JP2003127325A - Method and device for filling intaglio with ink - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ink filling method which allows a recess of a surface of an intaglio to be surely filled with ink, when a protrusion with a high aspect ratio is formed on a surface of an object to which the ink is to be transferred, through the use of the highly viscous paste-like ink, in accordance with an intaglio printing method. SOLUTION: In the surface of the intaglio 1, a prescribed planar pattern is formed of the many minute recesses 1c. In a surface of a mask 3, holes 3a are formed in the same planar pattern as that of the surface of the intaglio 1. First, the holes 3a of the mask 3 are filled with a glass paste 5, which is cured to some degree. Next, the mask 3 is held while facing the surface of the intaglio 1, and the periphery of the intaglio 1 and the mask 3 is evacuated in a state in which the mask 3 is held. After that, the mask 3 is brought into intimate contact with the intaglio 1, and a vacuum is released in a state of the intimate contact of the mask 3 with the intaglio 1. Thus, the glass paste 5 is pushed into the recesses 1c of the surface of the intaglio 1 by atmospheric pressure. Finally, the mask 3 is drawn away from the intaglio 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for depositing paste-like ink on the surface of an intaglio plate, and in particular, the recesses forming the print pattern are deep,
Moreover, the present invention relates to an ink deposition method and apparatus suitable when a paste-like ink having a high viscosity is used.

[0002]

2. Description of the Related Art In manufacturing an electronic component or a component for a process device, etc., in which a predetermined plane pattern is formed by fine protrusions on the surface, a process applying an intaglio printing method is used. For example, a printing pattern is formed by minute recesses on the surface of a flexible sheet-shaped plate,
A paste-like ink (eg, glass paste) is placed in the recess, and after the ink is cured to some extent, the sheet-like plate is pressed against the transfer target to transfer the ink, thereby transferring the transfer target. It is possible to form a plane pattern with fine protrusions on the surface of an object.

[0003] Among such fine projections have an aspect ratio (height / diameter or width) is also large, B ² i
In a cone-shaped projection called a bump for t (Buried Bump Interconnecton Technogy) printed wiring board, for example, a large number of projections having a height of 160 μm are provided for a diameter of 100 μm.

(Problems of the Prior Art) When forming protrusions having a high aspect ratio based on the intaglio printing method, if the viscosity of the paste-like ink is 20 [Pa · S] or less,
The ink can be filled into the recess using a simple roll coater or nozzle coater.

However, the viscosity of the ink is 30 to 70 [Pa
When it becomes as high as [S], it becomes gradually difficult to send the ink to the inner part of the recess. As a result, the inlet portion of the recess is blocked by the ink, and air remains behind in the recess, degrading the shape accuracy of the protrusion. In particular, when the aspect ratio is high and the viscosity of the ink is high, a defective portion may appear on the tip side of the protrusion. Furthermore, in the case where ink is partially filled in the recesses, the recesses themselves are deformed by the pressure acting around the recesses, so that the positional accuracy of the formed protrusions is also impaired.

[0006]

SUMMARY OF THE INVENTION The present invention has been made in view of the problems of the flat pattern forming method to which the above-described conventional intaglio printing method is applied, and an object of the present invention is to provide an intaglio printing method. Based on the method, when forming a projection with a high aspect ratio on the surface of the transferred material by using a paste-like ink with high viscosity, it is possible to reliably fill the ink in the recess formed on the surface of the intaglio plate. An object of the present invention is to provide an ink deposition method and a device therefor.

[0007]

A method of applying ink to an intaglio plate according to the present invention is a method of applying a paste-like ink to the surface of an intaglio plate, which has the same plane pattern as the recesses formed on the surface of the intaglio plate. A mask plate in which holes are formed is prepared in advance, the ink is filled in the holes of the mask plate, the mask plate is held so as to face the surface of the intaglio plate, and in this state, the mask plate and the intaglio plate are held. Of the ink is moved to the hole by vacuuming the periphery of the plate to bring the mask plate into close contact with the intaglio plate, and releasing the vacuum in this state, and then separating the mask plate from the intaglio plate. And

The ink deposition method of the present invention will be further described. First, after the paste-like ink is filled in the holes of the mask plate, a part of the solvent in the ink is evaporated to be cured to some extent. Next, the mask plate is held facing the surface of the intaglio plate, and in this state, the mask plate and the periphery of the intaglio plate are evacuated. Next, the mask plate is brought into close contact with the intaglio plate, and the vacuum is released in this state. As a result, the ink is pushed into the concave portion of the intaglio by the pressure of the atmosphere. Finally, the mask plate is separated from the intaglio plate to complete the ink deposition on the intaglio plate.

According to the ink placing method of the present invention, the inside of the recess of the intaglio plate is evacuated and then filled with the ink, so that the ink easily enters the recess.
Cavities are less likely to form in the recesses. Therefore, by transferring the ink thus filled in the concave portion to another surface, a protrusion having a high aspect ratio can be formed with high shape accuracy and positional accuracy.

Preferably, the intaglio plate is composed of a base sheet made of a thin metal plate and a surface layer portion made of an elastic material laminated on the surface of the base sheet, and a plane pattern of recesses is formed on the surface of the surface layer portion.

In addition, the device for depositing ink on an intaglio plate of the present invention used in the above method is a mask plate in which a support base for supporting the intaglio plate and holes for filling the paste ink are formed in a predetermined plane pattern. A mask plate supporting mechanism for supporting the surface of the intaglio plate so as to be movable in the vertical direction, a sealing means for accommodating the intaglio plate and the mask plate, and forming a hermetically sealed space around the intaglio plate, and It is characterized by comprising a vacuum evacuation device for evacuating the inside of the sealing means and a pressure device for bringing the mask plate into close contact with the intaglio plate.

Preferably, the device for depositing ink on an intaglio plate according to the present invention comprises a support for supporting the intaglio plate, a mask plate having holes for filling the paste ink formed in a predetermined plane pattern, and the surface of the intaglio plate. A mask plate support mechanism that supports the mask plate so as to be movable in the vertical direction, a movable table that is arranged above the mask plate so as to face the support table, and is movable in the vertical direction, and the movable table. A cylindrical side wall member that is attached to the lower surface of the base plate and is formed of a vertically expandable and contractible member, and that forms a closed space around the intaglio plate and the mask plate when its lower end is in close contact with the upper surface of the support base. A vacuum evacuation device for evacuating the inside of the closed space, and lowering the moving table to bring the lower end of the cylindrical side wall member into close contact with the upper surface of the support base, The mask plate and pushed down by lowering the movable table, characterized in that it is configured to close contact with the intaglio.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows the construction of an apparatus in which an ink deposition method according to the present invention is used. In the figure, 1 is an intaglio plate, 3 is a mask plate, 10 is a fixed table (support base),
Reference numeral 20 is a moving table (pressurizing device), 13 is a lifter (mask plate supporting mechanism), and 22 is a side wall member (sealing means).

The fixed table 10 is fixed on a base 19 via legs 18. The moving table 20 faces the fixed table 10 and is arranged above it.
The moving table 20 is connected to the fixed table 10 via a feed screw mechanism 25. The feed screw mechanism 25
In order to suppress the bending of both tables 10 and 20 during pressurization to a minimum, a total of 6 units are provided, 3 units on each side. The table 20 can be moved in the vertical direction by driving the feed screw mechanism 25.

As shown in FIG. 2, the intaglio 1 comprises a base sheet 1a made of a thin steel plate (for example, a thickness of 0.2 to 0.5 mm).
The surface layer portion 1b made of silicone rubber (for example, a thickness of about 0.5 to 1 mm) is laminated on the surface of the surface layer portion 1b. Are formed.

As shown in FIG. 1, the intaglio 1 is fixed on the suction plate 11 by vacuum suction with the base sheet 1a facing downward. The suction plate 11 has substantially the same planar shape as the intaglio plate 1 and is fixed to the upper surface of the fixed table 10. An air supply / exhaust hole 12 is formed inside the fixed table 10 so as to extend from the lower surface to the upper surface of the fixed table 10. The air supply / exhaust holes 12 are opened near the outer periphery of the suction plate 11 on the upper surface side of the fixed table 10. The upstream side of the air supply / exhaust hole 12 is connected to a vacuum pump (not shown) via a stop valve, a relief valve and the like.

A mask plate 3 is held above the intaglio plate 1 so as to face the surface of the intaglio plate 1. As shown in FIG. 3, the mask plate 3 is a flat plate made of stainless steel (for example, a thickness of about 30 to 200 μm), and its surface has the same plane pattern as the recesses 1 c formed on the surface of the intaglio plate 1. Thus, a large number of holes 3a are formed. The hole 3a is filled with glass paste (paste-like ink). Further, in order to enhance the peelability of the glass paste, the mask plate 3
A coating of dimethyl silicone rubber-based paint is applied to each of the above with a thickness of about 0.05 to 0.20 mm.

As shown in FIG. 1, the mask plate 3 is supported on the support frame 14 at its peripheral edge. The mask plate lifter 13 has a main body portion (pneumatic cylinder) attached to the lower side of the fixed table 10. The four rods 13a extending upward from the lifter 13 are fixed tables 1
0 is projected through the through hole provided in the fixed table 10 and is connected to the four corners of the support frame 14. By driving the lifter 13, the mask plate 3 is moved in the vertical direction, whereby the mask plate 3 can be brought into close contact with the intaglio plate 1 or separated from the surface of the intaglio plate 1. The support frame 14 is provided with a plurality of ventilation holes 15 penetrating the support frame 14 in the width direction and the longitudinal direction of the mask plate 3.

A suction plate 21 is fixed to the lower surface of the moving table 20. The suction plate 21 has substantially the same planar shape as the mask plate 3. A bellows-shaped and expandable / contractible side wall member 22 hangs from the vicinity of the outer periphery of the suction plate 21. A flange 23 is provided at the lower end of the side wall member 22. This flange 23
Corresponding to the above, the seal table 16 is provided on the upper surface of the fixed table 10.
Is fixed. When the feed screw mechanism 25 is driven and the moving table 20 is lowered, the flange 23 moves to the seal base 1.
Butt against 6 and stick to each other. As a result, around the intaglio 1 and the mask plate 3, the upper surface of the fixed table 10,
A closed space surrounded by the lower surface of the moving table 20 and the side wall member 22 is formed.

In this example, the plane dimension of the concave plate 1 is
It is 650 mm × 750 mm, and the general external dimensions of the device are width: 2 m, height: 2.5 m, depth: 2 m.

Next, a method of using the above apparatus will be described with reference to FIGS. 1 and 4 to 8.

First, the mask plate 3 is coated with a glass paste using a roll coater (not shown) (or a nozzle coater, screen printing), and the holes 3a are filled with the glass paste. The glass paste is heated to evaporate a part of the contained organic solvent and semi-cure it to the degree of green clay. As described above, the mask plate 3 is provided with the coating that enhances the peeling property, so that the semi-cured glass paste can easily escape from the hole 3a.

Next, as shown in FIG. 4, the intaglio 1 is fixed on the suction plate 11 by vacuum suction. After the mask plate 3 is aligned in the horizontal direction with respect to the intaglio plate 1, the mask plate 3 is fixed on the support frame 14. At this time, the distance (C) between the surface of the intaglio plate 1 and the mask plate 3 is, for example, 0.
It is about 5 mm.

Next, as shown in FIG. 5, the feed screw mechanism 2
5 (FIG. 1) is driven to lower the moving table 20, and the flange 23 at the lower end of the side wall member 22 is pressed against the upper surface of the seal base 16. Thereby, the intaglio plate 1 and the mask plate 3
A closed space is formed around the. Further, the back surface (upper surface) of the mask plate 3 is brought into close contact with the lower surface of the substrate suction plate 21. Next, the inside of the closed space is evacuated through the air supply / exhaust hole 12, and the inside pressure is reduced to, for example, about 300 Pa. Since the support frame 14 is provided with the ventilation holes 15, the gap between the intaglio 1 and the mask plate 3 can be exhausted in a short time.

Next, as shown in FIG. 6, the lifter 13 (FIG. 1) is driven to lower the mask plate 3, and in synchronization with this, the feed screw mechanism 25 (FIG. 1) is driven to move the moving table. 20 is further lowered, and the mask plate 3 is pressed from the back surface to be brought into close contact with the intaglio plate 1. In this state, the air supply / exhaust hole 12
The outside air is introduced into the closed space via. At this time, since the surface layer portion 1b of the intaglio 1 is made of an elastic body (silicone rubber in this example), the contact surface between the mask plate 3 and the intaglio 1 is kept airtight. Therefore, the atmospheric pressure acts from the back surface side (upper surface side) of the mask plate 3, and the glass paste is extruded from the hole 3 a of the mask plate 3 and moved into the recess 1 c of the intaglio plate 1. Since the inside of the recess 1c has been evacuated, bubbles are not caught and the recess 1c
Glass paste is filled in c.

Next, as shown in FIG. 7, the moving table 2
0 is raised to separate the mask plate 3 from the intaglio plate 1. As a result, as shown in FIG. 8, the concave portion 1c on the surface of the intaglio plate 1
The glass paste 5 is placed inside.

The takt time of the above glass paste placing step is, for example, about 70 seconds.

[0028]

According to the ink placing method of the present invention,
Since the ink is filled into the concave portion of the intaglio surface after vacuum exhaustion, the ink easily enters the concave portion,
Cavities are less likely to form in the recesses. Therefore, by transferring the ink thus filled in the concave portion to another surface, a protrusion having a high aspect ratio can be formed with high shape accuracy and positional accuracy.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of an apparatus in which an intaglio ink deposition method according to the present invention is used.

FIG. 2 is a diagram showing an outline of a sheet-shaped intaglio plate, (a) is a perspective view, and (b) is a sectional view.

FIG. 3 is a diagram showing an outline of a mask plate, (a) is a perspective view,
(B) is a sectional view.

FIG. 4 is a diagram illustrating a process of ink deposition according to the present invention.

FIG. 5 is a diagram illustrating a process of ink deposition according to the present invention.

FIG. 6 is a diagram illustrating a process of ink deposition according to the present invention.

FIG. 7 is a diagram illustrating a process of ink deposition according to the present invention.

FIG. 8 is a view showing a state where ink is filled in the concave portion on the surface of the intaglio plate.

[Explanation of symbols]

1 ... intaglio, 1a ... base sheet, 1b ... surface layer part, 1c ... recessed portion, 3 ... Mask version, 3a ... hole, 5 ... Glass paste (paste ink), 10: Fixed table (support), 11 ... Suction plate, 12 ... Air supply / exhaust holes, 13 ... Lifter (mask plate support mechanism), 14 ... Support frame, 15 ... Vents, 16 ... Seal stand, 18 ... legs, 19 ... base, 20 ... Moving table (pressurizing device), 21 ... Suction plate, 22 ... Side wall member (sealing means), 23 ... flange, 25 ... Feed screw mechanism.

Claims (4)

[Claims] 1. A method of depositing a paste-like ink on the surface of an intaglio plate, wherein a mask plate having holes formed in the same plane pattern as the recesses formed on the surface of the intaglio plate is prepared in advance. The holes of the plate are filled with the ink, the mask plate is held facing the surface of the intaglio plate, and in this state, the mask plate and the periphery of the intaglio plate are evacuated, and the mask plate is brought into close contact with the intaglio plate. In this state, the ink is moved into the hole by releasing the vacuum, and then the mask plate is separated from the intaglio plate. 2. The intaglio plate is composed of a base sheet made of a thin metal plate and an elastic surface layer portion laminated on the surface of the base sheet, and a flat pattern of concave portions is formed on the surface of the surface layer portion. The method for depositing ink on an intaglio according to claim 1, which is characterized in that. 3. A support base for supporting the intaglio plate, and a mask plate, in which holes filled with paste-like ink are formed in a predetermined plane pattern, are vertically movable in a state of facing the surface of the intaglio plate. A mask plate supporting mechanism that supports the intaglio plate and the mask plate, and a sealing unit that forms a sealed space around the intaglio plate and the mask plate, a vacuum exhaust device that evacuates the inside of the sealing unit, and the mask plate An intaglio ink deposition device, comprising: a pressurizing device that is brought into close contact with the intaglio plate. 4. A support base for supporting the intaglio plate and a mask plate having holes for filling the paste-like ink formed in a predetermined plane pattern can be moved vertically while facing the surface of the intaglio plate. A mask plate support mechanism that supports the mask plate, and is arranged above the mask plate so as to face the support table.
A movable table that is movable in the vertical direction, and a movable table that is attached to the lower surface of the movable table and that is vertically expandable and contractible. When the lower end of the movable table is in close contact with the upper surface of the support table, the intaglio and mask plates are A cylindrical side wall member that forms a closed space around it and a vacuum evacuation device that evacuates the inside of the closed space are provided, and the lower end of the cylindrical side wall member is lowered by lowering the moving table to the support base. The ink inking device for intaglio is characterized in that the mask plate is brought into close contact with the upper surface of the plate, and the moving table is lowered to bring the mask plate into close contact with the intaglio plate.