JP2003137607A - Washing method for glass processed article and manufacturing method for optical fiber using the same - Google Patents

Washing method for glass processed article and manufacturing method for optical fiber using the same

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Publication number
JP2003137607A
JP2003137607A JP2001331285A JP2001331285A JP2003137607A JP 2003137607 A JP2003137607 A JP 2003137607A JP 2001331285 A JP2001331285 A JP 2001331285A JP 2001331285 A JP2001331285 A JP 2001331285A JP 2003137607 A JP2003137607 A JP 2003137607A
Authority
JP
Japan
Prior art keywords
glass
optical fiber
cleaning
washing
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2001331285A
Other languages
Japanese (ja)
Inventor
Masao Kuniyoshi
正雄 国吉
Naoki Shamoto
尚樹 社本
Takafumi Kajima
孝文 鹿嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
Original Assignee
Fujikura Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Ltd filed Critical Fujikura Ltd
Priority to JP2001331285A priority Critical patent/JP2003137607A/en
Publication of JP2003137607A publication Critical patent/JP2003137607A/en
Withdrawn legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/01205Manufacture of preforms for drawing fibres or filaments starting from tubes, rods, fibres or filaments
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

PROBLEM TO BE SOLVED: To develop a washing method for a glass processed article by which a matter to be washed can be highly purely washed without damaging the surface thereof and to provide a manufacturing method for glass fiber by which the reduction of the characteristics of glass fiber caused by washing stages for a glass preform and a glass bar which are to be semiproducts of optical fiber can be suppressed. SOLUTION: The glass processed article is supersonically washed using a supersonic wave having 80-1,000 kHz frequency. Washing liquid containing a quaternary ammonium hydroxide is favorably used. Defective products can be suppressed and yield can be enhanced in the manufacturing stage for the optical fiber by applying this washing method to the washing of the glass base material and the glass bar for the optical fiber.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】この発明は、光ファイバ用ガ
ラス母材等、高度な清浄度が要求されるガラス加工物の
洗浄方法に関し、特に、洗浄による傷つきの発生が抑制
されるガラス加工物の洗浄方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for cleaning a glass processed material, such as a glass base material for optical fiber, which requires a high degree of cleanliness, and more particularly, a glass processed material in which scratches caused by cleaning are suppressed. Regarding the cleaning method.

【0002】[0002]

【従来の技術】光通信や光計測などの分野において、信
号光の伝送経路として光ファイバが広く用いられてい
る。この種の光ファイバは、一般に、まず、光ファイバ
のコアとなるべきコア部の周囲に、光ファイバのクラッ
ドとなるべきクラッド部を設けることによりファイバ母
材を作製し、さらにこのファイバ母材を加熱して所定の
線径まで線引きすることによって製造されている。
2. Description of the Related Art In the fields of optical communication and optical measurement, optical fibers are widely used as signal light transmission paths. In this type of optical fiber, generally, a fiber preform is prepared by first providing a clad part to be the clad of the optical fiber around the core part to be the core of the optical fiber, and further to prepare this fiber preform. It is manufactured by heating and drawing to a predetermined wire diameter.

【0003】前記ファイバ母材は、種々の方法によって
製造されているが、そのうち、クラッド部となるガラス
管にコア部となるガラス棒を挿入し、さらに加熱延伸し
て一体化する方法がある。また、偏波保持光ファイバ用
のファイバ母材の製造方法として、クラッド部の所定部
に2個または4個の孔を穿孔して、この各孔に棒状の応
力付与部材を挿入し、さらに加熱延伸して一体化する方
法がある。
The fiber base material is manufactured by various methods. Among them, there is a method in which a glass rod serving as a core portion is inserted into a glass tube serving as a clad portion and further heated and drawn to be integrated. In addition, as a method of manufacturing a fiber preform for a polarization-maintaining optical fiber, two or four holes are punched in a predetermined portion of a clad portion, a rod-shaped stress applying member is inserted into each hole, and heating is further performed. There is a method of stretching and integrating.

【0004】以上のような中空筒状のガラス母材の中空
部にガラス棒を挿入し、加熱一体化してファイバ母材を
製造する光ファイバの製造工程においては、前記ガラス
母材およびガラス棒の表面は、ガラス棒をガラス母材の
中空部に挿入する前に、高度に平滑に、かつ清浄に仕上
げられている必要がある。このため、前記ガラス母材等
の表面は、砥石研削、遊離砥粒研削、仕上げ研磨などの
多段階の工程によって平滑に加工されている。また、前
記加工工程によって発生する砥石成分、遊離砥粒、防錆
油、切削油、加工屑などの汚染物は、種々の洗浄剤を用
いて前記ガラス加工物を洗浄することによって除去され
ている。
In the manufacturing process of an optical fiber in which a glass rod is inserted into the hollow portion of the hollow cylindrical glass preform as described above and heated and integrated to produce a fiber preform, the glass preform and the glass rod are The surface should be highly smooth and clean before inserting the glass rod into the hollow of the glass preform. Therefore, the surface of the glass base material or the like is smoothed by a multi-step process such as grinding stone grinding, loose abrasive grain grinding, and finish polishing. Further, grindstone components, loose abrasive grains, rust preventive oil, cutting oil, processing wastes and the like generated in the processing step are removed by cleaning the glass processed material with various cleaning agents. .

【0005】このようなガラス加工物の洗浄工程におい
ては、周波数が数〜数十kHz程度の超音波を用いた超
音波洗浄が用いられることが多い。この超音波洗浄にお
いては、ガラス加工物を洗浄液で満たされた洗浄槽に浸
漬し、さらに、前記洗浄液に超音波振動を与えたとき、
洗浄液中の水分子等の粒子が高速に振動させられること
により、水が急速に気化して気泡が発生し、この気泡が
急速に凝縮して消滅することが繰り返され、局所的に高
温高圧の状態になる。これをキャビテーション(空洞現
象)といい、この現象により汚染物が分解され、洗浄液
中に容易に分散するようになるので、洗浄を効果的に行
うことができる。
In the cleaning process of such a glass processed product, ultrasonic cleaning using ultrasonic waves having a frequency of several to several tens of kHz is often used. In this ultrasonic cleaning, when the glass processed product is immersed in a cleaning tank filled with a cleaning liquid, and further ultrasonic vibration is applied to the cleaning liquid,
By vibrating particles such as water molecules in the cleaning liquid at high speed, water is rapidly vaporized to generate bubbles, and the bubbles are rapidly condensed and disappeared repeatedly. It becomes a state. This is called cavitation (cavitation phenomenon), and contaminants are decomposed by this phenomenon and easily dispersed in the cleaning liquid, so that cleaning can be effectively performed.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、このよ
うな超音波洗浄を行った場合、上述のキャビテーション
による衝撃のため、ガラスの表面に傷や割れ、欠け等の
欠陥が発生したり、その傷が拡大したりすることがあ
る。すると、このような傷は、光ファイバを製造する過
程において気泡が発生する原因となる。すると、光ファ
イバの線引き時に断線しやすくなったり、光ファイバの
光学的特性にバラツキや欠陥が発生したりし、歩留まり
が低下するおそれがある。
However, when such ultrasonic cleaning is performed, defects such as scratches, cracks, and chips are generated on the surface of the glass due to the impact of the above-mentioned cavitation, or the scratches are generated. It may expand. Then, such scratches cause bubbles to be generated in the process of manufacturing the optical fiber. Then, the optical fiber may be easily broken at the time of drawing, the optical characteristics of the optical fiber may be varied or defective, and the yield may be reduced.

【0007】従って、本発明の課題は、被洗浄物である
ガラス加工物の表面に傷をつけることなく、極めて清浄
に洗浄することができるガラス加工物の洗浄方法を開発
すること、ならびに、また、光ファイバの半製品である
ガラス母材およびガラス棒の洗浄工程に起因する光ファ
イバの特性の低下を抑制できる光ファイバの製造方法を
提供することにある。
Therefore, an object of the present invention is to develop a method for cleaning a glass work which can be cleaned extremely cleanly without damaging the surface of the glass work which is the object to be cleaned, and also An object of the present invention is to provide a method of manufacturing an optical fiber, which can suppress deterioration of characteristics of the optical fiber due to a cleaning process of a glass base material and a glass rod which are semi-finished products of the optical fiber.

【0008】[0008]

【課題を解決するための手段】前記課題は、前記ガラス
加工物を、80kHz〜1000kHzの周波数の超音
波を用いて超音波洗浄することによって解決される。こ
のとき洗浄液としては、水酸化第四級アンモニウムを含
有するものを用いることが好ましい。この洗浄方法を光
ファイバ用ガラス母材およびガラス棒の洗浄に適用する
ことにより、光ファイバの製造工程における不良品の発
生を抑制し、歩留まりを向上することができる。
The above problems can be solved by ultrasonically cleaning the glass workpiece with ultrasonic waves having a frequency of 80 kHz to 1000 kHz. At this time, it is preferable to use a cleaning liquid containing quaternary ammonium hydroxide. By applying this cleaning method to cleaning the glass base material for optical fiber and the glass rod, it is possible to suppress the generation of defective products in the manufacturing process of the optical fiber and improve the yield.

【0009】[0009]

【発明の実施の形態】以下、実施の形態に基づいて、本
発明を詳しく説明する。本発明のガラス加工物の洗浄方
法におけるガラス加工物とは、公知の任意の加工方法に
よって加工されたガラス加工物をいうが、本発明のガラ
ス加工物の洗浄方法は、特に、砥石研削、遊離砥粒研
削、仕上げ研磨などの工程によって加工され、前記加工
工程において発生したダイヤモンド粉等の砥石成分、固
定器具から移行した鉄、銅等の金属成分、炭化珪素、酸
化セリウムなどの遊離砥粒などからなるサブミクロンオ
ーダーの微細な汚染物が付着したものに好適である。
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described in detail based on the embodiments. The glass processed product in the glass processed product cleaning method of the present invention refers to a glass processed product processed by any known processing method, but the glass processed product cleaning method of the present invention is, in particular, grindstone grinding, loosening. Grinding, finishing grinding, etc. are processed, and grindstone components such as diamond powder generated in the working process, metal components such as iron and copper transferred from the fixtures, silicon carbide, free abrasive grains such as cerium oxide, etc. It is suitable for those to which submicron-order fine contaminants consisting of are attached.

【0010】本実施の形態においては、前記ガラス加工
物を80kHz〜1000kHz(1MHz)の周波数
の超音波を用いて超音波洗浄する。このように、従来に
比して高周波帯域の超音波を用いる理由は以下のとおり
である。
In the present embodiment, the glass workpiece is ultrasonically cleaned using ultrasonic waves having a frequency of 80 kHz to 1000 kHz (1 MHz). The reason for using the ultrasonic wave in the high frequency band as compared with the conventional one is as follows.

【0011】上述のように、数〜数十kHz程度の超音
波を用いた場合は、キャビテーションが発生する。しか
しながら、超音波の周波数をこれより高くした場合、キ
ャビテーションが発生しうる液中音圧の下限が大きくな
ることが知られており、このためキャビテーションが起
こりにくくなる。また、超音波の周波数が高くなると、
超音波による水分子などの粒子の振動の加速度は、周波
数の二乗に比例して増加するので、前記粒子の振動に基
づく強い洗浄力を得ることができる。本実施の形態にお
いては、高い洗浄効果を得るために、超音波の出力は、
100〜1200Wの範囲とすることが好ましい。
As described above, cavitation occurs when ultrasonic waves of several to several tens of kHz are used. However, when the frequency of ultrasonic waves is set higher than this, it is known that the lower limit of the sound pressure in liquid that may cause cavitation becomes large, and therefore cavitation becomes difficult to occur. Also, when the frequency of ultrasonic waves increases,
Since the acceleration of vibration of particles such as water molecules due to ultrasonic waves increases in proportion to the square of the frequency, a strong detergency based on the vibration of the particles can be obtained. In the present embodiment, in order to obtain a high cleaning effect, the output of ultrasonic waves is
It is preferable to set it in the range of 100 to 1200 W.

【0012】本実施の形態における洗浄液としては、公
知の適切な洗浄剤を含有するものを用いることができる
が、特に、水酸化第四級アンモニウムを含有するものが
好ましい。ガラス加工物の表面は、水酸化第四級アンモ
ニウムによって薄くエッチングされる。このため、汚染
物は、その種類や性状によらず、該ガラス加工物の表面
から剥離されて除去される。
As the cleaning liquid in the present embodiment, a liquid containing a known suitable cleaning agent can be used, but a liquid containing quaternary ammonium hydroxide is particularly preferable. The surface of the glass workpiece is thinly etched with quaternary ammonium hydroxide. Therefore, the contaminants are peeled off from the surface of the glass processed material and removed regardless of the type or property.

【0013】水酸化第四級アンモニウムは、水酸化ナト
リウム等の無機水酸化物と同程度に強いアルカリであり
ながら、金属イオンやハロゲンイオンを含まないので、
成分イオンの残留によってガラスの組成および性質が変
化させられることがない。このため、例えば、光ファイ
バ用ガラス母材に本実施の形態である洗浄方法を適用し
ても、その最終製品である光ファイバの特性の低下を招
くおそれがない。
Quaternary ammonium hydroxide is an alkali that is as strong as inorganic hydroxides such as sodium hydroxide, but does not contain metal ions or halogen ions.
Residual component ions do not change the composition and properties of the glass. Therefore, for example, even if the cleaning method according to the present embodiment is applied to the glass base material for an optical fiber, there is no risk of deteriorating the characteristics of the final product, the optical fiber.

【0014】前記水酸化第四級アンモニウムとしては、
ガラスの表面に残留しても、加熱によって容易に分解気
化し、除去されるものが好ましい。前記水酸化第四級ア
ンモニウムとしては、水酸化テトラメチルアンモニウ
ム、水酸化エチルトリメチルアンモニウム、水酸化ジエ
チルジメチルアンモニウム、水酸化トリエチルメチルア
ンモニウム、水酸化テトラエチルアンモニウム等が例示
される。このうち、水酸化テトラメチルアンモニウム
(以下、TMAHという)は、加熱によりメタノールと
トリメチルアミンとに分解し、容易に気化するので、特
に好ましい。
As the quaternary ammonium hydroxide,
It is preferable that even if it remains on the surface of the glass, it is easily decomposed and vaporized by heating to be removed. Examples of the quaternary ammonium hydroxide include tetramethylammonium hydroxide, ethyltrimethylammonium hydroxide, diethyldimethylammonium hydroxide, triethylmethylammonium hydroxide, tetraethylammonium hydroxide and the like. Of these, tetramethylammonium hydroxide (hereinafter referred to as TMAH) is particularly preferable because it decomposes into methanol and trimethylamine by heating and is easily vaporized.

【0015】前記水酸化第四級アンモニウムは、水や低
級アルコール等の溶媒または前記溶媒の複数種類の混合
溶媒に溶解されて使用される。この洗浄液における水酸
化第四級アンモニウムの濃度は、2〜30重量%とし、
特に、5〜20重量%とするのが好ましい。濃度が2重
量%未満では洗浄力が弱く、30重量%を超えると、ア
ルカリが強すぎて、ガラスを損傷し、その表面の平滑性
を損なうおそれがある。
The quaternary ammonium hydroxide is used after being dissolved in a solvent such as water or a lower alcohol or a mixed solvent of a plurality of kinds of the above solvents. The concentration of the quaternary ammonium hydroxide in this cleaning liquid is 2 to 30% by weight,
In particular, it is preferably 5 to 20% by weight. If the concentration is less than 2% by weight, the detergency is weak, and if it exceeds 30% by weight, the alkali is too strong, which may damage the glass and impair the smoothness of the surface.

【0016】前記洗浄液には、被洗浄物の汚染がひどい
場合には、洗浄力を高めるために、必要に応じて、公知
の界面活性剤を0.01〜1%添加してもよい。ただ
し、前記界面活性剤は、アルカリ金属を含まないものと
される。
In the case where the object to be cleaned is highly contaminated, the cleaning liquid may optionally contain 0.01 to 1% of a known surfactant in order to enhance the cleaning power. However, the surfactant does not contain an alkali metal.

【0017】本実施の形態において、前記洗浄液の温度
は、20〜80℃の範囲が好ましく、20〜60℃の範
囲が特に好ましい。温度が20℃より低いと洗浄効果が
十分でなく、80℃より高いと、洗浄剤の変質や、蒸気
の発生による作業環境の悪化の問題がある。また、洗浄
時間は、3〜180分の範囲が好ましく、3〜120分
の範囲がより好ましい。洗浄時間が3分より短いと、洗
浄効果が十分でなく、180分より長いと、洗浄効果は
それ以上向上せず、生産性に劣る。
In the present embodiment, the temperature of the cleaning liquid is preferably in the range of 20 to 80 ° C, particularly preferably 20 to 60 ° C. If the temperature is lower than 20 ° C., the cleaning effect is not sufficient, and if it is higher than 80 ° C., there is a problem of deterioration of the cleaning agent or deterioration of working environment due to generation of steam. The washing time is preferably in the range of 3 to 180 minutes, more preferably in the range of 3 to 120 minutes. If the washing time is shorter than 3 minutes, the washing effect is not sufficient, and if it is longer than 180 minutes, the washing effect is not further improved and the productivity is deteriorated.

【0018】洗浄後の処理は、例えば、従来行われるよ
うに、被洗浄物を純水で適宜すすいだのち、乾燥するこ
とによって行うことができる。ただし、本実施の形態に
おいて洗浄剤として用いられる水酸化第四級アンモニウ
ムは、上述のように、加熱により分解気化する性質を有
するので、すすぎが不十分であったとしても、洗浄剤の
残留によってガラスが劣化させられるおそれがない。
The treatment after cleaning can be performed, for example, by appropriately rinsing the object to be cleaned with pure water and then drying, as is conventionally done. However, since the quaternary ammonium hydroxide used as the cleaning agent in the present embodiment has the property of being decomposed and vaporized by heating as described above, even if the rinsing is insufficient, the residual cleaning agent causes There is no risk of the glass being deteriorated.

【0019】次に、本発明の光ファイバの製造方法の実
施の形態について、具体例を挙げて説明する。 [実施形態1]シングルモード光ファイバを製造する手
順の一例である。まず、石英ガラス棒を穿孔し、次いで
この孔の内面を研磨して、クラッドとなる石英ガラス管
を製造する。次いで、前記石英ガラス管を、この本発明
のガラス加工物の洗浄方法により、内面および外面とも
に洗浄する。次いで、VAD法等の公知の方法で作成さ
れたコアロッドを、前記石英ガラス管の孔に挿入し、加
熱一体化してファイバ母材を形成する。さらにこのファ
イバ母材を線引きすることによってシングルモード光フ
ァイバを得る。
Next, an embodiment of the method for producing an optical fiber according to the present invention will be described with reference to specific examples. [Embodiment 1] An example of a procedure for manufacturing a single-mode optical fiber. First, a quartz glass rod is punched, and then the inner surface of this hole is polished to manufacture a quartz glass tube to be a clad. Next, the quartz glass tube is cleaned on both the inner surface and the outer surface by the method for cleaning a glass workpiece of the present invention. Next, a core rod prepared by a known method such as the VAD method is inserted into the hole of the quartz glass tube and heated and integrated to form a fiber preform. Further, a single mode optical fiber is obtained by drawing this fiber preform.

【0020】[実施形態2]偏波保持光ファイバを製造
する手順の一例である。まず、コアおよびクラッドが形
成されたガラス母材のクラッド部分に、コアを中心にし
て対称となる所定の位置に2個の孔を穿孔する。次いで
この孔の内面を研磨する。次いで、この穿孔されたガラ
ス母材を、本発明のガラス加工物の洗浄方法により洗浄
する。また、応力付与部となるガラス棒を、所定の外径
となるように研磨して応力付与部材とする。次いで、こ
の応力付与部材を、本発明のガラス加工物の洗浄方法に
より洗浄する。次いで、前記応力付与部材を、前記穿孔
されたガラス母材の孔に挿入し、加熱一体化してファイ
バ母材を形成する。さらにこのファイバ母材を線引きす
ることによって偏波保持光ファイバを得る。
[Embodiment 2] This is an example of a procedure for manufacturing a polarization maintaining optical fiber. First, two holes are punched in a clad portion of a glass base material on which a core and a clad are formed, at predetermined symmetrical positions with respect to the core. Then, the inner surface of this hole is polished. Next, the perforated glass base material is washed by the method for washing a glass processed material of the present invention. Further, the glass rod that serves as the stress applying portion is ground to have a predetermined outer diameter to form a stress applying member. Next, this stress imparting member is washed by the method for washing a glass processed product of the present invention. Next, the stress applying member is inserted into the hole of the perforated glass base material and heated and integrated to form a fiber base material. Furthermore, a polarization-maintaining optical fiber is obtained by drawing this fiber preform.

【0021】ただし、本発明の光ファイバの製造方法の
実施形態は、上述の具体例に必ずしも限定されるもので
はない。通常に実施される光ファイバの製造方法におい
て、光ファイバの半製品であるガラス母材等の洗浄を、
本発明のガラス加工物の洗浄方法により行うことによっ
て、高い清浄度を有するとともに、特性の低下のない光
ファイバを製造することができる。
However, the embodiment of the optical fiber manufacturing method of the present invention is not necessarily limited to the above-mentioned specific example. In the method of manufacturing an optical fiber that is usually carried out, cleaning the glass base material, which is a semi-finished product of the optical fiber,
By performing the method for cleaning a glass work of the present invention, an optical fiber having high cleanliness and no deterioration in characteristics can be manufactured.

【0022】以下、本発明を試験例により説明するが、
本発明をこれによって限定するものではない。 [試験例1]また、応力付与部用ガラスからなるガラス
棒に対し、#80の砥石を用いて粗研削を行い、次い
で、#800の砥石を用いて精研削を行った。さらに、
#1500の砥石にて心無し研削を行った後、平均粒径
1.7μm以下の酸化セリウムを含有する研磨液とブラ
シとを用いて仕上げ研磨を行い、応力付与部材を得た。
The present invention will be described below with reference to test examples.
The present invention is not limited thereby. [Test Example 1] Further, a glass rod made of glass for stress application part was roughly ground using a # 80 grindstone, and then finely ground using a # 800 grindstone. further,
After performing centerless grinding with a # 1500 grindstone, final polishing was performed using a polishing liquid containing a cerium oxide having an average particle size of 1.7 μm or less and a brush to obtain a stress imparting member.

【0023】また、直径20mm、長さ500mmの石
英ガラス棒に対し、まず#170の工具ににて所定の位
置に穿孔し、次いで、順に#400、#800、#20
00、#4500の砥石を用いて孔の内面研削を行っ
た。さらに、平均粒径1.7μm以下の酸化セリウムを
含有する研磨液とブラシとを用いて仕上げ研磨を行い、
ガラス母材を得た。
Further, a quartz glass rod having a diameter of 20 mm and a length of 500 mm is first perforated at a predetermined position with a # 170 tool, and then # 400, # 800, # 20 in that order.
The inner surface of the hole was ground using the grindstones of No. 00 and # 4500. Further, final polishing is performed using a polishing liquid containing a cerium oxide having an average particle diameter of 1.7 μm or less and a brush,
A glass base material was obtained.

【0024】このようにして得られた応力付与部材およ
びガラス母材を、濃度10重量%のTMAH中に浸漬
し、表1に示す種々の周波数の超音波を用いて、温度2
5℃にて10分間超音波洗浄を行った。また、超音波の
出力は300Wとした。洗浄後は、いずれも純水で3回
すすいだのち、清浄な空気を吹き付けて乾燥させた。
The stress-applying member and the glass base material thus obtained were immersed in TMAH having a concentration of 10% by weight, and ultrasonic waves of various frequencies shown in Table 1 were used to obtain a temperature of 2%.
Ultrasonic cleaning was performed at 5 ° C for 10 minutes. The output of ultrasonic waves was 300W. After washing, each was rinsed three times with pure water and then dried by blowing clean air.

【0025】各洗浄剤の評価は、被洗浄物をレーザ顕微
鏡(×1000)の下観察して残留汚染物の有無と、傷
の発生および進行の有無を検査することによって行っ
た。前記試験の結果を、応力付与部材については表1
に、また、ガラス母材については表2に示す。
Evaluation of each cleaning agent was carried out by observing the object to be cleaned under a laser microscope (× 1000) and inspecting for the presence of residual contaminants and for the occurrence and progress of scratches. The test results are shown in Table 1 for the stress applying member.
Table 2 shows the glass base material.

【0026】[0026]

【表1】 [Table 1]

【0027】[0027]

【表2】 [Table 2]

【0028】表1から明らかなように、超音波の周波数
が28kHzおよび38kHzであると、汚染物の残留
および傷の発生が確認された。それに対し、超音波の周
波数が100、200、950、1000kHzの場
合、汚染物の残留および傷の発生は検出されず、表面は
極めて清浄かつ平滑なものであった。
As is clear from Table 1, when the ultrasonic frequencies were 28 kHz and 38 kHz, it was confirmed that contaminants remained and scratches were generated. On the other hand, when the frequency of ultrasonic waves was 100, 200, 950, and 1000 kHz, residual contaminants and the generation of scratches were not detected, and the surface was extremely clean and smooth.

【0029】[試験例2]前記試験例1と同様に、ただ
し洗浄温度を70℃として、応力付与部材およびガラス
母材の洗浄を行った。被洗浄物をレーザ顕微鏡(×10
00)の下観察して残留汚染物の有無と、傷の発生およ
び進行の有無を検査することによって行った。前記試験
の結果を、応力付与部材については表3に、また、ガラ
ス母材については表4に示す。
[Test Example 2] The stress applying member and the glass base material were cleaned in the same manner as in Test Example 1 except that the cleaning temperature was 70 ° C. Use a laser microscope (× 10
00) to observe the presence or absence of residual contaminants and the occurrence and progress of scratches. The results of the test are shown in Table 3 for the stress applying member and in Table 4 for the glass base material.

【0030】[0030]

【表3】 [Table 3]

【0031】[0031]

【表4】 [Table 4]

【0032】表3および表4から明らかなように、超音
波の周波数が28kHzおよび38kHzであると、汚
染物の残留および傷の発生が確認された。それに対し、
超音波の周波数が100、200、950、1000k
Hzの場合、汚染物の残留および傷の発生は検出され
ず、表面は極めて清浄かつ平滑なものであった。
As is clear from Tables 3 and 4, when the ultrasonic frequencies were 28 kHz and 38 kHz, it was confirmed that contaminants remained and scratches were generated. For it,
Ultrasonic frequency is 100, 200, 950, 1000k
At Hz, no residual contaminants or scratches were detected and the surface was very clean and smooth.

【0033】[試験例3]上述の試験例1のものと同様
に、応力付与部材と、所定の位置に穿孔されたガラス母
材とを製造し、これらを濃度10重量%のTMAH中に
浸漬して、周波数100kHz、出力300Wの超音波
を用いて、温度25℃にて10分間超音波洗浄した。純
水で3回すすぎ乾燥させたのち、前記応力付与部材を前
記ガラス母材の孔に挿入し、加熱一体化ののち所定の太
さに紡糸して、偏波保持光ファイバを製造した。10k
m線引きしたとき、断線は発生しなかった。得られた偏
波保持光ファイバについて検査したところ、気泡の発生
は2〜3個/10kmであった。この偏波保持光ファイ
バの特性には何ら異常は見られなかった。
[Test Example 3] Similar to the test example 1 described above, a stress applying member and a glass base material perforated at predetermined positions were manufactured, and these were immersed in TMAH having a concentration of 10% by weight. Then, ultrasonic cleaning with a frequency of 100 kHz and an output of 300 W was performed at a temperature of 25 ° C. for 10 minutes. After rinsing and drying with pure water three times, the stress applying member was inserted into the hole of the glass base material, integrated with heating, and then spun to a predetermined thickness to manufacture a polarization maintaining optical fiber. 10k
No disconnection occurred when the m wire was drawn. When the polarization-maintaining optical fiber thus obtained was inspected, the number of bubbles generated was 2-3 cells / 10 km. No abnormalities were observed in the characteristics of this polarization maintaining optical fiber.

【0034】[試験例4]上述の試験例1のものと同様
に、応力付与部材と、所定の位置に穿孔されたガラス母
材とを製造し、これらを洗浄することなく、前記応力付
与部材を前記ガラス母材の孔に挿入し、加熱一体化の
後、所定の太さに紡糸して、偏波保持光ファイバを製造
した。10km線引きしたとき、10回/10kmの確
率で断線が発生した。得られた偏波保持光ファイバにつ
いて検査したところ、気泡の発生は50個/10kmで
あった。
[Test Example 4] Similar to Test Example 1 described above, a stress applying member and a glass base material perforated at predetermined positions were manufactured, and the stress applying member was washed without washing them. Was inserted into the hole of the glass base material, heated and integrated, and then spun into a predetermined thickness to manufacture a polarization-maintaining optical fiber. When the wire was drawn for 10 km, the wire was broken 10 times / 10 km. When the obtained polarization-maintaining optical fiber was inspected, the number of bubbles generated was 50 cells / 10 km.

【0035】[0035]

【発明の効果】以上説明したように、本発明のガラス加
工物の洗浄方法によれば、研磨等の加工が施されたガラ
ス加工物を効果的かつ効率的に洗浄でき、かつ洗浄にお
ける傷の発生や拡大が防止される。このとき、洗浄剤と
して用いられる水酸化第四級アンモニウムを用いること
により、一層高い洗浄効果を得ることができる。この水
酸化第四級アンモニウムは、加熱により容易に分解気化
するので、すすぎが不十分であっても、得られる製品に
悪影響を及ぼさない。
As described above, according to the method for cleaning a glass processed product of the present invention, the glass processed product that has been subjected to processing such as polishing can be effectively and efficiently cleaned, and scratches in the cleaning process can be prevented. Occurrence and expansion are prevented. At this time, a higher cleaning effect can be obtained by using quaternary ammonium hydroxide used as a cleaning agent. Since this quaternary ammonium hydroxide is easily decomposed and vaporized by heating, even if the rinsing is insufficient, it does not adversely affect the obtained product.

【0036】本発明の光ファイバの製造方法は、上述の
ガラス加工物の洗浄方法を利用したものであり、この方
法によれば、光ファイバの半製品であるガラス母材の洗
浄工程の生産性と信頼性が著しく改善させられる。従っ
て、このガラス母材から光ファイバを製造することによ
り、得られる光ファイバに気泡などの欠陥が発生するこ
とが極めて少なくなり、歩留りが向上させられる。
The method for producing an optical fiber according to the present invention utilizes the above-described method for cleaning a glass workpiece. According to this method, the productivity of the step of cleaning a glass base material which is a semi-finished product of an optical fiber is improved. And the reliability is significantly improved. Therefore, when an optical fiber is manufactured from this glass base material, defects such as bubbles are hardly generated in the obtained optical fiber, and the yield is improved.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 鹿嶋 孝文 千葉県佐倉市六崎1440番地 株式会社フジ クラ佐倉事業所内 Fターム(参考) 4G021 BA01 BA02 BA03 4G059 AA11 AB01 AB03    ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Takafumi Kashima             Fuji Co., Ltd. 1440 Rokuzaki, Sakura City, Chiba Prefecture             Kura Sakura Office F-term (reference) 4G021 BA01 BA02 BA03                 4G059 AA11 AB01 AB03

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 80〜1000kHzの周波数の超音波
を用いて超音波洗浄することを特徴とするガラス加工物
の洗浄方法。
1. A method for cleaning a glass workpiece, which comprises ultrasonic cleaning using ultrasonic waves having a frequency of 80 to 1000 kHz.
【請求項2】 前記ガラス加工物を、水酸化第四級アン
モニウムを含有する洗浄液に浸漬して超音波洗浄するこ
とを特徴とする請求項1に記載のガラス加工物の洗浄方
法。
2. The method for cleaning a glass processed product according to claim 1, wherein the glass processed product is immersed in a cleaning liquid containing quaternary ammonium hydroxide and ultrasonically cleaned.
【請求項3】 中空筒状のガラス母材の中空部にガラス
棒を挿入し、加熱一体化してファイバ母材を製造し、こ
のファイバ母材を線引きして光ファイバを製造する光フ
ァイバの製造方法において、前記ガラス母材およびガラ
ス棒のいずれか一方もしくは両方を、請求項1または2
に記載のガラス加工物の洗浄方法によって洗浄すること
を特徴とする光ファイバの製造方法。
3. An optical fiber for producing an optical fiber by inserting a glass rod into a hollow portion of a hollow cylindrical glass preform, heating and integrating the fiber preform, and drawing the fiber preform to produce an optical fiber. In the method, one or both of the glass base material and the glass rod is used,
A method for manufacturing an optical fiber, comprising: cleaning the glass processed material according to claim 4.
JP2001331285A 2001-10-29 2001-10-29 Washing method for glass processed article and manufacturing method for optical fiber using the same Withdrawn JP2003137607A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001331285A JP2003137607A (en) 2001-10-29 2001-10-29 Washing method for glass processed article and manufacturing method for optical fiber using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001331285A JP2003137607A (en) 2001-10-29 2001-10-29 Washing method for glass processed article and manufacturing method for optical fiber using the same

Publications (1)

Publication Number Publication Date
JP2003137607A true JP2003137607A (en) 2003-05-14

Family

ID=19146888

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2003137607A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108144907A (en) * 2017-12-29 2018-06-12 江苏通鼎光棒有限公司 A kind of OVD mandrel bar cleaning facilities

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108144907A (en) * 2017-12-29 2018-06-12 江苏通鼎光棒有限公司 A kind of OVD mandrel bar cleaning facilities
CN108144907B (en) * 2017-12-29 2023-11-03 通鼎互联信息股份有限公司 OVD plug cleaning equipment

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