JP2003086616A - Method of manufacturing electronic device - Google Patents

Method of manufacturing electronic device

Info

Publication number
JP2003086616A
JP2003086616A JP2001275200A JP2001275200A JP2003086616A JP 2003086616 A JP2003086616 A JP 2003086616A JP 2001275200 A JP2001275200 A JP 2001275200A JP 2001275200 A JP2001275200 A JP 2001275200A JP 2003086616 A JP2003086616 A JP 2003086616A
Authority
JP
Japan
Prior art keywords
resin
heat sink
lead frame
molding die
cut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001275200A
Other languages
Japanese (ja)
Other versions
JP4720053B2 (en
Inventor
Shinichi Hirose
伸一 広瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to JP2001275200A priority Critical patent/JP4720053B2/en
Publication of JP2003086616A publication Critical patent/JP2003086616A/en
Application granted granted Critical
Publication of JP4720053B2 publication Critical patent/JP4720053B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93Batch processes
    • H01L24/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49171Fan-out arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Abstract

PROBLEM TO BE SOLVED: To appropriately and simultaneously cut unnecessary resin parts when a lead frame is cut in the manufacturing method of an electronic device where an installation part having a heat sink on which a heater element is loaded and the lead frame is sealed by resin in a state where the end part of the heat sink is exposed. SOLUTION: A mold is provided with a space 110 for sealing device, an accumulation part 120 accumulating resin 50 outside the end 21 exposed from resin 50 in the heat sink 20 and a connecting part 130 connecting the space 110 and the accumulation part 120 inside. The installation part is arranged in the mold, and resin 50 is packed and cured. The guide frame 33 of the lead frame 30 is cut and a connection resin 53 formed by the connection part 130 of the mold is cut. The mold where the width (t) of the connection part 130 in a direction orthogonal to the cutting direction of the connection resin part 53 is 0.05 mm to 0.15 mm is used.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、発熱素子が搭載さ
れたヒートシンクとリードフレームとを備える装置部
を、ヒートシンクの端部が露出した状態で樹脂にて包み
込むように封止してなる電子装置の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic device in which a device portion including a heat sink on which a heating element is mounted and a lead frame is sealed so as to be wrapped with resin in a state where an end portion of the heat sink is exposed. Manufacturing method.

【0002】[0002]

【従来の技術】この種の一般的な電子装置の概略断面構
成を図8に示す。パワーIC等の発熱素子10が搭載さ
れたヒートシンク20とリードフレーム30とを備える
装置部40が、ヒートシンク20の端部21が露出した
状態で樹脂50にて包み込むように封止されている。こ
こで、発熱素子10とリードフレーム30のリード部
(インナーリード)34とは、AlやAu等のワイヤ6
0にて電気的に接続されている。
2. Description of the Related Art FIG. 8 shows a schematic sectional structure of a general electronic device of this type. A device section 40 including a heat sink 20 on which a heat generating element 10 such as a power IC is mounted and a lead frame 30 is sealed so as to be wrapped with a resin 50 in a state where an end 21 of the heat sink 20 is exposed. Here, the heating element 10 and the lead portion (inner lead) 34 of the lead frame 30 are formed of the wire 6 such as Al or Au.
It is electrically connected at 0.

【0003】ヒートシンク20の端部21は、放熱部材
を取り付けるために樹脂50から露出しており、図8で
は、当該端部21には、放熱フィン(放熱部材)70が
ネジ71等により取り付けられ、ヒートシンク20の放
熱性を向上させている。
The end 21 of the heat sink 20 is exposed from the resin 50 for attaching a heat radiating member. In FIG. 8, a radiating fin (heat radiating member) 70 is attached to the end 21 by a screw 71 or the like. The heat dissipation of the heat sink 20 is improved.

【0004】この電子装置は一般に図9に示す方法にて
製造される。樹脂充填用の成形型900の内部に、装置
部40を配置する。このとき、リードフレーム30に
は、後に分断されるガイドフレーム33が、装置部40
におけるヒートシンク20の端部21外周に存在する。
This electronic device is generally manufactured by the method shown in FIG. The device unit 40 is arranged inside the molding die 900 for resin filling. At this time, the guide frame 33, which will be divided later, is attached to the lead frame 30 by the device unit 40.
Exists on the outer periphery of the end 21 of the heat sink 20.

【0005】そして、成形型900内に樹脂50を充填
して硬化させることにより、装置部40が樹脂50にて
封止されるとともに、ヒートシンク20の端部21は樹
脂50から露出した状態となる。このように、樹脂成形
した後、リードフレーム30におけるガイドフレーム3
3を切断するとともにアウターリードを所定長さに切断
することにより、電子装置ができあがる。
By filling the resin mold 50 with the resin 50 and curing the resin mold 50, the device 40 is sealed with the resin 50 and the end 21 of the heat sink 20 is exposed from the resin 50. . In this way, after resin molding, the guide frame 3 in the lead frame 30
An electronic device is completed by cutting 3 and cutting the outer lead into a predetermined length.

【0006】[0006]

【発明が解決しようとする課題】ところで、上記図9に
示した従来の製造方法においては、樹脂成形した際、ガ
イドフレーム33とヒートシンク20の端部21の隙間
に、薄い樹脂50の膜(樹脂薄膜51)が形成される。
そして、ガイドフレーム33の切断時には、このガイド
フレーム切断部に位置する樹脂薄膜51も切断されるこ
とになるが、薄いため、たわんでうまく切れず、ヒート
シンク20の端部21にてバリとして残りやすい。
By the way, in the conventional manufacturing method shown in FIG. 9 described above, when resin molding is performed, a thin resin film (resin film) is formed in the gap between the guide frame 33 and the end portion 21 of the heat sink 20. A thin film 51) is formed.
When the guide frame 33 is cut, the resin thin film 51 located at the guide frame cutting portion is also cut, but since it is thin, it does not bend well and is likely to remain as burrs at the end 21 of the heat sink 20. .

【0007】このような問題に対して、本発明者は、ガ
イドフレーム切断部に位置する樹脂薄膜の厚さを厚くす
ることで、その剛性を高め、切断しやすくすれば良いと
考えた。そして、検討した結果、図1〜図3に示すよう
な構成の成形型100を用いることとした。
In order to solve such a problem, the present inventor thought that the rigidity of the resin thin film located at the cut portion of the guide frame should be increased to make it easier to cut. Then, as a result of the examination, it was decided to use the molding die 100 having the configuration as shown in FIGS.

【0008】ここで、図1は、装置部40と樹脂50と
を含めた成形型100の概略断面図である。また、図2
は図1の上方から見た概略平面図であり、主として樹脂
50を含めた装置部40の形状を示すものである。つま
り、図2では、樹脂50の形状によって成形型100内
部の型形状を示している。
Here, FIG. 1 is a schematic cross-sectional view of the molding die 100 including the apparatus portion 40 and the resin 50. Also, FIG.
2 is a schematic plan view as seen from above in FIG. 1, mainly showing the shape of the device section 40 including the resin 50. FIG. That is, in FIG. 2, the shape of the inside of the molding die 100 is shown by the shape of the resin 50.

【0009】なお、図2中、各部の位置関係を識別する
ために、樹脂50はピッチの広い斜線ハッチング、ガイ
ドフレーム33を含むリードフレーム30はピッチの狭
い斜線ハッチング、発熱素子10は破線にて示し、ワイ
ヤ60は一部省略してある。また、図2中の、A−A一
点鎖線に沿った断面が上記図1である。さらに、図3
は、図2中のB−B一点鎖線に沿った概略断面図であ
る。
In FIG. 2, in order to identify the positional relationship between the respective parts, the resin 50 is hatched with a wide pitch, the lead frame 30 including the guide frame 33 is hatched with a narrow pitch, and the heating element 10 is shown with a broken line. The wire 60 is partially omitted. Further, the section taken along the dashed-dotted line AA in FIG. 2 is FIG. Furthermore, FIG.
FIG. 3 is a schematic cross-sectional view taken along the dashed line BB in FIG. 2.

【0010】図1〜図3に示すように、成形型100の
内部には、上記従来と同様、装置部40を封止するため
に樹脂50が充填される空間部110が設けられてい
る。ここで、この成形型100の内部において、ヒート
シンク20のうち樹脂40から露出する端部21の外側
に、樹脂40が溜まる空間としての溜まり部120が該
端部21に隣り合って位置するとともに、図2および図
3に示すように、空間部110と溜まり部120とを連
通する連通部130が設けられている。
As shown in FIGS. 1 to 3, inside the molding die 100, a space portion 110 filled with the resin 50 for sealing the device portion 40 is provided as in the conventional case. Here, inside the molding die 100, outside the end 21 of the heat sink 20 exposed from the resin 40, a reservoir 120 as a space for the resin 40 is positioned adjacent to the end 21. As shown in FIGS. 2 and 3, a communication portion 130 that communicates the space portion 110 and the reservoir portion 120 is provided.

【0011】具体的に、溜まり部120は、ヒートシン
ク20の端部21とガイドフレーム33との隙間を従来
よりも大きくした空間である。そして、連通部130
は、溜まり部120の両端部にて溜まり部120と空間
部110とを連通しており、空間部110からの樹脂5
0が、連通部130を介して溜まり部120内へ回り込
んでくるようになっている。
Specifically, the reservoir 120 is a space in which the gap between the end 21 of the heat sink 20 and the guide frame 33 is larger than in the conventional case. Then, the communication unit 130
Connects the reservoir 120 and the space 110 at both ends of the reservoir 120.
0 goes around into the reservoir 120 through the communicating portion 130.

【0012】このような成形型100内に装置部40を
配置し、樹脂50を充填する。それにより、樹脂50
は、空間部110に形成されて装置部40を封止する装
置封止部51と、溜まり部120に形成された溜まり樹
脂部52と、ガイドフレーム切断部(図1および図3中
の破線S、図2中のC−C一点鎖線)に位置し、これら
装置封止部51と溜まり樹脂部52とを連結する連結樹
脂部53とよりなる。
The apparatus section 40 is placed in the molding die 100 and the resin 50 is filled therein. Thereby, the resin 50
Is a device sealing portion 51 formed in the space 110 for sealing the device portion 40, a pool resin portion 52 formed in the pool portion 120, and a guide frame cutting portion (broken line S in FIGS. 1 and 3). , And a connecting resin portion 53 that connects the device sealing portion 51 and the accumulated resin portion 52 to each other.

【0013】そして、ガイドフレーム33の切断時に
は、不要な樹脂である溜まり樹脂部52を除去すべく、
図1および図3中の破線Sに沿って連結樹脂部53が切
断されることとなる。ここで、溜まり部120に樹脂5
0が多く溜まることにより、連結樹脂部53は適切に分
断可能な程度に十分に厚くなっているため、従来のよう
に、ヒートシンク20の端部21に樹脂50のバリが発
生しにくくなると考えられる。
At the time of cutting the guide frame 33, in order to remove the accumulated resin portion 52 which is an unnecessary resin,
The connection resin portion 53 is cut along the broken line S in FIGS. 1 and 3. Here, the resin 5
Since a large amount of 0 is accumulated, the connecting resin portion 53 is sufficiently thick so that it can be appropriately divided, and thus it is considered that burrs of the resin 50 are less likely to occur on the end portion 21 of the heat sink 20 as in the conventional case. .

【0014】しかしながら、更に検討を進めたところ、
次のような問題が発生した。図4は、上記図2中のC−
C一点鎖線(切断線)に沿って連結樹脂部53を切断し
たときの断面を示す図であり、当該断面にのみハッチン
グを施してある。
However, after further study,
The following problems occurred. FIG. 4 shows C- in FIG.
It is a figure which shows the cross section when the connection resin part 53 is cut | disconnected along the dashed-dotted line C (cutting line), and only the said cross section is hatched.

【0015】図4に示すように、白抜き矢印方向に切断
が行われ、符号53で示す範囲の切断面が連結樹脂部5
3の切断面となる。ここで、連結樹脂部53のうち成形
型100の連通部130により形成される両端部(図3
において連結樹脂部53として示されている部分)53
aは、該両端部53aの間の中間部53bに比べて、切
断方向の厚さが厚い厚肉部となっており、かつ、切断方
向と直交方向への幅t(図2も参照)は比較的薄くなっ
ている。
As shown in FIG. 4, cutting is performed in the direction of the white arrow, and the cut surface within the range indicated by reference numeral 53 is the connecting resin portion 5.
The cut surface is 3. Here, both ends of the connecting resin portion 53 formed by the communicating portion 130 of the molding die 100 (see FIG. 3).
Portion shown as connection resin portion 53 in FIG.
a is a thick portion having a larger thickness in the cutting direction than the intermediate portion 53b between the both end portions 53a, and the width t in the direction orthogonal to the cutting direction (see also FIG. 2) is It is relatively thin.

【0016】これは、上記したように成形型100にお
いて、空間部110からの樹脂50を溜まり部120内
へ回り込ませるべく連通部130(図2および図3参
照)の通路面積を確保しているためである。それゆえ、
連結樹脂部53のうち連通部130により形成される両
端部53aは、中間部53bに比べて切断方向に細長形
状となっている。
As described above, in the molding die 100, the passage area of the communication portion 130 (see FIGS. 2 and 3) is secured so that the resin 50 from the space portion 110 can flow into the accumulation portion 120. This is because. therefore,
Both end portions 53a of the connecting resin portion 53, which are formed by the communicating portion 130, are elongated in the cutting direction as compared with the intermediate portion 53b.

【0017】このような連結樹脂部53の両端部におい
て、上記図2、図4に示す幅tが小さいと、連結樹脂部
53を切断する時に、この両端部53aにて連結樹脂部
53がたわんで切断されにくい。また、上記幅tが大き
すぎると、切断時の大きな応力により、装置部40側の
樹脂50(装置封止部51)に欠けが発生し、そこから
クラックや剥がれが発生して、水分の侵入等を引き起こ
すなどの問題が発生する。
If the width t shown in FIGS. 2 and 4 is small at both ends of the connecting resin portion 53, the connecting resin portion 53 is not bent at the both end portions 53a when the connecting resin portion 53 is cut. It is hard to be cut by. Further, if the width t is too large, the resin 50 (device sealing portion 51) on the device portion 40 side is chipped due to a large stress at the time of cutting, and cracks or peeling are generated from the chip to cause intrusion of moisture. And other problems occur.

【0018】そこで、本発明は上記問題に鑑み、発熱素
子が搭載されたヒートシンクとリードフレームとを備え
る装置部を、ヒートシンクの端部が露出した状態で樹脂
にて包み込むように封止する電子装置の製造方法におい
て、リードフレームの切断時に、不要な樹脂部を適切に
同時に切断できるようにすることを目的とする。
Therefore, in view of the above problems, the present invention is an electronic device for encapsulating a device portion provided with a heat sink on which a heat generating element is mounted and a lead frame so as to be wrapped with resin in a state where an end portion of the heat sink is exposed. In the above manufacturing method, it is an object of the present invention to appropriately cut unnecessary resin parts at the same time when cutting the lead frame.

【0019】[0019]

【課題を解決するための手段】上記目的を達成するた
め、請求項1に記載の発明では、発熱素子(10)が搭
載されたヒートシンク(20)とリードフレーム(3
0)とを備える装置部(40)を、成形型(100)内
に配置し、成形型内に樹脂(50)を充填することによ
り、ヒートシンクの端部が樹脂から露出した状態で装置
部を樹脂にて包み込むように封止する電子装置の製造方
法において、まず、成形型として、その内部に装置部を
封止するために樹脂が充填される空間部(110)と、
ヒートシンクのうち樹脂から露出する端部(21)の外
側に隣り合って位置し樹脂が溜まる溜まり部(120)
と、空間部と溜まり部とを連通する連通部(130)と
を有するものを用意する。
In order to achieve the above object, in the invention described in claim 1, the heat sink (20) on which the heating element (10) is mounted and the lead frame (3).
0) is disposed in the molding die (100) and the molding die is filled with the resin (50), so that the end of the heat sink is exposed from the resin. In a method of manufacturing an electronic device in which a resin is wrapped and sealed, first, as a molding die, a space portion (110) filled with resin for sealing a device portion therein,
A sump (120) positioned adjacent to the outside of the end (21) of the heat sink exposed from the resin and accumulating the resin.
And a communication part (130) that connects the space part and the reservoir part.

【0020】次に、成形型(100)内に装置部(4
0)を配置し、樹脂(50)を充填し樹脂を硬化させる
工程を行い、次に、リードフレーム(30)のガイドフ
レーム(33)を切断するとともに、成形型の連通部
(130)により形成された連結樹脂部(53a)を切
断する工程とを行うが、ここにおいて、成形型として、
連結樹脂部の切断方向と直交方向における連通部の幅
(t)が、0.05mm以上0.15mm以下であるも
のを用いることを特徴としている。
Next, the device part (4) is placed in the molding die (100).
0) is placed, a step of filling the resin (50) and hardening the resin is performed, and then the guide frame (33) of the lead frame (30) is cut and formed by the communicating portion (130) of the molding die. And a step of cutting the connected resin portion (53a) that has been cut.
The width (t) of the communicating portion in the direction orthogonal to the cutting direction of the connecting resin portion is characterized by being 0.05 mm or more and 0.15 mm or less.

【0021】本発明の製造方法によれば、連結樹脂部
(53a)の切断方向と直交方向における成形型(10
0)の連通部(130)の幅(t)を、0.05mm以
上0.15mm以下とすることにより、連結樹脂部のう
ち成形型の連通部により形成される比較的厚い部分(厚
肉部)の幅も、0.05mm以上0.15mm以下とな
る。
According to the manufacturing method of the present invention, the molding die (10) in the direction orthogonal to the cutting direction of the connecting resin portion (53a) is formed.
By setting the width (t) of the communication part (130) of 0) to be 0.05 mm or more and 0.15 mm or less, a relatively thick part (thick part) formed by the communication part of the molding die in the connecting resin part. The width of () is also 0.05 mm or more and 0.15 mm or less.

【0022】連結樹脂部の厚肉部の幅が、上記範囲であ
れば、リードフレームの切断時に、当該厚肉部がたわん
で切断されにくかったり、樹脂に欠けが発生したりする
のを防止できる。よって、本発明によれば、リードフレ
ームの切断時に、不要な樹脂部を適切に同時に切断でき
る。
When the width of the thick-walled portion of the connecting resin portion is within the above range, it is possible to prevent the thick-walled portion from being bent and hard to be cut or the resin from being chipped when the lead frame is cut. . Therefore, according to the present invention, unnecessary resin portions can be appropriately cut at the same time when the lead frame is cut.

【0023】ここで、請求項2に記載の発明のように、
樹脂(50)としてはエポキシ系樹脂を用いることがで
きる。
Here, as in the invention described in claim 2,
An epoxy resin can be used as the resin (50).

【0024】なお、上記各手段の括弧内の符号は、後述
する実施形態に記載の具体的手段との対応関係を示す一
例である。
The reference numerals in parentheses of the above-mentioned means are examples showing the correspondence with the concrete means described in the embodiments described later.

【0025】[0025]

【発明の実施の形態】以下、本発明を図に示す実施形態
について説明する。本実施形態に係る電子装置およびそ
の製造方法に用いられる成形型は、上記図1〜図4に示
した構成を基本としている。そのため、図1〜図4に基
づいて上記と重複する場合もあるが、ここでは、本実施
形態の特徴を中心に説明することとする。
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention shown in the drawings will be described. The molding die used in the electronic device and the manufacturing method thereof according to the present embodiment is based on the configuration shown in FIGS. Therefore, although there may be a case where it overlaps with the above based on FIGS. 1 to 4, the characteristics of this embodiment will be mainly described here.

【0026】図1および図2に示すように、電子装置に
おいて、装置部40は、パワーIC等の発熱素子10が
搭載されたCu等よりなるヒートシンク20と、Cu等
よりなるリードフレーム30と、発熱素子10とリード
フレーム30のリード部(インナーリード)34とを結
線して電気的に接続するAlやAu等のワイヤ60とを
備える。
As shown in FIGS. 1 and 2, in the electronic device, a device section 40 includes a heat sink 20 made of Cu or the like on which a heating element 10 such as a power IC is mounted, a lead frame 30 made of Cu or the like, The heating element 10 and the lead portion (inner lead) 34 of the lead frame 30 are connected to each other by a wire 60 such as Al or Au.

【0027】そして、装置部40は、ヒートシンク20
におけるチップ搭載面の端部21と該搭載面の裏面とが
露出した状態で、樹脂(モールド樹脂)50にて包み込
むように封止されている。ここで、樹脂50としては、
熱等により硬化可能な樹脂、好適にはエポキシ系樹脂を
用いることができる。
The device section 40 includes a heat sink 20.
In the state where the end portion 21 of the chip mounting surface and the back surface of the mounting surface are exposed, they are sealed so as to be wrapped with a resin (mold resin) 50. Here, as the resin 50,
A resin curable by heat or the like, preferably an epoxy resin, can be used.

【0028】また、ヒートシンク20の端部21を露出
させることで、上記図8と同様に、この端部21にEC
U基板の放熱フィンや取付ケース(図示せず)にネジ締
め固定できるようになっている。なお、図2中、ヒート
シンク20の端部21には、固定用ネジが挿入される丸
穴22が設けられている。
Further, by exposing the end portion 21 of the heat sink 20, as in the case of FIG.
The radiating fins of the U substrate and a mounting case (not shown) can be screwed and fixed. In FIG. 2, the end portion 21 of the heat sink 20 is provided with a round hole 22 into which a fixing screw is inserted.

【0029】この電子装置は、ヒートシンク20上に導
電性接着剤や半田等を用いて発熱素子10を搭載し、ワ
イヤボンディング等により、発熱素子10とリードフレ
ーム30とをワイヤ60で接続して装置部40を形成し
た後、この装置部40を、図1に示すように、成形型1
00内に配置する。
In this electronic device, the heat generating element 10 is mounted on the heat sink 20 by using a conductive adhesive or solder, and the heat generating element 10 and the lead frame 30 are connected by the wire 60 by wire bonding or the like. After forming the part 40, the device part 40 is moved to the molding die 1 as shown in FIG.
It is placed in 00.

【0030】ここで、樹脂成形に用いられるリードフレ
ーム30のより詳細な平面構成の一例を図5に示し、本
例のリードフレーム30の多連状態を図5に示しておく
が、本実施形態に用いるリードフレーム30は、これら
図5、図6に示す例に限定されない。これら図5および
図6中、一点鎖線領域が樹脂50で封止される(モール
ドさせる)領域である。
FIG. 5 shows an example of a more detailed plane structure of the lead frame 30 used for resin molding, and FIG. 5 shows the multiple states of the lead frame 30 of this example. The lead frame 30 used for is not limited to the examples shown in FIGS. 5 and 6. In FIGS. 5 and 6, the alternate long and short dash line area is an area sealed (molded) with the resin 50.

【0031】図5に示すリードフレーム30はCu板よ
りなるもので、ヒートシンク20をかしめ固定するため
の取付穴32を有する取付部31と、最後に切断除去さ
れるガイドフレーム33と、発熱素子10にワイヤボン
ディングされて接続されるリード部34とを有した形状
となっている。また、リードフレーム30の適所には、
樹脂50に噛み合って密着性を高めるための穴や凹部が
形成されている。
The lead frame 30 shown in FIG. 5 is made of a Cu plate, and has a mounting portion 31 having a mounting hole 32 for caulking and fixing the heat sink 20, a guide frame 33 to be cut and removed at the end, and the heating element 10. And a lead portion 34 which is wire-bonded to and connected to. In addition, in place of the lead frame 30,
Holes and recesses are formed to engage with the resin 50 and enhance the adhesion.

【0032】また、図5において、最終的には、リード
フレーム30は、一点鎖線に示すように樹脂50にて封
止され、樹脂50の外形に沿ってガイドフレーム33お
よびタイバー36が分断される。ここで、リードフレー
ム30のリード部34は、樹脂50で封止されて、樹脂
50の内部のインナーリードと外部のアウターリードと
に分かれる。
Further, in FIG. 5, finally, the lead frame 30 is sealed with the resin 50 as shown by the alternate long and short dash line, and the guide frame 33 and the tie bar 36 are divided along the outer shape of the resin 50. . Here, the lead portion 34 of the lead frame 30 is sealed with the resin 50, and is divided into an inner lead inside the resin 50 and an outer lead outside the resin 50.

【0033】また、図5の下側に位置するガイドフレー
ム33部分には、ヒートシンク20の端部21と対向し
て隣り合う位置に、ヒートシンク20から離れるように
凹んだ凹部35が形成されている。この凹部35に対応
した位置に、成形型100の溜まり部120が形成され
る。
Further, in the portion of the guide frame 33 located on the lower side of FIG. 5, a concave portion 35 which is recessed away from the heat sink 20 is formed at a position adjacent to and facing the end portion 21 of the heat sink 20. . A reservoir 120 of the molding die 100 is formed at a position corresponding to the recess 35.

【0034】また、図6に示すように、本例のリードフ
レーム30はリール状であり、一度に複数個の電子装置
を製造可能となっている。ここで、リードフレーム30
とヒートシンク20とは、別体で成形型100内へ配置
しても良いが、この図5、図6に示すリードフレーム3
0では、かしめ固定にてリードフレーム30とヒートシ
ンク20とを一体化した後、配置することができる。
Further, as shown in FIG. 6, the lead frame 30 of the present example has a reel shape, and a plurality of electronic devices can be manufactured at one time. Here, the lead frame 30
Although the heat sink 20 and the heat sink 20 may be separately arranged in the molding die 100, the lead frame 3 shown in FIGS.
In No. 0, the lead frame 30 and the heat sink 20 can be integrated and then arranged by caulking.

【0035】具体的には、ヒートシンク20に形成され
た図示しない突起を、リードフレーム30の取付穴32
に挿入し、当該突起先端をかしめて潰すことにより、ヒ
ートシンク20とリードフレーム30とが固定される。
Specifically, the projection (not shown) formed on the heat sink 20 is attached to the mounting hole 32 of the lead frame 30.
Then, the heat sink 20 and the lead frame 30 are fixed to each other by crimping and crushing the tip of the protrusion.

【0036】本実施形態の成形型100は、例えば、リ
ードフレーム30を挟んで上型と下型とに分割可能なも
のである。成形型100の内部には、図1〜図3に示す
ように、装置部40を封止するために樹脂50が充填さ
れる空間部110と、ヒートシンク20の端部21の外
側に隣り合って位置し樹脂50が溜まる空間としての溜
まり部120と、空間部110と溜まり部120とを連
通する連通部130とを有する。
The molding die 100 of this embodiment can be divided into, for example, an upper die and a lower die with the lead frame 30 interposed therebetween. As shown in FIGS. 1 to 3, inside the molding die 100, the space portion 110 filled with the resin 50 for sealing the device portion 40 and the outside of the end portion 21 of the heat sink 20 are adjacent to each other. It has a reservoir part 120 as a space in which the resin 50 is located and a communication part 130 that communicates the space part 110 with the reservoir part 120.

【0037】このようにして、装置部40を成形型10
0内に配置した後、成形型100内に流動状態にある樹
脂50を注入する。すると、成形型100内では、空間
部110から連通部130を介して溜まり部120に樹
脂50が充填される。この後、樹脂50を硬化すること
により、図1〜図3に示す形で、装置部40が樹脂封止
される。
In this way, the device section 40 is attached to the molding die 10.
After being placed in 0, the resin 50 in a fluid state is injected into the molding die 100. Then, in the molding die 100, the resin 50 is filled from the space portion 110 to the reservoir portion 120 via the communication portion 130. Thereafter, the resin 50 is cured, so that the device section 40 is resin-sealed in the form shown in FIGS.

【0038】この図1〜図3に示す樹脂封止状態では、
形成された樹脂50は、空間部110により形成された
装置封止部51と、溜まり部120により形成された溜
まり樹脂部52と、これら装置封止部51と溜まり樹脂
部52との境界部分として両部51、52を連結する連
結樹脂部53とよりなる。
In the resin-sealed state shown in FIGS. 1 to 3,
The formed resin 50 serves as a device sealing portion 51 formed by the space 110, a pool resin portion 52 formed by the reservoir 120, and a boundary portion between the device sealing portion 51 and the pool resin portion 52. It is composed of a connecting resin portion 53 that connects both portions 51 and 52.

【0039】こうして、樹脂封止を行った後、刃具等を
用いてリードフレーム30のガイドフレーム33および
タイバー36を切断し、除去する。この切断においては
同時に、図1および図3中の破線で示す切断線S(図2
中のC−C一点鎖線にも相当)に沿って、連結樹脂部5
3も切断される。そして、溜まり樹脂部52を除去す
る。こうして、本実施形態の電子装置(樹脂封止型電子
装置)が完成する。
After the resin is thus sealed, the guide frame 33 and the tie bar 36 of the lead frame 30 are cut and removed using a cutting tool or the like. Simultaneously with this cutting, a cutting line S (see FIG. 2) indicated by a broken line in FIGS.
(Corresponding to C-C dashed line inside)
3 is also cut. Then, the accumulated resin portion 52 is removed. Thus, the electronic device (resin-sealed electronic device) of this embodiment is completed.

【0040】ここで、本実施形態においても、連結樹脂
部53の切断面は上記図4に示すとおりである。つま
り、連結樹脂部53のうち成形型100の連通部130
により形成される両端部53aは、中間部53bに比べ
て、切断方向の厚さが厚い厚肉部となっており、かつ、
切断方向と直交方向への幅tは比較的薄くなっている。
Here, also in this embodiment, the cut surface of the connecting resin portion 53 is as shown in FIG. That is, the communication portion 130 of the molding die 100 of the connection resin portion 53.
Both end portions 53a formed by are thicker portions in the cutting direction than the intermediate portion 53b, and
The width t in the direction orthogonal to the cutting direction is relatively thin.

【0041】本実施形態では、この厚肉部である連結樹
脂部53の両端部53aの幅tを、0.05mm以上
0.15mm以下とするように、成形型100を工夫し
ている。
In this embodiment, the molding die 100 is devised so that the width t of both end portions 53a of the connecting resin portion 53, which is the thick portion, is 0.05 mm or more and 0.15 mm or less.

【0042】この連結樹脂部53の両端部53aの形状
は、成形型100の連通部130の型形状により規定さ
れるものであり、連結樹脂部53の両端部53aの幅t
は、連通部130の幅でもある。つまり、本実施形態で
は、成形型100として、連結樹脂部53(両端部53
a)の切断方向と直交方向における連通部130の幅t
が、0.05mm以上0.15mm以下であるものを用
いることを特徴としている。
The shape of both end portions 53a of the connecting resin portion 53 is defined by the shape of the communicating portion 130 of the molding die 100, and the width t of the both end portions 53a of the connecting resin portion 53 is t.
Is also the width of the communication portion 130. That is, in the present embodiment, as the molding die 100, the connecting resin portion 53 (both end portions 53
The width t of the communicating portion 130 in the direction orthogonal to the cutting direction of a).
However, it is characterized by using a material having a thickness of 0.05 mm or more and 0.15 mm or less.

【0043】それによれば、成形型100の連通部13
0の幅tを0.05mm以上0.15mm以下とするこ
とにより、連結樹脂部53のうち成形型100の連通部
130により形成される比較的厚い部分(厚肉部)すな
わち上記両端部53aの幅t(図4参照)も0.05m
m以上0.15mm以下となる。
According to this, the communicating portion 13 of the molding die 100.
By setting the width t of 0 to be 0.05 mm or more and 0.15 mm or less, a relatively thick portion (thick wall portion) formed by the communicating portion 130 of the molding die 100, that is, both end portions 53a of the connecting resin portion 53. Width t (see Fig. 4) is also 0.05m
It becomes m or more and 0.15 mm or less.

【0044】厚肉部である連結樹脂部53の両端部53
aの幅tが、この範囲であれば、リードフレーム30の
切断時に、当該両端部53aがたわんで切断されにくか
ったり、樹脂50に欠けが発生したりするのを防止でき
る。こうして、本実施形態によれば、リードフレーム3
0の切断時に、不要な樹脂部を適切に同時に切断でき
る。
Both end portions 53 of the connecting resin portion 53 which is a thick portion
When the width t of a is in this range, it is possible to prevent the both end portions 53a from being bent and difficult to be cut, and the resin 50 from being chipped when the lead frame 30 is cut. Thus, according to the present embodiment, the lead frame 3
When cutting 0, unnecessary resin portions can be cut appropriately at the same time.

【0045】成形型100の連通部130の幅tを上記
範囲にすることは、次に述べるような本発明者の検討結
果を根拠とするものである。図4に示す連結樹脂部53
の切断面において、例えば、中間部53bの長さ(幅)
は7mm程度、厚さは0.2mm〜0.3mm程度にで
き、幅tを持つ両端部53aの厚さは0.5mm程度に
できる。
Setting the width t of the communicating portion 130 of the molding die 100 within the above range is based on the result of the study by the present inventor as described below. Connection resin portion 53 shown in FIG.
In the cut surface of, for example, the length (width) of the intermediate portion 53b
Can be about 7 mm, the thickness can be about 0.2 mm to 0.3 mm, and the thickness of both ends 53a having the width t can be about 0.5 mm.

【0046】ここで、成形型100における連通部13
0の幅tを変えることで、連結樹脂部53の両端部53
aの幅tを変えて、連結樹脂部53の切断状況を調べ
た。その結果を図7に示す。図7では、幅t(単位:m
m)を横軸に、切断状況として不良発生率(%)を縦軸
にとってある。
Here, the communicating portion 13 of the molding die 100.
By changing the width t of 0, both end portions 53 of the connecting resin portion 53
The width t of a was changed and the cutting state of the connection resin part 53 was investigated. The result is shown in FIG. 7. In FIG. 7, the width t (unit: m
The horizontal axis represents m) and the vertical axis represents the failure occurrence rate (%) as the cutting status.

【0047】不良発生率は、一定の幅tについて多数作
製されたサンプルを、それぞれ切断したときに、うまく
切断されずにバリが残ったり、装置部40側の樹脂50
(装置封止部51)に欠けが生じたりといった不良の発
生数をパーセンテージで示したものである。
As for the defect occurrence rate, when a large number of samples having a constant width t are cut, burrs are left without being cut well and the resin 50 on the device section 40 side is cut.
The number of occurrences of defects such as chipping in the (device sealing portion 51) is shown in percentage.

【0048】ここで、装置封止部51の欠けは、その大
きさが切断部から0.6mm以上のものを不良とみなし
た。当該欠けが0.6mm以上であると、外観上の問題
があるとともに信頼性を確保できにくく、0.6mmよ
り小さければ実用上問題はないとすることができる。
Here, the chipping of the device sealing portion 51 was regarded as defective when the size thereof was 0.6 mm or more from the cut portion. If the chipping is 0.6 mm or more, there is a problem in appearance and it is difficult to secure reliability, and if it is smaller than 0.6 mm, there is no problem in practical use.

【0049】図7に示すように、上記幅tが0.05m
mよりも小さいと不良が発生し、さらに小さくなるほど
不良が発生しやすくなる。これは、幅tが0.05mm
よりも小さいと、リードフレーム30の切断を行う際
に、連結樹脂部53の両端部(厚肉部)53aの剛性が
無くなり、切断する際にたわんでしまって切断されず、
バリとして残るためである。
As shown in FIG. 7, the width t is 0.05 m.
If it is smaller than m, defects will occur, and as it becomes smaller, defects will be more likely to occur. This has a width t of 0.05 mm
If it is smaller than the above, the rigidity of both ends (thick parts) 53a of the connecting resin portion 53 is lost when the lead frame 30 is cut, and the lead frame 30 bends and is not cut.
This is because it remains as burr.

【0050】一方、図7に示すように、上記幅tが0.
15mmよりも大きいと不良が発生し、さらに大きくな
るほど不良が発生しやすくなる。これは、幅tが0.1
5mmよりも大きいと連結樹脂部53の両端部53aの
剛性が強すぎて、切断時に、装置封止部51が根こそぎ
持って行かれることで、大きな欠けが発生しやすくなる
ためである。
On the other hand, as shown in FIG. 7, the width t is 0.
If it is larger than 15 mm, a defect occurs, and if it is larger, the defect is more likely to occur. This has a width t of 0.1
If it is larger than 5 mm, the rigidity of both end portions 53a of the connecting resin portion 53 is too strong, and the device sealing portion 51 is uprooted at the time of cutting, so that a large chip is likely to occur.

【0051】よって、図7に示す結果から、連結樹脂部
53の両端部53aの幅tすなわち成形型100の連通
部130の幅tを、0.05mm以上0.15mm以下
とすることが導かれる。
Therefore, from the results shown in FIG. 7, it is derived that the width t of both end portions 53a of the connecting resin portion 53, that is, the width t of the communicating portion 130 of the molding die 100 is set to 0.05 mm or more and 0.15 mm or less. .

【0052】なお、本発明は、上記実施形態の電子装置
に限定されることなく、発熱素子が搭載されたヒートシ
ンクとリードフレームとを備える装置部を、ヒートシン
クの端部が露出した状態で樹脂にて包み込むように封止
してなる樹脂封止型電子装置であれば、適用可能である
ことは勿論である。
The present invention is not limited to the electronic device of the above-mentioned embodiment, and the device portion including the heat sink on which the heating element is mounted and the lead frame is made of resin with the end portion of the heat sink exposed. Needless to say, the present invention can be applied to any resin-sealed type electronic device that is sealed by enclosing it.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施形態に係る電子装置および成形型
の概略断面図である。
FIG. 1 is a schematic cross-sectional view of an electronic device and a molding die according to an embodiment of the present invention.

【図2】図1に示す電子装置の概略平面図である。FIG. 2 is a schematic plan view of the electronic device shown in FIG.

【図3】図2中のB−B線に沿った概略断面図である。3 is a schematic cross-sectional view taken along the line BB in FIG.

【図4】図2中のC−C線に沿って連結樹脂部を切断し
たときの断面を示す図である。
FIG. 4 is a view showing a cross section when the connecting resin portion is cut along the line C-C in FIG.

【図5】上記実施形態の製造方法に用いられるリードフ
レームの具体的な平面図である。
FIG. 5 is a specific plan view of a lead frame used in the manufacturing method of the above embodiment.

【図6】図5に示すリードフレームの多連状態を示す平
面図である。
FIG. 6 is a plan view showing a multiple state of the lead frame shown in FIG.

【図7】連結樹脂部の両端部の幅tと連結樹脂部の切断
状況との関係を示す図である。
FIG. 7 is a diagram showing a relationship between a width t of both ends of the connecting resin portion and a cutting state of the connecting resin portion.

【図8】一般的な電子装置の概略断面図である。FIG. 8 is a schematic cross-sectional view of a general electronic device.

【図9】一般的な電子装置の製造方法を示す図である。FIG. 9 is a diagram showing a method for manufacturing a general electronic device.

【符号の説明】[Explanation of symbols]

10…発熱素子、20…ヒートシンク、21…ヒートシ
ンクの端部、30…リードフレーム、33…ガイドフレ
ーム、40…装置部、50…樹脂、53…連結樹脂部、
100…成形型、110…空間部、120…溜まり部、
130…連通部、t…連結樹脂部の切断方向と直交方向
における連通部の幅。
DESCRIPTION OF SYMBOLS 10 ... Heating element, 20 ... Heat sink, 21 ... End of heat sink, 30 ... Lead frame, 33 ... Guide frame, 40 ... Device section, 50 ... Resin, 53 ... Connection resin section,
100 ... Mold, 110 ... Space part, 120 ... Reservoir part,
130 ... Communication part, t ... Width of the communication part in the direction orthogonal to the cutting direction of the connecting resin part.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 発熱素子(10)が搭載されたヒートシ
ンク(20)とリードフレーム(30)とを備える装置
部(40)を、成形型(100)内に配置し、前記成形
型内に樹脂(50)を充填することにより、前記ヒート
シンクの端部が前記樹脂から露出した状態で前記装置部
を前記樹脂にて包み込むように封止する電子装置の製造
方法において、 前記成形型として、その内部に前記装置部を封止するた
めに前記樹脂が充填される空間部(110)と、前記ヒ
ートシンクのうち前記樹脂から露出する端部(21)の
外側に隣り合って位置し前記樹脂が溜まる溜まり部(1
20)と、前記空間部と前記溜まり部とを連通する連通
部(130)とを有するものを用意し、 前記成形型内に前記装置部を配置し、前記樹脂を充填し
前記樹脂を硬化させる工程と、 次に、前記リードフレームのガイドフレーム(33)を
切断するとともに、前記成形型の前記連通部により形成
された連結樹脂部(53a)を切断する工程とを備え、 前記成形型として、前記連結樹脂部の切断方向と直交方
向における前記連通部の幅(t)が、0.05mm以上
0.15mm以下であるものを用いることを特徴とする
電子装置の製造方法。
1. A device part (40) including a heat sink (20) on which a heating element (10) is mounted and a lead frame (30) is arranged in a molding die (100), and a resin is provided in the molding die. In the method of manufacturing an electronic device, which is filled with (50) so as to enclose the device part with the resin in a state where the end part of the heat sink is exposed from the resin, as the molding die, A space (110) that is filled with the resin to seal the device part and a reservoir that is positioned adjacent to the outside of the end (21) of the heat sink exposed from the resin and in which the resin accumulates. Department (1
20) and a communication part (130) that communicates the space part and the reservoir part, prepare the device part in the mold, fill the resin, and cure the resin. A step of cutting the guide frame (33) of the lead frame, and a step of cutting the connecting resin portion (53a) formed by the communicating portion of the molding die, the molding die comprising: A method of manufacturing an electronic device, wherein a width (t) of the communication portion in a direction orthogonal to a cutting direction of the connection resin portion is 0.05 mm or more and 0.15 mm or less.
【請求項2】 前記樹脂(50)としてエポキシ系樹脂
を用いることを特徴とする請求項1に記載の電子装置の
製造方法。
2. The method of manufacturing an electronic device according to claim 1, wherein an epoxy resin is used as the resin (50).
JP2001275200A 2001-09-11 2001-09-11 Manufacturing method of electronic device Expired - Fee Related JP4720053B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001275200A JP4720053B2 (en) 2001-09-11 2001-09-11 Manufacturing method of electronic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001275200A JP4720053B2 (en) 2001-09-11 2001-09-11 Manufacturing method of electronic device

Publications (2)

Publication Number Publication Date
JP2003086616A true JP2003086616A (en) 2003-03-20
JP4720053B2 JP4720053B2 (en) 2011-07-13

Family

ID=19100107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001275200A Expired - Fee Related JP4720053B2 (en) 2001-09-11 2001-09-11 Manufacturing method of electronic device

Country Status (1)

Country Link
JP (1) JP4720053B2 (en)

Also Published As

Publication number Publication date
JP4720053B2 (en) 2011-07-13

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