JP2003049201A - Spherical powder of metal and metallic compound, and manufacturing method thereof - Google Patents
Spherical powder of metal and metallic compound, and manufacturing method thereofInfo
- Publication number
- JP2003049201A JP2003049201A JP2001236105A JP2001236105A JP2003049201A JP 2003049201 A JP2003049201 A JP 2003049201A JP 2001236105 A JP2001236105 A JP 2001236105A JP 2001236105 A JP2001236105 A JP 2001236105A JP 2003049201 A JP2003049201 A JP 2003049201A
- Authority
- JP
- Japan
- Prior art keywords
- spherical powder
- metal
- powder
- gas
- gas atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000843 powder Substances 0.000 title claims abstract description 173
- 239000002184 metal Substances 0.000 title claims abstract description 70
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 70
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 229910000765 intermetallic Inorganic materials 0.000 title abstract 4
- 238000010438 heat treatment Methods 0.000 claims abstract description 54
- 239000002994 raw material Substances 0.000 claims abstract description 37
- 238000000034 method Methods 0.000 claims abstract description 24
- 150000004767 nitrides Chemical class 0.000 claims abstract description 13
- 239000013078 crystal Substances 0.000 claims description 29
- 150000001875 compounds Chemical class 0.000 claims description 18
- 150000002736 metal compounds Chemical class 0.000 claims description 13
- 230000001590 oxidative effect Effects 0.000 claims description 10
- 238000002844 melting Methods 0.000 claims description 8
- 230000008018 melting Effects 0.000 claims description 7
- 238000005256 carbonitriding Methods 0.000 claims description 6
- 229910044991 metal oxide Inorganic materials 0.000 claims description 6
- 150000004706 metal oxides Chemical class 0.000 claims description 6
- 150000002739 metals Chemical class 0.000 claims description 5
- 238000005121 nitriding Methods 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 238000010000 carbonizing Methods 0.000 claims 2
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 abstract description 19
- 239000000463 material Substances 0.000 abstract description 6
- 239000012798 spherical particle Substances 0.000 abstract description 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 abstract 1
- 150000001247 metal acetylides Chemical class 0.000 abstract 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract 1
- 229910010271 silicon carbide Inorganic materials 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 62
- 239000002245 particle Substances 0.000 description 33
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 14
- 238000002441 X-ray diffraction Methods 0.000 description 10
- 238000001816 cooling Methods 0.000 description 8
- 239000010936 titanium Substances 0.000 description 8
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 3
- 239000000112 cooling gas Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- 239000011863 silicon-based powder Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910004356 Ti Raw Inorganic materials 0.000 description 2
- 238000005162 X-ray Laue diffraction Methods 0.000 description 2
- 238000005255 carburizing Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- -1 TiN Chemical class 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Powder Metallurgy (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、例えば高温構造材
の粉砕メディアなどに使用されるＳｉＣ，Ｓｉ3Ｎ4 ，
ＴｉＮなどの炭化物あるいは窒化物などの球状粉末成
品、およびその製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to SiC, Si 3 N 4 , and
The present invention relates to a spherical powder product such as a carbide or nitride such as TiN, and a method for producing the same.
【０００２】[0002]
【従来の技術】不純物の混入をなくして金属系化合物の
球状粉末を得る方法として、金属又は金属系化合物の粉
末を粉末状態で熱プラズマにより溶融して表面張力によ
り球状化させる方法が行われている（特開平６−２５７
１７号など）。2. Description of the Related Art As a method for obtaining a spherical powder of a metal compound without mixing impurities, a method of melting a powder of a metal or a metal compound in a powder state by thermal plasma and making it spherical by surface tension is performed. (JP-A-6-257)
No. 17).
【０００３】この方法は、原料粉末の粒度とプラズマ加
熱条件と球状化冷却条件を選択することにより球状粒子
の大きさを任意に変えて所要の球径の球状粉末を得るこ
とができるという、大きな利点を有する。According to this method, the size of the spherical particles can be arbitrarily changed by selecting the particle size of the raw material powder, the plasma heating condition and the spheroidizing cooling condition to obtain a spherical powder having a required spherical diameter. Have advantages.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上記プ
ラズマ球状化においては、溶融球状化した粒子が落下冷
却の際、凝固前にチャンバ壁に当たって潰れたり、相互
付着して変形したりして、球状粒子の収率が低下すると
いう問題点がある。これを防止するために、溶融粒子を
急冷することが必要であるが、急冷すると粒子の結晶構
造が制御できないために所要の結晶構造の球状粉末を得
ることができない。However, in the above-mentioned plasma spheroidization, when the molten spheroidized particles fall and cool, they collide with the chamber wall before being solidified, and are crushed or deformed by mutual adhesion. However, there is a problem in that the yield of In order to prevent this, it is necessary to rapidly cool the molten particles. However, when the molten particles are rapidly cooled, the crystal structure of the particles cannot be controlled, so that a spherical powder having a required crystal structure cannot be obtained.
【０００５】また、金属系窒化物や炭化物の球状粉末を
得る場合、球状化の加熱に使用するプラズマガスは、球
状化条件を主体にするために、所要の組成の金属系窒化
物や炭化物の球状粉末を得ることは困難であるという問
題点がある。すなわち、例えばＳｉＣのように無融点の
金属系材料の窒化物や炭化物の球状化の場合、高温のプ
ラズマにより加熱されると昇華してしまう。また、例え
ばＳｉ3 Ｎ4 のように高温における組成の安定性の悪い
材料では、３０００〜４０００℃のプラズマ中で加熱す
るとＳｉとＮ2 に分解する。また、ＴｉＮ，ＴｉＣのよ
うな高融点材料を球状化するプラズマ炉は大きなパワー
を必要とし、設備が高価になるという問題点がある。Further, when a spherical powder of metal-based nitride or carbide is obtained, the plasma gas used for heating for spheroidization is mainly composed of spheroidizing conditions. There is a problem that it is difficult to obtain a spherical powder. That is, in the case of spheroidizing a nitride or carbide of a non-melting metal material such as SiC, it is sublimated when heated by high-temperature plasma. Further, for example, a material having a poor composition stability at a high temperature such as Si 3 N 4 decomposes into Si and N 2 when heated in plasma at 3000 to 4000 ° C. Further, there is a problem in that a plasma furnace for spheroidizing a refractory material such as TiN or TiC requires a large amount of power and the equipment becomes expensive.
【０００６】そこで本発明は、上記の問題の少ない組成
の中間球状粉末を使用して、所定の雰囲気炉内で加熱す
ることにより、所要の組成で安定化した結晶構造を有す
る所要の大きさの金属系化合物の球状粉末成品およびそ
の製造方法を提供することを目的とする。In view of the above, the present invention uses an intermediate spherical powder having a composition with less problems as described above and heating it in a furnace with a predetermined atmosphere to obtain a crystal structure of a required size and a stabilized crystal structure. It is an object to provide a spherical powder product of a metal-based compound and a method for producing the same.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するため
に、本発明の金属及び金属系化合物の球状粉末成品とそ
の製造方法は、金属又は金属系化合物の原料粉末を熱プ
ラズマにより粉末状態で加熱溶融して球状化した中間球
状粉末を、所定ガス雰囲気中で加熱処理して生成するこ
とを特徴とするものである。In order to achieve the above object, a spherical powder product of a metal and a metal-based compound and a method for producing the same according to the present invention is a method in which a raw material powder of a metal or a metal-based compound is powdered by thermal plasma. It is characterized in that it is produced by heat-treating, in a predetermined gas atmosphere, an intermediate spherical powder that has been melted by heating to be spherical.
【０００８】すなわち、所要の球径の不純物の少ない金
属や金属系化合物の中間球状粉末を得るには、原料粉末
をクリーンなエネルギーであるプラズマにより溶融球状
化して、所要の球径が得られる最適の条件で球状化する
ことが望ましい。しかし、プラズマにより溶融球状化し
た球状粉末は、各粒子が均一な所要の結晶構造や組成に
ならず、炉などで溶融して生成した金属系化合物の組成
や結晶系と異なる場合が多い。すなわち、プラズマ球状
化では粒子の一つ一つの冷却速度が異なるために、球状
粉末の結晶系が原料粉末の結晶系と異なったり、あるい
は粒子ごとに結晶系に差があるものが混在する場合が生
ずる。そこで、この中間球状粉末を所要の結晶系の粉末
にする必要がある。That is, in order to obtain an intermediate spherical powder of a metal or a metal-based compound having a required spherical diameter with a small amount of impurities, the raw material powder is melt-sphericalized by plasma which is clean energy, and the required spherical diameter is optimally obtained. It is desirable to make the particles spherical under the conditions. However, the spherical powder fused and spheroidized by plasma does not have a required crystal structure or composition in which each particle is uniform, and often has a different composition or crystal system from the metal-based compound produced by melting in a furnace or the like. That is, in plasma spheroidization, since the cooling rate of each particle is different, the crystal system of the spherical powder may be different from that of the raw material powder, or there may be a case where particles having different crystal systems coexist. Occurs. Therefore, it is necessary to make the intermediate spherical powder into powder of a required crystal system.
【０００９】本発明は、これを結晶安定化といい、前記
球状化した中間球状粉末を所定ガス雰囲気中で再度加熱
処理することにより、全粒子が均一な所要の組成で安定
化した結晶構造を有する所要の球径の金属及び金属系化
合物の球状粉末を得るものである。In the present invention, this is referred to as crystal stabilization. By subjecting the spheroidized intermediate spherical powder to heat treatment again in a predetermined gas atmosphere, a crystal structure in which all particles are stabilized with a required composition is obtained. A spherical powder of a metal and a metal-based compound having a required spherical diameter is obtained.
【００１０】例えば、Ｎｂ3 Ａｌを熱プラズマにより球
状化すると、Ａ１５＋Ａ２構造が混在する場合がある。
これを前記加熱処理することにより、均一にＡ１５構造
の球状粉末を得ることができる。また、Ｓｉを熱プラズ
マにより球状化すると、単非結晶＋多結晶＋単結晶の混
在する組織になることもあるが、前記加熱処理すること
により単結晶の均一な球状粉末を得ることができる。For example, if Nb 3 Al is spheroidized by thermal plasma, the A15 + A2 structure may coexist.
By subjecting this to the heat treatment, a spherical powder having an A15 structure can be obtained uniformly. Further, when Si is spheroidized by thermal plasma, it may have a structure in which single non-crystal + polycrystal + single crystal are mixed, but by the heat treatment, a uniform single-crystal spherical powder can be obtained.
【００１１】上記の結晶安定化した金属系化合物の球状
粉末成品を得るには、前記中間球状粉末を窒化、炭化、
炭窒化又は酸化ガスあるいは非酸化ガスのいずれかの単
体又は混合ガス雰囲気中で加熱処理して結晶安定化する
ことが望ましい。In order to obtain a spherical powder product of the above crystal-stabilized metal-based compound, the intermediate spherical powder is nitrided, carbonized,
It is desirable to heat-treat in a simple substance or mixed gas atmosphere of carbonitriding or oxidizing gas or non-oxidizing gas to stabilize the crystal.
【００１２】また本発明の方法により金属系窒化物の球
状粉末成品を得るには、前記中間球状粉末を窒化ガスの
単体又は混合ガス雰囲気中で加熱処理して生成すること
が望ましい。Further, in order to obtain a spherical powder product of a metal-based nitride by the method of the present invention, it is desirable that the intermediate spherical powder is produced by heat treatment in a simple atmosphere or a mixed gas atmosphere of nitriding gas.
【００１３】また本発明の方法により金属系炭化物の球
状粉末成品を得るには、前記中間球状粉末を炭化ガスの
単体又は混合ガス雰囲気中で加熱処理して生成すること
が望ましい。Further, in order to obtain a spherical powder product of a metal-based carbide by the method of the present invention, it is desirable that the intermediate spherical powder is produced by heat treatment in a carbon gas simple substance or mixed gas atmosphere.
【００１４】また本発明の方法により金属系炭窒化物の
球状粉末成品を得るには、前記中間球状粉末を炭窒化ガ
スの単体又は混合ガス雰囲気中で加熱処理して生成する
ことが望ましい。Further, in order to obtain a spherical powder product of a metal-based carbonitride by the method of the present invention, it is desirable that the intermediate spherical powder is produced by heat treatment in an atmosphere of carbonitriding gas alone or in a mixed gas atmosphere.
【００１５】さらに本発明の方法により金属系酸化物の
球状粉末成品を得るには、前記中間球状粉末を酸化ガス
の単体又は混合ガス雰囲気中で加熱処理して生成するこ
とが望ましい。ここで酸化ガスには空気も含む。Further, in order to obtain a spherical powder product of a metal-based oxide by the method of the present invention, it is preferable that the intermediate spherical powder is produced by heat treatment in an atmosphere of an oxidizing gas or in a mixed gas atmosphere. Here, the oxidizing gas also includes air.
【００１６】[0016]
【発明の実施の形態】以下、本発明を図示の一実施形態
について具体的に説明する。図１は本発明の工程を示す
フローチャート、図２は本実施形態に用いた金属系化合
物の球状粉末の製造装置の断面図である。BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be specifically described below with reference to an embodiment shown in the drawings. FIG. 1 is a flow chart showing steps of the present invention, and FIG. 2 is a sectional view of an apparatus for producing a spherical powder of a metal compound used in this embodiment.
【００１７】図１のフローチャートを用いて本発明の工
程を説明する。まず金属又は金属系化合物の原料を粉砕
又は造粒して、ほぼ所要の球状粉末成品の粒度に分級し
た原料粉末を（ＳＴＥＰ１）、図２に示す熱プラズマに
より加熱して溶融球状化する（ＳＴＥＰ２）。これによ
り、所要の粒度の揃った中間球状粉末が得られる（ＳＴ
ＥＰ３）。しかし、この中間球状粉末は所要の結晶構造
や組成を有していない。The process of the present invention will be described with reference to the flow chart of FIG. First, a raw material of a metal or a metal-based compound is pulverized or granulated, and a raw material powder obtained by classifying to a substantially required particle size of a spherical powder product (STEP 1) is heated by the thermal plasma shown in FIG. 2 to be melt-spheroidized (STEP 2). ). As a result, an intermediate spherical powder having a uniform particle size can be obtained (ST
EP3). However, this intermediate spherical powder does not have the required crystal structure or composition.
【００１８】そこで、この中間球状粉末をガス雰囲気加
熱炉で加熱処理して（ＳＴＥＰ４）、所要の結晶構造や
組成に変成させ、所要の粒径と結晶構造や組成を有する
金属系化合物の球状粉末成品を得る（ＳＴＥＰ５）。こ
のガス雰囲気加熱炉には通常のガス雰囲気の調整できる
電気加熱炉を使用した。Therefore, this intermediate spherical powder is heat-treated in a gas atmosphere heating furnace (STEP 4) to be transformed into a required crystal structure and composition, and a spherical powder of a metal compound having a required particle size, crystal structure and composition. Obtain a product (STEP 5). As this gas atmosphere heating furnace, an electric heating furnace capable of adjusting a normal gas atmosphere was used.
【００１９】図２に基づき本実施形態に使用した球状粉
末の製造装置の全体の構成について簡単に説明する。本
実施形態の製造装置はプラズマトーチ１１、原料供給管
２１、チャンバー３１により構成されている。The overall structure of the spherical powder manufacturing apparatus used in this embodiment will be briefly described with reference to FIG. The manufacturing apparatus of this embodiment includes a plasma torch 11, a raw material supply pipe 21, and a chamber 31.
【００２０】プラズマトーチ１１の水冷される石英管１
２の外周に高周波誘導コイル１７が巻かれ、図示しない
高周波電源から高周波電流が付加される。トーチヘッド
１６に設けられた図示しないガス供給管から石英管１２
の内部にプラズマガスが供給される。石英管１２の下部
は水冷ジャケット１８に固定される。Water-cooled quartz tube 1 of plasma torch 11
A high frequency induction coil 17 is wound around the outer periphery of 2, and a high frequency current is added from a high frequency power source (not shown). From the gas supply pipe (not shown) provided in the torch head 16 to the quartz pipe 12
A plasma gas is supplied to the inside of the. The lower part of the quartz tube 12 is fixed to a water cooling jacket 18.
【００２１】原料供給管２１の上部は図示しない原料ホ
ッパーに接続され、その下部先端がプラズマフレーム１
の吹き出し側に開口されている。そして、原料は図示し
ない原料ホッパーから原料供給管２１を通してキャリヤ
ガスによりプラズマフレーム中に投入される。The upper portion of the raw material supply pipe 21 is connected to a raw material hopper (not shown), and the lower end thereof is connected to the plasma flame 1.
It is opened on the balloon side. Then, the raw material is introduced into the plasma flame from the raw material hopper (not shown) through the raw material supply pipe 21 by the carrier gas.
【００２２】チャンバー３１の上蓋３４に水冷ジャケッ
ト１８が固定されてプラズマトーチ１１が上蓋３４の上
に搭載される。チャンバー３１の円筒部３２の下部は開
口されて回収容器３３に接続されている。チャンバー３
１内は図示しない排気ポンプにより排気される。The water cooling jacket 18 is fixed to the upper lid 34 of the chamber 31, and the plasma torch 11 is mounted on the upper lid 34. The lower portion of the cylindrical portion 32 of the chamber 31 is opened and connected to the recovery container 33. Chamber 3
The inside of 1 is exhausted by an exhaust pump (not shown).
【００２３】上記の構成の球状粉末の製造装置の動作に
ついて以下に説明する。まず、プラズマトーチ１１にプ
ラズマガスを流入しながら高周波誘導コイル１７に高周
波電力を掛けると、石英管１２内に図に示すプラズマ１
が発生し石英管１２の下部側から噴出する。The operation of the spherical powder manufacturing apparatus having the above-described structure will be described below. First, when high-frequency power is applied to the high-frequency induction coil 17 while the plasma gas is flowing into the plasma torch 11, the plasma 1 shown in the figure is placed in the quartz tube 12.
Is generated and spouts from the lower side of the quartz tube 12.
【００２４】図示しない原料ホッパーから、原料粉末を
キャリアガスにより原料供給管２１を介してプラズマフ
レーム１に供給すると、原料粉末は粉末のまま加熱溶融
される。加熱溶融されて球状化された粒子はガス冷却に
より急冷されてチャンバー３１内に落下し、回収容器３
３に収容される。When a raw material powder is supplied from a raw material hopper (not shown) to the plasma flame 1 through a raw material supply pipe 21 by a carrier gas, the raw material powder is heated and melted as a powder. The particles that have been melted by heating and spheroidized are rapidly cooled by gas cooling and fall into the chamber 31, where the recovery container 3
It is housed in 3.
【００２５】このように、プラズマ加熱装置によれば、
原料粉末の粒度とプラズマ条件を選択することにより任
意の粒度の球状粉末が得られる。As described above, according to the plasma heating device,
A spherical powder having an arbitrary particle size can be obtained by selecting the particle size of the raw material powder and the plasma conditions.
【００２６】上記球状粉末製造装置のプラズマ加熱によ
り溶融球状化した中間球状粉末を、ガス雰囲気加熱炉に
より所定のガス雰囲気中で加熱処理することにより所要
の金属系化合物の球状粉末成品を得る。以下、実施例に
ついて詳細を説明する。The intermediate spherical powder melt-spheroidized by the plasma heating of the spherical powder producing apparatus is heat-treated in a predetermined gas atmosphere in a gas atmosphere heating furnace to obtain a spherical powder product of a required metal compound. Hereinafter, the example will be described in detail.
【００２７】[0027]
【実施例１】実施例１は金属Ｓｉの単結晶化の実験を行
った。図３はその製造工程のフローチャートである。
ａ．球状化条件
約１５０μｍ径のＳｉの原料粉末を原料ホッパーに装入
し、Ａｒガス＋Ｈ2 ガス雰囲気中でプラズマにより加熱
溶融して球状化し、この球状化した粒子を分級して粒径
約１５０μｍのＳｉの中間球状粉末を得た。
ｂ．ガス雰囲気炉加熱処理条件
次に上記の中間球状粉末をガス雰囲気電気炉に装入し、
下記の条件で加熱処理しＳｉの球状粉末成品を作成し
た。
雰囲気ガス：（Ａｒ＋Ｈ2 ガス）
加熱温度×時間：１６５０Ｋ×１０ｋｓExample 1 In Example 1, an experiment for single crystallization of metallic Si was conducted. FIG. 3 is a flowchart of the manufacturing process. a. Spheroidizing conditions Si raw material powder having a diameter of about 150 μm was charged into a raw material hopper, and heated and melted by plasma in an Ar gas + H 2 gas atmosphere to be spheroidized, and the spheroidized particles were classified to have a particle diameter of about 150 μm. An intermediate spherical powder of Si was obtained. b. Gas atmosphere furnace heat treatment conditions Next, charge the above intermediate spherical powder into a gas atmosphere electric furnace,
Heat treatment was performed under the following conditions to prepare a spherical Si powder product. Atmospheric gas: (Ar + H 2 gas) heating temperature × time: 1650K × 10 kS
【００２８】図４に球状粉末成品の形状のＳＥＭ写真を
示す。図４のＳＥＭ写真から分かるように、球状粉末成
品は約１５０μｍの綺麗な球状粉末になっている。FIG. 4 shows an SEM photograph of the shape of the spherical powder product. As can be seen from the SEM photograph of FIG. 4, the spherical powder product is a beautiful spherical powder of about 150 μm.
【００２９】また、Ｓｉ中間球状粉末とＳｉ球状粉末成
品について、湾曲ＩＰＸ線回折装置を用いて透過ラウエ
法により結晶性を確認試験した。その結果、Ｓｉ中間球
状粉末は多結晶体のデバイリングを示したが、Ｓｉ球状
粉末成品は単結晶体のラウエスポットを示し、完全に単
結晶化したことが判った。The crystallinity of the Si intermediate spherical powder and the product of the Si spherical powder were confirmed by a transmission Laue method using a curved IPX-ray diffractometer. As a result, it was found that the Si intermediate spherical powder showed a Debye ring of a polycrystalline body, whereas the Si spherical powder product showed a Laue spot of a single crystal body and was completely single crystallized.
【００３０】このように、Ｓｉは熱プラズマにより溶融
球状化すると、得られた中間球状粉末は多結晶になる
が、本発明の加熱処理により単結晶構造にすることがで
きる。すなわち、本発明により前述した結晶安定化が可
能であることが判った。As described above, when Si is melt-spheroidized by thermal plasma, the obtained intermediate spherical powder becomes polycrystalline, but can be made to have a single crystal structure by the heat treatment of the present invention. That is, it was found that the above-described crystal stabilization was possible according to the present invention.
【００３１】本実施例ではＳｉについて示したが、本方
法のガス雰囲気加熱処理により他の高温で分解しやすい
金属あるいは金属化合物についても同様に、所要の安定
した組織を有し、かつ所要の球径に揃った粒子の球状粉
末成品が得られる。Although Si is shown in the present embodiment, other metals or metal compounds that are easily decomposed at a high temperature by the gas atmosphere heat treatment of the present method similarly have a required stable structure and a required sphere. A spherical powder product having particles of uniform diameter is obtained.
【００３２】[0032]
【実施例２】実施例２は、実施例１と同様に本発明の方
法により、金属酸化物としてＮｉ粉末からＮｉＯを生成
する実験を行った。図５は製造工程のフローチャートで
ある。
ａ．球状化条件
約１５０μｍ径のＮｉ原料粉末を原料ホッパーに装入
し、Ａｒガス＋Ｈ2 ガス雰囲気中でプラズマにより加熱
溶融して球状化し、この球状化した粒子を分級して粒径
１５０〜２００μｍのＮｉ中間球状粉末を得た。
ｂ．ガス雰囲気炉加熱処理条件
次に上記の中間球状粉末をガス雰囲気電気炉に装入し、
下記の条件で加熱処理しＮｉＯの球状粉末成品を作成し
た。
雰囲気ガス：（Ｏ2 ガス：７６０Ｔｏｒｒ）
加熱温度×時間：１２７３Ｋ×１７０ｋｓ[Example 2] In Example 2, as in Example 1, an experiment was conducted to produce NiO from Ni powder as a metal oxide by the method of the present invention. FIG. 5 is a flowchart of the manufacturing process. a. Spheroidizing conditions Ni raw material powder having a diameter of about 150 μm was charged into a raw material hopper, and heated and melted by plasma in an Ar gas + H 2 gas atmosphere to be spheroidized, and the spheroidized particles were classified to have a particle size of 150 to 200 μm. Ni intermediate spherical powder was obtained. b. Gas atmosphere furnace heat treatment conditions Next, charge the above intermediate spherical powder into a gas atmosphere electric furnace,
A heat treatment was performed under the following conditions to prepare a spherical NiO powder product. Atmosphere gas: (O 2 gas: 760 Torr) Heating temperature x time: 1273K x 170ks
【００３３】その結果を図６および図７に示す。図６は
Ｘ線回折の図、図７は球状粉末成品の形状のＳＥＭ写真
である。図６の回折パターンから判るように、球状粉末
成品の結晶構造は均一なＮｉＯになっている。また、図
７のＳＥＭ写真から分かるように、球状粉末成品は１５
０〜２００μｍの綺麗な球状粉末になっている。このよ
うに本発明の方法によれば、球状化が容易なＮｉの中間
球状粉末を用いて、均一なＮｉＯの結晶構造を有し、か
つ所要の球径に揃った粒子を有するＮｉＯの球状粉末成
品が高い収率で得られる。The results are shown in FIGS. 6 and 7. FIG. 6 is an X-ray diffraction diagram, and FIG. 7 is an SEM photograph of the shape of the spherical powder product. As can be seen from the diffraction pattern of FIG. 6, the spherical powder product has a uniform crystal structure of NiO. Moreover, as can be seen from the SEM photograph of FIG.
It is a beautiful spherical powder of 0 to 200 μm. As described above, according to the method of the present invention, a spherical NiO powder having a uniform NiO crystal structure and particles having a uniform spherical diameter is used by using an intermediate spherical powder of Ni that is easily spheroidized. The product is obtained in high yield.
【００３４】本実施例ではＮｉＯについて示したが、本
方法のガス雰囲気加熱処理により、他の金属あるいは金
属化合物についても同様に、所要の安定した組織を有
し、かつ所要の球径に揃った粒子の金属酸化物の球状粉
末成品が得られる。Although NiO is shown in the present embodiment, by the gas atmosphere heat treatment of this method, other metals or metal compounds similarly have the required stable structure and have the required spherical diameter. A spherical powder product of metal oxide particles is obtained.
【００３５】[0035]
【実施例３】実施例３は、金属チタンから金属窒化物Ｔ
ｉＮのの球状粉末成品を得る実験を行った。図８は製造
工程のフローチャートである。
ａ．球状化条件
球状化は実施例１と同じ装置を使用し、約１００μｍ径
のＴｉ原料粉末を実施例１と同じＡｒガス＋Ｈ2 ガス雰
囲気中でプラズマにより加熱溶融して球状化し、この球
状化した粒子を分級して粒径８０〜１２０μｍのＮｉ中
間球状粉末を得た。
ｂ．ガス雰囲気炉加熱処理条件
次に上記の中間球状粉末をガス雰囲気電気炉に装入し、
下記の条件で加熱処理しＴｉＮの球状粉末成品を作成し
た。
雰囲気ガス：（Ｎ2 ガス：７６０Ｔｏｒｒ）
加熱温度×時間：１２７３Ｋ×２３０ｋｓThird Embodiment In a third embodiment, metal titanium to metal nitride T is used.
An experiment was conducted to obtain a spherical powder product of iN. FIG. 8 is a flowchart of the manufacturing process. a. Spheroidizing conditions For spheroidizing, the same apparatus as in Example 1 was used, and a Ti raw material powder having a diameter of about 100 μm was heated and melted by plasma in the same Ar gas + H 2 gas atmosphere as in Example 1 to be spheroidized, and spheroidized. The particles were classified to obtain Ni intermediate spherical powder having a particle size of 80 to 120 μm. b. Gas atmosphere furnace heat treatment conditions Next, charge the above intermediate spherical powder into a gas atmosphere electric furnace,
Heat treatment was performed under the following conditions to prepare a TiN spherical powder product. Atmosphere Gas: (N 2 gas: 760 Torr) heating temperature × time: 1273K × 230ks
【００３６】その結果を図９及び図１０に示す。図９は
Ｘ線回折のパターン、図１０は球状粉末成品の形状のＳ
ＥＭ写真である。図１２のＸ線回折のパターンから球状
粉末成品の結晶構造は均一なＴｉＮになっていることが
判る。また、図１０のＳＥＭ写真から球状粉末成品は８
０〜１２０μｍの綺麗な球状粉末になっていることが判
る。The results are shown in FIGS. 9 and 10. FIG. 9 shows the X-ray diffraction pattern, and FIG. 10 shows the S of the spherical powder product.
It is an EM photograph. From the X-ray diffraction pattern of FIG. 12, it can be seen that the crystal structure of the spherical powder product is uniform TiN. Moreover, from the SEM photograph of FIG.
It can be seen that it is a beautiful spherical powder of 0 to 120 μm.
【００３７】このように本発明の方法によれば、球状化
が容易なＴｉの中間球状粉末を用いて、均一なＴｉＮの
結晶構造を有し、かつ所要の球径に揃った粒子を有する
ＴｉＮの球状粉末成品が得られる。As described above, according to the method of the present invention, TiN having a uniform TiN crystal structure and particles having a uniform spherical diameter is used by using an intermediate spherical powder of Ti which is easily spheroidized. A spherical powder product of is obtained.
【００３８】本実施例では原料粉末に金属チタンを用い
たが、原料粉末にＴｉＮの粉末を用いてもよい。この場
合もプラズマの高温溶解により、ＴｉＮの化学組成に変
動が生ずるが加熱処理により純粋のＴｉＮ組成の球状粉
末成品が得られる。また、本実施例ではＴｉＮについて
示したが、本方法のガス雰囲気又はＮ2 ガス雰囲気の加
熱処理により他の金属あるいは金属化合物についても同
様に所要の安定した組織を有し、かつ所要の球径に揃っ
た粒子の窒化物の球状粉末成品が得られる。In this embodiment, metallic titanium is used as the raw material powder, but TiN powder may be used as the raw material powder. In this case as well, the chemical composition of TiN varies due to high-temperature melting of plasma, but a spherical powder product having a pure TiN composition can be obtained by heat treatment. Although TiN is shown in this example, other metals or metal compounds also have the required stable structure and have the required sphere diameter by the heat treatment in the gas atmosphere or N 2 gas atmosphere of the present method. A spherical powder product of nitride having uniform particles is obtained.
【００３９】[0039]
【実施例４】実施例４は、金属チタンからＴｉＣの金属
炭化物の球状粉末成品を得る実験を行った。図１１は製
造工程のフローチャートである。
ａ．球状化条件
球状化は実施例１と同じく、約１００μｍ径のＴｉ原料
粉末をＡｒガス＋Ｈ2ガス雰囲気中でプラズマにより加
熱溶融して球状化し、この球状化した粒子を分級して粒
径８０〜１２０μｍのＴｉ中間球状粉末を得た。
ｂ．ガス雰囲気炉加熱処理条件
次に上記の中間球状粉末を電気真空浸炭炉に装入し、下
記の条件で加熱処理しガス浸炭によりＴｉＣの球状粉末
成品を作成した。
雰囲気ガス：（Ｃ2 Ｈ2 ガス：１．０Ｔｏｒｒ）
加熱温度×時間：１２２３Ｋ×８６ｋｓExample 4 In Example 4, an experiment was conducted to obtain a spherical powder product of TiC metal carbide from titanium metal. FIG. 11 is a flowchart of the manufacturing process. a. Spheroidization conditions As in Example 1, spheroidization was performed by heating and melting a Ti raw material powder having a diameter of about 100 μm with plasma in an Ar gas + H 2 gas atmosphere to spheroidize, and classifying the spheroidized particles to a particle size of 80- 120 μm Ti intermediate spherical powder was obtained. b. Gas atmosphere furnace heat treatment conditions Next, the above intermediate spherical powder was charged into an electric vacuum carburizing furnace, and heat treatment was carried out under the following conditions, and a TiC spherical powder product was prepared by gas carburizing. Atmosphere gas: (C 2 H 2 gas: 1.0 Torr) Heating temperature x time: 1223K x 86ks
【００４０】その結果を図１２及び図１３に示す。図１
２はＸ線回折の図、図１３は球状粉末成品の形状のＳＥ
Ｍ写真である。図１２に見られるように球状粉末成品の
結晶構造は均一なＴｉＣになっており、図１３のＳＥＭ
写真から分かるように球形は８０〜１２０μｍの綺麗な
球状粉末になっている。The results are shown in FIGS. 12 and 13. Figure 1
2 is an X-ray diffraction diagram, and FIG. 13 is an SE of a spherical powder product.
It is an M photograph. As shown in FIG. 12, the crystal structure of the spherical powder product is uniform TiC.
As can be seen from the photograph, the spherical shape is a beautiful spherical powder of 80 to 120 μm.
【００４１】このように本発明の方法によれば、球状化
が容易なＴｉの中間球状粉末を用いて、均一なＴｉＣの
結晶構造を有している。As described above, according to the method of the present invention, the intermediate spherical powder of Ti, which is easily spheroidized, is used and has a uniform TiC crystal structure.
【００４２】本実施例では原料粉末に金属チタンを用い
たが、原料粉末にＴｉＮの粉末を用いてもよい。この場
合も加熱処理により純粋のＴｉＣ組成の球状粉末成品が
得られる。また、本実施例ではＴｉＣについて示した
が、本方法のガス雰囲気又はＣ組成のガス雰囲気の加熱
処理により、他の金属あるいは金属化合物についても同
様に、所要の安定した組織を有し、かつ所要の球径に揃
った粒子の炭化物の球状粉末成品が得られる。In this embodiment, metallic titanium was used as the raw material powder, but TiN powder may be used as the raw material powder. Also in this case, the spherical powder product having a pure TiC composition can be obtained by the heat treatment. Further, although TiC is shown in this embodiment, the heat treatment of the gas atmosphere of the present method or the gas atmosphere of the C composition also has the required stable structure and has the same required structure for other metals or metal compounds. As a result, a spherical powder product of carbide having particles having a uniform spherical diameter can be obtained.
【００４３】[0043]
【実施例５】実施例５は、金属シリコンから固体浸炭に
よりＳｉＣの金属炭化物を得る実験を行った。図１４は
製造工程のフローチャートである。
ａ．球状化条件：球状化は実施例１と同じで、約１００
μｍの径の金属シリコンの原料を実施例１と同一条件で
溶融球状化し、分級して１００〜１５０μｍの中間球状
粉末を得た。
ｂ．加熱処理条件
次に上記の金属シリコンの中間球状粉末と超微粒子炭素
（２０ｎｍ以下）とを、Ｓｉ：Ｃ＝１：２（ｗｔ％比）
の比率で混合し、雰囲気電気炉に装入し下記の条件で加
熱処理し、Ｓｉ＋Ｃ＝ＳｉＣの反応により単結晶のＳｉ
Ｃの球状粉末成品を作成した。
雰囲気ガス：（Ａｒガス：７６０Ｔｏｒｒ）
加熱温度×時間：１６５３Ｋ×４３ｋｓ
ｃ．後処理： 洗浄して超微粒子炭素を除去した。Fifth Embodiment In a fifth embodiment, an experiment for obtaining a metal carbide of SiC from metal silicon by solid carburization is conducted. FIG. 14 is a flowchart of the manufacturing process. a. Spheroidization conditions: Spheroidization is the same as in Example 1 and is about 100.
A raw material of metallic silicon having a diameter of μm was melt-spheroidized under the same conditions as in Example 1 and classified to obtain an intermediate spherical powder of 100 to 150 μm. b. Heat treatment conditions Next, the above-mentioned intermediate spherical powder of metallic silicon and ultrafine carbon (20 nm or less) were mixed with Si: C = 1: 2 (wt% ratio).
Mixed in the following ratio, charged in an atmosphere electric furnace, and heat-treated under the following conditions, and the reaction of Si + C = SiC causes a single crystal Si
A spherical powder product of C was prepared. Atmosphere gas: (Ar gas: 760 Torr) Heating temperature x time: 1653K x 43ks c. Post-treatment: Ultrafine carbon particles were removed by washing.
【００４４】その結果を図１５および図１６に示す。図
１５はＸ線回折の図、図１６は球状粉末成品の形状のＳ
ＥＭ写真である。図１５のＸ線回折パターンと図１６の
ＳＥＭ写真から、得られた球状粉末成品はＳｉＣの組成
を有し１００〜１５０μｍ径の球径の揃った粒子を有し
ていることが判る。The results are shown in FIGS. 15 and 16. FIG. 15 is an X-ray diffraction diagram, and FIG. 16 is an S shape of a spherical powder product.
It is an EM photograph. From the X-ray diffraction pattern of FIG. 15 and the SEM photograph of FIG. 16, it can be seen that the obtained spherical powder product has particles of SiC composition having a uniform spherical diameter of 100 to 150 μm.
【００４５】実施例３及び４では原料粉末に金属チタン
及びシリコンを用いたが、原料粉末にＴｉＣ又はＳｉＣ
の粉末を用いてもよい。In Examples 3 and 4, metallic titanium and silicon were used as the raw material powder, but TiC or SiC was used as the raw material powder.
You may use the powder of.
【００４６】以上述べたように、本発明の金属系化合物
の球状粉末成品とその製造方法は、金属又は金属系化合
物の原料粉末を熱プラズマにより加熱溶融して球状化し
て得られた中間球状粉末を、さらに所定ガス雰囲気中で
加熱処理して生成することにより構造の安定した球状粉
末成品を得るものである。As described above, the spherical powder product of the metal-based compound and the method for producing the same according to the present invention are intermediate spherical powders obtained by heating and melting a raw material powder of a metal or a metal-based compound by thermal plasma to make it spherical. Is further heated in a predetermined gas atmosphere to produce a spherical powder product having a stable structure.
【００４７】すなわち、プラズマにより溶融して球状化
するので不純部の混入がない球状粉末が得られる。ま
た、原料粉末の粒径、プラズマ条件、冷却条件の選択に
より所要の球径の球状粉末が得られる。しかし、この中
間球状粉末は所要の結晶構造や組成を有していないの
で、本発明はこの中間球状粉末を所定ガス雰囲気中で加
熱処理することにより、所要の組成で安定化した結晶構
造を有する所要の球径の金属又は金属系化合物の球状粉
末を得るものである。That is, since it is melted by the plasma to be spheroidized, a spherical powder free of impurities is obtained. Further, spherical powder having a required spherical diameter can be obtained by selecting the particle size of the raw material powder, plasma conditions, and cooling conditions. However, since this intermediate spherical powder does not have a required crystal structure or composition, the present invention has a crystalline structure stabilized at a required composition by heat treating this intermediate spherical powder in a predetermined gas atmosphere. It is intended to obtain a spherical powder of a metal or a metal compound having a required spherical diameter.
【００４８】本発明の方法によれば、ガス雰囲気を選択
して加熱処理することにより、安定結晶化した金属及び
金属系化合物の球状粉末成品、所要の組成の金属系の窒
化物、炭化物あるいは酸化物について、所要の球径の球
状粉末成品が得られる。According to the method of the present invention, a spherical powder product of a stable crystallized metal and a metal compound, a metal nitride, a carbide or an oxide of a required composition is selected by heating in a gas atmosphere. As a result, a spherical powder product having a required spherical diameter can be obtained.
【００４９】[0049]
【発明の効果】以上説明したように、本発明の金属系化
合物の球状粉末成品とその製造方法によれば、任意に所
要の球径が揃った所要の組成や組織を有する金属及び金
属系化合物の球状粉末が得られるので、これらを使用し
た部材の用途が開ける。As described above, according to the spherical powder product of the metal-based compound and the method for producing the same according to the present invention, the metal and the metal-based compound having the desired composition and texture with desired spherical diameters are arbitrarily arranged. Since spherical powders of 1 are obtained, the applications of members using these can be opened.
【図１】 本発明の金属系化合物の球状粉末成品の製造
工程を示すフローチャート。FIG. 1 is a flowchart showing a manufacturing process of a spherical powder product of a metal compound according to the present invention.
【図２】 本発明実施形態に使用した球状粉末の製造装
置の断面図。FIG. 2 is a cross-sectional view of a spherical powder manufacturing apparatus used in an embodiment of the present invention.
【図３】 本発明実施例１のＳｉの球状粉末成品の製造
工程を示すフローチャート。FIG. 3 is a flowchart showing a manufacturing process of a spherical Si powder product according to the first embodiment of the present invention.
【図４】 本発明実施例１のＳｉの球状粉末成品のＳＥ
Ｍ写真。4] SE of spherical Si powder product of Example 1 of the present invention
M photo.
【図５】 本発明実施例１の金属酸化物（ＮｉＯ）の製
造工程を示すフローチャート。FIG. 5 is a flowchart showing a process for producing a metal oxide (NiO) according to the first embodiment of the present invention.
【図６】 本発明実施例２の金属酸化物（ＮｉＯ）の球
状粉末成品のＸ線回折パターン。FIG. 6 is an X-ray diffraction pattern of a spherical powder product of metal oxide (NiO) of Example 2 of the present invention.
【図７】 本発明実施例２の金属酸化物（ＮｉＯ）の球
状粉末成品のＳＥＭ写真。FIG. 7 is an SEM photograph of a spherical powder product of metal oxide (NiO) of Example 2 of the present invention.
【図８】 本発明実施例３の金属窒化物（ＴｉＮ）の製
造工程を示すフローチャート。FIG. 8 is a flowchart showing a manufacturing process of a metal nitride (TiN) of Example 3 of the invention.
【図９】 本発明実施例３の金属窒化物（ＴｉＮ）の球
状粉末成品のＸ線回折パターン。9 is an X-ray diffraction pattern of a spherical powder product of metal nitride (TiN) of Example 3 of the present invention. FIG.
【図１０】 本発明実施例３の金属窒化物（ＴｉＮ）の
球状粉末成品のＳＥＭ写真。FIG. 10 is an SEM photograph of a spherical powder product of metal nitride (TiN) of Example 3 of the present invention.
【図１１】 本発明実施例４の金属炭化物（ＴｉＣ）の
製造工程を示すフローチャート。FIG. 11 is a flowchart showing a process for producing a metal carbide (TiC) according to Example 4 of the present invention.
【図１２】 本発明実施例４の金属炭化物（ＴｉＣ）の
球状粉末成品のＸ線回折パターン。FIG. 12 is an X-ray diffraction pattern of a spherical powder product of metal carbide (TiC) of Example 4 of the present invention.
【図１３】 本発明実施例４の金属炭化物（ＴｉＣ）の
球状粉末成品のＳＥＭ写真。FIG. 13 is an SEM photograph of a spherical powder product of metal carbide (TiC) of Example 4 of the present invention.
【図１４】 本発明実施例５の金属炭化物（ＴｉＣ）の
製造工程を示すフローチャート。FIG. 14 is a flowchart showing a process for producing a metal carbide (TiC) according to the fifth embodiment of the present invention.
【図１５】 本発明実施例５の金属炭化物（ＴｉＣ）の
球状粉末成品のＸ線回折パターン。FIG. 15 is an X-ray diffraction pattern of a spherical powder product of metal carbide (TiC) of Example 5 of the present invention.
【図１６】 本発明実施例５の金属炭化物（ＴｉＣ）の
球状粉末成品のＳＥＭ写真。FIG. 16 is an SEM photograph of a spherical powder product of metal carbide (TiC) of Example 5 of the present invention.
１ プラズマフレーム、２ プラズマフレームの加熱
部、３ 原料粉末、４球状粉末成品、１１ プラズマト
ーチ、１２ 石英管、１３ コアガス供給管、１４ シ
ースガス供給管、１５ ガスボンベ、１６ トーチヘッ
ド、１７ 高周波誘導コイル、１８ 水冷ジャケット、
１９ クーリングガス供給管、２０ キャリアガス管、
２１ 原料供給手段、２２ 原料ホッパー、２３ 原料
供給管、２４ 原料供給ノズル、３１ チャンバー、３
２ 円筒部、３３ 回収容器、３４ 上蓋、３５ サイ
クロン、３６ フィルタ、３７ エアポンプ、４０ 高
周波電源、４１ 急冷手段、４２ 冷却ガスノズル、４
３ 冷却ガス供給管、1 plasma flame, 2 heating part of plasma flame, 3 raw material powder, 4 spherical powder product, 11 plasma torch, 12 quartz tube, 13 core gas supply tube, 14 sheath gas supply tube, 15 gas cylinder, 16 torch head, 17 high frequency induction coil, 18 water cooling jacket,
19 cooling gas supply pipe, 20 carrier gas pipe,
21 material supply means, 22 material hopper, 23 material supply pipe, 24 material supply nozzle, 31 chamber, 3
2 cylindrical part, 33 collection container, 34 upper lid, 35 cyclone, 36 filter, 37 air pump, 40 high frequency power supply, 41 rapid cooling means, 42 cooling gas nozzle, 4
3 cooling gas supply pipe,
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｃ０１Ｂ 21/06 Ｃ０１Ｂ 21/06 Ｄ ４Ｋ０１８ 31/30 31/30 Ｃ０１Ｇ 1/02 Ｃ０１Ｇ 1/02 53/04 53/04 // Ｃ０１Ｂ 31/36 ６０１ Ｃ０１Ｂ 31/36 ６０１Ｃ ６０１Ｓ Ｃ３０Ｂ 1/04 Ｃ３０Ｂ 1/04 (72)発明者 横田 誠二 神奈川県平塚市田村5893高周波熱錬株式会 社内 (72)発明者 川嵜 一博 神奈川県平塚市田村5893高周波熱錬株式会 社内 Ｆターム(参考） 4G042 DA01 DB08 4G046 MA09 MA14 MB02 MC01 4G048 AA01 AB01 AB05 AD04 4G075 AA27 BB10 BD14 CA02 CA47 CA62 DA01 DA02 EB01 4G077 AA01 BA04 CA08 JA06 JB02 4K018 AA01 AD01 AD09 AD10 BB03 BC06 ─────────────────────────────────────────────────── ─── Continued Front Page (51) Int.Cl. 7 Identification Code FI Theme Coat (Reference) C01B 21/06 C01B 21/06 D 4K018 31/30 31/30 C01G 1/02 C01G 1/02 53/04 53/04 // C01B 31/36 601 C01B 31/36 601C 601S C30B 1/04 C30B 1/04 (72) Inventor Seiji Yokota 5893 Tamura, Hiratsuka-shi, Kanagawa In-house (72) Inventor, Kawasaki Kaichi Hiroshi Kanagawa Prefecture Hiratsuka City Tamura 5893 High-frequency Heat and Refining Stock Association In-house F-term (reference) 4G042 DA01 DB08 4G046 MA09 MA14 MB02 MC01 4G048 AA01 AB01 AB05 AD04 4G075 AA27 BB10 BD14 CA02 CA47 CA62 DA01 DA01 JA02 JA02 CA01 JA02 CA01 JA02 CA01 JA02 CA01 JA02 CA01 JA02 AD09 AD10 BB03 BC06
Claims (12)
ラズマにより粉末状態で加熱溶融して球状化した中間球
状粉末を、所定ガス雰囲気中で加熱処理して生成するこ
とを特徴とする金属及び金属系化合物の球状粉末成品の
製造方法。1. A metal or a metal-containing compound produced by heat-melting a raw material powder of a metal or a metal-based compound in a powder state by thermal plasma to form an intermediate spherical powder by heating in a predetermined gas atmosphere. A method for producing a spherical powder product of a metal-based compound.
化又は酸化ガスあるいは非酸化ガスのいずれかの単体又
は混合ガス雰囲気中で加熱処理して結晶安定化すること
を特徴とする請求項１に記載の金属及び金属系化合物の
球状粉末成品の製造方法。2. The intermediate spherical powder is heat-treated in a single or mixed gas atmosphere of nitriding, carbonizing, carbonitriding, or oxidizing gas or non-oxidizing gas to stabilize crystals. 1. A method for producing a spherical powder product of a metal or a metal-based compound according to 1.
は混合ガス雰囲気中で加熱処理して生成することを特徴
とする請求項１に記載の金属系窒化物の球状粉末成品の
製造方法。3. The method for producing a spherical powder product of a metal-based nitride according to claim 1, wherein the intermediate spherical powder is produced by heat treatment in a single or mixed gas atmosphere of nitriding gas.
は混合ガス雰囲気中で加熱処理して生成することを特徴
とする請求項１に記載の金属系炭化物の球状粉末成品の
製造方法。4. The method for producing a spherical powder product of a metal-based carbide according to claim 1, wherein the intermediate spherical powder is produced by heat treatment in a simple atmosphere or a mixed gas atmosphere of carbonized gas.
又は混合ガス雰囲気中で加熱処理して生成することを特
徴とする請求項１に記載の金属系炭窒化物の球状粉末成
品の製造方法。5. The production of a spherical powder product of a metal-based carbonitride according to claim 1, wherein the intermediate spherical powder is produced by heat treatment in a simple substance or mixed gas atmosphere of carbonitriding gas. Method.
のいずれかの単体あるいは他ガスとの混合ガス雰囲気中
で加熱処理して生成することを特徴とする請求項１に記
載の金属系酸化物の球状粉末成品の製造方法。6. The metal-based oxidation according to claim 1, wherein the intermediate spherical powder is produced by heat treatment in a single gas of an oxidizing gas or air or in a mixed gas atmosphere with another gas. A method for producing a spherical powder product of a product.
マにより粉末状態で加熱溶融し、球状化して得られた中
間球状粉末を、所定ガス雰囲気中で加熱処理して生成さ
れたことを特徴とする金属及び金属系化合物の球状粉末
成品。7. An intermediate spherical powder obtained by heating and melting a powder of a metal or a metal-based compound in a powder state by thermal plasma and spheroidizing the powder, which is produced by heat treatment in a predetermined gas atmosphere. Spherical powder products of metals and metal compounds.
化又は酸化ガスあるいは非酸化ガスのいずれかの単体又
は混合ガス雰囲気中で加熱処理して生成されたことを特
徴とする請求項７に記載の安定結晶化した金属及び金属
系化合物の球状粉末成品。8. The intermediate spherical powder is produced by heat treatment in a single or mixed gas atmosphere of nitriding, carbonizing, carbonitriding, or oxidizing gas or non-oxidizing gas. A spherical powder product of the stable crystallized metal or metal-based compound according to the item 1.
混合ガス雰囲気中で加熱処理して生成されたことを特徴
とする請求項７に記載の金属系窒化物の球状粉末成品。9. The spherical powder product of a metal-based nitride according to claim 7, wherein the intermediate spherical powder is produced by heating the intermediate spherical powder in a single or mixed gas atmosphere of nitriding gas.
は混合ガス雰囲気中で加熱処理して生成されたことを特
徴とする請求項７に記載の金属系炭化物の球状粉末成
品。10. The spherical powder product of a metal-based carbide according to claim 7, which is produced by heating the intermediate spherical powder in an atmosphere of a single carbon gas or a mixed gas atmosphere.
又は混合ガス雰囲気中で加熱処理して生成されたことを
特徴とする請求項７に記載の金属系炭窒化物の球状粉末
成品。11. The spherical powder product of a metal-based carbonitride according to claim 7, which is produced by heating the intermediate spherical powder in an atmosphere of a carbonitriding gas alone or in a mixed gas atmosphere.
ガス雰囲気中で加熱処理して生成されたことを特徴とす
る請求項７に記載の金属系酸化物の球状粉末成品。12. The spherical powder product of a metal oxide according to claim 7, which is produced by heat-treating the intermediate spherical powder in an oxidizing gas or mixed gas atmosphere.
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| JP2001236105A JP2003049201A (en) | 2001-08-03 | 2001-08-03 | Spherical powder of metal and metallic compound, and manufacturing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001236105A JP2003049201A (en) | 2001-08-03 | 2001-08-03 | Spherical powder of metal and metallic compound, and manufacturing method thereof |
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| JP2003049201A true JP2003049201A (en) | 2003-02-21 |
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| JP (1) | JP2003049201A (en) |
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