JP2003057155A - Apparatus and method for sampling gas sample - Google Patents
Apparatus and method for sampling gas sampleInfo
- Publication number
- JP2003057155A JP2003057155A JP2001246086A JP2001246086A JP2003057155A JP 2003057155 A JP2003057155 A JP 2003057155A JP 2001246086 A JP2001246086 A JP 2001246086A JP 2001246086 A JP2001246086 A JP 2001246086A JP 2003057155 A JP2003057155 A JP 2003057155A
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- Prior art keywords
- gas
- sample
- sampling
- analyzer
- vacuum pump
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は，例えば真空炉や真
空浸炭炉などで採取したガス試料を含む被分析ガスを，
分析器に送って採取する手段に関する。TECHNICAL FIELD The present invention relates to a gas to be analyzed containing a gas sample collected in, for example, a vacuum furnace or a vacuum carburizing furnace.
It relates to means for sending to an analyzer and collecting.
【０００２】[0002]
【従来の技術】例えば鋼材料などを浸炭処理する真空浸
炭炉においては，減圧下でメタンガスやプロパンガスな
どの炭化水素系ガスを炉内に供給し，浸炭処理を行って
いる。かかる真空浸炭炉では，浸炭処理される鋼材料な
どの表面炭素濃度を制御するのに，炭化水素系ガスの供
給量を経験的に調整しており，浸炭処理中に炉内からガ
ス試料を採取するという方法は実施されておらず，ガス
浸炭のようなカーボンポテンシャルのフィードバック制
御はなされていなかった。2. Description of the Related Art For example, in a vacuum carburizing furnace for carburizing steel materials, a hydrocarbon-based gas such as methane gas or propane gas is supplied to the furnace under reduced pressure for carburizing. In such a vacuum carburizing furnace, the amount of hydrocarbon gas supplied is empirically adjusted in order to control the surface carbon concentration of the steel material to be carburized, and a gas sample is taken from the furnace during carburizing. However, the feedback control of carbon potential such as gas carburization was not performed.
【０００３】一方，減圧容器内のガス採取の方法として
は，例えば特開平５−５２７１９号の「ガス試料採取方
法及びその装置」が開示されている。この特開平５−５
２７１９号では，ガス試料が入っている減圧室内からＴ
字型管路に雰囲気をサンプリングし，それに不活性ガス
を注入して常圧にしてから，分析器に導入してガス濃度
を測定する構成になっている。On the other hand, as a method for collecting gas in a decompression container, for example, Japanese Patent Application Laid-Open No. 5-52719 discloses "Gas sampling method and apparatus". This Japanese Patent Laid-Open No. 5-5
In No. 2719, T from inside the decompression chamber containing the gas sample.
The atmosphere is sampled in a V-shaped conduit, and an inert gas is injected into it to bring it to normal pressure, and then it is introduced into an analyzer to measure the gas concentration.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら，この特
開平５−５２７１９号では，Ｔ字型管路をいちいち取り
外して分析器まで運び，サンプリングした雰囲気を分析
器に導入しているので，取り外した管路の端部を閉塞す
る弁を各箇所に設ける必要があり，また，Ｔ字型管路内
に不活性ガスを注入するボンベなども必要なため，装置
が複雑となってしまう。また，Ｔ字型管路をいちいち取
り外したり，分析器までＴ字型管路を運ばなければなら
ず，操作も複雑である。更に，Ｔ字型管路内に注入する
不活性ガスが必要で，コストアップになってしまう。However, in this Japanese Patent Laid-Open No. 5-52719, the T-shaped pipe is removed and carried to the analyzer, and the sampled atmosphere is introduced into the analyzer. A valve for closing the end of the passage must be provided at each position, and a cylinder for injecting an inert gas into the T-shaped pipe is also required, which complicates the apparatus. In addition, the T-shaped conduit must be removed one by one and the T-shaped conduit must be carried to the analyzer, which makes the operation complicated. Further, an inert gas is required to be injected into the T-shaped pipe, which increases the cost.
【０００５】本発明の目的は，簡単な構成で容易にガス
試料を採取できる手段を提供することにある。An object of the present invention is to provide a means for easily collecting a gas sample with a simple structure.
【０００６】[0006]
【課題を解決するための手段】この目的を達成するため
に，本発明によれば，ガス試料を採取する採取室とガス
試料を分析する分析器とを結ぶ管路にオイルフリー型の
真空ポンプを設けたことを特徴とする，ガス試料採取装
置が提供される。In order to achieve this object, according to the present invention, an oil-free vacuum pump is provided in a pipe line connecting a sampling chamber for collecting a gas sample and an analyzer for analyzing the gas sample. A gas sampling device is provided, which is characterized in that:
【０００７】本発明にあっては，例えば真空炉や真空浸
炭炉などである採取室から，ガス試料を含む被分析ガス
を，オイルフリー型の真空ポンプで吸引することにより
採取室から採取する。そして，採取した被分析ガスを分
析器に送り，ガス試料を分析する。In the present invention, the gas to be analyzed containing a gas sample is sampled from the sampling chamber such as a vacuum furnace or a vacuum carburizing furnace by sucking it with an oil-free vacuum pump. Then, the sample gas to be analyzed is sent to an analyzer to analyze the gas sample.
【０００８】本発明によれば，オイルフリー型の真空ポ
ンプで吸引した被分析ガスは，大気圧となって真空ポン
プの排気側に排気されるので，採取したガスをそのまま
分析器に送ってガス試料を分析することができる。この
ため，多数の弁や不活性ガスの注入手段などを設ける必
要がなく，簡単な構成で低廉なガス試料採取装置を提供
できる。また，分析操作も極めて容易である。According to the present invention, the analyzed gas sucked by the oil-free vacuum pump becomes atmospheric pressure and is exhausted to the exhaust side of the vacuum pump. The sample can be analyzed. Therefore, it is not necessary to provide a large number of valves or means for injecting an inert gas, and it is possible to provide an inexpensive gas sampling device with a simple configuration. Also, the analysis operation is extremely easy.
【０００９】[0009]
【発明の実施の形態】以下，本発明の好ましい実施の形
態を図面を参照にして説明する。図１は，本発明の実施
の形態にかかるガス試料採取装置１の概略を示す説明図
である。BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an explanatory diagram showing an outline of a gas sampling device 1 according to an embodiment of the present invention.
【００１０】採取室１０と分析器１１が，管路１２によ
って接続されている。管路１２の途中には，真空ポンプ
１３が設けられている。そして，真空ポンプ１３を稼動
することにより，採取室１０内の雰囲気（被分析ガス）
を吸引し，管路１２を介して，雰囲気を分析器１１に送
るようになっている。The sampling chamber 10 and the analyzer 11 are connected by a pipe line 12. A vacuum pump 13 is provided in the middle of the pipeline 12. Then, by operating the vacuum pump 13, the atmosphere (analysis gas) in the sampling chamber 10
Is sucked in and the atmosphere is sent to the analyzer 11 via the pipe 12.
【００１１】採取室１０は，例えば鋼材料などを浸炭処
理する真空浸炭炉等である。採取室１０内には，炭化水
素系ガス（例えばＣ３Ｈ８）などといったガス試料を含
んだ雰囲気が所定の流量（例えば１リットル／ｍｉｎ）
で供給されており，採取室１０内では，所定の圧力（例
えば１０ｋＰａ）で浸炭処理を行うことが可能である。The sampling chamber 10 is, for example, a vacuum carburizing furnace for carburizing a steel material or the like. In the sampling chamber 10, an atmosphere containing a gas sample such as a hydrocarbon gas (eg, C 3 H 8 ) has a predetermined flow rate (eg, 1 liter / min).
And the carburizing process can be performed in the collection chamber 10 at a predetermined pressure (for example, 10 kPa).
【００１２】分析器１１は，管路１２を介して送られた
採取室１０内の雰囲気を分析し，雰囲気中に含まれたガ
ス試料の濃度などを測定する手段であり，例えばＦＴＩ
Ｒ，熱伝導率式分析計，赤外線式分析計，ガスクロマト
グラフィーなどである。The analyzer 11 is a means for analyzing the atmosphere in the sampling chamber 10 sent through the conduit 12 and measuring the concentration of the gas sample contained in the atmosphere, for example, FTI.
R, thermal conductivity analyzer, infrared analyzer, gas chromatography, etc.
【００１３】真空ポンプ１３は，採取室１０から分析器
１１に管路１２を介して送る雰囲気中に油成分などを混
入させないように，オイルフリー型の真空ポンプで構成
される。真空ポンプ１３は，到達圧力が，採取室１０内
の雰囲気よりも低い圧力となるものを使用する。例え
ば，採取室１０内の処理圧力が約１０ｋＰａの場合であ
れば，真空ポンプ１３の到達圧力は，例えば０．１ｋＰ
ａ程度であれば良い。なお，利用する真空ポンプの能力
にもよるが，ガス採取対象の圧力（採取室１０内の圧
力）が１Ｐａ以下になると，採取室１０内から排出され
るガス流量が少なくなり，分析に必要な流量が得られな
い可能性がある。The vacuum pump 13 is an oil-free type vacuum pump so as not to mix oil components into the atmosphere sent from the sampling chamber 10 to the analyzer 11 via the conduit 12. As the vacuum pump 13, a pump whose ultimate pressure is lower than that of the atmosphere in the sampling chamber 10 is used. For example, when the processing pressure in the sampling chamber 10 is about 10 kPa, the ultimate pressure of the vacuum pump 13 is, for example, 0.1 kP.
It may be about a. Depending on the capacity of the vacuum pump used, when the pressure of the gas sampling target (the pressure inside the sampling chamber 10) becomes 1 Pa or less, the flow rate of the gas discharged from the sampling chamber 10 decreases, which is necessary for the analysis. Flow rate may not be obtained.
【００１４】採取室１０と真空ポンプ１３の間におい
て，管路１２には，開閉弁１５と圧力計１６が設けてあ
る。開閉弁１５を開閉操作することにより，管路１２の
連通をＯＮ／ＯＦＦすることができる。また，圧力計１
６により，採取室１０と真空ポンプ１３の間において，
管路１２内の圧力状態を測定することが可能である。An opening / closing valve 15 and a pressure gauge 16 are provided in the pipe line 12 between the sampling chamber 10 and the vacuum pump 13. By opening / closing the opening / closing valve 15, the communication of the pipeline 12 can be turned ON / OFF. Also, pressure gauge 1
6 between the sampling chamber 10 and the vacuum pump 13,
It is possible to measure the pressure condition in the conduit 12.
【００１５】さて，以上のように構成されたガス試料採
取装置１において，真空浸炭炉などからなる採取室１０
内のガス試料を採取して，濃度などを分析する場合，先
ず，開閉弁１５を閉じた状態で真空ポンプ１３を稼動す
る。そして，採取室１０と真空ポンプ１３の間におい
て，管路１２内の圧力を採取室１０内よりも低い状態に
する。Now, in the gas sampling apparatus 1 configured as described above, the sampling chamber 10 including a vacuum carburizing furnace and the like.
When collecting the gas sample in the inside and analyzing the concentration and the like, first, the vacuum pump 13 is operated with the on-off valve 15 closed. Then, between the sampling chamber 10 and the vacuum pump 13, the pressure in the conduit 12 is set to be lower than that in the sampling chamber 10.
【００１６】その後，開閉弁１５を開くことにより，採
取室１０内の雰囲気を真空ポンプ１３に引き込む。こう
して，採取室１０内の雰囲気は吸引採取され，管路１２
を経て分析器１１に送られる。この場合，真空ポンプ１
３はオイルフリー型であるので，管路１２を流れる際
に，雰囲気中に油成分などを混入させる心配がない。After that, the opening / closing valve 15 is opened to draw the atmosphere in the sampling chamber 10 into the vacuum pump 13. In this way, the atmosphere in the sampling chamber 10 is sucked and collected, and the pipe 12
And is sent to the analyzer 11. In this case, vacuum pump 1
Since 3 is an oil-free type, there is no fear of mixing an oil component or the like into the atmosphere when flowing through the conduit 12.
【００１７】そして，分析器１１では，管路１２を経て
送られた採取室１０内の雰囲気を分析し，雰囲気中に含
まれたガス試料の濃度などを測定する。この場合，真空
ポンプで吸引採取され，管路１２を経て分析器１１に送
られる採取室１０内の雰囲気は，大気圧となった状態で
分析器１１に供給されるので，分析器１１では，圧力調
整などを行うことなく，そのままガス試料の分析を行う
ことができる。Then, the analyzer 11 analyzes the atmosphere in the sampling chamber 10 sent through the pipe 12 and measures the concentration of the gas sample contained in the atmosphere. In this case, the atmosphere in the sampling chamber 10 that is sucked and sampled by the vacuum pump and sent to the analyzer 11 via the conduit 12 is supplied to the analyzer 11 at atmospheric pressure. It is possible to analyze the gas sample as it is without adjusting the pressure.
【００１８】このガス試料採取装置１によれば，多数の
弁や不活性ガスの注入手段などを設ける必要がなく，簡
単な構成で低廉な構成を採用することが可能となる。開
閉弁１５の開閉と真空ポンプ１３の稼動を操作するだけ
で，容易に採取を行うことができる。According to this gas sampling apparatus 1, it is not necessary to provide a large number of valves or means for injecting an inert gas, and a simple and inexpensive structure can be adopted. Sampling can be easily performed by only opening and closing the on-off valve 15 and operating the vacuum pump 13.
【００１９】以上，本発明の好ましい実施の形態の一例
を示したが，本発明はここに例示した形態に限定されな
い。例えば，採取室は真空浸炭炉に限られず，本発明に
より，半導体の製造に用いられるエッチング装置やＣＶ
Ｄ装置などのチャンバー内のガス試料を採取することも
可能である。Although one example of the preferred embodiment of the present invention has been described above, the present invention is not limited to the embodiment illustrated here. For example, the sampling chamber is not limited to the vacuum carburizing furnace, but an etching apparatus or a CV used for semiconductor manufacturing according to the present invention.
It is also possible to collect a gas sample in the chamber of the D device or the like.
【００２０】[0020]
【実施例】図１で説明したガス試料採取装置により，ガ
ス試料の採取を行い分析した。採取室である真空浸炭炉
内において，Ｃ３Ｈ８を１リットル／ｍｉｎで流し，圧
力を１０Ｐａに保持した。到達圧力が０．１ｋＰａの真
空ポンプを使用して，炉内ガスを本発明に従って採取
し，赤外線式採取装置を用いてガス分析した。結果を表
１に示す。EXAMPLE A gas sample was collected and analyzed by the gas sampling device described in FIG. In the vacuum carburizing furnace, which is the sampling chamber, C 3 H 8 was flown at 1 liter / min and the pressure was maintained at 10 Pa. The furnace gas was sampled according to the present invention using a vacuum pump having an ultimate pressure of 0.1 kPa, and the gas was analyzed using an infrared sampling device. The results are shown in Table 1.
【００２１】[0021]
【表１】 [Table 1]
【００２２】また，本発明のガス試料採取装置と方法に
ついて，検証を行った。採取室である真空浸炭炉内にお
いて，常温で濃度既知の標準ガスを流し，圧力を６３Ｐ
ａに保持した。この炉内ガスを本発明に従って採取し，
ガス分析した。測定結果を標準ガス組成と比較して表２
に示す。この結果から本発明によって正確に測定できて
いることが示される。Further, the gas sampling apparatus and method of the present invention were verified. In a vacuum carburizing furnace, which is a sampling chamber, a standard gas of known concentration is made to flow at room temperature at a pressure of 63P.
held at a. This furnace gas was sampled according to the invention,
The gas was analyzed. Table 2 compares the measurement results with the standard gas composition.
Shown in. This result shows that the present invention enables accurate measurement.
【００２３】[0023]
【表２】 [Table 2]
【００２４】[0024]
【発明の効果】本発明によれば，多数の弁や不活性ガス
の注入手段などを設ける必要がなく，簡単な構成で低廉
なガス試料採取装置を提供できる。また，操作も極めて
容易である。According to the present invention, it is possible to provide a low-priced gas sampling device with a simple structure, without the need for providing a large number of valves and means for injecting an inert gas. The operation is also extremely easy.
【図１】本発明の実施の形態にかかるガス試料採取装置
の概略を示す説明図である。FIG. 1 is an explanatory diagram showing an outline of a gas sampling device according to an embodiment of the present invention.
１ ガス試料採取装置 １０ 採取室 １１ 分析器 １２ 管路 １３ 真空ポンプ １５ 開閉弁 １６ 圧力計 1 gas sampling device 10 collection room 11 analyzer 12 pipelines 13 Vacuum pump 15 on-off valve 16 pressure gauge
───────────────────────────────────────────────────── フロントページの続き (72)発明者 虻川 文隆 東京都千代田区丸の内一丁目８番２号 同 和鉱業株式会社内 (72)発明者 十良沢 英寿 東京都千代田区丸の内一丁目８番２号 同 和鉱業株式会社内 (72)発明者 海老原 寿 東京都千代田区丸の内一丁目８番２号 同 和鉱業株式会社内 Ｆターム(参考） 2G052 AA12 AB12 AC12 AD02 AD22 AD42 BA02 BA14 CA04 CA12 GA12 GA20 GA27 HA18 HC25 JA04 JA11 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Fumitaka Agawa 1-8-2 Marunouchi, Chiyoda-ku, Tokyo Within Wa Mining Co., Ltd. (72) Inventor Hideyoshi Torazawa 1-8-2 Marunouchi, Chiyoda-ku, Tokyo Within Wa Mining Co., Ltd. (72) Inventor Hisashi Ebihara 1-8-2 Marunouchi, Chiyoda-ku, Tokyo Within Wa Mining Co., Ltd. F term (reference) 2G052 AA12 AB12 AC12 AD02 AD22 AD42 BA02 BA14 CA04 CA12 GA12 GA20 GA27 HA18 HC25 JA04 JA11
Claims (4)
分析する分析器とを結ぶ管路にオイルフリー型の真空ポ
ンプを設けたことを特徴とする，ガス試料採取装置。1. A gas sampling device, characterized in that an oil-free vacuum pump is provided in a pipe line connecting a sampling chamber for sampling the gas sample and an analyzer for analyzing the gas sample.
あることを特徴とする，請求項１に記載のガス試料採取
装置。2. The gas sampling device according to claim 1, wherein the sampling chamber is a vacuum furnace or a vacuum carburizing furnace.
取して分析器に送るガス試料採取方法において，オイル
フリー型の真空ポンプで吸引することにより採取室から
被分析ガスを採取することを特徴とする，ガス試料採取
方法。3. In a gas sampling method for collecting a gas to be analyzed including a gas sample in a sampling chamber and sending it to an analyzer, the gas to be analyzed is sampled from the sampling chamber by suction with an oil-free vacuum pump. A gas sampling method characterized by.
あることを特徴とする，請求項３に記載のガス試料採取
方法。4. The gas sampling method according to claim 3, wherein the sampling chamber is a vacuum furnace or a vacuum carburizing furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001246086A JP4635227B2 (en) | 2001-08-14 | 2001-08-14 | Gas sampling apparatus and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001246086A JP4635227B2 (en) | 2001-08-14 | 2001-08-14 | Gas sampling apparatus and method |
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| Publication Number | Publication Date |
|---|---|
| JP2003057155A true JP2003057155A (en) | 2003-02-26 |
| JP4635227B2 JP4635227B2 (en) | 2011-02-23 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2010048654A (en) * | 2008-08-21 | 2010-03-04 | Yazaki Corp | Concentration measuring instrument |
| WO2016098754A1 (en) * | 2014-12-15 | 2016-06-23 | 岩谷産業株式会社 | Sample collection device and sample collection method |
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| JPH06150879A (en) * | 1992-11-13 | 1994-05-31 | Japan Atom Energy Res Inst | Gas component analyzing apparatus |
Cited By (7)
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| WO2016098754A1 (en) * | 2014-12-15 | 2016-06-23 | 岩谷産業株式会社 | Sample collection device and sample collection method |
| JP2016114463A (en) * | 2014-12-15 | 2016-06-23 | 岩谷産業株式会社 | Sample collection device and sample collection method |
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| CN107003213A (en) * | 2014-12-15 | 2017-08-01 | 岩谷产业株式会社 | Sample collection device and sample collection method |
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| CN107003213B (en) * | 2014-12-15 | 2018-03-02 | 岩谷产业株式会社 | Sample collection device and sample collection method |
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