JP2003139954A - Method for manufacturing polarizing separation element and device for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a polarization separation element by which an organic birefringent film is used as a grating and adhesion of the organic birefringent film without including bubbles in the adhesion interface and the reliability of the element by the adhesion can be improved. SOLUTION: When the polarization separation element using an organic birefringent film 4 as a grating is manufactured, an adhesive 5 is preliminarily applied in a projection state on a transparent substrate 2 in the adhering process, while the organic birefringent film 4 is deformed into a U-shape. The center position of the adhesive 5 and the peak position of the organic birefringent film 4 are respectively measured and aligned, and then the organic birefringent film 4 is brought into contact with the adhesive 5 at the one contact point. After the above process, the adhering process is carried out to spread the contact area from the contact point to the contact face to realize adhesion of the organic birefringent film 4 without including bubbles and to improve the reliability of the polarization separation element.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing a polarization separation element.

[0002]

2. Description of the Related Art Conventionally, as a polarization beam splitting element which can be manufactured at low cost by a simple process, for example, Japanese Patent Laid-Open No. 63-314502.
According to Japanese Patent Laid-Open No. 2000-75130, etc., a structure in which a transparent substrate is provided with a birefringent film having a diffraction grating on the same plane, and an isotropic overcoat layer is coated or loaded on the birefringent film. Is proposed. Among these, there is one having a structure intended to improve the flatness of both surfaces in order to obtain good optical characteristics. This is because a birefringent film with a diffraction grating formed on the same plane is adhered with an adhesive on a transparent substrate such as glass or plastic, and the birefringent film is covered with an overcoat layer made of an isotropic adhesive. Since the layer also serves as an adhesive layer and is adhered to the opposing transparent substrate, the device has strength and is highly productive.

In 1993, the 40th Spring Applied Physics Society 30a-B-1 reported the realization of a polarization separation element using LiNbO ₃ as a substrate. JP-A-10-335
According to Japanese Patent No. 433, bonding is performed in a vacuum to prevent entrainment of bubbles during bonding. In this case, there is a limitation on the use of the adhesive containing the vapor pressure component, as in the case of using the film to which the adhesive has been applied in advance.

[0004]

The organic birefringence of a polarization separation element in which an organic birefringence film having a different refractive index is adhered to a vibrating surface having different incident light on a transparent substrate in order to separate two polarization components orthogonal to each other. In the film adhesion, the organic birefringent film is a stretched polymer material, and the film thickness is generally as thin as several tens of μm to several hundreds of μm, and when it is adhered to other members, due to its own weight and / or atmospheric pressure / external force. It is easily deformed, and there is a problem that the adhesive on the transparent substrate and the organic birefringent film come into contact with each other on the surface and entrain air bubbles.

Further, when the height of the convex shape of the adhesive is small, it becomes extremely difficult to control the contact point with the organic birefringent film. In addition, if the center of the contact point between the adhesive on the transparent substrate and the organic birefringent film is deviated, the spread of the adhesive is uneven, and it becomes difficult to bond the entire surface uniformly.

Furthermore, the heat-resistant temperature of the organic birefringent film is 100.
Since it is as low as ℃ or less, there are restrictions on the use of heat-curable adhesives. Similarly, since the refractive index equivalent to that of the transparent substrate is required after the adhesive is cured, the use of the adhesive is restricted.

Further, the method of forming a polarization separation element by using a material such as LiNbO ₃ for the substrate requires an expensive optical crystal, resulting in a high material cost and a complicated process and a high cost.

In view of this, the present invention uses the organic birefringent film as a diffraction grating to bond the organic birefringent film without entrainment of bubbles at the bonding interface and to improve the reliability of the device by using the polarized light separating element. It is an object of the present invention to provide a manufacturing method and a manufacturing apparatus therefor.

It is another object of the present invention to provide a method and an apparatus for manufacturing a polarization separation element, which can prevent uneven spread of the adhesive and can bond the entire surface uniformly.

[0010]

The invention according to claim 1 is
A step of adhering an organic birefringent film having a different refractive index to a vibrating surface having different incident light on a transparent substrate; a step of forming a periodic uneven shape on the organic birefringent film as a diffraction grating; A method of manufacturing a polarization beam splitting element for separating two orthogonal polarization components, comprising the steps of filling an indented portion with an isotropic adhesive and bonding an opposing transparent substrate on the diffraction grating, The step of adhering the organic birefringent film includes the step of bringing the flexible organic birefringent film into contact with the transparent substrate at one contact point, and from the contact point, a contact surface is formed on the entire transparent substrate. Adhering by spreading.

Therefore, the flexible organic birefringent film is brought into contact with the transparent substrate to be bonded at one contact point, and then bonded so that the contact surface is spread over the entire transparent substrate. It is possible to prevent bubbles from being entrapped in the bonding interface in the bonding process.

According to a second aspect of the invention, in the method of manufacturing the polarization beam splitting element according to the first aspect, the step of bringing the flexible organic birefringent film into contact with the transparent substrate at one contact point. Is performed by deforming the organic birefringent film into a U shape and bringing its apexes into contact with each other.

Therefore, the organic birefringent film is easily deformed by its own weight and / or atmospheric pressure / external force, but in the bonding step, the organic birefringent film is positively deformed into a U shape to have a vertex, so that 1 It is possible to make contact at one contact point.

According to a third aspect of the present invention, in the method of manufacturing a polarization separation element according to the first or second aspect, the flexible organic birefringent film is brought into contact with the transparent substrate at one contact point. The step of performing is performed by aligning and contacting the organic birefringent film with an adhesive before curing which is dropped in the center of the transparent substrate and has a convex shape.

Therefore, the adhesive on the side of the organic birefringent film that is contacted is also dripping in a convex shape before curing, so that a point contact between the organic birefringent film and the adhesive can be ensured. it can. Further, since the apex position of the organic birefringent film and the central position of the adhesive are aligned with each other, the adhesive can be uniformly spread over the entire surface without uneven spread.

According to a fourth aspect of the present invention, an organic birefringent film having a different refractive index is adhered to a vibrating surface having different incident light on a transparent substrate, and the organic birefringent film has a periodic uneven shape as a diffraction grating. A device for manufacturing a polarization separation element for separating two orthogonal polarization components, which is formed by filling an indented portion of the diffraction grating with an isotropic adhesive and adhering an opposing transparent substrate on the diffraction grating. And a substrate center detection means for detecting the center position of the transparent substrate, an adhesive dropping device for dropping an adhesive to the center position on the transparent substrate, and the adhesive dropped on the transparent substrate Adhesive center detecting means for detecting the center position of the organic birefringent film, deforming means for deforming the organic birefringent film in a U shape, and a refraction film apex for detecting the apex position of the organic birefringent film deformed in a U shape. Detection means, U
Position adjusting means for aligning the vertex position of the organic birefringent film deformed in a letter shape with the central position of the adhesive, and the aligned organic birefringent film and the adhesive at one contact point. After contacting, a joining means for adhering the contact surface by spreading the contact surface over the entire transparent substrate from the contact point.

Therefore, basically, after the flexible organic birefringent film is brought into contact with the adhesive on the transparent substrate to be adhered at one contact point, the contact surface is formed on the entire transparent substrate. By adhering so as to spread, air bubbles are prevented from being caught in the adhering interface in the adhering step. Here, the organic birefringent film is easily deformed by its own weight and / or atmospheric pressure / external force, but in the bonding step, the organic birefringent film is deformed into a U-shape by a deforming means to have a vertex.
It is possible to make contact at one contact point. Moreover,
Even on the side of the adhesive that receives the contact of the organic birefringent film, it is dropped so as to form a convex shape before curing, so that the organic birefringent film and the adhesive can be surely made point contact, and Since the apex position of the birefringent film and the central position of the adhesive are aligned with each other, the adhesive can be uniformly spread over the entire surface without uneven distribution of the adhesive.

According to a fifth aspect of the present invention, in the apparatus for manufacturing a polarization beam splitting element according to the fourth aspect, the deforming means includes holding means for holding two opposing points in the peripheral portion of the organic birefringent film.

Therefore, the deforming means can be realized by the structure including the simple holding means.

According to a sixth aspect of the invention, in the apparatus for manufacturing a polarization beam splitting element according to the fifth aspect, the holding means has a slack due to its own weight in a direction of deforming the organic birefringent film into a U-shape. Hold on.

Therefore, since the deformation direction is directed by the deflection due to its own weight, the deformation into a U-shape becomes easy.

According to a seventh aspect of the invention, in the apparatus for manufacturing a polarization beam splitting element according to the fifth or sixth aspect, the holding means is tilted in a direction in which the peripheral portion of the organic birefringent film is deformed into a U shape. Hold.

Therefore, since the holding form by the holding means is inclined in the direction of deforming the peripheral portion of the organic birefringent film into a U-shape, the deformation into the U-shape is facilitated.

The invention according to claim 8 is the invention according to claims 4 to 7.
In the apparatus for manufacturing a polarization beam splitting element according to any one of the above, the deforming unit includes a moment applying device that generates a moment from the peripheral portion of the organic birefringent film to the center to deform the organic birefringent film into a U-shape.

Therefore, by generating a moment from the peripheral portion of the organic birefringent film to the center by the moment applying device, the organic birefringent film can be surely deformed into a U-shape.

The invention according to claim 9 is the invention according to claims 4 to 8.
In the apparatus for manufacturing a polarization beam splitting element according to any one of items 1 to 3, the joining unit presses the entire surface of the transparent substrate evenly with respect to the organic birefringent film whose contact surface is spread over the entire transparent substrate. including.

Therefore, although the organic birefringent film is deformed into a U shape in the bonding step, it is finally returned to the planar state, so that the planarity as the polarization separation element can be secured.

According to a tenth aspect of the present invention, in the apparatus for manufacturing a polarization beam splitting element according to any one of the fourth to ninth aspects,
The adhesive is made of a photocurable acrylic or epoxy material.

Therefore, by using a photo-curable acrylic or epoxy material as the adhesive, even an organic birefringent film having a low heat resistant temperature is not affected, and the adhesive can be selected. This contributes to cost reduction and the like in manufacturing a polarization separation element.

[0030]

DETAILED DESCRIPTION OF THE INVENTION A first embodiment of the present invention will be described with reference to FIGS.

Polarization separation element 1 to which the present embodiment is directed
1, the organic birefringent film 4 in which the diffraction grating 3 is formed on the same plane of the transparent substrate 2 as shown in FIG.
Are bonded via the adhesive 5, and the isotropic adhesive 6 is applied thereon.
Is a polarization splitting element having a structure in which the overcoat layer filled in between the recesses of the diffraction grating 3 also functions as an adhesive layer and is adhered to the counter transparent substrate 7.

The manufacturing method and manufacturing apparatus of this embodiment used for manufacturing such a polarization separation element 1 will be described below with reference to FIGS. 2 to 5. FIG. 2 is a schematic configuration diagram showing a part of an apparatus for manufacturing a polarization separation element, and FIG.
[Fig. 3] is a process diagram showing a process sequence including a part of the manufacturing apparatus.

First, the transparent substrate 2 is placed on the substrate holder 11 which is movable in the X-, Y-, and Z-axis triaxial directions, and is fixed by a vacuum suction mechanism (not shown). Above the substrate holder 11 and the transparent substrate 2, together with an adhesive dropping device (not shown), the center position of the transparent substrate 2 and the center position of the adhesive 5 are detected and the organic compound deformed into a U-shape. A measurement system that is movable in the X and Y directions is provided for detecting the center position (vertex position) of the recess of the refraction film 4. In the present embodiment, the transparent substrate 2 and the organic birefringent film 4 are used as this measurement system.
CCD that detects the light reflected from the surface of the robot and reads the amount of displacement
A laser displacement meter 12 is arranged. In this embodiment, the CCD laser displacement meter 12 is a substrate center detecting means,
It functions as an adhesive center detecting means and a refractive film apex detecting means. Further, a pair of holding devices 13A and 13B for holding the peripheral portion of the organic birefringent film 4 at two points are arranged in parallel to the substrate holder 11, and a moment applying device (described later) that generates a moment M thereto is provided. It is arranged. The holding devices 13A and 13B are attached to, for example, the distal ends of the rotary drive arms 14A and 14B as shown in FIG. 3A, and constitute a deformation means together with the moment applying device including the rotary drive arms 14A and 14B. is doing.

A specific method of manufacturing a polarization separation element using such a manufacturing apparatus will be described. For example, the substrate holder 1
A boric acid crown glass (hereinafter, referred to as BK-7) having a diameter of 100 mm and a thickness of 1 mm is mounted on the substrate 1 as a transparent substrate 2, and is vacuum suction-fixed by a vacuum suction device (not shown). Next, the CCD laser displacement meter 12 detects the edge of BK-7 (transparent substrate 2), the center position of BK-7 (transparent substrate 2) is determined from this edge, and the center position information is given to the adhesive dropping device. . Based on this information, the adhesive dropping device is moved to the center position of BK-7 (transparent substrate 2), a predetermined amount of the adhesive 5 is dropped on the center position, and then the original position is returned. The cross-sectional shape of the adhesive 5 before curing becomes convex due to the surface tension as shown in FIG. 2 and FIG. Subsequently, the surface shape of the dropped adhesive 5 is measured by the CCD laser displacement meter 12, and the center position of the convex shape is detected.

On the other hand, the organic birefringent film 4 is 110 mm × 12.
After being cut to a size of 0 mm, the end portion (peripheral portion) on the 120 mm side is held by vacuum suction of the holding device 13, and after being positioned approximately at the center position of BK-7 (transparent substrate 2) (FIG. 3A). (See FIG. 3), the organic birefringent film 4 is deformed into a U shape by a moment applying device (see FIG. 3B). Again, the surface shape of the organic birefringent film 4 deformed into a U shape is changed to C
The position of the apex of the concave shape is measured by the CD laser displacement meter 12, the moving amount is calculated from the already detected apex position information of the convex shape of the adhesive 5, and the organic birefringent film 4 is adjusted in position. Alignment is performed by an XY moving device (not shown) as a reference (see FIG. 3B).

In addition to the present embodiment, the alignment is performed by recognizing the shapes of BK-7 (transparent substrate 2) and the adhesive 5 by a CCD camera and image processing, determining the center position, and performing alignment. It is feasible.

After the alignment of the BK-7 (transparent substrate 2) -adhesive 5-organic birefringent film 4 is completed, the substrate holder 11 is raised as indicated by the arrow in FIG. 5 and the organic birefringent film 4 are temporarily stopped at the positions where they contact each other at the apexes. Thereafter, as shown in FIG. 3C, the organic birefringent film 4 is placed on the transparent substrate 2 while gently releasing the moment force of the organic birefringent film 4, and the diameter of the organic birefringent film 4 is 110 mm. A pressing device 15 made of quartz glass that transmits ultraviolet rays and configured as an optical smooth plane structure as a joining means is placed, and the adhesive 5 is spread by uniformly pressing the entire surface so that the contact surface spreads, and BK-7 (transparent substrate). 2) At the point where it spreads over the entire surface, the adhesive 5 is cured by passing it through the pressing device 15 and irradiating it with ultraviolet rays.

FIG. 4 is a schematic view showing how the adhesive 5 spreads. The radial arrows indicate the spreading direction of the adhesive 5, and it can be seen that the adhesive 5 spreads evenly.

After the adhesive 5 is cured, BK-of 100 mm in diameter
Excess organic birefringent film 4 was cut along the outer shape of 7 (transparent substrate 2) to obtain BK-7 with organic birefringent film.

Here, the acrylic resin-based photo-curing adhesive is used for the adhesion, but an epoxy resin-based photo-curing adhesive may be used.

The thickness of the organic birefringent film 4 is preferably 0.01 mm or more in consideration of handling property, but the maximum thickness is 0.5 m in consideration of obtaining optical characteristics by stretching.
It is preferably used in the range of m. More preferably 0.0
5 to 0.2 mm is preferable. In this embodiment, the thickness is 0.2 m.
m of organic birefringent film 4 was used.

The organic birefringent film 4 thus bonded is washed with an organic solvent such as isopropyl alcohol and pure water. Thereafter, a ZEP-520 resist manufactured by Nippon Zeon Kabushiki Kaisha was spin-coated to form a resist film having a thickness of 0.5 μm, and after baking, a pattern of lines and spaces 3 μm was formed at a pitch of 8 mm using a stepper device manufactured by Nikon Corporation. It was repeatedly formed 300 times at the center of the through hole and used as the source of the diffraction grating 3. The diffraction grating 3 is formed in a substantially shape of 1 × 2 mm at the center of the element outer shape of 8 × 8 mm.

After that, in an etching gas atmosphere containing oxygen gas as a main component, ECR (Electron Cyc
A diffraction grating 3 was formed by repeating a line having a width of 3 μm and a depth of 5 μm and a space having a width of 3 μm for 300 cycles by using a lotron resonance (electron cyclotron resonance) etching device.

The other photolithography process adopts a generally known process, and its details are omitted.

Next, flat-worked φ200 mm, thickness 5
Organic compound with diffraction grating 3 formed on 0 mm stainless steel table.
Place BK-7 (transparent substrate 2) to which the refraction film 4 is adhered,
Acrylic resin-based photo-curing on the surface on which the diffraction grating 3 is formed
The isotropic adhesive 6 of the mold is dropped by a microsyringe,
The upper surface of this BK-7 (transparent substrate 2) was optically polished on both sides.
A counter transparent substrate 7 having an outer diameter of 100 mm and a thickness of 1.0 mm is mounted.
Quartz glass (not shown)
No.) and 100 gf / cm on the opposing transparent substrate 7. ^TwoPressure of
Was applied to spread the isotropic adhesive 6 on the entire surface to be adhered. Na
The incident wavelength is reflected on the surface of the opposing transparent substrate 7 opposite to the adhesive surface.
An antireflection film was formed so as to minimize irradiation.

In this state, an ultraviolet irradiation device (not shown)
Then, the opposite transparent substrate 7 was irradiated with ultraviolet light having an irradiance of 20 mW / cm ² from the upper surface of 150 mm for 10 minutes to be cured and adhered.

An acrylic adhesive is used as the isotropic adhesive 6 of the polarization beam splitting element 1 in terms of ease of control of characteristics such as viscosity and refractive index, adhesive strength and transparency, but an epoxy adhesive is also used. The same is possible. Since these adhesives are cured by ultraviolet rays, curing under pressure is possible and the process is simple.

As the organic birefringent film 4, a polymer film such as polyethylene terephthalate is rubbed with a cloth to rub it to form an alignment film, and a polydiacetylene monomer is vacuum-deposited on the alignment film for alignment, and then ultraviolet rays are applied. Method of polymerizing by irradiation with light to form an anisotropic film (reference: J. Appl.
s. , 72, No. 3, P938-947),
In this embodiment, a polymer film in which molecular chains are oriented, and an organic polymer film stretched in consideration of uniformity of characteristics is used.

FIG. 5 shows an example of the moment applying device 16 for deforming the organic birefringent film 4 into a U-shape. The moment applying device 16 has a pair of rotary drive arms 14A and 14B, each of which has a holding device 13A or 13B at its tip and is rotatable about a rotary shaft 17A or 17B.
A drive gear 18 which is rotationally driven by a servo motor (not shown) capable of controlling a rotation angle, and gears 19A and 19 which transmit the rotational drive force from the drive gear 18 to the rotary shaft 17.
B, 20A, 20B and a rotation direction adjusting gear 21 provided between the drive gear 18 and the gear 19B.

As a result, when a predetermined rotation angle is input to the servo motor, the servo motor rotates, and the drive gear 18 directly connected to this rotates from the gear 19A and the rotation direction adjusting gear 21.
And transmits the rotation to the gears 19A and 19B and the gear 2
Rotation is transmitted to 0A and 20B. Gears 20A, 20B
The rotary drive arms 14A and 14B mounted on the rotary shafts 17A and 17B generate a moment M corresponding to the rotation angles of the gears 20A and 20B. The organic birefringent film 4 held by the holding devices 13A and 13B by this moment M
Transforms into a U-shape.

As described above, according to the manufacturing method or the manufacturing apparatus of the polarization separation element 1 of the present embodiment, the adhesive 5 is dropped in a convex shape, the organic birefringent film 4 is deformed into a U shape, and By detecting and aligning the center position of the contact point, it is possible to expand the contact surface at the step of contacting at one contact point and this contact point, and prevent air bubbles from being caught in the bonding interface in the bonding step. Therefore, the reliability of the device can be improved. At the same time, the center position and the apex position of the adhesive 5 and the organic birefringent film 4 are detected and aligned to prevent uneven spread of the adhesive 5 and enable uniform bonding over the entire surface. In addition, a photocurable acrylic or epoxy material is used as the adhesive 5, or the diffraction grating 3 is made of a polymer having oriented molecular chains. The polymer birefringent film is stretched to orient the molecular chains. Since the polymer film is made of a polymer, it is possible to reduce the size and cost of the polarization separation element 1.

A second embodiment of the present invention will be described with reference to FIG. The same parts as those shown in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

In this embodiment, the holding device 13A, 1 included in the deforming means for deforming the organic birefringent film 4 into a U-shape.
Regarding 3B, when the space between the holding devices 13A and 13B is set narrower than the size (length) of the organic birefringent film 4, when fixing the peripheral portion of the organic birefringent film 4 to the holding devices 13A and 13B. As shown in FIG. 6B, slack is caused by its own weight. Then, as in the case of the above-described embodiment, the moment M is applied by the moment applying device 16 to deform the organic birefringent film 4 into a U-shape, and a step of making point contact is performed.

In the case of the present embodiment, when the organic birefringent film 4 is deformed into a U-shape by applying the moment M, the organic birefringent film 4 is loosened by its own weight in advance and the direction of deformation is oriented. Therefore, the deformation into the U shape is facilitated.

By the way, in the case of the present embodiment, the holding device 13 is arranged so that the organic birefringent film 4 is easily deformed due to the U-shape.
As shown in FIG. 6, it is preferable that the A and 13B are provided inclining in advance slightly downward from the horizontal. The peripheral portion of the organic birefringent film 4 is placed on the upper surfaces of the inclined holding devices 13A and 13B, and is suction-held by a vacuum suction port (not shown). The inclination angle θ of the holding devices 13A and 13B may be set according to the rigidity of the organic birefringent film 4. The inclination angle θ may be below the horizontal, and θ = −0.1 ° to −89 °
However, since the organic birefringent film 4 is intended to be deformed downward in advance so that the organic birefringent film 4 is likely to be deformed downward from the horizontal direction due to the moment force, a small angle is sufficient.
θ = −1 ° to −10 ° is preferable. This can be similarly applied to the case of the first embodiment.

[0056]

According to the first aspect of the present invention, the flexible organic birefringent film is brought into contact with the transparent substrate to be bonded at one contact point, and then the entire transparent substrate is contacted. Since the bonding is performed so that the surfaces spread, it is possible to prevent air bubbles from being entrapped in the bonding interface in the bonding process, and improve the reliability of the manufactured polarization separation element.

According to the second aspect of the invention, the organic birefringent film is easily deformed by its own weight and / or atmospheric pressure / external force. However, in the bonding step, the organic birefringent film is positively deformed into a U-shape and the apex is formed. Since it has a shape with, it is possible to surely make contact at one contact point.

According to the third aspect of the present invention, in the method of manufacturing the polarization beam splitting element according to the first or second aspect, the adhesive side, which comes into contact with the organic birefringent film, also has a convex shape before curing. Since the organic birefringent film can be reliably point-contacted with the adhesive, and the apex position of the organic birefringent film and the central position of the adhesive are aligned, The adhesive spreads evenly over the entire surface without uneven distribution, and the reliability of the manufactured polarization separation element can be further improved.

According to the invention described in claim 4, basically, after the flexible organic birefringent film is brought into contact with the adhesive on the transparent substrate to be adhered at one contact point. ,
By adhering the whole transparent substrate so that the contact surface spreads, it is possible to prevent bubbles from being entrapped in the adhering interface in the adhering step, and to improve the reliability of the manufactured polarization separation element. Further, the organic birefringent film is easily deformed by its own weight and / or atmospheric pressure / external force, but in the bonding step, the organic birefringent film is deformed into a U shape by the deforming means to have a vertex, so that one The contact can be made at the contact point. Furthermore, even on the adhesive side that receives the contact of the organic birefringent film, it is dropped so as to have a convex shape before curing, and it is possible to reliably make point contact between the organic birefringent film and the adhesive, Moreover, since the apex position of the organic birefringent film and the central position of the adhesive are aligned with each other, the adhesive can be uniformly spread over the entire surface without uneven distribution of the adhesive.

According to the fifth aspect of the invention, in the apparatus for manufacturing the polarization beam splitting element according to the fourth aspect, the deforming means includes holding means for holding two opposing points in the peripheral portion of the organic birefringent film. Then, the deforming means can be realized with a configuration including a simple holding means.

According to the invention described in claim 6, in the apparatus for manufacturing a polarization beam splitting element according to claim 5, the holding means has a slack due to its own weight in the direction of deforming the organic birefringent film into a U-shape. Since the deformation direction is directed by the deflection due to its own weight, the deformation into the U-shape can be facilitated.

According to the invention described in claim 7, in the apparatus for manufacturing a polarization beam splitting element according to claim 5 or 6, the holding means is tilted in a direction in which the peripheral portion of the organic birefringent film is deformed into a U shape. By holding, since the holding form by the holding means is inclined in the direction of deforming the peripheral portion of the organic birefringent film into a U-shape, the deformation into the U-shape can be facilitated.

According to the invention described in claim 8, in the apparatus for manufacturing a polarization beam splitting element according to any one of claims 4 to 7, a moment is applied from the peripheral portion of the organic birefringent film to the center by a moment applying device. As a result, the organic birefringent film can be reliably deformed into a U-shape.

According to the ninth aspect of the invention, in the apparatus for manufacturing a polarization beam splitting element according to any one of the fourth to eighth aspects, the joining means is an organic birefringent film whose contact surface is spread over the entire transparent substrate. On the other hand, by including a pressing device that evenly presses the entire surface to the transparent substrate side, the organic birefringent film is not
Although it is deformed into a letter shape, it is finally returned to the planar state, so that the planarity as the polarization separation element can be secured.

According to the invention of claim 10, claim 4
9. In the apparatus for manufacturing a polarization beam splitting element according to any one of items 1 to 9, even if an organic birefringent film having a generally low heat resistance temperature is used by using a photo-curing acrylic or epoxy material as an adhesive. It is not affected, the choice of adhesives expands, and in manufacturing the polarization separation element,
Cost reduction can be achieved.

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view showing a polarization beam splitting element manufactured according to a first embodiment of the present invention.

FIG. 2 is a schematic configuration diagram showing a part of a manufacturing device of a polarization separation element.

FIG. 3 is a process diagram showing the order of processes including a part of the manufacturing apparatus.

FIG. 4 is a schematic view showing how the adhesive spreads.

FIG. 5 is a schematic side view showing a configuration example of a moment applying device.

FIG. 6 is a schematic configuration diagram showing a part of a manufacturing apparatus according to a second embodiment of the present invention.

[Explanation of symbols]

1 Polarization Separation Element 2 Transparent Substrate 3 Diffraction Grating 4 Organic Birefringent Film 5 Adhesive 6 Isotropic Adhesive 7 Opposing Transparent Substrate 12 Substrate Center Detecting Means, Adhesive Center Detecting Means, Refractive Film Apex Detecting Means 13A, 13B Holding Means 15 joining means, pressing device 16 moment applying means

Claims (10)

[Claims] 1. A step of adhering an organic birefringent film having a different refractive index to a vibrating surface having a different incident light on a transparent substrate, and a step of forming a periodic uneven shape as a diffraction grating on the organic birefringent film. A method for manufacturing a polarization separation element, comprising the steps of filling an indented portion of the diffraction grating with an isotropic adhesive and bonding an opposing transparent substrate on the diffraction grating, and separating two orthogonal polarization components. In the step of adhering the organic birefringent film, the step of bringing the flexible organic birefringent film into contact with the transparent substrate at one contact point, and the transparent substrate from the contact point And a step of adhering the whole by expanding a contact surface, the manufacturing method of the polarization beam splitting element. 2. The step of bringing the flexible organic birefringent film into contact with the transparent substrate at one contact point
The method for manufacturing a polarization beam splitting element according to claim 1, wherein the organic birefringent film is deformed into a U-shape and the apexes thereof are brought into contact with each other. 3. The step of bringing the flexible organic birefringent film into contact with the transparent substrate at one contact point,
3. The polarization separation element according to claim 1, wherein the organic birefringent film is aligned and brought into contact with an adhesive before curing which is dropped in the center of the transparent substrate and has a convex shape. Manufacturing method. 4. An organic birefringent film having a different refractive index is adhered to a vibrating surface having different incident light on a transparent substrate, and a periodic uneven shape is formed as a diffraction grating on the organic birefringent film. Is a device for manufacturing a polarization separation element for separating two orthogonal polarization components, which is configured to be filled with an isotropic adhesive in the recessed part of the above and to bond an opposing transparent substrate on the diffraction grating, Substrate center detecting means for detecting the central position of the substrate, an adhesive dropping device for dropping an adhesive to the central position on the transparent substrate, and detecting the central position of the adhesive dropped on the transparent substrate Adhesive center detecting means, deforming means for deforming the organic birefringent film into a U-shape, refraction film apex detecting means for detecting an apex position of the organic birefringent film deformed in a U-shape, U The organic birefringent film deformed into a letter shape Position adjusting means for aligning the apex position of the adhesive with the central position of the adhesive, and the aligned organic birefringent film and the adhesive are brought into contact with each other at one contact point, and then the transparent point is contacted from the contact point. An apparatus for manufacturing a polarization beam splitting element, comprising: a joining means for adhering the entire substrate by expanding a contact surface. 5. The apparatus for manufacturing a polarization beam splitting element according to claim 4, wherein the deforming unit includes a holding unit that holds two opposing points on the peripheral portion of the organic birefringent film. 6. The holding means is configured to make the organic birefringent film U
6. The apparatus for manufacturing a polarization beam splitting element according to claim 5, wherein the apparatus is held so as to have slack due to its own weight in a direction in which it is deformed into a letter shape. 7. The apparatus for manufacturing a polarization beam splitting element according to claim 5, wherein the holding means holds the peripheral portion of the organic birefringent film by inclining it in a direction of deforming it into a U-shape. 8. The deforming means includes a moment applying device for generating a moment from the peripheral portion of the organic birefringent film to the center to deform the organic birefringent film into a U-shape. An apparatus for manufacturing a polarization separation element as described in 1. 9. The bonding means includes a pressing device that uniformly presses the entire surface of the organic birefringent film whose contact surface is spread over the entire transparent substrate to the transparent substrate side. 9. The apparatus for manufacturing a polarization separation element according to any one of 4 to 8. 10. The apparatus for manufacturing a polarization beam splitting element according to claim 4, wherein the adhesive is made of a photo-curing acrylic or epoxy material.