JP2003052687A5 - - Google Patents

Claims (3)

  An X-ray generator that generates X-rays to be irradiated on the inspection object, an X-ray detection apparatus that measures a transmission X-ray image of the inspection object, and an arithmetic process of an output signal of the X-ray detection apparatus, An afterimage correction operation for correcting an afterimage of a transmitted X-ray image generated by the X-ray detection apparatus with respect to the measured output signal. Processing, calculation processing of system sensitivity correction for correcting a change in sensitivity of the entire X-ray inspection apparatus depending on the measurement condition of the image, and energy distribution of X-rays depending on a distance through which the X-ray passes through the inspection object An X-ray inspection apparatus characterized by performing a size-dependent correction calculation process for correcting the change of the X-ray.   An X-ray generator that generates X-rays to be irradiated on the inspection object, an X-ray detection apparatus that measures a transmission X-ray image of the inspection object, and an arithmetic process of an output signal of the X-ray detection apparatus, and the image of the inspection object The data processing device calculates (1) an afterimage attenuation ratio (r) per measurement time of one transmission X-ray image, and sets the i th (i: integer) A calculation process for subtracting a value obtained by multiplying the (i−1) th measured output signal by r from a value obtained by multiplying the measured output signal by (1 + r), and executing afterimage correction; (2) The system sensitivity correction amount for correcting the sensitivity of the entire X-ray inspection apparatus is calculated using the measurement conditions of the transmitted X-ray image determined by the operating conditions of the X-ray generation apparatus and the X-ray detection apparatus, and the (1 ) Result of the arithmetic processing or the output signal, The result of dividing by the correction amount is logarithmically converted, or the change of the system sensitivity is corrected by subtracting the logarithmically converted sensitivity correction amount from the result of the logarithmic conversion (1) or the logarithmically converted output signal. And (3) calculating the size-dependent correction amount indicating a change in the energy distribution of the X-ray depending on the distance through which the X-ray passes through the inspection object, and logarithmically converting the output signal or the (2) And multiplying the result of the arithmetic processing by the size dependency correction amount to perform any one or more of the arithmetic processing for correcting the size dependency of the inspection target. Line inspection device.   An X-ray generator that generates X-rays to be irradiated on the inspection object, an X-ray detection apparatus that measures a transmission X-ray image of the inspection object, and an arithmetic process of an output signal of the X-ray detection apparatus, A data processing device for obtaining an image, the data processing device: (1) an X-ray image measured by irradiating X-rays without placing the inspection object, and a transmission X-ray image; Calculation processing for performing offset correction for subtracting an offset image measured without irradiating a line, and (2) measurement conditions for the transmitted X-ray image determined by operating conditions of the X-ray generation device and the X-ray detection device. The system sensitivity correction amount for correcting the sensitivity of the entire X-ray inspection apparatus is calculated, and the pixel value of the transmission X-ray image subjected to the offset correction processing and the air image subjected to the offset correction processing are calculated. The saturation determination value obtained by multiplying the prime value by the sensitivity correction amount and the coefficient s (where 0 ≦ s ≦ 1) is compared, and the pixel value of the transmission X-ray image subjected to the offset correction processing is the saturation determination value. When the value is larger, the pixel value of the transmission X-ray image subjected to the offset correction process is replaced with a value obtained by multiplying the pixel value of the air image by the sensitivity correction amount, and a saturation value restoration correction process is performed. (3) An afterimage attenuation ratio (r) per measurement time of one transmission X-ray image is calculated using the output signal subjected to the saturation value restoration correction process, and i-th (i: integer) And (4) the above (3), wherein (4) the above (3), and (4) the above (3), subtracting the value obtained by multiplying the (i−1) th measured output signal by r from the value obtained by multiplying the output signal measured by ) Is the result of dividing the result of the arithmetic processing by the sensitivity correction amount. An arithmetic process for converting, or an arithmetic process for performing system sensitivity correction by subtracting the sensitivity correction amount logarithmically converted from the result of the arithmetic process of (3) logarithmically converted, and (5) the above-mentioned obtained in (4) A calculation process for performing nonuniform correction by subtracting the logarithmically transformed air image from the transmitted X-ray image subjected to system sensitivity correction; and (6) depending on the distance through which the X-ray passes through the inspection object. A size-dependent correction amount indicating a change in the X-ray energy distribution is calculated, and an arithmetic processing for performing size-dependent correction by multiplying the result of the arithmetic processing in (5) by the size-dependent correction amount is executed. X-ray inspection apparatus characterized by the above.