JP2003090977A - Galvano mirror - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain effective damping to the rotational vibration of a mirror and further vibration in a perpendicular direction to a mirror surface in a galvano mirror where the mirror is inclined to a 1st axis and a 2nd axis and is driven. SOLUTION: Damping material 51 is stuck so as to include the end of a spring 23, and simultaneously stuck to a mirror holder 18 and a magnet holder 14, that is, held to couple the holders 18 and 14.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention records and / or records information on an optical recording medium such as a magneto-optical disk drive, a write-once disk drive, a phase-change disk drive, a CD-ROM, a DVD, an optical card and the like. The present invention relates to a galvano mirror used for an information recording / reproducing device for reproducing, an optical scanner, an optical device such as an optical deflector for optical communication, and the like.

[0002]

2. Description of the Related Art Magneto-optical disk drive, write-once disk drive, phase change disk drive, CD-RO
In an optical device such as an information recording / reproducing device that records and / or reproduces information on / from an optical recording medium such as an M, a DVD, or an optical card, or an optical device such as an optical scanner or an optical scanning microscope, the light beam is tilted. An optical element supporting device such as a mirror is used.

As an optical element supporting device, for example, Japanese Patent Application Laid-Open No. 11-85314 discloses a planar type biaxial galvanometer mirror device as shown in FIGS. 24 and 25. FIG. 24 (A) is a top view, FIG. 24 (B) is a side cross-sectional view, and FIG. 25 is a perspective view for explaining the planar type galvanometer mirror.

The planar type biaxial galvanometer mirror 130 includes a semiconductor element 140 having a total reflection mirror 145 formed thereon, a substrate 150, a pedestal 160, a permanent magnet 170, and a yoke 18.
0, the stem 190 and the like. Multiple stems 1
Reference numeral 90 is for supplying a drive signal to the semiconductor element 140, and an electrode pattern 146 formed on the semiconductor element.
A, 146B, 147A, 147B and the upper end of the stem 190 are connected by a wire.

Planar type two-axis galvanometer mirror 130
, Two permanent magnets 170 are arranged diagonally outside the semiconductor element 140 made of a silicon substrate. Semiconductor element 1
In FIG. 40, a thin film coil 144 for driving the inner movable plate 141 is formed in a frame shape on the inner movable plate 141 so as to surround the total reflection mirror 145. Inner movable plate 1
41 and the outer movable plate 142 are connected by the torsion bars 141A and 141A which are integrally formed with the silicon substrate 140. The outer movable plate 42 is connected to the frame-shaped portion of the silicon substrate 140 by torsion bars 142B and 142B. On the other hand, a thin film coil 143 for driving the outer movable plate 142 is formed on the upper surface of the outer movable plate 142.

When a current is passed through the driving thin-film coil 143 formed on the outer movable plate 142, the first torsion bar 14
The outer movable plate 42 rotates according to the current direction with the fulcrums 2A and 142B. At this time, the inner movable plate 141 also rotates integrally with the outer movable plate 142.

On the other hand, when a current is passed through the driving thin-film coil 144 formed on the upper surface of the inner movable plate 41, the inner movable plate 141 is supported by the second torsion bars 141A and 141B.
Rotates. Thin film coil 143 for driving the outer movable plate 142
When a current is applied to the inner movable plate 141 and a current is also applied to the thin film coil 144 for driving the inner movable plate 141, the inner movable plate 141 rotates in a direction perpendicular to the rotation direction of the outer movable plate 142. In this case, two-dimensional scanning can be performed by deflecting and scanning the laser light with the total reflection mirror 145.

A window 148 is formed around the movable plate by etching.
A, 148B, 149A, 149B are formed,
The movable plates are torsion bars 141A, 141B, 142.
It is held only by A and 142B.

[0009]

As in the prior art, the inner movable plate 141 and the outer movable plate 42, which are formed so as to surround the total reflection mirror, are connected by torsion bars 142A and 142B to drive the total reflection mirror. If it is rotated, rotation about the X axis or Y
When a resonance mode in the rotation direction around the axis occurs, the driving characteristics deteriorate, and the angle of the total reflection mirror with respect to the laser beam is not stable as shown in FIG. .

Further, in this structure, the rigidity in the Z direction of FIG. 25 is weak, and the unit to which this galvanomirror is fixed is Z.
Direction external vibration, or when a resonance mode in the Z direction is generated during driving, the total reflection mirror easily abnormally vibrates in the Z direction and the driving characteristics deteriorate. As shown in FIG. There is a problem in that the optical axis after polarization of the light is shifted.

In order to solve such a problem, X, Y
Although it is necessary to suppress the resonance of the rotation mode around the axis and the resonance of the linear mode in the Z direction, when suppressing the resonance of the drive device having a structure in which the movable portion is supported by a spring, a damping material is usually used as the spring. The method of attaching and suppressing resonance is widely used. For example, in the case of this conventional planar type biaxial galvanometer mirror, the torsion bar 141A,
A method of suppressing the resonance by attaching a damping material to 141B, 142A, 142B can be considered.

However, for example, when the inner movable plate 141 rotationally vibrates in the direction around the Y axis, the outer movable plate 14
2 and the torsion bars 142A and 142B are hardly deformed, so that the damping material attached to the torsion bars 142A and 142B has almost no effect on the rotational vibration of the inner movable plate 141 about the Y axis. Further, since the damping material attached to the torsion bars 142A and 142B is on the rotation axis of the inner movable plate 142, the deformation amount of the damping material is small, which means that the vibration of the spring is excessive due to viscoelasticity of the damping material. The effect of suppressing deformation, that is, the damping effect is small.

On the other hand, when the outer movable plate 142 rotationally vibrates in the direction around the X axis, the torsion bars 141A and 141A are used.
Since 1B rotates integrally with the outer movable plate 142, it does not deform, and there is no damping effect of the damping material attached to 141A and 141B. Further, since the damping material attached to 142A and 142B is on the rotation axis of the outer movable plate 142, the amount of deformation of the damping material is small, that is, the damping effect is small as described above.

Further, when a resonance mode that linearly vibrates in the Z direction of FIG. 25 is generated, as described above, the torsion bar 141A and the torsion bars 141B, 142A, 1A.
42B has low rigidity in this direction, and is easily deformed and vibrated easily by the spring. Even if a damping material is attached to the torsion bars 141A and 141B and the torsion bars 142A and 142B to obtain a damping effect, the displacement amount of the total reflection mirror 45 in the Z direction with respect to the pedestal 160 that is the fixing member is the torsion bar 141A, The displacement amount due to the deformation amount of the deformation of 141B and the deformation amount of the torsion bars 142A and 142B is the sum of the displacement amounts, which is large and is effective even if the damping material is attached only to the torsion bars 141A, 141B, 142A and 142B. It's not dumping.

The present invention has been made in view of the above circumstances, and in a galvano mirror in which a mirror is tilted and driven about a first axis and a second axis, rotational vibration of the mirror and vibration in a direction perpendicular to one surface of the mirror are performed. It is an object of the present invention to provide a galvanometer mirror that can obtain effective damping against.

[0016]

A galvanometer mirror of the present invention includes a movable portion having at least a reflecting surface, and a spring for supporting the movable portion so as to be tiltable with respect to a fixed member about first and second axes. A galvanometer mirror having first and second driving means for driving the movable part around the first and second axes, wherein the movable part and the fixed member are:
On a plane parallel to the reflecting surface, and the first and second
It is configured to be connected by a damping material on an axis orthogonal to the rolling axis of the.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

1 to 7 relate to the first embodiment of the present invention, FIG. 1 is a diagram showing a schematic configuration of an optical path switching device, and FIG. 2 is a perspective view of the configuration of the galvanomirror of FIG. 1 is an exploded view of the configuration of the galvano-mirror of FIG. 1, FIG. 4 is a diagram showing a sectional structure of the galvano-mirror of FIG. 1 from a vertical direction, and FIG. 5 is a galvano-mirror of FIG. Is seen from the front, FIG. 6 is a view showing a cross section taken along line XX of FIG. 5, and FIG. 7 is a view showing a cross section taken along line YY of FIG.

As shown in FIG. 1, the optical path switching device 10 for optical communication employs the galvanometer mirror 1 of the first embodiment. The light for signal transmission for optical communication emitted from one optical fiber 3 is collimated by the lens 4 and the incident light 5 is projected on the reflection surface 6a of the front surface (front surface) of the mirror 6 constituting the galvanometer mirror 1. The reflected light 7 is reflected by the reflecting surface 6a and becomes reflected light 7.

The mirror 6 is rotatably supported by rotating shafts A and B in two directions which are orthogonal to each other. By applying a drive signal to two coils described later, the mirror 6 is rotated to the rotating shaft A. By freely rotating and displacing around B, the inclination direction of the reflecting surface 6a can be freely set.

The reflected light 7 on the reflecting surface 6a of the mirror 6 is arranged on a plane substantially perpendicular to the direction of the reflected light 7, for example, three stages (rows) and three columns, and a total of nine lenses 11-1. ，
, 9 are selectively incident on one of the lenses 11-2, ..., 11-9 and are arranged on the optical axis of each lens 11-i (i = 1, 2, ..., 9). It is selectively incident on one of the fibers 12-i (as in the drive signal
The tilting direction of the reflecting surface 6a is controlled).

For example, by tilting the mirror 6 around the rotation axis A, the reflected light 7 at the mirror 6 is deflected in the X direction which is the left-right direction in FIG. 1, and by tilting the mirror 6 around the rotation axis B. The reflected light 7 at 6 is deflected in the Y direction which is the vertical direction of FIG.
Optical fiber 12-1 to 1 by selectively making it enter -9.
2-9 can be selectively made incident.

As a result, the optical fiber for outputting the light from the one optical fiber 3 on the incident side is replaced by the nine optical fibers 12-
The optical path can be switched by selecting from i and outputting. The incident light 5 and the reflected light 7 are the main light rays deflected by the mirror 6 of the galvanometer mirror 1. Hereinafter, a specific configuration of the galvano mirror 1 will be described with reference to FIGS. 2 to 5.

As shown in FIG. 2, in the galvano mirror 1, a mirror 6 arranged in the central portion of a magnet holder 14 attached to a front opening of a housing 13 is vertically and horizontally biaxial A and B orthogonal thereto. A support drive mechanism that rotatably supports the mirror 6 and a rotational displacement of the mirror 6 in two axial directions are arranged in the housing 13 on the rear surface side of the mirror 6 (using light in two dimensions or two directions). It is composed of a position detection device.

As shown in FIG. 2 and the like, the mirror 6 has a square (or rectangular) plate shape, and the reflecting surface 6a on the front side thereof.
Is coated with a coating film having a high reflectance for a wavelength of 1.5 μm of main light used for optical communication. The rear surface 6b (see FIG. 3) of the mirror 6 is coated with a coating film so that the laser 17 (see FIG. 3) for generating light for the sensor has a high reflectance for a wavelength of 780 nm, for example.

This mirror 6 is a rectangular frame-shaped mirror holder 1
It is housed in a mounting recess 18a at the center of 8, and is positioned and adhesively fixed at the periphery.

As shown in FIG. 4, the mirror holder 18 comprises a first molding portion 19 formed in a square frame shape on the outside and a second molding portion 20 formed in a substantially square frame shape on the inside thereof. Thus, the mirror 6 is housed and fixed in the front surface of the second molding unit 20. A first molding portion 19 is formed in a stepped shape at a substantially central position in the front-rear direction outside the second molding portion 20, and the first molding portion 19 (the stepped portion thereof) and a second adjacent portion before and after the first molding portion 19 are formed. The outer peripheral surface of the molding portion 20 and the first coil 21
And has a function of a coil holder that holds the second coil 22 in a fixed manner.

Further, four arc-shaped springs 23 (see FIG. 2) are arranged at the outer peripheral position of the first molding portion 19, and both ends of the springs 23 are insert-molded into the magnet holder 14. . In FIG. 2, the spring 23 and the magnet holder 14 are disassembled and shown as separate bodies, but the spring 23 is insert-molded in the magnet holder 14 as described below.

When the first molding portion 19 of the mirror holder 18 and the magnet holder 14 are molded of plastic, the four springs 23 (20 μm beryllium copper foil etched and gold-plated on the surface) The inner portion is first insert-molded into the first molding portion 19 of the mirror holder 18, and the outer portion is first insert-molded into the magnet holder 14,
Both ends are retained.

Next, the first coil 21 and the second coil 22 are insert-molded on the front and rear sides of the spring 23 at the time of molding the second molding portion 20, and are fixed to the mirror holder 18. The mirror holder 18 to which the mirror 6 is attached, and the first attached to the outer peripheral surface of the mirror holder 18.
The coil 21 and the second coil 22 constitute a movable part.

As shown in FIG. 5, one end of each of the four springs 23 is fixed to each of two positions, that is, the center of the upper surface and the center of the lower surface of the mirror holder 18 near the rotation axis A. The vicinity of the fixed end has a first deforming portion 23a which is deformed so as to be parallel to the rotation axis A.

The other end of the spring 23 is attached to the magnet holder 1
The left and right side walls near the rotation axis B of No. 4 are fixed at two places respectively. The vicinity of the fixed end of the other end has a second deforming portion 23b that is deformed so as to be parallel to the rotation axis B.

First deforming portion 23a and second deforming portion 23b
A connecting portion 23c for connecting the two is arranged so as to surround the four corners of the mirror holder 18. The four deforming portions 23a,
The spring 23 having the connecting portion 23c and the deforming portion 23b serves as the supporting member in the present embodiment.

A soldering portion (not shown) connected to the first deforming portion 23a inside the mirror holder 18 is arranged near the first deforming portion 23a, and a total of four soldering portions are provided. Terminals at both ends of the first coil 21 and the second coil 22 are fixed with a conductive adhesive.

The end of the second deformable portion 23b is inserted into the magnet holder 14, and this insert portion passes through the magnet holder 14 and reaches the four terminals 26 protruding to the outer surface of the magnet holder 14. . By soldering a flexible cable to these four terminals 26 and feeding power through the flexible cable, the two coils 21 and 2 are passed through the four springs 23.
A drive signal can be supplied to 2 to rotate the movable part.

As shown in FIG. 3, FIG. 4, FIG. 5, etc., two magnets 31 magnetized in the horizontal direction have yokes 32 bonded to their back surfaces, and the first coil 21 faces inside thereof. Magnet holder 14 at the left and right sides
It is glued and fixed to.

Then, a magnetic circuit is constructed so that the magnetic field generated by the magnet 31 acts on the first coil 21 which is arranged inside the magnet 31 so as to face it.

Mirror holder 18 and magnet holder 14
Is formed of a non-conductive plastic such as a liquid crystal polymer containing whisker titanate.

As shown in FIG. 3, two magnets 33 magnetized in the vertical direction are bonded to the yoke 34 on the back surface, and the second coil 22 faces the inside thereof, and the magnet holder 14 is positioned at the upper and lower sides thereof. Is glued to.

The magnet holder 14 having a substantially rectangular frame shape is adhered to the mounting surface 13a on the front surface of the housing 13 formed by, for example, zinc die casting, which is open.

The mirror holder 18 to which the mirror 6 is attached as described above and the first and second coils 21 and 22 constitute a movable portion, and as shown in FIG. 4, the center of gravity G of the movable portion is on the rotation axis A. And on the rotation axis B as well. Further, the principal axis of inertia of the movable part coincides with the rotation axis A and the rotation axis B.

Further, the spring 23 is arranged so as to coincide with the plane formed by the rotation axis A and the rotation axis B. Further, the first deforming portion 23a shown in FIG. 5 is arranged at a position substantially matching the rotation axis A, and the second deforming portion 23b is arranged at a position substantially matching the rotation axis B.

As shown in FIG. 4, the spring 23 is not arranged at the central position between the first coil 21 and the second coil 22 attached to the front and rear, but the first coil 21 near the first coil 21 on which the mirror 6 is arranged. By arranging the spring 23 at the position, the position of the center of gravity including the mirror 6 can be matched with the rotation axes A and B without a balancer.

The force generated in the first coil 21 is generated at the driving point D1 in the vertical direction within the plane of FIG.
As a result, torque is generated around the midpoint D1-1 that connects the drive points D1 and D1. Note that FIG. 4 shows a cross section when cut along a horizontal plane including the rotation axis B. The torque centered on the driving points D1 and D1-1 is on the horizontal plane including the rotation axis B.

A force is generated in the second coil 22 on the sides in the front and back direction of the paper surface of FIG. 4, and the force is generated at the driving point D2 of FIG. 4 in the vertical direction on the upper and lower surfaces perpendicular to the paper surface of FIG. To do. As a result, a torque is generated centered on the middle point D2-1 connecting the two drive points D2 and D2 (two points D2 and D2 coincide with the point D2-1 in FIG. 4).

As shown in FIG. 4, the torque centered on D1-1 and the torque centered on D2-1 are formed to have a distance close to the center of gravity G.

Further, the housing 13 is provided with a sensor for detecting the inclined surface of the mirror 6 caused by the rotation about the rotation axes A and B. As shown in FIG. 3, a laser (diode) 17, which is a light source for a sensor, is press-fitted and fixed in the opening 13b at the rear end of the housing 13. In addition, this laser 17
The laser light emitted from the PBS (polarization beam splitter) 36 having a polarization surface 36a to which the ¼λ plate 35 is bonded is provided at the front position of the laser light, and the adhesive surface 36b formed by one side surface of the PBS (polarization beam splitter) 36 ) It is adhesively fixed to the inner wall surface.

Further, the lens 37 is arranged in the housing 13 at the front position of the PBS 36 and is adhesively fixed. Then, the laser light from the laser 17 is PBS 1/4
The light is condensed through the λ plate 35 and the lens 37, and the lens holder 1
The light is incident on the back surface 6b of the mirror 6 held by the mirror 8. The inner wall of the rear surface of the lens holder 18 has a circular opening 18b (FIG. 5).
reference).

A position detection sensor (PSD) for detecting the light irradiation center position of the projected light in two directions so as to face the side surface of the PBS 36 opposite to the adhesive surface 36b.
38 is adhered and fixed to an opening provided on the side surface of the housing 13. The PSD 38 is a two-dimensional position sensor that outputs the center position of the light projected on the light receiving portion 38a in two directions (X and Y directions) by voltage. For example, S5990-01 and S7848-01 of Hamamatsu Photonics KK Etc. can be adopted.

In FIG. 5, the damping material 51 is attached so as to cover the spring end portion 23, and at the same time, is attached to the mirror holder 18 and the magnet holder 14, that is, is held so as to connect the mirror holder 18 and the magnet holder 14. . The effect of connecting in this way will be described below.

When the mirror holder 18 is rotationally driven in the direction of A in FIG. 5, the plane end 53 on the movable portion side (mirror holder 18 side) is located at a position farthest from the rotation axis of the mirror in the movable portion. Therefore, the amount of displacement due to rotation is the largest. Therefore, the relative displacement amount between the flat end 53 on the movable part side and the end part 52 on the fixed part side (the magnet holder 14 side) that is close to and opposed to the flat end part 53 is the largest. If the parts having the largest relative displacement are connected with a viscoelastic body such as an ultraviolet curable silicone gel as shown in the sectional view of FIG. 6, the amount of deformation of the damping material 51 increases.
Due to viscoelasticity, the resistance given by the damping material 51 also increases, so that a strong damping effect can be obtained.

In addition to the resonance in the rotational direction of the mirror holder 18, the resonance in the front-back direction of the paper surface of FIG. Since they are directly connected, a similarly strong damping effect can be obtained.

Further, when the mirror holder 18 rotates in the direction B of FIG. 5, the relative displacement amount between the parts 54 and 55 becomes the largest. Therefore, by connecting the damping material 51 as shown in the cross-sectional view of FIG. 7, the above-described strong damping effect can be obtained. Further, if both the damping material 51 on the first deforming portion 23a side and the damping material 51 on the second deforming portion 23b side are combined, the rotation direction in the direction A,
A reliable damping effect is obtained with respect to both resonances in the rotation direction of B, and the damping effect with respect to resonances in the front and back direction of the paper is also doubled.

8 to 10 relate to the second embodiment of the present invention, FIG. 8 is a front view of the galvano mirror, FIG. 9 is a sectional view taken along line XX of FIG. Figure 8
It is the figure which looked at the modification of the Galvano mirror of from the front.

Since the second embodiment is almost the same as the first embodiment, only different points will be described, the same components will be denoted by the same reference numerals, and description thereof will be omitted.

Next, a second embodiment of the present invention will be described with reference to FIG. In this embodiment, a protrusion 57 is formed on the damper attachment portion of the mirror holder 18. The effect of forming the protrusion will be described below.

In the first embodiment, since the damper-attached portion of the mirror holder 18 is flat, when a low-viscosity UV-curable silicone gel having a viscosity of, for example, about 5000 cps is used, the liquid will spread to the flat surface. Because of the property of being applied, it is difficult to keep the connection as it is, and easily breaks in the connection intermediate part several seconds after application. That is, it is easy to tear before the curing is completed by the irradiation of ultraviolet rays, and it is difficult to make a state in which the movable portion side (mirror holder 18 side) and the fixed portion side (magnet holder 14 side) are connected.

In the present embodiment, by attaching the damping material 51 so as to cover the projection 57 as shown in the sectional view of FIG. 9, it is possible to improve the holding force of the damping material 51 immediately after coating. It is also possible to apply a damper material having low viscosity.

Further, the holding force is maintained even when the mirror holder 18 is driven, and the damping material 51 is securely held even when the parts having a large relative displacement are connected to each other, so that the movable part fixed part connection ensures reliable damping. The effect is obtained. In this case, the fixed member side (magnet holder 14 side) is not limited to the movable portion side (mirror holder 18 side).
A protrusion may be provided on the side). As shown in FIG. 10, a protrusion may be provided on the fixed member side (magnet holder 14 side), and the damping material 51 may be connected so as to cover this protrusion.

Further, in the case where the damping member 51 is connected to the positions 54 and 55 in FIG. 8 as well, by providing the protrusion 88 on the fixing member side in the same manner, a similar effect can be obtained with respect to the resonance in the rotational direction of B. To be The protrusion is preferably formed integrally with the member, but a separate member may be attached.

11 to 13 relate to the third embodiment of the present invention, FIG. 11 is a front view of the galvano-mirror, FIG. 12 is a sectional view taken along line XX of FIG. 11, and FIG.
FIG. 12 is a diagram showing a modified example of the XX line cross section of FIG. 11.

Since the third embodiment is almost the same as the first embodiment, only different points will be described, the same components will be denoted by the same reference numerals, and description thereof will be omitted.

Next, a third embodiment of the present invention will be described with reference to FIG. In this embodiment, the projecting portions 59 are provided so that the upper surface and the lower surface of the damper-attached portion of the movable portion are opposite to each other at both ends. The damping material 51 is applied so as to fill the two protruding portions 59 and is applied to the movable portion (mirror holder 18). At the same time, the damping material 51 is attached to the fixed portion (magnet holder 14). The effect of providing the protrusion 59 will be described below.

Damping material 5 for connecting the movable part and the fixed part
As shown in the sectional view of FIG. 12, 1 is sandwiched and held by the projecting portions 59, and the holding force of the damping material 51 is maintained even if the portions having a large relative displacement are connected by the damping material 51. It becomes possible.

Therefore, a reliable damping effect can be obtained by connecting the movable portion fixed portion as described in the first embodiment.

The protruding portion is not limited to the movable portion, and the protruding portion 60 may be provided on the fixed portion as shown in FIG.

FIGS. 14 to 17 relate to the fourth embodiment of the present invention, FIG. 14 is a view of the galvanometer mirror as seen from the front, FIG. 15 is an enlarged view of the recessed portion of FIG. 14, and FIG. The figure which shows the 1st modification of the Galvano mirror of 14 and FIG.
7 is a diagram showing a second modification of the galvanometer mirror in FIG.

Since the fourth embodiment is almost the same as the first embodiment, only different points will be described, the same components will be denoted by the same reference numerals, and description thereof will be omitted.

Next, a fourth embodiment of the present invention will be described with reference to FIG. In the present embodiment, a concave portion 61 is provided in a part of the movable portion, and the concave portion 61 is applied so as to be filled with the damping material 51 and attached to the movable portion (mirror holder 18). At the same time, the damping material 51 is attached to the fixed portion (magnet holder 14). The effect of this embodiment will be described below.
Since 1 is held in the recess 61 as shown in FIGS. 14 and 15, the holding force of the damping member 51 can be maintained even when the parts having large relative displacements are connected to each other. .

Therefore, a reliable damping effect can be obtained by connecting the movable portion fixed portion as described in the first embodiment.

Further, the present embodiment is not limited to the movable part, and is shown in FIG.
6, the fixed portion may be provided, or the movable portion and the fixed portion may be provided with a recessed portion as shown in FIG.

18 to 23 relate to the fifth embodiment of the present invention. FIG. 18 is a front view of a galvano mirror, FIG. 19 is a view showing the film of FIG. 18, and FIG. 20 is a view of FIG. FIG. 21 is a diagram for explaining the action of the film, FIG. 21 is a diagram showing a first modification of the galvanomirror of FIG. 18, and FIG. 22 is FIG.
FIG. 23 is a diagram showing a second modification of the galvano mirror shown in FIG. 8, and FIG. 23 is a diagram showing a third modification of the galvano mirror shown in FIG.

Since the fifth embodiment is almost the same as the first embodiment, only different points will be described, the same components will be denoted by the same reference numerals, and description thereof will be omitted.

Next, a fifth embodiment of the present invention will be described with reference to FIG. In this embodiment, a thin film 71, for example, a polyester film having a thickness of about 10 μm to 30 μm is cut into a shape as shown in FIG. 19 by laser cutting in the mirror holder 18, and the film 71 is fixed to the holder. The damping material 51 is attached to the movable portion so as to cover the film 71 as shown in FIG. 18, and is connected to the fixed portion. The effects of this embodiment will be described below.

By attaching the damping material 51 to the film 71, the initial holding force of the damping material 51 can be improved as described in the second embodiment.

Even when the mirror holder 18 is driven, the tip of the film 71 is moved to the damping member 5 as shown in FIG.
The film 71 is deformed while being held at 1, and the relative displacement between the film 71 and the fixed portion is smaller than the relative displacement between the movable portion (mirror holder 18) and the fixed portion (magnet holder 14). Therefore, in this case, even if the movable portion and the fixed portion are connected, the load acting on the intermediate portion of the damping material 51 is reduced, and the life of the damping material 51 can be extended. At the same time, the resistance strength required for the damping material 51 is also reduced, so that the damping material 51 can be easily selected.

Further, in the present embodiment, the film 71 may be fixed to two different surfaces of the movable portion as shown in FIG. 21, and the damping material 51 may be sandwiched between the films 71.

The film 71 is not limited to being fixed to the movable part, but the film 71 may be fixed to the fixed part as shown in FIG. 22 or to both the movable part and the fixed part as shown in FIG.

The first to fifth embodiments have been described above. However, in these embodiments, the damping material 51 is not limited to the ultraviolet curing type silicone gel, and the structure of the holder does not affect the ultraviolet rays. If the shape is hard to hit, thermosetting silicone gel or the like may be used.
Further, acrylic gel, butyl rubber liquefied by a solvent or the like may be used.

As described above with reference to FIGS. 1 to 23, according to the present invention, it is possible to obtain the damping structure that strongly suppresses the abnormal vibration generated when the galvanometer mirror is driven. Further, it becomes possible to improve the holding power of the damping material.

Particularly in claim 4, by reducing the load acting on the damping material, it becomes possible to facilitate the selection of the damping material and prolong the product life.

[0082]

As described above, according to the present invention, in a galvano mirror in which a mirror is tilted and driven about a first axis and a second axis, the rotation vibration of the mirror and the vibration in a direction perpendicular to one surface of the mirror are prevented. The effect is that effective damping can be obtained.

[Brief description of drawings]

FIG. 1 is a diagram showing a schematic configuration of an optical path switching device according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a perspective view of the configuration of the galvanometer mirror shown in FIG.

FIG. 3 is an exploded view of the configuration of the galvanometer mirror in FIG.

FIG. 4 is a diagram showing a sectional structure of the galvanomirror of FIG. 1 from a vertical direction.

5 is a front view of the galvanometer mirror shown in FIG.

6 is a diagram showing a cross section taken along line XX of FIG.

7 is a diagram showing a cross section taken along line YY of FIG.

FIG. 8 is a front view of a galvanometer mirror according to a second embodiment of the present invention.

9 is a view showing a cross section taken along line XX of FIG.

10 is a front view of a modified example of the galvanometer mirror shown in FIG.

FIG. 11 is a front view of a galvanometer mirror according to a third embodiment of the present invention.

12 is a view showing a cross section taken along line XX of FIG.

FIG. 13 is a view showing a modified example of a cross section taken along line XX of FIG. 11.

FIG. 14 is a front view of a galvanometer mirror according to a fourth embodiment of the present invention.

FIG. 15 is an enlarged view of the recessed portion of FIG.

16 is a diagram showing a first modification of the galvanometer mirror shown in FIG.

FIG. 17 is a diagram showing a second modification of the galvanometer mirror shown in FIG.

FIG. 18 is a front view of a galvanometer mirror according to a fifth embodiment of the present invention.

FIG. 19 shows the film of FIG.

20 is a view for explaining the action of the film of FIG.

FIG. 21 is a diagram showing a first modification of the galvanometer mirror shown in FIG. 18.

FIG. 22 is a diagram showing a second modification of the galvanometer mirror of FIG. 18.

FIG. 23 is a diagram showing a third modification of the galvanometer mirror shown in FIG. 18.

FIG. 24 is a top view and a side view showing a conventional biaxial galvanometer mirror.

FIG. 25 is a perspective view showing a conventional biaxial galvanometer mirror.

FIG. 26 is a diagram for explaining an optical axis tilt shift due to resonance in a rotation direction of a reflection mirror of a conventional technique.

FIG. 27 is a diagram for explaining an optical axis shift due to resonance in a direction perpendicular to a reflection mirror of a conventional technique.

[Explanation of symbols]

1 ... Galvo mirror 6 ... Mirror 13 ... Housing 14 ... Magnet holder 17 ... Laser 18 ... Mirror holder 19 ... 1st molding part 20 ... Second molding part 21 ... First coil 22 ... Second coil 23 ... Spring 51 ... Damping material

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 2H041 AA14 AB14 AC05 AZ02 AZ05                 2H045 AB13 AB16 AB18 DA32                 5D118 AA23 DC07 EF03 EF08 FA30                       FB05

Claims (4)

[Claims] 1. A movable part having at least a reflecting surface, a spring for supporting the movable part with respect to a fixed member so as to be tiltable about first and second axes, and the movable part for the first and second parts. In the galvanometer mirror having first and second driving means for driving about the axis of, the movable portion and the fixed member are on a plane parallel to the reflection surface, and the first and second rolling movements. A galvanometer mirror characterized by being connected by a damping material on an axis orthogonal to the axis. 2. The galvanometer mirror according to claim 1, wherein a protrusion is provided on the movable portion or the fixed portion or both, and a damping material is attached to the protrusion. 3. The galvanometer mirror according to claim 1, wherein a recess is provided in the movable portion or the fixed portion or both, and the recess is filled with a damping material. 4. The galvanometer mirror according to claim 1, wherein a thin film is fixed to the movable part or the fixed part or both, and a damping material is attached to the film.