JP2003115593A5 - - Google Patents

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Publication number
JP2003115593A5
JP2003115593A5 JP2001309107A JP2001309107A JP2003115593A5 JP 2003115593 A5 JP2003115593 A5 JP 2003115593A5 JP 2001309107 A JP2001309107 A JP 2001309107A JP 2001309107 A JP2001309107 A JP 2001309107A JP 2003115593 A5 JP2003115593 A5 JP 2003115593A5
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Japan
Prior art keywords
channel region
scanning line
electro
optical device
gate electrode
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Pending
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JP2001309107A
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Japanese (ja)
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JP2003115593A (en
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Priority to JP2001309107A priority Critical patent/JP2003115593A/en
Priority claimed from JP2001309107A external-priority patent/JP2003115593A/en
Publication of JP2003115593A publication Critical patent/JP2003115593A/en
Publication of JP2003115593A5 publication Critical patent/JP2003115593A5/ja
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Claims (11)

基板上に、画素電極と、
該画素電極に電気的に接続される半導体層と、該半導体層のチャネル領域に対応して、該半導体層の上方に第 1 の絶縁膜を介して配置される島状のゲート電極と、
該半導体層の下方に第2の絶縁膜を介して配置される走査線と、
前記ゲート電極と前記走査線とを電気的に接続する接続部と、
を備える電気光学装置であって、
前記チャネル領域は、その長さ方向に交わる断面内で高低差を有し、
前記ゲート電極は、前記断面内で前記チャネル領域の高低差に対応する高低差を有することを特徴とする電気光学装置。
A pixel electrode on the substrate;
A semiconductor layer electrically connected to the pixel electrode, an island-shaped gate electrode disposed above the semiconductor layer via a first insulating film corresponding to a channel region of the semiconductor layer ,
A scanning line disposed below the semiconductor layer via a second insulating film;
A connection part for electrically connecting the gate electrode and the scanning line;
An electro-optical device comprising:
The channel region has a height difference in a cross section intersecting in the length direction thereof,
The electro-optical device, wherein the gate electrode has a height difference corresponding to a height difference of the channel region in the cross section.
前記ゲート電極は、光吸収性の導電膜からなることを特徴とする請求項1に記載の電気光学装置。  The electro-optical device according to claim 1, wherein the gate electrode is made of a light-absorbing conductive film. 前記ゲート電極は、相異なる複数の材料からなる積層構造を有することを特徴とする請求項2に記載の電気光学装置。  The electro-optical device according to claim 2, wherein the gate electrode has a stacked structure made of a plurality of different materials. 前記半導体層は、前記チャネル領域に隣接するチャネル隣接領域においても前記断面内で高低差を有することを特徴とする請求項1乃至3のいずれか一項に記載の電気光学装置。  4. The electro-optical device according to claim 1, wherein the semiconductor layer has a height difference in the cross section even in a channel adjacent region adjacent to the channel region. 5. 基板上に、画素電極と、該画素電極に電気的に接続された薄膜トランジスタと、該薄膜トランジスタに電気的に接続された走査線とを備えた電気光学装置であって、
前記薄膜トランジスタは、
その長さ方向に交わる断面内で高低差を有するチャネル領域を含む半導体層と、
前記チャネル領域にゲート絶縁膜を介して対向配置されるとともに前記走査線の一部からなり又は前記走査線に電気的に接続されており、前記断面内で前記チャネル領域の高低差に対応する高低差を有するゲート電極と
を備え、
前記薄膜トランジスタは、前記チャネル領域の下側に他のゲート絶縁膜を介して、前記ゲート電極と電気的に接続された予備ゲート電極を更に備えており、
該予備ゲート電極も、前記断面内で前記半導体層の高低差に対応する高低差を有することを特徴とする電気光学装置。
An electro-optical device comprising a pixel electrode, a thin film transistor electrically connected to the pixel electrode, and a scanning line electrically connected to the thin film transistor on a substrate,
The thin film transistor
A semiconductor layer including a channel region having a height difference in a cross section intersecting the length direction;
The channel region is opposed to the channel region through a gate insulating film and is formed of a part of the scanning line or electrically connected to the scanning line, and corresponds to the height difference of the channel region in the cross section. A gate electrode having a difference,
The thin film transistor further includes a preliminary gate electrode electrically connected to the gate electrode via another gate insulating film below the channel region,
The electro-optical device , wherein the preliminary gate electrode also has a height difference corresponding to a height difference of the semiconductor layer in the cross section .
基板上に、画素電極と、該画素電極に電気的に接続された薄膜トランジスタと、該薄膜トランジスタに電気的に接続された走査線とを備えた電気光学装置であって、
前記薄膜トランジスタは、
その長さ方向に交わる断面内で高低差を有するチャネル領域を含む半導体層と、
前記チャネル領域にゲート絶縁膜を介して対向配置されるとともに前記走査線の一部からなり又は前記走査線に電気的に接続されており、前記断面内で前記チャネル領域の高低差に対応する高低差を有するゲート電極と
を備え、
前記走査線に並行して設けられる予備走査線と、該予備走査線の一部からなり又は該予備走査線に接続されているとともに前記チャネル領域の下側に他のゲート絶縁膜を介した予備ゲート電極とを更に備え、
該予備ゲート電極も、前記断面内で前記半導体層の高低差に対応する高低差を有することを特徴とする電気光学装置。
An electro-optical device comprising a pixel electrode, a thin film transistor electrically connected to the pixel electrode, and a scanning line electrically connected to the thin film transistor on a substrate,
The thin film transistor
A semiconductor layer including a channel region having a height difference in a cross section intersecting the length direction;
The channel region is opposed to the channel region through a gate insulating film and is formed of a part of the scanning line or electrically connected to the scanning line, and corresponds to the height difference of the channel region in the cross section. A gate electrode having a difference,
A preliminary scanning line provided in parallel with the scanning line, and a preliminary scanning line which is formed of a part of the preliminary scanning line or connected to the preliminary scanning line and has another gate insulating film below the channel region A gate electrode;
The electro-optical device , wherein the preliminary gate electrode also has a height difference corresponding to a height difference of the semiconductor layer in the cross section .
前記予備ゲート電極は、相異なる複数の材料からなる積層構造を有することを特徴とする請求項5または6のいずれか一方に記載の電気光学装置。  The electro-optical device according to claim 5, wherein the preliminary gate electrode has a laminated structure made of a plurality of different materials. 前記長さ方向から前記チャネル領域を臨んだ該チャネル領域の形状は、凹形状を含むことを特徴とする請求項1乃至のいずれか一項に記載の電気光学装置。Wherein the shape of said channel region that faces the channel region from the length direction, the electro-optical device according to any one of claims 1 to 7, characterized in that it comprises a concave shape. 前記長さ方向から前記チャネル領域を臨んだ該チャネル領域の形状は、凸形状を含むことを特徴とする請求項1乃至のいずれか一項に記載の電気光学装置。Wherein the shape of said channel region that faces the channel region from the length direction, the electro-optical device according to any one of claims 1 to 7, characterized in that it comprises a convex shape. 基板上に、画素電極と、
該画素電極に電気的に接続される半導体層と、該半導体層のチャネル領域に対応して該半導体層の上方に第 1 の絶縁膜を介して配置される島状のゲート電極と、
該半導体層の下方に第2の絶縁膜を介して配置される走査線と、
前記ゲート電極と前記走査線とを電気的に接続する接続部と、
を備えることを特徴とする電気光学装置。
A pixel electrode on the substrate;
A semiconductor layer electrically connected to the pixel electrode; an island-shaped gate electrode disposed above the semiconductor layer via a first insulating film corresponding to a channel region of the semiconductor layer ;
A scanning line disposed below the semiconductor layer via a second insulating film;
A connection part for electrically connecting the gate electrode and the scanning line;
An electro-optical device comprising:
請求項1乃至10のいずれか一項に記載の電気光学装置を具備することを特徴とする電子機器。  An electronic apparatus comprising the electro-optical device according to claim 1.
JP2001309107A 2001-10-04 2001-10-04 Electro-optic device, manufacturing method, electronic device, and thin film transistor Pending JP2003115593A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001309107A JP2003115593A (en) 2001-10-04 2001-10-04 Electro-optic device, manufacturing method, electronic device, and thin film transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001309107A JP2003115593A (en) 2001-10-04 2001-10-04 Electro-optic device, manufacturing method, electronic device, and thin film transistor

Publications (2)

Publication Number Publication Date
JP2003115593A JP2003115593A (en) 2003-04-18
JP2003115593A5 true JP2003115593A5 (en) 2005-06-23

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Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012069842A (en) * 2010-09-27 2012-04-05 Hitachi Displays Ltd Display device
US8878288B2 (en) * 2011-04-22 2014-11-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
CN102956649A (en) * 2012-11-26 2013-03-06 京东方科技集团股份有限公司 Array baseplate, manufacturing method of array baseplate and display device
US20140374744A1 (en) * 2013-06-19 2014-12-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
CN103411101A (en) * 2013-07-31 2013-11-27 昆山维金五金制品有限公司 Liquid crystal display screen support
JP2015119175A (en) * 2013-11-15 2015-06-25 株式会社半導体エネルギー研究所 Semiconductor device and display device
TWI695513B (en) * 2015-03-27 2020-06-01 日商半導體能源研究所股份有限公司 Semiconductor device and electronic device
JP6920785B2 (en) * 2015-08-19 2021-08-18 株式会社ジャパンディスプレイ Display device

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