JP2003131058A - Optical waveguide and method for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for easily and simply manufacturing an optical waveguide in a polymeric material and the optical waveguide which is easily and simply manufactured and can easily be made three-dimensional. SOLUTION: A core and a clad layer having mutually different refractive indices are formed by illuminating concentration of a laser light within one polymeric material, and the optical waveguide is manufactured. In irradiation with the condensed laser light, a condens point is relatively moved within the polymeric material or the polymeric material is continuously moved relative to the condensing point of the laser light, and the polymeric material is irradiated with a pulse laser having a high peak output. Thereby, the problem is overcome.

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention
Refractive index change region formed continuously inside molecular material
The present invention relates to an optical waveguide and a method for manufacturing the same. 2. Description of the Related Art In recent years, optical communication has been rapidly increasing in interest.
Optical components that are important in
A), optical multiplexer / demultiplexer, optical isolator, optical fiber amplifier
However, recently, waveguide type devices have been regarded as promising.
I have. Currently the most powerful and reliable passive light
Although the waveguide element is a glass waveguide, 100
There is a problem in workability such as including a high temperature process of 0 ° C or more.
You. Therefore, the refractive index changes due to the focused irradiation of the laser beam.
Light that is continuously formed inside the glass material
Although a waveguide is disclosed in Japanese Patent Application Laid-Open No. 9-31237,
No flexibility to fabricate lath waveguides
There are problems such as cracking and cracking. So the polymer
There are many studies to fabricate optical waveguides using materials
Have been. [0003] Among them, in the near infrared region (1.2 to 1.
6μm), high heat resistance, low absorption
Because it has excellent properties such as moisture,
Mid resin is in the spotlight as a material for optical waveguides,
Various production methods using fluorinated polyimide resin have been proposed
(Eg, Japanese Patent Application Laid-Open No. 2-281037,
JP-A-4-8734, JP-A-4-9807,
JP-A-5-164929 and JP-A-6-511
No. 46, etc.). However, these methods do not
Again, to make the relief structure of the waveguide pattern,
For example, a pattern with a photosensitive resin on a polyimide resin layer
Formed and by RIE (reactive ion etching) etc.
Complicated by etching and peeling off excess photosensitive resin
Use a simple method. For this reason, the process for manufacturing optical waveguides
The number of steps in the process increases, leading to manufacturing costs and yield
It has the problem of adverse effects. [0004] In addition, light is applied to a polymer material by laser irradiation.
Japanese Patent Application Laid-Open No. 09-318831 discloses a method for forming a waveguide.
Optical waveguide fabrication by laser using photopolymer
It has been disclosed. However, this method uses light irradiation to polymerize
Use a photopolymer whose refractive index changes with increasing degrees.
Is not versatile, and core and clad
Since they are formed separately, a lamination process due to three times of application etc. occurs.
It is complicated. The laser used here is polymerized
Since a material that increases the degree is used, a polymer material
It is difficult to change the refractive index by irradiating the material. On the other hand, excimer lasers and the like are used for polymers.
When hit, release of polymer called ablation
The processing method by leaving is shown in JP-A-05-185269 etc.
However, in this processing method, an optical waveguide is manufactured by changing the refractive index.
It is difficult to do. [0006] The above problems of the prior art
To solve the problem, simply fabricate an optical waveguide in a polymer material.
Manufacturing method and easily manufactured three-dimensional light
It is to provide a waveguide. [0007] The optical waveguide of the present invention comprises:
Refraction by condensing irradiation of laser light to achieve the purpose of
The part where the rate has changed is continuously formed inside the polymer material.
It is characterized by being. That is, the present invention provides the following new
The above problem is solved by a regular optical waveguide and its manufacturing method
Can. 1) The part where the refractive index has changed due to the laser beam focusing irradiation
An optical waveguide formed continuously inside a polymer material. 2) Focus and irradiate laser light inside one polymer material
As a result, cores and cladding layers having different refractive indices are formed.
Optical waveguide. 3) The glass transition temperature (Tg) of the polymer material is 120 ° C or higher.
The optical waveguide according to claim 1, wherein 4) When the polymer material is polyimide, polycarbonate,
Elemental aliphatic ring structure-containing polymer, epoxy resin, silicone
Resin, polysilane, or cyanate ester resin
The optical waveguide according to any one of 1) to 3), wherein 5) The polymer material is polyimide or silicone resin
The optical waveguide according to any one of 1) to 3). 6) The polymer material is a polyimide containing fluorine
The optical waveguide according to any one of 1) to 3). 7) Radical or ionic reaction with polymer materials
Contains oligomers and / or monomers having a property
The method according to any one of 1) to 6), wherein
Optical waveguide. 8) having the radical reactivity or ionic reactivity
Oligomer and / or monomer is an epoxy group,
Select from cetane group, cyanate group, maleimide group
7) having at least one functional group
Optical waveguide. 9) Laminate the main chain and / or side chain of the polymer of the polymer material.
Characterized by having dical or ion reactive groups
The optical waveguide according to any one of 1) to 6), 10) wherein the radical or on-reactive group is an epoxy.
Group, oxetane group, cyanate group, maleimide group
At least one functional group selected from
9. The optical waveguide according to 9), wherein 11) The light loss of the polymer material is from 600 nm to 1600 nm
1 dB / cm or less at any wavelength 1) to 10)
12. The optical waveguide according to any one of the above 12), wherein a laser beam is focused and irradiated inside one polymer material.
Core and cladding layers with different refractive indices
Of manufacturing an optical waveguide. 13) The focused irradiation of the laser light is performed inside the polymer material.
Is performed by moving the focal point relative to
A method for manufacturing an optical waveguide for forming a core layer. 14) The laser beam causes a photoinduced refractive index change.
12) or 13) which is a laser beam having an amount of energy
3. The method for manufacturing an optical waveguide according to item 1. 15) The pulse width of the laser light is 500 psec or less.
12) The production of the optical waveguide according to any one of the items 14) to 14).
Construction method. 16) Peak power intensity at the focal point of the laser light
Degree 10 ^Three W / cm ^Two 12)-14)
A method for manufacturing an optical waveguide according to any one of the preceding claims. 17) The repetition frequency of the laser beam is 10 KHz or less.
Optical waveguide according to any one of 12) to 16) above.
Road manufacturing method. 18) Polyimide or polycarbonate as the polymer material
, A functional group-containing fluoroaliphatic ring structure-containing polymer,
Epoxy resin, silicone resin, polysilane, cyanic acid
It is characterized by using any of the steal resins 12)
17) The method for manufacturing an optical waveguide according to any one of the above items. 19) radical-reactive or ionic
Including reactive oligomers and / or monomers
18) The optical waveguide according to the item 18),
Production method. 20) having the above radical reactivity or ionic reactivity
Oligomers and / or monomers are epoxy groups,
Select from xetane, cyanate, and maleimide groups
19) having at least one or more functional groups selected
The manufacturing method of the optical waveguide described. 21) Main chain and / or side chain as the polymer material
Using a polymer having a radical or on-reactive group
(18) The method for manufacturing an optical waveguide according to (18). 22) The radical or ion-reactive group is an epoxy group
Si group, oxetane group, cyanate ester group, maleimide
At least one functional group selected from
21) The method for manufacturing an optical waveguide according to the item 21). 23) The polymer material is continuously transferred to the focal point of the laser beam.
Moving the optical waveguide according to any one of 12) to 22).
Construction method. 24) Continuously focus the laser beam inside the polymer material
The optical waveguide according to any one of 12) to 22),
Production method. [0008] The optical waveguide of the present invention is a polymer material
By condensing and irradiating laser light inside the
Since different regions are formed, the core layer of the optical waveguide
One polymer material without the need for separate layers
Then, change the refractive index, and use the laser
-By condensing and irradiating light, an optical waveguide can be easily created.
Is possible. Irradiation of polymeric materials that can be used in the present invention
Laser light that changes the refractive index
There is no particular limitation on the laser light as long as it can generate light.
The area where the refractive index has changed,
Because a region that can function as a layer is formed continuously
Is preferably high energy laser light
No. [0010] Such a laser beam has a pulse width of
Is preferably 500 psec or less.
It is preferably p seconds or less, more preferably 500 ft seconds or less. 50
When the pulse width is wider than 0p, the desired refractive index change
May not do. In addition, 150 ft or less, especially 5
For a pulse of 0 to 5 ft seconds, the laser light intensity is increased by the amplifier.
Easy to use because it can be used without width
No. Higher by narrowing the laser pulse width
When the peak output is obtained, for example,
Polymer materials are also used for pulsed lasers with repetition rates.
A phenomenon in which the refractive index changes at the focal point of the laser beam.
Was. Under these conditions, wavelengths other than the intrinsic absorption wavelength of the polymer
Similarly, even a pulse laser with
A phenomenon that changes the photo-induced refractive index of the polymer occurs. An example
For example, use a polymer that does not absorb light at a wavelength of 800 nm.
To change the optical refractive index with a laser having a wavelength of 800 nm.
If it occurs, a light-induced change in the refractive index occurs at the focal point
Preferred with no laser light loss in the laser beam path to the point
No. Further, the peak power intensity at the focal point
Is 10 ^Three W / cm ^Two It is preferable that this is the case.
Pulsed laser with wavelength matching the intrinsic absorption wavelength of polymer
The absorption is weak, for example, 10
^Three W / cm ^Two Above peak power intensity is secured
And a photo-induced refractive index change occurs. Preferably 10 ^Five W / c
m ^Two That is it. The phenomenon in which the refractive index changes depends on the mechanism
Although the mechanism is unknown, it can be used effectively for fabrication of optical waveguides.
It is. Also, since the repetition cycle is fast, polymer materials
By continuously scanning, the trajectory of the condensing part is continuously
It is possible to form a refractive index change region. In order to form a smooth waveguide structure,
The pulse interval is narrowed, that is, the repetition period is increased, and the first pulse
Lus and the second pulse need to be irradiated as simultaneously as possible
is there. Therefore, in the present invention, the repetition of the pulse laser
The frequency is preferably 10 KHz, more preferably 100 KHz.
Set to KHz or more. Laser with low repetition rate
Light is radiated discretely and the continuous
No change in refractive index can be obtained. Note that the repetition frequency is small
Even in such a case, scanning of the polymer material or the focal point of the laser beam
Slow scanning speed allows continuous
Laser light can be applied. However, in this case, the first pass
The second pulse overlapped after a certain period of time after irradiation
Because it is irradiated in the state, if the repetition frequency is too small,
The change in the refractive index formed by the first pulse is caused by the second pulse.
The change occurs again, and a sufficient change in the refractive index cannot be obtained. one
On the other hand, the upper limit of the repetition frequency is
It is almost a continuous laser. However, repeated laps
As the wave number increases, the energy per pulse generally increases
Becomes weaker. For this reason, the polymer material actually changes refractive index.
Depending on the threshold value of
The upper limit of the frequency is set. The core diameter of the optical waveguide is
Changing the power and focused spot diameter of the pulsed laser
Can be controlled. The power of the pulsed laser or
The larger the focused spot diameter, the larger the core diameter
You. In addition, depending on the number of pulse laser scans,
The amount of change in refractive index can be controlled, increasing the number of scans.
The larger the change in the refractive index, while keeping the core diameter constant.
Can be The rate of change of the refractive index by laser irradiation is 0.1.
2% to 3% is preferable, and a change rate of 0.3% to 2% is more preferable.
preferable. Unirradiated when refractive index change is less than 0.2%
The refractive index difference with the part is too small to function as an optical waveguide
There are cases. Change in refractive index of 3% or more cracks polymer
May occur. The irradiation of the polymer material with the laser beam is performed at the focal point.
Method of continuously moving polymer material to
Method of continuously moving the focal point of laser light inside the material
It is preferable to carry out. An example of the polymer material is Polyimid
, Polymaleimide, polyarylate, polycarbonate
, Polyurethane, polysulfide, polysulfone,
Polyamide, polyimine, polyurea, polysilane, poly
Silazane, polybenzoxazole, polyoxadiazo
, Polybenzothiazole, polybenzimidazo
, Polystyrene, polyacrylic acid, polyacrylic acid
Stele, polymethacrylic acid, polymethacrylate
, Polyacrylamide, polymethacrylamide, poly
Ether ether ketone, polyester, polysiloxa
, Polynorbornene, polysilane, polyvinyl chloride,
Epoxy resin, cellulosic resin, silicone resin, silicone resin
Anatoester resins and fluorine-based resins are exemplified. Polyimid has excellent optical properties.
, Polycarbonate, fluorine resin, especially fluorine resin
Aliphatic ring structure-containing polymer, epoxy resin, silicone resin
Fats and cyanate ester resins are preferred. Fluoroaliphatic ring structure-containing polymers include, for example,
If the fluorine-based monomer having two or more polymerizable double bonds is a ring
Polymerized units formed by chemical polymerization, and fluorinated aliphatic
Select from polymerized units formed by polymerization of the ring structure-containing monomer.
Polymer having at least one type of polymerized unit
You. In particular, a fluorine-based unit having two or more polymerizable double bonds
Monomer is perfluoro (allyl vinyl ether) or
Fluoro (butenyl vinyl ether) and fluorine
When the monomer having a system aliphatic ring structure is perfluoro (2,2-di
Methyl-1,3-dioxole). As the silicone resin, polysiloxane,
Modified silicone resin, acrylic silicone resin, etc.
But preferably (A) a carbon reactive with SiH groups.
Having at least two carbon double bonds in one molecule
Organic compound consisting of organic skeleton, (B) less in one molecule
A silicon compound containing two SiH groups, and (C)
Contains a silyl group containing drosilylation catalyst as an essential component
Organic resin. In particular, polyimide is preferred in terms of heat resistance.
The fact that it contains fluorine means optical properties and hygroscopicity
Is preferred. Among them, 2,2-bis (3,4-dicarboxy)
(Ciphenyl) hexafluoropropane dianhydride and
With a structure condensed with romellitic dianhydride,
2,2'-bis (trifluoromethyl) -4,4'-di
Those with a structure obtained by condensing aminobiphenyl are hygroscopic,
It is preferable in terms of optical characteristics. In addition, refraction of laser beam irradiation part
Oligomers and / or monomers to increase the rate
It is preferable to include a salt. Perspective of increasing refractive index?
Oligomer and / or monomer radical reaction
And ion-reactivity are preferred, especially ion-reactive
It is preferable that the oligomer and monomer are
Poxy group, oxetane group, cyanate ester group, male
It is particularly preferred to have a mid group. Has a maleimide group
For example, 1,2-bismaleimideethane,
1,3-Bismaleimidebenzene, 1,6-Bismalei
Midohexane, 1,4-bismaleimidebenzene, 2,
4-Bismaleimidotoluene, 4,4'-Bismaleimi
Dodiphenyl ether, 4,4'-bismaleimidodif
Phenylmethane, 3,3'-bismaleimidodiphenyls
Rufone, 4,4'-bismaleimidodiphenylsulfo
, 4,4'-bismaleimidodicyclohexyl meta
, 2,6-bismaleimidepyridine, 1,3-bis
(Maleimidomethyl) cyclohexane, 3,5'-bis
(4-maleimidophenyl) pyridine, 1,3-bis
(Maleimidomethyl) benzene, 1,1-bis (4-ma
Reimidophenyl) cyclohexane, 1,3-bis (di
Chlormaleimido) benzene, 2,2-bis (4-male
Imidophenyl) propane, 4,4'-biscitracone
Imidodiphenylmethane, 1-phenyl-1,1-bis
(4-maleimidophenyl) ethane, α, α-bis (4
-Maleimidophenyl) toluene, 3,5-bismalei
Mido-1,2,4-triazoles,
Replace some or all of the hydrogen atoms with deuterium or fluorine
And those obtained by reacting them to form oligomers
May be. Monomers and oligomers with epoxy groups
For example, bisphenol A type epoxy, bispheno
F type epoxy, phenol novolak type epoxy,
Cresol novolak epoxy, glycidyl ether
Epoxy, naphthalene epoxy, alicyclic epoxy, etc.
Of various epoxies can be used. Refractive index change
An alicyclic epoxy is preferable from the viewpoint of easiness. Again
Replace some or all of these hydrogen atoms with deuterium or fluorine.
The replacement can be used. Monomers with oxetane groups
Examples of oligomers such as 3,3-bis (chlorome
Tyl) oxetane, 3,3-bis (iodomethyl) oxo
Cetane, 3,3-bis (methoxymethyl) oxetane,
3-methyl-3-chloromethyloxetane, 3,3-bi
(Phenoxymethyl) oxetane, 3,3-bis (A
Cetoxymethyl) oxetane, 3,3-bis (fluoro
Methyl) oxetane, 3,3-bis (bromomethyl) o
There are xetane, 3,3-dimethyloxetane and the like. this
Place some or all of these hydrogen atoms with deuterium or fluorine.
What was changed, these were reacted and oligomerized
It may be something. Monomers with cyanate ester groups
As the ligomer, for example, 1,3- or 1,4-dicia
Nobenzene, 2-tetrabutyl-1,4-dicyanoben
Then, 2,4-dimethyl-1,3-dicyanobenzene,
2,5-di-tetrabutyl-1,4-dicyanobenze
4-chloro-1,3-dicyanobenzene, 1,3
5-tricyanobenzene, 2,2'- or 4,4'-di
Cyanobiphenyl, 3,3 ', 5,5'-tetramethyl
-4,4'-dicyanobiphenyl 1,3-, 1,4-,
1,5-, 1,6-, 1,8-, 2,6- or 2,7-
Dicyanatonaphthalene, 1,3,6-tricyanatonaph
Taren, 4,4'-dicyanatodiphenylmethane, bis
(3-methyl-4-cyanatophenyl) methane, bis
(3,5-dimethyl-4-cyanatophenyl) methane,
Bis (3,5-dibromo-4-cyanatophenyl meta
, Bis (3,5-dichloro-4-cyanatophenyl)
Methane, bis (4-cyanatophenyl) ethane, 2,2
-Bis (4-cyanatophenyl) propane, 2,2-bi
(3,5-dimethyl-4-cyanatophenyl) propa
2,2-bis (3-methyl-4-cyanatophenyi)
Le) propane, 4,4'-dicyanatodiphenylthioe
-Tel, 2,2-bis (4-cyanatophenyl) perf
Luoropropane, 1,1-bis (4-cyanatopheni
Le) ethane, 2,2-bis (3,5-dichloro-4-si
Anatophenyl) propane, 2,2-bis (3,5-di
Bromo-4-cyanatophenyl) propane, bis (4-
Siantophenyl) ketone, bis (4-cyanophenyi)
Ru) sulfone, tris (4-cyanatophenyl) phosph
Aite and tris (4-cyanophenyl) phosphe
And some or all of these hydrogen atoms
There are fluorine atoms or deuterated ones. Also these
An oligomer obtained by reacting the above monomers may be used.
It also introduces radical reactive groups and ion reactive groups into polymers.
You may enter. This group includes epoxy group, oxetane
Group, cyanate ester group, maleimide group
At least one functional group is preferred. Introduction of reactive groups
The method of addition is to polymerize a monomer having a reactive group.
Good. The glass transition temperature (T
g) is preferably 120 ° C or higher, more preferably 150 ° C or higher.
Good. Ablation when Tg is lower than 120 ° C
May easily occur, and it may be difficult to form an optical waveguide. Ma
In addition, long-term stability may be lacking. Material
The wavelength of any of the wavelengths from 600nm to 1600nm
It is preferable that the light loss is 1 dB / cm or less. 1dB
/ Cm, a large loss is used as an optical waveguide.
May not be able to withstand
Absorption means that ablation is likely to occur
It is not preferable in terms of point. Also, an optical element is made from an optical waveguide.
For example, an optical branching coupler (optical coupler),
An optical multiplexer / demultiplexer, an optical isolator, and the like can be manufactured. [Examples] Commercial raw materials are purified and used as necessary.
Was. The source of each raw material is shown. 2,2'-bis (triflu
Oromethyl) -4,4'-diaminobiphenyl (cent
Ralglass), dimethylacetamide (Wako Pure Chemical)
), Pyromellitic dianhydride (manufactured by Wako Pure Chemical Industries), 2,
2-bis (3,4-dicarboxyphenyl) hexaflu
Olopropanoic dianhydride (Clariant Japan, Inc.)
), Methanol (Wako Pure Chemical Industries, Ltd.), β-picoline
(Manufactured by Wako Pure Chemical), acetic anhydride (manufactured by Wako Pure Chemical), 4,4
'-Bismaleimidodiphenylethane (Wako Pure Chemical Industries, Ltd.)
It was used. Tg (glass transition temperature): DSC of film sample
(Differential scanning calorimeter: DSC-50 manufactured by Shimadzu Corporation)
At a heating rate of 10 ° C./min. Refractive index measurement of minute parts: Beam profile reflectivity measurement
Wavelength 675nm, beam spot 1μm, high precision
Measured with Opti-Probe2000 (manufactured by Therma Wave)
Specified. Preparation of samples 1 and 2: in a container under a nitrogen atmosphere
2,2'-bis (trifluoromethyl) -4,4'-
Diaminobiphenyl (3.20 g, 10 mmol)
After dissolving in methyl acetamide (36.9 g),
2-bis (3,4-dicarboxyphenyl) hexaflu
Olopropane dianhydride (2.22 g, 5.0 mmol)
And pyromellitic dianhydride (1.09 g, 5.0 mmol
l) was added and the mixture was stirred for 5 hours while cooling the vessel with ice. Next room
Raise the temperature and stir for another 5 hours. Polyamic acid (I)
(Solid content 15% by weight) was obtained. Β-picoline is added to this solution.
0.93 g (10 mmol) and 6.13 g of acetic anhydride (6
0mol), stir well and keep the solution at 80 ℃
The mixture was further stirred for 3 hours. This solution is dropped into methanol
To give a white solid. The solid was soaked in methanol for 12 hours.
Perform X-ray extraction and dry under vacuum at 60 ° C for 24 hours.
The resulting polyimide (I) was obtained. This polyimide is solid
Dissolved in dioxolane to a concentration of 20% by weight.
Was. 2,4′-Bismaleimidodiphenyl was added to 2 g of this solution.
And then stirred until it became uniform
And cast it on a glass substrate, and at 60 ° C for 30 minutes.
30 minutes at 80 ° C, 30 minutes at 100 ° C, and vacuum
The solvent was removed by heating at 120 ° C for 2 hours,
A 00 μm polyimide fill (I) was obtained. Film
Tg was found to be 300 ° C. or higher when measured by DSC.
Was. (Example 1) A polyimide film was used as a sample.
As shown in FIG. 1, pulse laser light 1 is
Then, the light was condensed and irradiated. As the pulse laser beam 1,
Oscillation from Ti: Al2O3 laser excited by argon laser
Pulse width 120 femtoseconds, repetition frequency 200K
Hz, 800nm wavelength, 200mW average power laser
To an average output of 7 mW by an optical filter.
Used. The pulse laser beam 1 is focused by the lens 2 and
The light is focused so that a focal point 4 is generated inside the mid film (I).
When irradiated, the refractive index at the focal point 4 increased. So, try
The platform is moved linearly continuously, as shown in FIG.
Region inside the sample 3 where the linear refractive index is high,
An optical waveguide 6 was formed. The fact that the optical waveguide is formed is actually
The part where visible light is incident on the sample and the refractive index changes
It was confirmed that the light was transmitted only to this. Also sump
The cross section of the tool was polished and the refractive index of a minute part was measured.
The unirradiated part is 1.585,
The high refractive index portion is 1.595 and the refractive index is 0.6%
Increased. Also, the refractive index is higher in the center of the irradiated part.
Was. The obtained optical waveguide is composed of a core and a clad.
Interfacial loss is extremely high because there is no clear interface between
Less, and the method of forming fine waveguides in optical integrated circuits, etc.
Is expected to be used. Also bends by hand
Glass materials can take unreasonable various forms.
You. (Example 2) Polyimide film (I) was used as sample 2.
use. As shown in FIG. 3 in which the focus 4 is formed inside the sample 2,
Pulse width 150 femtoseconds, repetition frequency 200KH
z, wavelength 800nm, average output 150mW pulse train
The light 1 is reduced to 10 mW by an optical filter and collected.
Irradiate. The sample stage 5 was moved continuously in a curved shape.
In addition, as shown in FIG.
Being formed inside the sample 3 along the locus of the light spot 4
Is confirmed by observation with an optical microscope. Further, the cross section of the sample is polished to cut the sample.
When the surface was polished and the refractive index of the minute part was measured,
The irradiating part is 1.585, the highest refractive index of the irradiating part.
The high portion is 1.600, which is a 0.9% increase in the refractive index.
Was. Further, the refractive index was higher toward the center of the irradiated part. As described above, according to the present invention,
Uses a pulse laser with a high peak output value such as polyimide.
Irradiating a polymer material to change the refractive index at the focal point
Optical waveguide is written inside the polymer material by
You. This method requires no complicated steps and is simple.
It has the advantage of simply forming an optical waveguide and is a polymer material
It is also possible to obtain a flexible optical waveguide by using
it can. In addition, polymer with respect to the optical axis direction of the pulse laser
The scanning direction of the material or the shift of the focal point with respect to the polymer material
The shape of the optical waveguide can be controlled arbitrarily by changing the moving direction.
3D suitable for optical integrated circuits with complicated circuit structures
Optical waveguides are also easily manufactured.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a simplified cross-sectional view when irradiating a sample with pulsed laser light. FIG. 2 is a perspective view of a linear optical waveguide fabricated inside the sample. FIG. 3 is irradiating the sample with pulsed laser light. FIG. 4 is a perspective view of a curved optical waveguide fabricated inside a sample 1: pulse laser light 2: focusing lens 3: sample 4: focusing point 5: sample stage 6: optical waveguide

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Claims (1)

Claims: 1. An optical waveguide in which a portion whose refractive index is changed by condensing irradiation of a laser beam is continuously formed inside a polymer material. 2. An optical waveguide in which a core and a cladding layer having different refractive indexes are formed by converging and irradiating laser light inside one polymer material. 3. The polymer material has a glass transition temperature (Tg) of 12
The optical waveguide according to claim 1, wherein the temperature is 0 ° C. or higher. 4. A polymer material comprising polyimide, polycarbonate, a polymer having a fluorinated aliphatic ring structure, an epoxy resin,
The optical waveguide according to any one of claims 1 to 3, wherein the optical waveguide is any one of a silicone resin, a polysilane, and a cyanate ester resin. 5. The optical waveguide according to claim 1, wherein the polymer material is a polyimide or a silicone resin. 6. The optical waveguide according to claim 1, wherein the polymer material is a polyimide containing fluorine. 7. The optical waveguide according to claim 1, wherein the polymer material contains an oligomer and / or a monomer having radical reactivity or ionic reactivity. 8. The method according to claim 7, wherein said oligomer and / or monomer having radical reactivity or ionic reactivity has at least one functional group selected from an epoxy group, an oxetane group, a cyanate ester group and a maleimide group. An optical waveguide as described. 9. The optical waveguide according to claim 1, wherein the polymer has a radical or an ion-reactive group in a main chain and / or a side chain of the polymer. 10. The optical waveguide according to claim 9, wherein said radical or on-reactive group is at least one or more functional groups selected from an epoxy group, an oxetane group, a cyanate ester group and a maleimide group. 11. The polymer material has a light loss of 600 nm to 16 nm.
The optical waveguide according to any one of claims 1 to 10, wherein the optical waveguide has a wavelength of 1 nm / cm or less at any wavelength of 00 nm. A method for manufacturing an optical waveguide in which a core and a clad layer having different refractive indexes are formed. 13. Condensed irradiation of the laser beam is performed by relatively moving a converging point inside a polymer material;
A method for manufacturing an optical waveguide for forming a continuous core layer. 14. The laser beam according to claim 1, wherein the laser beam has an energy amount that causes a photo-induced refractive index change.
14. The method for manufacturing an optical waveguide according to 2 or 13. 15. The method of manufacturing an optical waveguide according to claim 12, wherein a pulse width of the laser light is 500 psec or less. 16. The method according to claim 1, wherein a peak power intensity at a focal point of the laser beam is 10 ³ W / cm ² or more.
15. The method of manufacturing an optical waveguide according to any one of 2 to 14. 17. A laser beam having a repetition frequency of 10
The method of manufacturing an optical waveguide according to any one of claims 12 to 16, wherein the frequency is equal to or higher than KHz. 18. The polymer material includes polyimide, polycarbonate, a functional group-containing fluoroaliphatic ring structure-containing polymer, epoxy resin, silicone resin, polysilane,
The method for manufacturing an optical waveguide according to any one of claims 12 to 17, wherein any one of a cyanate ester resin is used. 19. The method of manufacturing an optical waveguide according to claim 18, wherein said polymer material contains an oligomer and / or a monomer having radical reactivity or ionic reactivity. 20. The oligomer according to claim 19, wherein the oligomer and / or monomer having radical reactivity or ionic reactivity has at least one functional group selected from an epoxy group, an oxetane group, a cyanate ester group and a maleimide group. A manufacturing method of the optical waveguide described in the above. 21. The polymer material as a main chain and / or
19. The method for manufacturing an optical waveguide according to claim 18, wherein a polymer having a radical or ion-reactive group in a side chain is used. 22. The photoconductor according to claim 21, wherein the radical or on-reactive group is at least one functional group selected from an epoxy group, an oxetane group, a cyanate ester group and a maleimide group. Waveguide manufacturing method. 23. The method of manufacturing an optical waveguide according to claim 12, wherein the polymer material is continuously moved with respect to a focal point of the laser light. 24. The method of manufacturing an optical waveguide according to claim 12, wherein the focal point of the laser light is continuously moved inside the polymer material .