CN219085945U - Vibration-inhibiting bonding equipment - Google Patents
Vibration-inhibiting bonding equipment Download PDFInfo
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- CN219085945U CN219085945U CN202320123590.1U CN202320123590U CN219085945U CN 219085945 U CN219085945 U CN 219085945U CN 202320123590 U CN202320123590 U CN 202320123590U CN 219085945 U CN219085945 U CN 219085945U
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Abstract
The utility model belongs to the technical field of bonding, and discloses vibration suppression bonding equipment which comprises a machine table, an active driving device and a vibration suppression driving device, wherein the active driving device and the vibration suppression driving device are both fixed on the machine table, a bonding head is arranged on the active driving device, and a weight piece is arranged on the vibration suppression driving device. According to the vibration-inhibiting bonding equipment provided by the utility model, in the process that the active driving device drives the bonding head to move, the vibration-inhibiting driving device drives the weight part to move along the opposite direction of the movement of the bonding head, so that vibration brought by the movement of the bonding head to the machine is inhibited, the bonding precision is further improved, and the weight of the machine is not greatly increased due to the driving of the vibration-inhibiting driving device and the weight part, so that the development of the equipment industry is facilitated.
Description
Technical Field
The utility model relates to the technical field of bonding, in particular to vibration-inhibiting bonding equipment.
Background
At present, in the chip bonding process, the chip bonding equipment with a single bonding head is high in output requirement per hour, so that the acceleration of the bonding head along the horizontal direction is often more than 8g, and therefore the equipment can generate a large impulse, so that a machine of the equipment generates large vibration, the vision system and the bonding system on the machine are greatly influenced, and the bonding precision of the bonding equipment is reduced.
The prior art mainly aims to offset impulse caused by high acceleration and deceleration by adding weight and rigidity of a machine, but the machine is overweight, the cost and the dead weight of equipment can be increased, and the requirements on foundation installation, transportation and the like are high, so that the development of the equipment industry is not facilitated. Therefore, a vibration-damping bonding apparatus is needed to solve the above-mentioned technical problems.
Disclosure of Invention
The utility model aims to provide vibration suppression bonding equipment which can effectively suppress machine vibration.
To achieve the purpose, the utility model adopts the following technical scheme:
provided is a vibration-suppressing bonding apparatus including:
a machine table;
the driving device is fixed on the machine table, and is provided with a bonding head and used for driving the bonding head to move along a first horizontal direction;
the vibration suppression driving device is fixed on the machine table, a weight piece is arranged on the vibration suppression driving device, and the vibration suppression driving device is used for driving the weight piece to move along the opposite direction of the movement of the bonding head so as to suppress vibration brought by the movement of the bonding head to the machine table.
Optionally, the machine includes:
a work table;
the first base is fixed on the workbench;
the second base is fixed on the workbench, the second base and the first base are arranged at intervals along the first horizontal direction, and the vibration suppression driving device is arranged on the second base;
and the mounting beam is fixed on the first base and the second base, and the active driving device is arranged on the mounting beam.
Optionally, the machine further includes:
the third base is arranged at one side of the second base along the second horizontal direction at intervals;
the first end of the reinforcing seat is fixed on the third base, and the second end of the reinforcing seat is fixed on the second base.
Optionally, the second base includes:
the support plate extends in the vertical direction, the first end of the support plate is fixed on the workbench, and the support plate comprises a first edge and a second edge which are mutually perpendicular;
the mounting table is arranged at the second end of the supporting plate, and the vibration suppression driving device is arranged on the mounting table.
Optionally, the mount pad orientation one side edge of third base is provided with the mounting groove, the mounting groove includes first horizontal plane and first vertical face, consolidate the seat orientation the surface of workstation with first horizontal plane laminating sets up, consolidate the second terminal surface of seat with first vertical face laminating sets up.
Optionally, the mounting beam is provided with a plurality of weight-reducing grooves.
Optionally, the active driving device and the vibration suppressing driving device are arranged at intervals along the first horizontal direction.
Optionally, a plurality of rag bolts and a plurality of universal wheels are arranged at the bottom of the machine table.
Optionally, the weight is provided with a plurality of and detachable settings on the vibration suppression drive arrangement.
Optionally, a plurality of the weight pieces are stacked on the vibration suppressing driving device along the vertical direction.
The beneficial effects are that:
according to the vibration-inhibiting bonding equipment provided by the utility model, in the process that the active driving device drives the bonding head to move, the vibration-inhibiting driving device drives the weight piece to move along the opposite direction of the movement of the bonding head, so that vibration caused by the movement of the bonding head to the machine table is inhibited, and the bonding precision is further improved. In addition, the vibration suppression driving device drives the weight part and does not greatly increase the weight of the machine, thereby being beneficial to the development of the equipment industry.
Drawings
FIG. 1 is a schematic diagram of a vibration damping bonding apparatus provided by the present utility model;
FIG. 2 is a schematic diagram of a part of a machine provided by the present utility model;
FIG. 3 is a schematic view of a portion of a vibration-damping bonding apparatus according to the present utility model;
FIG. 4 is a schematic view of a second base according to the present utility model;
fig. 5 is a schematic view of another view of a part of the structure of the vibration damping bonding apparatus according to the present utility model.
In the figure:
100. a machine table; 110. a work table; 120. a first base; 130. a second base; 131. a support plate; 1311. a first edge; 1312. a second side; 132. a mounting table; 1321. a mounting groove; 13211. a first horizontal plane; 13212. a first vertical surface; 140. mounting a beam; 141. a weight reduction groove; 150. a third base; 160. a reinforcing seat;
200. an active driving device; 210. bonding head; 220. a connecting plate;
300. vibration suppression driving device; 310. a weight member;
410. an anchor bolt; 420. a universal wheel;
510. a first position sensor; 520. a second position sensor.
Detailed Description
The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.
In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "right", etc. orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.
Referring to fig. 1, the present embodiment provides a vibration-damping bonding apparatus, which includes a machine 100, an active driving device 200, and a vibration-damping driving device 300. The driving device 200 and the vibration suppression driving device 300 are both fixed on the machine 100, the driving device 200 is provided with a bonding head 210, and the driving device 200 is used for driving the bonding head 210 to move along a first horizontal direction; the vibration suppression driving device 300 is provided with a weight 310, and the vibration suppression driving device 300 is used for driving the weight 310 to move along a direction opposite to the movement of the bonding head 210 so as to suppress vibration caused by the movement of the bonding head 210 on the machine 100. The direction a in fig. 1 is a first horizontal direction.
In the present embodiment, in the process of driving the bonding head 210 by the active driving device 200 to move, the vibration suppressing driving device 300 drives the weight 310 to move along the opposite direction of the movement of the bonding head 210, so as to suppress the vibration of the machine 100 caused by the movement of the bonding head 210, thereby improving the bonding precision. In addition, the vibration suppressing driving device 300 drives and weights 310, which does not greatly increase the weight of the machine 100, thereby facilitating the development of the equipment industry.
Specifically, the bottom of the machine 100 is provided with a plurality of anchor bolts 410 and a plurality of universal wheels 420, the machine 100 is stably installed on the installation foundation by adjusting the anchor bolts 410, the machine 100 is conveniently moved by the universal wheels 420, and the installation position of the machine 100 is adjusted.
Specifically, the active drive device 200 and the vibration suppressing drive device 300 control operations by a controller. The controller may be a PLC controller or other controllers, and is not limited herein. In this embodiment, an electronic cam may be provided on the controller, and the acceleration of the weight 310 may be adjusted by rotating the electronic cam.
Preferably, the active driving device 200 and the vibration suppressing driving device 300 are both linear modules, which are conventional, and will not be described in detail herein. Of course, the active driving device 200 and the vibration suppressing driving device 300 may be other driving devices, which are not limited herein. In this embodiment, active drive device 200 is coupled to bonding head 210 via a connection plate 220.
It should be noted that, the active driving device 200 and the vibration suppressing driving device 300 are disposed at intervals along the first horizontal direction, and ensure that no impulse or less impulse occurs along the first horizontal direction, which is insufficient to cause the machine 100 to vibrate.
In the present embodiment, referring to fig. 1 to 4, the machine 100 includes a table 110, a first base 120, a second base 130, and a mounting beam 140. The first base 120 and the second base 130 are both fixed on the workbench 110, the second base 130 and the first base 120 are disposed at intervals along the first horizontal direction, and the vibration suppression driving device 300 is disposed on the second base 130. Further, the mounting beam 140 is fixed to the first base 120 and the second base 130, and the active driving device 200 is disposed on the mounting beam 140. In this embodiment, the first base 120, the second base 130 and the mounting beam 140 are arranged to ensure that the machine 100 is not overweight, and meanwhile, stability of the machine 100 is effectively ensured, stability of the bonding head 210 driven by the active driving device 200 and stability of the counterweight 310 driven by the vibration suppression driving device 300 in the moving process is effectively ensured, and bonding precision is improved.
Specifically, the mounting beam 140 is provided with a plurality of weight-reducing grooves 141 to reduce the weight of the machine 100, so that the vibration-damping bonding device is suitable for mounting a base, transporting and the like, and is beneficial to the development of the equipment industry.
Specifically, the second base 130 includes a support plate 131 and a mounting table 132. Wherein the support plate 131 extends in a vertical direction, a first end of the support plate 131 is fixed on the workbench 110, and the support plate 131 includes a first edge 1311 and a second edge 1312 that are disposed perpendicular to each other; the mounting table 132 is disposed at the second end of the supporting plate 131, and the vibration suppressing driving device 300 is disposed on the mounting table 132. In this embodiment, the first edge 1311 and the second edge 1312 of the support plate 131 that are perpendicular to each other effectively ensure stability of the second base 130, so as to ensure stability of the vibration suppression driving device 300 in the moving process of the weight 310, effectively reduce impact of impulse generated by moving the weight 310 on the second base 130, and further ensure stability of the machine 100. The direction b in fig. 1 is a vertical direction.
Further, the horizontal cross-sectional shape of the support plate 131 may be L-shaped or other shapes, which are not limited herein.
It should be noted that the machine 100 further includes a third base 150 and a reinforcing seat 160. The third base 150 is disposed at a side of the second base 130 along the second horizontal direction at intervals; the first end of the reinforcement seat 160 is fixed to the third base 150, and the second end of the reinforcement seat 160 is fixed to the second base 130. In the present embodiment, the arrangement of the third base 150 and the reinforcing seat 160 further improves the stability of the machine 100, and even if an impulse other than in the first horizontal direction occurs, it is insufficient to cause the machine 100 to vibrate. The direction c in fig. 1 is a second horizontal direction, and the first horizontal direction and the second horizontal direction are perpendicular to each other.
Further, the mounting table 132 is provided with a mounting groove 1321 towards one side edge of the third base 150, the mounting groove 1321 includes a first horizontal plane 13211 and a first vertical plane 13212, the surface of the reinforcing seat 160 towards the workbench 110 is attached to the first horizontal plane 13211, and the second end face of the reinforcing seat 160 is attached to the first vertical plane 13212, so that the reinforcing seat 160 can well reinforce the second base 130, and further the machine 100 has better stability.
In this embodiment, as shown in fig. 1, the weight 310 is detachably disposed on the vibration suppressing driving device 300, and when the acceleration of the driving device 200 driving the bonding head 210 changes, the number of the weight 310 can be adjusted to make the vibration suppressing driving device 300 more fit the vibration suppressing requirement, so as to achieve the best effect.
Specifically, the plurality of weight pieces 310 are stacked on the vibration suppression driving device 300 along the vertical direction, so that the vibration suppression driving device 300 is convenient to disassemble and assemble, and the weight pieces 310 are driven to move by the vibration suppression driving device 300, so that the service life of the vibration suppression driving device 300 is effectively ensured.
In this embodiment, referring to fig. 5, a first position sensor 510 is disposed on the active driving device 200, and the first position sensor 510 is used for detecting the position of the bonding head 210 along the first horizontal direction; the vibration suppressing driving apparatus 300 is provided with a second position sensor 520, and the second position sensor 520 is used for detecting the position of the weight 310 along the first horizontal direction. In this embodiment, the first position sensor 510 and the second position sensor 520 assist in the operation of the vibration damping bonding apparatus, and the specific auxiliary control operation mode is the prior art, which is not limited herein. Preferably, the first and second position sensors 510 and 520 are photoelectric switches, and the first and second position sensors 510 and 520 are each provided in plurality. Of course, the first position sensor 510 and the second position sensor 520 may be other sensors, which are not limited herein.
In this embodiment, the vibration suppression principle of the vibration suppression bonding apparatus is as follows:
when the active driving device 200 drives the bonding head 210 to accelerate, an acceleration thrust is generated to the machine 100:
F 1 ＝M 1 ×a 1 -μ 1 ×M 1 ×g-f 1
wherein M is 1 A is the driving load of the active driving device 200 1 Acceleration, μ of bonding head 210 movement 1 For the internal friction coefficient, f, of the active drive 200 1 Other resistances to active drive 200 and bonding head 210.
Further, when the active driving device 200 drives the bonding head 210 to accelerate, the impulse to the machine 100 is:
i 1 ＝F 1 ×t 1
wherein t is 1 For the acceleration time of bonding head 210 movement.
In this embodiment, to suppress vibration generated by the machine 100, the vibration suppressing driving device 300 drives the weight 310 to move along the opposite direction of the movement of the bonding head 210, so as to generate an opposite acceleration thrust, so as to achieve force balance inside the vibration suppressing bonding apparatus, eliminate vibration, and the vibration suppressing driving device 300 drives the weight 310 to move so as to generate acceleration thrust for the machine 100:
F 2 ＝M 2 ×a 2 -μ 2 ×M 2 ×g-f 2
wherein M is 2 A for driving the load of the vibration suppressing driving device 300 2 Acceleration, μ, of the movement of the weight 310 2 To suppress the internal friction coefficient of the vibration-suppressing driving apparatus 300, f 2 Other resistances to vibration suppression driving device 300 and weight 310.
Further, when the vibration suppression driving device 300 drives the weight 310 to accelerate, the impulse to the machine 100 is:
i 2 ＝F 2 ×t 2
wherein t is 2 Is the acceleration time for the movement of the weight 310.
Specifically, if t 1 ＝t 2 And i 1 ＝i 2 F is then 1 ＝F 2 And F 1 And F 2 And thus the vibration of the acceleration section is suppressed in the process of driving the bonding head 210 by the active driving device 200.
Further, f 1 And f 2 The correlation values may be derived from finite element simulations.
Further, as can be derived from the formula, M 1 And M 2 During exercise is a quantitative one. In the present embodiment, a is set by the controller 1 And a 2 The active driving device 200 and the vibration suppressing driving device 300 synchronously run to satisfy t 1 ＝t 2 Can meet F 1 ＝F 2 Thereby achieving the vibration suppression effect of the acceleration section.
Illustratively, the drive load M of the active drive 200 1 Acceleration a of bonding head 210 movement =1.4kg 1 =10g, calculated to give F 1 = 131.9256N. At this time, the driving load M of the vibration suppressing driving apparatus 300 may be selected 2 8kg, i.e. weight of the weight 310 on the vibration suppressing driving apparatus 300 is 8kg, and the acceleration a of the movement of the weight 310 can be selected 2 =1.64 g, calculated to give F 2 = 128.872N, i.e. F 1 -F 2 The machine 100 is further subjected to 3.0536N thrust by the method of the machine= -3.0536N, and the machine 100 is influenced by about 3N force, which is 1050kg, so that bonding precision is effectively ensured.
Note that: the connection modes which are not explicitly described in the text can be selected from common fixed connection modes such as threaded connection, welding and the like according to requirements.
It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the utility model. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.
Claims (10)
1. Vibration-inhibiting bonding apparatus, comprising:
a machine (100);
the driving device (200) is fixed on the machine table (100), a bonding head (210) is arranged on the driving device (200), and the driving device (200) is used for driving the bonding head (210) to move along a first horizontal direction;
the vibration suppression driving device (300) is fixed on the machine table (100), the vibration suppression driving device (300) is provided with a weight piece (310), and the vibration suppression driving device (300) is used for driving the weight piece (310) to move along the direction opposite to the movement of the bonding head (210) so as to suppress vibration brought by the movement of the bonding head (210) to the machine table (100).
2. The vibration-damping bonding apparatus according to claim 1, wherein the machine (100) comprises:
a work table (110);
a first base (120) fixed to the table (110);
the second base (130) is fixed on the workbench (110), the second base (130) and the first base (120) are arranged at intervals along the first horizontal direction, and the vibration suppression driving device (300) is arranged on the second base (130);
and the mounting beam (140) is fixed on the first base (120) and the second base (130), and the active driving device (200) is arranged on the mounting beam (140).
3. The vibration-damping bonding apparatus according to claim 2, wherein the machine (100) further comprises:
a third base (150) disposed at an interval on one side of the second base (130) along a second horizontal direction;
and the first end of the reinforcing seat (160) is fixed on the third base (150), and the second end of the reinforcing seat (160) is fixed on the second base (130).
4. A vibration-damping bonding apparatus according to claim 3, wherein the second base (130) comprises:
the support plate (131) extends in the vertical direction, a first end of the support plate (131) is fixed on the workbench (110), and the support plate (131) comprises a first edge (1311) and a second edge (1312) which are arranged perpendicular to each other;
the mounting table (132) is arranged at the second end of the supporting plate (131), and the vibration suppression driving device (300) is arranged on the mounting table (132).
5. The vibration-damping bonding apparatus according to claim 4, wherein a mounting groove (1321) is provided in the mounting table (132) toward a side edge of the third base (150), the mounting groove (1321) includes a first horizontal plane (13211) and a first vertical plane (13212), the surface of the reinforcing seat (160) toward the working table (110) is disposed in contact with the first horizontal plane (13211), and the second end surface of the reinforcing seat (160) is disposed in contact with the first vertical plane (13212).
6. The vibration-damping bonding apparatus according to claim 2, wherein the mounting beam (140) is provided with a plurality of weight-reducing grooves (141).
7. The vibration-damping bonding apparatus according to claim 1, wherein the active drive (200) and the vibration-damping drive (300) are arranged at intervals along the first horizontal direction.
8. The vibration-damping bonding apparatus according to claim 1, wherein a plurality of anchor bolts (410) and a plurality of universal wheels (420) are provided at a bottom of the machine table (100).
9. The vibration-damping bonding apparatus according to any one of claims 1 to 8, wherein the weight (310) is provided in plurality and detachably arranged on the vibration-damping drive (300).
10. The vibration-damping bonding apparatus according to claim 9, wherein a plurality of the weight members (310) are vertically stacked on the vibration-damping driving device (300).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320123590.1U CN219085945U (en) | 2023-02-06 | 2023-02-06 | Vibration-inhibiting bonding equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320123590.1U CN219085945U (en) | 2023-02-06 | 2023-02-06 | Vibration-inhibiting bonding equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219085945U true CN219085945U (en) | 2023-05-26 |
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ID=86393229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320123590.1U Active CN219085945U (en) | 2023-02-06 | 2023-02-06 | Vibration-inhibiting bonding equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219085945U (en) |
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2023
- 2023-02-06 CN CN202320123590.1U patent/CN219085945U/en active Active
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