JP2003019868A5 - - Google Patents

Description

[0015]
That is, on the substrate, in order from the incident direction of recording / reproducing light, the first protective layer, the phase change recording layer with a thickness of 5 nm to 25 nm, the second protective layer, a thickness of 40 nm to 300 nm, and volume resistance A reflective layer with a rate of 20 nΩ · m or more and 150 nΩ · m or less,
An optical information recording medium for recording information with a plurality of recording mark lengths having a shortest mark length of 0.5 μm or less, with the crystal part of the recording layer in an unrecorded / erased state and in the amorphous part as a recorded state. ,
The recording layer is a thin film containing a Ge _y (Sb _x Te _{1 -x} ) _1-y ( 0.7 ≦ x ≦ 0.9, 0 <y ≦ 0.1) alloy as a main component.
When the recording layer is continuously irradiated with recording light of a recording power Pw sufficient to melt the recording layer at a constant linear velocity, the crystallization speed at re-solidification is so high that the crystallization is generally performed, and the recording power Pw is The present invention resides in an optical information recording medium characterized in that an amorphous mark is formed when it is interrupted momentarily.

[0016]
The second aspect of the present invention resides in a preferred optical recording method for use in combination with the above-mentioned medium.
The third aspect of the present invention is that the recording area is divided into p zones having a predetermined recording area, and the recording area is equally wide in the radial direction, and the information is rotated by rotating at a constant angular velocity regardless of the radial position. An optical information recording medium for recording with a plurality of mark lengths, comprising:
A groove having a predetermined groove meandering signal is formed on the substrate, and the reference period of the groove meandering signal changes for each zone, and an average line in the qth zone (where q is an integer of 1 ≦ q ≦ p). Assuming that the velocity is <v _q > _ave , the maximum linear velocity is <v _q > _max , the minimum linear velocity is <v _q > _min , and the reference period of the groove meander signal is Tw _q ,
<V _q > _ave Tw _q is approximately constant for all _q where 1 ≦ q ≦ p,
(<V _q > _max − <v _q > _min ) / (<v _q > _max + <v _q > _min ) <1% is satisfied
An optical information recording medium characterized in the present invention.
According to a fourth aspect of the present invention, there is provided a recording area, wherein the recording area is divided into p zones having an even width in the radial direction (where p is an integer of 200 or more), An optical information recording medium for recording information at a plurality of mark lengths by rotating at a constant angular velocity regardless of the distance
A groove having a predetermined groove meandering signal is formed on the substrate, and the reference period of the groove meandering signal changes for each zone, and an average line in the qth zone (where q is an integer of 1 ≦ q ≦ p). Assuming that the velocity is <v _q > _ave and the reference period of the groove meander signal is Tw _q , <v _q > _ave Tw _q is constant.
An optical information recording medium characterized in the present invention.
A fifth aspect of the present invention is a method of manufacturing a stamper to which a phase modulated wobble signal is applied by groove meandering.
Laser beam for photoresist exposure is meandered in the radial direction according to a wobble waveform which is binary phase-modulated between voltages of ± Vw to expose the photoresist layer formed on the glass master,
In the above process, meandering of the laser light for photoresist exposure is performed by applying a ring modulator output wave to an EO modulator.
It belongs to a method of manufacturing a stamper master.

Claims (23)

The first protective layer, the phase change recording layer with a thickness of 5 nm or more and 25 nm or less, and the second protective layer, with a thickness of 40 nm or more and 300 nm or less, in order from the incident direction of recording / reproducing light A reflective layer of 20 nΩ · m or more and 150 nΩ · m or less,
An optical information recording medium for recording information with a plurality of recording mark lengths having a shortest mark length of 0.5 μm or less, with the crystal part of the recording layer in an unrecorded / erased state and in the amorphous part as a recorded state. ,
The recording layer is a thin film containing a Ge _y (Sb _x Te _{1 -x} ) _1-y ( 0.7 ≦ x ≦ 0.9, 0 <y ≦ 0.1) alloy as a main component.
When the recording layer is continuously irradiated with recording light of a recording power Pw sufficient to melt the recording layer at a constant linear velocity, the crystallization speed at re-solidification is so high that the crystallization is generally performed, and the recording power Pw is An optical information recording medium characterized in that an amorphous mark is formed when it is interrupted momentarily. The recording layer further contains at least one of Ga, Sn, In, Si, Al, Pt, Pb, Cr, Co, Ta, Nb, V, and Ag as an additive element,
2. The optical information recording medium according to claim 1, wherein the total addition amount of the additional element is 10 atomic% or less, and the total addition amount of Ge and the additional element is 15 atomic% or less. The optical information recording medium according to claim 1 or 2,
When the signal is recorded by a plurality of mark lengths of the shortest mark length of 0.5 μm or less, the modulation degree of the signal reproduced immediately after the recording is M ₀ ,
Assuming that the modulation degree of a signal reproduced after 1000 hours has passed under the conditions of 80 ° C. and 80% RH after recording, M ₁ :

A medium for optical information recording. In recording information on the optical information recording medium according to any one of claims 1 to 3 ,
Between the recording marks, a recording light of erasing power Pe capable of crystallizing amorphous is irradiated,
Assuming that the time length of one recording mark is nT (T is a reference clock cycle, n is an integer of 2 or more),
The time length nT of the recording mark,

(Where m is the number of pulse divisions and m = n−k, k is an integer such that 0 ≦ k ≦ 2).
Further, the _{Σ i (α i + β i} ) + η 1 + η 2 = n, η 1 is eta ₁ ≧ 0 becomes real, eta ₂ is eta ₂ ≧ 0 becomes real, and _{0 ≦ η 1 + η 2 ≦} 2.0 .
_{α i (1 ≦ i ≦ m} ) is the alpha _i> 0 becomes _{real, β i (1 ≦ i ≦} m) is a beta _i> 0 becomes real, and Σα _i <0.5n.
With α ₁ = 0.1 to 1.5, β ₁ = 0.3 to 1.0, β _m = 0 to 1.5, and α _i = 0.1 to 0.8 (2 ≦ i ≦ m) Do.
In addition, in i which is 3 ≦ i ≦ m, α _i + β _{i -1} is in the range of 0.5 to 1.5, and is constant regardless of i. )
Split in order of
In the time of α _i T (1 ≦ i ≦ m), the recording light of the recording power Pw of Pw ≧ Pe for melting the recording layer is irradiated, and in the time of β _i T (1 ≦ i ≦ m) Optical recording of an optical information recording medium characterized by irradiating recording light of a bias power Pb such that 0 <Pb ≦ 0.2 Pe (however, 0 ≦ Pb ≦ Pe can be satisfied in β _m T) Method. Α regardless of the recording linear velocity _i + Β _i-1 = 1.0 (3 i i m m), Pb, Pw, Pe / Pw ratio, α _i , Β ₁ , Β _m Is variable according to the recording linear velocity, and the lower the recording linear velocity is at least α _i 5. The optical recording method according to claim 4, wherein (i is at least one of 2 ≦ i ≦ m) is monotonously decreased. An optical recording method of condensing light having a wavelength of 350 to 680 nm on a recording layer through an objective lens having a numerical aperture NA of 0.55 to 0.9, and recording and reproducing data,
m = n-1 or m = n-2,
α ₁ = 0.3 to 1.5,
α ₁ αα _i = 0.2 to 0.8 (2 i i m m),
α _i + β _i-1 = 1.0 (3 ≦ i ≦ m),
0 ≦ Pb ≦ 1.5 (mW),
0.3 ≦ Pe / Pw ≦ 0.6
The optical recording method according to claim 4 or 5 , wherein Light having a wavelength of 600 to 680 nm passes through an objective lens with a numerical aperture NA of 0.55 to 0.65, is focused on the recording layer through the substrate, and the shortest mark length is in the range of 0.35 to 0.45 μm As an optical recording method for recording and reproducing data,
n is an integer of 1 to 14,
Let m = n-1
Pb is constant regardless of the linear velocity ,
(I) In the recording linear velocity range of 3 to 4 m / s, the reference clock period T is To,
α ₁ = 0.3 to 0.8,
α ₁ αα _i = 0.2 to 0.4 and constant regardless of i (2 2 i i m),
α ₂ + β ₁ 1.01.0,
α _i + β _i-1 = 1.0 (3 ≦ i ≦ m),
With β _m = 0.3 to 1.5,
In the time of α _i T (1 ≦ i ≦ m), the recording light of the recording power Pw ₁ is irradiated,
(Ii) In the recording linear velocity range of 6 to 8 m / s, the reference clock period T is set to To / 2,
α ' ₁ = 0.3 to 0.8,
α ′ ₁ αα ′ _i = 0.3 to 0.5 and is constant regardless of i (2 ≦ i ≦ m),
α ′ _i + β ′ _i−1 = 1.0 (3 ≦ i ≦ m),
Let β ' _m = 0 to 1.0,
Assuming that the recording light of the recording power Pw ₂ is irradiated within the time of α _i T (1 ≦ i ≦ m),
The optical recording method according to any one of claims 4 to 6, wherein α ' _i > α _i (2 ≦ iim) and 0.8 ≦ Pw ₁ / Pw ₂請求 1.2. A method of rotating an optical information recording medium having a predetermined recording area at a constant angular velocity and recording information with a plurality of mark lengths ,
The recording area comprises a plurality of zones divided by a radius, and the recording method changes the reference clock cycle T so that the recording density becomes substantially constant according to the average linear velocity in each zone,
Let m be constant regardless of the zone,
The optical recording method according to any one of claims 4 to 7 , wherein Pb / Pe and / or α _i (i is at least one of 1 単 調 i 単 調 m) is monotonously decreased from the outer peripheral zone toward the inner peripheral zone. . The recording area is divided into p zones according to the radius, with the innermost circumferential side as the first zone and the outermost circumferential side as the pth zone, and the angular velocity in the qth zone (where q is an integer of 1 ≦ q ≦ p). Ω _q , average linear velocity <v _q > _ave , maximum linear velocity <v _q > _max , minimum linear velocity <v _q > _min , reference clock period T _q , shortest mark time length n _{Assuming min} T _q
<V _p > _ave / <v ₁ > _ave is in the range of 1.2 to 3, and <v _q > _max / <v _q > _min is 1.5 or less,
(I) In the same zone, ω _q , T _q , α _i , β _i , Pe, Pb, and Pw are constant, and the physical length of the shortest mark n _min T _q <v _q > _ave is 0. 5 μm or less, T _q
<V _q > _ave is approximately constant for all q where 1 ≦ q ≦ p, and
m = n-1 or m = n-2,
α ₁ = 0.3 to 1.5,
α ₁ αα _i = 0.2 to 0.8 (2 i i m m),
α _i + β _i-1 = 1.0 (3 ≦ i ≦ m),
0 ≦ Pb ≦ 1.5 (mW) ,
(Ii) Pb, Pw, Pe / Pw, α _i (1 ≦ i ≦ m), β ₁ and β _m are variable for each zone, and at least α _i (i 9. The optical recording method according to claim 8, wherein at least one of 2 ≦ i ≦ m is monotonously decreased. When the maximum value of Pw in the recording area Pw _max, the minimum value and Pw _min, optical recording method of claim 9 wherein Pw _max / Pw _min ≦ 1.2. An optical recording method for recording and reproducing data by causing light having a wavelength of 600 to 680 nm to pass through an objective lens having a numerical aperture NA of 0.55 to 0.65 and collecting the light on a recording layer through a substrate,
The innermost circumference of the recording area is in the range of 20 to 25 mm in radius, the outermost circumference is in the range of 55 to 60 mm in radius, and the average linear velocity of the first zone of the innermost circumference is <v ₁ > _ave ,
The angular velocity ω _q in the q-th zone (where q is an integer of 1 ≦ q ≦ p), the average linear velocity <v _q > _ave , the maximum linear velocity <v _q > _max , the minimum linear velocity <v _q > _Assuming that _min , the reference clock period is T _q , and the time length of the shortest mark is n _min T _q ,
n is an integer of 1 to 14,
m = n-1 and
ω _q , Pb and Pe / Pw are constant regardless of the zone,
T _q <v _q > _ave is approximately constant for all q where 1 ≦ q ≦ p, and

The filling,
(I) In the first zone,
α ¹ ₁ = 0.3 to 0.8,
α ¹ ₁ αα ¹ _i = 0.2 to 0.4, which is constant regardless of i (2 ≦ i m m),
α ¹ ₂ + β ¹ ₁ 1.01.0,
Let α ¹ _i + β ¹ _i-1 = 1.0 (3 ≦ i ≦ m),
(Ii) In zone p,
α ^p ₁ = 0.3 to 0.8,
α ^p ₁ αα ^p _i = 0.3 to 0.5, which is constant regardless of i (2 ≦ i ≦ m),
^Let α ^p _i + β ^p _i-1 = 1.0 (2 ≦ i ≦ m),
(Iii) In the other zones, α ¹ _i ≦ α ^q _i ≦ α ^p _i (2 ≦ i ≦ m), and α ^q ₁ is a value between α ¹ ₁ and α ^p ₁ 11. The optical recording method according to any one of to 10. The optical recording method according to claim 11, wherein α ¹ ₁ αα ^q ₁ αα ^p ₁ (where α ¹ ₁ > α ^p ₁ ). 13. The optical recording method according to claim 11, wherein Pb, Pe / Pw, β ₁ and β _m are constant regardless of the zone, and only α ₁ and α _i (2 ≦ i ≦ m) are changed by the zone. In recording information on the optical information recording medium according to any one of claims 1 to 4,
Between the recording marks, a recording light of erasing power Pe capable of crystallizing amorphous is irradiated,
Assuming that the time length of one recording mark is nT (T is a reference clock cycle, n is an integer of 2 or more),
The time length nT of the recording mark,

(Where m is the number of pulse divisions and m = n−k, k is an integer such that 0 ≦ k ≦ 2).
Further, the _{Σ i (α i + β i} ) + η 1 + η 2 = n, η 1 is eta ₁ ≧ 0 becomes real, eta ₂ is eta ₂ ≧ 0 becomes real, and _{0 ≦ η 1 + η 2 ≦} 2.0 .
Let α _i (1 ≦ i ≦ m) be a real number satisfying α _i > 0, and β _i (1 ≦ i ≦ m) be a real number satisfying β _i > 0.
Let α ₁ = 0.1 to 1.5, β ₁ = 0.3 to 1.0, β _m = 0 to 1.5, and 2 ≦ i ≦ m where _i is 0.1 to 0.8 And is constant regardless of i.
Note that α _i + β _i-1 is in the range of 0.5 to 1.5 in i where 3 ≦ i ≦ m, and is constant regardless of i. )
Split in order of
In the time of α _i T (1 ≦ i ≦ m), the recording light of the recording power Pw of Pw ≧ Pe for melting the recording layer is irradiated, and in the time of β _i T (1 ≦ i ≦ m) Irradiates recording light of a bias power Pb such that 0 <Pb ≦ 0.2 Pe (where 0 _m can be 0 ≦ Pb ≦ Pe in β _m T),
Set m, α _i + β _i-1 (3 i i m m), α ₁ T, and α _i T (2 i i m m) constant regardless of the linear velocity, and β _m monotonously increases as the linear velocity decreases. An optical recording method characterized by changing to increase. Assuming that the maximum recording power at each recording linear velocity is Pw _max and the minimum recording power is Pw _min
Pw _max / Pw _min ≦ 1.2,
Pe / Pw = 0.4 to 0.6,
0 ≦ Pb ≦ 1.5 (mW)
The optical recording method according to claim 14, which is The optical recording method according to claim 15, wherein αα _i <0.5 n at a recording linear velocity of 5 m / s or less. The beta _m at the maximum recording linear velocity beta ^H _m, when the beta _m at the minimum recording linear velocity was set to beta ^L _m,
Β _{m at} other recording linear velocities is a value between β ^L _m and β ^H _m ,
The optical recording method according to claim 15, wherein the Pb, Pe / Pw ratio is constant regardless of the recording linear velocity. The optical recording method according to any one of the irrespective of the recording linear velocity beta _m is constant is claims 14 to 16. A method of rotating an optical information recording medium having a predetermined recording area and recording information with a plurality of mark lengths,
The recording area is divided into a plurality of zones in the radial direction, and in each zone, recording is performed at a constant linear velocity,
The ratio v _out / v _in of the recording linear velocity v _in in the innermost zone to the recording linear velocity v _out in the outermost zone is 1.2 to 2, and β _m is changed according to the linear velocity of each zone Item 19. The optical recording method according to any one of items 14 to 18. It has a predetermined recording area, and the recording area has a uniform width in the radial direction p. An optical information recording medium which is divided into zones and rotated at a constant angular velocity regardless of the radial position to record information with a plurality of mark lengths,
  A groove having a predetermined groove meandering signal is formed on the substrate, and the reference period of the groove meandering signal changes for each zone, and an average line in the qth zone (where q is an integer of 1 ≦ q ≦ p). Speed <v _q > _ave , Maximum linear velocity <v _q > _max , Minimum linear velocity <v _q > _min , Tw reference period of groove meander signal _q If you
  <V _q > _ave Tw _q Is nearly constant for all q where 1 ≦ q ≦ p,
  (<V _q > _max -<V _q > _min ) / (<V _q > _max + <V _q > _min ) Meet <1%
Optical information recording medium characterized in that. One turn of the groove is one zone, and the groove has a meandering with a constant period regardless of the zone,
  Groove pitch TP, meander cycle Tw ₀ If you do, approximately
        2π · TP = a · Tw ₀ V ₀
21. The optical information recording medium according to claim 20, wherein the relationship a is a natural number is satisfied. The recording area is divided into p zones having a predetermined recording area and a uniform width in the radial direction (where p is an integer of 200 or more), and information is rotated at a constant angular velocity regardless of the radial position. An optical information recording medium for recording a plurality of mark lengths,
  A groove having a predetermined groove meandering signal is formed on the substrate, and the reference period of the groove meandering signal changes for each zone, and an average line in the qth zone (where q is an integer of 1 ≦ q ≦ p). Speed <v _q > _ave , Tw reference period of groove meander signal _q And let <v _q > _ave Tw _q Is constant
Optical information recording medium characterized in that. A method of manufacturing a stamper to which a phase-modulated wobble signal is applied by groove meandering.
  Laser beam for photoresist exposure is meandered in the radial direction according to a wobble waveform which is binary phase-modulated between voltages of ± Vw to expose the photoresist layer formed on the glass master,
  In the above process, meandering of the laser light for photoresist exposure is performed by applying a ring modulator output wave to an EO modulator.
Method of manufacturing stamper master.