JP2003106828A - Method for measuring flatness in thin component - Google Patents

Abstract

PROBLEM TO BE SOLVED: To manage the flatness in thin components by a numerical value, measure the flatness without any contact, and reduce man-hours required for measurement when measuring the flatness in the thin components. SOLUTION: A measuring apparatus 3 in an optical method having a light source section 3b and a light reception section 3b is installed so that dimensions in a height direction can be measured. A stage 2 where the thin components 1 are placed is passed between the light source section 3a and the light reception section 3b, thus measuring flatness by the projected shape of the thin components 1 including the stage 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for measuring flatness of a thin-walled component such as a shutter component of a camera which requires precision of flatness.

[0002]

2. Description of the Related Art As a thin-walled component required to have a high degree of flatness, there is a shutter blade used around a shutter of a camera. FIG. 1 shows an example of the shutter blades 1. The shutter blades 1 are used as a set of several blades and are opened and closed when the shutter of the camera is released. This shutter blade 1
Is manufactured into a predetermined shape by pressing a thin sheet of polyester or the like. Typical parts are material thickness 8
The specifications are 0 μm and flatness tolerance of 50 μm. If the precision of the flatness is poor, this part may cause malfunctions around the shutter and may cause light leakage.The secondary external parts that can be seen through the lens are not affected by scratches or dirt. This is because it becomes a good product.

For the measurement of the flatness of the shutter blade, the shutter blade is manually supplied by using an inspection tool having a gap equal to the dimension obtained by adding the flatness tolerance to the material thickness.
Good or defective flatness is discriminated by whether or not it passes through the gap of the inspection tool.

On the other hand, a three-dimensional measuring machine for measuring a three-dimensional shape is also used for the measurement.

Further, in Japanese Utility Model Laid-Open No. 6-76811,
A flatness measuring machine for measuring flatness is disclosed. Figure 5
Indicates this flatness measuring machine, and is equipped with a surface plate 101 on which an object to be measured 109 is placed. A float table 102 having a height detecting sensor 107 is movably arranged on the surface plate, and a video camera 103 is provided on the upper surface of the height detecting sensor 107.
Is equipped with.

In this apparatus, the float table 102 is moved on the surface plate 101, and the height signal of the object to be measured 109 detected by the height detecting sensor 107 and the image of the measuring point by the image machine 103 are subjected to image processing. The flatness is measured by the position signal on the plane processed by the device. Here, as the height detecting sensor 107, either a contact type sensor or a non-contact type sensor may be used.
The height signal of the DUT 109 detected in 07 and the video camera 1
The regression plane is obtained from the data obtained from the position signal on the plane obtained by processing the image of the measurement point 03 by the image processing apparatus, and the flatness is obtained from the difference between the maximum value and the minimum value.

[0007]

However, in the measuring method using the inspection tool having a gap, the quality of the flatness is determined only by whether or not the inspection tool passes through the gap. Cannot be managed numerically. Further, the surface of the work may be scratched in the gap due to friction or static electricity when passing through the gap. At the same time, there is a problem that even a work that is caught within the clearance due to friction or static electricity and is within the tolerance of flatness is judged as a defective product. Further, since the work is manually supplied, if the work is pushed into the gap, there is a possibility that a defective product may be erroneously determined to be a good product.

Further, in the method using the three-dimensional measuring machine, since the three-dimensional measurement is performed, even if only the plane is measured, many additional functions are required, the apparatus itself is large-scale, and a large number of man-hours are required for the measurement. There is.

In the method of using the flatness measuring machine disclosed in Japanese Utility Model Laid-Open No. 6-76811, it is necessary to scan the entire surface of the workpiece two-dimensionally, and therefore the number of man-hours required for measurement is the same as in the case of the three-dimensional measuring machine. There is. In particular, when the contact type sensor is used, the shutter blade may be scratched on the surface because the material is soft.

The present invention has been made in consideration of the above-mentioned conventional problems, and it is possible to manage the flatness by a numerical value and to perform non-contact measurement, thereby reducing the number of man-hours required for measurement. It is an object of the present invention to provide a method of measuring flatness of a thin-walled component that can be manufactured.

[0011]

In order to achieve the above object, the flatness measuring method of the thin-walled component according to the invention of claim 1 uses a measuring device of an optical method having a light projecting portion and a light receiving portion. It is installed so that the dimension in the direction can be measured, the stage on which the thin-walled component is placed is passed between the light projecting unit and the light-receiving unit, and the flatness is measured by the projected shape of the thin-walled component including the stage. Characterize.

As described above, by measuring the projected shape of the thin-walled component including the stage, it is not necessary to scan the entire surface of the thin-walled component in a two-dimensional manner, and the one-dimensional scanning in a state viewed from the side is performed. It can be easily measured just by.

The invention of claim 2 is the flatness measuring method for a thin-walled component according to claim 1, wherein the thin-walled component is mounted on a stage and the thin-walled component is mounted on the stage in an inverted shape. It is characterized in that both are passed between the light projecting section and the light receiving section for measurement.

By measuring the state of the front and back inversion as described above, the large measured value is taken as the flatness. As a result, the flatness can be accurately measured even when the thin-walled component is deformed in different directions.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described with reference to FIGS.

The measurement is carried out using a measuring device 3 which uses a commercially available optical method. The measuring device 3 is arranged such that the light projecting portion 3a and the light receiving portion 3b are opposed to each other with a space therebetween,
Measurement is performed by moving the stage 2 in the reciprocating direction indicated by arrow A between the light projecting unit 3a and the light receiving unit 3b.

The shutter blade 1, which is a thin component, is placed on the stage 2. The stage 2 is installed so that the optical axes of the light projecting section 3a and the light receiving section 3b pass in the left-right direction of the stage 2. The stage 2 on which the shutter blade 1 is mounted is
It is configured to be transported in the front-rear direction (direction of arrow A) by a drive device such as a single-axis robot (not shown).

The flatness of the upper surface of the stage 2 is machined to 5 μm or less, and the feeding accuracy of the upper surface of the stage 2 in the carrying direction and the inclination accuracy in the optical axis direction are adjusted to 5 μm or less.
In this case, it is preferable that each accuracy is 1 μm or less depending on the part to be measured.

In this apparatus, the stage 2 on which the shutter blades 1 are mounted is conveyed by a driving device (not shown),
When passing between the light projecting section 3a and the light receiving section 3b of the measuring device 3, the dimension of the shutter blade 1 in the thickness direction is measured together with the stage 2. In the standard measuring device 3 on the market,
Since the dimension of the shutter blade 1 in the thickness direction (material thickness 80 μm + flatness variation) cannot be detected by itself, the measuring device 3
As shown in FIG. 3, by using the measurement function that is standardly equipped with, the upper surface edge G of the stage 2 is used as a reference, and the dimension S of the shutter blade 1 in the thickness direction is measured in a form such as a displacement amount. taking measurement.

Therefore, the measured value is a value obtained by adding variation in flatness to the material thickness. As a result, it is not necessary to two-dimensionally scan the entire surface of the shutter blade 1, and the measurement can be easily performed by only one-dimensional scanning in a state viewed from the side. If it is only necessary to determine whether the flatness is good or bad, it is possible to make a determination simply by looking at the maximum measured value. Further, by plotting the measured values, the surface shape of the shutter blade 1 viewed from the side can be visually recognized.

Next, an actual measurement procedure will be described. Since the position where the optical axis of the measuring instrument 3 passes through the portion of the stage 2 where the shutter blades 1 are not mounted, that is, the portion away from the center is set as the initial position and the upper surface edge G of the stage 2 is used as a reference, Reset the measured value to zero. At this position, the shutter blade 1 is placed near the center of the stage 2.

After that, the stage 2 is conveyed in one direction indicated by an arrow A, and is passed between the light projecting section 3a and the light receiving section 3b of the measuring instrument 3. At this time, the dimension of the shutter blade 1 in the thickness direction is measured together with the stage 2. When the entire shutter blade 1 passes the optical axis of the measuring device 3, the stage 2
And the shutter blade 1 is taken out. After that,
The stage 2 is returned to the initial position, the shutter blade 1 to be measured next is placed on the stage 2, the stage 2 is transported, and the measurement is repeated.

Here, as shown in FIGS. 3 and 4, the flatness of the shutter blade 1 may vary depending on the deformation direction of the shutter blade 1 when it is mounted on the stage 2 due to the influence of gravity or the like. Therefore, the flatness of the shutter blade 1 is measured on both sides thereof, and the flatness of the shutter blade 1 can be obtained by setting a large measured value as the flatness of the shutter blade 1.

In this embodiment, the measurement of the shutter blade has been described, but the same measurement can be performed on other thin parts.

[0025]

According to the invention of claim 1, since the measurement is performed by the projected shape of the thin-walled component including the stage, it is possible to easily perform the measurement only by a one-dimensional scan in a state seen from the side surface. Moreover, the flatness can be controlled by a numerical value, and the measurement can be performed easily without contact, and the number of man-hours required for the measurement can be reduced.

According to the invention of claim 2, in addition to having the same effect as that of the invention of claim 1, the flatness can be accurately measured even if the thin-walled parts are deformed in different directions. it can.

[Brief description of drawings]

FIG. 1 is a front view showing an example of shutter blades.

FIG. 2 is a perspective view showing a measurement state according to the embodiment of the present invention.

FIG. 3 is a side view of a stage portion.

FIG. 4 is a side view of a stage portion.

FIG. 5 is a perspective view showing a conventional flatness measuring machine.

[Explanation of symbols]

1 shutter blade 2 stages 3 measuring instruments 3a Projector 3b Light receiving part

Claims (2)

[Claims] 1. A measuring device of an optical method having a light projecting portion and a light receiving portion is installed so as to measure a dimension in a height direction, and a stage on which a thin-walled component is mounted is mounted on the light projecting portion and the light receiving portion. A flatness measuring method for a thin-walled component, wherein the flatness is measured according to a projected shape of the thin-walled component including a stage. 2. The measurement is performed by passing both the state in which the thin-walled component is placed on the stage and the state in which the thin-walled component is inverted and placed on the stage between the light projecting unit and the light receiving unit. The method for measuring flatness of a thin-walled component according to claim 1.