JP2003073811A - Metal vapor deposition apparatus - Google Patents
Metal vapor deposition apparatusInfo
- Publication number
- JP2003073811A JP2003073811A JP2001260063A JP2001260063A JP2003073811A JP 2003073811 A JP2003073811 A JP 2003073811A JP 2001260063 A JP2001260063 A JP 2001260063A JP 2001260063 A JP2001260063 A JP 2001260063A JP 2003073811 A JP2003073811 A JP 2003073811A
- Authority
- JP
- Japan
- Prior art keywords
- casing
- evaporation
- vapor deposition
- metal wire
- deposition apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Physical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、金属蒸着装置に関
する。TECHNICAL FIELD The present invention relates to a metal vapor deposition apparatus.
【０００２】[0002]
【従来の技術】従来の金属蒸着装置は、真空状態のケー
シング内で金属線材を蒸発させる蒸発部と、ケーシング
の外部に配置されて該蒸発部に金属線材を供給する供給
部と、を備えていた。2. Description of the Related Art A conventional metal vapor deposition apparatus is provided with an evaporation section for evaporating a metal wire in a casing in a vacuum state, and a supply section arranged outside the casing for supplying the metal wire to the evaporation section. It was
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、従来の
金属蒸着装置では、供給部にてケーシングの外部から内
部へ金属線材を供給していたため、ケーシング内に（１
回分の）金属線材を入れる毎にケーシング内の真空引き
を行っていた。即ち、（１回の）金属線材の蒸着を行う
毎にケーシング内を真空にする必要があり、余分な待ち
時間・作業時間がかかっていた。However, in the conventional metal vapor deposition apparatus, since the metal wire is supplied from the outside of the casing to the inside of the casing by the supply unit, (1
The casing was evacuated every time a metal wire rod was inserted. That is, it is necessary to evacuate the inside of the casing every time the metal wire rod is vapor-deposited (once), and extra waiting time and working time are required.
【０００４】そこで、本発明は、作業効率を向上させる
と共に、作業時間を大幅に短縮することができる金属蒸
着装置を提供することを目的とする。Therefore, an object of the present invention is to provide a metal vapor deposition apparatus capable of improving working efficiency and significantly shortening working time.
【０００５】[0005]
【課題を解決するための手段】上述の目的を達成するた
めに、本発明に係る金属蒸着装置は、真空状態のケーシ
ング内で所定寸法の金属線材を順次蒸発させる蒸発部
と、真空状態の該ケーシング内において線材状の素材を
所定寸法に切断して金属線材を形成しながら該蒸発部に
該金属線材を順次供給する供給部と、を備えたものであ
る。In order to achieve the above-mentioned object, a metal vapor deposition apparatus according to the present invention comprises an evaporation unit for sequentially vaporizing metal wire rods of a predetermined size in a casing in a vacuum state, and an evaporation unit in a vacuum state. A supply unit that sequentially supplies the metal wire rod to the evaporation unit while cutting the wire rod-shaped material into a predetermined size in the casing to form the metal wire rod.
【０００６】また、蒸発部が、金属線材が供給される通
電自在な蒸発ボード盤を複数個平面視星型状としてかつ
鉛直状一軸心廻りに間欠的に回転自在に設けているもの
である。Further, the evaporation section is provided with a plurality of electrically conductive evaporation board plates to which metal wires are supplied, in the form of a star in plan view, and is intermittently rotatable about a vertical uniaxial center. .
【０００７】[0007]
【発明の実施の形態】以下、実施の形態を示す図面に基
づき、本発明を詳説する。BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described below in detail with reference to the drawings showing the embodiments.
【０００８】図１に、本発明の蒸着装置の実施の一形態
を示し、本蒸着装置は、真空状態のケーシングＣ内で所
定寸法の金属線材を順次蒸発させる蒸発部１と、真空状
態の該ケーシングＣ内において該蒸発部１に該金属線材
を順次供給する供給部２と、を備えている。FIG. 1 shows an embodiment of the vapor deposition apparatus of the present invention. The vapor deposition apparatus comprises an evaporation unit 1 for sequentially evaporating a metal wire rod of a predetermined size inside a casing C in a vacuum state, and an evaporation unit 1 in a vacuum state. In the casing C, there is provided a supply unit 2 that sequentially supplies the metal wire rod to the evaporation unit 1.
【０００９】即ち、本蒸着装置は、蒸発部１にて蒸気化
された（アルミなどの）金属線材を、ケーシングＣ内に
配設されたフード部３の内部にある被蒸着体Ｍに、蒸着
させるものである。これによって、装飾膜、カーブミラ
ー、反射膜、（携帯電話の）表示素子のカソード膜など
を作製する。なお、フード部３の開口部には、開閉自在
な蓋状のシャッター部４が配設され、シャッター部４
は、フード部３内に入る蒸着された金属量を調整するこ
とができ、被蒸着体Ｍへの金属の蒸着量を正確なものと
することができる。また、金属蒸着のときには、ケーシ
ングＣ内を真空状態（例えば10-4Ｐａ）にする必要があ
る。That is, in the present vapor deposition apparatus, a metal wire rod (such as aluminum) vaporized in the vaporization section 1 is vapor-deposited on a body M to be vapor-deposited inside a hood portion 3 arranged in a casing C. It is what makes me. As a result, a decorative film, a curved mirror, a reflective film, a cathode film of a display element (of a mobile phone), and the like are manufactured. A lid-shaped shutter portion 4 that can be opened and closed is provided at the opening of the hood portion 3.
Can adjust the amount of vapor-deposited metal that enters the hood portion 3, and can make the vapor deposition amount of metal on the vapor-deposited body M accurate. Further, in the case of metal vapor deposition, the inside of the casing C needs to be in a vacuum state (for example, 10 −4 Pa).
【００１０】供給部２は、図２と図３に示すように、線
材状の素材６が巻設されるセット部20と、複数のローラ
が配設されるローラ郡21と、素材６を送り出す送出部22
と、素材６を切断する切断部23と、切断部23にて素材６
が切断されて形成された金属線材５を蒸発部１に供給す
るノズル部29と、を備えている。As shown in FIGS. 2 and 3, the supply unit 2 sends out the setting unit 20 around which the wire-shaped material 6 is wound, the roller group 21 in which a plurality of rollers are arranged, and the material 6. Sending part 22
And the cutting part 23 for cutting the material 6, and the material 6 at the cutting part 23
And a nozzle part 29 for supplying the metal wire rod 5 formed by cutting to the evaporation part 1.
【００１１】セット部20は、ボビンを有し、ケーシング
Ｃ内に配設され、素材６は、予め、ケーシングＣ内に配
置されることとなる。ローラ郡21は、ケーシングＣ内に
配設され、セット部20から引っ張りだされた素材６を送
出部22まで確実にガイドする。The setting section 20 has a bobbin and is arranged in the casing C, and the material 6 is arranged in advance in the casing C. The roller group 21 is arranged in the casing C and reliably guides the material 6 pulled from the setting section 20 to the delivery section 22.
【００１２】送出部22は、（減速機付モータ等の）駆動
部24と、駆動部24により回転するシャフト部25と、素材
６をノズル部29に送り出す送出ローラ26，26と、シャフ
ト部25の回転を送出ローラ26に伝達する（複数の傘歯車
などから成る）伝動部27と、を備えている。The delivery section 22 includes a drive section 24 (such as a motor with a speed reducer), a shaft section 25 rotated by the drive section 24, delivery rollers 26, 26 for delivering the material 6 to the nozzle section 29, and the shaft section 25. And a transmission section 27 (composed of a plurality of bevel gears and the like) for transmitting the rotation of the above to the delivery roller 26.
【００１３】駆動部24はケーシングＣの外部に配設さ
れ、シャフト部25はケーシングＣを貫通し、送出ローラ
26・伝動部27はケーシングＣの内部に配設されている。
シャフト部25は、ケーシングＣに軸受を介して取り付け
られると共に、ケーシングＣに内装されたシール材（回
転軸シール）７と常時接触してケーシングＣ内の真空状
態を維持することができる。また、シャフト部25にはエ
ンコーダ28が取り付けられ、素材６の送り出し量（所定
寸法）を制御することができる。The drive unit 24 is arranged outside the casing C, the shaft unit 25 penetrates the casing C, and
26. The transmission unit 27 is arranged inside the casing C.
The shaft portion 25 is attached to the casing C via a bearing, and can constantly contact the sealing material (rotary shaft seal) 7 provided in the casing C to maintain the vacuum state in the casing C. Further, an encoder 28 is attached to the shaft portion 25, and the feed amount (predetermined dimension) of the material 6 can be controlled.
【００１４】切断部23は、シリンダ部30と、シリンダ部
30のロッドに連設される連動部31と、連動部31に連設さ
れて素材６を切断する刃部32と、を備えており、シリン
ダ部30のロッドの伸縮に追従して刃部32が上下動する。The cutting section 23 includes a cylinder section 30 and a cylinder section.
An interlocking part 31 that is connected to the rod of 30 and a blade part 32 that is connected to the interlocking part 31 and cuts the material 6 are provided, and the blade part 32 follows the expansion and contraction of the rod of the cylinder part 30. Moves up and down.
【００１５】シリンダ部30はケーシングＣの外部に配設
され、連動部31はケーシングＣを貫通し、刃部32はケー
シングＣの内部に配設されている。連動部31とケーシン
グＣとに蛇腹（ベローズ）33が架設され、ケーシングＣ
内の真空状態を維持することができる。The cylinder portion 30 is arranged outside the casing C, the interlocking portion 31 penetrates the casing C, and the blade portion 32 is arranged inside the casing C. A bellows 33 is installed between the interlocking portion 31 and the casing C, and the casing C
The vacuum inside can be maintained.
【００１６】送出部22と切断部23との作用（機能）を説
明すると、図４（イ）に示すように、切断部23に於てシ
リンダ部30のロッドが伸長して刃部32が上方位置にある
状態で、送出部22の送出ローラ26，26にて素材６を所定
寸法だけノズル部29に送り込んだ後に、図４（ロ）に示
すように、シリンダ部30のロッドが短縮して刃部32が下
方に移動し、刃部32にて素材６を切断する。The operation (function) of the delivery section 22 and the cutting section 23 will be described. As shown in FIG. 4A, the rod of the cylinder section 30 extends in the cutting section 23 and the blade section 32 moves upward. After the material 6 is fed to the nozzle portion 29 by the feeding rollers 26 and 26 of the feeding portion 22 by a predetermined size in the position, the rod of the cylinder portion 30 is shortened as shown in FIG. The blade portion 32 moves downward and the material 6 is cut by the blade portion 32.
【００１７】そして、送出部22と切断部23との上記作用
を繰り返すことで、供給部２は、真空状態のケーシング
Ｃ内において線材状の素材６を所定寸法に切断して金属
線材５を形成しながら蒸発部１に金属線材５を順次（間
欠的に）供給する。By repeating the above-described actions of the sending section 22 and the cutting section 23, the supply section 2 cuts the wire-shaped raw material 6 into a predetermined size in the casing C in a vacuum state to form the metal wire 5. Meanwhile, the metal wire 5 is sequentially (intermittently) supplied to the evaporation unit 1.
【００１８】蒸発部１は、図２と図３に示すように、金
属線材５が供給される通電自在な蒸発ボード盤12を複数
個平面視星型状としてかつ鉛直状一軸心Ｌ廻りに間欠的
に回転自在に設けている。言い換えると、蒸発部１は、
蒸発ボード盤12を複数個周方向に等間隔に配置すると共
に間欠的に軸心Ｌ廻りに回転するロータ10を、有する。As shown in FIGS. 2 and 3, the evaporation unit 1 has a plurality of freely energized evaporation board plates 12 to which the metal wire 5 is supplied in the shape of a star in plan view and around a vertical uniaxial center L. Intermittently rotatable. In other words, the evaporation unit 1
A plurality of evaporation board plates 12 are arranged at equal intervals in the circumferential direction, and a rotor 10 that intermittently rotates around an axis L is provided.
【００１９】ロータ10は、円柱状の軸部10ａと、（軸部
10ａの軸心に中心を一致させるように）軸部10ａに連設
された円板部10ｂと、を有し、軸部10ａは、ケーシング
Ｃに貫通状に固着された円筒状のハウジング11に、複数
の軸受を介して、内嵌され、円板部10ｂは、ケーシング
Ｃ内に配設される。The rotor 10 includes a cylindrical shaft portion 10a and a shaft portion
And a disk portion 10b continuously provided to the shaft portion 10a (so that the center thereof coincides with the shaft center of 10a), the shaft portion 10a is provided in a cylindrical housing 11 fixed to the casing C in a penetrating manner. The disc portion 10b is fitted inside through a plurality of bearings, and is disposed inside the casing C.
【００２０】さらに、ハウジング11にはシール材（回転
軸シール）８が内装され、シール材８がロータ10の軸部
10ａと常時接触してケーシングＣ内の真空状態を維持す
ることができる。Further, the housing 11 is internally provided with a sealing material (rotary shaft seal) 8, and the sealing material 8 is a shaft portion of the rotor 10.
The vacuum state in the casing C can be maintained by constantly contacting the casing 10a.
【００２１】円板部10ｂの上方には、ロータ10の軸心Ｌ
廻りに星型状（周方向に等間隔）に複数の蒸発ボード盤
12…が（固定状に）配設されている。この蒸発ボード盤
12は、舟型であり、内部中央部に窪みが形成されると共
に肉薄に形成され、金属線材５を確実に蒸発できる。Above the disc portion 10b, the axis L of the rotor 10 is located.
A plurality of evaporation boards in a star shape (equal intervals in the circumferential direction) around
12 ... are arranged (fixed). This evaporation board
Reference numeral 12 is a boat shape, which has a recess formed in the center of the inside and is thinly formed, and can reliably evaporate the metal wire rod 5.
【００２２】ロータ10の軸部10ａには外鍔状のギヤ部16
が設けられ、そのギヤ部16がケーシングＣに付設された
（減速機付モータ等の）駆動部17のギヤ部17ａと噛合し
て、ロータ10が駆動部17にて回転する。An outer brim-shaped gear portion 16 is provided on the shaft portion 10a of the rotor 10.
Is provided, and its gear portion 16 meshes with a gear portion 17a of a drive portion 17 (such as a motor with a speed reducer) attached to the casing C, so that the rotor 10 is rotated by the drive portion 17.
【００２３】従って、供給部２のノズル部29から金属線
材５が供給される供給位置Ｓに、ロータ10を回転させる
ことで、各蒸発ボード盤12を一致させることができる。Therefore, by rotating the rotor 10 to the supply position S where the metal wire 5 is supplied from the nozzle part 29 of the supply part 2, the evaporation board plates 12 can be aligned with each other.
【００２４】ロータ10には、軸心Ｌに沿って親電極棒13
が貫通状に取り付けられると共に、親電極棒13を中心と
した周方向に等間隔に（軸部10ａを貫通状に）複数本の
子電極棒14…が取り付けられている。なお、親電極棒13
及び子電極棒14の内部には空洞部が形成され、（矢印で
示すように）冷却水が通水可能となる。The rotor 10 has a parent electrode rod 13 along the axis L.
Are attached in a penetrating manner, and a plurality of child electrode rods 14 are attached at equal intervals in the circumferential direction around the parent electrode rod 13 (through the shaft portion 10a). The parent electrode bar 13
Also, a hollow portion is formed inside the child electrode rod 14, and cooling water can pass therethrough (as indicated by an arrow).
【００２５】子電極棒14の上端と、蒸発ボード盤12の外
周端とは、円板部10ｂの下面から外周面に沿って配設さ
れた通電帯板15に接触しており、また、蒸発ボード盤12
の内周端は、親電極棒13の上端に接触しており、子電極
棒14、通電帯板15、蒸発ボード盤12、親電極棒13の順で
通電自在となる。The upper end of the child electrode bar 14 and the outer peripheral end of the evaporation board 12 are in contact with the current-carrying band plate 15 arranged along the outer peripheral surface from the lower surface of the disk portion 10b, and the evaporation is also performed. Board board 12
The inner peripheral edge of is in contact with the upper end of the parent electrode rod 13, and the child electrode rod 14, the conduction band plate 15, the evaporation board 12, and the parent electrode rod 13 can be energized in this order.
【００２６】具体的に述べると、蒸発ボード盤12は、通
電帯板15に（ボルト等の）固着具にて固定されると共
に、親電極棒13本体に取り外し自在のキャップにて挟持
状に取り付けられる。More specifically, the evaporation board 12 is fixed to the energization plate 15 with a fixing tool (such as bolts), and attached to the main body of the parent electrode bar 13 with a removable cap in a sandwiched manner. To be
【００２７】蒸発ボード盤12の下方側には、通電帯板15
及び子電極棒14が配設されており、蒸発ボード盤12と子
電極棒14と通電帯板15との数量は一致したものとなる。On the lower side of the evaporation board 12 is a current carrying plate 15.
Also, the child electrode rods 14 are provided, and the numbers of the evaporation board 12, the child electrode rods 14, and the conduction band plates 15 are the same.
【００２８】ここで、供給位置Ｓのロータ10の軸心Ｌに
対する対称位置を蒸発位置Ｈとし、この蒸発位置Ｈにあ
る蒸発ボード盤12が通電されて金属線材５が蒸発され
る。Here, the symmetrical position with respect to the axis L of the rotor 10 at the supply position S is defined as the evaporation position H, and the evaporation board 12 at this evaporation position H is energized to evaporate the metal wire 5.
【００２９】具体的に述べると、ケーシングＣに付設さ
れた電極ブラシ18が、蒸発位置Ｈにある子電極棒14のみ
と接触するように配設され、ロータ10の回転にて蒸発位
置Ｈに一致された蒸発ボード盤12は、その下方にある子
電極棒14が電極ブラシ18と接触することにより、通電さ
れることとなる。Specifically, the electrode brush 18 attached to the casing C is arranged so as to contact only the child electrode rod 14 at the evaporation position H, and the rotor 10 is rotated to match the evaporation position H. The evaporated board board 12 thus energized is brought into contact with the child electrode bar 14 located therebelow by contact with the electrode brush 18.
【００３０】このように、ロータ10が間欠的に回転する
ことで、全ての蒸発ボード盤12…が供給位置Ｓと蒸発位
置Ｈとに一致可能となり、供給と蒸発を同時に行うこと
ができる。なお、ロータ10のギヤ部16に取り付けられた
エンコーダ19にて、蒸発ボード盤12を供給位置Ｓと蒸発
位置Ｈとに停止させることができる。また、蒸発ボード
盤12は、蒸発位置Ｈから供給位置Ｓへ移動する間に、冷
却水にて冷却される。As described above, by intermittently rotating the rotor 10, all the evaporation board 12 ... Can coincide with the supply position S and the evaporation position H, and supply and evaporation can be performed simultaneously. The evaporation board 12 can be stopped at the supply position S and the evaporation position H by the encoder 19 attached to the gear portion 16 of the rotor 10. Further, the evaporation board 12 is cooled by cooling water while moving from the evaporation position H to the supply position S.
【００３１】なお、隣り合う蒸発ボード盤12，12の間に
は仕切壁９が設けられ、金属線材５の蒸気をフード部３
へ確実にかつ容易に導入することができる。A partition wall 9 is provided between the adjacent evaporation board plates 12, 12 to allow the vapor of the metal wire rod 5 to pass through.
Can be reliably and easily introduced.
【００３２】[0032]
【発明の効果】本発明は上述の如く構成されるので、次
に記載する効果を奏する。Since the present invention is configured as described above, it has the following effects.
【００３３】（請求項１によれば、）真空状態のケーシ
ングＣ内において金属線材５の供給と蒸発（蒸着）を行
えるため、従来のように１回の蒸着毎に真空引きを行う
必要がなく、作業効率を向上させると共に、作業時間を
大幅に短縮することができる。また、金属線材５の所定
寸法を様々に設定して蒸着量を種々に変化させることが
できる。さらに、素材６をケーシングＣ内に予め配置さ
せることができ、ケーシングＣの真空状態を安定して長
時間維持することができる。Since the metal wire 5 can be supplied and vaporized (deposited) in the casing C in a vacuum state (according to claim 1), it is not necessary to perform vacuuming for each vapor deposition as in the conventional case. The work efficiency can be improved and the work time can be significantly shortened. Further, the deposition amount can be variously changed by setting various predetermined dimensions of the metal wire rod 5. Further, the material 6 can be placed in the casing C in advance, and the vacuum state of the casing C can be stably maintained for a long time.
【００３４】（請求項２によれば、）真空状態のケーシ
ングＣ内において金属線材５の供給と蒸発（蒸着）とを
同時に行うことができ、一層作業時間の短縮を図ること
ができる。(According to the second aspect) The metal wire 5 can be supplied and vaporized (deposited) at the same time in the casing C in a vacuum state, and the working time can be further shortened.
【図１】本発明の実施の一形態を示す簡略全体説明図で
ある。FIG. 1 is a simplified overall explanatory view showing an embodiment of the present invention.
【図２】要部正面断面図である。FIG. 2 is a front sectional view of a main part.
【図３】要部平面図である。FIG. 3 is a plan view of a main part.
【図４】要部作用説明図である。FIG. 4 is an explanatory view of the operation of main parts.
【符号の説明】 １ 蒸発部 ２ 供給部 ５ 金属線材 ６ 素材 10 ロータ 12 蒸発ボード盤 Ｃ ケーシング Ｌ 軸心[Explanation of symbols] 1 Evaporator 2 supply section 5 metal wire 6 material 10 rotor 12 evaporation board C casing L axis center
Claims (2)
金属線材５を順次蒸発させる蒸発部１と、真空状態の該
ケーシングＣ内において線材状の素材６を所定寸法に切
断して金属線材５を形成しながら該蒸発部１に該金属線
材５を順次供給する供給部２と、を備えたことを特徴と
する金属蒸着装置。1. An evaporation unit 1 for sequentially evaporating a metal wire rod 5 of a predetermined size in a casing C in a vacuum state, and a metal wire rod 5 by cutting a wire-shaped material 6 into a predetermined dimension in the casing C in a vacuum state. And a supply unit 2 for sequentially supplying the metal wire 5 to the evaporation unit 1 while forming the metal vapor deposition apparatus.
電自在な蒸発ボード盤12を複数個平面視星型状としてか
つ鉛直状一軸心Ｌ廻りに間欠的に回転自在に設けている
請求項１記載の金属蒸着装置。2. The evaporation unit 1 is provided with a plurality of freely energized evaporation board 12 to which the metal wire 5 is supplied in the form of a star in plan view and intermittently rotatable about a vertical uniaxial center L. The metal vapor deposition apparatus according to claim 1, wherein
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001260063A JP3858076B2 (en) | 2001-08-29 | 2001-08-29 | Metal deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001260063A JP3858076B2 (en) | 2001-08-29 | 2001-08-29 | Metal deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003073811A true JP2003073811A (en) | 2003-03-12 |
| JP3858076B2 JP3858076B2 (en) | 2006-12-13 |
Family
ID=19087321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001260063A Expired - Fee Related JP3858076B2 (en) | 2001-08-29 | 2001-08-29 | Metal deposition equipment |
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| Country | Link |
|---|---|
| JP (1) | JP3858076B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100631475B1 (en) | 2004-09-24 | 2006-10-09 | 두산디앤디 주식회사 | Automatic Wire Supply Feeder for Evaporator |
| TWI425692B (en) * | 2006-03-29 | 2014-02-01 | Global Oled Technology Llc | Uniformly vaporizing metals and organic materials |
-
2001
- 2001-08-29 JP JP2001260063A patent/JP3858076B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100631475B1 (en) | 2004-09-24 | 2006-10-09 | 두산디앤디 주식회사 | Automatic Wire Supply Feeder for Evaporator |
| TWI425692B (en) * | 2006-03-29 | 2014-02-01 | Global Oled Technology Llc | Uniformly vaporizing metals and organic materials |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3858076B2 (en) | 2006-12-13 |
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