JP2003121225A - Mass fluid flow sensor, and fluid flow detector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To directly detect a fluid in a conduit, to accurately measure a fluid flow rate in quick sensitivity, and to prevent detection ability of a sensor from lowering by latent heat of an electric insulator that is a support. SOLUTION: Each of this mass fluid flow sensor and mass fluid flow detector of the present invention is formed into structure processed with electrodes 5 5' onto a hybrid ceramic of composite structure having an interface 4 partitioning a positive temperature coefficient thermistor 2 and a supporting table 3 of an insulator, and mounted with an insulation coating and heat- conductive metal, or housed therewith, and an outside of the thermistor 2 is insulated by the supporting table 3 of the insulator to arrange, inside the conduit, the resistor thermistor 2 having the high positive temperature coefficient and of which the heating temperature is self-restrictive.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mass fluid flow sensor and a mass fluid flow detection device, and more particularly, to a boundary surface which is divided into a positive temperature coefficient thermistor and a support which is an insulator. As a structure in which hybrid ceramics with a composite structure having electrodes are treated with an electrode, an insulating coating, and a thermally conductive metal, or have a housing, they have a large positive temperature coefficient instead of existing platinum or nickel and generate heat. The temperature sensor and mass fluid flow sensor are directly sensed to the fluid inside the conduit by insulating the outside of the thermistor with a support stand that is an insulator so that the temperature self-limiting resistor thermistor can be installed inside the conduit. Sensitivity enables quick and accurate measurement of fluid flow rate, and also minimizes heat loss from the terminal part, making it a support base. A mass fluid flow sensor which can prevent deterioration sensor detection capability of the latent heat of the electrical insulator to use, to a measuring device having a temperature compensation device for sensing the mass change to comply to the temperature of the fluid.

[0002]

2. Description of the Related Art Conventionally, a mass type fluid flow rate sensing device is mainly a fluid flow rate sensing device utilizing a hot film or hot wire sensor, and a device for indirectly measuring a fluid mass by mounting a ceramic semiconductor outside a conduit. There is. Here, the hot film type or hot wire type fluid flow rate sensing device is relatively excellent in measurement accuracy, but the outer diameter of the measuring element used is 10 μm or less, or the thickness is Since it is made of a thin film with a thickness of several μm, there is a problem that the durability is weak and the manufacturing cost is high in the case of a wire or a film. In addition, although it is possible to detect the flow rate of gas, in the case of liquid, there is a problem in electrically insulating the hot wire or hot film, and the sensor cannot be directly inserted inside the fluid, so it is practical It is a difficult situation. In the measurement circuit, the hot wire and hot film are made of platinum, nickel, etc. and have a small positive temperature coefficient, so not only the sensitivity is low, but also to prevent the ignition phenomenon due to heat generation. Must consist of a positive temperature measurement circuit. In this positive temperature type measuring circuit, a thermistor is used as a constituent element of the Wheatstone bridge. At this time, a voltage of the magnitude that is obtained by integrating the output voltage of the bridge with an amplifier is applied to the input end of the bridge and the flow velocity increases. Gradually, when the temperature of the thermistor falls, the balance of the bridge is disturbed and an output voltage is generated across the reference resistor.The current value and voltage value of this reference resistor indicate the amount of electrical energy consumed by the thermistor. A current-flow velocity calculator is used to increase the applied voltage at the bridge and bring the bridge into a parallel state again when it is non-parallel, which controls the temperature of the thermistor to be constant. However, there is a problem that the manufacturing cost of the circuit is high.

On the other hand, as a mass flow sensing device technology using a positive temperature coefficient ceramic semiconductor, US Pat. No. 521 is known.
6918 (1), Japanese Patent Laid-Open No. 63-210666.
(2), JP-A-7-091998 (3), JP-A-5-306947 (4), and US Pat. No. 441.
There are many such as No. 3514 (5). Among the above patents, the technologies that do not use insulators are (1), (3) and (5),
Of these, (1) can be said to be a typical technique that uses a positive temperature coefficient thermistor without using an insulator, but an element having a positive temperature coefficient (PTC) that is in thermal contact with the outer wall of the conduit. And a device for detecting a fluid change from the resistance change of the PTC element and a signal from the temperature sensor by installing a temperature sensor that does not generate heat in the conduit, and a method. Barium acid (BaTi
O ₃ ), or strontium titanate (SrTiO ₃ ), and an additive, and detects the resistance change of the PTC element. In addition, the technique of (3) is also a method without using an insulator, in which two disk-type PTC thermistors are installed in a conduit to form a bridge circuit, and the flow velocity is measured from the difference between the two ( 5) uses two types of NTC thermistor and PTC thermistor without using an insulator, but since all of these sensors are thermistors, the heat detection capability is poor due to heat loss at the thermistor terminal part. There is. On the other hand, as a flow sensor in which a positive temperature coefficient thermistor is coated on an insulator, the above (2),
The technique (4) can be taken as an example, but it is as shown in FIGS. 8 and 9, respectively. Here, the technique (2) of Japanese Patent Laid-Open No. 63-210666 (FIG. 8) is the ball-shaped electric insulator (31), and the first thin film formed on the surface of the electric insulator (31). Electrode (32), thin film thermistor (33) uniformly formed on the surface of the first thin film electrode (32) and having positive temperature characteristics, and this thermistor (33)
A flow velocity sensor for measuring the flow velocity of a fluid composed of a second thin film electrode (34) formed on the surface of a ball electrode, the lower electrode being covered on the surface of an electrical insulator (31) having a ball pattern, and the thin film being formed on the lower electrode. After the PTC thermistor (33) is formed, a fluid passing through the flow velocity sensor (30) from the output of a feedback amplifier which further forms a bridge circuit with a sensor covering the upper electrode to maintain the bridge in parallel. The feature is that the flow velocity of can be detected. In addition, the technology of the Japanese Patent Laid-Open No. 5-306947 (4) above (FIG. 9)
Includes a lead wire (40) and a protection cord (41) at a lower portion thereof, a flow velocity probe (35) provided on a holder (42), an electrically insulating support base material (36) and this support base material. A thermosensitive resistor (37) adhered to the surface of (36), the thermosensitive resistor (37) comprising a main thermosensitive part (38) made of a substance whose resistance changes depending on temperature and the main thermosensitive resistor. And a heat buffer part (39) made of a material having a resistance temperature coefficient larger than that of the part (38), and the heat buffer part (39) is a flow velocity probe (35) of the main heat sensitive part (38).
As a structure adjacent to the support side of the, the thermal sensor covers the NTC which is a resistor with a sub-temperature coefficient on the electrically insulating substrate, and the proximity part of the terminal covers the PTC which is a positive temperature coefficient resistor and the terminal part. It is characterized by complementing and reducing the heat loss of. However, in such a conventional technique, since the thermistor is formed of a thin film and has a small heat capacity, the structure shown in FIG.
Ball-shaped electrical insulator (aluminum) (31)
Also, since it is easily affected by the latent heat of the electric insulating substrate shown in FIG. 9 (4), when the fluid temperature changes, there is a possibility that the detection time will be prolonged and the measurement may be inaccurate. was there.

[0004]

Therefore, according to the present invention,
In order to solve the above-mentioned conventional drawbacks, a hybrid ceramic having a composite structure having a boundary surface which is divided into a positive temperature coefficient thermistor and a support which is an insulator is provided with an electrode treatment, an insulating coating and a thermal conductivity. As a metal mounted or housing structure, instead of the existing platinum or nickel, the thermistor outside can be installed so that a self-limiting resistor thermistor with a large positive temperature coefficient and exothermic temperature can be installed inside the conduit. Insulating with a support that is an insulator, the temperature sensor and the mass fluid flow sensor can be directly sensed to the fluid inside the conduit, the sensitivity can be measured quickly and accurately,
Also, it minimizes heat loss from the terminal part and can prevent the defect that the detection ability of the sensor is deteriorated due to the latent heat of the electric insulator used as the support base. The mass fluid flow rate sensor and the mass change depending on the temperature of the fluid are sensed. An object is to provide a measuring device having a temperature compensation device.

[0005]

The structure of the present invention will now be described in detail with reference to the accompanying drawings in order to facilitate understanding of the present invention.

FIG. 1 is a perspective view of the mass fluid flow sensor of the present invention. As shown in the drawing, the mass fluid flow sensor (1) of the present invention has a boundary surface (4) divided into a thermistor (2) which is a resistor and a support base (3) which is an insulator, and , Composed of hybrid ceramics with integrated composite structure, electrodes (5) on both upper and lower sides of CERAMAX
After forming (5 ′), the portion other than the terminal portion is coated with an insulating film again, and when necessary, it is mounted or housing with a metal having better thermal conductivity. The electrodes (5) and (5 ') are for energizing the thermistor (2), which is a resistor, and are preferably formed in the entire area as much as possible. To minimize heat loss from the terminal part, and when the flow sensor (1) is used for a long period of time, cracks or bulk changes occur at the interface (4) between the thermistor (2) and the support base (3). It is desirable that the thermistor (2) and the support base (3) have almost the same coefficient of thermal expansion in order to prevent the occurrence of such problems.

The constituent components of the flow sensor (1) and the manufacturing method will be described below. Positive temperature coefficient thermistor (2) is a perovskite type solid solution, and the general formula is AB
It is displayed as O ₃ , where A is Ca, Sr, Ba, or
Pb, B is Ti, etc., and as additives for the semiconducting positive temperature coefficient thermistor, Y, Sb, Nb, Nd, La
Besides Mn, Mg, Al, Si, Ti, Zr, W, etc., metal oxides or light bulbs are used. The support base (3), which is an insulator, is manufactured by adding one or more chemical components to these perovskite thermistor compositions so that the lattice constants and the thermal expansion coefficient of the thermistor (2) are almost the same. .

The composition for producing such an insulator can be formed by the following various methods. 1) The same oxide of ABO ₃ as the ABO ₃ type thermistor (2) used, or a light bulb body (where A and B can be one or more solid solution components) 2) Thermistor (2) Main The same ABO ₃ oxide as the component system, or Y, Sb, Nb, Nd, La, Mn, M on the bulb body
A composition containing an oxide containing 10 mol% or less of at least one of g, Al, Si, Ti, Zr, W and the like, or a light bulb body. 3) Additives (for example, Y, Sb, Nb, Nd, La, Mn, Mg, A) for expressing the semiconductivity of the thermistor (2).
L, Si, Ti, Zr, W) is an oxide or light bulb composition in which the amount is less than or more than the proper amount for exhibiting semiconductivity. 4) A composition containing at least one component less or more than the proper additive composition of the thermistor (2).

[0009]

DESCRIPTION OF EMBODIMENTS OF THE INVENTION

[Embodiment 1] If the main component of the resistor thermistor (2) is barium titanate (BaTiO), the end component of barium titanate or the bulb body is used. In another method, a mixture may be used in which barium titanate contains 1 mol or less of one or more oxide bulbs such as oxides and carbonates of silicon, aluminum, magnesium, titanium, manganese, zirconium and the like. Molded by resistor thermistor (2)
The composition powder of (1) and the composition powder of the support (3), which is an insulator, are separately filled in a mold and simultaneously pressed. When the molded product is sintered at a temperature of 1200 ° C. or higher for 30 minutes or more and then cooled, an integrated hybrid ceramic is obtained. Of these, on both sides of the hybrid ceramics,
The electrode is printed by a normal printing method using a normal ohmic paste (Ohmic paste) such as silver, nickel, aluminum, zinc, etc. and a screen designed for the terminal shape,
The desired mass fluid flow rate sensor (1) is obtained by forming the electrodes (5) and (5 ') by baking and coating the entire part except the end part of the terminal with a polymer insulating film material such as silicon. Here, if necessary, for a liquid, a thin plate copper, stainless steel, or aluminum having good heat conductivity may be mounted again by tight welding and mounting or housing.

[0010]

[Embodiment 2] In the molding step, an end component of barium titanate or an electric bulb body, or barium titanate, or silicon of 10 mol% or less of an electric bulb body is formed into a molded body which is wholly molded with the composition of the thermistor (2). A mixture containing at least one oxide bulb such as oxide, carbonate, etc. of aluminum, magnesium, titanium, manganese, zirconium, etc. is added to a slurry produced by using a solvent such as water, alcohol, acetone, etc. After dipping the portion to be applied and applying it by a usual coating method such as dip coating or spraying, brush, printing, etc., and sufficiently diffusing it, the next step is the same as in Example 1 above, and the desired flow rate sensor ( You will get 1). Here, the main component of the thermistor (2) is, instead of barium titanate, an end component of a perovskite structure such as strontium titanate, calcium titanate, lead titanate, or calcium tungstate, or an oxide of a solid solution, or a light bulb. The body can be applied. The manufactured piece thus obtained is a square plate material having a width of 5 cm, a length of 30 mm, and a thickness of about 1 mm, and the vertical direction 1/3 part is a thermistor (2) and the remaining 2/3 is an insulator. Produce as a stand (3). The main component of the thermistor (2) is
Use barium titanate or a solid solution of barium titanate and lead titanate, and add PV to these powders as a binder.
After producing granular powder by adding A, 1/3 of the longitudinal direction of the molding die for square plate is filled with granular powder for thermistor (2), and the remaining 2/3 is barium titanate for insulator. Granule powder was filled and pressed at the same time. The molding powder was filled by press-molding after the partition film of the mold was removed after the partition film was section-filled inside the feeder cup and the mold. In addition, each composition of the insulator was manufactured and confirmed by each of the above-described exemplary methods. The molded sample was heat-treated in the temperature range of 1,250 ° C. to 1,350 ° C. for about 30 minutes to 2 hours and then cooled.
The sintered test piece is made of a positive temperature coefficient thermistor (2) and a hybrid ceramic in which the support base (3) which is an insulator is well divided, and the resistance of the insulator is 100 MΩ.
Met. After printing the electrodes and terminals on the upper and lower surfaces in the thickness direction including the thermistor (2) and the support (3) which is an insulator, all the parts except the terminal part connecting the main body and the electric circuit, An insulating polymer film or a silicon and glass film was coated. As a result of measuring the non-resistance change according to the temperature of the manufactured mass fluid flow sensor (1), it has a steep slope due to the physical properties of the positive temperature coefficient thermistor, and in the region showing linearity, 1. Since it can detect a temperature change of 0 ° C., it can be sufficiently used as a fluid flow sensor. On the other hand, liquid flow sensor (1)
After stretching the terminal lead wire for a long time, a thin copper or stainless steel (SU
S) or mounting the sensor with aluminum,
Alternatively, the housing was welded.

FIG. 2 shows a constant-voltage measuring circuit used in the present invention.
As shown in the drawing, the configuration of the constant voltage measuring circuit of the present invention applies a constant voltage after a sensor having a very large positive temperature coefficient value in a specific temperature section is configured by one element of the measuring circuit. When the wind speed (Ua) is generated with a constant voltage applied to the sensor (1), the wind speed is calculated from the relationship between the energy lost by convection and the wind speed. Reference resistance sensor for sensing current value (1)
Connected in series to measure the voltage (E) across the reference resistance to obtain the current (IP) value and pure voltage applied to the sensor, and then the resistance of the sensor and the electrical power consumed by the sensor. Calculate the magnitude of energy. The equilibrium equation between the consumed electrical energy and the amount of heat taken up by convection is: Electric energy = convection effect −−−−−−−−−−− (1 formula) Electric energy = {Pure voltage (VP) applied to the sensor} x {Current passing through the sensor (IP)} −− −−−−−−−− (Equation 2) Convection heat quantity = (effective convection cross section) (convection constant) {(sensor temperature) −air temperature} −−−−−−−−−− (Equation 3) Convection constant = (Experimental constant 1) + (Experimental constant 2) √ (Air velocity) --- King's law (Equation 4) In each of the above equations, the temperature of the sensor can be estimated from the resistance value of the sensor. The experimental constants can be experimentally obtained in advance. Therefore, if only the temperature of the fluid is additionally measured, the velocity and flow rate of the fluid can be known. Referring to FIG. 2 in more detail, the current resistance is R1 <
<Assuming R2 and applying a constant voltage to the circuit E, V
1 has a voltage like E. In order to create a constant voltage wind speed sensor, Vp must be kept constant at all times. First, the flow velocity is 0 (non-flo
The circuit is set so that Vp maintains a constant voltage under the condition of w). At this time, when the wind speed occurs, the Vp value changes. If the changed Vp value is compensated via V ₁ , Vp is always kept constant. The constant voltage driving method is to measure the generated wind speed by examining the relationship between the power consumed by the generated wind speed and the wind speed.

On the other hand, FIG. 3 is a sectional view showing a state of use of the mass fluid flow detecting device of the present invention, in which the mass fluid flow sensor (1) of the present invention is mounted on a fluid detection sensor support base (9).
The temperature sensor (6) is provided inside the fluid detection sensor support base (9) to detect the mass fluid flow of the fluid flowing through the conduit (11). ) Power supply connection wire (7) and flow sensor connected to the flow sensor (1) power supply wire (8)
And are connected to the circuit in the circuit protection case (10).

FIG. 4 is a cross-sectional view of the liquid sensing sensor in the mass fluid flow detecting device of the present invention, in which the mass fluid flow sensor (1) of the present invention is attached to a support pipe in a fluid sensing sensor support base (9). The mass fluid flow sensor is provided at the tip of (12), and the mass flow sensor (1) is protected by a protruding sensor protection cover (13), and the tip of the sensor is filled with a sensor protection insulator (14). The device is shown.

FIG. 5 is a cross-sectional view of a gas detection sensor in the mass fluid flow detection device of the present invention. The difference from FIG. 4 is that the mass fluid flow sensor (1) is insulated to protect the fluid detection sensor. The structure is such that the object (16) covered and mounted on the nipple (15) for fixing the fluid detection sensor is fixed to the tip of the fluid detection sensor support (9).

FIG. 6 is a cross-sectional view of an example of a state of use of the mass fluid flow detecting device of the present invention, in which the mass fluid flow sensor (1) is attached to the tip of the fluid detection sensor support base (9). In the case where the fluid flow detection device is provided in the conduit (11), the mass fluid flow sensor (1) is protected by a sensor protective cover (13) around the mass flow sensor (1), and a sensor protective insulator (14) is provided at the front. Fill and fill the tip of the fluid detection sensor support (9) and the sensor protection cover (13).
And a fluid detection sensor support base (9) is fixed to the fluid detection sensor support base fixing nut (17), compression ring (18), and piping. It is firmly attached and fixed to the conduit (11) through a nipple (19) for connection.

FIG. 7 shows a graph of resistance change according to temperature of the fluid sensor of the present invention. Room temperature resistance (Ro)
When a power source is applied to the sensor (1) having
2) draws an S-shaped curve like a dotted line as the temperature rises and has a Curie point of PT, but the resistance near the temperature (21) at the Curie point shows a change of 1,000 times or more,
It has an automatic switching function while behaving like a conductor below the Curie temperature and an insulator above the Curie temperature.

In this system, a constant voltage is applied so as to maintain a region above the cucumber temperature, and since the flow velocity is high, heat is removed and the temperature decreases, the resistance decreases, and the current increases and the cucumber increases. When the temperature rises, the resistance rises again and the current is cut off to maintain a constant temperature.
It utilizes the positive temperature characteristic of PTC.

[0018]

As described above, according to the mass fluid flow sensor and the mass fluid flow detection device of the present invention, the composite structure having the boundary surface divided into the positive temperature coefficient thermistor and the support base which is an insulator. As a structure in which an electrode treatment, an insulating coating, and a heat conductive metal are mounted or mounted on the hybrid ceramics, the existing positive platinum has a large positive temperature coefficient and self-limiting heating temperature. The outside of the thermistor is insulated with a support that is an insulator so that the resistor thermistor can be installed inside the conduit, and the temperature sensor and mass fluid flow sensor can be directly sensed by the fluid inside the conduit, resulting in fast and accurate sensitivity. Can measure the fluid flow rate,
Also, it minimizes heat loss from the terminal part and can prevent the defect that the detection ability of the sensor is deteriorated due to the latent heat of the electric insulator used as the support base. The mass fluid flow rate sensor and the mass change depending on the temperature of the fluid are sensed. It is a measuring device having a temperature compensation device. Therefore, it can be said that it is expected to be used and applied in this related field.

[Brief description of drawings]

FIG. 1 is a perspective view of a mass fluid flow sensor of the present invention.

FIG. 2 is a diagram showing a configuration of a constant voltage measuring circuit of the present invention.

FIG. 3 is a cross-sectional view of the mass fluid flow detection device of the present invention in use.

FIG. 4 is a schematic view of the mass fluid flow detection device of the present invention,
It is sectional drawing of a liquid detection sensor.

FIG. 5 is a view showing a mass fluid flow detection device according to the present invention,
It is sectional drawing of a gas detection sensor.

FIG. 6 is a cross-sectional view showing an example of a usage state of the mass fluid flow detection device of the present invention.

FIG. 7 is a graph of resistance change according to temperature of the fluid detection sensor of the present invention.

FIG. 8 is a sectional view showing an example of a conventional mass fluid sensor.

FIG. 9 is a sectional view showing still another example of a conventional mass fluid sensor.

[Explanation of symbols]

1; Mass fluid flow sensor 2; Thermistor 3; Fluid detection sensor joint support 4; boundary surface 5,5 '; electrode 6; Temperature sensor 7; Temperature sensor power supply connection wire 8; Flow rate sensor power supply connection wire 9; Fluid detection sensor support 10; Circuit protection case 11; conduit 12; Fluid detection sensor support pipe 13; Sensor protection cover 14; Insulator for sensor protection 15; Nipple for fixing fluid detection sensor 16; Insulator for protecting fluid sensor 17; Support stand fixing nut 18; compression ring 19; Nipple 20; Insulator 21; Point just before reaching the cucumber point of the sensor 22; Resistance point when power is applied

Continued front page    (72) Inventor Cho Sung Yul             499-, Bukyeong 3-dong, Bupyeong-gu, Incheon, Republic of Korea             2 Sanbu Apartment 103-702 (72) Inventor Lee Munenobu             9-gong Satoyama, Seongnam-myeon, Hwaseong-gun, Gyeonggi-do, Republic of Korea             10 Suwon University of Science F-term (reference) 2F035 EA08                 5E034 AA09 AB01 AC03 DA02 DB15

Claims (7)

[Claims] 1. A hybrid ceramic having an integrated composite structure, which has a boundary surface (4) divided into a thermistor (2) which is a resistor and a support base (3) which is an insulator, Electrodes (5) on both upper and lower sides of ceramics
A mass fluid flow sensor characterized in that after forming (5 ′), a part other than the terminal part is further coated with an insulating film and, if necessary, mounting or housing again with a metal having good thermal conductivity. 2. The thermistor (2) has the general formula AB
O ₃ (where A is Ca, Sr, Ba or Pb, B is Ti
Etc.) is a perovskite type solid solution, and as an additive for the semiconducting thermistor (2),
Y, Sb, Nb, Nd, La, Mn, Mg, Al, Si,
The mass fluid flow sensor according to claim 1, wherein a metal oxide such as Ti, Zr, W or a light bulb body is used. 3. The support base (3), which is an insulator, is made of any one of the following compositions.
The mass fluid flow sensor described in 1), 1) the same ABO ₃ oxide as the ABO ₃ type thermistor (2) used, or a light bulb body (where A and B may be one or more solid solution components). ). 2) Thermistor (2) ABO ₃ oxide similar to the main component system, or Y, Sb, Nb, Nd, La, Mn, M on the bulb body
A composition containing an oxide containing 10 mol% or less of at least one of g, Al, Si, Ti, Zr, W and the like, or a light bulb body. 3) Additives (for example, Y, Sb, Nb, Nd, La, Mn, Mg, A) for expressing the semiconductivity of the thermistor (2).
L, Si, Ti, Zr, W) is an oxide having a composition less than or more than an appropriate content for exhibiting semiconductivity, or a light bulb composition. 4) A composition containing at least one component less or more than the proper additive composition of the thermistor (2). 4. The mass fluid flow sensor (1) is attached to the tip of a fluid detection sensor support base (9), and a conduit (11) is provided.
A device for detecting a flow of a fluid flowing through a temperature sensor (6) is provided inside the fluid detection sensor support (9), and a power supply connecting wire (7) and a flow rate sensor (6) of the temperature sensor (6) are provided. A mass fluid flow detection device having a structure in which a flow velocity sensor power supply connecting wire (8) connected to 1) is connected to a circuit in a circuit protection case (10). 5. A mass fluid flow sensor (1) for detecting a fluid flow by providing a mass fluid flow sensor (1) at a tip of a support pipe (12) in a fluid detection sensor support base (9). Is protected by a protruding sensor protection cover (13), and the tip of the sensor protection cover is filled with a sensor protection insulator (14). 6. An apparatus for detecting a fluid flow by providing a mass fluid flow sensor (1) at a tip of a support pipe (12) in a fluid detection sensor support base (9), wherein the mass fluid flow sensor (1) is provided. A mass fluid flow detection device, characterized in that the above is covered with an insulator (16) for protecting a fluid detection sensor and mounted on a nipple (15) for fixing the fluid detection sensor. 7. A device for mounting a mass fluid flow sensor (1) on the tip of a fluid detection sensor support (9) to detect the flow of fluid flowing in a conduit (11), wherein the mass fluid flow sensor (1) ) Is protected by a sensor protection cover (13), and the front is filled with a sensor protection insulator (14), and between the tip of the fluid detection sensor support base (9) and the sensor protection cover (13). Is fixed via an insulator (20), and the fluid detection sensor support base (9) includes a fluid detection sensor support base fixing nut (17) and a compression ring (18).
Further, the mass fluid flow detecting device is characterized in that it is firmly attached and fixed to the conduit (11) through a nipple (19) for connecting to a pipe.