JP2003034542A - Device for producing sealed container and method for producing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device and a method for producing sealed containers, capable of realizing a cost reduction and the improvement of the sealing property of sealed containers without taking much time and labor and requiring transfer when producing them. SOLUTION: An opened body 4, which is formed of glass, is softened with the burner 27 of the device for producing sealed containers, while being supported and rotated with a rotatably supporting body. The opened body 4 is pressed with a roller by a forming part 29, thus forming a constricted part 28 having a small diameter. After the interior of the opening body 4 is evacuated with a vacuum pump, the constricted part 28 is heated again with the burner 27, and is melt and sealed so as to form an ampul 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sealed container manufacturing apparatus and a container manufacturing method, and more particularly to a technical field including a manufacturing apparatus and a manufacturing method for manufacturing a sealed container such as an ampoule. Belong to.

[0002]

2. Description of the Related Art In manufacturing a compound semiconductor crystal, a quartz glass ampoule is used. FIG. 6 (f)
As shown in FIG. 3, the ampoule 61 has a relatively large diameter body portion 6
2 is provided, and its tip is generally tapered. The raw material of the crystal is enclosed in the main body 62.

The ampoule 61 is manufactured, for example, as follows. That is, first, as shown in FIG. 6A, a main body 63 and a thin tube 64 having a diameter smaller than the small diameter portion of the main body 63 are prepared. The tip of the main body 63 is open, and the raw material of the crystal is put in the inside thereof in advance. The opening 65 at the tip of the main body 63 and one end of the thin tube 64 are welded to each other by using the burner 66 or the like. That is, the thin tube portion 67 is formed at the tip of the main body 63 (see FIG. 6B).

Next, the main body 63 having the thin tube portion 67 formed therein.
Is moved to and set at a device capable of degassing and introducing a predetermined gas. Therefore, the air in the main body 63 is once sucked from the tip of the thin tube portion 67 (see FIG. 6C), and then an inert gas or the like is introduced (see FIG. 6D). Then, as shown in FIG.
By using 6, etc., a part of the thin tube portion 67 is heated and welded,
Put in a sealed state. After that, by pulling the tip side portion from the sealing portion and applying so-called chip-off, the ampoule 61 described above is manufactured.

[0005]

However, in the above technique, it is necessary to move the main body 63 and the like, and in many cases, each work has to rely on manpower. For this reason, there is a risk that damage such as breakage and deviation of raw materials may occur during movement, and it also takes time to manufacture.

In the above technique, the main body 63 and the thin tube 6 are used.
Since two members such as No. 4 are required, the cost is high, and it is difficult to fuse the both 63 and 64 having different diameters, and there is a possibility that the sealing property is deteriorated.

The present invention has been made in view of the above-mentioned problems, and in manufacturing a sealed container, it does not take time and labor and does not require movement during manufacture, and further, the cost is reduced and the sealing property is improved. It is one of the main objects to provide a manufacturing apparatus and a manufacturing method of a sealed container that can be improved.

[0008]

Means for Solving the Problems and Effects Thereof The characteristic means for achieving the above object will be described below. Also,
Characteristic actions and effects of each means will be described as necessary.

Means 1. Supporting means for supporting a bottomed cylindrical opening having an opening at one end, softening means for softening an outer peripheral portion including a predetermined position of the opening, and inner circumference by applying stress to the softened portion. An apparatus for manufacturing a sealed container, comprising: a molding unit capable of molding a constricted portion that is recessed in a side, and a sealing unit that seals the constricted portion of the opening body.

According to the above means 1, the support means supports the bottomed cylindrical opening having an opening at one end.
The supported opening body has its outer peripheral portion including a predetermined position softened by the softening means. With the opening body supported, stress is applied to the softened portion by the shaping means, and a constricted portion that is recessed on the inner peripheral side is formed. Further, the constricted portion is sealed by the sealing means. In this way, the constricted portion is formed so that the opening cross-sectional area of the portion to be sealed in advance becomes small, whereby the sealing can be facilitated. As described above, since each means for manufacturing the sealed container is provided in one manufacturing apparatus, it is not necessary to prepare a separate apparatus or move the opening body during the manufacturing, and thus the manual operation can be performed. Can be reduced. In addition, since the sealed container can be formed only by the opening body without preparing a separate member, the material cost can be reduced. In addition, the sealing performance will not be deteriorated due to a welding defect when a separate member is welded.

Means 2. A support means for supporting a bottomed cylindrical opening body having an opening at one end, a rotation means capable of rotating the support means about the opening body as a rotation center, and heating a predetermined position of the rotating opening body. Thus, a softening means for softening the outer peripheral portion of the opening body including the predetermined position, and a constricted portion that is depressed toward the inner peripheral side by applying a stress to the softened portion of the rotating opening body in a certain direction. A sealed container comprising: a molding means capable of molding, a sealing means for sealing the constricted portion of the opening body by welding, and a removing means for removing the opening side from the sealed portion. Manufacturing equipment.

According to the above-mentioned means 2, by the supporting means,
A bottomed cylindrical opening body having an opening at one end is supported. The supporting means together with the supported opening body are rotated about the opening body by the rotating means. Then, a predetermined position of the rotating opening body is heated by the softening means, and the outer peripheral portion of the opening body including the predetermined position is softened. Next, stress is applied in a certain direction to the softened portion of the rotating opening body by the shaping means, so that a constricted portion that is recessed on the inner peripheral side is formed. After that, the molded constricted portion is sealed by being welded by the sealing means. At the time of sealing, since the constricted portion is formed, welding can be easily performed. Further, the opening side is removed from the sealed portion by the removing means. Now, since the opening body is rotated in a supported state, it is possible to perform processing on the entire outer periphery of the opening body at a predetermined position by processing the opening body by a softening means, a molding means, etc. Can be sealed. Further, since each means for manufacturing the sealed container is provided in one manufacturing apparatus, it is not necessary to prepare a separate apparatus or move the opening body during manufacturing, which reduces manual work. it can. In addition, since the sealed container can be formed only by the opening body without preparing a separate member, the material cost can be reduced. In addition, the sealing performance will not be deteriorated due to a welding defect when a separate member is welded.

Means 3. The sealing means according to claim 2, wherein the removing means includes a pulling means for pulling the opening side while holding the opening side after or after the sealing by the sealing means. Container manufacturing equipment.

According to the above means 3, when the sealing means is used or after the sealing means, the opening side is pulled while being held, so that the sealing state is maintained and the width becomes thin. The cut part is cut. This makes it possible to manufacture a sealed container from which the opening side has been removed. In particular, when it is pulled when it is sealed by the sealing means, the thinning is promoted and the sealing can be performed more reliably.

Means 4. The apparatus for manufacturing a sealed container according to any one of means 1 to 3, wherein the pressure in the opening body when sealed by the sealing means is set to be lower than the outside air pressure.

According to the above means 4, the pressure in the opening body when sealed by the sealing means can be made lower than the outside air pressure. Therefore, in the case where the constricted portion is in a softened state, and the constricted portion is sealed by the sealing means, the constricted portion is pulled inside the opening body,
The sealing is performed more reliably.

Means 5. The apparatus for manufacturing a sealed container according to any one of claims 1 to 4, further comprising a degassing unit that degass the inside of the opening body before the sealing by the sealing unit.

According to the above-mentioned means 5, the inside of the opening is degassed by the degassing means before the sealing with the sealing means. Thereby, the pressure in the opening body at the time of sealing is made lower than the outside air pressure. Therefore, the function and effect described in the means 4 can be more reliably achieved.

Means 6. The said sealing means is provided with the said softening means, The manufacturing apparatus of the sealed container in any one of the means 1 to 5 characterized by the above-mentioned.

According to the above means 6, the softening means is provided in the sealing means. Therefore, the constricted portion is softened and welded by using the softening means again, and sealing can be performed without providing a separate means.

Means 7. 7. The apparatus for manufacturing a sealed container according to any one of means 1 to 6, further comprising gas supply means for supplying a predetermined gas into the opening body.

According to the above means 7, a predetermined gas is supplied into the opening body by the gas supply means, whereby a sealed container in which the gas is sealed can be manufactured.

Means 8. 8. The apparatus for manufacturing a sealed container according to any one of means 1 to 7, wherein when the forming means applies the stress, the forming means is configured to pull while holding the opening side.

According to the above means 8, when the opening body is stressed by the forming means, the opening body side is pulled while being held. Therefore, in combination with the application of the stress, a desired constricted portion can be easily formed on the outer periphery of the opening body.

Means 9. The forming means includes a roller,
9. The apparatus for manufacturing a sealed container according to any one of means 1 to 8, wherein stress is applied from the roller.

According to the above-mentioned means 9, the forming means is provided with a roller, and by pressing the roller, it is easy to evenly apply stress to the outer circumference of the opening body, so that a more uniform constricted portion is formed. Molded.

Means 10. 10. The apparatus for producing a sealed container according to any one of means 1 to 9, further comprising a hardening means for accelerating hardening by cooling the softened portion.

According to the above means 10, the hardening means cools the softened portion of the opening body, thereby promoting hardening.

Means 11. The opening body is made of glass,
11. The apparatus for manufacturing a sealed container according to any one of means 1 to 10, wherein a raw material of a compound semiconductor crystal is put inside the opening body supported by the supporting means.

According to the above means 11, the opening body is made of glass, and the raw material of the compound semiconductor crystal is put into the inside of the opening body supported by the supporting means, whereby the sealed container in which the raw material is sealed. Can be manufactured.

Means 12. A supporting step of supporting a bottomed cylindrical opening body having an opening at one end, a softening step of softening by heating an outer peripheral portion of the opening body including a predetermined position of the supported opening body, and the supporting Forming step for forming a constricted part that is depressed toward the inner peripheral side by applying stress to the softened part of the open part, and sealing by welding the constricted part of the supported open part A method for manufacturing a sealed container, comprising: a sealing step.

According to the above means 12, in the supporting step, the bottomed cylindrical opening body having an opening at one end is supported. In the softening step, the supported opening body is softened by heating an outer peripheral portion including a predetermined position. Next, in the molding step, stress is applied to the softened portion while the opening body is supported, and a constricted portion that is recessed on the inner peripheral side is formed. Further, in the sealing step, the constricted portion of the supported opening body is welded and sealed. Since the constricted portion is formed at the time of sealing, welding can be easily performed. in this way,
Since the series of steps for manufacturing the sealed container can be performed with the opening body being supported by the supporting step, it is not necessary to move the opening body during the manufacturing process, and the manual work can be reduced. In addition, since the sealed container can be formed only by the opening body without preparing a separate member, the material cost can be reduced. In addition, the sealing performance will not be deteriorated due to a welding defect when a separate member is welded.

Means 13. A supporting step of supporting a bottomed cylindrical opening body having an opening at one end, a rotating step of rotating the opening body around the rotation center, and an outer peripheral portion of the opening body including a predetermined position of the rotating opening body. A softening step of softening by heating, a molding step of forming a constricted part recessed on the inner peripheral side by applying stress in a certain direction to the softened part of the opening body during rotation, and the opening body A method of manufacturing a sealed container, comprising: a sealing step of sealing the necked portion by welding, and a removal step of removing the opening side from the sealed portion.

According to the above means 13, in the supporting step, the bottomed cylindrical opening having an opening at one end is supported. The supported opening body is rotated about the opening body in the rotating step. Then, in the softening step, a predetermined position of the rotating opening body is heated, and the outer peripheral portion of the opening body including the predetermined position is softened. next,
In the molding step, stress is applied in a certain direction to the softened portion of the rotating opening body, so that a constricted portion that is recessed on the inner peripheral side is formed. Then, in a sealing step, the formed constricted portion is welded and sealed. Since the constricted portion is formed at the time of sealing, welding can be easily performed. Further, in the removing step, the opening side is removed from the sealed portion.
Further, since the opening body is rotated in a supported state, by processing the opening body from a certain direction in the softening step, the molding step, etc., it is possible to perform processing on the entire outer periphery of the opening body at a predetermined position. It can be easily sealed. As described above, since the series of steps for manufacturing the sealed container can be performed with the opening body being supported by the supporting step, it is not necessary to move the opening body during the manufacturing, and the manual work can be reduced. In addition, since the sealed container can be formed only by the opening body without preparing a separate member, the material cost can be reduced. In addition, the sealing performance will not be deteriorated due to a welding defect when a separate member is welded.

Means 14. 14. The method for manufacturing a sealed container according to the means 12 or 13, wherein the pressure inside the opening body is set to be lower than the outside air pressure when the sealing container is sealed in the sealing step.

According to the above means 14, the pressure in the opening body at the time of sealing in the sealing step can be made lower than the outside air pressure. Therefore, when the constricted portion is in a softened state, and in the sealing step, when the constricted portion is sealed, the constricted portion is pulled inside the opening body,
The sealing is performed more reliably.

[0037]

BEST MODE FOR CARRYING OUT THE INVENTION The present embodiment will be described below.

First, the ampoule 1 as a sealed container manufactured according to FIG. 4 (a) will be described. Ampoule 1
Is for producing a compound semiconductor crystal and is made of quartz glass. Further, the ampoule 1 includes a large diameter portion 2 and a small diameter portion 3. The ampoule 1 in the present embodiment has a total length of, for example, about 950 mm, the large diameter portion 2 has an outer diameter of 65 mm, and the small diameter portion 3 has an outer diameter of 35 mm.

Inside the ampoule 1 described above, a raw material (not shown) of a compound semiconductor crystal is enclosed. This ampoule 1 is manufactured by processing one opening body 4 as shown in FIG. 4 (b), unlike the conventional technique which is composed of two members. The opening body 4 includes the large diameter portion 2 and the small diameter portion 3, and the tip of the small diameter portion 3 serves as the opening portion 5.

Next, a manufacturing apparatus 6 for manufacturing the ampoule 1 will be described with reference to FIGS. The manufacturing apparatus 6 includes two columns 8 and 9 which are erected vertically.
And a lower movable plate 1 that can move up and down along the columns 8 and 9.
It has 0 and. The lower movable plate 10 includes a lower motor 11
It can be moved up and down. Also, the lower movable plate 1
At 0, a rotary support 13 is provided via a bearing 12.

A support rod 15 having a pedestal 14 at its tip is inserted through a central hole of the rotary support 13.
The support rod 15 is provided between the pedestal 14 and the rotary support 13.
A spring 16 is provided around the. The bottom portion of the opening body 4 is placed on the pedestal 14.

Further, the rotary support 13 has two columns 1
7 and 18 are provided, and chucks 19 capable of sandwiching the intermediate portion in the longitudinal direction of the opening body 4 are provided at the tips of these columns 17 and 18. The chuck 19 has an opening / closing plate 20, and the opening body 4 (ampoule 1) can be attached and detached by opening the opening / closing plate 20.

A rotation motor 25 is provided at the lower end of one of the two columns 8 and 9 so that the column 8 can be rotated by driving the motor 25. Has become. A timing belt 26 is hung on the pillar 8 and the rotary support 13,
The rotation support 13 is rotated in synchronization with the rotation of the column 8. That is, when the motor 25 is driven, the support column 8 is rotated, and the rotation support 13 is also rotated about the support rod 15, and thus the opening body 4 mounted on the pedestal 14 is also rotated. To be made.

Further, the manufacturing apparatus 6 is provided with a burner 27 as a softening means, a molding part 29 as a molding means for molding the constricted part 28 in the softened portion, and a blower 30 as a hardening means. The burner 27 has a cylinder 3
Gas from 1, 32 is supplied. The burner 27 can be moved in the contacting / separating direction at the predetermined height position of the opening body 4 by the burner motor 33.

The molding unit 29 includes a disk-shaped roller 34 and a roller motor 35. The roller 34 can be moved back and forth based on the drive of the roller motor 35, so that the roller 34 is pressed against the outer periphery of the opening body 4 or separated therefrom. A spring (not shown) is provided in the molding portion 29, and the pressing force of the roller 34 against the opening body 4 is adjusted by the elastic repulsive force of the spring. Further, the roller 34 can freely rotate about the support shaft, and while being pressed against the opening body 4, the roller 34 is rotated following the rotating opening body 4.

The blower 30 has the burner 27.
It is provided on the opposite side to and blows air to the softened and molded portion of the opening body 4. By this air blowing, heating and cooling of the softened portion are promoted.

Further, the manufacturing apparatus 6 is provided with an upper movable plate 38 which supports the upper portions of the two columns 8 and 9.
The upper movable plate 38 is vertically movable by an upper motor 39. A head portion 41 is rotatably provided on the upper movable plate 38 via a bearing 40.

The head portion 41 and the rotating column 8
A timing belt 42 is hung on. Therefore, the head portion 41 rotates in synchronization with the rotation of the column 8. Further, the head portion 41 has a hole 43 that penetrates vertically. Around the bottom of the hole 43,
A seal rubber 44 is provided, and the lower portion of the hole 43 and the opening 5 of the opening body 4 can be connected to each other while being isolated from the outside.

On the other hand, in the upper part of the hole 43 of the head portion 41,
Fixing part 4 located on the base end side of the gas inlet / outlet duct 45
6 is installed via a bearing 47. Therefore, the head portion 41 is rotatable with respect to the fixed portion 46.

The tip side of the duct 45 is branched and connected to a vacuum pump 51 as a deaeration means and a gas cylinder 52 as a gas supply means. Then, the vacuum pump 51 degass the inside of the opening body 4. Further, argon gas is supplied from the gas cylinder 52. Duct 4
A switching valve (not shown) is provided at the branch portion of 5, and the degassing and the supply of argon gas can be switched by adjusting the switching valve.

Each motor 11, 25, 33, 35, 3
9, the drive of the blower 30, the pump 51, the adjustment of the switching valve, etc. can be controlled by the control device installed in the control panel 53.

Next, with reference to FIG. 5 and the like, a method of manufacturing the ampoule 1 using the manufacturing apparatus 6 having the above-described structure and its function and effect will be described. First, by driving the upper motor 39, the upper movable plate 38 is moved according to the length of the opening body 4. Then, the head portion 41 is appropriately moved in the vertical direction along with the upper movable plate 38. Next, the upper portion of the opening body 4 is inserted into the lower portion of the head portion 41. At this time, since the seal rubber 44 of the head portion 41 covers the periphery of the opening 5 of the opening body 4, the airtightness between the head portion 41 and the opening body 4 is maintained.

Further, by driving the lower motor 11, the lower movable plate 10 is raised to a predetermined position.
Then, the rotary support 13 is moved upward along with the lower movable plate 10, so that the opening 4 is placed on the pedestal 14. Next, the opening / closing plate 20 of the chuck 19 is closed and the opening body 4 is sandwiched, whereby the opening body 4 is installed on the rotation support body 13. A raw material of a compound semiconductor crystal is put in the opening body 4 in advance.

Next, by driving the rotation motor 25, the column 8 is rotated. Then, the pillar 8
The timing belts 26 and 42 hung around the belt are rotated, and the rotary support 13 and the head portion 41 are synchronously rotated. At this time, the opening body 4 is rotated together with the rotation support body 13 and the head portion 41.

As described above, with the opening body 4 being rotated, the burner motor 33 causes
As shown in (a), the burner 27 is moved toward the opening body 4. The burner 27 heats and softens the outer circumference of the small diameter portion 3 of the opening body 4 at a predetermined height position. After softening, the burner 27 turns into the burner motor 33.
Is moved in a direction away from the opening body 4.

Next, as shown in FIG. 5B, the opening 4
While the rotation of the roller continues, the roller motor 35
Is driven to move the molding unit 29 in a direction approaching the opening body 4. Then, the roller 34 is pressed against the softened portion of the opening body 4. Since the roller 34 is rotated following the opening body 4 and the pressing force against the opening body 4 is adjusted by the spring, a substantially uniform stress is applied to the outer circumference of the opening body 4. To be

At the time of such pressing, by driving the upper motor 39, the upper movable plate 38 is slightly raised, and accordingly, the opening body 4 is pulled slightly upward.
Then, together with the pressing, the constricted portion 28 is easily formed on the outer circumference of the small diameter portion 3 of the opening body 4. At this time,
The position and pressing force of the roller 34 and the upper movable plate 38 are set in advance so that the minimum inner diameter of the constricted portion 28 is about 2 to 3 mm.
And the amount of increase of are set. After the constricted portion 28 is molded, the molding portion 29 is moved by the roller motor 35 in the direction away from the opening body 4. At the time of the separation, the rising of the upper movable plate 38 is stopped.

Further, air is blown from the blower 30 to the constricted portion 28 of the opening body 4. Then, the constricted portion 28 in the softened state is cooled. As a result, the softened portion is quickly hardened.

Then, as shown in FIG. 5C, the vacuum pump 51 is operated to degas the head portion 41 through the duct 45 until the pressure in the opening body 4 reaches a predetermined pressure. Note that cooling and deaeration may be performed at the same time in order to further reduce the manufacturing time.

Next, the switching valve is controlled to switch, as shown in FIG.
As shown in FIG.
Will be introduced in. However, the pressure in the opening body 4 after introducing the argon gas is set to a pressure slightly lower than the outside air pressure of the opening body 4, for example, 71 kPa.

Then, while maintaining the above pressure, as shown in FIG.
As shown in (e), the burner motor 33 is again moved to move the burner 27 in a direction approaching the opening body 4. By the movement, the flame of the burner 27 is applied to the constricted portion 28 of the rotating opening body 4, and the constricted portion 28 is heated and softened again. At this time, the waist 28
The inner diameter of is very small as mentioned above, the softened part is deformed without applying external stress,
It is welded. The welding is performed more reliably because the pressure inside the opening body 4 is lower than the outside air pressure of the opening body 4 and the softened portion is drawn inside the opening body 4. In this way, the softened portion can be surely brought into contact with each other, and the opening body 4 can be sealed.
After the sealing, the burner 27 is moved by the burner motor 33 in the direction away from the opening body 4.

Further, while the opening body 4 is in the softened state,
By driving the upper motor 39, the upper movable plate 3
8 is raised, and the upper end of the opening body 4 is pulled upward. Then, the opening 4 is cut while the softened portion extends and becomes thin while maintaining the sealed state. As a result, the upper side of the constricted portion 28 is removed, and the sealed ampoule 1 is completed (see FIG. 5 (f)).

As described in detail above, according to the present embodiment, all the series of steps can be automatically carried out by one manufacturing apparatus 6, so that the labor of the work by a person can be saved. Moreover, since the opening body 4 is not moved while being installed in the manufacturing apparatus 6 and then sealed,
It is possible to suppress the occurrence of problems such as damage during movement and deviation of the raw material in the opening body 4.

Further, even if the diameter of the sealed portion of the opening body 4 is large, the constricted portion 28 having a small inner diameter can be relatively easily molded by the molding portion 29. There is no need to prepare it separately. Therefore, it is possible to reduce the material cost by using one member instead of using two members as in the conventional case. In addition, unlike the conventional case, the sealing performance is not deteriorated due to a welding defect when the two members are welded, so that the sealed state of the ampoule 1 can be reliably maintained.

It should be noted that the present invention is not limited to the contents described in the above embodiment, but may be carried out as follows, for example.

(A) The thickness of the large diameter portion 2 and the small diameter portion 3 of the opening body 4 is not particularly limited to the above-mentioned diameter. Further, in the above-described embodiment, the large diameter portion 2 is thicker than the small diameter portion 3, but both may have the same thickness.

(B) The material of the opening body 4 is not limited to quartz glass, but other glass may be used.

(C) In the above embodiment, the burner 27,
The ampoule 1 is adapted to rotate with respect to the molding part 29 and the blower 30, but the opening body 4 is fixed and the burner 2 is fixed.
7, the molding part 29 and the blower 30 may be rotated around the opening body 4.

(D) Although the gas is introduced after the inside of the opening body 4 is degassed, the gas may not be introduced.

(E) The gas introduced into the opening 4 is not limited to the argon gas, but may be another inert gas or another gas such as hydrogen gas.

(F) In the above-mentioned embodiment, the opening 4 is supported in the vertical direction, but the supporting direction may be changed within the allowable range such as the horizontal direction.

(G) In the above embodiment, the manufacturing apparatus 6
Is an apparatus for producing the ampoule 1 used in the process of producing a compound semiconductor crystal, but is applied to an apparatus for producing other sealed containers such as an ampoule for diffusing impurities into a semiconductor wafer. May be.

(H) The roller 34 may have any shape as long as it can form the constricted portion 28, and its cross-sectional shape is not particularly limited. For example, the edge may have a curved surface or a wedge shape. May be.

(I) In the above embodiment, the constricted portion 28.
Although the upper movable plate 38 is slightly raised in the above-described molding, the constricted portion 28 may be formed mainly by the roller 34 without performing such raising.

[Brief description of drawings]

FIG. 1 is a side view showing a schematic configuration of an apparatus for manufacturing a sealed container according to an embodiment.

FIG. 2 is a plan view showing a schematic configuration of an apparatus for manufacturing a sealed container.

FIG. 3 is a cross-sectional view showing a partial configuration of a sealed container manufacturing apparatus.

4A is a schematic diagram showing an ampoule as a sealed container, and FIG. 4B is a schematic diagram showing an opening body.

5A to 5F are process diagrams for explaining the flow of manufacturing the sealed container.

FIG. 6A to FIG. 6F are process drawings for explaining a flow of manufacturing a conventional sealed container.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Ampoule as a sealing container, 2 ... Large diameter part, 3 ... Small diameter part, 4 ... Opening body, 5 ... Opening part, 6 ... Manufacturing device, 10 ... Lower movable plate, 13 ... Support means and rotation means Rotation support, 14 ... Pedestal, 19 ... Chuck, 27 ... Burner as softening means, 28 ... Constricted part, 29 ... Molding part as molding means, 30 ... Blower as hardening means, 34 ... Roller, 38 ... Top Movable plate, 41 ... Head part, 43 ... Hole,
45 ... Duct, 46 ... Fixed part, 51 ... Vacuum pump as degassing means, 52 ... Gas cylinder as gas supply means, 53 ... Control panel.

Claims (14)

[Claims] 1. A support means for supporting a bottomed cylindrical opening body having an opening at one end, a softening means for softening an outer peripheral portion including a predetermined position of the opening body, and a stress applied to the softened portion. An apparatus for manufacturing a sealed container, comprising: a molding unit capable of molding a constricted portion that is recessed toward the inner peripheral side thereof, and a sealing unit that seals the constricted portion of the opening body. 2. A support means for supporting a bottomed cylindrical opening body having an opening at one end, a rotating means capable of rotating the support means around the opening body as a rotation center, and a rotating means for rotating the opening body. A softening means for softening an outer peripheral portion of the opening body including the predetermined position by heating the predetermined position, and a stress is applied to the softened portion of the rotating opening body in a certain direction to the inner peripheral side. A molding means capable of molding a recessed constricted portion, a sealing means for sealing the constricted portion of the opening body by welding, and a removing means for removing the opening side from the sealed portion. A manufacturing device for a sealed container. 3. The removing means comprises a pulling means for pulling while holding the opening side when or after being sealed by the sealing means. The manufacturing apparatus of the sealed container according to. 4. The sealed container according to any one of claims 1 to 3, wherein the pressure in the opening body when sealed by the sealing means is set to be lower than the outside air pressure. Manufacturing equipment. 5. The sealing according to claim 1, further comprising a degassing unit for degassing the inside of the opening body at a stage before the sealing by the sealing unit. Container manufacturing equipment. 6. The apparatus for manufacturing a sealed container according to claim 1, wherein the sealing unit includes the softening unit. 7. The apparatus for manufacturing a sealed container according to claim 1, further comprising gas supply means for supplying a predetermined gas into the opening body. 8. The sealed container according to any one of claims 1 to 7, wherein when the forming means applies the stress, the forming means is pulled while holding the opening side. Manufacturing equipment. 9. The apparatus for manufacturing a sealed container according to claim 1, wherein the molding unit includes a roller, and stress is applied from the roller. 10. The apparatus for manufacturing a sealed container according to claim 1, further comprising a curing unit that accelerates curing by cooling the softened portion. 11. The opening body is made of glass, and a raw material of a compound semiconductor crystal is placed inside the opening body supported by the supporting means.
An apparatus for manufacturing a sealed container according to any one of 1. 12. A supporting step of supporting a bottomed cylindrical opening body having an opening at one end, and a softening for softening by heating an outer peripheral portion of the opening body including a predetermined position of the supported opening body. A step of forming a constricted part that is recessed toward the inner peripheral side by applying stress to the softened part of the supported opening, and welding the constricted part of the supported opening. The manufacturing method of the sealing container provided with the sealing process which seals by that. 13. A supporting step of supporting a bottomed cylindrical opening body having an opening at one end, a rotating step of rotating the opening body as a rotation center, and an opening including a predetermined position of the rotating opening body. A softening step of softening the outer peripheral portion of the body by heating, and a molding step of forming a constricted recessed portion on the inner peripheral side by applying stress to the softened portion of the rotating opening body in a certain direction. A method for manufacturing a sealed container, comprising: a sealing step of sealing the constricted portion of the opening body by welding, and a removal step of removing the opening side from the sealing portion. 14. The sealed container manufacturing method according to claim 12, wherein the pressure in the opening body is lower than the outside air pressure when the sealing container is sealed in the sealing step. Method.