JP2003059697A - Plasma generator - Google Patents

Plasma generator

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Publication number
JP2003059697A
JP2003059697A JP2001248560A JP2001248560A JP2003059697A JP 2003059697 A JP2003059697 A JP 2003059697A JP 2001248560 A JP2001248560 A JP 2001248560A JP 2001248560 A JP2001248560 A JP 2001248560A JP 2003059697 A JP2003059697 A JP 2003059697A
Authority
JP
Japan
Prior art keywords
honeycomb
low
discharge
main body
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001248560A
Other languages
Japanese (ja)
Inventor
Masaru Nagamine
勝 長峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NAGAMINE SEISAKUSHO KK
Nagamine Manufacturing Co Ltd
Original Assignee
NAGAMINE SEISAKUSHO KK
Nagamine Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NAGAMINE SEISAKUSHO KK, Nagamine Manufacturing Co Ltd filed Critical NAGAMINE SEISAKUSHO KK
Priority to JP2001248560A priority Critical patent/JP2003059697A/en
Publication of JP2003059697A publication Critical patent/JP2003059697A/en
Pending legal-status Critical Current

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  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a plasma generator which can form a plurality of plasmas efficiently. SOLUTION: The plasma generator 10 for forming a plurality of plasmas is provided with a discharge member 11 connected to a high voltage side electrode and a honeycomb member 20 connected to a low voltage side electrode, the honeycomb member 20 provided with a honeycomb body 21 having a honeycomb structure and a low voltage side member 22 having smaller electrical resistance than the honeycomb member 20 connected to the low voltage side electrode attached so as to surround a side surface of the honeycomb body 21, with a front surface of the honeycomb body 20 placed with an interval to the discharge member 11. A plurality of plasmas can surely be formed even if voltage impressed between electrodes is kept low, so that, each plasma can be formed efficiently.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、プラズマ発生器に
関する。一対の電極を離間させて、両電極の間に高電圧
を加えれば、両電極間に放電が発生し、放電とともにプ
ラズマが形成される。このプラズマは、原子が電離して
できた正イオンと負イオンが混在しており、高い反応性
と高いエネルギを有しており、悪臭ガスの分解処理や、
空気イオンの生成等に使用されている。本発明はかかる
プラズマを形成させるプラズマ発生器に関する。
TECHNICAL FIELD The present invention relates to a plasma generator. When the pair of electrodes are separated from each other and a high voltage is applied between the electrodes, a discharge is generated between the electrodes, and plasma is formed together with the discharge. This plasma is a mixture of positive ions and negative ions formed by ionization of atoms, has high reactivity and high energy, and decomposes malodorous gas,
It is used to generate air ions. The present invention relates to a plasma generator that forms such plasma.

【0002】[0002]

【従来の技術】プラズマ発生器を備えた装置として、例
えばアンモニアやタバコ臭等の悪臭ガスを処理する消臭
装置や集塵装置がある。この消臭装置では、低圧側電極
に接続されたハニカム触媒と、このハニカム触媒に向け
て配設され、高圧側電極に接続された複数の針状の放電
部材とを備えており、放電部材とハニカム触媒との間に
高電圧を加えれば、放電部材とハニカム触媒との間にプ
ラズマを発生させることができる。このため、プラズマ
に接触してからハニカム触媒を通過するように、アンモ
ニアやタバコ臭等の悪臭ガスを消臭装置や集塵装置に供
給すれば、プラズマによって悪臭ガスの反応性を高める
ことができ、反応性の高くなった悪臭ガスをハニカム触
媒によって処理することができる。よって、ハニカム触
媒において、悪臭ガスを効率よく処理することができ
る。
2. Description of the Related Art As an apparatus equipped with a plasma generator, there are a deodorizing apparatus and a dust collecting apparatus for treating a malodorous gas such as ammonia and cigarette odor. In this deodorizing device, a honeycomb catalyst connected to the low-voltage side electrode and a plurality of needle-shaped discharge members arranged toward the honeycomb catalyst and connected to the high-voltage side electrode are provided, and By applying a high voltage between the honeycomb catalyst and the honeycomb catalyst, plasma can be generated between the discharge member and the honeycomb catalyst. Therefore, if a malodorous gas such as ammonia or cigarette odor is supplied to the deodorizer or dust collector so that it contacts the plasma and then passes through the honeycomb catalyst, the reactivity of the malodorous gas can be increased by the plasma. The highly reactive malodorous gas can be treated by the honeycomb catalyst. Therefore, the odorous gas can be efficiently treated in the honeycomb catalyst.

【0003】[0003]

【発明が解決しようとする課題】しかるに、上記のごと
きプラズマ発生装置において、ハニカム触媒は、その周
囲のどこか一点だけが低圧側電極に接続されている。複
数本の放電部材から発生した複数のプラズマは、ハニカ
ム触媒に接触する位置が異なるため、各プラズマがハニ
カムに接触した位置から低圧側電極までの距離が、各プ
ラズマ毎に異なることになる。すると、低圧側電極から
遠いプラズマでは、ハニカム触媒内を放電電流が流れる
距離が長くなり、ハニカム触媒を電流が流れるときの抵
抗値が大きくなる。このため、放電部材のすべての針か
らプラズマを発生させるためには、両電極間に加える電
圧を、低圧側電極からもっとも遠い針とハニカム本体と
の間にプラズマを形成させるために必要な電圧にしなけ
ればならず、両電極間に加える電圧を高くしなければな
らない。したがって、プラズマを形成させる効率が悪く
なるという問題がある。
However, in the above-described plasma generator, the honeycomb catalyst is connected to the low-voltage side electrode only at any one point around the honeycomb catalyst. Since the plurality of plasmas generated from the plurality of discharge members have different positions in contact with the honeycomb catalyst, the distance from the position in which each plasma contacts the honeycomb to the low-voltage side electrode is different for each plasma. Then, in the plasma far from the low-voltage side electrode, the distance that the discharge current flows in the honeycomb catalyst becomes long, and the resistance value when the current flows in the honeycomb catalyst becomes large. Therefore, in order to generate plasma from all the needles of the discharge member, the voltage applied between both electrodes should be the voltage required to form plasma between the needle farthest from the low voltage side electrode and the honeycomb body. It is necessary to increase the voltage applied between both electrodes. Therefore, there is a problem that the efficiency of forming plasma is deteriorated.

【0004】本発明はかかる事情に鑑み、複数のプラズ
マを効率よく形成することができるプラズマ発生器を提
供することを目的とする。
In view of such circumstances, it is an object of the present invention to provide a plasma generator capable of efficiently forming a plurality of plasmas.

【0005】[0005]

【課題を解決するための手段】請求項1のプラズマ発生
器は、複数のプラズマを形成させるためのプラズマ発生
器であって、該プラズマ発生器が、高圧側電極に接続さ
れた放電部材と、低圧側電極に接続されたハニカム部材
とからなり、該ハニカム部材が、ハニカム構造を有する
ハニカム本体と、該ハニカム本体の側面を囲むように取
り付けられ、前記低圧側電極に接続された前記ハニカム
本体よりも電気抵抗が小さい低圧側部材とからなり、前
記ハニカム本体の前面が、前記放電部材に対して間隔を
あけて配設されたことを特徴とする。請求項2のプラズ
マ発生器は、請求項1記載の発明において、前記低圧側
部材が、前記ハニカム本体の側面に巻き付けられたシー
ト状の部材であることを特徴とする。請求項3のプラズ
マ発生器は、請求項1記載の発明において、前記低圧側
部材が、前記ハニカム本体の側面に塗布された導電性塗
料であることを特徴とする。請求項4のプラズマ発生器
は、請求項1、2または3記載の発明において、前記放
電部材において、前記ハニカム部材側の端部に、複数の
放電突起が形成されたことを特徴とする。
A plasma generator according to claim 1 is a plasma generator for forming a plurality of plasmas, the plasma generator being a discharge member connected to a high-voltage side electrode, Comprising a honeycomb member connected to the low-voltage side electrode, the honeycomb member, a honeycomb main body having a honeycomb structure, is attached so as to surround the side surface of the honeycomb main body, from the honeycomb main body connected to the low-voltage side electrode Also has a low-voltage side member having a low electric resistance, and the front surface of the honeycomb main body is arranged at a distance from the discharge member. A plasma generator according to a second aspect is characterized in that, in the invention according to the first aspect, the low-pressure side member is a sheet-shaped member wound around a side surface of the honeycomb main body. A plasma generator according to a third aspect of the present invention is characterized in that, in the first aspect of the present invention, the low-pressure side member is a conductive coating material applied to a side surface of the honeycomb main body. A plasma generator according to a fourth aspect is characterized in that, in the invention according to the first, second or third aspects, a plurality of discharge protrusions are formed at an end portion on the honeycomb member side in the discharge member.

【0006】請求項1の発明によれば、ハニカム部材と
放電部材との間に電圧を加えれば、両者の間に複数の放
電が発生し、複数のプラズマが形成される。このとき形
成された各プラズマがハニカム本体に到達した位置は異
なるが、いずれの放電電流もプラズマがハニカム本体に
到達した位置から最短距離にある低圧側部材に向かって
ハニカム本体内部を流れる。低圧側部材はハニカム本体
の側面を囲むように取り付けられているので、ハニカム
本体上のどの位置にプラズマが到達しても、その位置か
ら低圧側部材までの距離が短くなる。つまり、どのプラ
ズマも、放電電流がハニカム本体の内部を流れる距離を
短くすることができる。よって、放電電流がハニカム本
体内部を流れるときの電気抵抗が小さくなり、両電極間
に加える電圧を低くおさえても、複数のプラズマを確実
に形成させることができ、各プラズマを効率よく形成す
ることができる。請求項2の発明によれば、低圧側部材
が一枚のシート状になっているため、低圧側電極を、低
圧側部材のどこか一箇所にのみ接続すれば良く、装置の
構造を簡単にすることができる。請求項3の発明によれ
ば、ハニカム本体の側面全面に導電性塗料が塗られてい
るので、低圧側電極を、導電性塗料が塗られた部分のど
こか一箇所にのみ接続すれば良く、装置の構造を簡単に
することができる。請求項4の発明によれば、複数の突
起からハニカム部材にむけて放電が発生し、プラズマが
形成される。しかも、放電突起の断面積に比べてハニカ
ム部材の面積が広いので、放電突起とハニカム部材との
間には、円錐状のプラズマが形成される。このため、放
電突起とハニカム部材との間に形成されるプラズマの体
積を大きくすることができる。
According to the invention of claim 1, when a voltage is applied between the honeycomb member and the discharge member, a plurality of discharges are generated between the two and a plurality of plasmas are formed. Although the positions of the respective plasmas formed at this time reaching the honeycomb main body are different, any discharge current flows inside the honeycomb main body toward the low-pressure side member located at the shortest distance from the position where the plasma reaches the honeycomb main body. Since the low-pressure side member is attached so as to surround the side surface of the honeycomb main body, no matter which position on the honeycomb main body the plasma reaches, the distance from that position to the low-pressure side member becomes short. That is, for any plasma, the distance that the discharge current flows inside the honeycomb main body can be shortened. Therefore, the electric resistance when the discharge current flows inside the honeycomb main body becomes small, and even if the voltage applied between both electrodes is kept low, a plurality of plasmas can be reliably formed, and each plasma can be efficiently formed. You can According to the invention of claim 2, since the low-voltage side member is in the form of a single sheet, it is sufficient to connect the low-voltage side electrode to only one place of the low-voltage side member, which simplifies the structure of the device. can do. According to the invention of claim 3, since the conductive paint is applied to the entire side surface of the honeycomb body, the low-voltage side electrode may be connected to only one place of the part where the conductive paint is applied. The structure of the device can be simplified. According to the invention of claim 4, electric discharge is generated from the plurality of protrusions toward the honeycomb member, and plasma is formed. Moreover, since the honeycomb member has a larger area than the cross-sectional area of the discharge protrusion, a conical plasma is formed between the discharge protrusion and the honeycomb member. Therefore, the volume of plasma formed between the discharge protrusions and the honeycomb member can be increased.

【0007】[0007]

【発明の実施の形態】つぎに、本発明の実施形態を図面
に基づき説明する。図1は本実施形態のプラズマ発生器
10の概略説明図である。同図に示すように、本実施形
態のプラズマ発生器10は、放電部材11とハニカム部
材20とを備えており、この放電部材11とハニカム部
材20の間に複数のプラズマを形成させるようにしたこ
とが特徴である。図1において、符号Fはプラズマ発生
器10のフレームを示しており、符号DCは直流電源を
示している。
BEST MODE FOR CARRYING OUT THE INVENTION Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic explanatory view of a plasma generator 10 of this embodiment. As shown in the figure, the plasma generator 10 of this embodiment includes a discharge member 11 and a honeycomb member 20, and a plurality of plasmas are formed between the discharge member 11 and the honeycomb member 20. It is a feature. In FIG. 1, reference symbol F indicates a frame of the plasma generator 10, and reference symbol DC indicates a direct current power source.

【0008】図2はハニカム部材20の正面図である。
図1および図2に示すように、前記フレームFには、ハ
ニカム部材20が取り付けられている。このハニカム部
材20は、ハニカム本体21と低圧側部材22とから構
成されている。ハニカム本体21は、ハニカム構造を有
する部材であり、その前面と背面とを貫通する貫通孔が
複数設けられたものである。このハニカム本体21の素
材は、例えばセラミックスやゼオライト、活性炭等であ
るが、特に限定はない。このハニカム本体21の側面に
は、ハニカム本体21を囲むように低圧側部材22が取
り付けられている。各側面の低圧側部材22は、直流電
源DCの低圧側電極に接続されている。この低圧側部材
22の素材は、例えばアルミ箔や銅箔であるが、ハニカ
ム本体21よりも電気抵抗が小さい素材であれば、特に
限定はない。
FIG. 2 is a front view of the honeycomb member 20.
As shown in FIGS. 1 and 2, a honeycomb member 20 is attached to the frame F. The honeycomb member 20 includes a honeycomb body 21 and a low-pressure side member 22. The honeycomb main body 21 is a member having a honeycomb structure, and has a plurality of through holes penetrating the front surface and the back surface thereof. The material of the honeycomb body 21 is, for example, ceramics, zeolite, activated carbon or the like, but is not particularly limited. The low-pressure side member 22 is attached to the side surface of the honeycomb main body 21 so as to surround the honeycomb main body 21. The low voltage side member 22 on each side surface is connected to the low voltage side electrode of the DC power supply DC. The material of the low voltage side member 22 is, for example, an aluminum foil or a copper foil, but is not particularly limited as long as it is a material having an electric resistance smaller than that of the honeycomb main body 21.

【0009】なお、低圧側部材22としてシート状の部
材を用い、このシート状の部材をハニカム本体21の側
面に巻き付けてもよい。この場合、低圧側部材22が一
枚のシート状になっているため、直流電源DCの低圧側
電極を、低圧側部材22のどこか一箇所にのみ接続すれ
ば良く、装置の構造を簡単にすることができる。
A sheet-shaped member may be used as the low-pressure side member 22, and the sheet-shaped member may be wound around the side surface of the honeycomb main body 21. In this case, since the low-voltage side member 22 is in the form of a single sheet, it is sufficient to connect the low-voltage side electrode of the DC power supply DC to only one place of the low-voltage side member 22, which simplifies the structure of the device. can do.

【0010】さらになお、導電性塗料をハニカム本体2
1の側面全面に塗布して低圧側部材22としてもよい。
この場合、低圧側電極を、導電性塗料が塗られた部分の
どこか一箇所にのみ接続すれば良く、装置の構造を簡単
にすることができる。
Furthermore, the conductive paint is applied to the honeycomb main body 2
It may be applied to the entire side surface of No. 1 to form the low-voltage side member 22.
In this case, the low voltage side electrode may be connected to only one place of the part coated with the conductive paint, and the structure of the device can be simplified.

【0011】図1に示すように、前記フレームFには、
ハニカム部材20の前面と一定の間隔をあけて、放電部
材11が取り付けられている。この放電部材11は、板
状の部材であり、その一端縁がハニカム部材20の前面
と平行となるように配設されている。この放電部材11
は、前記直流電源DCの高圧側電極に接続されている。
図3に示すように、この放電部材11の断面形状は、板
を渦巻き状に巻いたものや(図3(A) 参照)、板を井桁
状に並べたもの(図3(B) 参照)、複数枚の板を平行に
並べたものなど(図3(C) 参照)であるが、特に限定は
ない。
As shown in FIG. 1, the frame F includes
The discharge member 11 is attached to the front surface of the honeycomb member 20 at a constant distance. The discharge member 11 is a plate-shaped member and is arranged such that one end edge thereof is parallel to the front surface of the honeycomb member 20. This discharge member 11
Is connected to the high voltage side electrode of the DC power supply DC.
As shown in FIG. 3, the discharge member 11 has a cross-sectional shape in which plates are spirally wound (see FIG. 3 (A)) or plates are arranged in a cross pattern (see FIG. 3 (B)). , A plurality of plates arranged in parallel (see FIG. 3 (C)), but not limited thereto.

【0012】つぎに、本実施形態のプラズマ発生器10
の作用と効果を説明する。まず、直流電源DCによっ
て、ハニカム部材20と放電部材11との間に電圧を加
えれば、両者の間にプラズマが形成される。しかも、放
電部材11の一端縁とハニカム部材20の前面とが平行
であるため、放電部材11の一端縁のどの位置でもハニ
カム部材20の前面との距離が同じ長さとなっている。
このため、ハニカム部材20と放電部材11との間に
は、複数の放電が発生し、複数のプラズマが形成され
る。
Next, the plasma generator 10 of the present embodiment
The action and effect of will be explained. First, when a voltage is applied between the honeycomb member 20 and the discharge member 11 by the DC power supply DC, plasma is formed between them. Moreover, since one end edge of the discharge member 11 and the front surface of the honeycomb member 20 are parallel to each other, the distance from the front surface of the honeycomb member 20 is the same at any position of the one end edge of the discharge member 11.
Therefore, a plurality of discharges are generated between the honeycomb member 20 and the discharge member 11, and a plurality of plasmas are formed.

【0013】このとき形成された各プラズマは、それぞ
れハニカム本体21に到達した位置は異なるが、放電部
材11からプラズマとなってハニカム本体21に到達し
たいずれの放電電流も、プラズマがハニカム本体21に
到達した位置から最短距離にある低圧側部材22に向か
ってハニカム本体21内部を流れる。
The respective plasmas formed at this time are different in the positions at which they reach the honeycomb main body 21, but at any discharge current that reaches the honeycomb main body 21 from the discharge member 11 as plasma, the plasma reaches the honeycomb main body 21. Flows inside the honeycomb main body 21 toward the low-pressure side member 22 which is the shortest distance from the reached position.

【0014】低圧側部材22はハニカム本体21の側面
を囲むように取り付けられているので、ハニカム本体2
1上のどの位置にプラズマが到達しても、その位置から
低圧側部材22までの距離が短くなる。つまり、どのプ
ラズマも、放電電流がハニカム本体21の内部を流れる
距離が短くなる。よって、放電電流がハニカム本体21
内部を流れるときの電気抵抗が小さくなるので、直流電
源DCによってハニカム部材20と放電部材11との間
に加える電圧を低くおさえても、複数のプラズマを確実
に形成させることができ、各プラズマを効率よく形成す
ることができる。
Since the low-pressure side member 22 is attached so as to surround the side surface of the honeycomb main body 21, the honeycomb main body 2
Wherever the plasma reaches on position 1, the distance from that position to the low voltage side member 22 becomes short. That is, in any plasma, the distance in which the discharge current flows inside the honeycomb main body 21 becomes short. Therefore, the discharge current is
Since the electric resistance when flowing through the inside becomes small, even if the voltage applied between the honeycomb member 20 and the discharge member 11 is kept low by the DC power supply DC, a plurality of plasmas can be reliably formed and each plasma can be generated. It can be formed efficiently.

【0015】また、図4(B) に示すように、放電部材1
1のハニカム部材20側の端部に、複数の放電突起12
を設けてもよい。この場合、複数の放電突起12からハ
ニカム部材20にむけて放電が発生し、プラズマが形成
されるが、このとき、放電突起12の断面積に比べてハ
ニカム部材20の面積が広いので、放電突起12とハニ
カム部材20との間には、円錐状のプラズマが形成され
る。このため、放電突起12とハニカム部材20との間
に形成されるプラズマの体積を大きくすることができ
る。
Further, as shown in FIG. 4 (B), the discharge member 1
One of the plurality of discharge protrusions 12 is provided at the end of the honeycomb member 20 on the side of
May be provided. In this case, discharge is generated from the plurality of discharge protrusions 12 toward the honeycomb member 20, and plasma is formed. At this time, since the area of the honeycomb member 20 is larger than the cross-sectional area of the discharge protrusion 12, the discharge protrusions are large. A conical plasma is formed between 12 and the honeycomb member 20. Therefore, the volume of plasma formed between the discharge protrusions 12 and the honeycomb member 20 can be increased.

【0016】なお、図4(C) に示すように、放電部材1
1のハニカム部材20側の端部に、複数の放電針13を
設けてもよい。この場合、放電針13の直径とハニカム
部材20の面積との差が大きくなるため、円錐状のプラ
ズマを安定してが形成することができる。
As shown in FIG. 4 (C), the discharge member 1
A plurality of discharge needles 13 may be provided at one end of the one honeycomb member 20 side. In this case, since the difference between the diameter of the discharge needle 13 and the area of the honeycomb member 20 becomes large, a conical plasma can be stably formed.

【0017】[0017]

【発明の効果】請求項1の発明によれば、電極間に加え
る電圧を低くおさえても、複数のプラズマを確実に形成
させることができ、各プラズマを効率よく形成すること
ができる。請求項2の発明によれば、低圧側部材が一枚
のシート状になっているため、低圧側電極を、低圧側部
材のどこか一箇所にのみ接続すれば良く、装置の構造を
簡単にすることができる。請求項3の発明によれば、ハ
ニカム部材の側面全面に導電性塗料が塗られているの
で、低圧側電極を、導電性塗料が塗られた部分のどこか
一箇所にのみ接続すれば良く、装置の構造を簡単にする
ことができる。請求項4の発明によれば放電突起とハニ
カム部材との間に、円錐状のプラズマを形成することが
でき、形成されるプラズマの体積を大きくすることがで
きる。
According to the invention of claim 1, even if the voltage applied between the electrodes is kept low, a plurality of plasmas can be reliably formed and each plasma can be efficiently formed. According to the invention of claim 2, since the low-voltage side member is in the form of a single sheet, it is sufficient to connect the low-voltage side electrode to only one place of the low-voltage side member, which simplifies the structure of the device. can do. According to the invention of claim 3, since the conductive coating is applied to the entire side surface of the honeycomb member, the low-voltage side electrode may be connected to only one place of the part coated with the conductive coating. The structure of the device can be simplified. According to the invention of claim 4, a conical plasma can be formed between the discharge protrusions and the honeycomb member, and the volume of the formed plasma can be increased.

【図面の簡単な説明】[Brief description of drawings]

【図1】本実施形態のプラズマ発生器10の概略説明図
である。
FIG. 1 is a schematic explanatory diagram of a plasma generator 10 of the present embodiment.

【図2】ハニカム部材20の正面図である。FIG. 2 is a front view of the honeycomb member 20.

【図3】放電部材11の概略断面図である。FIG. 3 is a schematic sectional view of a discharge member 11.

【図4】放電部材11の概略側面図である。FIG. 4 is a schematic side view of the discharge member 11.

【符号の説明】[Explanation of symbols]

10 プラズマ発生器 11 放電部材 12 放電突起 20 ハニカム部材 21 ハニカム本体 22 低圧側部材 10 Plasma generator 11 Discharge member 12 Discharge protrusion 20 Honeycomb member 21 Honeycomb body 22 Low pressure side member

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】複数のプラズマを形成させるためのプラズ
マ発生器であって、該プラズマ発生器が、高圧側電極に
接続された放電部材と、低圧側電極に接続されたハニカ
ム部材とからなり、該ハニカム部材が、ハニカム構造を
有するハニカム本体と、該ハニカム本体の側面を囲むよ
うに取り付けられ、前記低圧側電極に接続された前記ハ
ニカム本体よりも電気抵抗が小さい低圧側部材とからな
り、前記ハニカム本体の前面が、前記放電部材に対して
間隔をあけて配設されたことを特徴とするプラズマ発生
器。
1. A plasma generator for forming a plurality of plasmas, the plasma generator comprising a discharge member connected to a high-voltage side electrode and a honeycomb member connected to a low-voltage side electrode, The honeycomb member is composed of a honeycomb main body having a honeycomb structure, and a low-voltage side member attached so as to surround a side surface of the honeycomb main body and having a smaller electric resistance than the honeycomb main body connected to the low-voltage side electrode, A plasma generator in which a front surface of the honeycomb main body is arranged at a distance from the discharge member.
【請求項2】前記低圧側部材が、前記ハニカム本体の側
面に巻き付けられたシート状の部材であることを特徴と
する請求項1記載のプラズマ発生器。
2. The plasma generator according to claim 1, wherein the low-pressure side member is a sheet-shaped member wound around a side surface of the honeycomb main body.
【請求項3】前記低圧側部材が、前記ハニカム本体の側
面全面に塗布された導電性塗料であることを特徴とする
請求項1記載のプラズマ発生器。
3. The plasma generator according to claim 1, wherein the low-pressure side member is a conductive coating material applied to the entire side surface of the honeycomb main body.
【請求項4】前記放電部材において、前記ハニカム部材
側の端部に、複数の放電突起が形成されたことを特徴と
する請求項1、2または3記載のプラズマ発生器。
4. The plasma generator according to claim 1, wherein the discharge member has a plurality of discharge protrusions formed at an end portion on the honeycomb member side.
JP2001248560A 2001-08-20 2001-08-20 Plasma generator Pending JP2003059697A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001248560A JP2003059697A (en) 2001-08-20 2001-08-20 Plasma generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001248560A JP2003059697A (en) 2001-08-20 2001-08-20 Plasma generator

Publications (1)

Publication Number Publication Date
JP2003059697A true JP2003059697A (en) 2003-02-28

Family

ID=19077703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001248560A Pending JP2003059697A (en) 2001-08-20 2001-08-20 Plasma generator

Country Status (1)

Country Link
JP (1) JP2003059697A (en)

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