass substrate.
【図２】 ガラス基板の化学強化処理枚数と化学強化処
理液中のＬｉ+濃度と化学強化処理されたガラス基板の
破壊強度との関係を示すグラフ。FIG. 2 is a graph showing the relationship between the number of chemically strengthened glass substrates, the Li + concentration in the chemically strengthened liquid, and the breaking strength of the chemically strengthened glass substrates.
【図３】 破壊強度測定装置を示す要部破断側面図。FIG. 3 is a fragmentary side view showing a fracture strength measuring device.
１１…ガラス基板、１４…化学強化処理液。 11 ... Glass substrate, 14 ... Chemical strengthening treatment liquid.
フロントページの続き Ｆターム(参考） 4G059 AA08 AC16 HB03 HB13 HB14 HB17 5D112 AA02 AA24 BA03 BA09 GA04 GA28 GA30 Continued front page F-term (reference) 4G059 AA08 AC16 HB03 HB13 HB14 HB17 5D112 AA02 AA24 BA03 BA09 GA04 GA28 GA30
Claims (3)
板を浸漬し、ガラス基板中の表面近傍に存在するリチウ
ムイオン及びナトリウムイオンと、化学強化処理液に含
有され、リチウムイオン又はナトリウムイオンよりもイ
オン半径の大きい一価の金属イオンとをイオン交換して
ガラス基板を化学強化処理した後に、ガラス基板を化学
強化処理液から取出し、新たなガラス基板を化学強化処
理液に浸漬することにより、複数のガラス基板を繰返し
て化学強化処理する情報記録媒体用ガラス基板の化学強
化処理方法であって、化学強化処理液中のリチウムイオ
ン濃度に基づいて化学強化処理液を新たな化学強化処理
液に交換することを特徴とする情報記録媒体用ガラス基
板の化学強化処理方法。1. A glass substrate is immersed in a heat-melted chemical strengthening treatment liquid to contain lithium ions and sodium ions present in the vicinity of the surface of the glass substrate and the chemical strengthening treatment liquid. After the glass substrate is chemically strengthened by ion-exchange with monovalent metal ions having a large ionic radius, the glass substrate is taken out from the chemical strengthening treatment liquid, and a new glass substrate is immersed in the chemical strengthening treatment liquid to make multiple A method for chemically strengthening a glass substrate for an information recording medium, in which the glass substrate is repeatedly subjected to chemical strengthening treatment, and the chemical strengthening treatment liquid is replaced with a new chemical strengthening treatment liquid based on the lithium ion concentration in the chemical strengthening treatment liquid. A method for chemically strengthening a glass substrate for an information recording medium, which comprises:
ムイオン濃度が化学強化処理液に対して０．０７〜０．
０９重量％の範囲に到ったときに新たな化学強化処理液
に交換される請求項１に記載の情報記録媒体用ガラス基
板の化学強化処理方法。2. The chemical strengthening treatment liquid has a lithium ion concentration in the chemical strengthening treatment liquid of 0.07 to 0.
The method for chemically strengthening a glass substrate for an information recording medium according to claim 1, wherein the chemical strengthening treatment liquid is replaced with a new chemical strengthening treatment liquid when the amount reaches the range of 09% by weight.
基板が並んだ状態で浸漬され、対向するガラス基板間の
化学強化処理液の量は、ガラス基板の表面積に対して
１．４〜７１ｇ／ｃｍ2の範囲に設定されている請求項
１又は請求項２に記載の情報記録媒体用ガラス基板の化
学強化処理方法。3. A plurality of glass substrates are immersed in the chemical strengthening treatment liquid in a lined state, and the amount of the chemical strengthening treatment liquid between the facing glass substrates is 1.4 to the surface area of the glass substrate. The method for chemically strengthening a glass substrate for an information recording medium according to claim 1 or 2, wherein the range is 71 g / cm 2 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001345182A JP2003146705A (en) | 2001-11-09 | 2001-11-09 | Method for chemically strengthened glass substrate for information recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001345182A JP2003146705A (en) | 2001-11-09 | 2001-11-09 | Method for chemically strengthened glass substrate for information recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003146705A true JP2003146705A (en) | 2003-05-21 |
Family
ID=19158569
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001345182A Pending JP2003146705A (en) | 2001-11-09 | 2001-11-09 | Method for chemically strengthened glass substrate for information recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003146705A (en) |
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