JP2002530206A5 - - Google Patents
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- Publication number
- JP2002530206A5 JP2002530206A5 JP2000583668A JP2000583668A JP2002530206A5 JP 2002530206 A5 JP2002530206 A5 JP 2002530206A5 JP 2000583668 A JP2000583668 A JP 2000583668A JP 2000583668 A JP2000583668 A JP 2000583668A JP 2002530206 A5 JP2002530206 A5 JP 2002530206A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/198,160 US6172329B1 (en) | 1998-11-23 | 1998-11-23 | Ablated laser feature shape reproduction control |
| US09/198,160 | 1998-11-23 | ||
| PCT/US1999/007066 WO2000030801A1 (en) | 1998-11-23 | 1999-03-31 | Ablated laser feature shape reproduction control |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002530206A JP2002530206A (ja) | 2002-09-17 |
| JP2002530206A5 true JP2002530206A5 (US07585860-20090908-C00154.png) | 2006-05-25 |
Family
ID=22732228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000583668A Pending JP2002530206A (ja) | 1998-11-23 | 1999-03-31 | レーザアブレーションによる特徴部形状の再生産制御 |
Country Status (9)
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19905571C1 (de) * | 1999-02-11 | 2000-11-16 | Bosch Gmbh Robert | Verfahren zur Erzeugung definiert konischer Löcher mittels eines Laserstrahls |
| JP2001071168A (ja) * | 1999-06-30 | 2001-03-21 | Canon Inc | レーザ加工方法、該レーザ加工方法を用いたインクジェット記録ヘッドの製造方法、該製造方法で製造されたインクジェット記録ヘッド |
| US6433303B1 (en) * | 2000-03-31 | 2002-08-13 | Matsushita Electric Industrial Co., Ltd. | Method and apparatus using laser pulses to make an array of microcavity holes |
| JP4659300B2 (ja) | 2000-09-13 | 2011-03-30 | 浜松ホトニクス株式会社 | レーザ加工方法及び半導体チップの製造方法 |
| US6621044B2 (en) * | 2001-01-18 | 2003-09-16 | Anvik Corporation | Dual-beam materials-processing system |
| US6627844B2 (en) * | 2001-11-30 | 2003-09-30 | Matsushita Electric Industrial Co., Ltd. | Method of laser milling |
| US6816316B2 (en) * | 2002-02-12 | 2004-11-09 | Visx, Incorporated | Smoothing laser beam integration using optical element motion |
| EP3252806B1 (en) | 2002-03-12 | 2019-10-09 | Hamamatsu Photonics K.K. | Substrate dividing method |
| TWI326626B (en) * | 2002-03-12 | 2010-07-01 | Hamamatsu Photonics Kk | Laser processing method |
| KR100749972B1 (ko) | 2002-03-12 | 2007-08-16 | 하마마츠 포토닉스 가부시키가이샤 | 가공 대상물 절단 방법 |
| US20040076376A1 (en) * | 2002-10-17 | 2004-04-22 | Pate Michael A. | Optical fiber coupler and method of fabrication |
| TWI520269B (zh) * | 2002-12-03 | 2016-02-01 | Hamamatsu Photonics Kk | Cutting method of semiconductor substrate |
| US7846152B2 (en) * | 2004-03-24 | 2010-12-07 | Amo Manufacturing Usa, Llc. | Calibrating laser beam position and shape using an image capture device |
| FR2852250B1 (fr) * | 2003-03-11 | 2009-07-24 | Jean Luc Jouvin | Fourreau de protection pour canule, un ensemble d'injection comportant un tel fourreau et aiguille equipee d'un tel fourreau |
| AU2003220847A1 (en) * | 2003-03-12 | 2004-09-30 | Hamamatsu Photonics K.K. | Laser beam machining method |
| US20040199199A1 (en) * | 2003-04-02 | 2004-10-07 | Scimed Life Systems, Inc. | Filter and method of making a filter |
| US7115211B2 (en) * | 2003-08-13 | 2006-10-03 | Tokyo Electron Limited | Endpoint detection using laser interferometry |
| US20050047892A1 (en) * | 2003-08-29 | 2005-03-03 | Bremner Ronald Dean | Laser cut apertures for thread forming fasteners |
| US7110171B2 (en) * | 2003-10-30 | 2006-09-19 | Metal Improvement Company, Llc | Relay telescope including baffle, and high power laser amplifier utilizing the same |
| DE602004031401D1 (de) * | 2003-10-30 | 2011-03-31 | L Livermore Nat Security Llc | Relay Teleskop, Laserverstärker, und Laserschockbestrahlungsverfahren und dessen Vorrichtung |
| US7291805B2 (en) * | 2003-10-30 | 2007-11-06 | The Regents Of The University Of California | Target isolation system, high power laser and laser peening method and system using same |
| US20060011617A1 (en) * | 2004-07-13 | 2006-01-19 | Ricardo Covarrubias | Automated laser cutting of optical lenses |
| US7668364B2 (en) * | 2005-04-26 | 2010-02-23 | Hitachi Via Mechanics, Ltd. | Inspection method and apparatus for partially drilled microvias |
| JP2007118585A (ja) * | 2005-09-30 | 2007-05-17 | Brother Ind Ltd | ノズルプレートの製造方法及び液滴噴射装置の製造方法 |
| US8624157B2 (en) | 2006-05-25 | 2014-01-07 | Electro Scientific Industries, Inc. | Ultrashort laser pulse wafer scribing |
| US20070282312A1 (en) * | 2006-05-31 | 2007-12-06 | Sie Ag Surgical Instrument Engineering | Ophthalmologic apparatus |
| US20080013182A1 (en) * | 2006-07-17 | 2008-01-17 | Joerg Ferber | Two-stage laser-beam homogenizer |
| US7615722B2 (en) | 2006-07-17 | 2009-11-10 | Coherent, Inc. | Amorphous silicon crystallization using combined beams from optically pumped semiconductor lasers |
| KR102209964B1 (ko) * | 2013-03-13 | 2021-02-02 | 삼성디스플레이 주식회사 | 피코초 레이저 가공 장치 |
| JP6324151B2 (ja) * | 2014-03-26 | 2018-05-16 | 住友重機械工業株式会社 | レーザ加工装置及びレーザ加工方法 |
| JP5923132B2 (ja) * | 2014-04-30 | 2016-05-24 | 住友電気工業株式会社 | レーザ加工装置用の偏光状態変換素子 |
| WO2021168213A1 (en) * | 2020-02-19 | 2021-08-26 | Elemental Scientific Lasers, Llc | Variable beam size via homqgenizer movement |
| JP2023165158A (ja) * | 2022-05-02 | 2023-11-15 | 三菱重工業株式会社 | レーザ加工装置 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4491383A (en) * | 1982-09-20 | 1985-01-01 | Centro Ricerche Fiat S.P.A. | Device for modifying and uniforming the distribution of the intensity of a power laser beam |
| DE3317022A1 (de) * | 1983-05-10 | 1984-11-15 | W.C. Heraeus Gmbh, 6450 Hanau | Materialbearbeitungsanlage |
| US4734558A (en) * | 1983-05-16 | 1988-03-29 | Nec Corporation | Laser machining apparatus with controllable mask |
| US4626652A (en) * | 1985-03-21 | 1986-12-02 | Honeywell Inc. | Method and means of removing claddings from optical fibers |
| US4733944A (en) | 1986-01-24 | 1988-03-29 | Xmr, Inc. | Optical beam integration system |
| US4923772A (en) | 1986-10-29 | 1990-05-08 | Kirch Steven J | High energy laser mask and method of making same |
| US4908493A (en) * | 1988-05-31 | 1990-03-13 | Midwest Research Institute | Method and apparatus for optimizing the efficiency and quality of laser material processing |
| US4940881A (en) | 1989-09-28 | 1990-07-10 | Tamarack Scientific Co., Inc. | Method and apparatus for effecting selective ablation of a coating from a substrate, and controlling the wall angle of coating edge portions |
| US5057664A (en) * | 1989-10-20 | 1991-10-15 | Electro Scientific Industries, Inc. | Method and apparatus for laser processing a target material to provide a uniformly smooth, continuous trim profile |
| US5091626A (en) * | 1990-02-02 | 1992-02-25 | Hadassah Medical Organization | Method for the ablative reshaping of material surfaces |
| JP2599513B2 (ja) | 1990-06-25 | 1997-04-09 | インターナショナル・ビジネス・マシーンズ・コーポレイション | アブレーション・マスク |
| JPH04270091A (ja) * | 1991-01-18 | 1992-09-25 | Nissan Motor Co Ltd | レーザ加工装置 |
| JPH05185254A (ja) * | 1991-11-20 | 1993-07-27 | Nikon Corp | レーザ加工装置 |
| DE4220705C2 (de) | 1992-06-24 | 2003-03-13 | Lambda Physik Ag | Vorrichtung zum Aufteilen eines Lichtstrahles in homogene Teilstrahlen |
| JPH06182574A (ja) * | 1992-12-22 | 1994-07-05 | Hoya Corp | レーザ加工機 |
| US5378137A (en) | 1993-05-10 | 1995-01-03 | Hewlett-Packard Company | Mask design for forming tapered inkjet nozzles |
| US5610733A (en) | 1994-02-28 | 1997-03-11 | Digital Optics Corporation | Beam-homogenizer |
| WO1997006462A1 (en) * | 1995-08-09 | 1997-02-20 | Minnesota Mining And Manufacturing Company | Rotating optical system for laser machining apparatus |
-
1998
- 1998-11-23 US US09/198,160 patent/US6172329B1/en not_active Expired - Fee Related
-
1999
- 1999-03-31 CA CA002348277A patent/CA2348277C/en not_active Expired - Fee Related
- 1999-03-31 AU AU33741/99A patent/AU3374199A/en not_active Abandoned
- 1999-03-31 JP JP2000583668A patent/JP2002530206A/ja active Pending
- 1999-03-31 KR KR1020017006468A patent/KR20010089494A/ko not_active Application Discontinuation
- 1999-03-31 EP EP99915156A patent/EP1131184B1/en not_active Expired - Lifetime
- 1999-03-31 DE DE69903973T patent/DE69903973T2/de not_active Expired - Fee Related
- 1999-03-31 WO PCT/US1999/007066 patent/WO2000030801A1/en not_active Application Discontinuation
- 1999-03-31 CN CN99813493A patent/CN1326393A/zh active Pending
