JP2003053115A5 - - Google Patents
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- Publication number
- JP2003053115A5 JP2003053115A5 JP2001243047A JP2001243047A JP2003053115A5 JP 2003053115 A5 JP2003053115 A5 JP 2003053115A5 JP 2001243047 A JP2001243047 A JP 2001243047A JP 2001243047 A JP2001243047 A JP 2001243047A JP 2003053115 A5 JP2003053115 A5 JP 2003053115A5
- Authority
- JP
- Japan
- Prior art keywords
- resin
- filter
- addition
- teflon
- reuse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 238000001914 filtration Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Description
【請求項6】 請求項1から請求項5に記載のろ過器であって、樹脂でできていることを特徴とするろ過面が多孔状のろ過器。 6. The filter according to claim 1 to 5, wherein the filter surface is made of resin.
請求項6に記載の発明によれば、請求項1から請求項5に記載のうちいずれか一項に記載のろ過器であって、樹脂でできているろ過面が多孔状であることを特徴とする。 According to the invention of claim 6, the filter according to any one of claims 1 to 5, wherein the filtration surface made of resin is porous. And.
この構成によれば、請求項1から請求項5に記載の作用効果に加えて、テフロン(登録商標)樹脂は耐薬品性が高いので、例えば、半導体の製造用薬液流路にも使用できる。このことにより、多種の薬液にも使用できるろ過器を得ることができる。又、ろ過器を容易にとり取り外すことができるので、例えば高価なテフロン(登録商標)等の樹脂材料の再利用に便利である。
According to this configuration, in addition to the effects according to claims 1 to 5, the Teflon (registered trademark) resin has high chemical resistance, so that it can be used, for example, in a chemical flow path for manufacturing semiconductors. This makes it possible to obtain a filter that can be used for various chemical solutions. In addition, it is possible to remove the strainer taken easily, for example it is convenient to reuse of expensive Teflon resin material or the like.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001243047A JP2003053115A (en) | 2001-08-09 | 2001-08-09 | Filter for fluid control valve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001243047A JP2003053115A (en) | 2001-08-09 | 2001-08-09 | Filter for fluid control valve |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2003053115A JP2003053115A (en) | 2003-02-25 |
JP2003053115A5 true JP2003053115A5 (en) | 2008-08-28 |
Family
ID=19073216
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001243047A Pending JP2003053115A (en) | 2001-08-09 | 2001-08-09 | Filter for fluid control valve |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2003053115A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4524128B2 (en) * | 2004-03-19 | 2010-08-11 | 株式会社ミヤワキ | steam trap |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE878481A (en) * | 1978-09-09 | 1979-12-17 | Bullock George P | ADVANCED REMOVABLE FILTERS FOR LIQUID PIPING |
DE2919916A1 (en) * | 1979-05-17 | 1980-11-27 | Stoll & Co H | THREAD FEEDER FOR FLAT KNITTING MACHINES |
JPS5867288A (en) * | 1981-10-19 | 1983-04-21 | 松下電器産業株式会社 | Finishing agent throwing-in apparatus in dehydrating and rinsing apparatus |
JPS58100014A (en) * | 1981-12-08 | 1983-06-14 | Sumitomo Metal Ind Ltd | Method of operating multistage conveyance equipment |
JPH02266179A (en) * | 1989-04-05 | 1990-10-30 | Hitachi Ltd | Magnetic feedwater valve |
JP3125833B2 (en) * | 1993-11-09 | 2001-01-22 | コスモ工機株式会社 | Contaminant removal device for running water pipe |
-
2001
- 2001-08-09 JP JP2001243047A patent/JP2003053115A/en active Pending
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