JP2003135571A - Plasma sterilization apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a plasma sterilization apparatus capable of effectively sterilizing the inner surface of an instrument to be sterilized, particularly an instrument in the form of a microtube. SOLUTION: The instrument 3 to be sterilized, introduced into a sterilization container 1, is fixed in position by a fixture 6 and a gas containing components effective for sterilization or a gas producing such components is supplied by a gas exchanger 5 into the container 1. Next, a discharge plasma generating part 2 is inserted into the instrument 3 without making contact therewith to generate a discharge plasma. The discharge plasma produces from the components in the container 1 active particles having sterilizing action, such as chemically active atoms, molecules, or ions, to effectively sterilize the inner surface of the instrument 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma sterilizer for sterilizing and sterilizing an instrument to be sterilized using discharge plasma.

[0002]

2. Description of the Related Art Generally, plasma is used in a technique for decomposing and removing harmful substances such as nitrogen oxides (NOx) and sulfur oxides (SOx). In plasma, due to inelastic collision of electrons, reactions such as excitation, dissociation, and ionization occur in gas,
As a result, a large number of chemically active particles (active species) are produced.

Therefore, these active species can be introduced into the air containing harmful components and decomposed by various chemical reactions occurring therein. In particular, the plasma sterilization technique has the advantages that the facility is simple and the handling is easy as compared with the conventional heat treatment method or chemical treatment method.

An outline of a conventional plasma sterilizer 100 is shown in FIG. In FIG. 15, the plasma sterilization apparatus 100
Has a sterilization container 101 forming the main body of the apparatus, and a plasma generator 102 inside. The sterilization container 101 is
The pressure control device 103 reduces the pressure to the optimum pressure for plasma generation. Further, a substance (gas or liquid) which has a sterilizing effect and is a source of ions and radical species is also supplied from here. Plasma generator 102
For example, a high-frequency driven plasma source of capacitive coupling type or inductive coupling type is used. In the plasma sterilization apparatus 100 shown in FIG. 15, the plasma generated by the plasma generation apparatus 102 is circulated in the sterilization container 101 by a fan or the like (not shown), and the plasma is poured onto the sterilized instrument 104 to be sterilized.

Further, Japanese Patent No. 2540276 discloses that
A plasma sterilizer 110 for sterilizing the inside of a container is described. This sterilization device 110, as shown in FIG.
The gas nozzle 111 and one electrode 112 are inserted into a container 113 which is an instrument to be sterilized, and plasma is generated between the container 114 and a tray 114 of the container.
To sterilize.

This sterilizing apparatus 110 sterilizes the inside of the storage container, which is the instrument to be sterilized, by the generation of plasma, but it cannot be said that it is suitable for sterilizing the instrument to be sterilized having fine tubes. For example, it has been unsuitable for sterilizing an instrument having a tube as thin as the outer diameter of the electrode or an instrument having an extremely long length compared to the inner volume of the sterilizer for the following reasons.

That is, when the outer diameter of the electrode and the inner diameter of the microtube are close to each other, the discharge plasma generated around the electrode may directly act on the inner wall of the microtube to cause damage. Further, when the sterilization instrument is an elongated fine tube, the plasma may be biased to a portion near the side wall of the container constituting the sterilizer main body, and a sufficient sterilization effect may not be achieved. This is because if the distance between the electrode and the inner surface of the container that is grounded is partly large or small, discharge will occur only in a region where the distance between the two where the electric field is strong is close.

As described above, there has been a demand for a plasma sterilizer capable of effectively performing sterilization work even when the sterilization instrument has a fine shape such as a fine tube.

[0009]

SUMMARY OF THE INVENTION The present invention has been made in consideration of the above circumstances, and sterilizes and sterilizes the inner surface of a sterilized instrument, particularly the inner surface of a sterilized instrument having a fine tube shape. It is an object of the present invention to provide a plasma sterilization device that can be used.

It is another object of the present invention to provide a plasma sterilizer which is effective for sterilization and sterilization over the entire inner surface of the sterilized instrument without damaging the inner wall of the sterilized instrument.

[0011]

In order to solve the above-mentioned problems, the plasma sterilizer according to the present invention, as described in claim 1, generates plasma by the discharge between the electrodes and is chemically activated. In the plasma sterilizer for sterilizing the sterilized instrument by generating various particles, the plasma sterilizer is a discharge plasma generation unit for being inserted into the sterilized instrument and generating the plasma inside the sterilized instrument. The discharge plasma generating portion is configured to be held so as not to contact the inner wall surface of the sterilized instrument.

Further, the plasma sterilizer according to the present invention is
In order to solve the above-mentioned problems, as described in claim 2, the discharge plasma generating part includes a dielectric base made of an insulator and two or more electrodes provided on the surface of the dielectric base. It is configured to apply a voltage between these electrodes to generate discharge plasma.

Further, in order to solve the above-mentioned problems, in the plasma sterilization apparatus according to the present invention, as described in claim 3, the discharge plasma generating unit includes an electrode and an instrument to be sterilized on a dielectric base. A protrusion is provided to prevent contact, and as described in claim 4, the discharge plasma generating part has a dielectric base whose cross section is formed into a concave polygon, and the concave surface of the concave polygon is formed. An electrode is provided on the inner surface of the imaginary circle having a polygonal cross section of the dielectric base of the discharge plasma generating portion. It is a thing.

Further, the plasma sterilization apparatus according to the present invention is
In order to solve the above-mentioned problems, as described in claim 6, a dielectric base is formed in a cylindrical shape in the discharge plasma generating part, an electrode is installed on an inner surface of the dielectric base, and the dielectric base is formed. A through hole that connects the inner surface and the outer surface of the base side wall is provided.

On the other hand, the plasma sterilizer according to the present invention is
In order to solve the above-mentioned problems, as described in claim 7, in the discharge plasma generating portion, a hollow portion is formed in at least one of a dielectric base and an electrode, and a liquid or a gas is allowed to flow into the hollow portion. The discharge plasma generating section is configured to control the temperature of the discharge plasma generating section, and as described in claim 8, the discharge plasma generating section is a hollow part for supplying a gas having a sterilizing effect to the dielectric base. To form
In addition, a through hole that connects the inner surface and the outer surface of the dielectric base is provided.

Further, the plasma sterilizer according to the present invention is
In order to solve the above-mentioned problems, as described in claim 9, the electrode is composed of a conductor whose surface is covered with an insulator.

Further, in the plasma sterilizer according to the present invention, in order to solve the above-mentioned problems, as described in claim 10, the voltage applied between the electrodes is a DC voltage, or As described in 11, the voltage applied between the electrodes is an AC voltage or a DC biased AC voltage.

Further, the plasma sterilizer according to the present invention is
In order to solve the above-mentioned problems, as described in claim 12, the plasma sterilization apparatus is provided with a means for causing gas to flow into the sterilized instrument.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a plasma sterilizer according to the present invention will be described below with reference to the accompanying drawings.

The plasma sterilizer according to the present invention is
The apparatus is suitable for both the sterilization treatment and the sterilization treatment of the inner surface of the instrument, and in the present invention, the term "sterilization" includes sterilization.

First, a first embodiment of the plasma sterilization apparatus according to the present invention will be described with reference to FIGS. FIG. 1 is a schematic diagram showing the entire plasma sterilization apparatus 10 according to the present invention.

The plasma sterilization apparatus 10 has a sterilization container 1 which constitutes the main body of the apparatus. In the sterilization container 1, the discharge plasma generation unit 2 is installed so as to be suspended downward.

A gas exchanger 5 is connected to the sterilization container 1, and a gas having a sterilizing action is supplied from the gas exchanger 5 into the sterilizing container 1 or ions having a sterilizing action are supplied.
It supplies a substance (gas or liquid) that becomes the basis for producing atoms, molecules, etc. The gas exchanger 5 can also control the pressure inside the sterilization container 1 while supplying these substances having a sterilizing action.

In the sterilization container 1, the sterilized instrument 3 is fixed by a fixture 6 at a predetermined position below the plasma generator 2. A moving device 8 is attached to the fixture 6, and the sterilized instrument 3 fixed to the fixture 6 can be moved in the vertical direction. When sterilizing the to-be-sterilized instrument 3, the moving device 8 is driven to move the to-be-sterilized instrument 3 upward to insert the discharge plasma generating portion.

The discharge plasma generator 2 is connected to a power source 12 installed outside the sterilization container 1 via a power supply line 11. The electric power supplied from the power source 12 causes the electrodes provided in the discharge plasma generating unit 2 to discharge, and plasma is generated in the sterilized instrument 3. The power source 12 may be any as long as it can generate a voltage enough to ignite a discharge between the electrodes to be discharged, and can supply electric power capable of maintaining the discharge and generating plasma. The voltage applied to the electrodes may be a DC voltage, an AC voltage, or a DC biased AC voltage.

However, since the discharge mode used depends on the pressure inside the sterilization container 1, the discharge mode corresponding to the sterilization pressure is adopted. Specifically, when the pressure inside the sterilization container 1 is maintained in the vicinity of the atmospheric pressure, for example, a creeping surface generated along the surface of the dielectric base 30 when an electrode having a configuration as shown in FIG. 2 described later is adopted. Discharge, corona discharge, and dielectric barrier discharge in the case of adopting an electrode having a structure shown in FIG. 7 described later are used. When the sterilization container 1 is evacuated to a vacuum of several Torr or less, glow discharge is used. In this case, it is preferable that the electrodes are coiled or arranged so that the facing area is wide to form a capacitor.

The sterilization container 1 is provided with a gas introduction nozzle 13 for introducing a gas directly into the sterilized instrument 3. The gas introduction nozzle 13 is connected via a supply pipe 15 to a gas supply device 14 installed outside the sterilization container 1, and directly supplies a gas that produces a component effective for sterilization to the inner surface of the sterilized instrument 3. .

The plasma sterilization apparatus 1 thus constructed
At 0, since discharge plasma is generated over the entire length of the inner surface of the sterilized instrument 3, even if the sterilized instrument 3 has a structure having fine tubes, the entire inner surface can be exposed to ions or molecules having a sterilizing effect. .

In this plasma sterilizer 10, for example,
The sterilized instrument 3 is sterilized by the following method.

First, the equipment 3 to be sterilized is fixed in the sterilization container 1 by the fixture 6, and a gas containing a component effective in sterilization or a gas effective in sterilization is generated in the sterilization container 1 by the gas exchanger 5. And the like, and the inside of the sterilization container 1 is brought to a predetermined pressure.

Next, the moving device 8 is driven to raise the sterilized instrument 3 fixed to the fixture 6, and is moved upward until the discharge plasma generating part 2 is inserted into the sterilized instrument 3 at a predetermined position. . Then, a voltage is applied from the power source 12 to the electrode of the discharge plasma generating unit 2 via the power supply line 11 to generate discharge plasma. By this discharge plasma, active particles having a bactericidal action such as chemically active atoms, molecules and ions are generated from the components in the sterilization container 1,
The inner surface of the sterilized instrument 3 is sterilized well.

A gas introduction nozzle 13 is preferably provided on one side of the sterilized instrument 3 as a means for introducing gas into the sterilized instrument 3. In the case where the gas introduction nozzle 13 is provided, when the discharge plasma is generated by the discharge plasma generation unit 2, the gas supply nozzle 14 generates a gas that produces a component effective for sterilization by the gas introduction nozzle 13 of the sterilized instrument 3. Since it is directly supplied to the inner surface, the inner surface of the sterilized instrument 3 can be sterilized more effectively.

2 and 3 show the details of the sterilized instrument 3 and the discharge plasma generating section 2 in FIG. FIG. 2 is a cross-sectional view showing the positional relationship between the sterilized instrument 3 and the discharge plasma generating section 2, and FIG. 3 is a plan view showing the outline of the discharge plasma generating section 2.

As shown in FIG. 2, the discharge plasma generating section 2
Is inserted inside the sterilized instrument 3. The discharge plasma generating part 2 includes electrodes 21 to 24 and a dielectric base 30 made of an insulator. The electrodes 21 to 24 are installed slightly inside from the end of the dielectric base 30, and the electrodes 21 to 24 are
And the inner surface of the sterilized instrument 3 do not come into direct contact with each other, and the electrode 21
The discharge plasma generated around 24 is also configured not to contact the inner wall of the sterilized device 3. This suppresses damage to the inner wall of the sterilized instrument 3 due to discharge plasma.

Further, the discharge plasma generating section 2 can be made to have an arbitrary length according to the sterilized instrument 3 having an elongated structure.

When power is supplied from the power source 12, discharge plasma is generated between the electrodes 21 and 22 and the electrodes 23 and 24, which are installed on the surface of the dielectric base 30 at equal intervals. In addition, in order to generate uniform discharge plasma over the entire length of the discharge plasma generating portion 2, it is desirable that the electrode interval be constant.

In the case where the sterilized instrument 3 has a bent structure, the discharge plasma generating section 2 can be sterilized by being made of a flexible material. In this case, for example,
The dielectric base 30 is formed of a resin having plasticity, and the electrodes 21 to 24 formed of metal foil are placed thereon. In addition, a metal is vapor-deposited on the dielectric base 30 to form the electrodes 21 to 21.
It is also possible to form 24. The electrodes may be arranged spirally or may be ring-shaped.

Next, another embodiment of the plasma sterilization apparatus according to the present invention will be described.

FIG. 4 is a plan view of the discharge plasma generator 2 in the second embodiment of the plasma sterilizer according to the present invention.

In the second embodiment, the discharge plasma generating section 2 includes three electrodes 21, 22, and 23 as one set.
These electrodes 21, 22 and 23 are arranged in parallel slightly inward from the end of the dielectric base 30.
A high voltage is applied to the electrodes 21 and 22 on both sides of the center electrode 21, and discharge plasma is generated between the electrodes 21 and 22 and between the electrodes 21 and 23. Further, three electrodes are similarly installed on the other surface (not shown) of the dielectric base 30.

The discharge plasma generating section 2 is formed to have a length corresponding to the sterilized instrument 3. With this configuration,
Uniform discharge plasma is generated over the entire length of the discharge plasma generating portion 2 without damaging the sterilized instrument 3.

FIG. 5 is a plan view of the discharge plasma generator 2 in the third embodiment of the plasma sterilizer according to the present invention.

In the third embodiment, the discharge plasma generating section 2
A through hole 31 is provided on the surface of the dielectric base 30. By providing the through hole 31, the discharge plasma generated on each surface moves back and forth on both sides, so that the plasma can be made uniform and the sterilization effect can be enhanced.

Although the number of the through holes 31 may be arbitrarily determined according to the length of the dielectric base 30, it is preferable to provide the through holes 31 over substantially the entire length of the dielectric base 30 for the purpose of moving plasma back and forth. Through hole 3 as shown in FIG.
A structure in which a plurality of 1's are arranged in parallel is effective because the dielectric base 30 can retain its strength and a good plasma distribution effect can be imparted.

Although the dielectric base 30 is formed of a flat plate in the first to third embodiments, the dielectric base 30 is formed.
The sectional shape of is not limited to a flat plate, and may be a circle, an ellipse, a polygon, or various other shapes. The dielectric base 30 may have a cylindrical shape, an elliptic cylindrical shape, a rectangular cylindrical shape, or the like. These shapes are not limited to any one specific shape as long as they can prevent contact between the electrode and the sterilized instrument.

FIG. 6 is a sectional view of the discharge plasma generating portion 2 in the fourth embodiment of the plasma sterilization apparatus according to the present invention.

In the fourth embodiment, the dielectric base 30 is formed of a tubular member having an elliptical cross section with a hollow inside. The electrodes 21 and 22 and the electrodes 23 and 24 are respectively installed on the gently curved surfaces of the dielectric base 30 to prevent the electrodes to be discharged and the generated discharge plasma from directly contacting the inner wall of the sterilized instrument 3. The hollow cylindrical dielectric base 30 is not limited to this elliptical cross section, but may have a cylindrical shape or a rectangular tubular shape as long as it can avoid direct contact between the electrodes 21, 22, 23, 24 and the sterilized instrument 3. Etc., may have other tubular cross sections.

FIG. 7 is a cross-sectional view of the discharge plasma generator 2 in the fifth embodiment of the plasma sterilizer according to the present invention.

In the fifth embodiment, the discharge plasma generating section 2
The four electrodes 21, 22, 23, and 24 are each composed of a conductor A forming the center thereof and a coating of an insulator B covering the surfaces of these conductors A. Electrodes 21-24
By coating the electrodes 21 to 24 and the sterilized instrument 3
It is possible to prevent the inner surface of the sheet from directly contacting.

FIG. 8 is a sectional view of the discharge plasma generator 2 in the sixth embodiment of the plasma sterilizer according to the present invention.

In the sixth embodiment, the electrodes 21 to 28 are used.
In order to prevent the plasma and electrodes 21 to 28 generated between them from directly contacting the inner wall of the sterilized instrument 3 and damaging the inner wall, the dielectric base 30 has four electrodes for preventing plasma and electrode contact. A rib-shaped protrusion 32 is provided.

As shown in FIG. 8, in the case of the dielectric base 30 having a cylindrical cross section, the length of each projection 32 protruding toward the inner wall of the sterilized instrument 3 is set to be larger than the cross sectional diameter of the electrode 5. .

Although each of the protrusions 32 may be provided over the entire length of the dielectric base 30, it may be divided into one region or a plurality of regions of the dielectric base 30 and may be formed, for example, in at least one region of the upper part, the intermediate part and the lower part. It can also be provided. The protrusions 32 may be provided with different heights. For example, when the shape of the dielectric base 30 is a column shape other than the column shape as shown in FIG. 8 or a plate shape, the height may be appropriately changed according to the position where the protrusion 32 is provided.

FIG. 9 is a sectional view of the discharge plasma generating portion 2 in the seventh embodiment of the plasma sterilization apparatus according to the present invention.

In the seventh embodiment, when the dielectric base 30 has a plate-like or flat structure, contact-preventing plate-like members 33 are attached to both ends of the dielectric base 30 in a flange shape or a rib shape. The electrodes 21 to 26 and the sterilized instrument 3 are prevented from contacting each other.

The width of the member 33 is formed to be approximately the same as the diameter of the electrodes 21 to 26 in the cross section of the electrodes or longer than the diameter of the cross sections of the electrodes. It is possible to prevent the plasma and the electrodes 21 to 26 thus generated from directly touching the inner wall of the sterilized instrument 3.

The length of the member 33 in the vertical direction is the dielectric base 30.
The length may be set to be substantially the same as the entire length of the electrode 5 or the electrode 5, but may be set shorter than this. Further, in FIG. 9, the electrodes 21 to 26 are
Shows an embodiment in which three electrodes form one set, but
It is also possible to adopt a configuration in which one set of electrodes is used.

FIG. 10 is a sectional view of the discharge plasma generating part 2 in the eighth embodiment of the plasma sterilizer according to the present invention.

In the eighth embodiment, the dielectric base 3
0 is a blade rod with a cross-shaped cross section (rod with blades)
The dielectric base 30 has a structure in which a concave portion is provided between the blades, and the electrodes 21 to 2 are formed in the concave portion.
8 are installed. Therefore, the generated plasma and the electrodes 21 to 28 are not stored in the recessed portion and directly touch the inner wall of the sterilized instrument 3. The dielectric base 30 is shown in FIG.
Not limited to the blade rod shape shown in 0, it may be configured in a rod shape or a column shape having other concave portions.

FIG. 11 is a sectional view of the discharge plasma generating section 2 in the ninth embodiment of the plasma sterilizer according to the present invention.

In the ninth embodiment, the cross section of the dielectric base 30 on which the electrodes 21 to 28 are installed is formed into a rectangular prism shape. By disposing the electrodes 21 to 28 inside the imaginary circle circumscribing the quadrangle, the generated plasma and the electrodes 21 to 28 are prevented from directly contacting the inner wall of the sterilized instrument 3. . Dielectric base 3
The member forming 0 is not limited to the rectangular columnar shape, and other polygonal columnar members can be used.

FIG. 12 is a sectional view of the discharge plasma generator 2 in the tenth embodiment of the plasma sterilization apparatus according to the present invention.

In the tenth embodiment, the dielectric base 30 is formed into a sleeve-like cylindrical shape, and the electrodes 21 to 21 are formed.
28 is installed on the inner peripheral side. Dielectric base 30
The surface is provided with a through hole 34 that connects the inner surface side and the outer surface side. The number of through holes 34 may be arbitrarily determined,
The shape may be freely set. In the example shown in FIG. 12, four dielectric bases 30 are provided at equal intervals in the circumferential direction.

In this embodiment, the cylindrical dielectric base 30 is used.
Ions and molecules that are effective in sterilization generated in the
It flows through the outside of the dielectric base 30 through 4 and reaches the sterilized instrument 3 to be sterilized. The electrode 2 is provided inside the dielectric base 30.
By installing 1 to 28, the generated plasma and the electrode 5 are prevented from directly contacting the inner wall of the sterilized instrument 3.

FIG. 13 is a sectional view of the discharge plasma generator 2 in the eleventh embodiment of the plasma sterilizer according to the present invention.

In the eleventh embodiment, the electrodes 21 to 24 and the dielectric base 30 have a tubular structure such as an elliptic cylinder, a hollow portion 200 is provided at the center of each of the electrodes 21 to 24, and the center of the dielectric base 30 is provided. A hollow part 300 is provided in each part, and the temperature of the electrodes 21 to 24 and the dielectric base 30 can be controlled by flowing a liquid or gas such as water or air into these parts.

The liquid or gas may be caused to flow only in one of the hollow portions 200 and 300, or may be caused to flow in both of them to control the temperature.

FIG. 14 is a sectional view of the discharge plasma generating part 2 in the twelfth embodiment of the plasma sterilization apparatus according to the present invention.

In the twelfth embodiment, the hollow portion 300 for allowing gas to flow through the dielectric base 30 and the through hole 3 that connects the inner surface and the outer surface of the cylindrical dielectric base 30 such as a cylinder.
10 is provided, and the gas by which the components effective for sterilization are generated is supplied over the entire inner surface of the sterilized instrument 3. As a result, the sterilizing effect of the sterilized instrument 3 can be further enhanced.

The plasma sterilization apparatus according to the present invention having the above-mentioned structure can satisfactorily perform sterilization treatment of the inside of the instrument, particularly the fine tube, the elongated tube, the container and the like.

[0071]

According to the present invention, the discharge plasma generating portion for generating plasma by electric discharge is installed inside the sterilized instrument, and the electrode to be discharged and the generated discharge plasma of the sterilized instrument such as a microtube. By being configured so as not to directly contact the inner wall surface, it is possible to provide a plasma sterilizer that can perform uniform sterilization without damaging the inner wall surface even if the instrument to be sterilized is an elongated fine tube. .

[Brief description of drawings]

FIG. 1 is a schematic view showing a first embodiment of a plasma sterilization apparatus according to the present invention.

FIG. 2 is a schematic plan sectional view of a plasma generator provided in the plasma sterilization apparatus according to the present invention.

FIG. 3 is a schematic view for supplementary explanation of the first embodiment of the plasma sterilization apparatus according to the present invention.

FIG. 4 is a schematic view showing a second embodiment of the plasma sterilization apparatus according to the present invention.

FIG. 5 is a schematic view showing a third embodiment of the plasma sterilization apparatus according to the present invention.

FIG. 6 is a schematic view showing a fourth embodiment of the plasma sterilization apparatus according to the present invention.

FIG. 7 is a schematic view showing a fifth embodiment of the plasma sterilization apparatus according to the present invention.

FIG. 8 is a schematic view showing a sixth embodiment of the plasma sterilization apparatus according to the present invention.

FIG. 9 is a schematic view showing a seventh embodiment of the plasma sterilization apparatus according to the present invention.

FIG. 10 is a schematic view showing an eighth embodiment of the plasma sterilizer according to the present invention.

FIG. 11 is a schematic view showing a ninth embodiment of the plasma sterilization apparatus according to the present invention.

FIG. 12 is a schematic view showing a tenth embodiment of the plasma sterilization apparatus according to the present invention.

FIG. 13 is a schematic view showing an eleventh embodiment of the plasma sterilization apparatus according to the present invention.

FIG. 14 is a schematic view showing a twelfth embodiment of the plasma sterilizer according to the present invention.

FIG. 15 is a schematic view showing a conventional plasma sterilizer.

FIG. 16 is a schematic view for supplementary explanation of a conventional plasma sterilization apparatus.

[Explanation of symbols]

1 sterilization container 2 Plasma generator 3 Instruments to be sterilized 5 gas exchangers 6 fixtures 8 mobile devices 10 Plasma sterilizer 11 power lines 12 power supplies 13 Gas introduction nozzle 14 gas supplier 15 Supply pipe 21-28 electrodes 30 Dielectric base 31 through hole 32 protrusions 33 members 34 through hole A conductor B non-conductor

Claims (12)

[Claims] 1. A plasma sterilizer for sterilizing a sterilized instrument by generating plasma by discharge between electrodes to generate chemically active particles, the plasma sterilizer being inserted into the sterilized instrument. The apparatus is provided with a discharge plasma generation unit for generating the plasma inside the lever sterilized instrument, and the discharge plasma generation unit is configured to be held so as not to contact the inner wall surface of the instrument to be sterilized. Plasma sterilizer. 2. The discharge plasma generating part is composed of a dielectric base made of an insulator and two or more electrodes provided on the surface of the dielectric base, and a voltage is applied between these electrodes. The plasma sterilizer according to claim 1, wherein the plasma sterilizer is configured to generate discharge plasma. 3. The plasma sterilizer according to claim 1, wherein the discharge plasma generating unit has a protrusion provided on the dielectric base to prevent contact between the electrode and the device to be sterilized. 4. The plasma sterilizer according to claim 1, wherein, in the discharge plasma generating portion, a cross section of a dielectric base is formed in a concave polygonal shape, and an electrode is installed on a concave surface of the concave polygonal shape. 5. The plasma sterilizer according to claim 1, wherein in the discharge plasma generating part, a cross section of a dielectric base is formed in a polygonal shape, and an electrode is installed inside a virtual circle circumscribing the polygonal shape. . 6. The discharge plasma generating portion has a dielectric base formed in a cylindrical shape, an electrode is installed on an inner surface of the dielectric base, and a through hole for connecting an inner surface and an outer surface of a side wall of the dielectric base is formed. The plasma sterilizer according to claim 1 or 2, which is provided. 7. The discharge plasma generating part has a hollow portion formed in at least one of a dielectric base and an electrode, and a temperature of the discharge plasma generating portion 2 is controlled by introducing a liquid or a gas into the hollow portion. The plasma sterilizer according to claim 1 or 2, which is configured. 8. The discharge plasma generating part is provided with a through hole that forms a hollow part for supplying a gas having a sterilizing effect to the dielectric base and connects the inner surface and the outer surface of the dielectric base. Item 3. A plasma sterilizer according to Item 1 or 2. 9. The plasma sterilizer according to claim 1, wherein the electrode is formed of a conductor whose surface is covered with an insulator. 10. The plasma sterilizer according to claim 1, wherein the voltage applied between the electrodes is a DC voltage. 11. The voltage applied between the electrodes is an AC voltage or a DC biased AC voltage.
Or the plasma sterilizer according to 2. 12. The plasma sterilization apparatus according to claim 1, wherein the plasma sterilization apparatus includes means for causing gas to flow into the sterilized instrument.