JP2003125589A - Oscillatory wave driver, and device using oscillatory wave driver as drive source - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make coarse the accuracy of aligninent of the conductive patterns of a flexible printed board with a plurality of electrodes on the topside of a stacked piezoelectric element, constituting the bar-shaped oscillator of an oscillatory wave motor. SOLUTION: A plurality of electrodes (1A1, 2, 1B1, 2, 1G, and 1S) consisting of through-holes made on the highest topside 1 of a piezoelectric element are arranged, with their distances from the center of the element different, and a plurality of conductive patterns (3G, 3A, 3B, and 3S) of the flexible printed board 3 are made in concentric circular form.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration wave driving device and a device using the same as a driving source.

[0002]

2. Description of the Related Art Generally, a vibration wave driving device has a vibrating body composed of an elastic body and a piezoelectric element as an electro-mechanical energy conversion element. By sandwiching and fixing a piezoelectric element between elastic bodies, the piezoelectric element spatially forms bending vibration having a phase difference of 90 °, and gives a phase difference to a two-phase alternating signal applied to the piezoelectric element. A circular or elliptical motion is formed in the driving part of the elastic body by combining the both bending vibrations.
And a contact body that is in pressure contact with the drive unit of the vibrating body,
The vibrating body is relatively moved by a frictional force.

As an electro-mechanical energy conversion element which constitutes such a vibrating body, a plurality of piezoelectric layers made of a piezoelectric material are laminated and an electrode layer is formed between the piezoelectric layers so that a high output can be obtained at a low voltage. As can be obtained, a plurality of external electrodes connected to an external electric circuit (driving circuit) are formed on only one surface.

By applying an AC voltage to such a plurality of external electrodes through a conductive member for electrical connection with the external electric circuit, a motion for driving is formed in the friction drive portion of the elastic body. The vibrating body and the contact body (moving body) that is frictionally driven by being pressed by the friction drive section of the vibrating body via the pressurizing means.
An oscillatory wave driving device such as an oscillatory wave motor having a configuration as disclosed in, for example, Japanese Patent Application Laid-Open No. 07-193291 has a conductive member for electrical connection with the external electric circuit and a plurality of external electrodes of the piezoelectric element. The electrodes are electrically connected.

FIG. 8 is an exploded perspective view of a rod-shaped vibrating body used in the vibration wave motor.

As shown in this figure, the external electrodes 108A1 and 108A2 for generating vibration in the x direction formed on the upper end surface of the laminated piezoelectric element 101 are conductive patterns of the flexible printed circuit board 102, which are conductive members. It contacts 121A1 and 121A2 and is conducted to 122A.

An external electrode 108 formed on the upper end surface of the laminated piezoelectric element 101 for generating y-direction vibration.
B1 and 108B2 are conductive patterns 121 of the flexible printed circuit board 102, respectively, which are conductive members.
It contacts B1 and 121B2 and is conducted to 122B.

Further, the external electrodes 108S formed on the upper end surface of the laminated piezoelectric element 101 for outputting a signal according to the vibration in the x direction are in contact with the conductive patterns 121S of the flexible printed circuit board 102 which are conductive members. It is conducted to 122S. In addition, the ground external electrode 101G formed on the upper end surface of the laminated piezoelectric element 101 is brought into contact with the conductive pattern 121G of the flexible printed circuit board 102, which is a conductive member, and is electrically connected to 122G.

The laminated piezoelectric element 101 and the flexible printed circuit board 102 are fixed together with the metal elastic body 103 by being sandwiched by a metal elastic body 104 having a screw formed in the inner diameter and a bolt 105 screwed to the metal elastic body 104.

The electrodes inside the laminated piezoelectric element are constructed as shown in FIG.
4-6 ... are ground electrodes, 104-3, 104-5, 1
04-7 ... are electrodes for applying two-phase AC voltage of A phase and B phase, and are electrically connected to the external electrode pattern 104-1 through through holes.

[0011]

However, in the above-mentioned conventional example, if the external electrode 108A1 of the piezoelectric element and the conductive pattern 121A1 of the flexible printed circuit board are positioned so as to substantially coincide with each other, the desired external electrode of the piezoelectric element can be provided with the desired electrical conductivity. Although signals can be applied, when the flexible printed circuit board is positioned differently by an angle of θ shown in FIG. 8 corresponding to the gap between the plurality of external electrodes of the piezoelectric element, the conductive pattern of the flexible printed circuit board is originally in contact. It becomes impossible to apply a desired electric signal to a desired external electrode of the piezoelectric element by coming into contact with another external electrode of the piezoelectric element which should not be performed.

As described above, in the conventional vibrating body of the vibration wave motor, there is a problem in that the circumferential accuracy of the alignment of the plurality of electrodes of the piezoelectric element and the conductive pattern of the flexible printed board cannot be roughened.

The object of the invention according to the present application is to make the alignment accuracy of the plurality of electrodes of the piezoelectric element and the conductive pattern of the flexible printed circuit board rough, to improve the efficiency of the assembly of the vibrating body in production, and to reduce the cost accordingly. An object of the present invention is to provide a vibration wave driving device that can be realized and a device that uses the vibration wave driving device as a driving source.

[0014]

In order to achieve the above object, the first invention of the present application is to connect a plurality of kinds of external electrodes formed on the same surface of an electro-mechanical energy conversion element to an external electric circuit. In the vibration wave drive device having a vibrating body that forms a motion for driving in the frictional drive part of the elastic body by applying an AC voltage via the conducting member for the electro-mechanical energy conversion element, The external electrodes of the seed are located at different distances from the center of the rotation axis according to the type of the external electrode, and the plurality of conductive patterns of the conductive member that are in contact with the plurality of external electrodes of the electro-mechanical energy conversion element are each rotated. It is characterized by having substantially concentric circular patterns or substantially concentric circular arc patterns having different distances from the axis center.

In order to achieve the above-mentioned object, the second invention of the present application provides a plurality of types of external electrodes formed on the same surface of the electro-mechanical energy conversion element for connecting with an external electric circuit. In a vibration wave driving device having a vibrating body that forms a motion for driving in a friction driving unit of an elastic body by applying an AC voltage via a conducting member, a plurality of external electrodes of the electromechanical energy conversion element. Has a portion formed in a substantially concentric circle shape or a substantially concentric arc shape having different distances from the center of the rotation axis depending on the type of the external electrode, and the conduction that is in contact with the plurality of external electrodes of the electro-mechanical energy conversion element. The plurality of conduction patterns of the member are
Each is in contact with the external electrode of the electro-mechanical energy conversion element at a portion located at a different distance from the center of the rotation axis.

In order to achieve the above object, a third invention according to the present application is to provide a plurality of types of external electrodes formed on the same surface of an electro-mechanical energy conversion element with electrical conduction for electrical connection with an external electric circuit. In an oscillatory wave drive device having a vibrating body that forms a motion for driving the frictional drive portion of the elastic body by applying an AC voltage through the member, the plurality of external electrodes of the electro-mechanical energy conversion element, According to the type of the external electrode, each having a substantially concentric arc-shaped pattern having a different distance from the center of the rotation axis, the plurality of conductive patterns of the conductive member in contact with the plurality of external electrodes of the electro-mechanical energy conversion element, respectively. Has a substantially concentric arcuate pattern having different distances from the center of the rotation axis.

In order to achieve the above-mentioned object, a fourth invention according to the present application is the invention as defined in any one of the above invention, further comprising a contact body which is brought into pressure contact with a friction drive portion of the elastic body, It is characterized in that the contact body is relatively moved.

In order to achieve the above object, a fifth invention according to the present application has the vibration type driving device having the above-mentioned fourth structure as a driving source, and drives the driven body by the vibration wave driving device. An apparatus using a vibration wave drive device as a drive source.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) FIGS. 1 and 2 are views showing a first embodiment of the present invention. FIG. 1 is a view showing an electrode pattern of a laminated piezoelectric element, FIG. 2 is a diagram showing a conductive pattern of a flexible printed circuit board which is a conductive member. Although FIG. 2 is a top view,
In order to understand the degree of overlap with the electrode pattern of FIG. 1, the conductive pattern originally on the lower surface is transparently drawn.

In FIG. 1, the laminated electric device of this embodiment is
A laminated piezoelectric element which is a mechanical energy conversion element has an external electrode pattern 10 formed on the surface in FIG. 9 of a conventional example.
An uppermost surface layer 1 made of a piezoelectric layer is provided on 4-1 and a plurality of through holes provided in the uppermost surface layer 1 are electrically connected to the external electrode pattern 104-1. 1G is a ground external electrode, 1A1 and 1A2 are A-phase external electrodes for generating x-direction vibration, 1B1 and 1B2 are B-phase external electrodes for generating y-direction vibration, and 1S is an output of a vibration sensor. These are S-phase external electrodes, and these electrodes are formed by through holes.

In the figure, the dotted lines of the concentric circles drawn on the uppermost surface layer 1 of the laminated piezoelectric element are not actual lines, but the distance relationship of these external electrodes from the center of the laminated piezoelectric element is made easy to understand. Is an auxiliary line.

As shown in FIG. 1, a ground external electrode 1G
Are arranged on the innermost side, and a voltage for vibration in the x direction is applied to the slightly outer side thereof. A-phase external electrodes 1A1, 1A
2, B-phase external electrodes 1B1 and 1B2 to which a voltage for vibration in the y direction is applied are arranged on the slightly outer peripheral side, and the S-phase external electrode 1S is further arranged on the outer peripheral side.

In the conductive pattern of the flexible printed circuit board shown in FIG. 2, four patterns (first to fourth patterns) are concentric arcuate in the annular portion of the flexible printed circuit board 3 which is in contact with the uppermost layer 1 of the laminated piezoelectric element. The ground electrode conduction pattern 3G is disposed on the innermost side in correspondence with the external electrode of the uppermost layer 1 of the laminated piezoelectric element.
A pattern, an A-phase electrode conduction pattern 3A as a second pattern on the outer peripheral side thereof, a B-phase electrode conduction pattern 3B as a third pattern on the outer peripheral side thereof, and an S-phase electrode conduction pattern 3S as a fourth outermost pattern. ing.

The black dots in the figure of the flexible printed circuit board 3 indicate the positions of the external electrodes of the uppermost surface layer 1 of the laminated piezoelectric element, and the four types of external electrodes 1G, 1A1.
2, 1B1, 2 and 1S are respectively brought into contact with the four conductive patterns 3G, 3A, 3B and 3S to be conductive.

According to the arrangement of the external electrodes and the conduction pattern shown in the present embodiment, the overlap between the uppermost layer 1 of the laminated piezoelectric element and the flexible printed board 3 is not limited to the above-mentioned case, and FIG. Due to the clockwise rotation deviation of the flexible printed circuit board 3, the B-phase external electrode 1B2 is no longer in contact with the B-phase electrode conduction pattern 3B.
1 is allowed, and the counterclockwise rotational deviation of the printed circuit board 3 is allowed up to the angle of θ2 in FIG. 2 in which the S-phase external electrode 1S does not contact the S-phase electrode conduction pattern 3S. .

That is, the peripheral positioning allowable angle when the flexible printed circuit board 3 is assembled is θ1 + θ.
2, the alignment accuracy of the conductive pattern of the plurality of electrodes of the piezoelectric element and the flexible printed circuit board is roughened, and the assembling efficiency of the vibrating body in production and the accompanying cost reduction can be realized.

In the uppermost layer 1 of the laminated piezoelectric element, the external electrodes 1G, 1A1, 1A2, 1B1, 1B2,
1S is through holes 2G, 2A1, 2A2, 2 respectively
The uppermost layer pattern 104-1 in the conventional example is electrically connected via B1, 2B2, and 2S, and the pattern of the layers not shown below is the same as that of the conventional example. Form.

(Second Embodiment) FIGS. 3 and 4 show
It is a figure which shows the 2nd Embodiment of this invention, FIG. 3 is a figure which shows the electrode pattern of a laminated piezoelectric element, and FIG. 4 is a figure which shows the conduction pattern of the flexible printed circuit board which is a conductive member. Although FIG. 4 is a top view, the conduction pattern originally on the lower surface is transparently drawn so that the overlapping state with FIG. 3 can be seen.

In the first embodiment shown in FIG. 1, the external electrodes composed of a plurality of through-holes are exposed as dots in the uppermost layer 1 of the laminated piezoelectric element, but in the present embodiment, they are shown in FIG. As described above, in the uppermost layer 4 of the laminated piezoelectric element, similarly to the first embodiment, the ground through-hole end 4G, the A-phase through-hole ends 4A1 and 4A2 for generating vibration in the x direction, and the y direction. B-phase through-hole ends 4B1 and 4B2 for generating vibration and an S-phase through-hole end 4S for outputting a vibration sensor are provided, and these through-hole ends 4G, 4A1, 2, 4B1, 2, 4S are respectively A ground external electrode 4G3 and an A-phase external electrode 4A, which are four electrode films formed concentrically on the uppermost layer 4 of the laminated piezoelectric element.
3, B-phase external electrode 4B3 and S-phase external electrode 4S3 are electrically connected.

As shown in FIG. 3, the ground external electrode 4G
3 is arranged on the innermost side, the A-phase external electrode 4A3 to which a voltage for vibration in the x direction is applied is arranged on the slightly outer peripheral side, and the voltage for vibration in the y direction is further arranged on the slightly outer peripheral side. The applied B-phase external electrode 4B3 is arranged, and further the S-phase external electrode 4S3 is arranged on the outer peripheral side thereof.

In the conductive pattern of the flexible printed circuit board 5 shown in FIG. 4, four patterns of a ground conductive pattern 5G, an A-phase conductive pattern 5A, a B-phase conductive pattern 5B and an S-phase conductive pattern 5S are formed. Since the cover lay 6 made of film covers it,
It is the respective tip portions that can be in contact with the laminated piezoelectric element uppermost layer 4 and the ground conduction pattern tip portion 5G.
2, A phase conduction pattern tip 5A2, B phase conduction pattern tip 5B2, S phase conduction pattern tip 5S2 only.

The tip end portion 5G2 of the ground conduction pattern corresponds to the outer electrode of the uppermost layer 4 of the laminated piezoelectric element, the tip end portion 5A2 of the phase A conduction pattern on the outer peripheral side thereof, and the tip portion 5A2 of the conduction pattern further on the outer peripheral side thereof. The conduction pattern tip portion 5B2 and the S-phase conduction pattern tip portion 5S2 are arranged at the outermost periphery.

Therefore, the ground external electrode 4G3, the A-phase external electrode 4A3, the B-phase external electrode 4B3, S shown in FIG.
The phase external electrode 4S3 is connected to the ground conduction pattern 5G, the A-phase conduction pattern 5A, the B-phase conduction pattern 5B, and the S-phase conduction pattern 5S via the conduction pattern tips.
Conduct to.

According to the arrangement of the external electrodes and the conduction pattern shown in this embodiment, the overlap between the uppermost layer 4 of the laminated piezoelectric element and the flexible printed board 5 is not limited to the positional relationship shown in FIGS. 3 and 4. In any case where the flexible printed circuit board 5 has a rotational displacement as shown in FIG.
Allows continuity. That is, it is not necessary to perform circumferential positioning at the time of assembling the flexible printed circuit board 3, and it is possible to improve the efficiency of assembling the vibrating body in production and reduce the cost accordingly.

The uppermost layer 4 of the laminated piezoelectric element is as shown in FIG. 3, but the through-hole ends 4G, 4A1,
4A2, 4B1, 4B2, and 4S are electrically connected to the uppermost surface pattern 104-1 in the conventional example through the through holes 2G, 2A1, 2A2, 2B1, 2B2, and 2S, respectively, and the patterns of the layers below it are not shown. The vibration body is formed in the same manner as in the conventional example shown in FIG.

(Third Embodiment) FIGS. 5 and 6 show
It is a figure which shows the 3rd Embodiment of this invention, FIG. 5 is a figure which shows the electrode pattern of a laminated piezoelectric element, and FIG. 6 is a figure which shows the conduction pattern of the flexible printed circuit board which is a conductive member. Although FIG. 6 is a top view, the conduction pattern originally on the lower surface is transparently drawn so that the degree of overlap with FIG. 5 can be seen.

In the above-described second embodiment shown in FIG. 3, all the electrode patterns formed on the uppermost layer 4 are formed in a ring shape and are formed concentrically, but in the present embodiment, these electrode patterns are formed. It is a combination of a ring shape and an arc shape.

In FIG. 5, 7 is the uppermost layer of the laminated piezoelectric element, 7G is the end of the ground through hole, and 7A1 and 7A.
2 is an A-phase through hole end for generating vibration in the x-direction, 7B1 and 7B2 are B-phase through-hole ends for generating y-direction vibration, and 7S is an S-phase through-hole end for outputting a vibration sensor. is there.

These through hole ends 7G, 7A1.
2, 7B1, 2 and 7S are ground external electrodes 7G3 and A-phase external electrodes 7 which are four external electrode films formed on the uppermost layer 7 of the laminated piezoelectric element in a concentric circle shape or a concentric arc shape, respectively.
A3, B-phase external electrode 7B3, and S-phase external electrode 7S3 are electrically connected.

As shown in FIG. 5, the ring-shaped ground external electrode 7G3 is arranged on the innermost side, and the A-phase external electrode 7A3 to which a voltage for vibration in the x direction is applied is slightly arcuate on the outer peripheral side. Is located on the side of the
B-phase external electrode 7B to which a voltage for directional vibration is applied
3 are arranged in an arc shape, and further the S-phase external electrode 7S3 is arranged in an arc shape on the outer peripheral side thereof.

The conductive pattern of the flexible printed circuit board 8 shown in FIG. 6 has four patterns of a ground conductive pattern 8G, an A phase conductive pattern 8A, a B phase conductive pattern 8B and an S phase conductive pattern 8S. A portion of the conductive pattern that is in contact with the uppermost layer 7 of the laminated piezoelectric element is also formed in a concentric arc shape having different radii.

Therefore, the ground external electrode 7G3, the A-phase external electrode 7A3, the B-phase external electrode 7B3, S shown in FIG.
The phase external electrodes 7S3 are respectively connected to the ground conduction pattern 8
G, A phase conduction pattern 8A, B phase conduction pattern 8B, S
Conducts electricity to the phase conduction pattern 8S.

According to the arrangement of the external electrodes and the conduction pattern shown in the present embodiment, the overlap between the uppermost layer 7 of the laminated piezoelectric element and the flexible printed board 8 is not limited to the positional relationship shown in FIGS. 5 and 6. The clockwise rotational displacement of the flexible printed circuit board 8 in FIG. 6 occurs until the end portion 8G2 of 8G of the ground conduction pattern shown in FIG. 6 contacts the end portion 7B4 of the B-phase external electrode 7B3 shown in FIG. Allow angle.

That is, the circumferential positioning allowance angle at the time of assembling the flexible printed circuit board 8 becomes an extremely large angle, which makes the positioning accuracy of the plurality of electrodes of the piezoelectric element and the conductive pattern of the flexible printed circuit board rough and causes vibrations in production. It is possible to improve the efficiency of body assembly and reduce costs accordingly.

The uppermost layer 7 of the laminated piezoelectric element is as shown in FIG. 5, but the through-hole ends 7G, 7A1,
7A2, 7B1, 7B2, and 7S are electrically connected to the uppermost surface pattern 104-1 in the conventional example through the through holes 2G, 2A1, 2A2, 2B1, 2B2, and 2S, respectively, and the patterns of layers below it are not shown in the conventional example. The vibration body is formed in the same manner as in the conventional example shown in FIG.

(Fourth Embodiment) FIG. 7 shows a film feeding device of a camera using the vibration wave motor of the first, second or third embodiment as a drive source. In this figure, M is the vibration wave motor, which is housed in the winding spool 15. Reference numeral 11 is a bottom plate attached to a camera body (not shown), 12 is a sun gear meshing with the outer peripheral gear portion 9 of the vibration wave motor M, and 13 is this sun gear 12
It is a planetary gear that meshes with. These gears 12 and 13 form a planetary clutch and selectively mesh with the two-stage gears 14 (14a) and 16 (16a) according to the rotation direction of the vibration wave motor M. The two-stage gear 14 (14b) always meshes with the gear portion 15a formed on the winding spool 15, and the two-stage gear 16 (16b) always meshes with the worm gear 17. The worm gear 17 is connected to a worm gear 19 via a transmission shaft 18, and the worm gear 19 meshes with a fork gear 21 formed integrally with the fork 22. 10 is a fixing member fixed to the bottom plate 11,
The motor M and the gears 12, 16 and 14 are supported.

In the film feeding apparatus thus constructed, when the motor M rotates in the winding direction (the direction opposite to the arrow in the drawing), the planetary gear 13 moves to the position shown by the chain line 13a in the drawing, The motor rotation force is transmitted to the winding spool 15 via the two-stage gear 14. As a result, the spool in the cartridge is engaged with the fork 22 and the film of the film cartridge (not shown) loaded in the camera can be wound up by the winding spool 15.

On the other hand, when the motor M rotates in the rewinding direction (the direction of the arrow in the figure), the planetary gear 13 moves to the position shown by the solid line in the figure, and the motor rotational force is transmitted to the two-stage gear 16, the worm gear 17, and the transmission. It is transmitted to the fork 22 via the shaft 18, the worm gear 19, and the fork gear 21. As a result, the spool in the cartridge engaged with the fork 22 can be rotationally driven to rewind the film into the film cartridge.

In the present embodiment, the film feeding device of the camera using the vibration wave motor has been described.
The vibration wave driving device of the present invention can be used as a driving source for devices other than the film feeding device in the camera and devices other than the camera.

[0050]

As described above, according to the present invention, the permissible range of the circumferential position of the conductive member for contacting each external electrode with the predetermined conductive pattern becomes extremely large.
It is not necessary to precisely position the conductive member in the circumferential direction.

[Brief description of drawings]

FIG. 1 is a diagram showing an electrode pattern of a laminated piezoelectric element according to a first embodiment.

FIG. 2 is a diagram showing a conduction pattern of the flexible printed circuit board according to the first embodiment.

FIG. 3 is a diagram showing an electrode pattern of a laminated piezoelectric element according to a second embodiment.

FIG. 4 is a diagram showing a conductive pattern of a flexible printed circuit board according to a second embodiment.

FIG. 5 is a diagram showing an electrode pattern of a laminated piezoelectric element according to a third embodiment.

FIG. 6 is a diagram showing a conductive pattern of a flexible printed circuit board according to a third embodiment.

FIG. 7 is a diagram showing a perspective view of a film feeding device according to a fourth embodiment.

FIG. 8 is an exploded perspective view of a rod-shaped vibrating body used in a conventional vibration wave motor.

FIG. 9 is a diagram showing electrodes inside a laminated piezoelectric element of a conventional example.

[Explanation of symbols]

1, 4, 7 Top layer of laminated piezoelectric element 1A1, 1A2, 4A3, 7A3 A phase external electrode 1B1, 1B2, 4B3, 7B3 B-phase external electrode 1G, 4G3, 7G3 Ground external electrode 1S, 4S3, 7S3 S phase external electrode 4A1, 4A2, 7A1, 7A2 A phase through hole end 4B1, 4B2, 7B1, 7B2 Phase B through hole end 4G, 7G ground through hole edge 4S, 7S S phase through hole end 3, 5, 8 flexible printed circuit board 3A, 5A, 8A A phase electrode conduction pattern 3B, 5B, 8B B-phase electrode conduction pattern 3G, 5G, 8G ground electrode conduction pattern 3S, 5S, 8S S phase electrode conduction pattern 6 coverlay

Claims (5)

[Claims] 1. An elastic body is formed by applying an AC voltage to a plurality of types of external electrodes formed on the same surface of an electro-mechanical energy conversion element via a conduction member for conduction with an external electric circuit. In a vibration wave driving device having a vibrating body that forms a motion for driving in a friction driving part, a plurality of types of external electrodes of the electro-mechanical energy conversion element are different from a center of a rotation axis according to types of external electrodes. The plurality of conducting patterns of the conducting member located at a distance and in contact with the plurality of external electrodes of the electro-mechanical energy conversion element have substantially concentric circular patterns or substantially concentric circular arc patterns having different distances from the center of the rotation axis. A vibration wave drive device. 2. An elastic body is formed by applying an AC voltage to a plurality of types of external electrodes formed on the same surface of an electro-mechanical energy conversion element via a conduction member for conduction with an external electric circuit. In a vibration wave driving device having a vibrating body that forms a motion for driving in a friction driving unit, a plurality of external electrodes of the electro-mechanical energy conversion element have different distances from the center of the rotation axis depending on the types of the external electrodes. Having a portion formed in a substantially concentric circle shape or a substantially concentric arc shape, the plurality of conduction patterns of the conduction member in contact with the plurality of external electrodes of the electro-mechanical energy conversion element, respectively different distances from the center of the rotation axis. The vibration wave driving device is characterized in that it is in contact with the external electrode of the electro-mechanical energy conversion element at the portion located at. 3. An elastic body is formed by applying an AC voltage to a plurality of types of external electrodes formed on the same surface of an electro-mechanical energy conversion element via a conduction member for conduction with an external electric circuit. In a vibration wave drive device having a vibrating body that forms a motion for driving in a friction drive unit, a plurality of external electrodes of the electro-mechanical energy conversion element are different distances from the center of the rotation axis depending on the types of the external electrodes. Having a substantially concentric arc-shaped pattern,
The vibration wave driving device according to claim 1, wherein the plurality of conduction patterns of the conduction member that are in contact with the plurality of external electrodes of the mechanical energy conversion element have substantially concentric arc-shaped patterns having different distances from the center of the rotation axis. 4. The friction member of the elastic body is provided with a contact body that comes into pressure contact with the friction drive portion, and the vibrating body and the contact body are moved relative to each other. Vibration wave drive. 5. An apparatus using the vibration wave drive device as a drive source, comprising the vibration type drive device according to claim 4 as a drive source, and driving the driven body by the vibration wave drive device.