JP2003089037A - Processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a processing device provided with a horizontally moving part capable of moving freely in a horizontal direction and a vertical moving part capable of moving freely in a vertical direction, wherein exciting force resulting from movements of the horizontally moving part and the vertically moving part is prevented from transmitting to a floor and the exciting force to the floor is prevented from being generated. SOLUTION: Active mass dampers 20a, 20b are arranged on a bed 4. For example, when moving an X table 5a, weights 27a, 27b provided at the active mass dampers 20a, 20b are moved by using an input signal that is inputted in a motor 6a for driving the X table 5a to balance out inertial force caused by the X table 5a moving with inertial force caused by the weights 27a, 27b moving.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing apparatus provided on a bed with a horizontally movable part that is horizontally movable and an up and down movable part that is vertically movable. TECHNICAL FIELD The present invention relates to a processing device capable of reducing floor vibrations that occur due to the above.

[0002]

2. Description of the Related Art For example, a printed circuit board boring machine for boring a printed circuit board or the like is provided with an X table for horizontally supporting the printed circuit board or the like and moving in the horizontal direction. A Y table that moves in a horizontal direction orthogonal to the table and a plurality of Z tables that are supported by the Y table and that rotatably hold a drill and move in the vertical direction are provided.

Here, when the Z table is moved, in the printed circuit board drilling machine, an exciting force having a magnitude which is an acceleration of the mass of the Z table and the members mounted on the Z table is generated in the vertical direction. To do. This vibrating force is transmitted to the floor via the leveling bolts that support the printed circuit board drilling machine, and vibrates the floor in the vertical direction. As a result, a low-order vibration mode is generated on the floor.

Further, when the X table is moved, the printed board punching machine horizontally generates an exciting force of a magnitude obtained by accelerating the mass of the X table and the members mounted on the X table. . Since the point of action of this exciting force is higher than the floor, the momentum determined by this exciting force and the height of the point of action causes the printed board boring machine to increase the rigidity of the floor and the board boring machine. Rotational vibration (rocking vibration) having a natural frequency determined by the rotational inertia of the. And
The vibration force transmitted from one of the leveling bolts arranged on both sides of the printed circuit board drilling machine acts in the direction of pushing down the floor, and the vibrational force transmitted from the other acts in the direction of raising the floor. As a result, higher-order vibration modes are generated on the floor.

Also, when moving the Y table, X
High-order vibration modes occur on the floor, as when the table is moved.

Therefore, when each of the X, Y, and Z tables is moved at high speed in order to improve the machining efficiency, the vibration of the floor becomes large.

When the printed circuit board drilling machine is installed on the first floor of a building with a solid foundation, floor vibration is not so great. However, when the printed circuit board drilling machine is installed on the floor on the second floor or higher, these floors often do not have the rigidity and mass of the first floor. Large vibrations and accompanying noise may occur. Such vibrations and noise not only cause discomfort to the operator, but also lead to a reduction in processing accuracy and processing efficiency. Further, the repeated vibration may reduce the strength of the building.

By the way, in order to prevent the vibration of the equipment from being transmitted to the floor, there has been conventionally taken measures against vibration by providing a vibration-damping member composed of an elastic body and a damper at the base portion of the equipment. However, if the printed circuit board boring machine is flexibly supported by such a vibration isolating member, rocking vibration becomes large, so that the horizontal displacement of the X table is greatly increased as compared with the case where the vibration isolating member is not supported. Positioning controllability deteriorates. Further, when the printed circuit board drilling machine is flexibly supported, the supporting load of each antivibration device changes due to the movement of the X table, so the levelness of the printed circuit board drilling machine changes and high-precision machining is performed. Becomes difficult. Therefore, it is not appropriate to flexibly support the printed circuit board boring machine by the vibration isolating member.

Therefore, in Japanese Patent Laid-Open No. 6-336394, in order to reduce the vibration in the vertical direction transmitted to a movable carriage movable on a girder, an additional mass restrained by a linear motion restraining mechanism is applied to the movable carriage. An active type dynamic vibration reducer (active mass damper) including a servomotor that moves an additional mass, and an acceleration detector are provided. Then, the vertical vibration transmitted to the moving carriage is detected by the acceleration detector, and the active mass damper is controlled according to the detected value, so that the impulse-like vertical excitation force generated during the hoisting work of the suspended load, etc. Is being attenuated. Therefore, if the principle of such an active mass damper is adopted, it is possible to damp the vertical exciting force based on the mass of the Z table or the like of the printed circuit board drilling machine.

[0010]

However, in the case of the above technique, damping of the rocking vibration is not considered.

Further, since the active mass damper is operated after the vibration is generated, a time delay occurs.

An object of the present invention is to solve the above-mentioned problems in the prior art, and to provide a processing apparatus provided with a horizontally movable horizontal moving portion and a vertically movable vertical moving portion,
It is an object of the present invention to provide a processing device that prevents the excitation force generated by the movement of the horizontal movement unit or the vertical movement unit from being transmitted to the floor and prevents the generation of the excitation force on the floor.

[0013]

In order to achieve the above-mentioned object, the invention of claim 1 has a horizontal movable portion movable horizontally and / or a vertical movable portion movable vertically in the bed. In a processing device provided with, a plurality of inertial force generating means including a supporting device that supports the weight so as to be vertically movable, and a weight driving device that drives the weight, and a control means that controls the driving device. Provided, the plurality of inertial force generating means is arranged on the bed, the control means, by using an input signal input to the driving means for driving the horizontal moving section or / and vertical moving section driving means, It is characterized in that the weight is moved so as to reduce the force transmitted to the floor due to the movement of the horizontal moving unit and / or the vertical moving unit.

According to a second aspect of the present invention, in a processing apparatus having a horizontally movable horizontal moving portion and / or a vertically movable vertical moving portion on a bed, the weight is vertically movable. A plurality of inertial force generating means including a supporting device that supports the weight and a weight driving device that drives the weight, a control unit that controls the driving device, and a plurality of units that output a signal according to the applied force. And a load cell,
The plurality of inertial force generating means are arranged on the bed, and the load cell is arranged between the support portion of the bed and the floor, and the control means reduces the force applied to the load cell. It is characterized in that the weight is moved.

According to a third aspect of the present invention, in a processing apparatus having a horizontally movable horizontal moving portion and / or a vertically movable vertical moving portion on a bed, the weight is vertically movable. A plurality of inertial force generating means including a supporting device that supports the weight and a weight driving device that drives the weight, a control unit that controls the driving device, and a plurality of units that output a signal according to the applied force. And a load cell,
The plurality of inertial force generating means are arranged on the bed, the load cell is arranged between the support portion of the bed and the floor, and the control means is the horizontal moving portion or / and Moving the weight so that the force applied to the load cell is reduced using an input signal input to a drive unit that drives the vertical movement unit drive unit and an output signal output from the load cell. Is characterized by.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will now be described based on the illustrated embodiments.

FIG. 1 is a side view of a printed circuit board boring machine to which the present invention is applied.

In FIG. 1, the printed board punching machine 1 is mounted on the floor 2. The linear guide 3a is fixed to the upper surface of the bed 4. The X table 5a is supported by the linear guide 3a, and is movable in the left-right direction (X direction) in the drawing by a motor 6a and a ball screw 7a. The motor 6a is connected to the table drive controller 40. A printed circuit board 8 is placed on the upper surface of the X table 5a.

The gate-shaped frame 9 is fixed to the upper surface of the bed 4 so as to straddle the X table 5a. The linear guide 5b is fixed to the side surface of the frame 9.
The Y table 5b is supported by the linear guide 3b and is movable in a direction (Y direction) perpendicular to the paper surface by a motor and a ball screw (not shown).

The linear guide 3c is fixed to the upper surface of the Y table 5b. The Z table 5c is supported by the linear guide 3c and is movable in the vertical direction (Z direction) in the figure by a motor 6c and a ball screw 7c. Motor 6
c is connected to the table drive controller 40. A spindle 11 that rotatably supports the drill 10 is fixed to the upper surface of the Z table 5c.

On the bottom plate 4a of the bed 4, there is an X table 5a.
A pair of active mass dampers 20a and 20b are arranged in accordance with the moving direction of the center of gravity of. The active mass dampers 20a and 20b have the same structure, and as will be described later, the floor vibration is reduced with respect to the horizontal exciting force due to the movement of the X table 5a and the vertical exciting force due to the movement of the Z table 5c. It is provided for this purpose. The active mass dampers 20a and 20b are arranged on both sides of the center of gravity of the printed board punching machine 1 in the X direction.

Leveling bolt 12 for supporting the bed 4
Load cells 13a and 13b are arranged between the floor 2 and the floor 2.

A pair of active mass dampers (not shown) are provided in order to reduce the floor vibration against the horizontal exciting force caused by the movement of the Y table 5b and the vertical exciting force caused by the movement of the Z table 5c. It is arranged on both sides of the moving direction of the center of gravity of the table 5b and the Y direction of the center of gravity of the printed board punching machine 1. Further, a load cell is arranged between the leveling bolt (not shown) and the floor 2.

The controller 41 is connected to the table driving controller 40, the load cells 13a and 13b, and the load cells (not shown) arranged in the Y direction.

Next, the active mass damper according to the present invention will be described.

FIG. 2 is a front sectional view of the active mass damper according to the present invention.

A motor 22 is fixed to the lower part of the pedestal 21. The ball screw 23 is connected to the output shaft of the motor 22 via a coupling 24. Ball screw 23
Are held on the frame 21 via bearings 25. A ball nut 26 screwed onto the ball screw 23 is fixed to a weight 27. The weight 27 is supported by a plurality of linear guides 28 fixed to the mount 21 so as to be vertically movable. The elastic body 29 faces the weight 14 so that the frame 1
It is located at 2. The elastic body 29 relieves the collision force when the weight 27 falls on the pedestal 21 when electric power is not supplied to the motor 22. The cover 30 is fixed to the mount 21 so as to cover the weight 27.

Next, the operation of this embodiment will be described.

In order to minimize the moving time of the X table 5a, the Y table 5b, and the Z table 5c, a speed pattern during movement, that is, acceleration and deceleration during acceleration and deceleration, is predetermined. There is.

When a move command to move the X table 5a is output from the host controller, the table drive controller 40 outputs a current command signal or a voltage command signal to the motor 6a based on this move command. The motor 6a is driven.

In the controller 41, based on the current command signal or the voltage command signal output to the motor 6a, the inertial force of the weights 27a and 27b has a phase opposite to the moment force of the horizontal exciting force when the X table 5a moves. like,
The motors 22a and 22b are operated. That is, in FIG. 1, when the X table 5a is moved to the right, the weight 27a is moved downward and the weight 27b is moved upward during acceleration for starting the movement. In addition, at the time of stopping to end the movement,
The weight 27a is moved upward and the weight 27b is moved downward. In this way, the weights 27a, 2 are moved in accordance with the movement of the X table 5a.
By performing the feedforward control of operating 7b, the occurrence of rocking vibration can be suppressed in advance. Therefore, floor vibration is prevented.

Further, the feedback control for feeding back the output values of the load cells 13a, 13b to operate the weights 27a, 27b can further reliably suppress the occurrence of rocking vibration.

Next, the drill 10 from the upper controller
When a movement command is output so as to cut (i.e., move the Z table 5c), the table drive controller 40 causes the motor 6c based on the movement command.
A current command signal or a voltage command signal is output to drive the motor 6c.

In the controller 41, based on the current command signal or the voltage command signal output to the motor 6c, the inertial force due to the weights 27a and 27b has a phase opposite to the moment force due to the vertical exciting force when the Z table 5c is moved. like,
The motor 22 is operated. That is, in FIG.
When the table 5c is moved downward, the weights 27a and 27b are moved upward during acceleration for starting the movement. Further, at the time of stopping the movement, the weights 27a and 27b are moved downward. In this way, by performing the feedforward control in which the weights 27a and 27b are operated in accordance with the movement of the Z table 5c, it is possible to suppress the vertical vibration in advance. Therefore, floor vibration is prevented.

Further, the feedback control for operating the weights 27a, 27b by feeding back the output values of the load cells 13a, 13b can suppress the vertical vibration more reliably. In this case, load cell 13
Since the transmission forces applied to a and 13b have the same phase, it is effective to control the weight 27b using the output signal of the load cell 13a and control the weight 27a using the output signal of the load cell 13b.

When a movement command is issued to move the Y table 5b, the active mass damper (not shown) is controlled in the same manner as the X table 5a.

In this embodiment, since both feedforward control and feedback control are performed, the rocking vibration associated with the movement of the X and Y tables and the vertical vibration associated with the movement of the Z table are transmitted before or to the floor. At the same time, it is canceled by the inertial force of the weight, so the floor does not vibrate. Moreover, since the vibration is not suppressed after detecting the vibration of the floor, there is no time delay.

In place of the current command signal or voltage command signal to the motor 6a or the like output from the table drive controller 40, the weight 27a or the like is operated using a speed command signal or a position command signal commanded by a host controller. You may let me.

The control method of the motor 22 is not limited to speed control, but torque control or position control may be adopted.

Further, the Y table 5b and the Y table 5
When the mass of the member placed on b is small and the excitation force can be ignored, it is not necessary to provide the Y-direction active mass damper and load cell (not shown).

Further, either one of the feedforward control and the feedback control may be performed,
If only feedforward control is adopted, it is not necessary to provide a load cell.

Further, as shown in FIG. 3, the motor 22 and the bearing 25 may be mounted on the weight 27, and the ball nut 26 may be arranged on the mount 21. In this way, the weight 27
The weight of the active mass damper 20 can be reduced and the active mass damper 20 can be made compact. In addition,
The operation is the same as in the case of FIG.

Further, the motor 22 may be a motor with a brake instead of the elastic body 29 or in addition to the elastic body 29.

[0044]

As described above, according to the present invention,
A plurality of inertial force generating means are arranged on the bed, the weight is moved by using an input signal input to the driving means for driving each moving part, and the inertial force generated by each moving part is moved to the weight. Since it is made to cancel by the inertial force of, the floor vibration can be greatly reduced. Further, by disposing the load cell between the support portion of the bed and the floor and moving the weight according to the output of the load cell, the vibration damping effect can be further enhanced.

[Brief description of drawings]

FIG. 1 is a side view of a printed circuit board boring machine according to the present invention.

FIG. 2 is a front sectional view of an active mass damper according to the present invention.

FIG. 3 is a front sectional view of another active mass damper according to the present invention.

[Explanation of symbols]

4 beds 5a X table 6a motor 20a, 20b Active mass damper 27a, 27b Weight

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Toshihiko Horiuchi             502 Kintatemachi, Tsuchiura City, Ibaraki Japan             Tate Seisakusho Mechanical Research Center (72) Inventor Shinji Tanaka             Hitachi Bi, 2100 Kamiimazumi, Ebina City, Kanagawa Prefecture             Inside Amechanics Co., Ltd. (72) Inventor Yasushi Ito             Hitachi Bi, 2100 Kamiimazumi, Ebina City, Kanagawa Prefecture             Inside Amechanics Co., Ltd. F-term (reference) 3C001 KA07 KB02 TB08

Claims (4)

[Claims] 1. A processing apparatus having a horizontal moving section movable horizontally and / or a vertical moving section moving vertically on a bed, and a supporting apparatus for supporting a weight so as to move vertically. A weight drive device for driving the weight, and a plurality of inertial force generating means arranged on the bed; a drive means for driving the horizontal moving section and / or a vertical moving section driving means; Control means for controlling the device, wherein the control means reduces the force transmitted to the floor by the movement of the horizontal moving section and / or the vertical moving section based on the input signal input to the driving means. A processing device, wherein the weight is moved by the weight driving device. 2. A processing apparatus provided on a bed with a horizontal moving section movable horizontally and / or a vertical moving section moving vertically, and a supporting apparatus for supporting a weight so as to be movable vertically. A plurality of inertial force generation means arranged on the bed, which has a weight drive device for driving a weight, a control means for controlling the weight drive device, and a space between the support part of the bed and the floor. A plurality of load cells that output signals according to the applied force, the control means is configured to reduce the force applied to the load cells based on the signals output from the load cells. A processing device, wherein the weight is moved by a driving device. 3. The weight driving device controls the weighting device based on a signal input from a driving unit for driving the horizontal moving unit and / or the vertical moving unit driving unit, in addition to a signal output from the load cell. The processing apparatus according to claim 2, wherein the weight is moved. 4. The processing apparatus according to claim 1, wherein the weight driving device is mounted on the weight.