JP2003104622A - Suction attracting method and device for transcription film, and cartridge for supplying transcription film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a suction attracting method allowing easily and certainly performing the operation to attract a transcription film to a stage while the film is kept in good and tight contact with a base board. SOLUTION: The base board 10 on the stage 4 is covered with the transcription film 11 having a greater width than the base board 10, and the film 11 is pressed to the base board 10 by a run-in roll 18 extending over the whole range across the width of the base board 10, and in this condition, the run-in roll 18 is moved along the base board 10 in the direction perpendicularly intersecting the board width direction. In follow-up after movement of the run-in roll 18, the region on the stage 4 where the suction attracting force acts is widened gradually.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a case where a transfer film having a heat-melting colorant layer formed thereon is brought into close contact with a black matrix substrate and partially thermally transferred to form a color filter for a liquid crystal display. The present invention relates to a film adsorption method and a device for adhering a suitable transfer film to a substrate.

[0002]

2. Description of the Related Art A laser transfer method has been proposed as a method for forming a colored layer on a substrate of a color filter such as a liquid crystal display (for example, Japanese Patent Laid-Open No. 10-206625,
(See Japanese Patent Laid-Open No. 7-104113). In the laser transfer method, a heat-melting colorant is applied to a film-shaped substrate in advance to form a transfer film, and the transfer film and the substrate of the color filter are superposed on each other and a laser beam is applied to the transfer film. And melting the colorant to transfer the colorant to the substrate in a desired pattern.

In the above laser transfer method, it is necessary to supply a transfer film to a substrate placed on the stage of a transfer device so as to cover the substrate. In the conventional supply method, a film having a size required for one transfer is transferred onto a stage, covered with the film, and then adhered by a rubber roller or the like.

[0004]

When the above-mentioned laser transfer method is used, the transfer film is brought into close contact with the substrate without a gap, and the substrate and the transfer film are securely held on the stage so as not to shift. There is a need. Therefore, while sucking air from a large number of suction holes opened on the surface of the stage to suck the substrate to the stage, the transfer film is formed to be slightly larger than the substrate, and the peripheral edge of the transfer film protruding from the substrate is similarly formed. Attempts have been made to adsorb onto the stage. However, it is difficult to cover the transfer film with a substrate so as not to cause wrinkles or slack so that the transfer film is sucked onto the stage, and it has been desired to develop a suction method capable of performing the work easily and surely.

The present invention provides a suction method capable of easily and reliably performing the work of sucking a transfer film on a stage while closely adhering the transfer film to a substrate, a suction device therefor, and a cartridge for supplying the transfer film. With the goal.

[0006]

The adsorption method of the present invention will be described below. In addition, in order to facilitate understanding of the present invention, reference numerals in the accompanying drawings are added in parentheses, but the present invention is not limited to the illustrated forms.

According to the present invention, the substrate (1
0) Transfer film (11) whose width is wider than its substrate
A transfer film suction method of holding the transfer film on the stage by applying suction force from the stage side to both side portions (11a) of the transfer film protruding from the substrate, A process of pressing the transfer film on the substrate by a familiarizing means (18) extending over the entire width direction of the substrate and moving the familiar means along the substrate in a direction orthogonal to the width direction; The above-described problem is solved by a suction method including a process of gradually expanding the region where the suction force of the stage acts by following the movement of the familiar means.

According to this suction method, the transfer film is moved to the substrate while the transfer film is moved by pressing the transfer film on the substrate by the familiarizing device, so that the transfer film gradually adheres to the substrate without a gap. As the suction area of the stage expands following the movement of the familiarizing means, the transfer film is gradually adsorbed to the stage from the portion pressed against the substrate by the familiarizing means. Therefore, there is no possibility that the transfer film once pressed against the substrate will be displaced thereafter to cause wrinkles or slack. In addition, there is no possibility that the transfer film is adsorbed by the stage before being pressed against the substrate and induces wrinkles or slack. Therefore, the work of adhering the transfer film to the substrate while adhering it to the substrate can be performed easily and reliably.

In the suction method of the present invention, the familiarizing means may be moved from one end side to the other end side of the substrate in a direction orthogonal to the width direction. In this case, the transfer film is adsorbed on the stage while being pressed from one end of the substrate toward the other end.

Further, a pair of the familiarizing means may be arranged on the transfer film, and the familiarizing means may be moved toward the opposite ends of the substrate in the direction orthogonal to the width direction. In this case, the movement amount of each familiar means can be shortened as compared with the case where a single familiar means is moved from one end to the other end of the substrate. Therefore, the working time is shortened. It is particularly suitable when a long transfer film is used.

In the suction method of the present invention, the familiarizing means may be moved in a state where the transfer film is floated above the substrate at the end point side in the moving direction of the familiarizing means. In this case, the transfer film is reliably separated from the substrate at the destination of the familiarizing means, and the transfer film comes into close contact with the substrate due to the pressing action of the familiarizing means. Therefore, there is no possibility that the transfer film and the substrate are undesirably brought into close contact with each other before passing through the familiarizing means to cause wrinkles or slack.

In the adsorption method of the present invention, the transfer film is wound around a pair of rolls (14, 15), a transfer film having a length required to cover the substrate is fed between the rolls, and the roll is fed. The familiar means may be moved between the rolls after the substrate is covered with a transfer film.

In this case, the process of unwinding the unused transfer film from one roll while winding the used transfer film on the other roll, and the process of moving the familiar means between the rolls are alternately repeated. Thus, the adsorption method of the present invention can be repeatedly applied to a plurality of substrates.

Before starting the movement of the familiar means,
Tension may be applied to the transfer film fed between the rolls. In this case, the transfer film is stretched along the substrate before the transfer film is pressed against the substrate by the familiarizing means, and the transfer film can be smoothly pressed and moved by the familiarizing means.

A biasing means (22) for biasing the transfer film above the substrate may be provided on at least one roll (14) side of the pair of rolls. By biasing the transfer film upward, tension is applied to the transfer film, and the same effect as the above is obtained. Further, if the familiarizing means is moved toward the biasing means, the transfer film is reliably separated from the substrate at the destination of the familiarizing means, and the transfer film and the substrate are undesired before the familiarizing means passes through. There is no risk of wrinkles or slacks coming into close contact with each other.

In the adsorption method of the present invention, the familiar means may be formed in a roll shape. In this case, the familiar means can be smoothly moved along the transfer film. The roll-like accommodating means may be rolled along the transfer film, or may be moved along the transfer film while being prevented from rotating.

In the suction device of the present invention, the transfer film (1) is arranged on the substrate (10) on the stage (4) so that both side portions (11a) in the width direction protrude from the substrate (10).
Familiarizing means (18) for pressing 1) over the entire length in the width direction of the substrate, and drive mechanism (3) for moving the familiarizing means along the substrate in a direction orthogonal to the width direction.
0 to 36), a suction force is applied to both side portions of the transfer film from a large number of suction holes (19) provided along the moving direction of the familiar means to suck the both side portions to the surface of the stage. A suction means (40, 42), and a suction control means (41, 43, 45) for controlling the suction means so that the area where the suction force of the stage acts gradually expands following the movement of the familiar means. By providing
The problems described above are solved.

According to this suction device, after the transfer film is placed on the substrate, the suction means of the present invention is realized by gradually expanding the region where the suction force acts while moving the familiarizing means along the substrate. be able to.

The suction device of the present invention may include means (22) for holding the transfer film in a state of floating above the substrate at the end point side in the moving direction of the familiarizing means. In this case, since the transfer film is reliably separated from the substrate at the destination of the familiarizing means, there is no possibility that the transfer film and the substrate are undesirably adhered to each other before the familiarizing means passes to cause wrinkles or slack. .

The transfer film supply cartridge (12) of the present invention can be mounted on the stage (4) of the transfer device (1) on which the substrate (10) to be transferred is mounted, and is compatible with a plurality of transfers. A supply part (12a) for accommodating the transfer film (11) of a possible length and a recovery part (12b) for recovering the film are provided, and the substrate is provided between the supply part and the recovery part. Is provided with a feeding portion (12c) for stacking the transfer films, and extends between the supply portion and the collecting portion over the entire width in the width direction of the transfer film fed to the feeding portion. The above-mentioned problem is solved by providing a familiarizing means (18) capable of reciprocating along the transfer film between the collecting section and the collecting section.

According to this cartridge, the transfer film of the feeding portion is mounted on the stage so as to be superposed on the substrate having a width smaller than that of the transfer film, and then the familiar means is moved between the supply portion and the recovery portion. As a result, the transfer film can be brought into intimate contact with the substrate so as to be gradually adapted. Therefore, it can be preferably used in the adsorption method of the present invention. Even in the cartridge of the present invention, a biasing means (22) for biasing the transfer film above the substrate may be provided on at least one side of the supply section and the recovery section. Good.

[0022]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to FIGS. FIG. 10 shows the entire structure of a transfer device 1 for forming a colored layer on a glass substrate (black matrix substrate) when a color filter for a liquid crystal display is prepared, (a) is a front view and (b) is a side view. Is. The transfer device 1 includes a bed 2 and a gate-shaped column 3
And stage 4. The stage 4 is attached to the bed 2 via a linear guide device 5, and is aligned along a predetermined axial direction (direction indicated by an arrow in FIG. 10A) in a horizontal plane with a setup position P1 and a transfer position immediately below the column 3. It is possible to move to and from P2. At the setup position P1, setup work such as replacement of the substrate 10 is performed.

A laser irradiation unit 6 is attached to the column 3. The laser irradiation unit 6 irradiates the laser beam toward the stage 4 sent to the transfer position P2. The laser irradiation unit 6 has a function of scanning the laser beam in a direction orthogonal to the moving direction of the stage 4 in the horizontal plane. The transfer device 1 uses the combination of the scanning of the laser beam in the laser irradiation unit 6 and the movement of the stage 4 to move the stage 4
The laser beam can be applied to any position above. The stage 4 is designed to have a size suitable for mounting one substrate 10.

FIG. 1 shows an example of a method for supplying a transfer film 11 onto a single substrate 10 placed on a stage 4 of the transfer device 1. In this example, the transfer film 11 is housed in a cartridge 12, the cartridge 12 is mounted on the stage 4 as it is, and the transfer film 11 is supplied onto the substrate 10. The transfer film 11 has, for example, three primary colors (R,
The heat-melting type colorant corresponding to any one of the color layers G and B) is fixed in advance.

As shown in FIG. 2, the cartridge 12
Is a pair of plate-shaped frames 13 arranged in parallel to each other,
Have 13. A supply roll 14 is attached to one end side of the frames 13 and 13, and a winding roll 15 is attached to the other end side of the frame 13. Each roll 1
Reference numerals 4 and 15 are rotatable about axes parallel to each other.

A stage 4 is provided between the rolls 14 and 15.
A space 16 longer than the length of the substrate 10 placed on the substrate is secured. The space 16 is open at the top and bottom so that the transfer film 11 can be irradiated with a laser beam and the pattern can be transferred from the transfer film 11 to the substrate 10. That is, an opening for introducing the laser beam and an opening for bringing the transfer film 11 and the substrate 10 into close contact with each other are provided above and below the cartridge 12.

In the initial state before the use of the cartridge 12, a large number of sheets (for example, 100 to 100) are provided on the supply roll 14.
A transfer film 11 having a length corresponding to the transfer of 400 substrates 10 is wound. As a result, a supply section 12a for the transfer film 11 is formed on one end side of the frame 13. The transfer film 11 pulled out from the supply roll 14 is stretched straight along the lower end of the cartridge 12 and then wound around a winding roll 15. As a result, a collecting portion 12b for the transfer film 11 is formed on the other end of the frame 13. Then, the supply unit 12a and the recovery unit 1
A feeding portion 12c of the transfer film 11 is formed between the feeding portion 2b and 2b.

The length of the transfer film 11 fed to the feeding portion 12c is longer than that of the substrate 10. The width of the transfer film 11 is larger than the width of the substrate 10. Therefore, the substrate 10 is placed on the stage 4 at the setup position P1 of the transfer device 1, and the cartridge 12 is placed on the stage 4 with the feeding portion 12c facing downward.
The substrate 10 can be completely covered with the transfer film 11 of the feeding portion 12c. Then, both side portions 11a, 11a (see FIG. 2) in the width direction of the transfer film 11 which covers the substrate 10 protrude from the substrate 10. The width here means a dimension in a direction parallel to the axes of the rolls 14 and 15.

The substrate 1 is moved by moving the stage 4 to the transfer position P2 with the cartridge 12 mounted and irradiating the transfer film 11 with a laser beam from the laser irradiation section 6.
It is possible to transfer a substance to be transferred such as a coloring agent on the transfer film 11 onto the substrate 10.

The total length of the cartridge 12 may be larger or smaller than the total length of the stage 4. However, in order to reduce the load on the stage 4, the cartridge 1
It is desirable to configure 2 as small and lightweight as possible.

In order to enhance the adhesion between the substrate 10 placed on the stage 4 and the transfer film 11 fed to the feeding portion 12c of the cartridge 12, the cartridge 1
The 2 is provided with a familiar roll 18 as a familiar means. The familiar roll 18 has a diameter sufficiently smaller than that of the supply roll 14 and the take-up roll 15, and the entire length thereof is larger than the width of the transfer film 11. That is, the familiar roll 18 extends over the entire width of the transfer film 11 in the width direction.

The familiar roll 18 is rotatably supported between the frames 13 and 13 while rotating between the rolls 14 and 15. The specific configuration of the mechanism for driving the familiar roll 18 will be described later. Also, as shown in FIG.
A tension roll 20 is provided on the supply roll 14 side, and the tension roll 20 is pulled upward by a tension coil spring 21. The tension roll 20 and the tension coil spring 21 constitute a film urging mechanism (urging means) 22. The transfer film 11 pulled out from the supply roll 14 goes over the tension roll 20 and is fed out to the space 16, and further passes through the familiar roll 18 and is wound up by the winding roll 15.

As shown in FIG. 1, suction holes 19 ... 19 are formed in rows on both sides of a substrate 10 (shown by an imaginary line in FIG. 1) mounted on the stage 4. These suction holes 19 are connected to a vacuum pump. The transfer film 11 is attached to the substrate 1 by sucking air from each suction hole 19.
It can be held on the stage 4 in a state of being in close contact with 0. The stage 4 is also provided with suction holes for sucking the substrate 10, but the illustration thereof is omitted. The suction hole 19 has a long hole shape in which the long axis direction is aligned with the moving direction of the familiar roll 18.

FIG. 4 shows a procedure for adsorbing the transfer film 11 on the stage 4. In this embodiment,
First, the transfer film 11 delivered to the delivery portion 12c of the cartridge 12 is mounted on the stage 4 so that the transfer film 11 overlaps the substrate 10 (see FIG. 4A). Thereafter, as shown by arrows in FIGS. 4A to 4C, the familiar roll 18 is moved from one end side to the other end side of the substrate 10 to bring the transfer film 11 into close contact with the substrate 10. At this time, the vacuum suction area on which the suction force from the suction holes 19 acts is expanded from one end side to the other end side of the substrate 10 so as to follow the movement of the familiar roll 18. The suction work is completed by moving the familiar roll 18 to the supply roll 14 side until the transfer film 11 is pressed against the entire surface of the substrate 10. According to such a suction method, the transfer film 11 gradually comes into close contact with the substrate 10 as the familiar roll 18 moves, and both side portions 11a of the transfer film 11 are gradually adsorbed to the stage 4 from the close contact portion. Therefore, the transfer film 11 can be brought into close contact with the substrate 10 satisfactorily, and wrinkles and slack are unlikely to occur on the transfer film 11.

After the adsorption is completed, a laser beam is irradiated from the laser irradiation unit 6 of FIG. 10 to start the transfer of the colored layer.
After the transfer is completed, the adsorption of the transfer film 11 to the stage 4 is stopped, the cartridge 12 is removed from the stage 4, the cartridge 12 of another color is supplied to the stage 4, and the film is adsorbed by the same procedure. The formation of the colored layer on one substrate 10 is completed by alternately mounting the cartridges 12 of three colors R, G, and B on the stage 4 and performing the transfer three times. The same cartridge 12
When the transfer is to be continued while the sheet is placed on the stage 4, the suction is temporarily released after the transfer is completed, and the film 11 is fed from the supply roll 14 to the take-up roll 15 by the length used for one transfer. Then, the film 11 may be adsorbed by the same procedure.

FIG. 5 shows an example of a drive mechanism for the familiar roll 18 of the cartridge 12 described above, and FIG.
Is a plan view of one side of the cartridge 12, and FIG. 6B is a side view of the portion shown in FIG. In addition, FIG.
Shows a modified example of (b).

In the drive mechanism shown in FIGS. 5 (a) and 5 (b), the roll 13 that is familiar to the frame 13 of the cartridge 12 is used.
An elongated hole 30 for guiding the shaft end portion 18a of the shaft 8 is formed. Similar elongated holes 30 are formed in the opposite frame 13, and the familiar roll 18 is bridged between the elongated holes 30. The shaft end portion 18a penetrates the elongated hole 30 and projects to the outside of the frame 13, and the projecting portion is rotatably fitted to the carriage 31. Pulleys 32, 32 are attached to both ends of the frame 13 in the longitudinal direction, and the belt 3 is provided between them.
3 is wrapped around. The carriage 31 has its belt 33
It is arranged between the upper and lower traveling portions 33a and 33b, and is fixed to either one of the traveling portions (the lower traveling portion 33b in the figure). A coupling 34 is attached to one pulley 32,
The coupling 34 can be coupled and decoupled with a coupling 36 which is coupled to a drive shaft of a motor 35 as a drive source via a speed reduction mechanism (not shown). The components from the motor 35 to the coupling 36 are provided as auxiliary equipment of the transfer device 1. When the cartridge 12 is mounted at a predetermined position on the stage 4, the coupling 3
4, 36 are connected to each other. The pulleys 32, 32 may be attached to the frame 13 in various ways. As an example,
Shaft end portions 14a of the supply roll 14 and the winding roll 15, 1
5a is rotatably attached to the frame 13,
The shaft ends 14a and 15a can be projected to the outside of the frame 13, and the pulleys 32 and 32 can be rotatably attached to the projecting portions.

According to the above drive mechanism, the coupling 3
By connecting the motors 4 and 36 and driving the motor 35, the carriage 31 travels left and right integrally with the belt 33, and the familiar roll 18 moves along the long hole 30 accordingly. Since the movement amount of the familiar roll 18 can be replaced with the rotation amount of the motor 35, if the rotation of the motor 35 is detected by a detector such as a rotary encoder, the moving speed and the stop position of the familiar roll 18 can be controlled. it can.

In the above, the rotary motion generated by the motor 35 as the drive source is converted into the reciprocating motion of the familiar roll 18 by the belt 33, but other known motion converting mechanisms such as a rack and pinion mechanism are used. Then, it is conceivable to give the familiar roll 18 a reciprocating motion. The familiar roll may be reciprocated using a drive source such as a hydraulic or pneumatic cylinder that produces a linear motion.

In the example of FIGS. 5A and 5B, since the familiar roll 18 is rotatably attached to the carriage 31, the transfer film 11 and the familiar roll 18 are attached.
If friction occurs between the roll and the familiar roll 18
Rotates to prevent excessive friction. Further, means for converting the reciprocating motion of the familiar roll 18 along the stage 4 into the rotational motion of the familiar roll 18 may be provided. FIG. 5C shows an example thereof, and in this example, the rack 38 is provided along the long hole 30, and the familiar roll 18 is provided.
Is provided with a pinion (not shown) that meshes with the rack 38. In this case, the familiar roll 18 can be rotated in conjunction with its movement to minimize the friction between the transfer film 11 and the familiar roll 18. Instead of the rack and pinion mechanism, a member for increasing the friction coefficient is provided along the long hole 30, and the shaft end portion 18a of the familiar roll 18 is provided with the member.
The same effect can be obtained by pressing on.

Since the familiar roll 18 enhances the effect of pressing the transfer film 11 against the substrate 10, the familiar roll 1
8 is provided with an appropriate elastic layer, and the familiar roll 18 is attached to the transfer film 11 to such an extent that the elastic layer is elastically deformed appropriately.
The familiar roll 18 may be moved along the substrate 10 while being pressed against.

FIG. 6 shows an example of a mechanism for expanding the suction area by following the movement of the familiar roll 18. In this example, the suction holes 1 opened on the surface of the stage 4
Each of 9 ... 19 has four suction holes 19 arranged in the width direction of the transfer film 11 (vertical direction in FIG. 6) as one unit, and a communication path 40 provided inside the stage 4 for each unit. 40 is connected. Each communication path 40 opens on the side surface of the stage 4 and is connected to a vacuum pump 42 via an electromagnetic control valve 41. Each electromagnetic control valve 41 opens and closes a flow path connecting the communication path 40 and the vacuum pump 42 according to a drive signal from the valve drive circuit 43. Valve drive circuit 4
Drive signals are individually output from 3 to the electromagnetic control valves 41 ... 41, and the opening / closing operations of the electromagnetic control valves 41 are individually controlled.
Therefore, the opening / closing control between the suction holes 19 and the vacuum pump 42 is independently performed for each unit of the suction holes 19.

The valve drive circuit 43 switches the drive signal of each electromagnetic control valve 41 according to the control signal from the control device 45. When sucking the transfer film 11, the control device 4
Reference numeral 5 outputs a control signal for driving the motor to a drive circuit 46 of the motor 35, and the familiar roll 1 is based on an output signal from a detector 47 such as a rotary encoder.
The moving amount of 8 is detected. Then, according to the movement amount, each electromagnetic control valve 41 is controlled to open and close so as to follow the familiar roll 18 and gradually expand the vacuum suction area. For example, with respect to the movement amount of the familiar roll 18, the length of the suction area that one unit of the suction hole 19 takes up is determined in advance, and the familiar roll 18 starts to move every time the familiar roll 18 moves by the movement amount. The opening signal is sequentially output from the electromagnetic control valve 41 corresponding to the suction hole 19 to the valve drive circuit 43 to gradually expand the suction area.

It should be noted that the detection of the movement amount of the familiar roll 18 is omitted, and the electromagnetic opening / closing valve 41 is sequentially opened every time the time required for the motor 35 to move by the distance corresponding to one unit of the suction hole 19 elapses. May be controlled as follows.

The above embodiments are merely examples, and the present invention can be implemented in various forms. For example, instead of providing the electromagnetic opening / closing valve 41 for each communication path 40, the communication path 4
A control valve having the same number of ports as 0 and a common port connected to the vacuum pump 42 side, and the number of ports communicating with the ports is proportionally increased / decreased according to the operation amount of a valve element such as a spool. May be used. According to such a control valve, the vacuum suction area can be gradually expanded by linking the valve body with the movement of the familiar roll 18.

Specific examples of the above control valve are shown in FIGS. 7 and 8, respectively. In the control valve 50 of FIG. 7, a spool 52 as a valve body is slidably inserted inside a cylindrical cylinder 51. O-rings 53, 53 are attached to the vicinity of the opening of the cylinder 51 and the tip of the spool 52 to seal between the cylinder 51 and the spool 52. A plurality of ports 54 ... 5 around the cylinder 51
4 are arranged side by side in the axial direction of the cylinder 51, and a single port 55 is provided at the bottom of the cylinder 51. Each port 54 is a connecting path 4 of the stage 4 which is different from each other.
0 (see FIG. 6), the ports 55 are connected to the vacuum pump 42, respectively. Therefore, when the spool 52 is reciprocally moved by an appropriate linear movement type driving means (for example, a fluid pressure cylinder or a screw driving mechanism), the number of the ports 54 communicating with the ports 55 changes according to the movement. This operation can be used to gradually change the suction area of the stage 4.

In the control valve 60 shown in FIG. 8, a rotor 62 as a valve element is rotatably inserted inside a cylindrical housing 61. 63 are arranged side by side around the housing 61 along the circumferential direction of the housing 61, and a single port 64 is further provided on one end side of the port 63. Notch 6 is formed on the outer circumference of the rotor 62.
2a is provided. Each port 63 is connected to a mutually different connecting path 40 (see FIG. 6) of the stage 4, and the port 64 is connected to the vacuum pump 42. Therefore, the rotor 6
When 2 is rotated by an appropriate rotary motion type driving means (for example, a motor or a rotary solenoid), the number of ports 65 communicating with the ports 64 changes according to the motion. This operation can be used to gradually change the suction area of the stage 4.

In the above embodiment, two or more suction holes 19 may be set as one unit in the moving direction of the familiar roll 18, and connection and disconnection with the vacuum pump 42 may be controlled for each unit.

FIG. 9 shows another embodiment for a familiar roll. In this embodiment, a pair of familiar rolls 18, 18 are arranged between the supply roll 14 and the winding roll 15. These rolls 18, 18 are moved in the opposite directions from the intermediate position of the substrate 10, that is, toward the supply roll 14 or the winding roll 15, and
Of the transfer film 11 by gradually expanding the vacuum suction area toward the rolls 14 and 15 following the movement of the transfer film 11
Is adsorbed on the stage 4. In this embodiment, the roll 18
Since the amount of movement of the is substantially halved, there is an advantage that the adsorption is completed in a short time.

The transfer film 11 is not limited to one in which a colored layer of any one of R, G, and B is formed, and a single type of transferred substance, for example, a material for forming a black stripe on the substrate 10 is fixed. It may be a thing. Furthermore, the present invention is not limited to a substrate for a color filter of a liquid crystal display, but can be used when a transfer film is supplied over various substrates. Transfer film 1 without using the cartridge
The adsorption method of the present invention can be applied even when 1 is cut into a size necessary for one transfer and covered on the substrate 10. The familiar means is not limited to a roll-shaped member, but may be a plate-shaped member as long as it can move along the transfer film 11 while pressing the transfer film 11 against the substrate 10.

[0051]

As explained above, according to the suction method of the present invention, the transfer film is gradually adapted to the substrate by moving the conforming means while pressing the transfer film onto the substrate by the familiarizing means. As described above, the transfer film can be gradually adsorbed to the stage from the portion pressed against the substrate by the accommodating means by expanding the adsorption area of the stage by following the movement of the accustomed means. Therefore, there is no possibility that the transfer film once pressed against the substrate will be displaced thereafter to cause wrinkles or slack. In addition, there is no possibility that the transfer film is adsorbed by the stage before being pressed against the substrate and induces wrinkles or slack. Therefore, the work of adhering the transfer film to the substrate while adhering it to the substrate can be performed easily and reliably.

Further, according to the suction device and the transfer film supplying cartridge of the present invention, the suction method of the present invention can be suitably implemented.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment in which a transfer film is supplied onto a single substrate placed on a stage of a transfer device by the method of the present invention.

FIG. 2 is a diagram showing a state where a cartridge placed on a stage is viewed from above.

FIG. 3 is a sectional view taken along line III-III in FIG.

FIG. 4 is a diagram showing a procedure for adsorbing a transfer film according to the present invention.

FIG. 5 is a diagram showing an example of a mechanism for driving a familiar roll of a cartridge.

FIG. 6 is a view showing an example of a mechanism for expanding the suction area by following the movement of a familiar roll.

FIG. 7 is a diagram showing a specific example of a control valve for gradually expanding the vacuum suction area.

FIG. 8 is a diagram showing another specific example of the control valve for gradually expanding the vacuum suction area.

FIG. 9 is a view showing an example in which a transfer film is adsorbed by using a pair of familiar rolls.

FIG. 10 is a diagram showing an example of a transfer device.

[Explanation of symbols]

1 Transfer device 4 stages 6 Laser irradiation part 10 substrates 11 Transfer film 11a Both sides of transfer film 12 cartridges 12a supply unit 12b Collection part 12c Feeding part 13 frames 14 Supply roll 15 winding roll 18 Familiar Roll (Familiar Means) 19 Adsorption hole 20 tension rolls 21 tension coil spring 22 Film biasing mechanism (biasing means, holding means) 30 long holes (drive mechanism) 31 Carriage (drive mechanism) 32 pulley (drive mechanism) 33 belt (drive mechanism) 34 Coupling (drive mechanism) 35 motor (drive mechanism) 36 Coupling (drive mechanism) 40 connecting path (adsorption means) 41 Electromagnetic on-off valve (adsorption control means) 42 Vacuum pump (adsorption means) 43 Valve drive circuit (adsorption control means) 45 Control device (adsorption control means)

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Kensaku Suzuki             1-1-1, Ichigaya-Kagacho, Shinjuku-ku, Tokyo             Dai Nippon Printing Co., Ltd. (72) Inventor Tatsumi Takahashi             1-1-1, Ichigaya-Kagacho, Shinjuku-ku, Tokyo             Dai Nippon Printing Co., Ltd. F-term (reference) 2H048 BA64 BB42                 3E095 AA01 BA02 CA10 DA06 DA48                       DA59 DA90 EA09 EA12 EA22                       EA26 EA29 EA33 EA36 FA12                 3F108 GA09 GB01 HA07

Claims (12)

[Claims] 1. The transfer film is formed by covering a substrate on a stage with a transfer film having a width larger than that of the substrate, and applying suction force to the both sides of the transfer film protruding from the substrate from the stage side. Is a suction method of the transfer film to hold on the stage, while pressing the transfer film on the substrate by a familiarizing means extending over the entire length in the width direction of the substrate, the familiarizing means along the substrate A method for adsorbing a transfer film, comprising: a process of moving the transfer film in a direction orthogonal to the width direction; and a process of gradually enlarging an area where the adsorbing force of the stage acts in accordance with the movement of the familiarizing means. . 2. The suction method for a transfer film according to claim 1, wherein the familiarizing means is moved from one end side to the other end side of the substrate in a direction orthogonal to the width direction. 3. A pair of the familiarizing means are arranged on the transfer film, and the familiarizing means are moved toward opposite ends of the substrate in a direction orthogonal to the width direction. The method for adsorbing a transfer film according to claim 1. 4. The familiarizing means is moved in a state where the transfer film is floated above the substrate at the end point side in the moving direction of the familiarizing means. A method for adsorbing a transfer film as described. 5. The transfer film is wound around a pair of rolls, a transfer film having a length required to cover the substrate is fed between the rolls, and the substrate is covered with the fed transfer film. The method for adsorbing a transfer film according to claim 1, wherein the familiar means is moved between the rolls later. 6. The method for adsorbing a transfer film according to claim 5, wherein a tension is applied to the transfer film fed between the rolls before the movement of the familiarizing means is started. 7. The transfer according to claim 5, wherein a biasing unit that biases the transfer film above the substrate is provided on at least one roll side of the pair of rolls. Film adsorption method. 8. The method of adsorbing a transfer film according to claim 1, wherein the familiar means is formed in a roll shape. 9. Familiarizing means for pressing the transfer film disposed on the substrate over the entire length in the width direction of the substrate so that both side portions in the width direction of the substrate are projected, and the familiarizing means. A driving mechanism for moving the substrate along the substrate in a direction orthogonal to the width direction, and a suction force is applied to both sides of the transfer film from a large number of suction holes provided along the moving direction of the familiarizing means. A suction means for sucking the both side portions on the surface of the stage, and a suction control means for controlling the suction means so that the area where the suction force of the stage acts gradually expands following the movement of the familiar means. A suction device for a transfer film, comprising: 10. The transfer film according to claim 9, further comprising means for holding the transfer film in a state of floating above the substrate at an end point side in a moving direction of the familiarizing means. Adsorption device. 11. A supply unit, which can be mounted on a stage of a transfer device on which a substrate to be transferred is placed, and which stores a transfer film having a length that can accommodate a plurality of transfers, and a recovery unit that recovers the film. And a feeding unit for stacking the transfer film on the substrate is provided between the supply unit and the collecting unit, and the feeding unit is provided between the supplying unit and the collecting unit. Transfer film supply, characterized in that the transfer film is extended over the entire length in the width direction of the transfer film and is provided with a familiar means capable of reciprocating along the transfer film between the supply part and the recovery part. Cartridge for. 12. A biasing means for biasing the transfer film above the substrate is provided on at least one side of the supply unit and the recovery unit. 11. A cartridge for supplying a transfer film according to item 11.