JP2003097514A - Shaft moving device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a shaft moving device capable of delivering the fluid to a slide table without using a hose. SOLUTION: This shaft moving device is provided with a pipe 17 for piping fixed to a frame 2 and passing through the slide table 3 in the axial direction and provided with an air ventilation hole 21 at a part of the pass-through part, and an air reservoir 19 to be communicated with the air ventilation hole 21 is provided in the slide table 3, through which the pipe 17 for piping passes, to form a communication passage between the frame 2 and the slide table 3 through the air ventilation hole 21 of the pipe 17 for piping and the air reservoir 19.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shaft moving device for transferring a working fluid to a slide table which is guided by a base frame and moved by rotationally driving a ball screw by a servomotor.

[0002]

2. Description of the Related Art Conventionally, this type of axis moving device is configured as a three-axis positioning device which is also called a three-axis locator by combining three axes. That is, in the three-axis positioning device, the frame of the second axis moving device having the axis orthogonal to the first axis is attached to the first slide table of the first axis moving device, and the slide table of the second axis moving device is attached. A third axis moving device having an axis orthogonal to the second axis is attached to and configured. Further, an actuator such as an air cylinder is mounted on the third shaft moving device and operated by a working fluid supplied from the outside. The working fluid to the actuator is supplied to the actuator from a fluid switching valve or the like via a hose capable of absorbing the movement allowance of the triaxial positioning device. Also,
This hose is placed together in a cable bear (registered trademark) together with cables for sensors of the triaxial positioning device.

[0003]

However, in the above-mentioned conventional example, since the hose is arranged outside the triaxial positioning device, the hose is repeatedly bent by the operation of the triaxial positioning device and the actuator, and is easily damaged. was there.

Further, since the hose is put together with the cables and arranged in the cable bear, it is necessary to make the outer diameter of the cable bear itself large. When it was necessary to arrange the welding robot, there was a risk of interference with other three-axis positioning devices and welding robots.

Therefore, the present invention has been made in view of the above problems, and provides a shaft moving device capable of delivering a fluid to a slide table without using a hose bent by the operation of the shaft moving device. With the goal.

[0006]

According to a first aspect of the present invention, there is provided an axial movement device for slidably supporting a slide table in an axial direction of a frame and moving the slide table in the axial direction, which is fixed to the frame and slides. Piping pipe that penetrates the table in the axial direction and has an air outlet hole in a part of the penetrating portion is provided in the slide table through which the pipe pipe penetrates to establish an air reservoir by communicating with the air outlet hole. A communication passage between the frame and the slide table is formed through the extraction hole and the air reservoir.

According to a second aspect of the present invention, in the first aspect of the present invention, the pipe pipe has an outer peripheral portion slidably fitted to a slide table and both end portions slidably fitted to the outer peripheral portion of the pipe pipe. A relay pipe that forms an annular space that communicates with the inside of the piping pipe is provided, and the relay pipe is characterized in that an air take-out hole that communicates with an air reservoir of the slide table is arranged at a central portion in the axial direction thereof.

A third aspect of the present invention is an axis moving device that slidably supports the slide table in the axial direction of the frame and moves the slide table in the axial direction, which is fixed to the frame and penetrates the slide table in the axial direction. A pipe that has a closed slit that can be opened in the axial direction is provided, an air reservoir is provided on a slide table through which the pipe passes, and an opening means that opens the slit of the pipe in the air reservoir is provided. It is characterized in that it is provided in the slide table, and a communication path between the frame and the slide table is formed through the opening of the slit.

In a fourth aspect based on the third aspect, the piping pipe is formed by bending a plate material in a circular shape, and the slits engage axial flanges formed at both winding ends of the plate material with each other. The opening pin serving as the opening means is characterized in that the flange in the inner circumferential direction of both the flanges is pushed toward the inner circumferential side to open the slit.

In a fifth aspect based on the third aspect, the piping pipe is formed by bending a plate material so that winding ends thereof overlap, and a slit is constituted by the overlapping winding ends, and an opening as an opening means is formed. The pin is characterized in that the winding end located on the inner peripheral side is pushed toward the inner peripheral side to open the slit.

In a sixth aspect based on the third aspect, the piping pipe is formed by bending a plate material such that winding ends face each other, and a slit is formed by the winding ends that are in contact with each other. The opening pin is inserted between the winding ends to open the slit.

In a seventh aspect based on the first to sixth aspects, an in-frame passage communicating with a pipe is provided in a frame of the shaft moving device, and a slide table of the shaft moving device communicates with an air reservoir. A table internal passage is provided, and by connecting the table internal passage of the slide table or the frame internal passage of the frame that is moved by the lower shaft moving device to the frame internal passage or the table internal passage of the upper shaft moving device. A feature is that a plurality of axis moving devices are combined.

[0013]

Therefore, according to the first aspect of the present invention, the inside of the piping pipe that axially penetrates the slide table is made to communicate with the air reservoir of the slide table through the air outlet hole so that the frame and the slide table are connected. Since the passage is formed, the working fluid can be supplied to and discharged from the frame side and the slide table side without using an external pipe that may be damaged by repeated deformation or interfere with others.

According to the second invention, in addition to the effect of the first invention, the outer peripheral portion is slidably fitted to the slide table and the both end portions are slidably fitted to the outer periphery of the piping pipe. Since the communication path between the frame and the slide table is formed through the relay pipe that forms an annular space that communicates with the inside of the pipe, it can be applied to an axial movement device having a long stroke slide table.

According to a third aspect of the present invention, a piping pipe is provided which penetrates the slide table in the axial direction and has openable and closed slits in the axial direction, and the slide table is provided with an opening means in the air reservoir by the opening means. Since the slit of the piping pipe is opened, the opening of the slit moves along with the movement of the slide table, and even a shaft moving device having a slide table with a long stroke can supply and discharge the working fluid between the frame side and the slide table side.

In the fourth invention, in addition to the effect of the third invention, a slit is formed by bending a plate material in a circular shape to form a pipe and engaging axial flanges formed on both winding ends of the plate material with each other. Since the opening pin as the opening means pushes the inner peripheral flange of both flanges toward the inner peripheral side to open the slit, both the springback action of the plate material and the working fluid pressure cause the slit to open. It acts to close and the pressure value of the supply pressure can be applied from the low pressure side to the high pressure side.

In the fifth invention, in addition to the effect of the third invention, a plate material is bent so that the winding ends thereof overlap to form a pipe, and a slit is formed by the overlapping winding ends.
Since the winding end located on the inner peripheral side is pushed open to the inner peripheral side by the opening pin as the opening means to open the slit, both the springback action of the plate material and the working fluid pressure act to close the slit. The pressure value of the supply pressure can be applied from the low pressure side to the high pressure side. Moreover, the structure is simple and easy to manufacture.

In the sixth invention, in addition to the effect of the third invention, a slit is formed by the contact between the winding ends of a pipe made by bending a plate material so that the winding ends face each other, and an opening pin as an opening means is provided. Since it is inserted between the winding ends to open the slit, the spring back of the plate material acts in the direction to close the slit, the supply pressure acts in the direction to open the slit, and is used for supplying and discharging high-pressure working fluid. Cannot be used,
It has a simple structure that can be used to supply and discharge a relatively low pressure working fluid.

According to the seventh aspect of the invention, the frame inner passage communicating with the piping pipe is provided in the frame, while the table inner passage communicating with the air reservoir is provided in the slide table, and when a plurality of shaft moving devices are combined, the lower stage is used. Side table internal passage or frame internal passage communicates with the upper stage internal frame passage or internal table passage, it can be applied to a multi-axis shaft moving device without using an external pipe such as a hose.

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the accompanying drawings.

1 and 2 show an example of a shaft moving device to which the present invention is applied. FIG. 1 is a sectional view of the shaft moving device, and FIG.
FIG. The shaft moving device 1 includes a frame 2 that serves as a base, and a slide table 3 that is slidably held in the axial direction of the frame 2.

The frame 1 is formed in a U-shaped cross section as a whole, and ball guiding grooves 11 forming a guide and extending in the sliding direction are opposed to the inner walls of the U-shaped opposed shape. The circulating table (not shown) is interposed in a space defined by the ball guide groove 12 provided on the slide table 3 side to support the slide table 3 so that the slide table 3 can be smoothly moved.

A plurality of in-frame passages 13 extending in the axial direction are formed in the bottom portion of the frame 2 having a "U" shape, and both ends of the in-frame passage 13 are open to the end surface of the frame 2 and the in-frame passage 13 is formed. The central portion of the above is opened as a first port 14 on the back surface of the bottom of the frame 2. In the illustrated example, two sets of in-frame passages 13 are arranged.

End plates 4 which are components of the frame 2 are fixed to both ends of the frame 2. The end plates 4 on both sides rotatably support both ends of the ball screw 5, and the ball screw 5 is rotationally driven by a servo motor (not shown). The end plate 4 is provided with two sets of end passages 15 as one component of the in-frame passage that communicates with the open ends of the in-frame passages 13. Open as 16. Further, the respective end passages 15 of the both end plates 4 are communicated with each other by a pipe pipe 17 penetrating the slide table 3 and arranged in the axial direction.

The slide table 3 is provided with a ball guide groove 12 facing the ball guide groove 11 of the frame 2 and having both ends of the groove communicating with the ball circulation passage. Frame 2
Between the ball guide grooves 11 and 12 between the slide table 3 and the slide table 3,
A circulating ball (not shown) is inserted in the ball circulating passage 12A. With the movement of the slide table 3, the ball is sent from the ball circulation passage 12A to the ball guide groove 12 at one of the ball guide grooves 12, and the ball guide groove 1
On the other hand, from the ball guide groove 12 to the ball circulation passage 12
Return the circulating ball to A.

A ball nut 18 that is screwed to the ball screw 5 via a ball is attached to the slide table 3.
Is provided and is moved in the axial direction by the rotational driving of the ball screw 5, and the slide position thereof is changed.

Piping pipe 17 of the slide table 3
The portion that penetrates is formed in a space surrounding the piping pipe 17. At both ends of this space, seal plates 20 that are fixed to the slide table 3 and are in sliding contact with the piping 17 for sealing are fixed. This seal plate 20 is
Plumbing pipe with a combination of packing and scraper 1
An air reservoir 19 is formed by closely contacting and sealing the outer periphery of 7 to seal the space. The air reservoir 19 communicates with the inside of the piping pipe 17 through an air extraction hole 21 provided at the center of the piping pipe 17 in the axial direction. Further, the air reservoir 19 is connected to the third port 2 via the in-table passage 22.
3 is communicated.

The ring-shaped member fitted to each end plate 4 side of the piping pipe 17 in the figure is the stopper 24 of the slide table 3. In addition, the shaft moving device 1 includes the frame 2 and the slide table 3 by the side cover 25.
And a side surface of the slide table 3 which is fixed to the end plate 4 and covers the upper surface of a part of the slide table 3 from above.
Covers the upper surface.

In the shaft moving device 1 having the above structure, for example, the frame 2 is fixed to a member serving as a base, an actuator or the like is mounted on the slide table 3, and the first port 14,
Alternatively, it can be operated by connecting the second port 16 to an air pressure source via a switching valve and connecting the third port 23 to an actuator. In this case, the second port 16 or the first port 14 which is not connected to the switching valve is closed by a blind plug or the like.

Then, for example, there are two first ports 14
One is for actuator on operation and the other is for actuator off operation.

When the working fluid is supplied to the one first port 14 by the switching valve and the working fluid is discharged from the other first port 14, the working fluid passes through the in-frame passage 13, the end passage 15, and the piping pipe 17. And air removal hole 21
And is supplied to the actuator from one of the third ports 23 via the air reservoir 19 and the in-table passage 22.
Turn on the actuator. Further, the working fluid discharged from the actuator via the other third port 23, the other in-table passage 22, the other air reservoir 19, the other piping pipe 17, the other end passage 15,
And the other first through the other intra-frame passage 13.
It is discharged from the port 14 to the switching valve. The same operation is performed when the working fluid is supplied from the other first port 14 to turn off the actuator.

When the servomotor is driven to rotate the ball screw 5, the slide table 3 is slid in the axial direction. The air reservoir 19 moves in the axial direction by the movement of the slide table 3 in the axial direction, but since the air reservoir 19 is formed to be long in the axial direction, the pipe pipe 17
The communication state between the inside and the air reservoir 19 of the slide table 3 is maintained.

When the slide table 3 is moved to the stroke end where it comes into contact with the stopper 24, the air extraction hole 2 of the piping pipe 17 is provided near the end of the air reservoir 19.
1 is located, and the communication state between the inside of the pipe 17 and the air reservoir 19 of the slide table 3 is maintained.

In the shaft moving device 1 described above, the air take-out hole 21 is provided at the axial center of the pipe 17 that is bridged between the end plates 4 to communicate with the air reservoir 19. Since the slide table 3 is communicated with the take-out hole 21, the amount of slide stroke of the slide table 3 is limited and cannot be applied to the slide table 3 having a long stroke. FIG. 3 shows an improved example of a piping pipe which can solve this point.

In FIG. 3, the slide table 3 is shown, and a relay pipe 27 is slidably fitted on the outside of the pipe 17 while being sealed by seal plates 28 at both ends thereof. An axial end portion of the slide table 3 which constitutes the air reservoir 19 is slidably fitted to the outer periphery of the relay pipe 27 and is sealed by a seal plate 20. At both ends of the relay pipe 27, stopper projections 29 are provided.
Is formed so that the slide table 3 does not come out of the fitting state. Then, the air extraction hole 21A is arranged at the central portion in the axial direction of the relay pipe 27. Relay pipe 27
The inside of the pipe is an air outlet hole 21 of the pipe 17 and the annular passage 3 formed by the pipe 17 and the relay pipe 27.
0, it communicates with the air reservoir 19 of the slide table 3 via the air extraction hole 21A of the relay pipe 27.

According to this structure, even if the stroke of the slide table 3 is increased, the relay pipe 27 communicates the inside of the piping pipe 17 with the air reservoir 19, so that the increase in stroke can be absorbed. If the stroke becomes longer, it can be easily dealt with by arranging the relay pipes 27 in double or triple layers.

FIG. 4 shows the shaft moving device 1 shown in FIGS.
An application example in which only three sets are combined to form a three-axis moving device, that is, a so-called three-axis locator will be shown. Hereinafter, the members corresponding to the first axis will be denoted by A, and B will also correspond to the second axis.
Will be described by assigning C to the respective symbols corresponding to the third axis.

In FIG. 4, the lowermost first axis moving device 1
In A, for example, the frame 2A and the slide table 3A are configured to be slidably movable in the Y-axis direction, the first port 14A is closed, and the working fluid is supplied from the second port 16A to the end passage 15A, the piping pipe 17A, and the air. Third port 23 via reservoir 19A and table passage 22A
It is configured to be supplied to and discharged from A.

On the slide table 3A of the first shaft moving device 1A, a frame 2B of the second shaft moving device 1B is fixed, which is capable of moving the slide table 2B in the X-axis direction orthogonal to the first shaft. Then, the first port 14B of the second shaft moving device 1B and the third port 23A of the first shaft moving device 1A are communicated with each other.

Therefore, the working fluid flowing through the third port 23A of the first shaft moving device 1A is the second shaft moving device 1B.
Through the first port 14B, the in-frame passage 13B, the end passage 15B, the piping pipe 17B, the air reservoir 19B, and the in-table passage 22B of the second shaft moving device 1B.
It is supplied to and discharged from the port 23B.

Slide table 3 of second axis moving device 1B
B has a third axis moving device 1C that is movable in the vertical direction, that is, in the Z axis direction via an "L" -shaped bracket 32.
The slide table 3C is fixed. The third axis moving device 1C operates so that the frame 2C descends (rises) when the servo motor is driven so as to move the slide table 3C up (down) with respect to the slide table 3C.

The slide table 3 of the third axis moving device 1C
The third port 23C of C is communicated with the third port 23B of the second shaft moving device 1B via a passage provided in the bracket 32. Therefore, the working fluid flows from the third port 23C of the third shaft moving device 1C to the passage 22 in the table.
C is supplied and discharged from the second port 16C via the air reservoir 19C, the pipe 17C, and the end passage 15C.

An actuator D is arranged on the frame 2C of the third axis moving device 1C, and the second port 16 is provided.
C and each port 33 of the actuator D are connected by a pipe 34, and the actuator D can be operated by a working fluid.

The following effects are obtained in this embodiment. That is, the inside of the piping pipe 17 that penetrates the slide table 3 in the axial direction is communicated with the air reservoir 19 of the slide table 3 through the air extraction hole 21 to form a communication path between the frame 2 and the slide table 3. The working fluid can be supplied and discharged between the frame 2 and the slide table 3 without using an external pipe that may be damaged by repeated deformation or interfere with others.

In the example shown in FIG. 3, the slide table 3 has an outer peripheral portion slidably fitted therein, and both ends thereof slidably fitted in the outer peripheral portion of the pipe 17 so as to communicate with the inside of the pipe 17. Since the communication passage between the frame 2 and the slide table 3 is formed through the relay pipe 27 that forms the space 30 of FIG.

Further, as shown in FIG. 4, the frame 2 is provided with an in-frame passage 13 communicating with the piping pipe 17, while the slide table 3 is provided with an in-table passage 22 communicating with the air reservoir 19. When the moving device 1 is combined, the lower table-side passage 22 or the frame inner passage 13 and the upper-stage frame inner passage 13 or the table inner passage 22 are communicated with each other. It can be applied without using external piping.

FIGS. 5 to 11 show an example of the shaft moving device according to the second embodiment of the present invention. In the embodiment of FIGS. 1 to 3, the position of the air extraction hole 21 of the piping pipe 17 is Instead of being fixed or communicating with the relay pipe 27, in this embodiment, the piping pipe is provided with a slit that is normally closed, and the slit is partially opened to serve as an air outlet. The air outlet is configured to be movable on the piping pipe. The same parts as those in the above-described embodiment are designated by the same reference numerals, and the detailed description thereof will be omitted.

5 to 7 are a sectional view, a sectional view taken along the line BB and a perspective view of the overall construction of the shaft moving device according to the second embodiment. The former embodiment means a piping pipe and a slide table. The configurations related to the piping pipes of are different.

As shown in FIGS. 5 to 7, an opening pin 38 as an opening means for opening the air outlet 37 formed by the slit 36 of the piping pipe 35 in the slide table 3 is provided in the piping pipe 35 of the air reservoir 19. Arranged to touch. The opening pin 38 can be screwed from above the slide table 3 with a screw to adjust the degree of contact with the piping pipe 35. Further, the servomotor F is connected to the ball screw 5 via the reduction gear H.
Can be rotationally driven, and the rotational position of the servomotor F is detected by the rotational position detector G.

FIG. 8 shows the sectional shape of the piping pipe 35.
A thin elastic steel plate, for example, the ends of stainless steel plates are bent to opposite sides to form flanges 39, which are then bent into a cylinder, and the flanges 39 are joined together as shown in FIG. 8 (A). Engagement forms the closed slit 36. As shown in FIG.
As shown in (B), the inner packing and the outer packing are sealed by the seal packing 40 arranged on one surface by sticking or the like. This seal exhibits sealing performance by the flanges 39 contacting each other by the spring back of the piping pipe 35. Further, the pressure of the working fluid supplied into the pipe 35 causes the flanges 39 to come into contact with each other in the same manner, thereby further improving the sealing performance.

FIG. 9 shows the construction of a packing 20A and a scraper 20B constituting the seal plate 20 attached to the end surface of the slide table 3. 9A is a sectional view, FIG. 9B is a side view, and FIG. 9C is a perspective view. The packing 20A and scraper 20B are shown in FIG.
The cross-sectional shape of (A) has the same shape as that of the embodiment of FIGS. 1 to 3, but slides with the piping pipe 35 as shown in FIGS. 9 (B) and 9 (C). Packing 20A and scraper 20B on the end surface of the slide table 3
Has a stepped hole 40A corresponding to the stepped shape of the flange 39 of the pipe 35. The stepped hole 40A is configured to obtain a leak-proof seal with the piping pipe 35. Further, the stepped shape by the flange 39 is obtained by squeezing the piping pipe 35 with the packing 20A and the scraper 20B so that the outer shape of the piping pipe 35 is corrected to the stepped shape when the outer shape does not follow this shape. Also works.

FIG. 10 shows the opening pin 3 of the slide table 3.
8 shows a cross-sectional view including 8 and the tip of the opening pin 38 abuts the pipe pipe 35 having the flange 39 which is in contact with the inner surface of the other flange 39 from the inside of the pipe pipe 35 in the air reservoir 19. As shown in (A), the contact state between the flanges 39 is separated.
The slit 36 is opened by removing the contact between the flanges 39 by the opening pin 38, and the piping pipe 35 is opened.
Air outlet 41 for communicating the inside with the air reservoir 19
Is formed. Since the air outlet 41 is opened by elastically deforming a part of the piping pipe 35, as shown in FIG. The flanges 39 come closer to each other as the distance from the pin 38 increases. The packing 20A and the scraper 2 at the end of the slide table 3
The flanges 39 come into contact with each other in the stepped portion of 0B, and the pipe 39 is restored to the general cross section shown in FIG. 8 (A).

The opening area of the air outlet 41 corresponds to the screwing depth of the opening pin 38 and corresponds to the piping pipe 35.
It can be adjusted by changing the deformation allowance of. When the slide table 3 is moved, the piping pipe 3
5, the opening pin 38 and the left and right scrapers 20B contacting
The position of the air outlet 41 moves corresponding to the moving position of the slide table 3. Therefore, the inside of the piping pipe 35 and the air reservoir 19 are always communicated with each other through the air outlet 41.

In this embodiment, there is provided a piping pipe 35 which is arranged so as to penetrate the slide table 3 in the axial direction and has a closed slit 36 which can be opened in the axial direction. 3, the slit 36 of the pipe 35 is opened by the opening pin 38 in the air reservoir 19.
The air outlet 41 of the slit 36 for opening
Moves with the movement of the slide table 3, and the axial movement device 1 having the slide table 3 having a long stroke can also supply and discharge the working fluid between the frame 2 side and the slide table 3 side.

Then, the plate material is bent into a circular shape to form a piping pipe 35, and axial flanges 39 formed on both winding ends of the plate material are engaged with each other to form a slit 36. Since the flange 39 in the inner peripheral direction is elastically deformed toward the inner peripheral side to open the slit 36 to form the air outlet 41, both the springback action of the plate material and the working fluid pressure are slit. By acting to close 36, the pressure value of the supply pressure can be applied from the low pressure side to the high pressure side.

Of course, the piping pipe 35 is provided in the frame 2.
When the slide table 3 is provided with the table internal passage 22 communicating with the air reservoir 19 and a plurality of shaft moving devices are combined, the lower table internal passage 22 or the frame internal passage is provided. Thirteen
By connecting the frame inner passage 13 or the table inner passage 22 on the upper side with each other, as in the case shown in FIG. 4, it can be applied to a multi-axis shaft moving device without using an external pipe such as a hose.

FIG. 12 shows a modification of the slit 36 of the piping pipe 35 shown in FIGS.
Instead of bringing them into contact with each other, the winding ends 42 of the piping pipe 35 are brought into contact with each other to seal the inside and outside.

As shown in FIG. 12B, the piping pipe 3
The winding ends 42 of the thin-walled steel plates that form No. 5 are stacked, and the packing 43 is attached to one winding end 42 of the overlapped portion.
Is attached by pasting. And the piping pipe 35
The inner pressure of the working fluid causes the inner surface of the one winding end 42 to come into contact with the outer peripheral side of the other winding end 42, thereby performing sealing. Further, when the piping pipe 35 is formed, the winding end 42 on the outer peripheral side is bent in the contact direction with respect to the winding end 42 arranged on the inner side. It can also be brought into contact with the inner surface. Of course, the packing 20A and the scraper 20B of the seal plate 20 are not shown, but the hole shape is formed along the outer shape of the piping pipe 35.

Then, as shown in FIG. 12C, the winding end 42 on the inner peripheral side is formed by the opening pin 38 as the opening means.
The air outlet 41 is formed by elastically deforming by pushing and removing from the winding end 42 on the outer peripheral side. Of course, since the opening pin 38 moves together with the slide table 3, the air outlet 41 is also attached to the slide table 3.
With this, the communication between the inside of the pipe 35 and the air reservoir 19 is always maintained.

In this modification, in addition to the effects of the embodiment of FIGS. 5 to 11, the plate material is bent so that its winding ends 42 overlap to form a pipe 35, and the slits 36 are formed by the overlapping winding ends 42. Since the winding end 42 located on the inner peripheral side is pushed open to the inner peripheral side by the opening pin 38 to open the slit 36 and form the air outlet 41, the spring back action of the plate material and the working fluid pressure. Both of them act to close the slit 36, and the pressure value of the supply pressure can be applied from the low pressure side to the high pressure side. Moreover, the structure is simple and easy to manufacture.

FIG. 13 shows the slit 36 of the piping pipe 35.
This is a further modified example of the above, in which the winding ends 42 of the piping pipe 35 are arranged so as to face each other, the amount of processing in the circumferential direction when forming the piping pipe 35 is increased, and the winding ends 42 are made to face each other. Sometimes, the winding ends 42 are brought into contact with each other by spring back. Packing 4 on each winding end 42
4 is fixed, and when the winding ends 42 contact each other, the piping pipe 35
Seal the inside and outside of the.

Opening pin 38 as opening means in this case
As shown in FIG. 13B, the air outlet 41 is formed by inserting the tip between the winding ends 42 and forcibly separating the winding ends 42 from each other. The opening area of the air outlet 41 can be adjusted by adjusting the screwing depth of the opening pin 38. The air outlet 41 is for elastically deforming the pipe 35 in the circumferential direction.
In the packing 20A and the scraper 20B of the slide table 3, the piping pipe 35 becomes a closed space. That is, as shown in FIG. 13C, in the piping pipe 35, the elastic deformation amount increases from the scraper 20B portion toward the opening pin 38, and the opening pin 38 causes the other scraper 2 to move.
It is opened so that the amount of elastic deformation decreases toward the 0B portion.

In this modification, in addition to the effects of the embodiment of FIGS. 5 to 11, the slit 36 is formed by the contact between the winding ends 42 of the pipe pipe 35 in which the plate material is bent so that the winding ends 42 face each other. Since the opening pin 38 is inserted between the winding ends 42 to open the slit 36, the spring back of the plate material acts in the direction of closing the slit 36, and the supply pressure acts in the direction of opening the slit 36,
It cannot be used for supplying and discharging high-pressure working fluid, but can be used for supplying and discharging relatively low-pressure working fluid, and has a simple structure.

In the above embodiment, the pipes 17 and 35 are described as cylindrical ones.
Although not shown, a cylindrical member having a polygonal cross section may be used as long as it has a cylindrical shape.

[Brief description of drawings]

FIG. 1 is a sectional view of an axis moving device showing an embodiment of the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is an enlarged view showing a modified example of the piping pipe of the shaft moving device.

FIG. 4 is a perspective view of a three-axis moving device showing an application example of the axis moving device.

FIG. 5 is a cross-sectional view showing another embodiment of the shaft moving device of the present invention.

6 is a sectional view taken along line BB of FIG.

FIG. 7 is a perspective view of the shaft moving device.

FIG. 8 is a sectional view (A) and a partially enlarged sectional view (B) showing a piping pipe used in the shaft moving device.

FIG. 9 is a sectional view (A), a front view (B), and a perspective view (C) showing the seal structure.

FIG. 10 is a sectional view including an opening pin of the slide table.

FIG. 11 is a cross-sectional view (A) showing an operating state of the piping pipe;
And a perspective view (B).

FIG. 12 is a sectional view (A) showing a modified example of the piping pipe, an enlarged sectional view (B), and an enlarged sectional view (C) in an operating state.

FIG. 13 is a sectional view (A) showing another modified example of the piping pipe, a sectional view (B) showing an operating state, and a perspective view (C).

[Explanation of symbols]

1 axis moving device 2 frames 3 slide table 4 End plate 5 ball screws 13 In-frame passage (in-frame passage) 14 1st port 15 End passage (passage in frame) 16 Second port 17,35 Piping pipe 19 Air pool 21 Air outlet hole 22 Table passage 23 Third Port 33 Actuator 36 slits 38 Opening Pin (Opening Means) 41 Air outlet

Claims (7)

[Claims] 1. An axis moving device for slidably supporting a slide table in the axial direction of a frame and moving the slide table in the axial direction, fixed to the frame and penetrating the slide table in the axial direction. A pipe is provided with an air extraction hole in a part of the pipe, and an air reservoir is provided in communication with the air extraction hole on the slide table through which the pipe passes, and the frame is provided through the air extraction hole and the air reservoir of the pipe. A shaft moving device characterized in that a communication path between the slide table and the slide table is formed. 2. The pipe pipe has an annular space that communicates with the inside of the pipe pipe by slidably fitting the outer periphery of the pipe table and slidably fitting both ends of the pipe pipe to the outer periphery of the pipe pipe. The shaft moving device according to claim 1, further comprising: a relay pipe to be formed, wherein the relay pipe has an air extraction hole communicating with an air reservoir of the slide table at an axial center thereof. 3. An axis moving device that slidably supports the slide table in the axial direction of the frame and moves the slide table in the axial direction, is fixed to the frame, and is disposed so as to penetrate the slide table in the axial direction. , A piping pipe with a closed slit that can be opened is provided in the axial direction, an air reservoir is provided on the slide table through which the pipe pipe penetrates, and an opening means for opening the slit of the piping pipe in the air reservoir is provided on the slide table. A shaft moving device characterized in that a communication path between the frame and the slide table is formed through the slit opening. 4. The piping pipe is formed by bending a plate material in a circular shape, and the slit is formed by engaging axial flanges formed at both winding ends of the plate material with each other, and serves as an opening means. The shaft moving device according to claim 3, wherein the opening pin pushes an inner peripheral flange of the two flanges toward the inner peripheral side to open the slit. 5. The piping pipe is formed by bending a plate material so that its winding ends overlap, a slit is constituted by the overlapping winding ends, and an opening pin as an opening means has a winding pin located on the inner peripheral side. 4. The slit is opened by pushing the end toward the inner circumferential side to open the slit.
The axis moving device described in. 6. The piping pipe is formed by bending a plate material so that winding ends face each other, and a slit is formed by the winding ends that are in contact with each other.
The shaft moving device according to claim 3, wherein the shaft moving device is inserted between the winding ends to open a slit. 7. A frame internal passage communicating with a piping pipe is provided in a frame of the shaft moving device, and a table internal passage communicating with an air reservoir is provided in a slide table of the shaft moving device. It is characterized in that a plurality of shaft moving devices are combined by connecting the in-table passage of the slide table or the in-frame passage of the frame which is moved by the device with the in-frame passage or the in-table passage of the upper shaft moving device. The shaft moving device according to any one of claims 1 to 6.