JP2003053115A5 - - Google Patents

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Publication number
JP2003053115A5
JP2003053115A5 JP2001243047A JP2001243047A JP2003053115A5 JP 2003053115 A5 JP2003053115 A5 JP 2003053115A5 JP 2001243047 A JP2001243047 A JP 2001243047A JP 2001243047 A JP2001243047 A JP 2001243047A JP 2003053115 A5 JP2003053115 A5 JP 2003053115A5
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JP
Japan
Prior art keywords
resin
filter
addition
teflon
reuse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001243047A
Other languages
Japanese (ja)
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JP2003053115A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2001243047A priority Critical patent/JP2003053115A/en
Priority claimed from JP2001243047A external-priority patent/JP2003053115A/en
Publication of JP2003053115A publication Critical patent/JP2003053115A/en
Publication of JP2003053115A5 publication Critical patent/JP2003053115A5/ja
Pending legal-status Critical Current

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Description

【請求項6】 請求項1から請求項5に記載のろ過器であって、樹脂でできていることを特徴とするろ過面が多孔状のろ過器。 6. The filter according to claim 1 to 5, wherein the filter surface is made of resin.

請求項6に記載の発明によれば、請求項1から請求項5に記載のうちいずれか一項に記載のろ過器であって、樹脂でできているろ過面が多孔状であることを特徴とする。 According to the invention of claim 6, the filter according to any one of claims 1 to 5, wherein the filtration surface made of resin is porous. And.

この構成によれば、請求項1から請求項5に記載の作用効果に加えて、テフロン(登録商標)樹脂は耐薬品性が高いので、例えば、半導体の製造用薬液流路にも使用できる。このことにより、多種の薬液にも使用できるろ過器を得ることができる。又、ろ過器を容易にとり取り外すことができるので、例えば高価なテフロン(登録商標)等の樹脂材料の再利用に便利である。
According to this configuration, in addition to the effects according to claims 1 to 5, the Teflon (registered trademark) resin has high chemical resistance, so that it can be used, for example, in a chemical flow path for manufacturing semiconductors. This makes it possible to obtain a filter that can be used for various chemical solutions. In addition, it is possible to remove the strainer taken easily, for example it is convenient to reuse of expensive Teflon resin material or the like.

JP2001243047A 2001-08-09 2001-08-09 Filter for fluid control valve Pending JP2003053115A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001243047A JP2003053115A (en) 2001-08-09 2001-08-09 Filter for fluid control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001243047A JP2003053115A (en) 2001-08-09 2001-08-09 Filter for fluid control valve

Publications (2)

Publication Number Publication Date
JP2003053115A JP2003053115A (en) 2003-02-25
JP2003053115A5 true JP2003053115A5 (en) 2008-08-28

Family

ID=19073216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001243047A Pending JP2003053115A (en) 2001-08-09 2001-08-09 Filter for fluid control valve

Country Status (1)

Country Link
JP (1) JP2003053115A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4524128B2 (en) * 2004-03-19 2010-08-11 株式会社ミヤワキ steam trap

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE878481A (en) * 1978-09-09 1979-12-17 Bullock George P ADVANCED REMOVABLE FILTERS FOR LIQUID PIPING
DE2919916A1 (en) * 1979-05-17 1980-11-27 Stoll & Co H THREAD FEEDER FOR FLAT KNITTING MACHINES
JPS5867288A (en) * 1981-10-19 1983-04-21 松下電器産業株式会社 Finishing agent throwing-in apparatus in dehydrating and rinsing apparatus
JPS58100014A (en) * 1981-12-08 1983-06-14 Sumitomo Metal Ind Ltd Method of operating multistage conveyance equipment
JPH02266179A (en) * 1989-04-05 1990-10-30 Hitachi Ltd Magnetic feedwater valve
JP3125833B2 (en) * 1993-11-09 2001-01-22 コスモ工機株式会社 Contaminant removal device for running water pipe

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