JP2003133159A - Method and device for exfoliating green sheet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for exfoliating a green sheet by which the green sheet having a prescribed size can be surely exfoliated from a carrier film without giving damages to the green sheet, and to provide a exfoliating device used therefor. SOLUTION: A stage 5 for adsorbing and fixing the carrier film 23 is arranged. An adsorption board 1 for adsorbing the green sheet 21 is arranged. In the upper position of the adsorption board 1, a servo motor 11 is arranged to give a micromotion to the adsorption board 1 in the vertical direction when the green sheet 21 is exfoliated. In the lower position of the servo motor 11, a ball screw 12 and up/down posts 13 for converting rotation of the servo motor to vertical motion are arranged. A clearance to be a trigger of exfoliation is formed between the end part of a rectangular green sheet 21a and the carrier film 23 by the micromotion of the adsorption board 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for peeling a green sheet and a peeling device used for each method, and in particular,
The present invention relates to a method for peeling a green sheet for peeling a green sheet of a predetermined size from a ceramic green sheet formed on a carrier film, and a peeling device used for such peeling. .

[0002]

2. Description of the Related Art As one form of electronic parts, there is an electronic part in which a coil or a capacitor is formed by laminating a plurality of ceramic sheets. Such an electronic component is formed as follows. First, a ceramic material is applied on a carrier film made of a polyester film or the like to have a uniform thickness and dried to form a so-called ceramic green sheet on the carrier film.

Next, an internal electrode or the like is printed by screen printing on the surface of the green sheet, and this is put in a drying oven or the like to dry. Then, the peeling device peels the green sheet from the carrier film. A predetermined number of the peeled green sheets are stacked, pressed, cut into an appropriate size, and sintered to form a desired electronic component.

As described above, in the production of electronic components in which ceramic sheets are laminated, a peeling device is used to peel the green sheet from the carrier film. Therefore, as an example of a conventional peeling device, Japanese Patent Laid-Open No. 63-
The peeling device described in Japanese Patent No. 102216 will be described.

As shown in FIG. 12, the green sheet 12
The carrier film 123 on which 1 is formed is conveyed onto the stage 105 of the peeling device. Carrier film 12
When 3 is conveyed to a predetermined position, the carrier film 123 is fixed by being sucked by an opening (not shown) provided in the stage 105.

Above the stage 105, a cutting blade 103 is provided in the periphery, and a suction plate 101 capable of sucking with a stronger suction force than that of the stage 105 is provided in a region surrounded by the cutting blade 103. There is. The suction plate 101 and the cutting blade 103 are provided so as to reciprocate in the direction perpendicular to the surface of the stage 105. Further, the cutting blade 103 projects from the tip surface of the suction plate 101 so as not to cut the carrier film 123 when cutting the green sheet 121.

With the carrier film 123 fixed by suction, the suction plate 101 is lowered until the front end surface of the suction plate 101 contacts the surface of the green sheet 121. At this time, the cutting blade 1 protruding from the tip surface of the suction plate 101
The green sheet 121 is cut into a predetermined size by 03.

Next, the suction plate 101 is lifted while the green sheet 121 is sucked by the suction plate 101.
As a result, the cut green sheet 121 is peeled from the carrier film 123, and is taken out as a green sheet having a predetermined size. A conventional stripping device is constructed and operates as described above.

[0009]

However, the conventional peeling device has the following problems. As described above, the green sheet 121 formed on the carrier film 123 has the carrier film 123 on the stage 10.
In the state of being sucked by 5, the green sheet 121 is peeled by being sucked by the suction plate 101.

However, if the adhesion between the green sheet 123 and the carrier film 121 is high, the green sheet 123 may not be satisfactorily separated from the carrier film 121.

In particular, when the green sheets are laminated, it is necessary to improve the adhesion of the green sheets to other green sheets. Therefore, the adhesion between the green sheet and the carrier film becomes high, and it may be difficult to peel off the green sheet.

In the case of producing a multilayer capacitor as an electronic component, a relatively thin green sheet is used as the green sheet. In this case, the strength of the green sheet becomes weak, and the green sheet may be damaged when peeled off.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a green sheet which can be reliably peeled from a carrier film without damaging a green sheet of a predetermined size. Another object is to provide a peeling apparatus used in such a peeling method.

[0014]

A method for peeling a green sheet according to one aspect of the present invention is to remove a green sheet of a predetermined size from a base film among ceramic green sheets formed on a base film. A method for peeling a green sheet for peeling, comprising the following steps. Cut a green sheet of a specified size from the green sheet. The green sheet having the predetermined size is held. By giving a slight movement to the green sheet of a predetermined size, a gap that triggers peeling is formed between the end portion of the green sheet of a predetermined size and the base film. The green sheet having a predetermined size is peeled from the base film by widening the gap that triggers peeling.

According to this method, first, a slight movement is given to a green sheet of a predetermined size, so that a gap that triggers peeling is formed between the end portion of the green sheet of a predetermined size and the base film. It is formed. Then, by widening the gap from the end portion of the predetermined size green sheet toward the center, the green sheet of the predetermined size can be easily peeled from the base film without damaging the green sheet. In addition, the fine movement in this case means, for example, the movement distance of a green sheet of a predetermined size in the vertical direction of about several hundreds of μm and the time of about several tens of ms.

Preferably, the fine movement is performed at least three times in the step of giving the fine movement. As a result, a gap that triggers peeling is reliably formed between the end portion of the green sheet having a predetermined size and the base film. In addition, tremor 3
Even if it was performed more than once, no significant difference was found in the gap formation condition.

In order to widen the gap, specifically, in the step of peeling the green sheet of a predetermined size from the base film, the green sheet of a predetermined size held with the base film fixed is used. It is preferable to include a step of separating from the base film.

The step of peeling the green sheet of a predetermined size from the base film includes a step of pulling the base film from the green sheet of a predetermined size with the green sheet of the predetermined size fixed. You can leave.

In any case, the gap that triggers the peeling can be enlarged, and the green sheet of a predetermined size can be easily peeled from the base film.

A peeling apparatus according to another aspect of the present invention is a peeling apparatus for peeling a green sheet of a predetermined size from a green film of ceramics formed on a base film. , A stage part, a head part, a blade part, and a fine movement imparting part. The stage section holds the base film side. The head portion holds the green sheet side. The blade section separates a green sheet of a predetermined size from the green sheet. The fine movement imparting portion forms a fine movement on either the green sheet or the base material film of the predetermined size in order to form a gap that triggers peeling between the end portion of the green sheet of the predetermined size and the base material film. give.

According to this structure, first, the fine movement imparting portion imparts a fine movement to the held green sheet having a predetermined size, so that the end portion of the green sheet having the predetermined size and the base film are separated from each other. A gap that triggers peeling is formed therebetween. Then, by widening the gap from the end portion of the predetermined size green sheet toward the center, the green sheet of the predetermined size can be easily peeled from the base film without damaging the green sheet.

Preferably, the head portion includes a suction surface portion having a plurality of suction holes for contacting a green sheet of a predetermined size and holding the green sheet of a predetermined size by suction. Among these suction holes, the opening diameter of the suction hole arranged on the outer peripheral portion of the suction surface portion and located in the vicinity of the blade portion is larger than the opening diameter of the suction hole arranged inside the suction surface portion.

As a result, the suction force by the suction holes located at the outer peripheral portion becomes stronger, and a trigger for peeling occurs between the base film and the end portion of the green sheet of a predetermined size located directly below the suction holes. Can easily be formed.

The fine movement imparting portion preferably imparts a fine movement to either the head portion or the stage portion.

Whichever the fine movement is applied, the green sheet of a predetermined size is finely moved in accordance with the fine movement, and a gap that triggers peeling can be formed.

[0026]

BEST MODE FOR CARRYING OUT THE INVENTION A green sheet peeling apparatus and a peeling method using the same according to an embodiment of the present invention will be described.

As shown in FIG. 1, in the peeling device,
Carrier film 23 on which the green sheet 21 is formed
There is provided a stage 5 that conveys and fixes the carrier film 23 by suction at a predetermined position. That stage 5
Above the above, a suction plate 1 for sucking the green sheet 21 formed on the carrier film 23 is provided.

In order to bring the suction plate 1 into contact with the green sheet 21 and to separate the green sheet 21 from the carrier film 23, vertical posts 13 for moving the suction plate 1 in the vertical direction are provided.

The peeled rectangular green sheet 21a
A stacking stage (not shown) is provided in the vicinity of the suction plate 1 for sequentially stacking. A linear guide 14 for moving the suction plate 1 substantially horizontally in a direction substantially orthogonal to the conveying direction of the green sheets 21 is provided toward the stacking stage.

Above the suction plate 1, a green sheet 21 is provided.
A servo motor 11 is provided to give a slight vertical movement to the suction plate 1 when peeling off. Servo motor 1
A ball screw 12 and an upper and lower post 13 for changing the rotational movement of the servomotor 11 into a vertical movement are provided below the unit 1.

Next, the structure near the suction plate 1 will be described in detail. As shown in FIG. 2, the suction plate 1 is provided with a suction surface 1a that comes into contact with the green sheet 21, and the suction surface 1a is provided with suction holes 2 for sucking the green sheet 21. Around the suction plate 1, a cutting blade 3 for cutting the green sheet 21 is provided. When the green sheet 21 is cut, the cutting blade 3 descends below the tip surface of the suction plate 1 to the extent that the carrier film 23 is not completely cut.

On the other hand, the stage 5 is also provided with a suction hole (not shown) so that the carrier film 23 is suction-fixed at a predetermined position as shown by an arrow 52. With the carrier film 23 fixed by suction, the green sheet 21 is fixed by suction by the suction plate 1. Then, the cutting blade 3 cuts the green sheet 21 into a rectangular green sheet 21a having a predetermined size.

After that, the suction plate 1 is finely moved in the vertical direction by driving the servo motor 11. At this time, for example, a vertical movement distance of 100 to 500 μm and a time of 10 to 10
Three micro-movements of 0 ms are performed. A slight movement of the suction plate 1 forms a gap between the end of the cut rectangular green sheet 21a and the carrier film 23, which triggers peeling. By moving the suction plate 1 upward in this state, peeling progresses through the gap and the cut rectangular green sheet 21a is peeled from the carrier film 23. The fine movement may be performed once or plural times, but it is preferable to perform the fine movement at least three times in order to surely form the gap that triggers the peeling. Even if the fine movement was performed more than three times, there was no big difference in the way the gap was formed.

As described above, in the present peeling apparatus, the suction plate 1 is formed in order to form a gap that triggers peeling between the end of the rectangular green sheet 21a and the carrier film 23.
Servo motor 11 and the like are provided as a fine movement imparting unit for finely moving the vertical direction.

Next, the peeling method of the green sheet by the above-mentioned peeling device will be described in detail. First, as shown in FIG. 3, the carrier film 23 conveyed to a predetermined position is suction-fixed by the stage 5 as shown by an arrow 52. Next, as shown in FIG. 4, the suction plate 1 is lowered and the green sheet 21 is fixed by suction.

Next, as shown in FIG. 5, the cutting blade 3 descends to cut the green sheet 21 into green sheets of a predetermined size. At this time, for example, it is cut into a rectangular shape having one side S as a predetermined size. (See S in FIG. 3) After that, the suction plate 1 is slightly moved in the vertical direction, so that a gap that triggers peeling is formed between the end portion of the cut rectangular green sheet 21a and the carrier film 23. .

This step will be described in more detail.
As shown in FIG. 6, when the rectangular green sheet 21a is cut, the end portion of the rectangular green sheet 21a and the carrier film 23 are still in close contact with each other. In addition,
Among the suction holes 2 formed in the suction surface 1a of the suction plate 1, in the suction holes 2a located on the outermost periphery of the suction plate 1, the opening diameter D1 of the portion that contacts the rectangular green sheet 21a is
It is set to be larger than the opening diameter D2 for the suction hole 2b located on the inner side. For example, in this case, the opening diameter D1 is preferably set to about 2 to 5 times the opening diameter D2.

Next, in the step shown in FIG. 7, the suction plate 1
Moves slightly up and down. At the time of this fine movement, since the opening diameter D1 of the suction hole 2a located on the outermost periphery of the suction plate 1 is larger than the opening diameter D2 of the suction hole 2b located on the inner side, the suction force by the suction hole 2a becomes stronger. The end portion of the rectangular green sheet 21 a located immediately below the suction hole 2 a is easily peeled off from the carrier film 23.

As a result, a gap A that triggers peeling is formed between the end portion of the rectangular green sheet 21a and the carrier film 23. The gap A is, for example, several mm from the end of the cut green sheet 21.
(G) It is preferable that the clearance H penetrates to the inside and has a height H of about 50 to 300 μm as a gap that triggers peeling.

After the gap A which triggers the peeling is formed in this manner, the suction plate 1 moves upward as shown in FIG. At this time, since the suction force by the suction plate 1 is stronger than the suction force of the punching plate 5, a gap is formed between the punching plate 5 and the carrier film 23 located under the suction plate 1, and the peeling trigger is generated. The gap thus becomes larger from the end of the rectangular green sheet 21a toward the center, and the rectangular green sheet 21a is gradually peeled inward from the end of the rectangular green sheet 21a.

In this way, as shown in FIG. 9, the rectangular green sheet 21a is peeled from the carrier film 23. After that, the peeled rectangular green sheets 21a are sequentially stacked at predetermined positions.

In the above-mentioned green sheet peeling method,
By finely moving the suction plate 1 that sucks the rectangular green sheet 21a, a gap A that triggers peeling is formed between the end of the rectangular green sheet 21a and the carrier film 23. After that, fill the gap with the rectangular green sheet 2
By gradually expanding toward the center of 1a, the rectangular green sheet 21a can be easily and surely peeled from the carrier film 23 without being damaged.

In the above-described green sheet peeling apparatus, the case where the suction plate 1 is raised to gradually widen the gap that triggers peeling toward the center of the rectangular green sheet 21a has been described.

As a means for gradually widening the gap that triggers peeling, for example, as shown in FIG.
The stage 5a and the roller 15 which are movable in the direction shown in FIG. 4 are provided, and after forming a gap that triggers the peeling, the stage 5a and the roller 15 are moved in the direction shown by the arrow 54 to move the rectangular green sheet 21a to the carrier. You may make it peel from the film 23.

Further, as shown in FIG. 11, for example, a chuck 6 for gripping the end portion of the carrier film 23 is provided, and the end portion of the carrier film 23 is held by the chuck 6 in the direction indicated by the arrow 55. By moving the rectangular green sheet 21a to the carrier film 23.
It may be peeled off.

Also in the peeling method using the above-mentioned means, the rectangular green sheet 21a can be easily and surely peeled from the carrier film 23 by previously forming the gap that triggers the peeling.

In the above embodiment, the cutting blade 3 is used after the green sheet 21 is sucked and fixed by the suction plate 1.
The green sheet 21 is a rectangular green sheet 21
Although the case of being cut into a has been described, the order of cutting the green sheet 21 by the cutting blade 3 and sucking the green sheet 21 by the suction plate 1 is not limited to this.

Although the case where the carrier film 23 is fixed by suction with the stage 5 has been described, the carrier film 23 may be fixed to the stage 5 by pressing the carrier film 23 with the cutting blade 3 instead of fixing it with suction. .

The embodiments disclosed this time are to be considered as illustrative in all points and not restrictive. The present invention is shown not by the above description but by the scope of the claims, and is intended to include meanings equivalent to the scope of the claims and all modifications within the scope.

[0050]

According to the method for peeling a green sheet according to one aspect of the present invention, first, a slight movement is given to a green sheet having a predetermined size, so that an end portion of the green sheet having a predetermined size and a base material are formed. A gap that triggers peeling is formed between the film and the film. Then, by widening the gap from the end portion of the predetermined size green sheet toward the center, the green sheet of the predetermined size can be easily peeled from the base film without damaging the green sheet. The fine movement in this case means, for example, that the moving distance in the vertical direction of a green sheet having a predetermined size is about several hundreds μm.
The time is about tens of ms.

Preferably, the fine movement is performed at least three times in the step of giving the fine movement, so that a gap that triggers peeling is reliably formed between the end portion of the green sheet having a predetermined size and the base film. It

In order to widen the gap, specifically, in the step of peeling the green sheet of a predetermined size from the base film, the green sheet of a predetermined size held with the base film fixed is used. It is preferable to include a step of separating the base film from the base film, and the step of peeling the green sheet of a predetermined size from the base film is performed in a state where the green sheet of a predetermined size is fixed. It is preferable to include a step of separating the green sheet from the green sheet, and in any case, the gap that triggers the separation can be enlarged, and the green sheet having a predetermined size can be easily separated from the base film. be able to.

According to the peeling apparatus of another aspect of the present invention, first, the fine movement imparting portion applies a fine movement to the held green sheet having a predetermined size, so that the edge of the green sheet having the predetermined size is moved. A gap that triggers peeling is formed between the portion and the base film. Then, by widening the gap from the end portion of the predetermined size green sheet toward the center, the green sheet of the predetermined size can be easily peeled from the base film without damaging the green sheet.

Further, the head portion includes a suction surface portion having a plurality of suction holes for contacting a green sheet of a predetermined size and holding the green sheet of a predetermined size by suction. Of the suction holes, the opening diameter of the suction hole arranged in the outer peripheral portion of the suction surface portion and located in the vicinity of the blade portion is preferably larger than the opening diameter of the suction hole arranged inside the suction surface portion. , The suction force of the suction holes located on the outer periphery becomes stronger, and it is easy to create a gap that triggers peeling between the end portion of the green sheet of a predetermined size located directly below the suction holes and the base film. Can be formed.

It is preferable that the fine movement imparting portion imparts a fine movement to either the head portion or the stage portion. Even when the fine movement is applied to any of the head portions and the stage portion, the green sheet of a predetermined size makes a fine movement along with the fine movement. A gap that triggers peeling can be formed.

[Brief description of drawings]

FIG. 1 is a side view of a green sheet peeling device according to an embodiment of the present invention.

FIG. 2 is a partially enlarged cross-sectional view in the vicinity of a suction plate of the peeling device shown in FIG. 1 in the same embodiment.

FIG. 3 is a cross-sectional view showing one step in a method for peeling a green sheet using the peeling device shown in FIG. 1 in the same embodiment.

FIG. 4 is a cross-sectional view showing a step performed after the step shown in FIG. 3 in the same embodiment.

FIG. 5 is a cross-sectional view showing a step performed after the step shown in FIG. 4 in the same embodiment.

FIG. 6 is a partial enlarged cross-sectional view in the step shown in FIG. 5 in the same Example;

FIG. 7 is a partial enlarged cross-sectional view showing a step performed after the step shown in FIG. 6 in the same embodiment.

FIG. 8 is a cross-sectional view showing a step performed after the step shown in FIG. 5 or FIG. 7 in the same embodiment.

9 is a cross-sectional view showing a step performed after the step shown in FIG. 8 in the embodiment. FIG.

FIG. 10 is a partially enlarged cross-sectional view of a peeling device according to a modification of the embodiment.

FIG. 11 is a partially enlarged cross-sectional view of a peeling device according to another modification of the embodiment.

FIG. 12 is a partially enlarged cross-sectional view of a conventional green sheet peeling device.

[Explanation of symbols]

1 suction plate, 2, 2a, 2b suction holes, 3 cutting blades,
5, 5a stage, 6 chuck, 11 servo motor, 12 ball screw, 13 upper and lower posts, 14 linear guide, 15 roller, 21 green sheet, 2
1a rectangular green sheet, 23 carrier film,
51-55 Arrows.

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Claims (7)

[Claims] 1. A method of peeling a green sheet of a ceramic green sheet formed on a substrate film, the green sheet having a predetermined size from the substrate film. A step of cutting the green sheet of a predetermined size, a step of holding the green sheet of a predetermined size, and an end of the green sheet of a predetermined size by giving a slight movement to the green sheet of the predetermined size. And a step of forming a gap that triggers peeling between the base film and the base film, widening the gap that triggers the peeling, and peeling the green sheet of the predetermined size from the base film And a method for peeling a green sheet. 2. The method for peeling a green sheet according to claim 1, wherein the fine movement is performed at least three times in the step of giving the fine movement. 3. The step of peeling the green sheet of a predetermined size from the base film, the green sheet of the predetermined size held with the base film fixed is removed from the base film. Including the step of separating
The method for peeling a green sheet according to claim 1 or 2. 4. The step of peeling the green sheet having the predetermined size from the base film, the green sheet having the predetermined size is fixed with the green sheet having the predetermined size fixed. The method for peeling a green sheet according to claim 1, further comprising a step of separating the green sheet from the sheet. 5. A peeling device for peeling a green sheet of a predetermined size out of a ceramic green sheet formed on a base film, the holding device holding the side of the base film. A stage portion, a head portion that holds the side of the green sheet, a blade portion that separates the green sheet of the predetermined size from the green sheet, an end portion of the green sheet of the predetermined size, and the base film. A peeling device comprising: a fine movement imparting portion for imparting a fine movement to either the green sheet having the predetermined size or the base film, in order to form a gap that triggers the peeling. 6. The head portion includes a suction surface portion in which a plurality of suction holes for contacting the green sheet of the predetermined size and holding the green sheet of the predetermined size by suction are formed. Of the plurality of suction holes, the opening diameter of the suction hole arranged in the outer peripheral portion of the suction surface portion and located in the vicinity of the blade portion is larger than the opening diameter of the suction hole arranged inside the suction surface portion. The peeling device according to claim 5. 7. The peeling device according to claim 5, wherein the fine movement imparting portion imparts a fine movement to either the head portion or the stage portion.