JP2003057552A5 - - Google Patents

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Publication number
JP2003057552A5
JP2003057552A5 JP2001241317A JP2001241317A JP2003057552A5 JP 2003057552 A5 JP2003057552 A5 JP 2003057552A5 JP 2001241317 A JP2001241317 A JP 2001241317A JP 2001241317 A JP2001241317 A JP 2001241317A JP 2003057552 A5 JP2003057552 A5 JP 2003057552A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2001241317A
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Japanese (ja)
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JP4878708B2 (en
JP2003057552A (en
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Priority to JP2001241317A priority Critical patent/JP4878708B2/en
Priority claimed from JP2001241317A external-priority patent/JP4878708B2/en
Publication of JP2003057552A publication Critical patent/JP2003057552A/en
Publication of JP2003057552A5 publication Critical patent/JP2003057552A5/ja
Application granted granted Critical
Publication of JP4878708B2 publication Critical patent/JP4878708B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001241317A 2001-08-08 2001-08-08 Confocal scanning microscope, alignment method thereof, program, and storage medium Expired - Fee Related JP4878708B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001241317A JP4878708B2 (en) 2001-08-08 2001-08-08 Confocal scanning microscope, alignment method thereof, program, and storage medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001241317A JP4878708B2 (en) 2001-08-08 2001-08-08 Confocal scanning microscope, alignment method thereof, program, and storage medium

Publications (3)

Publication Number Publication Date
JP2003057552A JP2003057552A (en) 2003-02-26
JP2003057552A5 true JP2003057552A5 (en) 2008-08-14
JP4878708B2 JP4878708B2 (en) 2012-02-15

Family

ID=19071786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001241317A Expired - Fee Related JP4878708B2 (en) 2001-08-08 2001-08-08 Confocal scanning microscope, alignment method thereof, program, and storage medium

Country Status (1)

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JP (1) JP4878708B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE502004002547D1 (en) * 2004-06-22 2007-02-15 Polytec Gmbh Device for optically measuring an object
JP4599941B2 (en) * 2004-08-20 2010-12-15 株式会社ニコン Automatic focus detection apparatus and microscope system including the same
JP6173154B2 (en) * 2013-10-01 2017-08-02 オリンパス株式会社 Microscope system
DE102018107356A1 (en) 2018-03-28 2019-10-02 Carl Zeiss Microscopy Gmbh Autofocus with angle-variable illumination

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3683298B2 (en) * 1995-02-02 2005-08-17 オリンパス株式会社 Defect detection microscope
US5671288A (en) * 1995-05-31 1997-09-23 Neopath, Inc. Method and apparatus for assessing slide and specimen preparation quality
JP4574758B2 (en) * 1998-03-19 2010-11-04 オリンパス株式会社 Microscope image observation device
JP2001091840A (en) * 1999-09-20 2001-04-06 Olympus Optical Co Ltd Microscope system

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