JP2003021662A - Cdm testing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the problem that an atmospheric temperature and a humidity under a test work can not be set freely in a conventional CDM testing device. SOLUTION: This CDM testing device 10 is equipped with a table 14 for loading a work 13 replaceably, a voltage application part 20 for applying a voltage for generating discharge between itself and the work 13, and a cover 22 for covering the voltage application part 20 and the table 14. The device is also equipped with a temperature adjusting means for setting a working space 23 enclosed by the cover 22 at a prescribed temperature, a humidity adjusting means for setting the working space 23 at a prescribed humidity, a heat insulating member disposed to enclose the working space 23, a transparent work confirmation window 24 formed on a part of the cover 22, a condensation preventing means relative to the work confirmation window 24, a drainage hole 26 formed on the floor surface and facing to the working space 23, and a drainage channel 27 for draining waterdrops accumulated in the working space 23 from the drainage hole 26 to the outside of the working space 23.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a CDM tester used for an electrostatic discharge test of semiconductor devices.

[0002]

2. Description of the Related Art A CDM tester is one of the devices for inspecting the dielectric strength of a semiconductor device. CDM (Charged Device
Model) is a device charging model which is one of the electrostatic discharge models, and this model is a device in which the device itself is charged and discharged when it contacts an external metal object or the like.

FIG. 3 shows the appearance of a conventional CDM test apparatus. That is, the semiconductor device 1 to be subjected to the CDM test is placed on the table 2, and these are covered with the cover 3 to ensure the safety of the operator. Then, a voltage is applied to the voltage applying section 4 to cause electrostatic discharge between the voltage applying unit 4 and the semiconductor device 1, and thus the insulation resistance of the semiconductor device 1 is inspected.
Usually, such a CDM test apparatus 5 is performed indoors, and therefore temperature, humidity, etc. depend on the atmosphere in the room where the CDM test apparatus 5 is placed.

[0004]

As described above, as shown in FIG.
Since the working environment of the conventional CDM test apparatus 5 shown in Fig. 2 depends on the temperature and humidity of the room in which it is placed, a CDM test is performed in summer and winter, or a CDM test is performed in fine weather and rain. , CDM under different temperature and humidity environment
When the test is performed, even if the same voltage is applied to the same semiconductor device 1, the reproducibility of the test result is often not obtained, which causes a problem that the reliability of the test result by the CDM test apparatus 5 is impaired. ing. This is because the magnitude of the air discharge generated between the semiconductor device 1 and the voltage application unit 4 of the CDM test device 5 depends on the temperature and humidity atmosphere, and the breakdown voltage level of the semiconductor device 1 changes. it is conceivable that.

C in the manufacturing process of the semiconductor device 1
In many cases, the temperature / humidity environment at the time of failure due to DM and the temperature / humidity environment at the time of the CDM test using the CDM test apparatus 5 were different, and the reproducibility regarding the failure due to the CDM was poor.

From the above, it is conceivable to adjust the temperature and humidity of the room in which the CDM test device 5 is placed by using an air conditioner, but in this case, until the temperature and humidity of the room are set to a predetermined value. It takes a very long time and is not efficient, and the temperature and humidity to be set are not the preferable temperature and humidity conditions for the worker in most cases, and the work environment for the worker may deteriorate.

[0007]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a CDM tester which can easily adjust the environment in which a CDM test is performed to any temperature and humidity without changing the working environment for workers.

[0008]

According to the present invention, there is provided a base on which a floor surface is formed, a table provided on the base and on which works can be exchangeably mounted, and a work arranged above the table. A CDM test apparatus comprising: a voltage applying unit having a discharge electrode to which a voltage for generating a discharge is applied; and a cover installed on the base so as to cover the voltage applying unit and the table. There are temperature adjusting means for setting a predetermined temperature in the work space surrounded by the cover, humidity adjusting means for setting a predetermined humidity in the work space, and are arranged so as to surround the work space. A heat insulating member, a transparent work confirmation window formed in a part of the cover, dew condensation prevention means for the work confirmation window, a drain port formed on the floor surface and facing the work space, Be Drainage channel for discharging water droplets formed in the work space, one end of which communicates with the drain port and the other end side of which is guided to the outside of the working space and which accumulates in the working space, from the drain port to the outside of the working space. It is characterized by further including and.

In the present invention, the inside of the working space surrounded by the cover is adjusted to the desired temperature and humidity by the temperature adjusting means and the humidity adjusting means regardless of the outside air temperature and the humidity thereof, and the working environment is kept constant. The CDM test of the work is performed. The work space is thermally shielded from the outside air by a heat insulating member, but depending on work conditions, dew condensation may occur inside and flow down to the floor surface. Water droplets due to dew condensation are discharged from the drainage port on the floor through the drainage channel to the outside of the work space, and the humidity in the work space is smoothly adjusted.

The work state can be confirmed through the work confirmation window. Even if the above-mentioned dew condensation occurs, it is possible to always confirm the work state through the work confirmation window by the dew condensation prevention means.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION A CDM test apparatus according to the present invention further comprises a housing for accommodating a temperature adjusting means and a humidity adjusting means, a part of which faces a working space, and the working space covers a part of this housing and a cover. It may be formed by and. In this case, it is preferable that the heat insulating member is lined in a part of the housing.

The temperature adjusting means may have a heating means for heating the working space and a cooling means for cooling the working space.

It is preferable that the heat insulating member is incorporated in the base so as to be located on the back side of the floor and is lined with the cover.

The dew condensation preventing means may have a heating wire incorporated in the work confirmation window.

It is preferable that the floor surface is inclined downward toward the drainage port.

The work may be an electronic component.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the CDM test apparatus according to the present invention will be described in detail with reference to FIG. 1 showing its schematic structure and FIG. 2 showing its control block, but the present invention is only such an embodiment. Not limited to the above, all changes and modifications included in the concept of the present invention described in the scope of claims are possible, and thus can be naturally applied to other techniques belonging to the spirit of the present invention.

A table 14 on which a work 13 such as a semiconductor device is replaceably mounted, a heater 15, a cooler 16, a humidifier 17, and a control section 18 thereof are mounted on a base 12 having a floor surface 11. The heating device 15, the cooling device 16, the humidifying device 17, the control unit 18, etc. are accommodated in the housing 19 whose lower end is attached to the base 12 and are protected from the outside. Therefore, the humidifier 17 is supplied with pure water from the outside through a pipe (not shown). Immediately above the table 14 is provided a voltage application unit 20 having a discharge electrode (not shown) to which a voltage for generating discharge between the work 13 and the work 13 is provided. It is in a state of protruding from the portion 21. The cover 22, which comes into contact with the outer peripheral edge of the side wall portion 21 of the housing 19 in a sealed state, is detachably mounted on the base 12 so as to cover the table 14 and the voltage application portion, and is a work space internal to the outside. Hold 23 tightly. An insulating material (not shown) is lined on the inner peripheral surface of the cover 22, and a part of the cover 22 is transparent so that the work 13 mounted on the table 14 can be observed from the outside from the outside. A work confirmation window 24 is provided. An electric heating film or a heating wire (not shown) is incorporated in the work confirmation window 24 to ensure that the work confirmation window 24 is not fogged by dew condensation. Housing 19 facing work space 23
A temperature / humidity sensor 25 for detecting the temperature and humidity in the work space 23 is provided on the side wall 21 of the work space 23. An output signal from the temperature / humidity sensor 25 is transmitted to the control unit 18, and the output signal is output. The work space 23 is maintained at a predetermined temperature and humidity by the feedback from.

The above-mentioned heater 1 housed in the housing 19.
5, the cooler 16, the humidifier 17, the control unit 18, and the temperature / humidity sensor 25 constitute the temperature adjusting means and the humidity adjusting means in the present invention, and include the floor surface 11 of the base 12, the cover 22, and the housing 19. The temperature and humidity in the closed working space 23 surrounded by the side wall portion 21 of the
It can be adjusted via 1.

On the floor surface 11 facing the work space 23, a drain port 26 for discharging water droplets due to dew condensation generated in the work space 23 to the outside is formed, and the drain port 26 of the cover 22 is formed. It communicates with one end of a drainage channel 27 formed at the outer edge of the base 12 along the lower end. The other end of the drainage channel 27 is connected to a drainage pipe (not shown) whose end is guided to the outside of the room where the CDM inspection device 10 is installed. Floor 1 of base 12 facing working space 23
1 is inclined toward the above-described drainage port 26, and similarly, the drainage channel 27 is also inclined downward with respect to the horizontal plane toward the other end side, and water drops generated in the working space 23 are utilized by utilizing gravity. The drainage channel 27 can be smoothly flowed down to the other end side.

As described above, regardless of the temperature and humidity of the room where the CDM test apparatus 10 is placed, the work space 2 is very limited.
By adjusting the temperature and humidity inside 3, the workability of the CDM test is remarkably improved, and the work environment can be changed in a short time to quickly perform the test.

[0022]

According to the CDM test apparatus of the present invention, the temperature adjusting means for setting a predetermined temperature in the working space surrounded by the cover, and the humidity adjusting means for setting a predetermined humidity in the working space, A heat insulating member arranged so as to surround the work space, a transparent work confirmation window formed in a part of the cover, dew condensation prevention means for the work confirmation window, and a work surface formed on the floor A drainage channel formed in the drainage port and the base, one end of which communicates with the drainage port and the other end of which is guided to the outside of the work space and drains water droplets accumulated in the work space from the drainage port to the outside of the work space. Since the and are provided, the workability can be remarkably improved as compared with the case where the temperature and humidity of the room in which the CDM test apparatus is installed, and the work environment can be changed in a short time.
The test can be done quickly. Further, the temperature and humidity conditions of the working environment can be held constant regardless of the outside air, and the test can be performed, the deviation accompanying the measurement result of the breakdown voltage level of the semiconductor device by the CDM test device can be mitigated, and the semiconductor device can be manufactured. In the process, it is possible to perform a test in the same environment as when a CDM failure occurs, and improve the CDM failure reproducibility.

When a housing for housing the temperature adjusting means and the humidity adjusting means and a part of which faces the working space is provided, and the working space is formed by part of this housing and the cover, the entire apparatus is made compact. can do.

When the heat insulating member is lined in a part of the housing, the working space can be more reliably shielded from the outside air.

When the temperature adjusting means has a heating means for heating the working space and a cooling means for cooling the working space, the working space should be set to an arbitrary temperature regardless of the outside air temperature. You can

When the heat insulating member is installed in the base so as to be located on the back side of the floor and is lined with the cover, the working space can be more reliably shielded from the outside air.

When the dew condensation preventing means has a heating wire incorporated in the work confirmation window, when the floor surface is inclined downward toward the drainage port, the water droplets can be reliably guided to the drainage port side. Therefore, the humidity can be adjusted more smoothly.

[Brief description of drawings]

FIG. 1 is a perspective view showing the appearance of an embodiment of a CDM test apparatus according to the present invention.

FIG. 2 is a control block diagram of the embodiment shown in FIG.

FIG. 3 is a perspective view showing the appearance of an example of a conventional CDM test apparatus.

[Explanation of symbols]

10 CDM test equipment 11 floor 12 base 13 work 14 tables 15 heater 16 Cooler 17 Humidifier 18 Control unit 19 housing 20 Voltage application section 21 Side wall 22 cover 23 workspace 24 Work confirmation window 25 temperature and humidity sensor 26 Drainage port 27 drainage

Claims (8)

[Claims] 1. A base on which a floor surface is formed, a table provided on the base on which a work is exchangeably mounted, and a work disposed above the table to generate a discharge between the work and the work. C, which has a voltage applying section having a discharge electrode to which the voltage is applied, and a cover installed on the base so as to cover the voltage applying section and the table.
A DM test apparatus, wherein temperature adjusting means for setting a predetermined temperature inside a work space surrounded by the cover, humidity adjusting means for setting a predetermined humidity inside the work space, and surrounding the work space And a transparent work confirmation window formed in a part of the cover, dew condensation prevention means for the work confirmation window, drainage formed on the floor surface and facing the work space A mouth and the base, one end of which communicates with the drain port and the other end of which is guided to the outside of the working space and drains water droplets accumulated in the working space from the drain port to the outside of the working space. A CDM test apparatus further comprising a drainage channel for 2. A housing for accommodating the temperature adjusting means and the humidity adjusting means, a part of which faces the working space, the working space being formed by the part of the housing and the cover. CD according to claim 1, characterized in that
M test equipment. 3. The C according to claim 2, wherein the heat insulating member is lined on the part of the housing.
DM test equipment. 4. The temperature adjusting means has a heating means for heating the inside of the work space and a cooling means for cooling the inside of the work space. The CDM test apparatus according to Crab. 5. The heat insulating member is incorporated into the base so as to be located on the back side of the floor surface, and is lined with the cover, according to any one of claims 1 to 4. CDM test equipment. 6. The CDM test apparatus according to claim 1, wherein the dew condensation prevention unit has a heating wire incorporated in the work confirmation window. 7. The floor according to claim 1, wherein the floor surface inclines downward toward the drainage port.
The CDM test apparatus according to any one of 1. 8. The CDM test apparatus according to claim 1, wherein the work is a semiconductor device.