JP2003067022A - System and method for semiconductor production management - Google Patents

Abstract

PROBLEM TO BE SOLVED: To actualize a system and a method for semiconductor production management which make it easy for decentralized factories to manage and share data. SOLUTION: The semiconductor production management system which performs the production management of semiconductor producing equipment by decentralized factory systems has public lines connected to the factory systems and a data center system which gathers data of the semiconductor producing equipment through the public lines and makes the data open to the public lines.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor production management system and a semiconductor production management method for managing production of semiconductor production equipment in a distributed factory system, and to easily perform data management and data sharing in a distributed factory system. The present invention relates to a semiconductor production control system and a semiconductor production control method that can be performed.

[0002]

2. Description of the Related Art The semiconductor industry is conservative and has a lot of know-how, and even one manufacturer has accumulated know-how for each production base. Therefore, in order to accumulate the know-how of the production bases within the manufacturer, a database that collects data for each production base is created in-house to improve productivity, but it was necessary to build various analysis tools. The construction of this tool is costly and has become an obstacle to low cost.

On the other hand, one maker does not consistently carry out the processes from the production of semiconductors to the testing, but the development, production and testing of semiconductors are carried out by different manufacturers. Therefore, in order to improve the yield of semiconductors, the manufacturer has to receive the test result from the test maker, and has to construct a system for receiving the test result. In addition, such test makers are conducted by overseas makers, and a division of labor system is being built on a global scale.

As a result, it is not easy to build a system for passing data between a plurality of manufacturers due to the system construction level of the other manufacturer and the occurrence of cost problems. Even if the system could be constructed, it would have to be reconstructed due to the change of the other manufacturer, which would increase the cost in the highly competitive semiconductor industry, making it difficult to overcome the cost competition. I will end up.

[0005]

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to realize a semiconductor production management system and a semiconductor production management method that can easily perform data management and data sharing in distributed factories.

[0006]

A first aspect of the present invention is a semiconductor production management system for controlling production of semiconductor production equipment in a distributed factory system, which is a public line connected to the factory system and the public line. And a data center system for collecting the data of the semiconductor production apparatus via the Internet and disclosing the data to the public line.

A second aspect of the present invention is described in the first aspect of the present invention, wherein the data center system analyzes collected data and discloses the analyzed data to a public line.

A third aspect of the present invention is a semiconductor production management system for controlling production of semiconductor production equipment in a distributed factory system, comprising a public line connected to the factory system and the semiconductor via the public line. A data center system that collects data of a production apparatus and calculates parameters of the semiconductor production apparatus, and uses the parameters in the semiconductor production apparatus.

A fourth aspect of the present invention is any one of the first to third aspects of the present invention, wherein the public line is the Internet.

The fifth aspect of the present invention is any one of the first to fourth aspects of the present invention, characterized in that the manufacturers of the factory systems are different.

A sixth aspect of the present invention is the data center system according to any one of the first to fifth aspects of the present invention, characterized in that the data center system is provided with a data server for storing data.

A seventh aspect of the present invention is the data center system according to any one of the first to sixth aspects of the present invention, in which a WWW server for disclosing the data of the semiconductor production equipment is provided.

An eighth aspect of the present invention is described in the seventh aspect of the present invention, characterized in that the WWW server inputs control data for the semiconductor production apparatus and controls the semiconductor production apparatus by the control data. .

In a ninth aspect of the present invention, the factory system is provided with a data collection server for collecting data of the semiconductor production equipment and transmitting the data to the data center system. As described in.

According to a tenth aspect of the present invention, the semiconductor production apparatus is at least one of a pre-process apparatus, an IC tester, a prober, and a handler. Is.

An eleventh aspect of the present invention is a semiconductor production control method, wherein a data center system controls production of semiconductor production devices in a distributed factory system, wherein the semiconductor production devices are connected from the factory system via a public line. Is collected, and this data is made public to the public line.

The twelfth aspect of the present invention is described in the eleventh aspect of the present invention, which is characterized in that the collected data is analyzed and the analyzed data is disclosed to the public line.

A thirteenth aspect of the present invention is a semiconductor production control method, wherein a data center system controls production of semiconductor production devices in a distributed factory system, wherein the semiconductor production devices are connected from the factory system via a public line. Is collected, the parameters of the semiconductor production apparatus are calculated based on this data, and the calculated parameters are used in the semiconductor production apparatus.

The fourteenth aspect of the present invention is any one of the eleventh to thirteenth aspects of the present invention in which the public line is the Internet.

The fifteenth aspect of the present invention is as set forth in any one of the eleventh to fourteenth aspects of the present invention, characterized in that the manufacturers of the factory systems are different.

The sixteenth aspect of the present invention is characterized in that the data collection server of the factory system collects the data of the semiconductor production equipment and transmits the data to the data center system.
~ 15 of the present invention.

[0022]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing an embodiment of the present invention.

In the figure, the factory systems 10 and 20 are
It is established in Japan and produces semiconductors. Factory system 1
0 and 20 are front-end devices 11 and 21, IC testers 12 and 22, probers 13 and 23, PCs 14 and 15,
24 and 25, and data collection servers 16 and 26.

The pre-process apparatuses 11 and 21 are connected to the networks L1 and L2, respectively, to produce semiconductors. IC
The testers 12 and 22 are networks L1 and L2, respectively.
Then, the semiconductor (wafer) is tested. Prober 1
Reference numerals 3 and 23 connect to the networks L1 and L2, respectively, and connect semiconductors (wafers) to the IC testers 12 and 22, respectively. The PCs 14, 15, 24 and 25 are connected to the networks L1 and L2, respectively, and WWW (World Wide Web)
A browser and an electronic mailer are installed, and front-end devices 11, 21
The IC testers 12, 22 and the probers 13, 23 are operated. The data collection servers 16 and 26 are connected to the networks L1 and L2, respectively, and are connected to the front-end devices 11, 21 and
Data is collected from the IC testers 12, 22 and the probers 13, 23, the formats are unified, and the data is transmitted. Further, the data collection servers 16 and 26 receive the parameters and control data and set them in the pre-process apparatuses 11 and 21, the IC testers 12 and 22, and the probers 13 and 23.

The factory system 30 is provided overseas and conducts a semiconductor test. The factory system 30 is the IC tester 3
1, a prober 32, PCs 33 and 34, and a data collection server 35.

The IC tester 31 is connected to the network L3 and tests a semiconductor (wafer). Prober 32
Are connected to the network L3, respectively, and the IC tester 3
A semiconductor (wafer) is connected to 1. PC33,34,
It connects to the network L3, is provided with a WWW browser and an electronic mailer, and operates the IC tester 31 and the prober 32. The data collection server 35 is connected to the network L3, collects data from the IC tester 31 and the prober 32, unifies the format, and transmits the data. The data collection server 35 also receives parameters and control data and sets them in the IC tester 31 and the prober 32.

The Internet 40 is a public line and is connected to the factory systems 10 to 30. Specifically, the Internet 40 is connected via a firewall (not shown),
Connect to networks L1-L3. Mobile PC 41
Is connected to the Internet 40 via a provider (not shown), and has a WWW browser and an electronic mailer.

The data center system 50 is connected to the Internet 40, collects data from the factory systems 10 to 30, and publishes the data. The data center system 50 has a data server 51, a WWW server 52, and a mail server 53. The data server 51 connects to the Internet 40 via a firewall (not shown), transmits / receives data to / from the data collection servers 16, 26, 35, stores the data, and stores the data.
Performs analysis and parameter calculation. The WWW server 52
The data of the data server 51 is connected to the Internet 40 via the firewall.
The control data is input and stored in the data server 51. Mail server 53
Internet 40 through the firewall
, And based on the data analysis of the data server 51,
send mail.

The operation of such a system will be described below. Semiconductors are produced in the pre-process apparatuses 11 and 21. Then, the semiconductor is conveyed to the probers 13 and 23, and the IC testers 12 and 22 are conveyed by the probers 13 and 23.
Connected to. Further, the semiconductor is transported to the factory system 30 and connected to the IC tester 31 by the prober 32. The IC testers 12, 22, 31 determine the quality of the semiconductor.

At this time, the data collection servers 16, 26,
35 via the networks L1 to L3,
Pre-process devices 11, 21, IC testers 12, 22, 31,
Data from the probers 13, 23 and 32 for each lot and each wafer, for example, semiconductor pass / fail data,
Collect measurement data, etc. And the data collection server 1
6, 26 and 35 are processed into data, that is, processed into a format that can be stored in the data server 51 and stored in the data server 51 via the Internet 40. At this time, the security of the data server 51 is ensured because the data is stored by the specific data collection servers 16, 26, 35.

Then, the data server 51 calculates a statistical histogram, a defect rate, an operating rate, a stop factor, a production plan, etc. for each lot and each wafer based on the collected data. If there is an abnormality due to the result of this calculation, for example, the operating rate, the mail server 53 notifies it by e-mail.
As a result, the mail is sent to a mail server (not shown), and the PCs 14, 15, 24, 25, 33, 34 and the mobile PC 41 receive the mail by the electronic mailer. Further, the mail server 53 periodically acquires data from the data server 51 and sends a mail as a report.

PCs 14, 15, 24, 25, 33, 3
4. The mobile PC 41 uses the WWW browser to make a display (data) request to the WWW server 52 via the networks L1 to L3 and the Internet 40, respectively.
In response to the display request, the WWW server 52 causes the data server 5 to
1 to obtain a desired display, for example, a semiconductor defect status as a wafer map, and data for displaying the operation rate of the apparatus, and obtain HTML (Hyper Text Markup Lang).
uage) Send to the requester as a file. With this file, the PCs 14, 15, 24, 25, 33, 34 and the mobile PC 41 perform display using a WWW browser. Needless to say, the WWW server 52 discloses it to a specific person with a user ID, a password, and the like.

Further, the PCs 14, 15, 24, 25, 3
3, 34 and the mobile PC 41 request the spreadsheet file from the WWW server 52 via the networks L1 to L3 and the Internet 40 by the WWW browser. In response to this request, the WWW server 52 accesses the data server 51 and sends desired data as a spreadsheet file to the request source. And PC14,15,2
4, 25, 33, 34 and the mobile PC 41 obtain a spreadsheet file from the WWW server 52 via the networks L1 to L3 and the Internet 40 by a WWW browser, and display the spreadsheet file.

Further, the data server 51 analyzes the collected data to obtain parameters. For example, the correlation between the semiconductor design value and the measurement values of the IC testers 12, 22, 31 is obtained. Even if the same kind of semiconductor is tested, I
The C testers 12, 22, and 31 have variations, and it is desirable to reduce the variations to zero.
Required to make adjustments to the C testers 12, 22, 31.

Then, the data collection servers 16, 26, 3
5 accesses the database 51 at every specific time to acquire parameters, and the front-end process devices 11 and 12 are respectively acquired.
1, IC tester 12, 22, 31, prober 13, 2
The parameters are changed for 3, 32.

Further, the PCs 14, 15, 24, 25, 3
3, 34 and the mobile PC 41 request display of the remote control screen to the WWW server 52 via the networks L1 to L3 and the Internet 40 by the WWW browser. By this display request, the WWW server 52 causes the remote control screen file (HTML file, XML (eXtensible Marku) to be displayed.
markup language files such as p Language files)
To send. And PC14,15,24,25,33,
34, the mobile PC 41 displays the file from the WWW server 52 via the networks L1 to L3 and the Internet 40 by the WWW browser.

The PCs 14, 15, 24, 25, 3
3, 34, the mobile PC 41 sends the control data to the WWW server 52 via the networks L1 to L3 and the Internet 40 by using the remote control screen by the WWW browser. The WWW server 52 passes this control data to the data server 51.

The data server 51 transmits the control data to the data collection servers 16, 26, 35 of the factory systems 10-30 corresponding to the control data. Then, the data collection servers 16, 26, 35 are
Pre-process devices 11, 21 corresponding to the control data,
IC testers 12, 22, 31 and probers 13, 23, 3
2, the control data is changed to the format of the corresponding device and sent. As a result, the pre-process devices 11, 21 and the IC
Testers 12, 22, 31 and probers 13, 23, 32
Operates according to the control data. Here, the security of the data collection servers 16, 26, 35 is ensured because the access is from the specific database 51.

In this way, the data center system 50
However, the pre-process devices 11 and 21 of the factory systems 10 to 30,
IC testers 12, 22, 31 and probers 13, 23, 3
Since the data of No. 2 are collected and disclosed to the Internet 40, there is no need to construct a system for exchanging data between the factory systems 10 to 30. Therefore,
You can easily manage and share data in distributed factories. In particular, even if the manufacturers of the factory systems 10 to 30 are different, data can be easily exchanged, and a division of labor system important in the semiconductor industry can be easily constructed.

Since the data server 51 of the data center system 50 analyzes the collected data and publishes the analyzed data to the Internet 40,
It is not necessary to provide various analysis tools for each factory system 10-30. Then, even if the makers of the factory systems 10 to 30 are different, the analysis result can be easily obtained.

Further, the data collecting servers 16, 26, 35
As a result, the pre-process devices 11, 21 and the IC testers 12, 2
2, 31 and the probers 13, 23, 32 collect data and send it to the data center system 50 in a uniform format. Therefore, on the data center system 50 side,
Data management can be facilitated. Further, since it is not necessary to collect data from the data center system 50 side to each device, each factory system 10 to 30 can ensure security.

Then, the data center system 50
Pre-process equipment 11, 21 of factory system 10-30, IC
The data of the testers 12, 22, 31 and the probers 13, 23, 32 are collected, the parameters of each device are calculated, and each device uses this parameter.
The semiconductor production can be performed by correcting the variation and the like between 0 and 30.

Further, the WWW server 52 receives the control data and transfers it to the data server 51, and the data server 51 transfers the control data to the data collecting servers 16, 26, 35, and the data collecting servers 16, 26, 35.
Are front-end devices 11, 21 and IC testers 12, 22, 3
1. Since it is passed to the probers 13, 23 and 32, remote control can be performed.

The present invention is not limited to this, and may have the following configurations. As a semiconductor production device, front-end devices 11, 21 and IC testers 12, 22, 3
1, the probers 13, 23, 32 are shown, but they may be handlers. That is, the semiconductor includes not only the wafer but also the package.

The factory system is the factory system 30.
As shown in FIG. 7, the present invention also includes the one that only performs the test without including the production function, and the present invention also includes the one that only performs the production without including the test function.

An example using the mobile PC 41 has been shown, but a mobile phone, a PDA (Personal Digital Assista)
nts) or the like.

Further, the data collection servers 16, 26, 3
5 shows a configuration for collecting data from the front-end devices 11, 21 of the semiconductor production apparatus, the IC testers 12, 22, 31, and the probers 13, 23, 32, the data collection server 16 is mainly used from the semiconductor production apparatus. , 26, 35 may be transmitted.

In addition, the data collection servers 16, 26, 3
5 shows a configuration in which the parameters are directly set for each semiconductor production apparatus, but each apparatus has a data collection server 1
6, 26, and 35 may be used, or parameters may be set in a server that stores operating programs and parameters of each device. Alternatively, PC14,15,2
4, 25, 33, 34, via the WWW server 52,
The configuration may be such that the parameters are acquired from the database 51 and set in the semiconductor production device.

[0049]

The present invention has the following effects. According to claims 1, 2, 4 to 12 and 14 to 16, the data center system collects the data of the semiconductor production equipment of the factory system and discloses it to the public line.
There is no need to build a system for exchanging data between each factory system. Therefore, it is possible to easily manage and share data in distributed factories.

According to claims 2 and 12, since the data center system analyzes the collected data and discloses the analyzed data to the public line, it is necessary to provide various analysis tools for each factory system. Absent.

According to the third and thirteenth aspects, the data center system collects the data of the semiconductor production equipment of the factory system, calculates the parameter of each equipment, and each equipment uses this parameter. The semiconductor production can be performed by correcting the variation of the above.

According to the fifth and fifteenth aspects, even if the makers of the respective factory systems are different, data can be exchanged easily, and an important division of labor system in the semiconductor industry can be easily constructed.

According to the eighth aspect, since the WWW server inputs the control data and transfers the control data to the semiconductor production apparatus, remote control can be performed.

According to the ninth and sixteenth aspects, the data collection server collects the data from the semiconductor production equipment and sends the data to the data center system in a uniform format. Therefore, the data center system can easily manage the data. can do. Further, since the data center system does not need to collect data from each device, each factory system can ensure security.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an embodiment of the present invention.

[Explanation of symbols]

10-30 factory system 11,21 Pre-process equipment 12, 22, 31 IC tester 13,23,32 prober 16, 26, 35 data collection server 40 Internet 50 data center system 51 data server 52 WWW server

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Masamitsu Tagawa             2-9-32 Nakamachi, Musashino City, Tokyo Yokogawa             Electric Co., Ltd. F term (reference) 3C100 AA68 BB01 BB27 CC03 CC12                       EE06                 5K048 BA23 DC00 EB02 EB10 EB12

Claims (16)

[Claims] 1. A semiconductor production management system for managing production of semiconductor production equipment in a distributed factory system, comprising: a public line connected to the factory system; and data of the semiconductor production equipment via the public line. A semiconductor production management system comprising: a data center system that collects and discloses data to a public line. 2. The semiconductor production management system according to claim 1, wherein the data center system analyzes the collected data and discloses the analyzed data to a public line. 3. A semiconductor production management system for controlling production of semiconductor production equipment in a distributed factory system, comprising: a public line connected to the factory system; and data of the semiconductor production equipment via the public line. A data center system for collecting and calculating parameters of a semiconductor production apparatus, wherein the parameters are used in the semiconductor production apparatus. 4. The semiconductor production management system according to claim 1, wherein the public line is the Internet. 5. The semiconductor production management system according to claim 1, wherein the manufacturers of the factory systems are different. 6. The semiconductor production management system according to claim 1, wherein the data center system is provided with a data server that stores data of the semiconductor production equipment. 7. The semiconductor production management system according to claim 1, wherein the data center system is provided with a WWW server that exposes data of the semiconductor production equipment. 8. The semiconductor production management system according to claim 7, wherein the WWW server inputs control data for the semiconductor production apparatus and controls the semiconductor production apparatus by the control data. 9. The semiconductor production management system according to claim 1, wherein the factory system is provided with a data collection server that collects data of the semiconductor production equipment and transmits the data to the data center system. . 10. The semiconductor production management system according to claim 1, wherein the semiconductor production apparatus is at least one of a pre-process apparatus, an IC tester, a prober, and a handler. 11. A data center system is a semiconductor production management method for managing production of semiconductor production equipment in a distributed factory system, wherein data of the semiconductor production equipment is collected from the factory system via a public line. A semiconductor production management method characterized by exposing this data to a public line. 12. The semiconductor production management method according to claim 11, wherein the collected data is analyzed and the analyzed data is disclosed to a public line. 13. A data center system is a semiconductor production management method for managing production of semiconductor production equipment in a distributed factory system, wherein data of the semiconductor production equipment is collected from the factory system via a public line. A semiconductor production management method, wherein a parameter of a semiconductor production apparatus is calculated based on this data, and the calculated parameter is used in the semiconductor production apparatus. 14. The semiconductor production management method according to claim 11, wherein the public line is the Internet. 15. The semiconductor production management method according to claim 11, wherein the manufacturers of the factory systems are different. 16. A data collection server of a factory system,
16. The semiconductor production management method according to claim 11, wherein data of the semiconductor production equipment is collected and transmitted to a data center system.