JP2003136025A - Washing method and washing apparatus for plate-like body - Google Patents

Washing method and washing apparatus for plate-like body

Info

Publication number
JP2003136025A
JP2003136025A JP2001340282A JP2001340282A JP2003136025A JP 2003136025 A JP2003136025 A JP 2003136025A JP 2001340282 A JP2001340282 A JP 2001340282A JP 2001340282 A JP2001340282 A JP 2001340282A JP 2003136025 A JP2003136025 A JP 2003136025A
Authority
JP
Japan
Prior art keywords
plate
cleaning
shower
glass
shaped body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001340282A
Other languages
Japanese (ja)
Inventor
Mitsuhiro Onda
光弘 恩田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP2001340282A priority Critical patent/JP2003136025A/en
Publication of JP2003136025A publication Critical patent/JP2003136025A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a means for preventing stagnation of a washing solution at the time of shower washing of a glass surface in a method for washing a rectangular type glass plate with a large surface area, which is a glass body of such as glass for a liquid crystal display. SOLUTION: The washing method and the washing apparatus satisfy one or all of the following: employing shower arrangement so as to shower a washing solution in a V-form to glass by forming showering pipes into V-shapes, using showering pipes whose angles to the center line of the width of the glass are set to be 10 to 50 degrees, and setting the showering angle so as to keep the entering angle of the showering center to the horizontal surface of the glass within 85 degrees.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、液晶表示用ガラス
の様な板状体の洗浄方法、特に角型の大面積板状体の洗
浄方法、およびそれに用いる洗浄装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for cleaning a plate-like body such as liquid crystal display glass, and more particularly to a method for cleaning a rectangular large-area plate-like body and a cleaning apparatus used therefor.

【0002】[0002]

【従来の技術】図4は、液晶表示用ガラス等の板状体を
洗浄するシャワーリング部の概略を示した図である。シ
ャワーリング部は一般に例えば以下の如くになってい
る。すなわち塩ビ管もしくはステンレス等の金属管に一
定間隔でシャワーノズルを取り付け、シャワーノズル下
を水平で直進搬送されてくる板状体に対して板状体進行
方向と直角にシャワー配管を設置しシャワー洗浄を行
う。
2. Description of the Related Art FIG. 4 is a schematic view of a shower ring portion for cleaning a plate-like body such as glass for liquid crystal display. The shower ring section is generally as follows, for example. That is, shower showers are attached to PVC pipes or metal pipes such as stainless steel at regular intervals, and shower pipes are installed at a right angle to the plate-like body traveling direction in a straight line under the shower nozzles. I do.

【0003】この場合、シャワーノズルから吐出される
洗浄液が板状体全面に均一にあたるようにシャワーノズ
ルからは洗浄液が扇形に広がるか、もしくは円形に広が
りながら吐出されるようなノズル先端形状になってい
る。
In this case, the cleaning liquid is ejected from the shower nozzle in a fan shape or in a circular shape so that the cleaning liquid ejected from the shower nozzle is uniformly distributed over the entire surface of the plate. There is.

【0004】しかしながら、近年のガラスサイズの大型
化に伴い、ガラス等の板状体面積が大きくなり板状体の
中心部から板状体端面までの距離が長くなったため、シ
ャワー洗浄で板状体中央部での洗浄液が速やかに板状体
端面から排出されず滞留してしまう。このため、板状体
面の洗浄品質にばらつきが生じ、均一な洗浄が不可能で
ある。
However, with the recent increase in the size of glass, the area of the plate-like body such as glass has increased and the distance from the center of the plate-like body to the end face of the plate-like body has become longer. The cleaning liquid in the central portion is not discharged promptly from the end face of the plate-like body and stays there. Therefore, the cleaning quality of the plate-like body surface varies, and uniform cleaning is impossible.

【0005】また、図5は板状体面上の洗浄液滞留対策
として板状体をある一定角度に傾斜させて常に板状体の
下方端面側に洗浄液を落としていくシャワー洗浄方式を
示した図である。この方式では装置をある一定傾斜で製
作しなければならず、かつ、板状体を傾斜させる機構が
必要であり装置が複雑な構造になることが避けられな
い。
FIG. 5 is a view showing a shower cleaning system in which the cleaning solution is retained on the surface of the plate-like body by inclining the plate-like body at a certain angle to constantly drop the cleaning solution on the lower end surface side of the plate-like body. is there. In this method, the device must be manufactured with a certain inclination, and a mechanism for inclining the plate-like body is required, so that the device cannot avoid having a complicated structure.

【0006】[0006]

【発明が解決しようとする課題】本発明は上記のような
シャワー洗浄の板状体面内における洗浄液滞留を防止す
る手段を提供することを目的とする。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a means for preventing the cleaning liquid from staying on the surface of a plate-like body for shower cleaning as described above.

【0007】[0007]

【課題を解決するための手段】本発明は液晶表示用ガラ
ス等の板状体、特に角型の大面積板状体を洗浄する方法
において、板状体表面にシャワー洗浄を行うシャワーノ
ズルにつき、請求項1に係る発明においては、流れ方向
に進行する板状体を洗浄する方法において、流れ方向に
向かって「V」形状かつ板状体と平行に配置された拡散
タイプシャワーにて洗浄液を散布することを特徴とする
板状体洗浄方法を提供するものである。
DISCLOSURE OF THE INVENTION The present invention relates to a method for cleaning a plate-like body such as a glass for liquid crystal display, particularly a rectangular large-area plate-like body, and a shower nozzle for shower-cleaning the surface of the plate-like body, In the invention according to claim 1, in the method for cleaning a plate-shaped body that advances in the flow direction, the cleaning liquid is sprayed by a diffusion type shower arranged in a “V” shape and parallel to the plate-shaped body in the flow direction. The present invention provides a method for cleaning a plate-shaped body, which comprises:

【0008】請求項2に係る発明においては、流れ方向
に進行する板状体を洗浄する方法において、流れ幅方向
対する角度が10〜50度、かつ板状体と平行に配置さ
れた拡散タイプシャワーにて洗浄液を散布することを特
徴とする板状体洗浄方法を提供するものである。
According to a second aspect of the present invention, in the method for cleaning a plate-shaped body which advances in the flow direction, a diffusion type shower having an angle with respect to the flow width direction of 10 to 50 degrees and arranged parallel to the plate-shaped body. The method for cleaning a plate-like body is characterized in that the cleaning solution is sprayed.

【0009】請求項3に係る発明においては、流れ方向
に進行する板状体を洗浄する方法において、板状体と平
行に配置された拡散タイプシャワーにて、かつ散布中心
方向が後退方向に板状体面との角度が85度以内となる
方向にて、洗浄液を散布することを特徴とする板状体洗
浄方法を提供するものである。
According to a third aspect of the present invention, in a method of cleaning a plate-shaped body that advances in the flow direction, the plate is a diffusion type shower arranged parallel to the plate-shaped body, and the spreading center direction is a backward direction plate. It is intended to provide a method for cleaning a plate-shaped body, which comprises spraying a cleaning liquid in a direction where an angle with the surface of the body is within 85 degrees.

【0010】請求項4に係る発明においては、請求項
1、2および3の全ての特徴を満たしたことを特徴とす
る板状体洗浄方法を提供するものである。
According to a fourth aspect of the present invention, there is provided a plate-like body cleaning method characterized by satisfying all the features of the first, second and third aspects.

【0011】請求項5に係る発明においては、板状体の
流れ方向に向かって「V」形状、かつ板状体と平行に配
置された拡散タイプシャワーからなることを特徴とする
洗浄装置を提供するものである。
According to a fifth aspect of the present invention, there is provided a cleaning device comprising a diffusion type shower arranged in a "V" shape in the flow direction of the plate-like member and arranged in parallel with the plate-like member. To do.

【0012】請求項6に係る発明においては、板状体の
流れ幅方向対する角度が10〜50度、かつ板状体と平
行に配置された拡散タイプシャワーからなることを特徴
とする洗浄装置を提供するものである。
According to a sixth aspect of the present invention, there is provided a cleaning device characterized in that the plate-shaped body has an angle with respect to the flow width direction of 10 to 50 degrees and is composed of a diffusion type shower arranged parallel to the plate-shaped body. It is provided.

【0013】請求項7に係る発明においては、板状体と
平行に配置された拡散タイプシャワーからなり、かつ散
布中心方向が後退方向に板状体面との角度が85度以内
となる散布方向を持つことを特徴とする洗浄装置を提供
するものである。
According to a seventh aspect of the present invention, there is provided a diffusion type shower arranged in parallel with the plate-like body, and the spraying direction is such that the direction of the center of dispersion is the backward direction and the angle with the plane of the plate-like body is within 85 degrees. A cleaning device characterized by having.

【0014】請求項8に係る発明においては、請求項
5、6および7の全ての特徴を満たしたことを特徴とす
る洗浄装置を提供するものである。
The invention according to claim 8 provides a cleaning device characterized by satisfying all the characteristics of claims 5, 6 and 7.

【0015】[0015]

【発明の実施の形態】本発明では、上記の板状体面内に
おける洗浄液滞留の問題を解決するために、以下の方法
を用いる。
BEST MODE FOR CARRYING OUT THE INVENTION In the present invention, the following method is used in order to solve the above-mentioned problem of retention of the cleaning liquid in the plane of the plate.

【0016】すなわち請求項1に係る洗浄方法、ならび
に請求項5に係る洗浄装置においては、図1の例に示す
ように、シャワー配管の形状を「V」形状にすることに
よりシャワーが板状体表面に対してV字型にあたり洗浄
液を板状体端面側に逃がしていくことにより板状体面内
の滞留を防止するものである。ちなみに、シャワーの拡
散は、散布中心方向に対して60〜80度に散布される
ノズルを示すものである。また、ノズルの配置が規定の
形状であれば、配管はそのノズルの配置に従う必要性は
ないが、一般的にはノズルの配置に従う方が構成が容易
である。
That is, in the cleaning method according to claim 1 and the cleaning device according to claim 5, as shown in the example of FIG. 1, the shower pipe is formed into a plate-like body by forming the shower pipe into a “V” shape. The cleaning liquid is V-shaped with respect to the surface and escapes the cleaning liquid to the end face side of the plate-like body, thereby preventing retention in the plate-like body surface. By the way, the diffusion of the shower shows nozzles which are sprayed at 60 to 80 degrees with respect to the spray center direction. Further, if the arrangement of the nozzles is a prescribed shape, it is not necessary for the pipe to follow the arrangement of the nozzles, but generally it is easier to follow the arrangement of the nozzles.

【0017】請求項2に係る洗浄方法、ならびに請求項
6に係る洗浄装置においては、図2の例に示すように、
板状体面積、洗浄装置、流量、ノズル形状によりシャワ
ー配管の板状体の流れ方向に対する角度を10〜50度
内でV形状の角度を設定することにより洗浄液の板状体
端面側への流れ方向の最適化をはかることができ、滞留
防止がより効果的なものとなるものである。
In the cleaning method according to claim 2 and the cleaning apparatus according to claim 6, as shown in the example of FIG.
The flow of the cleaning liquid to the end face side of the plate-shaped body by setting the angle of the V-shape within the range of 10 to 50 degrees with respect to the flow direction of the plate-shaped body of the shower pipe depending on the plate-shaped body area, the cleaning device, the flow rate, and the nozzle shape. The direction can be optimized, and the staying prevention becomes more effective.

【0018】すなわち請求項3に係る洗浄方法、ならび
に請求項7に係る洗浄装置においては、図3の例に示す
ように、シャワーノズルから吐出される洗浄液の板状体
水平表面に対する進入角度を85度以内とすることによ
り洗浄液の板状体表面上での流速をつけることにより排
水効果および洗浄効果が上がるものである。
That is, in the cleaning method according to claim 3 and the cleaning device according to claim 7, as shown in the example of FIG. 3, the approach angle of the cleaning liquid discharged from the shower nozzle with respect to the horizontal surface of the plate-shaped body is 85. By setting the flow rate within the range, the drainage effect and the cleaning effect can be improved by increasing the flow velocity of the cleaning liquid on the surface of the plate-shaped body.

【0019】すなわち請求項4に係る洗浄方法、ならび
に請求項8に係る洗浄装置においては、上記全てを組み
合わせることにより、より効果的に洗浄液の滞留防止が
可能となり、板状体面を均一に洗浄することが可能とな
るものである。
That is, in the cleaning method according to the fourth aspect and the cleaning device according to the eighth aspect, by combining all of the above, it becomes possible to prevent the retention of the cleaning liquid more effectively and uniformly clean the surface of the plate-shaped body. It is possible.

【0020】[0020]

【実施例】幅方向960mm×流れ方向1100mmの
ガラス基板を洗浄するのに、流れ方向に向かって「V」
形状にノズルを配置した。この場合のV形状の、流れ幅
方向対する角度が25度に、各ノズル間隔が70mmと
なる様に配置した。この全てのノズルは、かつ板状体と
間隔120mmを置いて上に配置されており、その個々
のノズルの散布中心方向が後退方向に板状体面との角度
が70度となる方向に、散布が板状体表面上にて半径が
70mmのほぼ楕円形領域に洗浄液を散布する様に設定
されている。各ノズルは1本のV形状のパイプの配水管
に設置されており、各ノズルは均等量散布する様に調整
されている。
[Example] To clean a glass substrate having a width direction of 960 mm and a flow direction of 1100 mm, "V" is applied toward the flow direction.
The nozzle was arranged in the shape. In this case, the V shape was arranged such that the angle with respect to the flow width direction was 25 degrees and the nozzle intervals were 70 mm. All of these nozzles are arranged on the upper side with a gap of 120 mm from the plate-like body, and the spraying center direction of each of the nozzles is in the backward direction and the direction of the angle with the plate-like body surface is 70 degrees. Is set so that the cleaning liquid is sprayed on a substantially elliptical region having a radius of 70 mm on the surface of the plate-shaped body. Each nozzle is installed on the water pipe of one V-shaped pipe, and each nozzle is adjusted so as to spray evenly.

【0021】このようなノズル配置の洗浄装置を用い
て、2.0mm/sの速さでガラス基板を流しながら洗
浄液として純水を用いて総流量160mm3/sにて洗
浄したところ、均一な洗浄が行えた。この結果、ガラス
基板の面状の各点にて視覚により洗浄結果を評価したと
ころ、各点間で有意な差は認められなかった。
When a cleaning device having such a nozzle arrangement was used and pure water was used as a cleaning liquid while flowing the glass substrate at a speed of 2.0 mm / s, the cleaning was performed at a total flow rate of 160 mm 3 / s. I was able to wash it. As a result, when the cleaning result was visually evaluated at each point on the surface of the glass substrate, no significant difference was observed between the points.

【0022】[0022]

【発明の効果】請求項1または5の手段、すなわちシャ
ワー配管の「V」形状による方法においては、洗浄液が
常に板状体進行方向の左右端面側に方向づけられ板状体
表面を洗浄した後、板状体端面側に速やかに排水されて
いくため板状体面上での滞留が少なくなる効果がある。
According to the means of claim 1 or 5, that is, the method according to the "V" shape of the shower pipe, after the cleaning liquid is always directed to the left and right end faces in the traveling direction of the plate-shaped body, the surface of the plate-shaped body is cleaned, Since the water is quickly drained to the end face side of the plate-like body, there is an effect that retention on the plate-like body surface is reduced.

【0023】請求項2または6の手段、すなわちシャワ
ー配管の板状体川幅中心線に対する角度を設定する方法
においては、対象となる板状体面積、洗浄装置、流量、
ノズル形状により最適な角度で設定することにより板状
体端面側への排水効果を高め滞留防止がより効果的なも
のとなる。
In the means of claim 2 or 6, that is, in the method of setting the angle of the shower pipe with respect to the plate width river center line, the target plate area, the cleaning device, the flow rate,
By setting the optimum angle according to the nozzle shape, the drainage effect to the end face side of the plate-shaped body is enhanced and retention is more effective.

【0024】請求項3または7の手段、すなわちシャワ
ーノズルから吐出される洗浄液の板状体水平表面に対す
る進入角度による方法においては、板状体表面上に到達
した洗浄液に流速をつけ洗浄効果を上げると同時に板状
体端部への洗浄液の移動を速やかにすることにより滞留
防止が効果的なものになる。
According to the means of claim 3 or 7, that is, the method in which the cleaning liquid discharged from the shower nozzle enters the horizontal surface of the plate-shaped body at an angle, the cleaning liquid having reached the surface of the plate-shaped body is provided with a flow velocity to enhance the cleaning effect. At the same time, accelerating the movement of the cleaning liquid to the end of the plate-like body effectively prevents the retention.

【0025】請求項4または8の手段、すなわち前記の
3方式の併用により更に滞留防止効果が高まり、板状体
面を均一に洗浄することが可能となる。
By the means of claim 4 or 8, that is, the combined use of the above three methods, the effect of preventing stagnation is further enhanced, and the surface of the plate-like body can be uniformly washed.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の、流れ方向に向かって「V」形状かつ
板状体と平行に配置された拡散タイプシャワーにて洗浄
液を散布する場合の洗浄方法および洗浄装置の一例を示
す平面図である。
FIG. 1 is a plan view showing an example of a cleaning method and a cleaning device when a cleaning liquid is sprayed by a diffusion type shower arranged in a “V” shape in the flow direction and parallel to a plate-like body in the present invention. is there.

【図2】本発明の、流れ幅方向対する角度が10〜50
度、かつ板状体と平行に配置された拡散タイプシャワー
にて洗浄液を散布する場合の洗浄方法および洗浄装置の
一例を示す平面図である。
FIG. 2 is an angle of 10 to 50 with respect to the flow width direction of the present invention.
FIG. 3 is a plan view showing an example of a cleaning method and a cleaning device when a cleaning liquid is sprayed by a diffusion type shower arranged parallel to the plate body.

【図3】本発明の、板状体と平行に配置された拡散タイ
プシャワーにて、かつ散布中心方向が後退方向に板状体
面との角度が85度以内となる方向にて、洗浄液を散布
する場合の、洗浄方法および洗浄装置の一つのノズルの
一例を示す側面図である。
FIG. 3 is a diagram illustrating a diffusion type shower of the present invention arranged in parallel with a plate-like body, and spraying a cleaning liquid in a direction in which the center of the spraying direction is a backward direction and an angle with the plate-like body surface is within 85 degrees. FIG. 3 is a side view showing an example of one nozzle of the cleaning method and the cleaning device in the case of performing the above.

【図4】従来の洗浄方法および洗浄装置の一例を示す平
面図である。
FIG. 4 is a plan view showing an example of a conventional cleaning method and cleaning device.

【図5】本願と近い先行技術である洗浄方法および洗浄
装置の一例を示す側面図である。
FIG. 5 is a side view showing an example of a cleaning method and a cleaning device which are prior arts close to the present application.

【符号の説明】[Explanation of symbols]

1シャワーノズル 2シャワー配管 3板状体 4板状体端面 5シャワー 6板状体上の洗浄液流れ方向 7板状体搬送方向 8洗浄液滞留部分 10板状体水平表面 θ1シャワー配管角度 θ2シャワー角度 θ3板状体傾き角度 1 shower nozzle 2 shower piping 3 plates 4 plate-like end face 5 showers 6 Flow direction of cleaning liquid on plate 7 Plate transport direction 8 Washing liquid retention area 10 plate horizontal surface θ1 shower piping angle θ2 shower angle θ3 Inclination angle of plate

Claims (8)

【特許請求の範囲】[Claims] 【請求項1】流れ方向に進行する板状体を洗浄する方法
において、流れ方向に向かって「V」形状かつ板状体と
平行に配置された拡散タイプシャワーにて洗浄液を散布
することを特徴とする板状体洗浄方法。
1. A method for cleaning a plate-shaped body that advances in the flow direction, characterized in that the cleaning liquid is sprayed in a diffusion type shower arranged in a "V" shape and parallel to the plate-shaped body in the flow direction. A method for cleaning a plate-like body.
【請求項2】流れ方向に進行する板状体を洗浄する方法
において、流れ幅方向対する角度が10〜50度、かつ
板状体と平行に配置された拡散タイプシャワーにて洗浄
液を散布することを特徴とする板状体洗浄方法。
2. A method of cleaning a plate-shaped body which advances in the flow direction, wherein the cleaning liquid is sprayed by a diffusion type shower arranged at an angle of 10 to 50 degrees with respect to the flow width direction and arranged in parallel with the plate-shaped body. A method for cleaning a plate-shaped body, comprising:
【請求項3】流れ方向に進行する板状体を洗浄する方法
において、板状体と平行に配置された拡散タイプシャワ
ーにて、かつ散布中心方向が後退方向に板状体面との角
度が85度以内となる方向にて、洗浄液を散布すること
を特徴とする板状体洗浄方法。
3. A method for cleaning a plate-shaped body that advances in the flow direction, wherein a diffusion-type shower arranged parallel to the plate-shaped body is used, and the direction of the center of spraying is backward and the angle with the plate-shaped body is 85. A method for cleaning a plate-like body, which comprises spraying a cleaning liquid in a direction within a degree.
【請求項4】請求項1、2および3の全ての特徴を満た
したことを特徴とする板状体洗浄方法。
4. A method for cleaning a plate-like body, which satisfies all the features of claims 1, 2 and 3.
【請求項5】板状体の流れ方向に向かって「V」形状、
かつ板状体と平行に配置された拡散タイプシャワーから
なることを特徴とする洗浄装置。
5. A "V" shape in the flow direction of the plate-like body,
A cleaning device comprising a diffusion type shower arranged parallel to the plate-like body.
【請求項6】板状体の流れ幅方向対する角度が10〜5
0度、かつ板状体と平行に配置された拡散タイプシャワ
ーからなることを特徴とする洗浄装置。
6. The angle of the plate-shaped body with respect to the flow width direction is 10 to 5.
A cleaning device comprising a diffusion type shower arranged at 0 degrees and parallel to a plate-like body.
【請求項7】板状体と平行に配置された拡散タイプシャ
ワーからなり、かつ散布中心方向が後退方向に板状体面
との角度が85度以内となる散布方向を持つことを特徴
とする洗浄装置。
7. A washing method comprising a diffusion type shower arranged in parallel with a plate-like body, and having a spraying direction in which a direction of a spraying center is a retreating direction and an angle with a plate-like body surface is within 85 degrees. apparatus.
【請求項8】請求項5、6および7の全ての特徴を満た
したことを特徴とする洗浄装置。
8. A cleaning device which satisfies all the features of claims 5, 6 and 7.
JP2001340282A 2001-11-06 2001-11-06 Washing method and washing apparatus for plate-like body Pending JP2003136025A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001340282A JP2003136025A (en) 2001-11-06 2001-11-06 Washing method and washing apparatus for plate-like body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001340282A JP2003136025A (en) 2001-11-06 2001-11-06 Washing method and washing apparatus for plate-like body

Publications (1)

Publication Number Publication Date
JP2003136025A true JP2003136025A (en) 2003-05-13

Family

ID=19154509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001340282A Pending JP2003136025A (en) 2001-11-06 2001-11-06 Washing method and washing apparatus for plate-like body

Country Status (1)

Country Link
JP (1) JP2003136025A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102773240A (en) * 2011-05-10 2012-11-14 南亚科技股份有限公司 Post-CMP wafer cleaning apparatus
KR20230068681A (en) * 2021-11-11 2023-05-18 윤현화 Wall device for art education

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102773240A (en) * 2011-05-10 2012-11-14 南亚科技股份有限公司 Post-CMP wafer cleaning apparatus
KR20230068681A (en) * 2021-11-11 2023-05-18 윤현화 Wall device for art education
KR102597995B1 (en) 2021-11-11 2023-11-14 윤현화 Wall device for art education

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