JP2003130524A - Circulating flow monitor of liquid cooling system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a further inexpensive and small installation space circulating flow monitor of a liquid cooling system capable of detecting reduction in a circulating flow rate of a refrigerant flowing in individual passages circulating by branching off into a plurality. SOLUTION: This circulating flow monitor of the liquid cooling system individually cools a prescribed plurality n of cooling objects by a circulating flow of the liquid refrigerant, and has a first temperature detecting means for detecting an IN side temperature of the circulating flow of the refrigerant for cooling the cooling objects, and has a second temperature detecting means for detecting an OUT side temperature of the circulating flow of the refrigerant for cooling the cooling objects, and has a cooling monitoring means for outputting a prescribed warning when a temperature difference Tx becomes a prescribed warning threshold value or more by determining the temperature difference Tx between the IN side and the OUT side of the circulating flow for cooling the cooling objects in time series on the basis of the first temperature detecting means and the second temperature detecting means.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a circulating flow monitoring device for a liquid cooling device which circulates a liquid cooling medium (refrigerant) to cool an electronic device to be cooled. In particular, the present invention relates to a circulation flow monitoring device of a liquid cooling device capable of detecting a decrease in the circulation flow rate of a refrigerant flowing through each of the flow paths branched and circulated.

[0002]

2. Description of the Related Art In today's electronic devices, circuit integration can be increased and miniaturization can be increased due to advances in miniaturization technology. Particularly in large semiconductor test equipment, the amount of heat generated per unit area is increasing year by year due to high-density and large-scale integration of circuits. In order to deal with this, cooling by the forced air cooling method with a cooling fan is insufficient in capacity. Therefore, as the cooling device, a liquid cooling device using a liquid as a refrigerant and having a high cooling capacity is applied. As the refrigerant, water cooling or a Fluorinert refrigerant having electrical insulation is used.

However, the flow rate of the refrigerant decreases due to clogging or the like in the piping path through which the refrigerant flows. If the flow rate is below the allowable flow rate, the heat generation limit of the device is exceeded, which may lead to unstable operation, defective operation, and deterioration of the circuit.

FIG. 1 is a conceptual block diagram of a cooling system for cooling a semiconductor testing device. Semiconductor test equipment is mainframe M
F and test head TH, mainframe MF
The refrigerant supply unit 10 is provided on the side to connect a refrigerant pipe,
The object to be cooled is being cooled. Here, a specific example of the electronic device to be cooled will be described below on the assumption that a large number of boards that consume high power are used.

FIG. 2 (a) is a conceptual block diagram for individually cooling a large number of boards with a cooling medium. In this configuration example, the coolant supply unit 10, several tens of boards B1 to Bn on the main frame MF side, and several tens of pin electronics boards PB1 to PBm on the test head TH side are provided. The coolant supply unit 10 is a device that circulates a coolant having a predetermined pressure at a predetermined temperature, and includes a coolant storage tank, a filter, a pressurizing pump, and the like, which are not shown. The circulation hose connected to the refrigerant supply unit 10 is connected to the outgoing hoses H1 and H3 at the sending end, and is connected to the incoming hoses H2 and H4 collected from the boards at the receiving end. Therefore, the refrigerant flows through each board individually. The semiconductor test equipment includes a large number of boards, and the total power consumption reaches 10 KW or more. For this reason, a cooling configuration is adopted in which a large number of pipes are branched into, for example, 50 paths to cool the board unit (or unit unit).

Further, as shown in FIGS. 2 (b) and 2 (c), for example, each of the branched paths is provided with 50 clogging detecting means for detecting the presence / absence of clogging or the like. It monitors that the flow rate of refrigerant is low, that there is no circulation failure, and that there is no circulation abnormality. The power consumption of the board differs from several tens of watts to several hundreds of watts depending on the type of the board. Furthermore, there are some that show a fluctuation of ± several tens of percent depending on the operating conditions of the system, and conversely that that always show constant power consumption.
Therefore, a predetermined refrigerant flow rate is made to flow depending on the difference in power consumption and the presence or absence of power fluctuation.

The first method of the clogging detection means is shown in FIG.
As shown in (b), there is an example in which a flow rate detector FS1 is provided in the pipeline. However, this flow rate detector FS1 has a drawback that it is relatively expensive. Further, a space for installing the flow rate detector FS1 and a piping member are required. There is also a drawback that the flow rate detector itself needs to be regularly maintained. For this reason, the cost of the device as a whole becomes high, the device tends to be large, and the maintenance workability such as board replacement is deteriorated.

A second method of clogging detection means is shown in FIG.
As shown in (c), the pressure difference sensor PS1 is provided to detect the pressure difference, but the pressure difference sensor PS1 is relatively expensive. That is, since the cooling pipe length is different and the cooling flow rate is different for each board, the pressure difference between the both ends of the IN side and OUT side pipes through which the cooling medium to be cooled flows is detected by the differential pressure sensor PS1. It is necessary to have a piping member that draws the refrigerant pressure at both ends to a pressure detector with a thin tube. Furthermore, a tube disposition area is required, and there is a risk of leakage from the tube. For this reason, there is a drawback that the entire device tends to be large and the cost is high.
Furthermore, maintenance workability such as board replacement is also deteriorated.

[0009]

As described above, in the circulating flow monitoring device of the liquid cooling device of the prior art, the clogging detecting means applied to the liquid cooling device which is required to be used in large numbers is relatively expensive. There is a drawback. In addition, there are drawbacks such as regular maintenance and the need to draw around a tube for guiding the refrigerant pressure. In this respect, it is not preferable and there is a practical difficulty. Therefore, the problem to be solved by the present invention is to monitor the circulation flow of a liquid cooling device that can detect a decrease in the circulation flow rate of a refrigerant that flows through individual flow paths that are cheaper and have a smaller installation space and that circulate in a plurality of branches. It is to provide a device.

[0010]

A first solution will be described.
In order to solve the above problems, in a circulation flow monitoring device of a liquid cooling device that individually cools a predetermined plurality of cooling targets by a circulation flow of a liquid coolant, an IN side (input side) of a circulation flow of a coolant that cools a cooling target. ) Is provided with a first temperature detecting means (for example, a first temperature sensor TS1), and a second temperature detecting means (for detecting the temperature on the OUT side (output side) of the circulating flow of the refrigerant for cooling the cooling object ( For example, the second temperature sensor TS
2), the temperature difference Tx between the IN side and the OUT side of the circulation flow for cooling the cooling object is obtained in time series based on the first temperature detecting means and the second temperature detecting means, and When the temperature difference Tx exceeds a predetermined alarm threshold value 84,
A circulating flow monitoring device for a liquid cooling device, comprising: a cooling monitoring means for outputting a predetermined alarm; and the above. According to the above-mentioned invention, it is possible to realize a circulating flow monitoring device of a liquid cooling device which is cheaper and has a small installation space and which can detect a decrease in the circulating flow rate of the refrigerant flowing in each of the plurality of branched and circulated circulation channels.

Next, the second solving means will be shown. The third here
The figure shows the solution according to the invention. One mode of the above-mentioned cooling monitoring means is a first AD conversion unit ADC1 and a second AD converter.
A predetermined number n of conversion units ADC2 and temperature difference calculation processing units 20 are provided.
Corresponding to the cooling target of the above, the temperature difference calculation processing unit 2
And a cooling monitoring unit 80 that generates a predetermined alarm signal in response to a temperature difference signal from zero.

Next, a third solving means will be shown. The fifth here
The figure shows the solution according to the invention. One mode of the cooling monitoring means includes a first multiplexer 31 which receives and sequentially selects and outputs a predetermined number n or a predetermined number of temperature signals from the first temperature detecting means, and a predetermined number n of second temperatures. A second multiplexer 32 is provided which receives the temperature signals from the detecting means and sequentially selects and outputs the temperature signals. The second multiplexer 32 includes a second multiplexer 32 for quantizing and converting the temperature signals sequentially selected. The temperature difference Tx between the corresponding IN side and OUT side of the circulation flow for cooling the cooling target based on the quantization conversion means is provided, which is provided with the conversion conversion means (for example, the first AD conversion portion ADC1 and the second AD conversion portion ADC2). The cooling monitoring unit 80 is provided with the temperature difference calculation processing unit 20 that obtains and sequentially outputs it in time series, and performs a predetermined alarm output based on the continuous temperature difference Tx received in time series. Provided, with the above, it is circulation flow monitoring device above the liquid cooling system according to claim.

Next, a fourth solving means will be shown. In order to solve the above-mentioned problem, in a circulation flow monitoring device of a liquid cooling device that individually cools a predetermined plurality of cooling targets by a circulation flow of a liquid coolant, the temperature on the IN side of the circulation flow of the coolant that cools the cooling target is A second temperature detecting unit (for example, a second temperature sensor TS2) that includes a first temperature detecting unit (for example, a first temperature sensor TS1) for detecting and that detects a temperature on the OUT side of the circulation flow of the refrigerant that cools the cooling target. A temperature difference calculation process for obtaining a temperature difference Tx between the IN side and the OUT side of the circulating flow for cooling the cooling target based on the first temperature detecting means and the second temperature detecting means and sequentially outputting the temperature difference Tx in time series. In order to detect a decrease in the flow rate from the initial cooling flow rate for the cooling target by the corresponding increase change in the temperature difference Tx, the unit 20 is provided with a unit 20 and corresponds to an individual cooling target or a cooling target for each predetermined unit. Shi An alarm threshold value 84 is provided that has a predetermined temperature difference to be alarmed as an alarm threshold value, and the continuous temperature difference Tx received in time series becomes the alarm threshold value 84 or more over a predetermined period. At this time, there is a circulating flow monitoring device for a liquid cooling device, which is equipped with a cooling monitoring unit 80 that outputs a predetermined alarm, and is equipped with the above.

Next, a fifth solving means will be shown. The third here
The figure shows the solution according to the invention. As one mode of the above-mentioned first temperature detecting means, there is a circulation flow monitoring device of the above-mentioned liquid cooling device, characterized in that a predetermined plurality n are provided corresponding to a predetermined plurality n of cooling objects.

Next, the sixth solving means will be described. As one mode of the first temperature detecting means, at least one cooling object is provided for a predetermined plurality n of cooling objects, and the number of the first temperature detecting means provided is reduced, and the liquid cooling device is characterized. There is a circulating flow monitoring device.

Next, a seventh solving means will be shown. As one mode of the above-mentioned first temperature detecting means, the number of the first temperature detecting means is reduced by providing one for each of the predetermined plurality of cooling objects with respect to the predetermined plurality of cooling objects. There is a circulating flow monitoring device for the above liquid cooling device.

Next, an eighth solution means will be shown. The first temperature detecting means or the second temperature detecting means is arranged inside the refrigerant pipe of the circulating flow to be cooled to directly detect the refrigerant temperature, and the circulating flow of the liquid cooling device described above. There is a monitoring device.

Next, a ninth solving means will be shown. The first temperature detecting means or the second temperature detecting means is arranged outside the refrigerant pipe of the circulating flow to be cooled to indirectly detect the refrigerant temperature, and the circulating flow of the liquid cooling device. There is a monitoring device.

Next, a tenth solving means will be described. First mentioned above
There is a circulating flow monitoring device of the above-mentioned liquid cooling device, characterized in that a thermocouple, a thermistor, a posistor or a semiconductor thermosensitive element is applied as the thermosensitive element applied to the temperature detecting means or the second temperature detecting means.

Next, the eleventh solving means will be shown. Here, FIG. 6 shows a solving means according to the present invention. First mentioned above
The above-mentioned liquid, wherein the temperature detecting means or the second temperature detecting means is an optical fiber sensor coil in which an optical fiber is wound in a coil shape to a predetermined length for detecting the temperature of the refrigerant of the circulating flow to be cooled. There is a circulating flow monitoring device for the cooling device.

Next, a twelfth solving means will be shown. As one mode of the above-mentioned alarm threshold value 84, it is provided individually for each of a predetermined plurality n of cooling targets, or is provided for each predetermined plurality of units of cooling targets exhibiting the same temperature rise characteristics, There is a circulating flow monitoring device.

Next, a thirteenth solving means will be shown. The predetermined alarm output generated by the cooling monitoring unit 80 notifies the system of a notification of information indicating the cooling target and an alarm signal 80s for performing the alarm notification, and the circulating flow of the liquid cooling device. There is a monitoring device.

Next, a fourteenth solving means will be shown. There is a circulating flow monitoring device of the liquid cooling device, wherein the predetermined alarm output generated by the cooling monitoring unit 80 is a system power supply cutoff signal 85s for cutting off the main power supply of the system.

Next, a fifteenth solving means will be shown. There is a circulating flow monitoring device of the above-mentioned liquid cooling device, characterized in that a predetermined plurality of the above-mentioned optical fiber sensor coils are connected in series to one optical fiber.

Next, a sixteenth solving means will be shown. Here, FIG. 6 shows a solving means according to the present invention. The first temperature detecting means and the second temperature detecting means to which the optical fiber sensor coil is applied are connected in series to form one optical fiber, and a predetermined laser beam is incident on the optical fiber, An optical transceiver 502 that specifies the temperature of each optical fiber sensor coil arranged at a known fiber length position based on the intensity of backscattered light from each distance point of the fiber changing with temperature, There is a circulating flow monitoring device for the liquid cooling device described above.

If desired, the means of the present invention may be appropriately combined with the respective means of the above-mentioned solving means to form other practical means. Further, although the reference numerals given to the above respective elements correspond to the reference numerals shown in the embodiments of the present invention and the like, the present invention is not limited to this, and constituent means to which other practical equivalents are applied. Also good.

[0027]

BEST MODE FOR CARRYING OUT THE INVENTION An example of an embodiment to which the present invention is applied will be described below with reference to the drawings. Further, the scope of the claims is not limited by the description content of the following embodiments, and the elements and connection relationships described in the embodiments are not necessarily essential to the solving means.
Furthermore, the forms / forms of the elements and connection relationships described in the embodiments are examples, and the form / form contents are not limited to these.

FIG. 3 shows temperature difference detecting means 101 to 10n corresponding to a large number of n boards B1 to Bn, and a cooling monitor 80.
It is a structural example provided with. One temperature difference detecting means 101
Is the heat absorbing portion 1 of the board B1 based on a predetermined cooling flow rate.
The temperature difference data 10
It is supplied to the cooling monitoring unit 80 as 1D. This component includes a first temperature sensor TS1 and a second temperature sensor TS2.
And a first AD converter ADC1 and a second AD converter ADC
2 and a temperature difference calculation processing unit 20.

In the arrangement of both temperature sensors, the tip portion of the temperature sensor is inserted and sealed in the refrigerant so that the temperature of the flowing refrigerant can be directly measured when it is desired to detect a sharp temperature change. The first temperature sensor TS1 is a sensor that detects the temperature on the IN side through which the refrigerant flows. The temperature detecting element is a small sensor such as a thermocouple or a thermistor. According to this, since the temperature sensor having no movable portion practically does not require maintenance and inspection, there is an advantage that it is maintenance-free. Further, since the temperature sensor is a minute temperature sensitive element, there is an advantage that it requires almost no installation space.

The second temperature sensor TS2 is O
This is a sensor that detects the temperature on the UT side, and is the same as the first temperature sensor TS1 and the arrangement conditions.

The first AD converter ADC1 quantizes and converts a minute temperature signal into digital data, and the first temperature sensor signal TS from the first temperature sensor TS1.
After receiving 1s and amplifying to a predetermined level if necessary,
The first temperature data D1 converted by the AD converter is output. The sampling cycle to be measured is, for example, every 10 seconds.

The second AD converter ADC2 has the above-mentioned first AD.
It is the same as the conversion unit ADC1 and outputs the second temperature data D2 which has been AD-converted.

The temperature difference calculation processing section 20 supplies the temperature difference data 101D, which is the result of the calculation processing of the second temperature data D2-the first temperature data D1, to the cooling monitoring section 80.
The temperature difference data 101D corresponds to the temperature difference of the refrigerant at both ends of the board B1.

The cooling monitoring unit 80 monitors whether or not there is an abnormality in the circulation system such as a decrease in cooling flow rate or clogging, gives an alarm notification based on a predetermined alarm condition, and shuts off the system power for further board protection. To do. Internal storage memory 8
2 and a threshold value 84. The storage memory 82 is
The memory is capable of holding the input temperature difference data 101D to 10nD for a predetermined period, for example, about 1 hour. A memory capacity capable of storing the temperature difference history of several days or more may be provided.

As shown in FIG. 4, the threshold value 84 includes an alarm threshold value 98 and a system power supply cutoff threshold value 99. The alarm threshold value 98 gives an alarm notification of a temperature abnormality, and the system power supply cutoff threshold value 99 cuts off the system power supply in order to protect the board before the overheated state is reached. Here, there are those that show a fluctuation of ± several tens% depending on the operating conditions of the system, and conversely, that that always show constant power consumption.
Therefore, in order to deal with the difference in power consumption and the presence or absence of power fluctuation, the threshold value 84 is provided for each temperature difference detecting means, or for each commonly applicable temperature difference detecting means. As an example of the alarm threshold value 98, firstly, in the case of a board that always shows constant power consumption, the temperature difference T1 obtained by adding +10 to 20% to the measured temperature difference Tx is set as the set value. . Secondly, in the case of a board which varies depending on the operating conditions of the system, the temperature difference T2 obtained by adding +20 to 30% to the temperature difference measured at the maximum power is set as the set value. The alarm threshold value 98 may be set to a closer threshold value based on the maximum temperature difference of the temperature differences Tx measured and collected over time so that an early warning can be performed. .

Next, the cooling monitoring unit 80 will be described with reference to the transition example of the temperature difference and the diagram for explaining the alarm output by the threshold value in FIG.
The operation of will be described. The cooling monitoring unit 80 firstly receives the temperature difference data 1 from the n number of temperature difference detecting means 101 to 10n.
Upon receiving 01D to 10nD, they are sequentially stored in the storage memory 82. FIG. 4A shows the transition of the temperature difference Tx in the normal state. When a clogging or the like occurs in any of the boards due to long-term operation or the like, the temperature difference Tx rises and becomes as shown in FIG. 4B. When the alarm threshold value 98 is reached, if a temperature difference Tx exists in the alarm threshold value 98 for a predetermined monitoring time, for example, 30 seconds, in order to prevent an unnecessary malfunction, an alarm signal is sent together with the notification of the board information. Notify the system of 80s.

Further, as shown in FIGS. 4C and 4D, when a sudden clogging or the like occurs, the temperature difference Tx sharply rises. First, if the alarm threshold value 98 is present for a predetermined monitoring time, an alarm signal 80s is notified to the system together with the board information. Further, the system power supply cutoff threshold 99
When it reaches, the system power cutoff signal 85s is output together with the notification of the board information. As a result, it is possible to prevent the main power supply of the system from being cut off and the deterioration or damage of the board to be prevented.

According to the above-mentioned configuration of the invention, the temperature difference between the boards is detected by detecting the temperature on the IN side and the temperature on the OUT side for each board to be cooled, and the temperature difference thus determined is defined in advance. Based on the temperature difference threshold value 84, it can be equivalently detected that the refrigerant flow rate has dropped below the predetermined allowable flow rate. Therefore, particularly in a case where a large number of objects to be cooled are provided, there is an advantage that a cheaper circulating flow monitoring device for a liquid cooling device can be realized. Further, since the temperature sensor is a minute temperature sensitive element, there is an advantage that the installation space is small.
Further, since the temperature sensor having no movable part does not require maintenance and inspection in practice, there is an advantage that it is maintenance-free.

The technical idea of the present invention is not limited to the specific configuration examples and connection mode examples of the above-described embodiment. Furthermore, based on the technical idea of the present invention, the above-described embodiments may be appropriately modified and widely applied. For example, in the above-mentioned embodiment, the temperature difference detecting means 101 to 10 for each board.
In n, the first AD conversion unit ADC1, the second AD conversion unit ADC2, and the temperature difference calculation processing unit 20 are shown as a specific example including n systems individually, but as shown in the quantization unit 30 shown in FIG. , 32 to receive the temperature sensor signals TS1s and TS2s from each board, switch the selection sequentially and supply the temperature sensor signal to the subsequent stage, and thus the first AD converter ADC1 and It can be configured by the 2AD conversion unit ADC2 and the temperature difference calculation processing unit 20b. In this configuration example, since the temperature sensor signals TS1s and TS2s from each board are sequentially quantized and converted, the total quantization conversion cycle time is several hundred milliseconds to several seconds, but this is a practical problem. Can be applied without. In this configuration example, there is an advantage that the cost can be further reduced. The first AD conversion unit ADC1 and the second AD conversion unit ADC1 in FIG.
The AD conversion unit ADC2 may be configured to be realized by one first AD conversion unit ADC1 by further including a 2-input 1-output type multiplexer on the input side.

Further, in the above-described embodiment, a specific configuration example in which the temperature sensor is provided on each of the IN side and the OUT side of the board is shown, but the temperature of the refrigerant flowing through the IN side pipe is determined by the refrigerant supply unit 10.
As a result, the temperature of the refrigerant on the IN side between the boards can be regarded as a substantially constant temperature. In this case, the number of IN-side temperature sensors can be reduced by providing one first temperature sensor TS1 for each IN-side pipe at each desired plurality. In this case,
Further, there is an advantage that the cost can be reduced.

Further, in the above-mentioned embodiment, the temperature sensor is arranged as a housing structure in which the tip portion of the sensor is inserted into the refrigerant so that the temperature of the refrigerant can be directly measured.
If it is not necessary to detect a sharp temperature change of the refrigerant,
It may be arranged so as to detect the temperature of the refrigerant from the outside of the piping member.

In the above embodiment, the cooling monitor 80 compares the temperature data 20D with the system power cutoff threshold value 99 to generate the system power cutoff signal 85s. As shown by the line, the slope of change of the average temperature difference data is obtained each time by the integration process, and the system power-off signal 85s is generated even when it is detected that the slope becomes equal to or larger than a predetermined slope. May be added to. In this case, since the sign of the abnormal temperature can be detected, the system power supply can be shut off at an earlier stage, and there is an advantage that the deterioration or damage of the board can be prevented at an early stage.

Further, in the above embodiment, in order to prevent unnecessary malfunction, it is monitored whether the temperature difference Tx exists in the alarm threshold 98 for a predetermined monitoring time, for example, 30 seconds.
In addition to this, a function to notify the system immediately as a new mild alarm signal when the alarm threshold 98 is reached may be added.

Further, in the above-described embodiment, a specific configuration example in which the temperature sensors are individually installed has been shown. Instead, however, as shown in FIG. 6, one optical fiber 500 (F) for temperature detection is used.
There is another configuration example in which the TR: Fiber Optic Temperature Laser Radar) and the optical transceiver 502 are applied. In this case, the first sensor coil SC1 wound in a coil shape to have a length of 1 m on the IN side pipe, and 1 m on the OUT side pipe.
Second sensor coil SC wound in a coil shape to have a long length
2 is provided. In addition, a heat insulating member that insulates the outside world is covered over the sensor coil. In addition, each sensor coil is connected so as to be connected in series, and has a known length,
For example, the connection is 2 m or the like. It should be noted that detachable optical connectors may be provided at a plurality of locations along the fiber. If desired, the sensor coil wound in a coil may be fixedly housed in the refrigerant so as to directly measure the refrigerant temperature. As a result, for example, one fiber is applied, and two fibers on the IN side and the OUT side formed in a predetermined coil shape on this fiber × 50 boards in total are 300 m in total.
And Inject a predetermined laser light into this fiber,
By utilizing the fact that the intensity of the backscattered light from each distance point changes with temperature, the temperature at each temperature detection point existing at the known fiber length position can be specified based on this. The accuracy of temperature detection can be measured with a measurement accuracy of, for example, about 0.1 ° C. It can be carried out in the same manner as described above by processing the temperature data in the same manner as the temperature difference calculation processing section 20 based on the temperature data at each of these points. In this configuration example, the more points the temperature measurement has, the lower the cost. Therefore, it is advantageous in a semiconductor tester or the like that requires the temperature sensors to be installed in a large number of places, and the installation space can be minimized and maintenance-free can be obtained.

[0045]

The present invention has the following effects based on the above description. As described above, according to the present invention, the temperature of the cooling target on the IN side is detected, and the OUT
By detecting the temperature on the side and obtaining the temperature difference of the cooling target, and comparing this with the threshold value of the predetermined temperature difference, it is possible to equivalently detect that the refrigerant flow rate has dropped below a predetermined value, and output an alarm. As a result, especially in the case of a large number of objects to be cooled,
The advantage is that a cheaper circulating flow monitoring device for a liquid cooling device can be realized. Moreover, since the temperature sensor is a minute temperature sensitive element, there is an advantage that the installation space is small.
In addition, the temperature sensor having no movable portion has an advantage that maintenance and inspection is practically unnecessary. Therefore, the technical effect of the present invention is great, and the economic effect in industry is also great.

[Brief description of drawings]

FIG. 1 is a conceptual configuration diagram of a cooling system that cools a semiconductor test apparatus.

FIG. 2 is a conceptual configuration diagram in which a large number of boards are cooled by individual refrigerant flows, and an example of conventional clogging detection means.

FIG. 3 is a configuration example of a main part of a circulating flow monitoring device of a liquid cooling device according to the present invention, in which a large number of n boards as cooling targets are individually provided with temperature difference detecting means.

FIG. 4 is a diagram illustrating an example of transition of a temperature difference of one channel and an alarm output by a threshold value in the configuration of FIG.

FIG. 5 is another example of the configuration of the main part of the circulating-flow monitoring device for a liquid cooling device according to the present invention.

FIG. 6 is another configuration example of a main part of a circulating flow monitoring device of a liquid cooling device to which an optical fiber for temperature detection is applied according to the present invention.

[Explanation of symbols]

ADC1 First AD converter B1 to Bn Board FS1 Flow rate detectors H1 and H3 Forward hose PB1 to PBm Pin electronics board PS1 Differential pressure sensor SC1 First sensor coil TS1 First temperature sensor ADC2 Second AD converter H2 and H4 Return hose SC2 2nd sensor coil TS2 2nd temperature sensor 10 Refrigerant supply part 101-10n Temperature difference detection means 12 Heat absorption part 20,20b Temperature difference calculation processing part 30 Quantization part 31,32 Multiplexer 80 Cooling monitoring part 82 Storage memory 500 Optical fiber ( Fiber Optic Temperature Lase
r Radar) 502 Optical transceiver MF Mainframe TH test head

Claims (6)

[Claims] 1. A circulating flow monitoring device of a liquid cooling device for individually cooling a predetermined plurality of cooling objects with a circulating flow of a liquid refrigerant, the temperature of an IN side (input side) of the circulating flow of a refrigerant for cooling a cooling object. Temperature detecting means for detecting the temperature, and the OUT side (output side) of the circulating flow of the refrigerant for cooling the cooling target.
The temperature difference Tx between the IN side and the OUT side of the circulating flow for cooling the cooling target based on the first temperature detecting means and the second temperature detecting means. A circulating flow monitoring device for a liquid cooling device, comprising: a cooling monitoring unit which is obtained in a time series and outputs a predetermined alarm when the temperature difference Tx exceeds a predetermined alarm threshold. 2. The cooling monitoring means includes a first AD conversion unit, a second AD conversion unit, and a temperature difference calculation processing unit corresponding to a predetermined number n of cooling targets, and the temperature difference calculation processing unit outputs the temperature difference. The circulating flow monitoring device of the liquid cooling device according to claim 1, further comprising a cooling monitoring unit that receives a signal and generates a predetermined alarm signal. 3. The cooling monitoring means receives a temperature signal from a predetermined number n or a predetermined number of first temperature detection means and sequentially selects and outputs the temperature signal, and a predetermined number n of second temperature detection means. A second multiplexer for receiving a temperature signal from the means and sequentially selecting and outputting the temperature signal; a quantizing conversion means for quantizing and converting the temperature signal sequentially selected by the first multiplexer and the second multiplexer; A temperature difference calculation processing unit that obtains a temperature difference Tx between the corresponding IN side and OUT side of the circulating flow that cools the cooling target based on the quantization conversion unit and sequentially outputs the temperature difference Tx in time series, and a continuous temperature difference calculation processing unit that receives in time series. The circulating flow monitor of the liquid cooling device according to claim 1, further comprising: a cooling monitor that outputs a predetermined alarm based on the temperature difference Tx. 4. A circulating flow monitoring device of a liquid cooling device for individually cooling a predetermined plurality of cooling objects by a circulating flow of a liquid refrigerant, wherein a temperature on the IN side of the circulating flow of the refrigerant for cooling the cooling object is detected. 1 temperature detection means, 2nd temperature detection means for detecting the temperature on the OUT side of the circulating flow of the refrigerant for cooling the cooling target, and cooling target based on the 1st temperature detection means and the 2nd temperature detection means A temperature difference calculation processing unit that obtains a temperature difference Tx between the IN side and the OUT side of the circulating flow to be cooled and sequentially outputs the temperature difference in a time series, and a flow rate decrease from an initial cooling flow rate for a cooling target, which corresponds to the temperature difference Tx. In order to detect and warn by rising change, an alarm threshold that has a predetermined temperature difference to be alarmed as an alarm threshold corresponding to each cooling target or cooling target for each predetermined unit, and a time series Continuous temperature When Tx is equal to or greater than said alarm threshold for a predetermined period of time, circulation flow monitoring system for a liquid cooling system, characterized by comprising a cooling monitoring unit that performs a predetermined alarm output. 5. The liquid cooling device according to claim 1, 3 or 4, wherein a thermocouple or a thermistor is applied to the heat sensitive element applied to the first temperature detecting means or the second temperature detecting means. Circulating flow monitoring device. 6. The first temperature detecting means or the second temperature detecting means is an optical fiber sensor coil having a shape in which an optical fiber is wound in a coil shape to a predetermined length for detecting the temperature of a refrigerant of a circulating flow to be cooled. The claim 1 or 3 characterized by the above.
Alternatively, the circulating flow monitoring device of the liquid cooling device according to item 4.