JP2003098126A - X-ray analyzer for having fluorescence and diffraction for common use - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inexpensive X-ray analyzer for having fluorescence and diffraction for common use having functions of both of fluorescent X-ray analysis and diffracted X-ray analysis and capable of constituting an optimum X-ray detection system. SOLUTION: The X-ray analyzer for having fluorescence and diffraction for common use is provided with an X-ray generator 1 for irradiating a sample 6 with primary X-rays 2, a fixing type diffracted X-ray detection system for detecting diffracted X-rays 7 from the sample 6 at a specific angle of diffraction and a fluorescent X-ray detection system for detecting fluorescent X-rays 15 from the sample 6.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a fluorescent X-ray analyzer for irradiating a sample with X-rays and analyzing the sample based on the fluorescent X-rays generated from the sample, and based on the diffracted light from the sample. The present invention relates to a diffraction X-ray analyzer for analyzing a sample.

[0002]

2. Description of the Related Art A fluorescent X-ray analyzer using a rhodium (Rh) X-ray tube is equipped with a parallel X-ray diffraction detection system using Rh-L.beta.・
An X-ray analyzer commonly used for diffraction is known (Japanese Patent Laid-Open No. 6-21).
3835). However, since the diffracted X-ray detection system is a scanning type in which the goniometer rotates the monochromator, it becomes a large and expensive analyzer. Therefore, in order to achieve downsizing and price reduction, a fluorescent / diffraction X-ray analyzer using an energy dispersive detector (ED) in a fluorescent X-ray detection system has also been proposed. Intensity of light element (peak) is not visible because the fluorescent intensity of heavy element (Ca, Fe, etc.) is too strong to count light element (Al, Si, etc.) effectively. Value) cannot be measured.

[0003]

SUMMARY OF THE INVENTION The present invention has been made for the purpose of solving the above-mentioned problems, and is compact and inexpensive fluorescent / diffractive while having both functions of fluorescent X-ray analysis and diffraction X-ray analysis. The purpose is to obtain a shared X-ray analyzer.

[0004]

In order to achieve the above object, the X-ray fluorescence / diffraction analyzer according to the first aspect of the present invention comprises an X-ray generator for irradiating a sample with primary X-rays, A fixed type diffracted X-ray detection system that detects diffracted X-rays from the sample at a specific diffraction angle, and a fluorescent X-ray detection system that detects fluorescent X-rays from the sample are provided. According to the above configuration, one X-ray generator is shared and the fluorescent X-ray analysis and the diffraction X-ray are performed.
In addition to being able to perform line analysis with a single analyzer, the diffraction X-ray detection system is a fixed type rather than a scanning type, so a compact and inexpensive X-ray fluorescence / diffraction analyzer can be used. can get. The intensity of the primary X-ray may be changed by switching the voltage applied to the X-ray generator between the case of performing the fluorescent X-ray analysis and the case of performing the diffraction X-ray analysis.

Fluorescence / diffraction shared X according to the second structure of the present invention
The X-ray analyzer includes a first X-ray generator that irradiates a sample with primary X-rays, and a second X-ray that irradiates the sample with primary X-rays having a different energy distribution from the first X-ray generator. A generator, a diffractive X-ray detection system for detecting diffracted X-rays generated from the sample irradiated with the first-order X-rays from the first X-ray generator, and the first
And a fluorescent X-ray detection system for detecting fluorescent X-rays from the sample irradiated with the primary X-rays from at least the second X-ray generator of the second X-ray generators. According to the above configuration, for example, the first primary X-ray with high energy emitted from the first X-ray generator is used to perform the diffraction analysis and the fluorescent X-ray analysis of heavy elements to generate the second X-ray. Since the fluorescent X-ray analysis of the light element can be performed by the second primary X-ray irradiated with low energy from the container, the accurate quantification of the light element is particularly facilitated. Further, when the energy of the first primary X-ray is made lower than that of the second primary X-ray, a crystal system having a large lattice spacing is obtained by a diffraction X-ray analysis using the first primary X-ray having a low energy. Can be measured with higher sensitivity, and a smaller amount of heavy elements can be analyzed by the second primary X-ray having high energy.

Fluorescence / diffraction shared X according to the third structure of the present invention
The X-ray analyzer includes an X-ray generator that irradiates a sample with primary X-rays, a diffracted X-ray detection system that detects diffracted X-rays from the sample, and a fluorescent X-ray that detects fluorescent X-rays from the sample. Selective for the detection system, the first irradiation position for detecting the sample with diffracted X-rays, and the second irradiation position for detecting fluorescent X-rays closer to the X-ray generator than the first irradiation position. And a selective holding device for holding the same. According to the above configuration, one X-ray generator is commonly used for fluorescent X-ray analysis and diffraction X-ray analysis.
Can be done with a single analyzer. Further, when configuring the diffracted X-ray detection system, the sample is held at the first irradiation position suitable for irradiating the primary X-rays through, for example, a solar slit, and when configuring the fluorescent X-ray detection system. For example, since the solar slit is made to recede and the sample is moved to the second irradiation position close to the X-ray generator, the intensity of the fluorescent X-rays generated can be increased and the analysis accuracy is improved.

Fluorescence / diffraction shared X according to the fourth structure of the present invention
The X-ray analyzer detects an X-ray generator that irradiates a sample with a first-order X-ray for generating a diffracted X-ray, and a diffracted X-ray that is generated from the sample irradiated with the first-order X-ray from the X-ray generator. And a fluorescent X-ray detection system for detecting fluorescent X-rays generated from the sample irradiated with the primary X-rays from the X-ray generator, and a sample for carrying in and out of the spectroscopic chamber. A shutter for opening and closing an opening, and a sample moving device for moving the sample over the shutter to an irradiation position close to the X-ray generator in a state where the shutter is opened are provided. According to the above configuration, one X-ray generator can be shared and fluorescent X-ray analysis and diffraction X-ray analysis can be performed by one analyzer.
Further, a shutter for opening / closing an opening for loading / unloading the sample into / from the spectroscopic chamber is provided at a low position, and the diffraction X-ray detection system and the fluorescent X-ray are detected.
Since the sample holding position of the line detection system is set above the shutter, the diffraction X-ray detection system can be set to a diffraction angle at which the maximum intensity can be obtained without the shutter interfering with the X-ray optical path, and the sample can be set. The accuracy of analysis by fluorescent X-rays can be improved by approaching the X-ray generator.

Fluorescence / diffraction shared X according to the first structure of the present invention
In a preferred embodiment of the X-ray analyzer, the voltage adjustment for adjusting the voltage applied to the X-ray generator based on the element to be detected so that the X-ray generator emits primary X-rays having different energy distributions. Equipped with a vessel. According to the above configuration, it is possible to irradiate primary X-rays having an appropriate energy distribution according to the element to be detected, so that the excitation efficiency of the element is improved and, as a result, the analysis accuracy is improved.

Fluorescence / diffraction shared X according to the third structure of the present invention
In a preferred embodiment of the line analyzer, the selective holding device has an inclination angle adjusting means for adjusting the diffraction angle by inclining the sample with respect to the primary X-ray at the first irradiation position. . According to the above configuration, by changing the tilt angle of the sample, the diffraction angle of the diffracted X-ray detection system can be set to the diffraction angle at which the strongest intensity can be obtained.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION The fluorescent / diffraction common X according to the present invention will be described below.
As a line analysis device, Al, Si, C when manufacturing cement
An apparatus for performing fluorescence analysis of each element of a and Fe and diffraction analysis of CaO will be described as an example. FIG. 1 shows an X-ray fluorescence / diffraction X-ray analyzer according to the first embodiment of the present invention (hereinafter referred to as “analyzer”).
2) is a side view showing a schematic configuration of FIG. 2), and FIG. 2 is a perspective view thereof showing a multi-element simultaneous analysis type apparatus. This analyzer is
An X-ray generator 1 using an X-ray tube having a Cr target or a Cu target, and 1 emitted from the X-ray generator 1.
A first solar slit 3 for limiting the horizontal divergence of the next X-ray 2 and a divergence suppressing slit 4 for limiting the vertical divergence.
A sample holder 5 for holding the cement powder as the sample 6 on the upper surface, a scattering prevention slit 8 for limiting the vertical divergence of the diffracted X-rays 7 diffracted by the sample 6, and a second for limiting the horizontal divergence. A solar slit 9, a first light-receiving slit 10 that limits vertical divergence, a monochromator 11 made of graphite that monochromates the diffracted X-ray 7, a second light-receiving slit 12, and an X-ray detector 13. In addition, each of the elements 1, 3, 4, 8 to 13 constitutes a fixed diffraction X-ray detection system.

On the other hand, each element A irradiated with the primary X-ray 2
Fluorescent X-rays 15Al, 1 emitted from 1, Si, Ca, Fe
Four fixed goniometers 16 (only two are shown) for individually detecting 5Si, 15Ca, and 15Fe, and a total of four detectors 17 (2 arranged in each fixed goniometer 16).
(Only one is shown), and each of the elements 1, 3, 4, 16 and 17 constitutes a fluorescent X-ray detection system. Each of the fixed goniometers 16 incorporates a light-receiving slit and a monochromator similar to those of a diffraction X-ray detection system, and is made of Al, Si, C.
Only the fluorescent X-rays of a and Fe are diffracted and emitted to the detector 17.

Next, the operation of the first embodiment will be described.
A primary X-ray 2 is emitted from an X-ray generator 1 that is operated by being supplied with power from a power source (not shown), and this primary X-ray 2 is limited by a first solar slit 3 and a divergence suppression slit 4 and A predetermined irradiation surface of the sample 6 held on the upper surface is irradiated. The diffracted X-ray 7 diffracted by the crystal of CaO in the sample 6 passes through the anti-scattering slit 8, the second solar slit 9, and the first light receiving slit 10 and the monochromator 1
1 is used for monochromaticity, the intensity is detected by the detector 13 such as a counter tube through the light receiving slit 12, and CaO in the sample 6 is quantified.

On the other hand, each fluorescent X-ray 15 Al, 1 from each element Al, Si, Ca, Fe excited by the primary X-ray 2
5Si, 15Ca, 15Fe are four fixed goniometers 16
And the fluorescent X-ray intensity for each element is detected by the detector 17 of each fixed goniometer 16, and each element Al, Si, Ca, Fe in the sample 6 is quantified.

In the first embodiment, the Cr or Cu target is used as the X-ray generator 1, but an X-ray generator using a dual target type X-ray tube having a Cr target and a Rh target is used. CrKα ray for diffraction analysis and Rh characteristic X for fluorescence analysis.
The line may be used as the primary X-ray.

According to the first embodiment, one X-ray generator 1 can be shared and fluorescent X-ray analysis and diffraction X-ray analysis can be performed by one analyzer, and in addition, diffraction can be performed. Since the X-ray detection system is not a scanning type but a fixed type, a compact and inexpensive X-ray fluorescence / diffraction analyzer can be obtained.

FIGS. 3 and 4 show an X-ray fluorescence / diffraction analyzer according to a second embodiment of the present invention.
Is a schematic side view, and FIG. 4 is a perspective view. In FIGS. 3 and 4, the same or corresponding parts as those in FIGS. 1 and 2 are designated by the same reference numerals, and detailed description thereof will be omitted.

In the second embodiment, R which generates a primary X-ray having a high excitation efficiency for light elements such as Al and Si.
Small X-ray generator with low excitation voltage using X-ray tube having h target or Pd target (second X-ray generator)
21 and an energy dispersive detector 24 such as a silicon pin diode detector or a silicon drift detector (SDD) for detecting the fluorescent X-rays 27 of each element generated from the sample 6, Ca, a heavy element
For exciting Fe and Fe, the high energy CrKα ray or continuous X-ray from the first X-ray generator 1 is used as in the first embodiment. The diffraction X-ray detection system is the same as in the first embodiment.

According to the second embodiment, the primary X-rays 2 and 22 having different energy distributions are emitted from the first and second X-ray generators 1 and 21, respectively. The first primary X-ray 2 with high energy emitted from the X-ray generator 1 of FIG. 1 performs diffraction X-ray analysis and fluorescent X-ray analysis of heavy elements, and the second X-ray generator 21 emits the same. Since the fluorescent X-ray analysis of the light element can be performed by the second primary X-ray 22 having a low energy, the analysis accuracy of each element is improved. Further, by using the energy dispersive detector 24 that does not require a goniometer in the fluorescent X-ray detection system,
The increase in size and complexity due to the addition of the second X-ray generator 21 are suppressed.

Here, the energy of the first primary X-rays 2 emitted from the first X-ray generator 1 is transferred to the second X-ray generator 21.
From the second primary X-rays 22 emitted from the second primary X-ray 2 having a low energy, the diffracted X-ray analysis and the fluorescent X-ray analysis of the light element are performed, and the second high-energy second Of 1
Next, X-ray 22 is used to perform X-ray fluorescence analysis of heavy elements. In that case, the diffraction analysis using the first primary X-rays 2 having low energy can measure a crystal system having a large lattice spacing with higher sensitivity, and the second primary X-rays 22 having high energy can detect A smaller amount of elemental analysis can be performed.

In the present embodiment in which the energy distributions of the primary X-rays 2 and 22 from the first and second X-ray generators 1 and 21 are different from each other, diffraction is performed by the first primary X-rays 2. Only the X-ray analysis may be performed, and only the fluorescent X-ray analysis may be performed using the second primary X-rays 22.

FIG. 5 and FIG. 6 show the second of FIG. 3 and FIG.
A third embodiment is shown in which the second X-ray generator 21 in the embodiment is omitted and the first X-ray generator 1 performs the diffraction X-ray analysis and the fluorescent X-ray analysis. The third embodiment is common to the first embodiment in that a single X-ray generator is shared.

In FIG. 5 and FIG. 6, the X-ray generator 1 is supplied with DC power adjusted based on the element to be detected from a commercial AC power source 18 via a voltage / voltage regulator 19. As a result, primary X-rays having different energy distributions are emitted from the X-ray generator. C as the target material
r, Rh, etc. can be used. For example, when Cr is used, a voltage of, for example, 30 kV is applied to the target material of the X-ray generator 1 from the voltage regulator 19, and the excitation efficiency of Ca and Fe, which are relatively heavy elements, from the X-ray generator 1 is increased. The primary X-ray 2 including high Cr-Kα rays and continuous X-rays distributed in a high energy range is irradiated on the sample 6, and the primary X-ray 2 having high energy causes diffraction analysis of CaO with CaO. X-ray fluorescence analysis of heavy elements is performed. When a voltage of, for example, 5 kV is applied to the target material of the X-ray generator 1 from the voltage regulator 19, the X-ray generator 1 mainly excites the relatively light elements Al and Si in a high excitation efficiency, mainly in a low energy range. The primary X-rays 2 composed of continuous X-rays distributed in the sample 6 are irradiated to the sample 6, and the relatively heavy elements Ca and Fe are not excited by the primary X-rays 2 having low energy, and the light elements Al And Si are effectively excited, and fluorescent X-ray analysis of light elements is performed.

According to the third embodiment, as in the case of the first embodiment, one X-ray generator 1 is shared and the fluorescence X is emitted.
In addition to being able to perform X-ray analysis and diffracted X-ray analysis with a single analyzer, the diffraction X-ray detection system is not a scanning type,
Since it is fixed, a compact and inexpensive X-ray fluorescence / diffraction analyzer can be obtained. In addition to this, from the X-ray generator 1,
Since the primary X-rays 2 having different energy distributions are irradiated depending on the element to be detected, the excitation efficiency of each element is improved and the analysis accuracy is improved, as in the second embodiment.

FIGS. 7 and 8 show an X-ray fluorescence / diffraction analyzer which is a fourth embodiment of the present invention.
Is a sectional view showing the structure of a diffracted X-ray analysis system, and FIG. 8 is a sectional view showing the structure of a fluorescent X-ray analysis system. In FIGS. 7 and 8, the same or corresponding parts as those in FIGS. 1 to 4 are designated by the same reference numerals, and the description thereof will be omitted.

In the fourth embodiment, a Cr target and R
A dual target type X-ray generator 31 having an h target and a plurality of fixed X-ray detection systems using a Cr target and a fluorescent X-ray detection system using a Rh target are provided. And a fixed goniometer 16 (only one is shown in the figure). This fluorescence
The diffraction common X-ray analyzer is equipped with a vacuum shutter 53 for hermetically maintaining a space between a spectroscopic chamber 51 formed in a housing 41 and a sample exchange chamber 52 formed in a sample cup 42. The shutter 53 is slid by an opening / closing motor 54 to open / close between the chambers 51 and 52.
The spectroscopic chamber 51 and the sample exchange chamber 52 have a valve V1 and a valve V, respectively.
It is evacuated to vacuum by a vacuum pump P via 2. The sample cup 42 has a housing 41 via a seal member 43.
Airtightly contacts the underside of.

A disc-shaped mount 55 is arranged in the spectroscopic chamber 51, and the mount 55 is rotatably supported by a bearing 57, and is rotated around a rotation axis Z by a driving means (not shown). Thus, two sets of locking claws 56a and 56b that set the sample holder 5 in two positions, high and low, are provided at positions axially symmetrical with respect to the rotation axis Z.
The sample holder 5 is connected to a spin motor 61 via a rod 62, and the sample holder 5 is driven in the vertical direction by a selective holding device 63 composed of an electric cylinder to move the sample holder 5 to the lower position in FIG. It moves to the higher position in FIG. 8 and is locked by the locking claw 56a or 56b.

Next, the operation of the fourth embodiment during diffracted X-ray analysis will be described. In FIG. 7, C of the X-ray generator 31
The primary X-ray 2 emitted from the r target is irradiated on the sample 6, and the intensity of the diffracted X-ray 7 of CaO is detected by the detector 13. At this time, the shutter 53 is in the open position, and the gantry 55 is rotated about the rotation axis Z by a driving unit (not shown), so that the solar slit 3 attached to the gantry 55 becomes X.
It faces the line generator 1 and is stopped at a position constituting a diffraction X-ray analysis system. The upper end surface of the sample holder 5 is pressed and locked by the locking claws 56b and 56b by the selective holding device 63, and is positioned at a position lower than the solar slit 3.

When switching from the diffracted X-ray analysis to the fluorescent X-ray analysis, the sample holder 5 is lowered by the selective holding device 63 and moved into the sample exchange chamber 52, and the gantry 55 is rotated 180 around the rotation axis Z. After being rotated to the position shown in FIG. 8, the sample holder 5 is pushed up to engage the locking claws 56a and 56a.
The X-ray generator 31 is positioned near the X-ray generator 31. In this state, for the analysis of light elements such as Al and Si, the Rh-Lα ray generated from the Rh target of the X-ray generator 31 was used as the primary X-ray 22, and Ca and Fe were used.
For the analysis of heavy elements such as Cr, a Cr-Kα ray and a continuous X-ray generated from a Cr target are used as the primary X-rays 22, and the primary X-rays 22 are irradiated to the sample 6 to excite it to generate fluorescence. After the X-ray 27 is monochromatic by the fixed goniometer 16, it is detected by the detector 17 and quantified.

Using Rh-Lα rays, Al element and Si
Since the element is excited and the Ca element having a large content is not excited, the Al element and the Si element can be measured with high accuracy. Further, Ca element is excited by Cr-Kα ray or continuous X-ray, and Fe element which cannot be excited by Cr-Kα ray is excited by continuous X-ray.

To replace the sample 6, the sample holder 5 is lowered into the sample exchange chamber 52 and the shutter 53 is closed, and then the sample cup 42 is lowered by means not shown to separate it from the housing 41. The sample cup 42 is conveyed to a new one, the sample 6 is exchanged, and the sample cup 42 is again attached to the housing 41.
The sample exchange chamber 52 is closed by pressing it against the lower surface of the sample and sealed by the seal member 43, and the inside of the sample exchange chamber 52 is evacuated by the vacuum pump P. At this time, the sample holder 5 has the shutter 5
The sample exchange chamber 52 is located below the analysis chamber 51.
When the pressure becomes the same, the shutter 53 is opened, the sample holder 5 is moved up to the measurement position and positioned, and the X-ray analysis operation is started.

According to the fourth embodiment, during the diffraction X-ray analysis, the gantry 55 is rotated to move the first solar slit 3 into the diffraction X-ray analysis system, and the sample holder 5 is moved to the first solar. Since it is positioned below the slit 3,
The primary X-rays 2 are collimated and optimum diffraction X-ray analysis is performed. On the other hand, during the fluorescent X-ray analysis, the pedestal 55 is rotated to move the first solar slit 3 and the sample holder 5 is positioned close to the X-ray generator 31, so that the sample 6 is placed on the X-ray detector 31. When the sample 6 is irradiated with the high-intensity primary X-ray 2 approaching, the analysis accuracy of the sample 6 by the fluorescent X-ray is improved.

FIG. 9 is a sectional view showing the schematic arrangement of a fluorescence / diffraction shared X-ray analysis apparatus according to the fifth embodiment of the present invention. The same or corresponding portions as those in FIGS. The detailed description thereof will be omitted. In the fifth embodiment, as the first X-ray generator 1 of the diffraction X-ray detection system, C
Using an X-ray tube having an r target or a Cu target, R is used as the second X-ray generator 21 of the fluorescent X-ray detection system.
A small (low voltage) X-ray tube having an h target or a Pd target is used, the shutter 53 is arranged at a position lower than the sample holding position of the sample holder 5, and the sample holder 5 is moved to the second position with the shutter 53 opened. The X-ray generator 21 is positioned close to the X-ray generator 21 to perform diffraction X-ray analysis and fluorescent X-ray analysis.

According to the fifth embodiment, the sample holder 5
Since the sample holding position of the sample 6 is located above the shutter 53, even when the sample 6 is irradiated with the primary X-rays 2 obliquely from the first X-ray generator 1 for diffraction analysis at the optimum angle, Can be prevented from interfering with each other. In addition, the second X-ray generator 21 is used for the fluorescent X-ray analysis, but the sample 6 approaches the second X-ray generator 21, so that the second primary X-ray irradiated to the sample 6 is used. As a result of the higher intensity of 22, the analysis accuracy of the sample 6 using the fluorescent X-ray is improved.

10 and 11 show a schematic structure of a fluorescent / diffraction shared X-ray analysis apparatus according to a sixth embodiment of the present invention. FIG. 10 is a side view showing the structure at the time of diffraction X-ray analysis, FIG. 11 is a side view showing the configuration during fluorescent X-ray analysis. In FIGS. 10 and 11, the same or corresponding parts as those in FIGS. 1 to 9 are designated by the same reference numerals, and detailed description thereof will be omitted. In the sixth embodiment, the selective holding device 63 for vertically moving the sample cup 5 in the fourth embodiment is provided with an inclination angle adjusting means 81 for changing the inclination angle of the sample holder 5 with respect to the primary X-ray 2. Is.

According to the sixth embodiment, during diffraction X-ray analysis, as shown in FIG. 10, the pedestal 55 is rotated to rotate the first solar slit 3 to a position forming a diffraction X-ray analysis system. Then, the selective holding device 63 moves the sample holder 5 to a position lower than the first solar slit 3 which constitutes the diffraction X-ray analysis system and rotates the sample holder 5, and the tilt angle adjusting means 81.
By adjusting the tilt angle of the sample holder 5 by using, the surface of the sample 6 is set to the optimum diffraction angle, and the primary X-ray 2 is irradiated onto the sample 6 from the Cr target of the dual target type X-ray generator 31. The detector 13 detects the diffracted X-ray 7.

On the other hand, at the time of fluorescent X-ray analysis, as shown in FIG. 11, the pedestal 55 is rotated to move the solar slits 3 sideways, and the sample holder 5 is moved by the selective holding device 63.
Is moved to a position above the gantry 55, which constitutes the fluorescent X-ray analysis system, and is further rotated by the tilt angle adjusting means 81, whereby the surface of the sample 6 is set to an optimum angle, for example, horizontal, and X-ray generation is performed. The sample 6 is irradiated with the primary X-ray 22 from the Cr target or the Rh target of the container 31, and the fluorescent X-rays 27 are detected by the plurality of fixed goniometers 16 and the detector 17.

According to the sixth embodiment, the element for analyzing the sample surface with the position of the detector 13 fixed by rotating the sample holder 5 by the tilt angle adjusting means 81 during the diffraction X-ray analysis. The optimum diffraction angle can be set. Further, at the time of fluorescent X-ray analysis, the sample 6 is brought close to the X-ray generator 31,
The analysis accuracy can be improved.

In each of the above embodiments, instead of using a plurality of fixed goniometers in the fluorescent X-ray detection system,
A single fixed goniometer may be used. Further, a plurality of secondary sides including the slits 8 to 10 and 12, the monochromator 11 and the detector 13 in the diffraction X-ray detection system may be provided to detect a plurality of different diffraction X-rays.

[0039]

As described above, according to the present invention,
It is possible to obtain a compact and inexpensive X-ray fluorescence / diffraction analyzer that has both functions of fluorescent X-ray analysis and diffraction X-ray analysis.

[Brief description of drawings]

FIG. 1 is a fluorescence / diffraction shared X according to a first embodiment of the present invention.
It is a side view which shows schematic structure of a line analysis device.

FIG. 2 is a perspective view of the same embodiment.

FIG. 3 is a fluorescence / diffraction shared X according to a second embodiment of the present invention.
It is a side view which shows schematic structure of a line analysis device.

FIG. 4 is a perspective view of the same embodiment.

FIG. 5: Fluorescence / diffraction shared X according to the third embodiment of the present invention
It is a side view which shows schematic structure of a line analysis device.

FIG. 6 is a perspective view of the same embodiment.

FIG. 7 is a sectional view showing a configuration of a diffraction X-ray analysis system according to a fourth embodiment of the present invention.

FIG. 8 is a cross-sectional view showing a configuration of a fluorescent X-ray analysis system of the same embodiment.

FIG. 9 is a fluorescence / diffraction shared X according to a fifth embodiment of the present invention.
It is sectional drawing which shows schematic structure of a line analysis device.

FIG. 10 is a side view showing the configuration of a diffraction X-ray analysis system according to a sixth embodiment of the present invention.

FIG. 11 is a side view showing a configuration of an X-ray fluorescence analysis system of the same embodiment.

[Explanation of symbols]

1, 18 ... Power source, 19 ... Voltage regulator, 31 ... First X-ray generator, 2, 22 ... Primary X-ray, 3, 9 ... Solar slit, 4 ... Divergence slit, 5 ... Sample holder, 6 ... Sample, 7
... Diffraction X-ray, 8 ... Anti-scattering slit, 10, 12 ... Light receiving slit, 11 ... Graphite monochrome, 13 ... Detector, 15, 27 ... Fluorescent X-ray, 16 ... Fixed goniometer,
17 ... Detector, 21 ... Second X-ray generator, 24 ... Detector, 51 ... Spectral chamber, 52 ... Sample exchange chamber, 53 ... Shutter, 54 ... Opening / closing motor, 55 ... Frame, 58 ... Through hole, 61
... spin motor, 62 ... rod, 63 ... selective holding device, 81 ... tilt angle adjusting means.

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Eiichi Furusawa             14-8 Akaoji-cho, Takatsuki-shi, Osaka Rigaku Denki             Industry Co., Ltd. (72) Inventor Tadahiro Abe             14-8 Akaoji-cho, Takatsuki-shi, Osaka Rigaku Denki             Industry Co., Ltd. F-term (reference) 2G001 AA01 BA04 BA18 CA01 DA02                       DA06 EA01 GA01 GA09 GA13                       JA08 JA12 KA01 LA03 LA06                       NA07 NA09 NA10 NA16 NA17                       PA12 SA01 SA04

Claims (6)

[Claims] 1. An X-ray generator that irradiates a sample with first-order X-rays, a fixed diffraction X-ray detection system that detects diffracted X-rays from the sample at a specific diffraction angle, and fluorescence from the sample. An X-ray fluorescence / diffraction X-ray analyzer equipped with a fluorescent X-ray detection system for detecting X-rays. 2. A first X-ray generator for irradiating a sample with primary X-rays, and a sample having a different energy distribution from the first X-ray generator.
A second X-ray generator for irradiating a next X-ray; a diffractive X-ray detection system for detecting a diffracted X-ray generated from the sample irradiated with the first-order X-ray from the first X-ray generator; At least a second of the first and second X-ray generators
X-ray analyzer for fluorescence / diffraction, comprising a fluorescent X-ray detection system for detecting fluorescent X-rays generated from a sample irradiated with the primary X-ray from the X-ray generator. 3. An X-ray generator for irradiating a sample with primary X-rays, a diffractive X-ray detection system for detecting diffracted X-rays from the sample, and a fluorescent X-ray for detecting fluorescent X-rays from the sample. A detection system, a first irradiation position for detecting the sample with diffracted X-rays, and a second irradiation position for detecting fluorescent X-rays closer to the X-ray generator than the first irradiation position. An X-ray fluorescence / diffraction X-ray analysis device equipped with a selective holding device for holding the same. 4. An X-ray generator for irradiating a sample with a primary X-ray for generating a diffracted X-ray, and a diffracted X-ray generated from the sample irradiated with the primary X-ray from the X-ray generator is detected. A diffracted X-ray detection system, a fluorescent X-ray detection system for detecting fluorescent X-rays generated from a sample irradiated with the primary X-rays from the X-ray generator, and a sample for carrying in and out of the analysis system. Fluorescence / diffraction shared X-ray analysis including a shutter that opens and closes an opening, and a sample moving device that moves the sample over the shutter to an irradiation position close to the X-ray generator in a state where the shutter is opened. apparatus. 5. The method according to claim 1, further comprising adjusting an applied voltage to the X-ray generator based on an element to be detected,
An X-ray fluorescence / diffraction analysis apparatus equipped with a voltage regulator for irradiating primary X-rays having different energy distributions from an X-ray generator. 6. The selection holding device according to claim 3, further comprising an inclination angle adjusting means for adjusting the diffraction angle by inclining the sample with respect to the primary X-ray at the first irradiation position. X-ray analyzer for both fluorescence and diffraction.