JP2002516231A5 - - Google Patents
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- Publication number
- JP2002516231A5 JP2002516231A5 JP2000550744A JP2000550744A JP2002516231A5 JP 2002516231 A5 JP2002516231 A5 JP 2002516231A5 JP 2000550744 A JP2000550744 A JP 2000550744A JP 2000550744 A JP2000550744 A JP 2000550744A JP 2002516231 A5 JP2002516231 A5 JP 2002516231A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/083,833 US6162006A (en) | 1998-05-22 | 1998-05-22 | Stackable cassette for use with wafer cassettes |
| US09/083,833 | 1998-05-22 | ||
| PCT/US1999/011188 WO1999061320A1 (en) | 1998-05-22 | 1999-05-20 | Stackable cassette for use with wafer cassettes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002516231A JP2002516231A (ja) | 2002-06-04 |
| JP2002516231A5 true JP2002516231A5 (https=) | 2006-07-06 |
Family
ID=22180987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000550744A Pending JP2002516231A (ja) | 1998-05-22 | 1999-05-20 | ウェハカセットとともに用いる積み重ね可能なカセット |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6162006A (https=) |
| EP (2) | EP1876640A2 (https=) |
| JP (1) | JP2002516231A (https=) |
| KR (1) | KR20010043728A (https=) |
| TW (1) | TW432579B (https=) |
| WO (1) | WO1999061320A1 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4253189B2 (ja) * | 2001-02-16 | 2009-04-08 | 周司 宮崎 | 半導体評価装置のユーザインターフェース |
| KR100426810B1 (ko) * | 2001-03-21 | 2004-04-08 | 삼성전자주식회사 | 웨이퍼 캐리어 |
| DE10120701A1 (de) * | 2001-04-27 | 2002-10-31 | Infineon Technologies Ag | Verfahren zur Steuerung eines Prozeßgerätes zur sequentiellen Verarbeitung von Halbleiterwafern |
| JP3757844B2 (ja) * | 2001-10-19 | 2006-03-22 | ソニー株式会社 | 半導体製造方法 |
| US6756243B2 (en) * | 2001-10-30 | 2004-06-29 | Advanced Micro Devices, Inc. | Method and apparatus for cascade control using integrated metrology |
| US8440048B2 (en) | 2009-01-28 | 2013-05-14 | Asm America, Inc. | Load lock having secondary isolation chamber |
| US8587331B2 (en) * | 2009-12-31 | 2013-11-19 | Tommie E. Berry | Test systems and methods for testing electronic devices |
| EP2538713B1 (en) | 2011-06-24 | 2014-08-06 | Alcatel Lucent | Performing measurements in a digital cellular wireless telecommunication network |
| DE102017204910B4 (de) | 2017-03-23 | 2018-10-04 | Singulus Technologies Ag | Trägerkassette und Trägerkassettenstapel |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4775281A (en) * | 1986-12-02 | 1988-10-04 | Teradyne, Inc. | Apparatus and method for loading and unloading wafers |
| US5217340A (en) * | 1989-01-28 | 1993-06-08 | Kokusai Electric Co., Ltd. | Wafer transfer mechanism in vertical CVD diffusion apparatus |
| DE4024973C2 (de) * | 1990-08-07 | 1994-11-03 | Ibm | Anordnung zum Lagern, Transportieren und Einschleusen von Substraten |
| US5685684A (en) * | 1990-11-26 | 1997-11-11 | Hitachi, Ltd. | Vacuum processing system |
| DE59611078D1 (de) * | 1995-03-28 | 2004-10-14 | Brooks Automation Gmbh | Be- und Entladestation für Halbleiterbearbeitungsanlagen |
| JP3654684B2 (ja) * | 1995-05-01 | 2005-06-02 | 東京エレクトロン株式会社 | 処理方法及び処理装置 |
| JP3507587B2 (ja) * | 1995-06-09 | 2004-03-15 | 東京エレクトロン株式会社 | 熱処理装置 |
| DE19540963C2 (de) * | 1995-11-03 | 1999-05-20 | Jenoptik Jena Gmbh | Transportbehälter für scheibenförmige Objekte |
| US5940175A (en) * | 1996-11-01 | 1999-08-17 | Msp Corporation | Method and apparatus for surface inspection in a chamber |
-
1998
- 1998-05-22 US US09/083,833 patent/US6162006A/en not_active Expired - Lifetime
-
1999
- 1999-05-20 JP JP2000550744A patent/JP2002516231A/ja active Pending
- 1999-05-20 KR KR1020007013047A patent/KR20010043728A/ko not_active Abandoned
- 1999-05-20 EP EP07019695A patent/EP1876640A2/en not_active Withdrawn
- 1999-05-20 TW TW088108262A patent/TW432579B/zh not_active IP Right Cessation
- 1999-05-20 WO PCT/US1999/011188 patent/WO1999061320A1/en not_active Ceased
- 1999-05-20 EP EP99925708A patent/EP1129010A4/en not_active Withdrawn