JP2003116260A - Linear motor, stage apparatus and aligner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a linear motor having a construction which is easy to be manufactured. SOLUTION: A stator has a stationary yoke 103 and a stationary coil 104 wound about the stationary yoke 103. A mover has movable magnets 105 arranged on the outside of the stationary yoke 104. The stationary yoke 103, the stationary coil 104, and the movable magnets 105 have four flat planes respectively, and the respective planes have square cross-sections.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear motor, a stage device and an exposure device.

[0002]

2. Description of the Related Art As a linear motor, a cylindrical linear motor as shown in FIG. 12A is known. In the linear motor shown in FIG. 12A, a laminated yoke (iron core) 1202, which is formed by combining arc-shaped laminated yoke members 1202a into an annular shape, is provided outside the cylindrical support rod 1201. Outside the laminated core 1202, a plurality of annular partial coils 1203 are arranged along the axis of the cylindrical support rod 1201. The cylindrical support rod 1201, the annular laminated yoke 1202 and the plurality of annular partial coils 1203 described above constitute a stator of the linear motor.

The mover of the linear motor is provided outside the annular partial coil 1203 of the stator, and is composed of an annular yoke 1205 and a plurality of annular partial magnets 1204. The plurality of annular partial magnets 1204 include those magnetized in the radial direction of the annular ring and those magnetized in the axial direction. More specifically, the magnetization direction of each annular partial magnet 1204 is determined so as to generate an alternating magnetic field inside a cylindrical cylinder formed of a plurality of annular partial magnets 1204.

In this conventional linear motor, a so-called Halbach array generates a substantially sinusoidal magnetic field for two cycles inside the cylinder. A cylindrical yoke 1205 is provided on the outer side of the plurality of annular partial magnets 1204, and the annular yoke 1205 serves as a so-called back yoke. That is, the magnetic flux of the magnet is increased by providing the annular yoke 1205 on the back of the annular partial magnet 1204. In this example, the annular partial magnet 12
Since 04 is a Halbach array, the back yoke may be thin.

Further, the annular laminated iron core 1202 of the stator
Serves to enhance the magnetic field created by the plurality of annular partial magnets 1204 inside the annular ring. In this example, since the annular magnets 1204 are Halbach array, the annular laminated yoke 1202 needs to be thicker than the back yoke.

The ring-shaped yoke 1205 as the back yoke is integral with the magnet 1204, so that it may be solid. However, the ring-shaped laminated yoke 1202 of the stator makes relative movement with respect to the magnet 1204, so that an eddy current is prevented. It has a laminated structure in which an insulating layer is provided in the direction along the axis.

The plurality of annular coils 1203 are composed of a plurality of phases (two phases A and B in this example).

The driving method of this linear motor is a general sine wave drive, and the current and the magnetic flux are controlled so as to be orthogonal to each other. However, this configuration is a movable magnet / fixed coil system, and switching of coils is required in addition to general sine wave drive. This is because only the coil facing the plurality of partial magnets 1204 among the plurality of partial coils 1203 is energized to reduce heat generation. FIG. 12B shows the switching timing of the A phase. When the mover moves to the right in the state shown in FIG. 12B, the illustrated phase A turns off and the illustrated A
The dash phase is turned on. Conversely, when going to the left, the A shown
The dash phase turns off and the illustrated phase A turns on. For the phases facing the other magnets, both the A phase and the B phase are on.

[0009]

The cylindrical linear motor of the above-mentioned conventional example has a partial magnet 1203 and a partial coil 120.
3. Since the laminated yoke 1202 of the stator has a cylindrical shape, it has the following problems in manufacturing and performance.

The first problem is that it is difficult to manufacture the laminated core of the stator and it is difficult to prevent eddy current. In the conventional example, the arc-shaped laminated yoke member 12
02a is combined to form an annular laminated yoke 1202. Such an arc-shaped laminated yoke member 1202
Since it is difficult to manufacture a, it is necessary to manufacture a rectangular parallelepiped laminated yoke member and then form it into an arc shape by wire cutting or the like. This method requires a lot of processing man-hours,
There is a problem that it is difficult to fabricate a structure having a length corresponding to the axial length of the stator at one time, and it is difficult to obtain a highly accurate circular arc.

Further, since the magnetic flux of the magnet 1204 radially enters the laminated yoke 1202, in the concentric configuration shown in FIG. 12A, it is desirable that the laminated structure of the laminated iron core 1202 is ideally completely radial. However, in the configuration of FIG. 12A, the lamination of the lamination yoke 1202 is not completely radial, so that an eddy current is generated by a part of the magnetic flux component. However, it is also difficult to produce a completely radial laminated iron core.

The second problem is that it is difficult to manufacture the magnet unit of the mover, which causes fluctuations in thrust. The mover magnet unit has a structure in which a plurality of annular partial magnets 1204 are inserted inside a cylindrical yoke 1205. An annular partial magnet 120 is attached to the cylindrical yoke 1205.
When inserting No. 4, it is difficult to set the tolerance of both. Although the positional accuracy is improved by reducing the tolerance, in this structure, the short annular partial magnet 1204 is replaced by the long cylindrical yoke 1.
Since it is necessary to insert the cylindrical magnet 1204 into the annular yoke 1205, it is difficult to gnaw, which makes it extremely difficult to insert the cylindrical magnet 1204 into the annular yoke 1205. Conversely, if the tolerance is increased, the annular partial magnet 12 to the cylindrical yoke 1205 is
Although the insertion of 04 is easy, the annular partial magnet 1204 cannot be accurately attached due to inclination and eccentricity, and the cylindrical yoke 1205 and the annular partial magnet 1203 are
Fixing becomes loose because it touches only one point. Further, the magnet and the iron are attracted to each other, and the magnets are also attracted and repelled, so that the assembly becomes more difficult. Deterioration of the assembly accuracy of the cylindrical magnet 1204 causes fluctuations in thrust, which in turn leads to deterioration of the accuracy of the linear motor. Although a method of assembling the constituent members of the cylindrical yoke 1205 and the annular partial magnet 1204 into small pieces has been studied, after all, in such a method, the situation in which the cylindrical surface is fixed to the cylindrical surface remains unchanged. , The number of man-hours increases, and it becomes more difficult to guarantee the assembly accuracy as a whole.
There is no fundamental solution.

The third problem is that it is difficult to pull out the conductor wire from the coil of the stator, which leads to a decrease in thrust. In the annular coil 1203, the conducting wire at the winding start portion is always on the inner peripheral side. In order to draw this out of the annular coil 1203, it is necessary to draw a lead wire once to the outer peripheral side and further to draw the outer periphery of the annular coil 1203 along the axial direction. Alternatively, it is necessary to provide a space such as a groove in the annular laminated iron core 1202 so that the conductive wire can crawl there. In the former case, a lead wire is run through the gap between the magnet 1204 and the coil 1203, and if the mechanical clearance between the magnet and the coil (the shortest distance between the magnet and the coil) is to be made constant, the magnet 1204 and the stator are laminated. The magnetic gap with the iron core 1202 must be increased, which reduces thrust. In the latter case,
Processing of the laminated core 1202 becomes more difficult, and the magnetic gap partially increases, resulting in a decrease in thrust.

Further, the conducting wire at the winding end portion of the coil 1203 is always the outer peripheral portion of the coil. Crawling the outer peripheral portion of the coil 1203 as it is also causes a decrease in thrust due to an increase in the magnetic gap. When the inner peripheral portion is guided once after being guided inside, the conducting wire at the winding start portion crawls the inner peripheral portion. However, there is a problem similar to the above, that is, it becomes difficult to process the laminated core and the thrust decreases due to an increase in the partial magnetic gap.

The present invention has been made in view of the above background, and an object thereof is to provide, for example, a linear motor having a structure that can be easily manufactured, and a stage apparatus and an exposure apparatus having the linear motor. Furthermore, additional purposes include, for example, reducing eddy currents in the yoke, reducing thrust fluctuations, facilitating extraction of the winding from the coil, and lowering the thrust due to the extraction of the winding. It can be mentioned to suppress. Other specific objects of the present invention will be described in the detailed description of the invention.

[0016]

The first aspect of the present invention is as follows.
The present invention relates to a linear motor having a stator and a mover, wherein the stator has a fixed yoke and a fixed coil arranged outside the fixed yoke, and the mover is arranged outside the fixed coil. A fixed magnet,
The fixed coil and the movable magnet each have a plurality of plane-shaped portions, the plurality of plane-shaped portions of the fixed coil are parallel to the axis of the fixed coil, and each plane-shaped portion of the fixed yoke is , Parallel to the planar shape portion of the fixed coil and the planar shape portion of the movable magnet corresponding thereto.

According to a preferred embodiment of the present invention, each plane-shaped portion of the fixed yoke has a laminated structure in which a large number of layers perpendicular to the plane-shaped portion and parallel to the axis of the stator are laminated. It is preferable to have.

A second aspect of the present invention relates to a linear motor having a stator and a mover, wherein the stator has a fixed yoke and a fixed coil arranged outside the fixed yoke. The mover has a movable magnet disposed outside the fixed coil, the movable magnet and the fixed yoke each have a plurality of rectangular parallelepiped-shaped portions, and the fixed coil has a plurality of parallel to the axis of the fixed coil. And each of the rectangular parallelepiped-shaped portions of the movable magnet is parallel to the corresponding rectangular parallelepiped-shaped portion of the fixed yoke and the corresponding planar-shaped portion of the fixed coil.

A third aspect of the present invention relates to a linear motor having a stator and a mover, wherein the stator is provided with a plurality of laminated bodies in which a large number of layers parallel to the axis of the stator are laminated. A fixed coil disposed outside or inside the fixed yoke, the mover includes a movable magnet disposed inside or outside the fixed coil, and the plurality of laminated layers of the fixed yoke. Each of the bodies has a rectangular parallelepiped shape or a non-arcuate shape similar to the shape, for example, at least one of the fixed coil and the movable magnet has a plurality of rectangular parallelepiped shaped portions, and each of the plurality of rectangular parallelepiped shaped portions ,
It corresponds to each laminated body of the fixed yokes, and is, for example, juxtaposed so as to be parallel to each laminated body.

According to a preferred embodiment of the present invention, the fixed yoke preferably has a polygonal column structure in which the plurality of plane-shaped portions or rectangular parallelepiped portions are supported by a supporting member.

According to a preferred embodiment of the present invention, the winding start portion and / or winding end portion of the fixed coil is one planar shape portion or rectangular parallelepiped portion and another planar shape portion or rectangular parallelepiped portion of the fixed coil. It is preferably located near the boundary with the portion. Further, according to a preferred embodiment of the present invention, the lead wire from the fixed coil has a portion near a boundary between one planar shape portion or a rectangular parallelepiped portion and another planar shape portion or a rectangular parallelepiped portion in the fixed coil. It is preferably arranged so as to pass along the axis of the stator.

According to a preferred embodiment of the present invention, each of the fixed yoke, the fixed coil, and the movable magnet preferably has four plane-shaped portions or rectangular parallelepiped portions. Alternatively, focusing on other points, each of the fixed yoke, the fixed coil, and the movable magnet has three
It is preferable to have two plane-shaped portions or rectangular parallelepiped portions. Alternatively, focusing on other points, the fixed yoke,
It is preferable that each of the fixed coil and the movable magnet has two plane-shaped portions or rectangular parallelepiped portions.

According to a preferred embodiment of the present invention, it is preferable that the supporting member for supporting the fixed yoke from the inside has a flow passage for flowing a refrigerant therein. Here, the cross-sectional shape of the flow path is preferably circular, for example. Alternatively, focusing on other points, it is preferable that a plurality of the flow paths are provided inside the support member. Alternatively, focusing on other points, it is preferable that the flow path has a plurality of grooves arranged radially around the axis of the stator. Alternatively, if attention is paid to other points, it is preferable that the cross-sectional shape of the flow path is a honeycomb shape.

According to a preferred embodiment of the present invention, it is preferable that the supporting member supporting the fixed yoke is made of metal. Alternatively, if attention is paid to other points, it is preferable that the support member that supports the fixed yoke is made of ceramic.

According to a preferred embodiment of the present invention, a partition is arranged between the fixed coil of the stator and the movable magnet of the mover, and a refrigerant is provided between the fixed coil and the partition. It is preferable that a flow path for flowing is formed. Here, the cross section of the partition wall may have a polygonal shape, a circular shape, or another shape.
According to a preferred embodiment of the present invention, it is preferable that the partition wall is made of an insulating material.

According to a preferred embodiment of the present invention, the stator has a plurality of partial fixed coils arranged side by side in the axial direction of the stator, and the linear motor has a plurality of partial fixed coils. It is preferable to further include a positioning member that positions each of the coils. Here, the positioning member has a comb tooth shape in a cross section cut in the axial direction of the fixed coil, and the partial fixed coil is positioned between the comb teeth forming the comb tooth shape. It is preferable.

Alternatively, the stator may have a plurality of partial fixed coils arranged side by side in the axial direction of the stator, and each partial fixed coil may be wound around a bobbin. Here, it is preferable that the bobbin has a cutout portion on its side plate. Further, it is preferable that the thickness of the side plate of the bobbin is larger than 1/2 of the diameter of the winding of the fixed coil.

According to a preferred embodiment of the present invention, it is preferable that a cover for preventing degassing is provided outside the fixed coil.

According to a preferred embodiment of the present invention, it is preferable that the movable element has a back yoke outside the movable magnet. It is preferable that the back yoke has a plurality of plane-shaped portions arranged in parallel with the plurality of plane-shaped portions of the movable magnet. The back yoke preferably has a hollow polygonal column structure formed by connecting the plurality of planar-shaped portions forming the back yoke. Alternatively, it is also preferable that the plurality of planar-shaped portions forming the bark yoke are supported by a supporting member.

The present invention exhibits its effect in any device using the above linear motor.

In view of this point, a stage device according to the fourth aspect of the present invention is characterized by including the above linear motor and a stage driven by the linear motor.

According to a preferred embodiment of the present invention, the stage device allows a mass element connected to a stator of the linear motor and a structure including the stator and the mass element to slide. It is preferable to further include a supporting surface plate. Here, it is preferable that the mass element is arranged so as to surround the stator and the mover of the linear motor. Further, it is preferable that the mass element has therein a flow path for flowing a refrigerant. Here, it is preferable that the movable element has a reflector on at least a surface facing the stator, and the mass element has an absorber on at least a surface facing the stator.

The exposure apparatus according to the fifth aspect of the present invention is
It is characterized in that it has the above stage device as a stage device for positioning a substrate or an original plate.

Further, another aspect of the present invention is characterized by including a step of exposing a wafer with a device pattern by the above exposure apparatus and a step of developing the exposed wafer.

[0035]

Preferred embodiments of the present invention will be described below with reference to the accompanying drawings.

[First Embodiment] FIGS. 1A to 1N are
It is a figure which shows the structure of the linear motor of the 1st Embodiment of this invention. Here, FIG. 1A is a sectional view taken along the line AA in FIG. 1B.
1B is a cross-sectional view of the linear motor cut along the axial direction (driving direction), FIG. 1C is a view of the linear motor seen from the axial direction (front view), and FIG. 1D is a view of the linear motor seen from the side (side view). Figure).

One of the features of this embodiment is that, instead of the cylindrical shape as in the conventional example, a structure having a substantially polygonal section (more specifically, a quadrangle) is adopted. More specifically, in the linear motor of this embodiment, in a cross section taken perpendicularly to the axis, a magnet row (movable magnet row) 105 of the mover, a back yoke 106 of the mover, and a coil row of the stator. A feature is that the (fixed coil array) 104 is formed in a substantially polygonal shape (more specifically, a quadrangular shape) instead of the annular shape.

First, the stator comprises a support member 101, a laminated yoke (laminated iron core) 103 and a coil 104. Specifically, the stator has a quadrangular prism-shaped support member 101 at the most center. The support member 101 includes a rectangular laminated yoke 103 and a coil array 1 on the outer surface thereof.
It functions as a base for supporting 04, and has a flow path 102 for passing a refrigerant therein.

Channel 102 formed in support member 101
Has, for example, a circular cross section, and a pipe (not shown) is connected to form a refrigerant circulation path. This refrigerant is used to cool the linear motor. Therefore,
It is desirable that the support member 101 be made of a material having excellent thermal conductivity.

Four plate-shaped laminated yoke members 103a as shown in FIG. 1E are attached to the four outer surfaces of the rectangular support member 101 without making surface contact with each other. Here, four plate-shaped laminated yoke members 103a
To prevent them from making surface contact with each other.
Each laminated yoke member 103 is supported by
It is not necessary to process the end of a with high precision. conventionally,
Since a cylindrical laminated yoke is formed by bringing the surfaces of the end portions (the end portions in the arc direction) of the laminated yoke members into contact with the surfaces of the end portions of the adjacent laminated yoke members to form a cylindrical laminated yoke, It was necessary to process the ends with high precision.

In this embodiment, the laminated yoke 1 having a rectangular cross section is formed by four plate-shaped laminated yoke members 103a.
03 is formed. The laminated yoke member 103a is shown in FIG.
As shown in FIG. 5, a plurality of rectangular (typically the same shape) magnetic thin plates whose surfaces are insulated are laminated to form a plate shape (planar shape). As described above, the laminated yoke member 103a that constitutes the laminated iron core 103 is extremely easy to manufacture because the rectangular thin plates are simply laminated and joined.
The laminated yoke member 103a is attached to the outer surface of the rectangular support member 101 such that a large number of thin plates of the laminated yoke member 103a are orthogonal to the outer surface and parallel to the drive shaft. In other words, a large number of laminated magnetic thin plates constituting the laminated yoke member 103a are arranged in parallel with a plane defined by the position of the magnetic thin plate at the center thereof and the central axis of the supporting member 101 or the laminated yoke 103. . As a result, the magnet array 105
The magnetic flux generated by circulates along the insulating layer of the thin plate, and the generation of eddy current can be suppressed to the minimum.

A coil array 104 composed of a plurality of partial coils is further provided along the axis on the outer side of the four plate-shaped laminated yoke members 103a attached to the outer surface of the rectangular support member 101. The coil array 104 includes four plane-shaped portions and has a substantially quadrilateral shape in a cross section cut in a direction orthogonal to the axis. Although the details will be described later, the winding start portion and winding end portion of the winding of each partial coil forming the coil array 104 are near the boundary between the flat surface portion and the flat surface portion.
In other words, it is provided at the corner of the coil 104 having a substantially quadrilateral shape.

As shown in FIG. 1F, the mover has four planar units composed of a magnet array 105 in which a plurality of magnets are arranged in a plane, and a planar back yoke provided on the back thereof. They are combined to form a rectangular shape in a plane cut in a direction orthogonal to the axis. The orientation of the poles of the plurality of magnets forming the plane magnet array 105 is so-called Halbach arrangement in this example so that an alternating magnetic field is generated on the surface of the magnets. Flat back yoke 106
It is extremely easy to manufacture a structure in which the flat magnet array 105 is formed. In the conventional example, an annular ring had to be inserted and positioned in a closed space called a cylinder, whereas in this embodiment, small flat magnets are arranged in rows on a large flat surface for positioning. do it. Therefore, since the space around the back yoke 106 can be used freely during manufacture, it is easy to use a jig or the like for accurately positioning the magnets, and the magnets can be positioned with high accuracy. Flat back yoke 106
It is also very easy to fabricate a square mover by combining four flat magnet arrays 105 formed on the top, and the magnets can be accurately positioned as a whole mover. As a result, it is possible to reduce the thrust variation due to the positioning error of the magnet.

The magnetic flux formed inside the magnet array 105 provided on the mover includes a component perpendicular to the surface of the magnet array 105 and a component parallel to the surface. Both of these components circulate through the plate-shaped laminated yoke member 103a of the stator. As described above, in each laminated yoke member 103a of the stator, a plurality of thin plates constituting the laminated yoke member 103a are installed perpendicularly to the surface (planar portion) of the magnet array 105. Both the magnetic flux perpendicular to the magnet plane formed by the magnet array 105 and the magnetic flux parallel to the magnet plane enter the thin plates, but since the thin plates are insulated, the eddy current loop is limited to the thin plane of the thin plates. Therefore, the generation of the eddy current can be minimized by the extremely simple and easily manufactured structure.

As described above, instead of the cylindrical shape as in the conventional example, the magnet array 105 and the back yoke 106 are formed into a substantially quadrilateral shape by combining the planar shapes, and the coil 104 is formed into a substantially quadrilateral shape. Technical problems, namely, difficulty in manufacturing the arc-shaped laminated iron core of the stator, insufficient suppression of eddy current, and difficulty in assembling the cylindrical yoke and the annular magnet of the mover, which results in the annular magnet. It is possible to solve all of the problems that the positioning accuracy is deteriorated and the thrust fluctuation is promoted.

Next, a description will be given of measures and effects for preventing the remaining problem of drawing the coil winding and the resulting reduction in thrust.

In this embodiment, as shown in FIG. 1L, the winding start portion 104c and the winding end portion of the coil row 104 having a substantially square shape (the flat portion 1) are formed.
04a and the plane portion 104a).
The winding start portion 104c is always located on the inner circumference side of the coil array 104, and the winding end portion 104d is always located on the outer circumference side.
It suffices to pull out a conducting wire from these vicinity along the axis. This is shown in FIG. 1M. According to this embodiment, since the winding start portion 104c and the winding end portion 104d of the winding wire are provided at the corners of the coil array 104 having a substantially quadrangular shape and the lead wire is pulled out along the axis from the corner portion, the lead wire is substantially The vicinity of the corner of the coil array 104 having a quadrangular shape is drawn out to the axial end of the coil array 104 along the axial direction. As is clear from FIG. 1M, neither the magnet array 105 nor the laminated yoke member 103a (laminated iron core 103) is present at the corner of the coil array 104 having a substantially rectangular shape. Therefore,
By passing the lead wire of the coil array 104 through this space, the lead wire is not arranged in the magnetic gap and a part of the laminated yoke 103a is not scraped, that is, the thrust of the coil array 104 is not reduced. Can be pulled out to the axial end of the coil array 104. That is, by arranging the four planar magnet rows 105 in a substantially quadrangular shape, making the stator coil row 104 into a substantially quadrangular shape conforming thereto, and making the laminated iron core 103 of the stator into a substantially quadrangular shape conforming thereto. It is possible to form a space at the corner of the coil array 104 without lowering the thrust, and use this space as a space for passing the lead wire of the coil array 104.

Further, as shown in FIG. 1N, it is possible to draw all the windings from the inner peripheral side of the coil array 104. In this case, it is necessary to guide the winding end portion located on the outer peripheral portion of the coil row 104 to the inner peripheral portion of the corner portion of the coil row 104. In contrast to FIG. 1N, it is also possible to guide the winding start portion of the inner peripheral portion to the outer peripheral portion and draw all the windings from the outer peripheral portion. In any of these methods, a space (inner peripheral portion or outer peripheral portion) of a corner portion of the square coil array 104 is used.

Next, a method of positioning a plurality of partial coils constituting the coil array 104 and insulation between the coil array 104 and the laminated yoke 103 will be described. Coil array 104
If the axial dimension of each of the partial coils constituting the above is not defined with high accuracy, the plurality of partial coils are simply formed by the support member 101 and the laminated yoke 103 (four plate-shaped laminated yoke members 103
If it is fitted into the rod-shaped member constructed in a), the dimensional error in the axial direction of each partial coil is accumulated. Therefore, it is necessary to position each partial coil. Further, it is necessary to insulate the coil array 104 (partial coil) from the laminated iron core 103 (laminated yoke 103a).

The first method for solving such a problem is as follows.
This is a method that uses a positioning plate. This is shown in FIGS. 1I and 1J. FIG. 1I shows a state after the plurality of coils 104 are assembled using the positioning plate 107. Figure 1J
Shows a method of making the structure shown in FIG. 1I. Unlike the structure shown in FIGS. 1A and 1B, the structure shown in FIG. 1I has a positioning plate 107 between the coil array 104 and each laminated yoke member 103a. The positioning plate 107 is a plate that has a width w1 that is approximately the same as the plane portion of the coil array 104 and that has a comb-shaped cross section that extends along the axial direction. Partial coils are arranged between the comb teeth in the comb shape. This positioning plate 107 is used for each plate-shaped laminated yoke member 1
03a and the coil array 104, and a total of four positioning plates 107 are used. Comb teeth 107b are formed on each positioning plate 107 with a high pitch accuracy, and the coil 10 is formed with a pitch accuracy of the comb teeth 107b.
Since 4 is positioned, the width dimension error of each partial coil constituting the coil array 104 does not accumulate and the position of each partial coil does not shift. The positioning plate 107 is made of an insulating material. Base portion 10 of positioning plate 107
7a insulates each partial coil of the coil array 104 from the plate-shaped laminated yoke member 103a, and the comb-teeth portion 1 of the positioning plate 107.
07b insulates the partial coils from each other. In this embodiment, since the four positioning plates 107 are arranged with their widthwise ends separated from each other, the coil array 104
The inner and outer circumferences of the corner spaces remain unchanged. Therefore, the positioning plate 107 does not prevent the winding of the coil array 104 from being drawn out by the method described above.

Next, a procedure for assembling the positioning plate and the coil array shown in FIG. 1J will be described. First, the partial coils forming the coil array 104 are arranged along the axial direction,
Temporarily position at the approximate position. Next, the two positioning plates 107 are inserted into the coil array 104 with their bases 107a facing each other. Next, the other two positioning plates 107 (not shown) are inserted into the coil array 104 in a state of being orthogonal to the previous two positioning plates 107 and facing the base 107a. Then, the four positioning members 107 are moved to the outside, and the partial coil is fitted between the comb teeth 107b. Finally, the supporting member 101 and the laminated yoke 103 (four plate-shaped laminated yoke members 103a)
The stator is assembled by inserting the rod-shaped member constituted by the above into the opening of the series of coil rows 104.

Another preferred positioning and insulation method is to use a coil bobbin. This is a method in which a bobbin 108 having high accuracy in the axial direction is prepared, and a conductive wire is wound around the bobbin 108 to manufacture each partial coil. The bobbin-equipped partial coils are arranged to form a coil array 104, and a rod-shaped member composed of the support member 101 and the laminated yoke 103 (four plate-shaped laminated yokes 103a) is inserted into this to assemble the stator. Although the error of the width (axial length) of the bobbin is accumulated, the error amount of the entire bobbin can be reduced by suppressing the error of the width of each bobbin. The bobbin 108 is also made of an insulating material and insulates the partial coils from each other and insulates the partial coils from the plate-shaped laminated yoke member 103a. The side plate provided on the bobbin 108 is provided with a notch at the corner.
This is to allow the conducting wires of the winding start portion and the winding end portion of each partial coil of the coil array 104 to crawl along the axis near the corners. The thickness w3 of the side plate provided on the bobbin 108 is 1/2 the diameter of the winding wire of the coil 104.
It has larger dimensions. This is a consideration in the case where it is desired to draw the lead wire connected to the winding start portion along the outer peripheral portion of the coil row 104 or to draw the lead wire at the winding end portion along the inner circumference of the coil row 104.
That is, in such a case, it is necessary to traverse the side surface of the coil array 104 from the inner peripheral portion toward the outer peripheral portion or from the outer peripheral portion toward the inner peripheral portion. At this time, the thickness of the side plate 108a of the coil bobbin is equal to the winding diameter in order to ensure a gap for one winding between the partial coils.
Need to be thicker than 1/2.

1G and 1H show a modification of the support member 101. Since the linear motor is cooled by providing a coolant circulation path inside the support member and circulating the coolant there, it is desirable that the support member be made of a material having excellent heat conduction, such as SiC or aluminum. Even if the support member 101 is made of a conductor such as aluminum, the magnetic flux of the magnet circulates in the plate-shaped laminated yoke 103a, so that it does not leak to the support member 101 and no eddy current is generated. When the supporting member 101 is made of SiC, complicated processing is difficult to perform, and therefore it is desirable to provide the simple flow channel 102 as shown in FIG. 1A. On the other hand, when the support member 101 is made of aluminum, a complicated cross-sectional shape can be made by, for example, extrusion processing. It is easy to increase the efficiency of heat transfer between the support member and the cooling medium by providing a channel having a groove) or a honeycomb-shaped channel as shown in FIG. 1H. Although there is no restriction on the material of the supporting member and the shape of the flow path, it is desirable that the outer shape has a flat surface portion that is suitable for the coil array 104 including the flat surface portion.

[Second Embodiment] FIGS. 2A and 2B.
FIG. 7 is a diagram showing a second embodiment of the present invention. In this embodiment, in addition to the configuration of the first embodiment, a partition wall 110 is provided between the magnet array 105 and the coil array 104, and a refrigerant is circulated between the partition wall 110 and the coil array 104. The cooling capacity of the coil array 104 is improved. The partition 110 may have a quadrangular shape as shown in FIG. 2A, a cylindrical shape as shown in FIG. 2B, or another shape.
The partition 110 is made of an insulating material such as ceramic or resin.

[Third Embodiment] FIG. 3 shows a uniaxial stage device according to a third embodiment of the present invention. In this 1-axis stage device, the substantially rectangular coil array 10
4 has the linear motor of the first embodiment.

A so-called T-shaped air slide 302 is fixed on the surface plate 303, and the stage 301 is supported along the T-shaped air slide 302 so as to be slidable in one axial direction. The linear motor 3 having the substantially rectangular coil 104 of the first embodiment on both sides of the stage 301.
00 is arranged. The mover of the linear motor 300 is coupled to the stage 301, and the stator is fixed to the surface plate 303 via columns 304 provided at the front and rear ends of the support member 101. The cooling medium circulates inside the stator of the linear motor 300 via the columns 304.

The stage device of this embodiment has an advantage that less heat is generated with the same thrust as compared with the case of using the conventional cylindrical linear motor. Further, in this stage, since the inside of the stator is cooled, the heat of the coil can be efficiently discharged. Further, in this stage device, since the linear motor 300 has higher positioning accuracy of the magnets and coils than the cylindrical linear motor of the conventional example, the thrust fluctuation is small, and the error with respect to the target can be reduced especially when traveling at a constant speed. There is an advantage.

[Fourth Embodiment] FIG. 4 is a diagram showing a linear motor according to a fourth embodiment of the present invention and a stage apparatus using the linear motor. In the first embodiment, the number of units of the planar magnet array 105 forming the mover is four, and the coil array 104 is substantially quadrangular, but in this embodiment, the unit of the planar magnet array 405 is used. The number is 3,
The coil 404 has a substantially triangular shape. Compared with the first embodiment, this structure is characterized by the space in the corner of the coil,
In particular, the outer space is large. For this reason,
As compared with the first embodiment, the number of windings that can be drawn out is increased. As a result, the number of partial coils that can be arranged is increased, and the stroke can be extended.

The structure of the stage device other than the linear motor 400 is the same as that of the third embodiment. In the application to the stage device, since the cross section of the mover has a substantially triangular shape, there is an advantage that the mover has higher rigidity and the lowest natural frequency is higher than that of the third embodiment.

[Fifth Embodiment] FIG. 5 is a diagram showing a linear motor according to a fifth embodiment of the present invention and a stage apparatus using the linear motor. In this embodiment, the number of units of the planar magnet array 505 forming the mover is two,
The coil 504 has a substantially oval shape. According to this embodiment, the space at the corners (ends) of the coil 504 is wider than that in the fourth embodiment, and a larger number of coils 504 can be provided than in the fourth embodiment. I can.

When the linear motor 500 is applied to the stage device, the rigidity of the mover is higher than that of the fourth embodiment, and the control performance is further improved.

[Sixth Embodiment] FIG. 6 is a view showing a linear motor according to a sixth embodiment of the present invention and a stage apparatus using the linear motor. In the fourth embodiment, the linear motor stator is fixed to the surface plate 303 via the support column 304, whereas in this embodiment, the stage 3
The left and right linear motor stators 01 are fixed to the mass element 610 via the columns 304. The mass element 610 forms an air slide (not shown) between the mass element 610 and the surface plate 303, and is guided by a roller 611 provided on a side surface thereof and slidably supported in one axial direction. When the stage 301 is accelerated by the linear motor 600, thrust for acceleration acts on the stage 301, but the reaction force is applied to the linear motor stator. However, since the linear motor stator is fixed to the slidable mass element 610, the stator and the mass element 610 are integrated with each other by the reaction force so that the stage 30 is
It is accelerated in the direction opposite to 1. The linear motor stator and the mass element 610 form a so-called passive counter, and do not give an acceleration reaction force or a change in the center of gravity to the surface plate 303.
This configuration is particularly effective when the surface plate 303 is supported by a vibration isolation table or the like, and since the vibration from the floor is insulated by the vibration isolation table, the attitude of the surface plate is not changed during acceleration or stage movement. Further improvement in accuracy can be achieved.

The roller 611 may be a mechanical one as shown in the figure, or a magnetic bearing or a linear motor may be used to apply a force in a non-contact manner so that lateral movement and rotation are regulated. .

[Seventh Embodiment] FIG. 7 is a diagram showing a linear motor and a stage device using the linear motor according to a seventh embodiment of the present invention.

This embodiment provides an improved example of the sixth embodiment. Also in this embodiment, the linear motor having a substantially rectangular cross section of the first embodiment is applied to the uniaxial stage, and the stator of the linear motor is integrally coupled with the mass element movable in one axis. Realizes a passive counter. The characteristic configuration of this embodiment is that the mass element 710 is arranged so as to surround the mover and the stator of the linear motor 700 and is coupled by the end plates 711 provided at the front and rear ends, so that the mover and the stator are surrounded. That is, the flow path 720 is formed in the mass element 710 disposed in the above, and the cooling medium is circulated through the flow path 720 to cool the mass element 710.

By arranging the mass element 710 so as to surround the mover, the center of gravity of the integral body of the stator and the mass element 710 can be substantially aligned with the thrust action line of the linear motor 700. As a result, when the integral body of the stator and the mass element 710 is accelerated by the reaction force in the direction opposite to the stage 301, the moment acting on the surface plate 303 from the integral body can be made almost zero. As a result, it is possible to prevent local deformation of the surface plate 303 near the sliding surface between the integrated body and the surface plate 303. Also, the mass element 71
Compared with the case where 0 is provided before and after the both ends of the stator, the axial length of the whole integrated body can be shortened.

Further, the mass element 710 is surrounded by the mass element 710, and the flow path 720 is provided inside the mass element 710 to circulate the refrigerant, so that the mass element 710 is separated by the heat partition wall. Can also function as. As a result, it is possible to almost completely remove the heat generated in the coil, which cannot be completely removed by the coolant provided inside the stator. Most of the heat generated by the coil is due to heat conduction to the laminated core 103 (plate-shaped laminated yoke 103a),
It is transmitted to the refrigerant inside the support member 101 via the support member 101. However, the heat also escapes to the air outside the coil. Then, since the atmosphere outside the coil fluctuates, the measurement accuracy deteriorates when the position of the stage 301 is controlled by an interferometer or the like. Therefore, in order to further recover the heat that has escaped to the air outside the coil, the entire stator is replaced by the mass element 71.
The inside of the wall is cooled by surrounding the wall with 0 and passing a refrigerant through the wall. As a result, most of the heat that cannot be completely removed by the refrigerant inside the stator is absorbed by the wall formed by the mass element 710 and is discharged to the outside by the refrigerant circulating inside.

The configuration of the second embodiment also has the function of recovering the heat that cannot be completely removed by the refrigerant inside the supporting member of the stator. However, in the second embodiment, since the partition wall is provided between the magnet and the coil and the refrigerant is circulated inside the partition wall, the magnetic gap becomes large and the heat generation when the same thrust is generated increases. From the viewpoint of not increasing the magnetic gap, it is desired to make the partition wall as thin as possible, but it cannot be so thin because the internal pressure of the refrigerant is applied to the partition wall. Also, especially when water is used as the refrigerant instead of oil, insulation between the coil and the refrigerant must be ensured. Further, since the partition wall and the magnet make relative motion, if the partition wall is formed of a conductor, an eddy current is generated and further heat is generated. That is, the material of the partition wall is limited in the second embodiment.
The cylindrical partition wall is easy to form with metal, but difficult to form with ceramic or resin. On the other hand, in this embodiment, since nothing is provided between the magnet and the coil, the heat generation of the coil when the same thrust is generated does not increase. Further, since it is not necessary to consider insulation between the coil and the refrigerant, the safety and reliability of the coil are improved.

As described above, the system in which the thermal partition wall is provided so as to surround the mover and the stator and the coolant is flown into the partition wall is as follows.
Compared to a system in which a partition wall is provided between the mover and the stator coil and a refrigerant is flown between the partition wall and the stator coil, 1) increase in the magnetic gap due to the partition wall and the refrigerant space, and 2) partition wall and the stator coil. There is an excellent effect that all of the problems of insulation with 3) and the problems of restrictions on the material of the partition wall can be solved.

[Eighth Embodiment] FIGS. 8A to 8C show
It is a figure which shows the structure of the biaxial stage apparatus of the 8th Embodiment of this invention. In this embodiment, a biaxial stage is constructed based on the construction of the uniaxial stage device of the seventh embodiment.

The linear motor represented by the first embodiment is of the movable magnet / fixed coil type, and has a feature that the stator is heavy because it has a structure in which the space density of the coils is increased. Further, in the sixth embodiment and the seventh embodiment, the mass element is further added to the stator, so that the weight becomes heavier. Therefore, based on the seventh embodiment, 2
In the case of configuring the axial stage, simply stacking the two uniaxial stages on top of each other causes a heavy linear motor to be mounted on the upper stage, and thus the mass of the structure carried by the lower stage increases considerably. Therefore, a so-called paddle stage configuration was adopted so that the transferred mass would not increase even when a linear motor with a heavy stator was used.

The basic structure of the stage is, as shown in FIG. 8C, an X beam 802 and a Y beam 80 guided by an X yaw guide 811 and a Y yaw guide 812 on a surface plate 810.
5 is provided, and an X beam 802 and a Y beam 80 are provided at the intersection.
5, a stage 801 which is slidably guided to each other by an air slide is arranged. This stage and 7th
The linear motor and the passive counter with cooling shown in the above embodiment are combined. The view seen from above is FIG. 8A, and the view seen from the front is FIG. 8B. Since the X-beam 802 is arranged on the Y-beam 805, the linear motor stator that drives the X-beam 802 has a surface plate 81 via a blade.
It is slidably supported with respect to zero. Y beam 805
In the linear motor stator for driving, the stator and the mass element itself provided so as to surround the stator are slidably supported on the surface plate 810 as in the seventh embodiment.

The basic effect of this embodiment is the seventh
However, since the heavy linear motor stator does not carry the linear motor, the carrying mass is the same for both the X drive system and the Y drive system, so linear motors of the same specifications can be used as the X drive system and the Y drive system. In addition, the heat source can be placed away from the stage, and it has a characteristic of being able to form a passive counter in two dimensions because it has a square cross-section.

[Ninth Embodiment] FIG. 9 is a view showing a stage device according to a ninth embodiment of the present invention. This embodiment is an improvement of the seventh embodiment and has a configuration particularly suitable for use in a vacuum.

The basic structure of this embodiment is almost the same as that of the seventh embodiment, but the mover 950 of the linear motor is used.
The feature is that the connecting portion 902 between the stage 901 and the stage 901 is provided at the corner of the mover 950 having a substantially quadrangular shape, and some vacuum handling processing is performed. First, mover 95
The connecting portion 902 between the stage 0 and the stage 901 is provided at the corner of the mover 950 in the same manner as in the seventh embodiment.
This is to further improve the ability to recover the heat that could not be completely removed by the refrigerant circulating inside the support member 961 of 60. In the seventh embodiment, the connecting portion between the mover and the stage is provided around the center of one side of the square mover. Therefore, it is not possible to provide a heat partition wall surrounding the mover and the stator at this connecting portion. Therefore, as shown in FIG. 7, the heat partition wall is cut at the center of one side of the substantially square mover. The structure will be changed. However, since the side (face) of the mover faces the side (face) of the coil, heat is easily transferred. In any environment, conduction is used in the atmosphere, and radiation is used in a vacuum, so that the heat generated by the coil is easily transferred to the side (face) of the mover. ing. Therefore, as shown in FIG. 9, it is desirable to provide a connecting portion 902 between the mover 950 and the stage 901 at the corner of the mover 950. As a result, the thermal partition wall also serving as the mass element can be almost completely faced to the side (flat surface portion) of the coil, so that the heat exhausting capability is improved.

The above description also applies to use in the atmosphere.

Next, some vacuum handling processes will be described. In this embodiment, a thin cover 963 is provided outside the coil 962. This is a cover 963
The purpose is to seal degassing from the inner coil 962 and the laminated yoke 964. A resin for maintaining the shape is used for the coil 962 and the laminated yoke 964. It is known that bringing these into a vacuum as they are reduces the degree of vacuum. Further, in order to transfer the heat generated by the coil 962 to the support member 961 and the refrigerant inside the support member 961 through the stacking yoke 964, a vacuum portion is provided between the coil 962 and the stacking yoke 964, and between the stacking yoke 964 and the support member 961. In some cases, a slight gap is intentionally provided in order to prevent the formation of the above, and a conductive material such as a resin having excellent thermal conductivity is filled therein. Degassing from here is also a problem. Therefore, a thin cover 9 is provided on the outside of the coil 962.
By providing 63, a member such as a coil and a yoke made of resin that cannot be normally brought into a vacuum can be used in a vacuum. Next, in order to make it difficult for the mover 950 to absorb heat due to radiation, for example, It is desirable that the surface of the mover be plated with Ni, chromium, or the like, or that a reflective material such as an aluminum foil be attached. It is desirable to perform such reflection processing on all of the portions facing the coil 962. That is, such a reflection process should be performed on all the inner surfaces of the mover 950.
On the other hand, it is desirable that the inner portion of the mass element 970 provided so as to surround the mover 950 and the stator 960 be subjected to, for example, black alumite treatment or be attached with an absorbent material such as a black plate. This allows the coil 96
Makes it easier to absorb the heat from the radiation from 2. The mass element 970 is supported on the surface plate 981 by the V guide 980.

[Tenth Embodiment] FIG. 10 is a diagram showing a stage device according to a tenth embodiment of the present invention.
In this embodiment, the rigidity of the mounting portion is improved by improving the ninth embodiment.

In the ninth embodiment, the mass element and partition wall 9 are used.
The coupling part 902 between the movable part 950 and the stage 901 is provided at the corner of the mover 950 with emphasis on the heat exhausting capability of the movable part 970. In this configuration, generally, the rigidity of the corner portion is likely to decrease, and therefore, the upper limit of the servo gain when the position servo is applied to the stage 901 is likely to be limited. Therefore, in this embodiment, for the purpose of improving the rigidity of the entire mover and, in turn, the rigidity of the entire stage, the frame member of the mover is made of a highly rigid material such as ceramic other than the yoke material. did.

In the first to ninth embodiments, the back yoke provided on the back side of the plane magnet array has both the function of circulating the magnetic flux of the magnet array and the function of forming the structure of the mover.
The back yoke may be thin when the magnet array is arranged in Halbach array. However, the back yoke had to be thickened in order to secure the rigidity of the structure. Therefore,
By separating the function of magnetic flux circulation from the function of the structure and adopting a material having higher rigidity than iron as the structure, the rigidity of the mover in the same thickness can be increased.

In this embodiment, the minimum necessary back yoke 1 for circulating the magnetic flux behind the magnet array 1003.
001 is provided, the magnet array 1001 and the thin back yoke 1001 are supported by the ceramic plate 1002, and four of them are combined to form a mover. As a result, the rigidity of the mover is improved, which in turn improves the servo performance of the stage.

[Eleventh Embodiment] FIG. 11 is a diagram showing a stage device according to an eleventh embodiment of the present invention.
This embodiment provides a modification of the tenth embodiment.

If the idea of separating the function of magnetic flux circulation from the function of the structure shown in the tenth embodiment is further advanced, the structure does not necessarily have to be a plane. One aspect of the present invention is that the magnet row of the mover and the laminated iron core of the stator are formed in a substantially rectangular parallelepiped shape or a substantially planar shape. The shape of the mover does not matter as long as this is achieved. First
In the ninth to ninth embodiments, since the back yoke also serves as the structure, the shape of the structure is also influenced by the shape of the magnet array. However, as in the tenth embodiment, by separating the function of magnetic flux circulation from the function of the structure, the degree of freedom in the shape of the structure is increased, and as shown in this embodiment, the annular The ceramic 1101 can be used as a structure of a mover. According to this embodiment, since the structure of the mover has an annular shape, the rigidity of the mover is further improved as compared with the tenth embodiment.

[Others] The linear motor represented by the above various embodiments or the stage using the linear motor is
For example, it can be used as a part of an apparatus that constitutes an exposure apparatus for manufacturing a device such as a semiconductor device or a micro device, for example, a wafer stage or a reticle stage.

Next, an embodiment of the scanning type exposure apparatus in which the stage using the linear motor of any of the above-described embodiments is mounted as a reticle stage or a wafer stage will be described with reference to FIG.

The reticle stage base 71A supporting the reticle stage 73 is the wafer stage 9 of the exposure apparatus.
The linear motor base 71B is supported by a support frame 90 that is directly fixed to the floor surface F separately from the base 92, while being integral with a frame 94 that stands upright on the base 92 that supports 3. Further, exposure light for exposing the wafer W on the wafer stage 93 through the reticle on the reticle stage 73 is generated from the light source device 95 shown by a broken line.

The frame 94 supports the reticle stage base 71 A and also supports the projection optical system 96 between the reticle stage 73 and the wafer stage 93. Since the stator 75 of the linear motor that accelerates and decelerates the reticle stage 73 is supported by the support frame 90 that is separate from the frame 94, the reaction force of the driving force of the linear motor of the reticle stage 73 is transmitted to the wafer stage 93. As a disturbance of the driving unit, or the projection optical system 9
There is no danger of vibrating the 6.

The wafer stage 93 is scanned by the drive unit in synchronization with the reticle stage 73. During scanning of the reticle stage 73 and the wafer stage 93, their positions are continuously detected by the interferometers 97 and 98, respectively, and are fed back to the drive units of the reticle stage 73 and the wafer stage 93, respectively. As a result, the scanning start positions of the both can be accurately synchronized, and the scanning speed of the constant speed scanning region can be controlled with high accuracy.

Next, an embodiment of a method for manufacturing a semiconductor device using the above-mentioned exposure apparatus will be described. FIG. 14 shows a flow of manufacturing semiconductor devices (semiconductor chips such as IC and LSI, liquid crystal panels, CCDs, thin film magnetic heads, micromachines, etc.). In step S11 (circuit design), a semiconductor device circuit is designed. In step S12 (mask manufacturing), a mask having the designed circuit pattern is manufactured. On the other hand, in step S13 (wafer manufacturing), a wafer that is a substrate is manufactured using a material such as silicon. Step S14 (wafer process) is called a pre-process, and an actual circuit is formed on the wafer by the lithography technique using the mask and the wafer prepared above. The next step S15 (assembly) is called a post process,
This is a process of forming a semiconductor chip using the wafer manufactured by 14. The process includes an assembly process (dicing, bonding), a packaging process (chip encapsulation), and the like. In step S16 (inspection), step S15
Inspections such as an operation confirmation test and a durability test of the semiconductor device manufactured in 1. are performed. Through these steps, the semiconductor device is completed and shipped (step S17).

FIG. 15 shows the detailed flow of the wafer process. In step S21 (oxidation), the surface of the wafer is oxidized. In step S22 (CVD), an insulating film is formed on the wafer surface. In step S23 (electrode formation), electrodes are formed on the wafer by vapor deposition. Step S2
In 4 (ion implantation), ions are implanted in the wafer. In step S25 (resist processing), a photosensitive agent is applied to the wafer. In step S26 (exposure), the circuit pattern of the mask is printed and exposed on the wafer by the above-described exposure apparatus. In step S27 (development), the exposed wafer is developed. In step S28 (etching), parts other than the developed resist image are scraped off. In step S29 (resist stripping), the resist that has become unnecessary after etching is removed. By repeating these steps, multiple circuit patterns are formed on the wafer. By using the manufacturing method of this embodiment, a highly integrated semiconductor device can be manufactured.

[0091]

According to the present invention, there are provided, for example, a linear motor having a structure that can be easily manufactured, and a stage apparatus and an exposure apparatus having the linear motor.

[Brief description of drawings]

FIG. 1A,

FIG. 1B,

FIG. 1C]

[FIG. 1D]

[FIG. 1E],

[FIG. 1F],

[FIG. 1G],

[FIG. 1H],

FIG. 1I,

[FIG. 1J]

[FIG. 1K],

[FIG. 1L],

[Figure 1M]

FIG. 1N is a diagram showing a configuration of a linear motor according to the first embodiment of the present invention.

[FIG. 2A]

FIG. 2B is a diagram showing a configuration of a linear motor according to a second embodiment of the present invention.

FIG. 3 is a diagram showing a uniaxial stage device according to a third embodiment of the present invention.

FIG. 4 is a diagram showing a linear motor and a stage device using the linear motor according to a fourth embodiment of the present invention.

FIG. 5 is a diagram showing a linear motor and a stage device using the linear motor according to a fifth embodiment of the present invention.

FIG. 6 is a diagram showing a linear motor and a stage device using the linear motor according to a sixth embodiment of the present invention.

FIG. 7 is a diagram showing a linear motor according to a seventh embodiment of the present invention and a stage device using the linear motor.

FIG. 8A]

FIG. 8B]

FIG. 8C is a diagram showing the configuration of a biaxial stage device according to an eighth embodiment of the present invention.

FIG. 9 is a diagram showing a stage device according to a ninth embodiment of the present invention.

FIG. 10 is a diagram showing a stage device according to a tenth embodiment of the present invention.

FIG. 11 is a diagram showing a stage device according to an eleventh embodiment of the present invention.

FIG. 12A]

FIG. 12B is a diagram showing a conventional linear motor.

FIG. 13 is a diagram showing an example of an exposure apparatus of the present invention.

FIG. 14 is a flowchart showing an example of a device manufacturing method of the present invention.

15 is a flowchart showing the contents of the wafer process of FIG.

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) H02K 9/19 H02K 41/02 C 41/02 H01L 21/30 503A F term (reference) 2F078 GA01 GA12 GB01 5F046 CC03 CC18 5H002 AB06 AD02 AD04 5H609 BB03 BB08 PP02 PP06 PP08 QQ08 QQ12 QQ14 QQ18 RR37 RR43 5H641 BB03 BB06 BB14 GG02 GG05 GG06 GG12 HH03 HH12 JA05 JB04

Claims (40)

[Claims] 1. A linear motor having a stator and a mover, wherein the stator has a fixed yoke and a fixed coil arranged outside the fixed yoke, and the mover is the fixed stator. A movable magnet disposed outside the coil, wherein the fixed yoke, the fixed coil and the movable magnet are
Each of the fixed coils has a plurality of planar shaped portions, the plurality of planar shaped portions of the fixed coil are parallel to the axis of the fixed coil, and each planar shaped portion of the fixed yoke has a corresponding planar surface of the fixed coil. A linear motor, which is parallel to a shaped portion and a planar shaped portion of the movable magnet. 2. The flat-shaped portion of each of the fixed yokes has a laminated structure in which a large number of layers that are perpendicular to the flat-shaped portion and parallel to the axis of the stator are stacked. The described linear motor. 3. A linear motor having a stator and a mover, wherein the stator has a fixed yoke and a fixed coil arranged outside the fixed yoke, and the mover is the fixed stator. A movable magnet disposed outside the coil, the movable magnet and the fixed yoke each have a plurality of rectangular parallelepiped portions, and the fixed coil has a plurality of planar shaped portions parallel to the axis of the fixed coil. The linear motor is characterized in that each rectangular parallelepiped portion of the movable magnet is parallel to the corresponding rectangular parallelepiped portion of the fixed yoke and each planar planar portion of the fixed coil. 4. A linear motor having a stator and a mover, wherein the stator includes a plurality of laminated bodies in which a plurality of layers parallel to the axis of the stator are laminated, and the fixed yoke. A fixed coil disposed outside or inside the fixed coil, the mover includes a movable magnet disposed outside or inside the fixed coil, and each of the plurality of stacked bodies of the fixed yoke has a rectangular parallelepiped shape. Alternatively, the shape is a non-arcuate shape similar to the shape, for example, at least one of the fixed coil and the movable magnet has a plurality of rectangular parallelepiped-shaped portions, and each of the plurality of rectangular parallelepiped-shaped portions includes the fixed yoke. A linear motor corresponding to each laminated body and arranged in parallel with each other, for example. 5. The fixed yoke according to claim 1, wherein the plurality of plane-shaped portions or rectangular parallelepiped portions are supported by a supporting member and have a polygonal columnar structure. Linear motor. 6. The winding start portion of the fixed coil is located near a boundary between one plane-shaped portion or a rectangular parallelepiped portion and another plane-shaped portion or a rectangular parallelepiped portion in the fixed coil. The linear motor according to claim 5. 7. The winding end portion of the fixed coil is located near a boundary between one planar-shaped portion or a rectangular parallelepiped portion and another planar-shaped portion or a rectangular parallelepiped portion in the fixed coil. The linear motor according to claim 5. 8. A winding start portion and a winding end portion of the fixed coil are located near a boundary between one plane-shaped portion or a rectangular parallelepiped portion and another plane-shaped portion or a rectangular parallelepiped portion of the fixed coil. Claim 1
The linear motor according to claim 5. 9. The lead wire from the fixed coil comprises:
7. The fixed coil is arranged so as to pass along the axis of the stator in the vicinity of the boundary between one plane-shaped portion or a rectangular parallelepiped portion and another plane-shaped portion or a rectangular parallelepiped portion in the fixed coil. The linear motor according to claim 8. 10. The linear according to claim 1, wherein each of the fixed yoke, the fixed coil, and the movable magnet has four plane-shaped portions or rectangular parallelepiped portions. motor. 11. The linear according to claim 1, wherein each of the fixed yoke, the fixed coil, and the movable magnet has three plane-shaped portions or rectangular parallelepiped portions. motor. 12. The linear according to claim 1, wherein each of the fixed yoke, the fixed coil, and the movable magnet has two plane-shaped portions or rectangular parallelepiped portions. motor. 13. The linear member according to claim 1, wherein the support member that supports the fixed yoke from the inside has a flow path for flowing a refrigerant therein. motor. 14. The linear motor according to claim 13, wherein the flow passage has a circular cross-sectional shape. 15. The linear motor according to claim 13, wherein a plurality of the flow paths are provided inside the support member. 16. The linear motor according to claim 13, wherein the flow path has a plurality of grooves radially arranged around an axis of the stator. 17. The linear motor according to claim 13, wherein the flow path has a honeycomb shape in cross section. 18. The linear motor according to claim 1, wherein the support member that supports the fixed yoke is made of metal. 19. The linear motor according to claim 1, wherein a support member that supports the fixed yoke is made of ceramic. 20. A partition wall is arranged between the fixed coil of the stator and the movable magnet of the mover, and a flow path for flowing a refrigerant is formed between the fixed coil and the partition wall. The linear motor according to any one of claims 1 to 19, characterized in that 21. The linear motor according to claim 20, wherein the partition wall has a polygonal cross section. 22. The linear motor according to claim 20, wherein the partition wall has a circular cross section. 23. The linear motor according to claim 20, wherein the partition wall is made of an insulating material. 24. The stator has a plurality of partial fixed coils arranged side by side in the axial direction of the stator, and the linear motor further has a positioning member for positioning the plurality of partial fixed coils, respectively. The linear motor according to any one of claims 1 to 23, characterized in that. 25. The positioning member has a comb tooth shape in a cross section cut in the axial direction of the fixed coil, and the partial fixed coil is positioned between the comb teeth forming the comb tooth shape. The linear motor according to claim 24, wherein the linear motor is provided. 26. The stator according to claim 1, further comprising a plurality of partial fixed coils arranged side by side in the axial direction of the stator, each partial fixed coil being wound on a bobbin. The linear motor according to claim 23. 27. The linear motor according to claim 26, wherein the bobbin has a cutout portion on a side plate thereof. 28. The linear motor according to claim 26, wherein a thickness of the side plate of the bobbin is greater than ½ of a diameter of a winding of the fixed coil. 29. The linear motor according to claim 1, further comprising a degassing prevention cover outside the fixed coil. 30. The linear motor according to claim 1, wherein the mover has a back yoke outside the movable magnet. 31. The linear motor according to claim 30, wherein the back yoke has a plurality of plane-shaped portions that are arranged in parallel with the plurality of plane-shaped portions of the movable magnet, respectively. 32. The linear motor according to claim 31, wherein the back yoke has a hollow polygonal column structure formed by connecting the plurality of planar-shaped portions forming the back yoke. 33. The linear motor according to claim 31, wherein the plurality of plane-shaped portions forming the bark yoke are supported by a supporting member. 34. Any one of claims 1 to 31.
A linear motor according to claim 1, and a stage driven by the linear motor, a stage device. 35. A mass element connected to a stator of the linear motor, and a surface plate slidably supporting a structure including the stator and the mass element. Item 34. The stage device according to Item 34. 36. The stage apparatus according to claim 35, wherein the mass element is arranged so as to surround a stator and a mover of the linear motor. 37. The stage apparatus according to claim 36, wherein the mass element has therein a flow path for flowing a refrigerant. 38. The method according to claim 35, wherein the mover has a reflector on at least a surface facing the stator, and the mass element has an absorber on at least a surface facing the stator. The described stage device. 39. One or more of the stage devices according to claim 34, wherein a substrate and / or
Alternatively, an exposure apparatus having a stage device for positioning the original plate. 40. A device manufacturing method comprising: a step of exposing a wafer with a device pattern by the exposure apparatus according to claim 39; and a step of developing the exposed wafer.